MEMS Introduction

MICRO SYSTEMS
POTENTIAL & HISTORY

Mohamed A. Elsheikh
Assistant Professor
Electronics and Communications Department
Ain Shames University
mohamed.elsheikh@eng.asu.edu.eg
Let s set the stage Why are we here?

Why Electronics ?
What are MEMS ?
MEMS World wide

MEMS History
Microelectronics & MEMS in Egypt
M. A. Elsheikh
MEMS Potential & History
Why Electronics ?!
Electronic systems worth more than 1.4 T$
Bigger than steel and auto combined in US
Accounts for 1/3 GDP of Asian tigers
Enabling engine for the world economy
M. A. Elsheikh
The Electronics Industry

Enabling Engine for the World Economy !
World GWP 54 T in 2011
Components enable electronic

systems and modules
Electronic systems and modules
enable auto, defense, medical, ICT
Systems
Medical, defense, ICT, auto, enable
transport, health, ICT, security
services
Microelectronics has occupied a central position for many decades as

the
enabling engine of the world economy
M. A. Elsheikh
Business Patterns in the Electronics Industry

Systems Companies
Nokia, Sony, Cisco
Integrated Device Manufacturers (IDMs)

ST microelectronics, NEC
Pure-Play Silicon Foundries

TSMC, Global foundries, UMC, SMIC
Fabless Integrated Circuits Companies

Qualcom, Broadcom, etc
IP Providers
ARM, Artisan, Rambus, MIPS
Design Service Companies

Wipro, Faraday
EDA Companies
Synopsys, Cadence, Mentor Graphics
Electronic Manufacturing Service (EMS) Companies (Contract Manufacturing)
Foxconn (50 B), Flextronics (35 B, 2% Profit),
M. A. Elsheikh
Industrial Phases in Electronics Industry

Product/System definition and design
Silicon Wafers
IC design
IC manufacturing
High added value
IC packaging/testing
PCB design
EMS
PCB manufacturing
System assembly
Labor intensive
M. A. Elsheikh
Semiconductor Industry Makeup
Microprocessors, dominated by US companies account for 24% of the whole semi industry
Memory, dominated by Pac Rim companies account for 19% of the whole semi industry
O-S-D markets are growing much faster than IC markets. In the period 2012-2017 the CAGR
for ICs was 1.7% whereas for the O-S-D markets it was 7.4%
M. A. Elsheikh
What are MEMS ?

MEMS acronym which stands for Micro-Electro-MechanicalSystems was adopted in 1989 in an IEEE workshop on Micro
Robotics.
MEMS are more commonly referred to as Microsystems in Europe
or Micro-machines in Japan.
MEMS is a miniature system or subsystem involving one or more
micro-machined components and often integrating other functions
on the same chip or in the same package such as electronics, optics,
RF, etc.
Packaged MEMS- Human eye scale
MEMS motor
M. A. Elsheikh
A grain of sand !
MEMS Applications
MEMS are everywhere
M. A. Elsheikh
Why MEMS ?
New function
More robust
More precise
Better
Cheaper
More Reliable
Smaller
M. A. Elsheikh
Mass
Production
Integration
of functions
10
What size are MEMS ?
MEMS
M. A. Elsheikh
11
MEMS Market
M. A. Elsheikh
12
Top Companies 2011
M. A. Elsheikh
13

Why Electronics ?
What is MEMS ?
MEMS World wide

MEMS History
M. A. Elsheikh
14
1947 Invention of the Point Contact Transistor
A transistor uses electrical current or a small amount of voltage to control a

larger change in current or voltage.
Transistors are the building blocks of computers, cellular phones, and all other
modern electronics.
In 1947, William Shockley, John Bardeen, and

Walter Brattain of Bell Laboratories built the first
point-contact transistor.
The first transistor used

semiconductor chemical .
It demonstrated the capability of building

transistors with semiconductor materials.
germanium,
First Point Contact Transistor and

