Vacuum Control Catalog

Vacuum Control
Catalog 2005 - 2006

VAC U U M G AU G E S , VALVES, F I T T I N G S A N D F E E DTHROUGHS
Contents Vacuum Control Catalog
Table of Contents
VACUUM GAUGES
SKY
Capacitance Diaphragm Gauge
CDG025 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A1 AllCeramic CDG025-C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A4 CDG045 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A6 CDG100A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A9 CDG160A / CDG160A-S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A12 AllCeramic CDG160A-C / CDG160A-CS . . . . . . . . . . . . . . . . . . . . . . . . . . . . A15
Bayard-Alpert Pirani Gauge

BPG402-S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A18 BPG400 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A22
High Pressure Hot Ionization Pirani Gauge

HPG400 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A26
Bayard-Alpert Pirani Capacitance Diaphragm Gauge

TripleGauge BCG450 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A30
Pirani Standard Gauge

PSG500, PSG500-S, PSG502-S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A36 PSG100-S, PSG101-S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A40 PSG050 / PSG051 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A42
Pirani Capacitance Diaphragm Gauge

PCG400, PCG410 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A44
Penning Gauge
PEG100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A47
Inverted Magnetron Pirani Gauge

MPG400/401 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A50
Penning Gauge
PEG050 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A53
Vacuum Control Catalog 2005-2006 - i
Vacuum Control Catalog Contents

Vacuum Gauge Controllers
VGC401, VGC402, VGC403 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A55 VGC023 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A57 VGC012 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A59
Vacuum Switch
VSA100A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A61
VACUUM FEEDTHROUGHS
Rotary Feedthroughs ISO-KF / ISO-K
FRH DN 16 - DN 63 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B1
Rotary Feedthroughs CF
FRU DN 16 - DN 40 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B3
Rotary/Linear Motion Feedtroughs ISO-KF

FCH DN 16 - DN 40 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5
Linear Motion Feedthroughs CF

FPU DN 16 - DN 40 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7
Electrical Feedthroughs
DN 16 ISO-KF. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9 DN 40 CF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B11
Coxial Feedthroughs ISO-KF / CF-F

BNC / MHV DN 16 - 40 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B13
Vacuum Feedthroughs
METAL-CERAMIC CONNECTIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B15
Liquid Feedthroughs ISO-KF / CF-F

DN 40 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B17
Viewports
DN 25 - DN 50 ISO-KF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B19 DN 63 - DN 160 ISO-K . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B21 DN 16 - DN 160 CF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B23 DN 63 - DN 160 ISO-F . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B25
Vacuum Control Catalog 2005-2006 - ii

Vacuum Feedthroughs
VACUUM BALL BEARINGS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B27 LUBRICANTS AND SEALING MATERIALS . . . . . . . . . . . . . . . . . . . . . . . . . . . . B29
VACUUM VALVES
Angle and Inline Valves ( VAH, VAP, VAM, VIM)
DN 5 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C1
Angle and Inline Valves (VAH, VIH, VAP, VIP)

DN 16 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C4 DN 25 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C7 DN 40 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10
Solenoid Actuated Angle Valves

DN 16-40 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13
Angle Valves ( VAH, VAP )

DN 63 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15
Manually Actuated Angle Valves

DN 16-63 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C18

DN 100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C20
Angle Valves ( VAP )

DN 160 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C23
Pneumatically Actuated Angle Valve ( VAP )

DN 250 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C25
Manually and Pneumatically Actuated

VBH063-X / VBP063-X/Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C27 VBH100-X / VBP100-X/Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C31 VBH160-X / VBP160-X/Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C35
Butterfly Valve
VBP250-X . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C39
Vacuum Control Catalog 2005-2006 - iii

Coarse Gas Dosing Valve
VDH010-A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C41
Dosing and Shut-Off Valve

VDH016-X . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C42
All-Metal Dosing Valves and System

VDH040-U / VDE040-U / VCE500 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C44
Gas Dosing Systems

Gas Dosing Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C47 Control Valve VDM005-X . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C48 Control Valve VDE016-X . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C49 Controller VCC500-Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C50 Interface Module VCA200-Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C51
Manually Actuated Venting Valve

VVH010-A/X . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C52
Solenoid Actuated Venting Valve

VVM010-A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C53
Vacuum Safety Valves

VSM DN 16 - DN 100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C55
Power Failure Venting Valve

VIM010-A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C57
Pressure Relief Valve

VSA016-X . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C58
Ball Valves with ISO-KF Flanges

DN 10-40 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C59
Vacuum Control Catalog 2005-2006 - iv
VACUUM FITTINGS
ISO-KF Small Flange Components
CONNECTION ELEMENTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D1 SEALS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D3 FLANGES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D6 PIPE FITTINGS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D7 BELLOWS / HOSE WITH FLANGES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D9 TRANSITION PIECES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D11 HOSE, HOSE CONNECTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D14
ISO-K Clamp Flange Components

CONNECTION ELEMENTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D16 SEALS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D17 FLANGES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D20 PIPE FITTINGS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D22 BELLOWS / HOSE WITH FLANGES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D24 TRANSITION PIECES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D25 PROTECTIVE LIDS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D26
ISO-F Fixed Flange Components

FLANGE COMPONENTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D27
UHV CF Components
CONNECTION ELEMENTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D29 SEALS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D30 FLANGES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D32 PIPE FITTINGS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D36 BELLOWS / HOSE WITH FLANGES, COMPENSATOR . . . . . . . . . . . . . . . . . . . D38 TRANSITION PIECES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D39 PROTECTIVE LIDS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D40
Vacuum Control Catalog 2005-2006 - v
Vacuum Control Catalog 2005-2006 - vi
Vacuum Gauges
Vacuum Feedthroughs
Contents
VACUUM GAUGES
SKY
Capacitance Diaphragm Gauge
CDG025 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A1 AllCeramic CDG025-C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A4 CDG045 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A6 CDG100A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A9 CDG160A / CDG160A-S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A12 AllCeramic CDG160A-C / CDG160A-CS . . . . . . . . . . . . . . . . . . . . . . . . . . . . A15

BPG402-S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A18 BPG400 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A22

HPG400 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A26

TripleGauge BCG450 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A30

PSG500, PSG500-S, PSG502-S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A36 PSG100-S, PSG101-S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A40 PSG050 / PSG051 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A42

PCG400, PCG410 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A44
Penning Gauge
PEG100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A47

MPG400/401 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A50
Penning Gauge
PEG050 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A53

VGC401, VGC402, VGC403 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A55 VGC023 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A57 VGC012 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A59
Vacuum Switch
VSA100A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A61
Vacuum Control Catalog 2005-2006 - Aii
VACUUM GAUGES
SKY Capacitance Diaphragm Gauge
Vacuum Gauges

