ISO 14644

ISO 14644 Standards were rst formed from the US 1 Part 1:

Classication of air
Federal Standard 209E Airborne Particulate Cleanliness
cleanliness
Classes in Cleanrooms and Clean Zones. The need for
a single standard for cleanroom classication and testing
was long felt. After ANSI and IEST petitioned to ISO ISO 14644-1 covers the classication of air cleanliness
for new standards, the rst document of ISO 14644 was in cleanrooms and associated controlled environments.
Classication in accordance with this standard is specipublished in 1999, ISO 14644-1.[1]
ed and accomplished exclusively in terms of concentraIn 2000, ISO 14644-2 was published, which began the
tion of airborne particulates.[6] The document was subprocess of FED-STD-209E being canceled. On Novemmitted as an American National Standard and has been
ber 29, 2001, the document was canceled and superseded
adopted as ANSI/IEST/ISO 14644-1:1999 in the United
[2]
by ISO 14644-1 and ISO 14644-2.
States, following the cancellation of FED-STD-209E.[6]
ISO 14644 is now composed of

2 Part 2: Specications for testing

and monitoring to prove continued compliance with ISO 146441

ISO 14644-1: Classication of air cleanliness[3]

ISO/DIS 14644-1.2(2014): Classication of air
cleanliness by particle concentration[4]

ISO 14644-2: Specications for testing and monitoring to prove continued compliance with ISO
Part 2 species requirements for periodic testing of a
14644-1[3]
cleanroom or clean zone to prove its continued compli ISO/DIS 14644-2.2(2014):Monitoring to provide ance with ISO 14644-1 for the designated classication
evidence of cleanroom performance related to air of airborne particulate cleanliness. It also species requirements for the monitoring of a cleanroom or clean
cleanliness by particle concentration[5]
zone (installation) to provide evidence of its continued
compliance with ISO 14644-1 for the designated classi ISO 14644-3: Test Methods[3]
cation of airborne particulate cleanliness.[7] It became an
ISO 14644-4: Design, Construction, and Start-up[3] International Standard following the cancellation of FEDSTD-209E. In the United States in 2000 it was adopted
[3]
as ANSI/IEST/ISO 14644-2:2000.[7]
ISO 14644-5: Operations
ISO 14644-6: Vocabulary[3]

3 Part 3: Test Methods

ISO 14644-7: Separative devices (clean air hoods,

gloveboxes, isolators and minienvironments[3]

ISO 14644-8: Classication of airborne molecular This part species test methods for designated classication of airborne particulate cleanliness and for characcontamination[3]
terizing the performance of cleanrooms and clean zones.
ISO 14644-9: Classication of surface particle These test methods are specied in the document for two
dierent types of cleanrooms and clean zones; unidireccleanliness[3]
tional ow and nonunidirectional ow.[8]
ISO 14644-10: Classication of Surface Cleanliness The most important objectives of this highly referenced
by Chemical Concentration
document are to provide an internationally common basis of measurement and evaluation of cleanrooms and,
ISO 14644-12: Classication of Air Cleanliness by at the same time, not to prevent the introduction of new
Nanoscale Particle Concentration
technologies.[8]
1

9 PART 9: CLASSIFICATION OF SURFACE PARTICLE CLEANLINESS

Part 4: Design, construction and

start-up

and approval of separative devices in those respects where

they dier from cleanrooms as described in Parts 4 and 5.
Separative devices range from open to closed systems.[12]

This part species requirements for the design and con- The limitations are:
struction of cleanroom and clean air devices, as well as
requirements for start-up and qualication, but does not
Application-specic
requirements
are
not
prescribe specic technological nor contractual means
addressed.[12]
to meet the requirements. This document is intended
for purchasers, suppliers, and designers of cleanroom
User requirements are as agreed by customer and
installations.[9] It was submitted as an American National
supplier.[12]
Standard in 2001.[9]

Specic processes to be accommodated in the separative device installation are not specied.[12]

Part 5: Operations

ISO 14644-5 provides the basic requirements for operating and maintaining cleanrooms and associated controlled environments. This standard addresses requirements that are basic to the operation of all cleanrooms,
regardless of the application. Topics include:[10]