Testing Apparatus (1947)
[Photo Courtesy of The Porticus Centre]
M. A. Elsheikh
15
1954 Discovery of the Piezoresistive Effect in Silicon and Germanium
Discovered in 1954 by C.S. Smith.
The piezoresistive effect of semiconductor can be

several magnitudes larger than that in metals.
This discovery showed that silicon and germanium

could sense air or water pressure better than metal
Many MEMS devices such as strain gauges, pressure

sensors,
and
accelerometers utilize the
piezoresistive effect in silicon.
Strain gauges began to be developed commercially in

1958.
Kulite was founded in 1959 as the first commercial

source of silicon strain gages .
An Example of a Piezoresistive Pressure
Sensor
[MTTC Pressure Sensor]
M. A. Elsheikh
16
1958 Invention - First Integrated Circuit (IC)
Prior to the invention of the IC there were limits on

the size of transistors. They had to be connected to
wires and other electronics.
An IC includes the transistors, resistors, capacitors,

and wires.
In 1958, Jack Kilby from Texas Instruments built a

"Solid Circuit on one germanium chip: 1 transistor,
3 resistors, and 1 capacitor.
Shortly after
Robert Noyce from Fairchild
Semiconductor made the first "Unitary Circuit on a
silicon chip.
Texas Instrument's First Integrated Circuit

[Photos Courtesy of Texas Instruments]
The first patent was awarded in 1961 to Robert

Noyce.
M. A. Elsheikh
17
1959 "There's Plenty of Room at the Bottom"
Richard Feynmans Theres Plenty of Room at the Bottom

was presented at a meeting of the American Physical Society
in 1959.
The talk popularized the growth of micro and nano

technology.
He was interested in denser computer circuitry, and

microscopes which could see things much smaller than is
possible with scanning electron microscopes.
He challenged his audience to design and build a tiny motor

or to write the information from a page of a book on a
surface 1/25,000.
Richard Feynman on his bongos

Photo credit: Tom Harvey
For each challenge, he offered prizes of $1000.
Foresight Nanotech Institute has been issuing the Feynman

Prize in Nanotechnology each year since 1997.
M. A. Elsheikh
18
1968 The Resonant Gate Transistor Patented
In 1964, Harvey Nathanson from Westinghouse produced the first batch

fabricated MEMS device.
This device joined a mechanical component with electronic elements and was
called a resonant gate transistor (RGT).
The RGT was a gold resonating MOS gate structure.
It was approximately one millimeter long and it

responded to a very narrow range of electrical
input signals.
It served as a frequency filter for ICs.
The RGT was the earliest demonstration of

micro electrostatic actuators.
It was also the first demonstration of surface

micromaching techniques.
M. A. Elsheikh
Resonant Gate Transistor
19
1971 The Invention of the Microprocessor
In 1971, Intel publicly introduced the world's first single chip microprocessor The Intel 4004
It powered the Busicom calculator
This invention paved the way for the personal computer
The Intel 4004 Microprocessor

[Photo Courtesy of Intel Corporation]
M. A. Elsheikh
Busicom calculator
[Photo Courtesy of Intel Corporation]
20
1960's and 1970s Bulk-Etched Silicon Wafers as Pressure Sensors
"Electrochemically Controlled Thinning of Silicon" by H. A. Waggener illustrated

anisotropic etching of silicon (removes silicon selectivity).
This technique is the basis of the bulk micromachining process.
Bulk micromachining etches away the bulk of the silicon substrate leaving behind
the desired geometries.
In the 1970's, a micromachined pressure sensor using a silicon diaphragm was

developed by Kurt Peterson from IBM research laboratory.
Thin diaphragm pressure sensors were proliferated in blood pressure monitoring

devices .
Considered to be one of the earliest commercial successes of microsystems devices.
M. A. Elsheikh
21
Early MEMS Devices
HP Inkjet Nozzle (1979)
Rotary Electrostatic Motor (1988)
Lateral Comb Drive