CDG025
The INFICON SKY CDG025 temperature compensated Capacitance Diaphragm Gauge uses an ultra pure aluminum oxide ceramic diaphragm instead of the traditional metal diaphragms. This ultra pure ceramic diaphragm is virtually corrosion proof resulting in improved reliability, stability and extended lifetime, even under the harshest conditions. SKY CDGs are used by leading semiconductor system manufacturers. Advantages
Unique alumina ceramic sensor design: repeatable and accurate measurements with excellent zero and long-term span stability excellent corrosion resistance in aggressive process environment reduces downtime and cost of ownership insensitive to frequent atmospheric pressure cycles may make isolation valve obsolete fast warm-up time increases tool productivity Integrated particle protection chamber reduces the probability of gauge contamination
Fast response time reduces downtime and increases tool productivity Choice of power supply (+15 VDC or +18.0 +26.4 VDC) enables the use of standard and inexpensive 24 V power supply Compatible interface drop-in replacement for existing CDGs
Applications

Etch, CVD, PVD and other semiconductor production processes Chemical and corrosive processes General process pressure measurement
Ordering Information
0 => 1/2 Tube 1 => DN 16 ISO-KF 2 => DN 16 CF-R 3 => 8 VCR
Flange Temperature 0 => 25 C
360-000
Unit 0 =>
0 => Torr 1000 Torr 10 Torr 10 Torr 1 Torr 1 => 2 => 4 =>
1 => Pa 133322 Pa 13332.2 Pa 1333.22 Pa 133.322 Pa
2 => mbar 1100 mbar 100 mbar 10 mbar 1 mbar
Range (Full Scale)
Vacuum Control Catalog 2005-2006 - A1
Vacuum Gauges SKY Capacitance Diaphragm Gauge
CDG025 (continued)
Specifications
Measurement Range F.S. (full scale)
Torr Pa mbar
Torr Pa mbar Torr Pa mbar Torr Pa mbar % of reading % F.S./C % of reading/C % F.S. C C C Torr kPa bar VDC VDC W V V ms
1000 133322 1100

5 x 10+0 6.66 x 10+2 5.5 x 10+0 5 x 10-1 6.66 x 10+1 5.5 x 10-1 1 x 10-1 1.33 x 10+1 1.1 x 10-1 0.2 0.0050 0.01 0.0015 +5 +50 110 40 +65 3000 400 4 +15 5% +18.0 +26.4 1 1.6 0 +10 11 +11 linear 30 IP 30 D-sub, 15 pole, male
100 13332.2 100

5 x 10-1 6.66 x 10+1 5 x 10-1 5 x 10-2 6.66 x 10+0 5 x 10-2 1 x 10-2 1.33 x 10+0 1 x 10-2 0.2 0.0050 0.01 0.0015 +5 +50 110 40 +65 2000 267 2.67 +15 5% +18.0 +26.4 1 1.6 0 +10 11 +11 linear 30 IP 30 D-sub, 15 pole, male
10 1333.22 10
5 x 10-2 6.66 x 10+0 5 x 10-2 5 x 10-3 6.66 x 10-1 5 x 10-3 1 x 10-3 1.33 x 10-1 1 x 10-3 0.2 0.0050 0.01 0.0015 +5 +50 110 40 +65 2000 267 2.67 +15 5% +18.0 +26.4 1 1.6 0 +10 11 +11 linear 30 IP 30 D-sub, 15 pole, male
1 133.322 1
5 x 10-3 6.66 x 10-1 5 x 10-3 5 x 10-4 6.66 x 10-2 5 x 10-4 1 x 10-4 1.33 x 10-2 1 x 10-4 0.2 0.0150 0.01 0.0025 +5 +50 110 40 +65 2000 267 2.67 +15 5% +18.0 +26.4 1.6 0 +10 11 +11 linear 30 IP 30 D-sub, 15 pole, male
Lowest suggested control pressure
Lowest suggested reading
Lowest reading Accuracy1) Temperature effect on zero on span Resolution Temperature Operation (ambient) Bakeout2) Storage Pressure max. (absolute) Power supply Voltage 1 or Voltage 2 Power consumption Output signal (analog) Measuring range Voltage range Relation voltage vs. pressure Response time Protective type Electrical connection Materials exposed to vacuum
1) 2) 3) 4)
aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L3)), Vacon 704), AgCuTi hard solder, sealing glass
Non-linearity, hysteresis, repeatability at 25 C ambient operating temperature without temperature effects after 2 hours operation. At the flange and out of operation 18% Cr, 10% Ni, 3% Mo, 69% FeC 28% Ni, 23% Co, 49% Fe
1/2 tube
Internal volume Weight cm3 (inch3) g 5.8 ( 0.354) 260
DN 16 ISO KF
6 (0.366) 270
DN 16 CF-R
6 (0.366) 280
8 VCR
8.15 (0.497) 290
Vacuum Gauges
CDG025 (continued)
Dimensions

AllCeramic CDG025-C
All vacuum exposed surfaces of the Sky AllCeramic CDG are constructed of ultra-pure aluminum oxide ceramic, replacing the stainless steel tubing of our traditional CDG. This product is preferred in applications where metal contamination must be avoided.
Advantages

No metal contamination Marginal zero drift Virtually corrosion proof long sensor life results in reduced downtime thus reducing cost of ownership Superior accuracy and repeatability over long period of operation Better long term and temperature stability Less sensitive to frequent pressure cycles to atmosphere may eliminate isolation valve (depending on operation mode) Less susceptible to particles and process by-products due to suprashield

Fastest warm up time Lower cost of investment Choice of power supply (+15 VDC or +18.0 to +26.4 VDC) Drop-in replacement of existing CDGs due to interface compatibility
Applications

Etch, CVD and PVD processes Doping silicon using implantation or diffusion processes Oxidation
Creation of gate oxide layer in the range of 100 Creation of barrier layers (Ti, TiN, Ta and TaN as a protection layer between Silicon and Aluminum or Copper)
Type
CDG025-C
1) 2)
Flange
1/2 tube
133322
371-250
13332.2
371-251
Full scale (Pa1)) 1333.22 133.322

371-252 371-253
ATM13332.2
371-200
2)
Other pressure units on request Pressure difference between atmospheric and gauge pressure
Vacuum Gauges
AllCeramic CDG025-C (continued)

Specifications

Lowest suggested reading Lowest reading Accuracy1) Temperature effect on zero on span Resolution Temperature Operation (ambient) At flange Storage Pressure max. (absolute) Power supply Voltage 1 or Voltage 2 Power consumption2) Output signal (analog) Measuring range Voltage range Relation voltage vs. pressure Response time Internal volume Weight Protective type Electrical connection Materials exposed to vacuum
1) 2)
Pa
133322
6.66 x 10+2 6.66 x 10+1 1.33 x 10 0.2
+1
13332.2
6.66 x 10+1 6.66 x 10+0 1.33 x 10 0.2 0.005 0.01 0.0015 +5 ... +50 110 40 ... +65 267 15 5% +18 ... +26.4 1.6 0 ... +10 11 ... +11 linear 30 4.5 (0.275) 250 IP 30
+0
1333.22
6.66 x 10+0 6.66 x 10-1 1.33 x 10 0.2 0.005 0.01 0.0015 +5 ... +50 110 40 ... +65 267 15 5% +18 ... +26.4 1.6 0 ... +10 11 ... +11 linear 30 4.5 (0.275) 250 IP 30
-1
133.322
6.66 x 10-1 6.66 x 10-2 1.33 x 10 0.2 0.015 0.01 0.0025 +5 ... +50 110 40 ... +65 267 15 5% +18 ... +26.4 1.6 0 ... +10 11 ... +11 linear 100 4.5 (0.275) 250 IP 30
-2
ATM13332.2
0.2 0.05 0.04 0.01 +5 ... +50 110 40 ... +65 267 15 5% +18 ... +26.4 1.6 +55 11 ... +11 linear 30 4.5 (0.275) 250 IP 30
Lowest suggested control pressure Pa Pa Pa % of reading
% F.S./C 0.005 % of reading/C 0.01 % F.S. C C C kPa VDC VDC W V V ms cm (inch ) g

