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implantation in SiO2 y Si rich SiO2 grown by CVD or by Sputtering. y Mechanical milling of elemental crystalline Si . y Chemical and thermal treatments of ball milled Si.
cost y Induced amorphization and oxidation results in the formation of nc Si in a Si oxide matrix
ball mill. Ball mill operated at 250 rpm . Toulene is used as a milling medium. Milled powder taken out after 25,50,75 and 100 hrs. transferred milled powder to a clean and covered petri dished and allow to dry for 3 weeks in a nitrogen environment.
Contd
y Standard piranha etch of the dried powder is carried
out . y Solution of silicon powder in H2SO4 and H2O2 is then slowly heated at around 110 degree celcius until the entire liquid evaporate. y Particles were dissolved in ethyl alcohol and sonicated to prepare colloidal suspension of nc Si core sorrounded by an a-Si oxide shell.
Topographic image
Li
r fil a alysis
Histogram
Contd ..
PL study