Fire, safety and other regulatory matters are not considered specically; the appropriate national and local requirements shall be respected.[12]
Full-suits are not within the scope of this
standard.[12]

Operational systems that must be in place[10]

This part was published as an International Standard in

Selection and use of appropriate cleanroom 2004. The document was submitted as an American Nagarments[10]
tional Standard and has been adopted as ANSI/IEST/ISO
14644-7:2004.[12]
Training and monitoring of personnel and
activities[10]
Installation and use of equipment[10]
Requirements
cleanroom[10]

for

materials

used

in

the

8 Part 8: Classication of airborne

molecular contamination

Maintaining the cleanroom environment in a clean,

This part of ISO 14644 covers the classication of airusable condition conforming to design standards.[10]
borne molecular contamination (AMC) in cleanrooms
and associated controlled environments, in terms of airThis part was published as an International Standard in
borne concentrations of specic chemical substances (in2004. The document was submitted as an American Nadividual, group or category) and provides a protocol to
tional Standard and has been adopted as ANSI/IEST/ISO
include test methods, analysis and time-weighted factors
14644-5:2004 in the United States.[10]
within the specication for classication.[13]

Part 6: Vocabulary

This part is an important document for any contamination control professional. This document describes all the
terms and denitions in ISO 14644 and ISO 14698. In
March 2008 this ISO Standard recently became an American National Standard.[11]

Part 7: Separative devices (clean

air hoods, gloveboxes, isolators
and minienvironments)

This document became a Standard in 2006. It was developed by the Secretariat of ISO Technical Committee
209, IEST.[13]

9 Part 9: Classication of surface

particle cleanliness
This ISO document describes the classication of the
particle contamination levels on solid surfaces in cleanrooms and associated controlled environments applications. Recommendations on testing and measuring methods as well as information about surface characteristics
are given in informative annexes.[14]

This part of ISO 14644 species the minimum require- It is currently a Committee Draft and is not yet available
ments for the design, construction, installation, testing as a Standard.[14]

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See also

ISO 14000 environmental management standards exist to help organizations minimize how their
operations negatively aect the environment (cause
adverse changes to air, water, or land) and comply
with applicable laws and regulations
Application to cleanrooms

11

References

[1] ISO 14644 History. TSS, Inc. 2007-12-03. Archived

from the original on 2007-12-30. Retrieved 2008-01-17.
[2] FED-STD-209E Cancellation. IEST. 2007-12-03. Retrieved 2008-01-17.
[3] ISO 14644 Standards. IEST. 2007-12-03. Retrieved
2008-01-17.
[4] ISO 14644-1. IEST. 2014-09-23. Retrieved 2014-0923.
[5] ISO 14644-2. IEST. 2014-09-23. Retrieved 2014-0923.
[6] ISO 14644-1 Scope. IEST. 2007-12-03. Retrieved
2008-01-17.
[7] ISO 14644-2 Scope. IEST. 2007-12-03. Retrieved
2008-01-17.
[8] ISO 14644-3 Scope. IEST. 2007-12-03. Retrieved
2008-01-17.
[9] ISO 14644-4 Scope. IEST. 2007-12-03. Retrieved
2008-01-17.
[10] ISO 14644-5 Scope. IEST. 2007-12-03. Retrieved
2008-01-17.
[11] ISO 14644-6 Scope. IEST. 2007-12-03. Retrieved
2008-01-17.
[12] ISO 14644-7 Scope. IEST. 2007-12-03. Retrieved
2008-01-17.
[13] ISO 14644-8 Scope. IEST. 2007-12-03. Retrieved
2008-01-17.
[14] ISO 14644-9 Scope. IEST. 2007-12-03. Retrieved
2008-01-17.

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External links

http://www.iest.org
http://www.ansi.org
http://www.iso.org
http://www.cleanrooms.com

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TEXT AND IMAGE SOURCES, CONTRIBUTORS, AND LICENSES

Text and image sources, contributors, and licenses

Text

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