3 3
0.0015 +5 ... +50 110 40 ... +65 400 15 5% +18 ... +26.4 1.6 0 ... +10 11 ... +11 linear 30 4.5 (0.275) 250 IP 30
D-sub, 15 pole, D-sub, 15 pole, D-sub, 15 pole, D-sub, 15 pole, D-sub, 15 pole, male male male male male Aluminum oxide ceramic (AI2O3), sealing glass
Non-linearity, hysteresis, repeatability at 25 C ambient operating temperature without temperature effects after 2 hours operation. Typical value at 25C ambient temperature after reaching operating temperature.
Dimensions

CDG045
The INFICON SKY CDG045 Capacitance Diaphragm Gauge temperature controlled to 45 C, uses an ultra pure aluminum oxide ceramic diaphragm instead of the traditional metal diaphragms. This ultra pure ceramic diaphragm is virtually corrosion proof resulting in improved reliability, stability and extended lifetime, even under the harshest conditions. SKY CDGs are used by leading semiconductor system manufacturers. Advantages
Unique alumina ceramic sensor design: repeatable and accurate measurements with excellent zero and long-term span stability excellent corrosion resistance in aggressive process environment reduces downtime and cost of ownership insensitive to frequent atmospheric pressure cycles may make isolation valve obsolete fast warm-up time increases tool productivity Integrated particle protection chamber reduces the probability of gauge contamination
Fast response time reduces downtime and increases tool productivity Choice of power supply (+15 VDC or +18.0 +26.4 VDC) enables the use of standard and inexpensive 24 V power supply Compatible interface drop-in replacement for existing CDGs
Applications

Etch, CVD, PVD and other semiconductor production processes Chemical and corrosive processes
General process pressure measurement Reference sensor for monitoring of test instruments according to international standards
0 => 1/2 Tube 1 => DN 16 ISO-KF 2 => DN 16 CF-R 3 => 8 VCR
Flange Temperature 1 => 45 C
360-010
Unit 0 =>
0 => Torr 1000 Torr 10 Torr 10 Torr 1 Torr 0.1 Torr 1 => 2 => 4 => 5 =>
1 => Pa 133322 Pa 13332.2 Pa 1333.22 Pa 133.322 Pa 13.3322 Pa
2 => mbar 1100 mbar 100 mbar 10 mbar 1 mbar 0.1 mbar
Range (Full Scale)
Vacuum Gauges
CDG045 (continued)
Specifications
Torr Pa mbar
1000 133322 1100

5 x 10+0 6.66 x 10+2 5.5 x 10+0 5 x 10-1 6.66 x 10+1 5.5 x 10-1 1 x 10-1 1.33 x 10+1 1.1 x 10-1 0.15
100 13332.2 100

5 x 10-1 6.66 x 10+1 5 x 10-1 5 x 10-2 6.66 x 10+0 5 x 10-2 1 x 10-2 1.33 x 10+0 1 x 10-2 0.15 0.0025 0.01 0.0015 +15 +40 90 40 +65 2000 267 2.67
10 1333.22 10
5 x 10-2 6.66 x 10+0 5 x 10-2 5 x 10-3 6.66 x 10-1 5 x 10-3 1 x 10-3 1.33 x 10-1 1 x 10-3 0.15 0.0025 0.01 0.0015 +15 +40 90 40 +65 2000 267 2.67
1 133.322 1
5 x 10-3 6.66 x 10-1 5 x 10-3 5 x 10-4 6.66 x 10-2 5 x 10-4 1 x 10-4 1.33 x 10-2 1 x 10-4 0.15 0.0025 0.01 0.0025 +15 +40 90 40 +65 2000 267 2.67
0.1 13.3322 0.11

5 x 10-4 6.66 x 10-2 5 x 10-4 5 x 10-5 6.66 x 10-3 5 x 10-5 1 x 10-5 1.33 x 10-3 1 x 10-5 0.15 0.0050 0.01 0.0025 +15 +40 90 40 +65 1000 133 1.33
Torr Lowest suggested control pressure Pa mbar Lowest suggested reading Torr Pa mbar Torr Pa mbar % of reading
Lowest reading Accuracy1) Temperature effect on zero on span Resolution Temperature Operation (ambient) Bakeout2) Storage Pressure max. (absolute) Power supply Voltage 1 or Voltage 2 Power consumption during heat up at operating temperature Output signal (analog) Measuring range Voltage range Relation voltage vs. pressure Response time Protective type Electrical connection Materials exposed to vacuum
1) 2) 3) 4)
% F.S./C 0.0025 % of reading/C 0.01 % F.S. C C C Torr kPa bar VDC VDC W W V V ms 0.0015 +15 +40 90 40 +65 3000 400 4
+15 5% +15 5% +15 5% +15 5% +15 5% +18.0 +26.4 +18.0 +26.4 +18.0 +26.4 +18.0 +26.4 +18.0 +26.4 19 5 0 +10 11 +11 linear 30 IP 30 D-sub, 15 pole, male 19 5 0 +10 11 +11 linear 30 IP 30 D-sub, 15 pole, male 19 5 0 +10 11 +11 linear 30 IP 30 D-sub, 15 pole, male 19 5 0 +10 11 +11 linear 100 IP 30 19 5 0 +10 11 +11 linear 100 IP 30
D-sub, 15 pole, D-sub, 15 pole, male male
Non-linearity, hysteresis, repeatability at 25 C ambient operating temperature without temperature effects after 2 hours operation. At the flange and out of operation 18% Cr, 10% Ni, 3% Mo, 69% Fe 28% Ni, 23% Co, 49% Fe
1/2 tube
Internal volume Weight cm3 (inch3) g 7 ( 0.427) 485
DN 16 ISO KF
7.1 (0.433) 495
DN 16 CF-R
7.1 (0.433) 505
8 VCR
9.3 (0.568) 515
CDG045 (continued)
Dimensions
82.5 (3.25")
mm (inch)
80 (3.15")
74.5 (2.93")
48 (1.89")
81 (3.19")
DN 16 ISO-KF 36X-X11
DN 16 CF-R 36X-X12
48 (1.89")
1 /2 " tube 36X-X10
8 VCR 36X-X13
46 (1.81")
Vacuum Gauges

