MEMS and Matlab Metrology

MetroloGT for Matlab Joe Ceremuga

MetroloGT++ Austin Chen
2-D Edge Inspection with Matlab Meghan Shilling

9/24/2004

MetroloGT Toolbox for Matlab

9/24/2004

Purpose
Input 2-D and 3-D coordinate point clouds
Allow the user to manipulate the point cloud
Fit primitive shapes to the data
Analyze fit and then refine the data for further fitting

9/24/2004

Procedure

Software

part is
manufactured
select/load
points

initial guess

minimize

inspection

point cloud

shape
parameters

fit analysis

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Software Layout

Post-Process
Window

Point Cloud
Editor

Fit
Results

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Fit Parameters
and
Options
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Features

Point Cloud Editor

Selection
Box

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Features

Initial Guessing (Bounding box)

Bounding
Box

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Features

Fit Analysis

Histogram

Standard Deviation
of Errors

Mean of Errors

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Optimized Fit
Parameters

Features

N-Sigma elimination

Point
Elimination
Info

Points Eliminated
(red)

N-Sigma
Adjustment
Control

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Features

Quantile-Quantile (QQ) Plotting

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Features

Cloud options
Multiple clouds per session
Load (2-D, 3-D, Veeco format)
Create (Editor and N-Sigma)
Erase
Save

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MetroloGT++

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MetroloGT++

shape
parameters

output
window

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visualization
window

histogram

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1) start

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2) load and select points

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3a) initial guess

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3b) minimum bounding box (hidden)

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4) fit primitive

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2-D Edge Detection

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Two Dimensional Analysis

Fit two dimensional data to

lines, circles and ellipses
If data was taken from the
surface of an object, edges
need to be found

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Edge Location

Image
Creation
Edge Point
Location:
Sweeping

Binarization

Edge
Analysis

Filtering
Edge
Detection

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Thresholding

Edge Point
Location:
Contour
Tracking

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Initial Point Cloud

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Filtered Image

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Edges from Edge Detector

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Resulting Edge Points

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