Sheet1

Quality of Vacuum
Quality
Atmospheric Pressure
Low Vacuum
Medium Vacuum
High Vacuum
Ultra High Vacuum
Extremely High Vacuum
Perfect Vacuum

Torr
760
760
25
10-3
10-9

to
to
to
< 10-12
0

25
10-3
10-9
10-12

Pa
1013000
1013000 to
3000
to
0.1 to
10-7
to
< 10-10
0

Page 1

Milli bar
0.01013
3000 0.01013 to
0.1
30
to
0.001
10-7
0.001
to
10-9
10-10
10-9
to
10-12
-12
< 10
0