CDG100A / CDG100A-S
The INFICON SKY CDG100A is a compact, accurate and reliable 100 C temperature controlled Capacitance Diaphragm Gauge featuring ultra pure aluminum oxide ceramic diaphragms instead of the traditional metal diaphragms. Ultra pure ceramic diaphragms are virtually corrosion-proof resulting in improved reliability, stability and extended lifetime, even under the harshest tool conditions. The CDG100A process manometer is temperature controlled to 100 C, which prevents condensation of process products and by-products, thereby increasing the long-term stability and enhancing process control. Additionally, the CDG100A series features improvements in shielding the sensor against contamination as well as in electrical and mechanical robustness. These measures lead to superior stability and reliability even in aggressive process and tool environments. SKY CDGs are used by leading semiconductor system manufacturers for improved process control.
Advantages

Alumina Ceramic Diaphragm for excellent corrosion resistance in aggressive process environments Temperature controlled to 100 C prevents condensation of process products and by-products Integrated particle protection chamber and additional protection shield reduces the probability of gauge contamination Compact design with integrated electronics saves valuable space and simplifies tool integration Improved accuracy for more consistent pressure measurement and reliable process control High speed version (CDG100A-H) for applications requiring fast response time, e.g. pressure control applications Improved accuracy for more consistent pressure measurement and reliable process control CE compliant - meets the EMC standards for the European Market Plug and play for INFICON and other leading brands
Applications

Etch, CVD, PVD and other semiconductor production processes High temperature process applications
Chemical process engineering
Type
CDG100A CDG100A-H CDG100A-S
1)
Set point
none none 2
Flange
8VCR 8VCR 8VCR
133322
371-000 370-100 371-005
13332.2
371-001 370-101 371-006
Full scale (Pa1)) 1333.22 133.322

371-002 370-102 371-007 371-003 370-103 371-008
13.3322
371-004 370-104 371-009
Other pressure units and flanges on request
CDG100A / CDG100A-S (continued)

Specifications

Lowest suggested control pressure Lowest suggested reading Lowest reading Accuracy1) Temperature effect On zero On span Resolution Temperature Operation (ambient) At flange Storage Pressure max. (absolute)
Pa Torr
Pa Pa Pa % of reading
133322 1000
6.66 x 10+2 6.66 x 10+1 1.33 x 10 0.25
+1
13332.2 100
6.66 x 10+1 6.66 x 10+0 1.33 x 10 0.25 0.005 0.02 0.005 +15 ... +50 100 40 ... +65 267 15 5% +24 10% 15 5%
+0
1333.22 10
6.66 x 10+0 6.66 x 10-1 1.33 x 10 0.25 0.005 0.02 0.005 +15 ... +50 100 40 ... +65 267 15 5% +24 10% 15 5%
-1
133.322 1
6.66 x 10-1 6.66 x 10-2 1.33 x 10 0.25 0.005 0.02 0.005 +15 ... +50 100 40 ... +65 267 15 5% +24 10% 15 5%
-2
13.3322 100 m
6.66 x 10-2 6.66 x 10-3 1.33 x 10-3 0.50 0.01 0.02 0.005 +15 ... +50 100 40 ... +65 133 15 5% +24 10% 15 5%
% F.S./C 0.005 % of reading/C 0.02 % F.S. C C C kPa 0.005 +15 ... +50 100 40 ... +65 400 15 5% +24 10% 15 5%
Supply voltage CDG100A, CDG100A-H Voltage 1 VDC or Voltage 2 VDC Supply voltage CDG100A-S Power consumption During heating-up time CDG100A, CDG100A-H CDG100A-S At operating temperature Output signal (analog) Measuring range Voltage range Voltage vs. pressure Response time CDG100A, CDG100A-S CDG100A-H Heating-up time Internal volume Weight (CDG100A) Protective type Electrical connection CDG100A, CDG100A-H CDG100A-S Materials exposed to vacuum VDC
W W W V V
24 27 15 0 ... +10 11 ... +11 linear 50 30 120 6 (0.366) 600 IP 30
24 27 15 0 ... +10 11 ... +11 linear 50 30 120 6 (0.366) 600 IP 30
24 27 15 0 ... +10 11 ... +11 linear 50 30 120 6 (0.366) 600 IP 30 D-sub, 15 pole, male D-sub, 25 pole, male
24 27 15 0 ... +10 11 ... +11 linear 50 30 120 6 (0.366) 600 IP 30
24 27 15 0 ... +10 11 ... +11 linear 100 30 120 6 (0.366) 600 IP 30
ms ms min cm3 (inch3) g
D-sub, 15 pole, D-sub, 15 pole, male male D-sub, 25 pole, D-sub, 25 pole, male male
D-sub, 15 pole, D-sub, 15 pole, male male D-sub, 25 pole, D-sub, 25 pole, male male
Vacuum Gauges

Specifications
(continued)

CDG100A-S Relay functions Relays type of contact Switching voltage max. Switching current
1) 2) 3)
Pa Torr
133322 1000
13332.2 100
1333.22 10
133.322 1
13.3322 100 m
two set points, five status indicators (two setpoints active, temperature sensor ok, temperature ready, overheat) and optical status indicator (power on) NO / NC change over VDC / VAC A 110 / 125 1 NO / NC change over 110 / 125 1 NO / NC change over 110 / 125 1 NO / NC change over 110 / 125 1 NO / NC change over 110 / 125 1
Non-linearity, hysteresis, repeatability at 25 C ambient operating temperature without temperature effects after 2 hours operation. 18% Cr, 10% Ni, 3% Mo, 69% Fe 28% Ni, 23% Co, 49% Fe
Dimensions CDG100A / CDG100A-H

78.5 (3.09")
2.2 (0.08")
CDG100A-S
78.5 (3.09")
5.0 (0.197")
90 (3.54")
119.3 (4.69")
105 (4.13")
mm (inch) 8 VCR (female) 8 VCR (female)
139.5 (5.49")
mm (inch)
SKY Capacitance Diaphragm Gauges

CDG160A / CDG160A-S
The INFICON SKY CDG160A is a compact, 160 C temperature controlled gauge designed to perform in demanding semiconductor applications. The CDG160A series features improved protection against contamination and increased temperature stability in extreme process conditions, such as CVD and LPCVD. Temperature controlled at 160 C, the CDG160A prevents condensation of process products and by-products on the diaphragm minimizing measurement drift for enhanced process control and higher yield. The CDG160A series uses INFICON ultra pure aluminum oxide ceramic diaphragms instead of the traditional metal diaphragms. These ultra pure ceramic diaphragms are virtually corrosion-proof for reliable, stable and lasting performance, even under the harshest conditions. Leading semiconductor system manufacturers use SKY CDGs worldwide. Advantages
Temperature controlled to 160 C prevents condensation of process products and by-products Compact design saves valuable space and simplifies tool integration Consistent accuracy and repeatability Enhanced particle protection chamber with an additional protection shield (Suprashield) reduces the probability of gauge contamination Virtually corrosion-proof even in extreme CVD and LPCVD processes Optional set point and status indication provides additional control and safety functions High ambient temperature compatibility for hot tool environments
Applications

Etch, CVD, PVD, LPCVD and other semiconductor production processes Chemical and corrosive high temperature processes Coating processes
Type
CDG160A CDG160A-S
1)
Set point
none 2
Flange
8VCR female 8VCR female
133322
370-000 373-113
13332.2
370-001 373-112
Full scale (Pa1)) 1333.22