Actuator (1989)
M. A. Elsheikh
22
1993 Multi-User MEMS Processes (MUMPs) Emerges

In 1993 Microelectronics Center of North Carolina (MCNC) created MUMPs:
A foundry meant to make microsystems processing highly accessible and cost
effective for a large variety of users
For a nominal cost, MUMPs participants are given a 1 cm2 area for their own
design.
In 1998, Sandia National Labs developed SUMMiT IV (Sandia Ultra-planar, Multilevel MEMS Technology 5)
This process later evolved into the SUMMiT V, a five-layer polycrystalline silicon
surface micromachining process
Two simple structures using the MUMPs process [MCNC]
M. A. Elsheikh
A MEMS device built using SUMMiT IV

[Sandia National Laboratories]
23
1993 First Manufactured Accelerometer
In 1993 Analog Devices were the first to produce a surface micromachined

accelerometer in high volume.
The automotive industry used this accelerometer in automobiles for airbag

deployment sensing.
It was sold for $5 (previously, TRW macro sensors were being sold for about
$20).
It was highly reliable, very small, and very inexpensive.
It was sold in record breaking numbers which increased the availability of

airbags in automobiles.
M. A. Elsheikh
24
Late 1990's, Early 2000's BioMEMS

Scientists are combining sensors and actuators with emerging
biotechnology.
Applications include
drug delivery systems

insulin pumps (see picture)
DNA arrays
lab-on-a-chip (LOC)
Glucometers
neural probe arrays
microfluidics
Insulin pump [Debiotech, Switzerland]
M. A. Elsheikh
25
Historical Summary Highlights

Since the invention of the transistor, scientists have been trying to
improve and develop new micro electro mechanical systems.
MEMS technology inherits from ICs technology the planar and
batch production techniques.
Building MEMS involve either deposition of multiple layers

(Surface micromachining) or engraving the structure within the
substrate (Bulk micromachining)
The first MEMS devices are pressure monitoring and inertial
sensors.
Multi-Project Wafer (MPW) processes like MUMPs and SUMMIT
allow small players to penetrate to the MEMS market.
M. A. Elsheikh
26

Why Electronics ?
What is MEMS ?
MEMS World wide

MEMS History
M. A. Elsheikh
27
ICs Companies in Egypt
MIPE
X
2003
M. A. Elsheikh
2007
2011
28
Non Profit Organizations and Activities: EITESAL

EITESAL stands for The Egyptian Information Telecommunications,
Electronics & Software Alliance.
NGO (Non-Governmental Organization) founded in 2004
representing the entire Egyptian ICTE industry.
Eitesal has over 360 ICTE companies in Egypt working in the areas :
Electronics
Software
System Integration
Consultancy
Call Center Services.
M. A. Elsheikh
- Telecommunications
- Training
- Content
- Outsourcing
29
Non Profit Organizations and Activities: VLSI Egypt

Vision
Establishing a dynamic environment for the electronic engineers and interested entities in
order
to help the advancement of the VLSI field in Egypt
Mission
1.
Develop methods to share technical knowledge between members of this society
2.
Attract young engineers/scientists to do Electronics design/research
3.
Link Electronics designers/researchers with local and international Electronics companies
4.
Attract more Industry/Governmental funding for Electronics research projects
5.
Identify relevant Electronics projects that serves the region's development needs
6.
Propose and hold symposia/forums/competitions relevant to the electronics field
7.
Organize training sessions/events locally and abroad
8.
Help support necessary facilities to conduct Electronics research in the MENA region
EITESAL and VLSI Egypt have agreed to join forces starting October 2013
M. A. Elsheikh
30
MEMS Summer School

Students were divided into two groups, each group was
given a specific design project of a MEMS device
(Accelerometer & Gyroscope) and they were required to
give project presentations at the end of the program
A student working on his

Finite Element model
Students working on their

projects in the Cleanroom
A student working on the

network analyzer to
obtain a response curve
31
Ain Shams University: ICL Lab: Members
Hany Ragai
Hisham Haddara
Professor
Professor
Professor
Professor
Professor
Ph.D. Grenoble U & INPG (1980)

FUE, MEMScAP, Mentor, KSU
8 Ph.D. & 40 M.Sc. supervision
1 book, 25 journal, 105 conf
Ph.D. INPG (1988)

