‘SM36 = AEG rroctace sidortian Scanning Microscope Multipurpose Digital Analytical SEMContents Foreword Features of the Multipurpose Digital Analytical SEM Electron Probe Current and its Verious Applications Comparison of Electron Guns Zoom Condenser Lens and CF Mini-lens (Objective) Large-sized Eucentric Goniometer Stage Basic Construction of the Multipurpose Digital Anelytical SEM Selection of the Preferred User Interface Operating Conditions Memory Image Accumulation by TV or SR (Super Rapid) or Slow Scan Histogram and Look-up Tables (LUT) for Acquired Images Image Division, Calculation between Images, and Text Overlays Removable Disk and Video Printer External CPU Cont of the Instrument Backscattered Electron Imaging Functional Expandability DP-0P High-speed Cascade System History of JEOL’s EPMAs and SEMs 10 n 2 1“ 16 7 18 19 20 2Foreword ‘The scanning electron microscope (SEM) is an instrument that scans a finely focused electron beam across a specimen surface deflecting the beam in two directions (X and Y). The instrument detects the signals generated from illumination points and displays the difference between the amounts of signals on a CRT by brightness modulation. ‘The SEM is now commonly used worldwide, as it allows the surface observation of bulk specimens in the magnification range from that of a magnifying glass to more than x 100,000 while maintaining a large depth of focus. ‘The history of the SEM began in 1935 when Knoll reported its principle. After World War II, a group centered around Oatley had continued research on the SEM at Cambridge University since 1948 and manufactured the first instrument at the university in 1953. A commercial instrument based on the research at Cambridge University was marketed in 1965 by Cambridge Instruments (Britain), and another by JEOL (Japan) in 1966. ‘The SEMS in those days had a resolution of about SO nm. After that, many manufacturers continued their efforts to produce SEMs with higher resolution. At present, SEMs having a resolution of 0.5 to 0.7 nm have made their debut. It was a field emission electron gun (abbreviated to FEG) announced by Crewe at Chicago University in 1968 that made a great contribution to improving the resolution of the SEM We at JEOL Ltd. have developed a series of extremely easy-to-use multipurpose digital FE SEMs, by introducing new gun technology and digitalizing the basic SEM On the other hand, we have developed a multipurpose digital analytical SEM series that can be used for a wide range of applications and that can meet the requirements for the analytical SEM Development History of JEOL’s Large-sized SEMs 1965 = JSM4 Commercialization of SEM Development of goniometer stage, TV scan/CRU 1970 Employment of ICs for electric circuitry Development of FE SEM 1975 =< ISM-FT/FIS Development of economy-type FE SEM “ Jsm-ascrass Development of large-wafer SEM 1980 “A SM-3sCF Improvement of condenser/objective lenses (Zoom condenser lens/CF tens) — ssm8s0 = Jsmsasisas 1985] —~< JSM-880 Development of inlens SEM ISM-6400 Development of multipurpose digital SEM —< JSM-890/840F Development of in-lens FE SEM 1990 | = JSM.63008/6400F/6600F Multipurpose digital FE SEM = ISM-6300 Development of multipurpose digital analytical SEM 1 5 10 50 (nm) Resolution