370-002 373-111
133.322
370-003 373-110
Other pressure units on request
Vacuum Gauges

Specifications

Lowest suggested reading Lowest reading Accuracy1) Temperature effect on zero on span Resolution Temperature Operation (ambient) Bakeout (at flange) Storage Pressure max. (absolute) Power supply Power consumption at operating temperature during heat up CDG160A CDG160A-S Output signal (analog) Measuring range Voltage range Relation voltage vs. pressure Response time Protective type Electrical connection CDG160A CDG160A-S Internal volume Weight CDG160A CDG160A-S Materials exposed to vacuum
Pa
133322
6.66 x 10+2 6.66 x 10+1 1.33 x 10 0.5 0.005 0.02 0.005 +15 ... +55 160 40 ... +65 400 15 5% 15 24 27 0 ... +10 11 ... +11 linear 50 IP 30 D-sub, 15 pole, male D-sub, 25 pole, male
+1
13332.2
6.66 x 10+1 6.66 x 10+0 1.33 x 10 0.5 0.005 0.02 0.005 +15 ... +55 160 40 ... +65 267 15 5% 15 24 27 0 ... +10 11 ... +11 linear 50 IP 30 D-sub, 15 pole, male D-sub, 25 pole, male 6 (0.366) 580 610
+0
1333.22
6.66 x 10+0 6.66 x 10-1 1.33 x 10 0.5 0.005 0.02 0.005 +15 ... +55 160 40 ... +65 267 15 5% 15 24 27 0 ... +10 11 ... +11 linear 50 IP 30 D-sub, 15 pole, male D-sub, 25 pole, male 6 (0.366) 580 610
-1
133.322
6.66 x 10-1 6.66 x 10-2 1.33 x 10-2 0.5 0.005 0.02 0.005 +15 ... +55 160 40 ... +65 267 15 5% 15 24 27 0 ... +10 11 ... +11 linear 50 IP 30 D-sub, 15 pole, male D-sub, 25 pole, male 6 (0.366) 580 610
Lowest suggested control pressure Pa Pa Pa % of reading % F.S./C % of reading/C % F.S. C C C kPa VDC W W W V V ms
cm3 (inch3) g g
6 (0.366) 580 610
Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L2)), Vacon 703), AgCuTi hard solder, sealing glass
CDG160A-S Relay functions Relays type of contact Switching voltage max. Switching current
1) 2) 3)
two set points, five status indicators (two setpoints active, temperature sensor ok, temperature ready, overheat) and optical status indicator (power on) NO / NC change over VDC / VAC A 110 / 125 1 NO / NC change over 110 / 125 1 NO / NC change over 110 / 125 1 NO / NC change over 110 / 125 1
Non-linearity, hysteresis, repeatability at 25 C ambient operating temperature without temperature effects after 2 hours operation. 18% Cr, 10% Ni, 3% Mo, 69% Fe 28% Ni, 23% Co, 49% Fe

Dimensions
78.5 (3.09")
2.5 (0.098")
5.0 (0.197")
105 (4.13")
149.5 (5.88")
CDG160A
CDG160A-S
8 VCR (female)
CDG160A and CDG160A-S
Vacuum Gauges
SKY Capacitance Diaphragm Gauges

AllCeramic CDG160A-C / CDG160A-CS
The INFICON SKY AllCeramicTM CDG160A-C is the only completely metal-free 160 C temperature controlled capacitance diaphragm gauge designed for demanding applications, such as oxidation, diffusion and LPCVD. All surfaces exposed to the vacuum such as tubing, plasma shield and contamination protection shield are composed of corrosion-resistant ultra pure aluminum oxide ceramic eliminating potential metal contamination from the gauge. The INFICON SKY AllCeramicTM CDG160A-C integrates the proven sensor technology of the INFICON CDG160A series of gauges for reliable and repeatable performance in LPCVD and other harsh semiconductor manufacturing applications.
Advantages

Metal-free ultra pure ceramic design prevents metal contamination Temperature controlled to 160 C prevents condensation of process products and by-products Compact design saves valuable space and simplifies tool integration High ambient temperature compatibility Enhanced particle protection chamber with an additional protection shield (Suprashield) reduces the probability of gauge contamination Unique ceramic sensor design provides repeatability and accurate measurements with excellent long-term stability Optional set point and status indication provides additional control and safety functions
Applications

Oxidation, diffusion and LPCVD processes Other metal free vacuum measurement requirements
Type
CDG160A-C CDG160A-CS
1)
Set point
none 2
Flange
1/2 tube 1/2 tube
133322
371-260 371-270
13332.2
371-261 371-271
Full scale (Pa1)) 1333.22

371-262 371-272
133.322
371-263 371-273
Other pressure units on request
AllCeramic CDG160A-C / CDG160A-CS (continued)

Specifications

Lowest suggested reading Lowest reading Accuracy
1)
Pa
133322
6.66 x 10+2 6.66 x 10 0.5 0.005 0.02 0.005 +15 ... +55 160 40 ... +65 400 15 5% 15 24 27 0 ... +10 11 ... +11 linear 50 IP 30 D-sub, 15 pole, male D-sub, 25 pole, male
+1
13332.2
6.66 x 10+1 6.66 x 10 0.5 0.005 0.02 0.005 +15 ... +55 160 40 ... +65 267 15 5% 15 24 27 0 ... +10 11 ... +11 linear 50 IP 30 D-sub, 15 pole, male D-sub, 25 pole, male 4.7 (0.286) 460 490
+0
1333.22
6.66 x 10+0 6.66 x 10 0.5 0.005 0.02 0.005 +15 ... +55 160 40 ... +65 267 15 5% 15 24 27 0 ... +10 11 ... +11 linear 50 IP 30 D-sub, 15 pole, male D-sub, 25 pole, male 4.7 (0.286) 460 490
-1
133.322
6.66 x 10-1 6.66 x 10-2 1.33 x 10-2 0.5 0.005 0.02 0.005 +15 ... +55 160 40 ... +65 267 15 5% 15 24 27 0 ... +10 11 ... +11 linear 50 IP 30 D-sub, 15 pole, male D-sub, 25 pole, male 4.7 (0.286) 460 490
Lowest suggested control pressure Pa Pa Pa % of reading % F.S./C % of reading/C % F.S. C C C kPa VDC W W W V V ms
1.33 x 10+1
1.33 x 10+0
1.33 x 10-1
Temperature effect on zero on span Resolution Temperature Operation (ambient) Bakeout (at flange) Storage Pressure max. (absolute) Power supply Power consumption at operating temperature during heat up CDG160A-C CDG160A-CS Output signal (analog) Measuring range Voltage range Relation voltage vs. pressure Response time Protective type Electrical connection CDG160A-C CDG160A-CS Internal volume Weight CDG160A-C CDG160A-CS Materials exposed to vacuum CDG160A-CS Relay functions Relays type of contact Switching voltage max. Switching current
1)
cm3 (inch3) g g
4.7 (0.286) 460 490
Aluminum oxide ceramic (AI2O3), sealing glass
two set points, five status indicators (two setpoints active, temperature sensor ok, temperature ready, overheat) and optical status indicator (power on) NO / NC change over VDC / VAC A 110 / 125 1 NO / NC change over 110 / 125 1 NO / NC change over 110 / 125 1 NO / NC change over 110 / 125 1
Non-linearity, hysteresis, repeatability at 25 C ambient operating temperature without temperature effects after 2 hours operation.
Vacuum Gauges
AllCeramic CDG160A-C / CDG160A-CS (continued)

