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Global Plasma Solutions




: , , , MEMS,

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Global Plasma Solutions


?


Global Plasma Solutions
, , , ..

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,
.
,
, , .

, .

, .

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?
Sourc e of
Ele c trons

EM Fie ld
photons h

a tomic
ioniza tion

e le c tronic
e xc ita tion

vibra tiona l
e xc ita tion

rota tiona l
e xc ita tion
Pla sma

Bounda ry
la ye r

Tre a te d
Surfa c e

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SBIT

high

medium

low

low

high

high

high

medium

high

low

medium

medium

medium

high

low

high

low

medium

high

low

high

high

low

very low

very high


()

low

good

low

good

good

large

medium

medium

large

small

limited

limited

good

good

good

low

good

good

good

no

yes

yes

no

no

yes

no

no

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Doping

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10

Phinodal

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700
0,5 /
25 /

> 70

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11

1000
0,5 /
20 /

> 70



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12

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900
0,2 /
20 /

60

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13

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900
0,2 /
20 /

60

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14

1000
0,2 /
25 /

60



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15

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800
6 / + 0.1 /
20 /

72

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16

inox

quartz

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800 /

0,3 0,5
20 /

72 105

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17

(PR)

PR

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800
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20 /
+

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18

BGA

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800
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25 /

72

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Global Plasma Solutions


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Global Plasma Solutions
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20


(, , ,
, , .)

, ,
over-molding,

...

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21

800
0.2 /
20 /

72
2

1200 2500 (
)
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22

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23

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120

0,3
10 /

60

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24

PTFE

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ceramic

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25

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26

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27

()

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Global Plasma Solutions


?


Global Plasma Solutions
, , , ..

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30

MonoJet: ( 30)
MonoJet-Light: ( 15 )
MultiJet-70: (~ 70 )
MultiJet-900: ( )
PlasmaChannel: ,
, ..

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31

MonoJet

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32

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33

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34

MonoJet-Light

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35

MultiJet

5
(100 - 1000
/)
~ 70 mm

: , N2, .
> 3 /

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36

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Global Plasma Solutions


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Global Plasma Solutions
, , , ..

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38

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39

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40

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41

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42

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43



,

: 220-50


(, ,
)
( )
( <10 )
( 10 / )
(, ,
, )

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VOC

EMC

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