Qox − Qss

VF B − φms = − (1)
Cox
p
4qSi φf (NA − ND )
VT = VF B + 2φf ± + for p-type, − for n-type (2)
Cox

∆Ψ = VGB − φms = ∆Ψox + ∆ΨSi (3)

Qox + Qss q(−NA + ND )zd Qinv Qacc
∆Ψox =− − − − (4)
Cox Cox Cox Cox
q(−NA + ND )zd2
∆ΨSi = − (5)
2Si
Using the at band voltage expression (eqn. 1), we nd the usefull expression
q(−NA + ND )zd Qinv Qacc q(−NA + ND )zd2
VGB − VF B = − − − − (6)
Cox Cox Cox 2Si

In accumulation , zd = 0, and Qinv = 0, VGB determines Qacc :

Qacc = −(VGB − VF B )Cox (7)

In depletion , Qacc = 0, and Qinv = 0: VGB determines zd and Qdep . The calculation of zd is given in
exercice 2.

Qdep = q(−NA + ND )zd (8)

s !
Si 2
2(VGB − VF B )Cox
zd = −1 + 1+ (9)
Cox q(NA − ND )Si
(10)

In inversion , Qacc = 0, zd is xed, VGB determines Qinv :

s
4εSi φf
zd = (11)
q(NA − ND )

Qinv = −(VGB − VT )Cox (12)

∆ΨSi = 2φf (13)

The capacitance is given by

dQ
C= (14)
dVGB
 Potential
ψ

M O S

ψ
VGB − φms ox
ψs

0 zd z

Figuur 1: Notations

electron
energy Ec

Ei = − q ψ
φ
f
Ef = − q Φ f
Ev

Φf −Ψ

Figuur 2: Notations: Ei = −qψ is a convenient denition of ψ to be able to write n = ni e Vtherm and

Ψ−Φf

p = ni e Vtherm
.