Dimensions
78.5 (3.09")
2.5 (0.098")
5.0 (0.197")
149.5 (5.88")
105 (4.13")
CDG160A-C
CDG160A-CS
Ceramic tube 1/2 CDG160A-C and CDG160A-CS
Vacuum Gauges Bayard-Alpert Pirani Gauge

BPG402-S
The INFICON Bayard-Alpert Pirani Combination Gauge, BPG402-S, functions as two gauges in a single compact unit measuring from 5 x 10-10 mbar to atmosphere (3.8 x 10-10 Torr to atmosphere). Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG402-S with dual yttrium oxide coated iridium filaments for affordable and repeatable process to base pressure measurements in one economical package. Sensing elements with onboard calibration data guarantees high reproducibility when exchanging sensors. Advantages
Extremely wide measurement range from 5 x 10-10 mbar to atmosphere (3.8 x 10-10 Torr to atmosphere) Excellent repeatability in the process pressure range from 10-8 10-2 mbar of 5% Pirani interlock protects the filament from premature burnout Dual long-life yttrium oxide coated iridium filament Optional graphic display and Fieldbus interfaces available Automatic high vacuum Pirani adjustment reduces operator interventions Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
Applications

Pressure measurement in semiconductor process and transfer chambers Industrial coating General vacuum measurement and control in the low to ultra high vacuum range
Ordering Information Type DN 25 ISO-KF DN 40 CF-R Replacement sensor 25 ISO-KF Replacement sensor 40 CF-R Accessories Power supply 24 V DC / RS232C line Baffle 353-511 353-512 BPG402-S
without display
BPG402-S
with display
BPG402-SP
with Profibus DP
with DeviceNetTM
BPG402-SD
353-570 353-571
353-572 353-573
353-574 353-575 354-494 354-495
353-576 353-577
Vacuum Gauges
BPG402-S (continued)
Specifications
BPG402-S Standard
Measurement range (air, O2, CO, N2) Accuracy 10-8 10-2 mbar Repeatability 10-8 10-2 mbar 1) Degas p < 7.2 x 10-6 Pressure, max. Temperature Operation (ambient) Storage Bakeout at flange without electronics Supply voltage Output signal analog Measurement range Voltage vs. pressure Error signal Load impedance, min. Set point relay Range Relay contact Hysteresis Contact rating Digital functions Interface (digital) 2) Emission control Filament Filament status Electrical connection Cable length, max.3) Materials exposed to vacuum Internal volume KF / CF Weight KF / CF Protection type
1) 2)
BPG402-S Display
mbar (Torr) % of reading % of reading mbar bar (absolute) C C C V / A DC V V V / Decade V k mbar % of reading V / A DC
5 x 10-10 1000 (3.8 x 10-10 750) 15 5 electron bombardment, max. 3 min 2 0 +50 -20 +70 80 20 28 / 0.8 0 +10 0.774 10 0.75 0.3 / 0.5 10 1 1 x 10-9 100 n.o., potential free 10 60 / 0.5 degas RS232C automatic / manual via interface dual Yt2O2 coated Ir LED / digital output D-sub, 15 pin, male 100 (330) Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass 24 (1.46) / 34 (2.1) 285 / 550 IP30
m (ft) cm3 (inch)3 g
Reduced accuracy during degas Simultaneous use of RS232C or VGC400 series controllers and Fieldbus is not allowed 3) For RS232C operation <30 m
Specifications
BPG402-SP Profibus DP
Baud rates Address Digital functions kBaud MBaud 9.6 / 19.2 / 93.75 / 187.5 / 500 1.5 / 12 2 switches (address 00 - 127) or network programmable read pressure, select units: Torr, mbar, Pa emission control, degas function monitor gauge status, filament status safe state allows definition of behavior in case of error detailed alarm and warning information 0 10 V analog output pressure indication two setpoint relays A + B 2 1 x 10-9 100 n.o., potential free 10 60 / 0.5 D-sub, 9 pin, female D-sub, 15 pin, male
Analog functions Setpoint relays Range mbar Relay contact Hysteresis % of reading Contact rating V / A DC Connector for Profibus DP Connector for BPG (analog output, supply voltage, setpoints)
Specifications
BPG402-SD DeviceNet
Protocol Data rate switch Cable length 125 kbps 250 kbps 500 kbps MAC ID Digital functions kBaud m (ft) m (ft) m (ft) DeviceNet, group 2 slave only 125, 250, 500 or network programmable 500 (1650) 250 (825) 100 (330) 2 switches (address 00 - 63) or network programmable read pressure, select units: Torr, mbar, Pa emission control, degas function monitor gauge status, filament status safe state allows definition of behavior in case of error detailed alarm and warning information 0 10 V analog output pressure indication two setpoint relays A + B DeviceNet Vacuum Gauge Device Profile CG for combination gauge polling only 2 1 x 10-9 100 n.o., potential free 10 60 / 0.5 11 25 / 0.5 20 28 / 0.8 microstyle, 5 pin D-sub, 15 pin, male
Analog functions Specification Device type I / O slave messaging Setpoint relays Range mbar Relay contact Hysteresis % of reading Contact rating V / A DC Supply voltage for DeviceNet V / A DC Supply voltage for gauge V / A DC Connector for DeviceNet Connector for BPG (analog output, supply voltage, setpoints)
Vacuum Gauges
Dimensions Accessories Power supply 24 V DC / RS232C line
67 (2.64)
D-Sub, 15 pin, female 5m

58 (2.29)
RS232 to PC / PLC D-Sub, 9 pin, female,
24 V DC supply 5m
153 (6.03)
1.8 m 90 250 V AC supply

42 (1.65) 48 (1.89)
mm (inch) DN 25 ISO-KF DN 40CF-R
Baffle:
Prevents contamination of the sensor. Easy installation into the vacuum connection - no tools required. Standard Baffle

BPG400
The INFICON Bayard-Alpert Pirani Combination Gauge, BPG400, functions as two gauges in a single compact unit measuring from 5 x 10-10 mbar to atmosphere (3.8 x 10-10 Torr to atmosphere). Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG400 for affordable and repeatable process to base pressure measurements in one economic package.
Advantages
Extremely wide measurement range from 5 x 10-10 mbar to atmosphere (3.8 x 10-10 Torr to atmosphere) Excellent repeatability in the process pressure range from 10-8 10-2 mbar of 5% The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation Long-life yttrium oxide coated iridium filament Optional graphic display and Fieldbus interfaces available Automatic high vacuum Pirani adjustment reduces operator interventions
Applications

