Index

1. Introduction 2. Objective 3. Scope 4. Working 5. Applications 6. Advantages 7. Disadvantages 8. Current Challenges 9. References 10.Conclusion 11.Questions 12.Thank You

1. Introduction 1.1Why MEMS 1.2What MEMS Technology 2. Technology 3.Applications 4.Advantages 5.Disadvantages 6.Current Challenges 7.Biblogrfy 8.Conclusion

What is MEMES Technology

a. MEMS stands for Micro Electro Mechanical Systems. b. (M)icro(E)lectric(M)echanical(S)ystems c. Consist of mech (structures, sensors, actuators), electronics, integrated onto same chip d. Transducer = Sensor / Actuator e. Smart sensors

Application
a. Earthquake Detection and Gas Shutof b. Machine Health c. Shock and Tilt Sensing d. Secure Communication e. Inkjet printers f. Electronic Device

Advantages
1. Very small size, mass, volume 2. Very low power consumption 3. Low cost 4. Easy to integrate into systems or modify 5. Small thermal constant 6. Can be highly resistant to vibration, shock and radiation 7. Batch fabricated in large arrays 8. Improved thermal expansion tolerance 9. Parallelism