The Anti-Gravity

MicroMachine
 What are Micromirrors?
• Change the angle of a reflected beam in
multiplexing and de-multiplexing of
optical signals
• Very precise and flawless
• Aim: raise the mirror to the desired
angle
Mirror Animation
 The Problem
• Vertical lift cannot be obtained through
horizontal movement
• Fabrication process leads the mirror to
sag down

Fixed Lever Applied

Mirror Force
Hinge

Wafer
 The Solution
• Provide initial lift to the mirror

Fixed
Hinge Mirror Lever Applied
Force

Wafer
 Thermal Actuators
• Make use of differing arm thickness to
provide movement
• Problem: using the principles described,
it is difficult to obtain vertical movement
 Vertical Thermal
Actuators
• Design 1: Built to provide a downward
motion but is overdriven; when current
is removed the actuator snaps up

Poly 0

Poly 1 2
20
Poly 2
 More
Vertical Thermal
Actuators
• Design 2: Provides upward motion
through the use of thin flexible
connectors

Poly 0

Poly 1 2
20
Poly 2
 Even More
Vertical Thermal
Actuators
• Design 3: U-shaped designed to
prevent thicker arm from conforming

Poly 0
2
Poly 1

Poly 2
20
Thermal Actuator
Animation
 Levers
• Design 4: Downward Vertical Thermal
Actuator is used to create lift by
pressing down on one end of a lever

Poly 0

Poly 1 Mirror Hinge Lever Thermal

Actuator
Poly 2

Poly0
 More Levers
• Design 5: Flexible connector used to
transfer downward force of Vertical
Thermal Actuator to a lever

Mirror Hinge Lever Thermal

Actuator

Poly 0 Poly0

Poly 1

Poly 2
Lever Animation
 Linear Stepper Motor
• Makes use of 2 banks of horizontal
thermal actuators to provide a drive
mechanism
 Staple Hinge
Rotating
Bar

Staple

Poly 0

Poly 1

Poly 2

Staple Hinge
 Staple Hinge Issues

Poly 0

Poly 1 Rotating bar

Poly 2 Applied
Force

Rotating bar
 Torsion Hinge
• Thin flexible rods attached to mirror on
either side Torsion
Hinge
Rotating
Bar

Applied
Poly 0
Mirror Force
Poly 1
Lever
Poly 2

Prevent Bar from

Bowing Out
Final Picture
 Possible Issues
• Torsion hinge might break or not be
flexible enough
• Actuating arms might bend
• Vertical thermal actuators might not give
enough deflection
 Conclusion
• Testing has yet to be done
• “We are confident of positive results…”
?