Pressure measurement in semiconductor process and transfer chambers Industrial coating General vacuum measurement and control in the low to ultra high vacuum range
Ordering Information Type DN 25 ISO-KF DN 40 CF-R Replacement sensor 25 ISO-KF Replacement sensor 40 CF-R BPG400
without LCD display
BPG400
with LCD display
BPG400-SP
with Profibus DP
with DeviceNetTM
BPG400-SD 353-507 353-508
BPG400-SR
with RS485
353-500 353-502 354-490 354-491
353-501 353-503 354-490 354-491
353-505 353-506 354-490 354-491
353-509 353-513 354-490 354-491
354-490 354-491
Accessories Power supply 24 V DC / RS232C line Bakeout extension, 100 mm (3.94 inch) Baffle 353-511 353-510 353-512
Vacuum Gauges
BPG400 (continued)
Specifications
BPG400 Standard
Measurement range (air, O2, CO, N2) Accuracy 10-8 10-2 mbar Repeatability 10-8 10-2 mbar 1) Degas p < 7.2 x 10-6 Pressure, max. Temperature Operation (ambient) Storage Bakeout At flange with extension At flange without extension Electronics removed Supply voltage Output signal analog Measurement range Voltage vs. pressure Error signal Load impedance, min. Interface (digital) 2) Electrical connection Cable length, max.3) Materials exposed to vacuum Internal volume KF / CF Weight KF / CF Protection type
1) 2)
BPG400 Display
mbar (Torr) % of reading % of reading mbar bar (absolute) C C C C C V / A DC V V V / Decade V k
5 x 10-10 1000 (3.8 x 10-10 750) 15 5 electron bombardment, max. 3 min 2 0 +50 -20 +70 150 80 150 20 28 / 0.8 0 +10 0.774 10 0.75 0.3 / 0.5 10 RS232C D-sub, 15 pin, male 100 (330) Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass 24 (1.46) / 34 (2.1) 285 / 550 IP30
Reduced accuracy during degas Simultaneous use of RS232C or VGC400 series controllers and Fieldbus is not allowed 3) For RS232C operation <30 m
Specifications
BPG400-SP Profibus DP
Baud rates Address Digital functions kBaud MBaud 9.6 / 19.2 / 93.75 / 187.5 / 500 1.5 / 12 2 switches (address 00 - 127) or network programmable read pressure, select units: Torr, mbar, Pa degas function, Pirani full scale adjust monitor gauge status safe state allows definition of behavior in case of error detailed alarm and warning information 0 10 V analog output pressure indication two setpoint relays A + B 2 1 x 10-9 100 n.o., potential free 10 60 / 0.5 D-sub, 9 pin, female D-sub, 15 pin, male
Analog functions Setpoint relays Range mbar Relay contact Hysteresis % of reading Contact rating V / A DC Connector for Profibus DP Connector for BPG (analog output, supply voltage, setpoints)
BPG400 (continued)
Specifications
BPG400-SD DeviceNet
Protocol Data rate switch Cable length 125 kbps 250 kbps 500 kbps MAC ID Digital functions kBaud m (ft) m (ft) m (ft) DeviceNet, group 2 slave only 125, 250, 500 or network programmable 500 (1650) 250 (825) 100 (330) 2 switches (address 00 - 63) or network programmable read pressure, select units: Torr, mbar, Pa degas function, Pirani full scale adjust monitor gauge status safe state allows definition of behavior in case of error detailed alarm and warning information 0 10 V analog output pressure indication two setpoint relays A + B DeviceNet Vacuum Gauge Device Profile CG for combination gauge polling only 2 1 x 10-9 100 n.o., potential free 10 60 / 0.5 11 25 / 0.5 20 28 / 0.8 microstyle, 5 pin D-sub, 15 pin, male
Analog functions Specification Device type I / O slave messaging Setpoint relays Range mbar Relay contact Hysteresis % of reading Contact rating V / A DC Supply voltage for DeviceNet V / A DC Supply voltage for gauge V / A DC Connector for DeviceNet Connector for BPG (analog output, supply voltage, setpoints)
Specifications
BPG400-SR RS485
Baud rates Address Digital functions kBaud 0.3 / 1.2 / 2.4 / 4.8 / 9.6 / 19.2 / 28.8 2 switches (address 00 - 127) or network programmable read pressure, select units: Torr, mbar, Pa degas function, Pirani full scale adjust monitor gauge status detailed alarm and warning information 0 10 V analog output pressure indication two setpoint relays A + B 2 1 x 10-9 100 n.o., potential free 10 60 / 0.5 D-sub, 9 pin, male D-sub, 15 pin, male
Analog functions Setpoint relays Range mbar Relay contact Hysteresis % of reading Contact rating V / A DC Connector for RS485 Connector for BPG (analog output, supply voltage, setpoints)
Vacuum Gauges
BPG400 (continued)
Dimensions Accessories Power supply 24 V DC / RS232C line
D-Sub, 15 pin, female 5m 24 V DC supply 5m RS232 to PC / PLC D-Sub, 9 pin, female,
1.8 m 90 250 V AC supply
Bakeout extension:
Allows measurement at flange temperatures up to 150C. Fast and easy installation.
Baffle:
Prevents contamination of the sensor. Easy installation into the vacuum connection - no tools required. Standard Baffle
Vacuum Gauges High Pressure Hot Ionization Pirani Gauge

HPG400
The INFICON High Pressure Hot Ionization Pirani Gauge, HPG400, combines High Pressure Hot Ionization and Pirani sensors in a single, compact, economical package to measure pressure from 2 x 10-6 to atmosphere (1.5 x 10-6 to atmosphere). The HPG400 provides highly repeatable and reproducible pressure measurement for accurate sputter process pressure control.
Advantages
HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1 x 10-5 1 mbar for improved process control User selectable hot ion emission activation between 5 x 10-2 and 1 mbar Pirani interlock protects the hot filament from premature burnout Optional graphic display and Fieldbus interfaces available Automatic high vacuum Pirani adjustment reduces operator interventions
Applications