Si-ware, MEMScAP, Mentor
4 Ph.D. & 33 M.Sc. supervision
4 patents
(ON LEAVE)
Ph.D. U Waterloo (1995)

Mentor, MEMScAP
32 M.Sc. supervision
1 book, 1 art, 7 journal, 37 conf
3 patents
Ph.D. U Paris VI (2001)

Mentor, MEMScAP, U Paris VI
1 book ch, 5 journal, 52 conf
2 patents
Ph.D. UCLA (2002)

Intel, SysDsoft, Ericsson
1 patent
DiaaEldin Khalil Mohamed Elnozahi
Sameh Ibrahim
Ayman Ismail Mohamed Elsheikh
Khaled Sharaf Mohamed Dessouky
Emad Hegazi
Assistant Professor
Assistant Professor
Assistant Professor
Assistant Professor
Assistant Professor

Si-ware, Gennum
3 patents

Si-ware
1 journal, 15 conf
Ph.D. Northwestern U (2008)

Intel
3 journal, 10 conf
4 patents
Ph.D. Texas A&M U (2010)

Marvell
8 journal, 8 conf
1 patents
Ph.D. UCLA (2009)

Marvell
1 journal, 3 conf
M. A. Elsheikh
32
ICL Research Interests

Design Automation
Solar Cells
Applications
Power
Management
Circuits
Energy
Scavenging
Circuits
Analog/Mixed-Signal
Circuits & Systems
Biomedical
Circuits & Systems
MEMS
Sensors
PHY
Design
Sensor
Interface
Circuits
WSN
Applications
Serial Links
Design
ADC
Design
RF &
mm-Wave
Circuits
UWB
Circuits
f
M. A. Elsheikh
33
QUESTIONS & DISCUSSIONS

Email: mohamed.elsheikh@eng.asu.edu.eg
34

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MICRO SYSTEMS

POTENTIAL & HISTORY

Let s set the stage Why are we here?

MEMS World wide

MEMS Potential & History

Bigger than steel and auto combined in US

Accounts for 1/3 GDP of Asian tigers

Enabling engine for the world economy

MEMS Potential & History

The Electronics Industry

World GWP 54 T in 2011

Components enable electronic

Microelectronics has occupied a central position for many decades as

MEMS Potential & History

Business Patterns in the Electronics Industry

Integrated Device Manufacturers (IDMs)

Pure-Play Silicon Foundries

Fabless Integrated Circuits Companies

Design Service Companies

Electronic Manufacturing Service (EMS) Companies (Contract Manufacturing)

Foxconn (50 B), Flextronics (35 B, 2% Profit),

MEMS Potential & History

Industrial Phases in Electronics Industry

High added value

MEMS Potential & History

Semiconductor Industry Makeup

MEMS Potential & History

What are MEMS ?

Packaged MEMS- Human eye scale

MEMS Potential & History

MEMS Potential & History

MEMS Potential & History

What size are MEMS ?

MEMS Potential & History

MEMS Potential & History

Top Companies 2011

MEMS Potential & History

Let s set the stage Why are we here?

MEMS World wide

MEMS Potential & History

1947 Invention of the Point Contact Transistor

A transistor uses electrical current or a small amount of voltage to control a

In 1947, William Shockley, John Bardeen, and

The first transistor used

It demonstrated the capability of building

First Point Contact Transistor and

MEMS Potential & History

1954 Discovery of the Piezoresistive Effect in Silicon and Germanium

Discovered in 1954 by C.S. Smith.

The piezoresistive effect of semiconductor can be

This discovery showed that silicon and germanium

Many MEMS devices such as strain gauges, pressure

Strain gauges began to be developed commercially in

Kulite was founded in 1959 as the first commercial

MEMS Potential & History

1958 Invention - First Integrated Circuit (IC)

Prior to the invention of the IC there were limits on

An IC includes the transistors, resistors, capacitors,

In 1958, Jack Kilby from Texas Instruments built a

Texas Instrument's First Integrated Circuit

The first patent was awarded in 1961 to Robert

MEMS Potential & History

1959 "There's Plenty of Room at the Bottom"

Richard Feynmans Theres Plenty of Room at the Bottom