Sputter applications in semiconductor manufacturing, electronics and media industry Industrial coating General vacuum measurement and control in the low to high vacuum range
Ordering Information Type DN 25 ISO-KF DN 40 CF-F Replacement sensor 25 ISO-KF Replacement sensor 40 CF-F
1)
HPG400
without LCD display
HPG400
with LCD display
with Profibus DP1)
HPG400-SP 353-525 353-526
HPG400-SD 353-527 353-528 354-487 354-488
with DeviceNet1)
353-520 353-522 354-487 354-488
353-521 353-523 354-487 354-488
354-487 354-488
not available with LCD display
Accessories Power supply 24 V DC / RS232C line 353-511
Vacuum Gauges
HPG400 (continued)
Specifications
Measurement range (air, N2) Accuracy 10-5 1 mbar Repeatability 10-5 10-1 mbar 10-1 100 mbar Hot ion emission on, selectable mbar (Torr) % of reading % of reading % of reading mbar mbar mbar mbar mbar bar (absolute) C C C C V / A DC V V V V / Decade V / Decade V V k
HPG400 Standard
HPG400 Display
Pressure, max. Temperature Operation (ambient) Storage Bakeout At flange Electronics removed Supply voltage Output signal analog Measurement range Hot cathode Pirani Voltage vs. pressure Hot cathode Pirani Error signal Hot cathode Pirani Load impedance , min. Interface (digital) 2) Electrical connection Cable length, max.3) Materials exposed to vacuum Internal volume KF / CF Weight KF / CF Protection type
1) 2)
2 x 10-6 1000 (1.5 x 10-6 750) 15 1) 2 30 1 5 x 10-1 2 x 10-1 1 x 10-1 5 x 10-2 5 0 +50 -20 +70 80 150 20 28 / 0.8 0 +10.2 1.5 7.5 8.5 9.75 1 0.25 0.3 0.5 10 RS232C D-sub, 15 pin, male 100 (330) Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass 20 (1.2) / 30 (1.8) 430 / 695 IP30
Accuracy from 10-5 mbar to the selected hot ion emission on value Simultaneous use of RS232C or VGC400 series controllers and Fieldbus is not allowed 3) For RS232C operation <30 m
Vacuum Gauges High Pressure Hot Ionization Pirani Gauge
HPG400 (continued)
Specifications
HPG400-SD DeviceNet
Protocol Data rate switch Cable length 125 kbps 250 kbps 500 kbps MAC ID Network size Digital functions kBaud m (ft) m (ft) m (ft) DeviceNet, group 2 slave only 125, 250, 500 or network programmable 500 (1650) 250 (825) 100 (330) 2 switches (address 00 - 63) or network programmable up to 64 nodes per segment read pressure, select units: Torr, mbar, Pa Pirani full scale adjust monitor gauge status safe state allows definition of behavior in case of error detailed alarm and warning information 0 10 V analog output pressure indication two setpoint relays A + B LED network status (green / red) LED module status (green / red) DeviceNet Vacuum Gauge Device Profile CG for combination gauge polling only 2 2 x 10-6 100 n.o., potential free 10 60 / 0.5 11 25 / 0.5 20 28 microstyle, 5 pin D-sub, 15 pin, male
Analog functions Visual communication indicators Specification Device type I / O slave messaging Setpoint relays Range mbar Relay contact Hysteresis % of reading Contact rating V DC / A Supply voltage for DeviceNet V DC / A Supply voltage for gauge V DC Connector for DeviceNet Connector for HPG (analog output, supply voltage, setpoints)
Specifications
HPG400-SP Profibus DP
Baud rates Address Digital functions kBaud MBaud 9.6 / 19.2 / 93.75 / 187.5 / 500 1.5 / 12 2 switches (address 00 - 127) or network programmable read pressure, select units: Torr, mbar, Pa Pirani full scale adjust monitor gauge status safe state allows definition of behavior in case of error detailed alarm and warning information 0 10 V analog output pressure indication two setpoint relays A + B 2 1 x 10-6 100 n.o., potential free 10 60 / 0.5 D-sub, 9 pin, female D-sub, 15 pin, male
Analog functions Setpoint relays Range mbar Relay contact Hysteresis % of reading Contact rating V DC / A Connector for Profibus DP Connector for HPG (analog output, supply voltage, setpoints) Vacuum Control Catalog 2005-2006 - A28
Vacuum Gauges
HPG400 (continued)
Dimensions
Accessories Power supply 24 V DC / RS232C line

HPG400 D-Sub, 15 pin, female 5m 24 V DC supply 5m RS232 to PC / PLC D-Sub,9 pin, female
1.8 m 90 to 250 V AC supply
Vacuum Gauges Bayard-Alpert Pirani Capacitance Diaphragm Gauge

TripleGauge BCG450
The INFICON Bayard-Alpert Pirani Capacitance Diaphragm Gauge, BCG450, combines the advantages of three different technologies in a single, compact, economical package to measure process and base pressure from 5 x 10-10 to 1500 mbar (3.75 x 10-10 to 1125 Torr). The BCG450 is designed to take the place of three sensors (hot ion, convection enhanced Pirani and vacuum switch), thus reducing cost and valuable tool space. Advantages
BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas-mixture Pirani interlock protects the hot filament from premature burnout Automatic high vacuum and atmospheric Pirani adjustment reduces operator interventions Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility Optional graphic display and Fieldbus interfaces available
Applications

Pressure measurement in Semiconductor process, transfer and loadlock chambers Industrial coating General vacuum measurement and control on systems in the low to ultra high vacuum range
Ordering Information Type DN 25 ISO-KF DN 40 CF-R Replacement sensor 25 ISO-KF Replacement sensor 40 CF-R
Available
1)
BCG450
without LCD display
BCG450
with LCD display
with Profibus DP1)
BCG450-SP 353-554 353-556
with DeviceNet1)
BCG450-SD 353-557 353-558
with RS4851)
BCG450-SR 353-559 353-560
353-550 353-551 354-492 354-493

1.Qt 2004
353-552 353-553 354-492 354-493

on request
354-492 354-493
on request
354-492 354-493
1.QT 2004
354-492 354-493
on request
not available with LCD display
Accessories Power supply 24V DC / RS 232 C line Baffle 353-511 353-512
Bayard-Alpert Pirani Capacitance Diaphragm Gauge Vacuum Gauges
TripleGauge BCG450 (continued)

Specifications
BCG450 Standard
Measurement range Accuracy 10-8 to 10-2 mbar 10-2 to 50 mbar 50 to 950 mbar 950 to 1050 mbar Hot ion emission on (selectable high / low, via RS232 / Fieldbus) Degas1) p < 7.2 x 10-6 Pressure, max. absolute Temperature Operation (ambient) Storage Bakeout at flange electronics removed Supply Output signal analog Measurement range Relation voltage / pressure Error signal Minimum load Interface (digital)2) Connector Cable length, max.3) Materials exposed to vacuum Internal volume KF / CF Weight KF / CF Protection type
1) 2)
BCG450 Display
mbar (Torr) % of reading % of reading % of reading % of reading mbar mbar mbar bar C C C C V / A DC V V V / Decade V k
5 x 10-10 to 1500 (3.75 x 10-10 to 1125) 15 15 5 2.5 2 x 10-2 (high) 8 x 10-3 (low) Electron bombardment, max. 3 min 5 0 to +50 -20 to +70 80 150 20 to 28 / 0.8 0 to 10.3 0.774 to 10.3 0.75 0.3 / 0.5 10 RS232C D-sub, 15 pin, male 100 (330) Yttrium oxide, iridium, stainless steel, molybdenum, Cu, W, glass, NiFe, NiCr, AI2O3, SnAg 24 (1.46) / 34 (2.1) 285 / 550 IP30
BCG450 Standard BCG450 with LCD display option
m (ft)
cm3 (inch)3 g
Reduced accuracy during degas Simultaneous use of RS232C or VGC400 series controllers and Fieldbus is not allowed 3) RS232C operation <30m
TripleGauge BCG450 (continued)

Specifications
BCG450-SD DeviceNet
Protocol Data rate switch Cable length 125 kbps 250 kbps 500 kbps MAC ID Network size Digital functions kBaud m (ft) m (ft) m (ft) DeviceNet, group 2 slave only 125, 250, 500 or network programmable 500 (1650) 250 (825) 100 (330) 2 switches (address 00 - 63) or network programmable Up to 64 nodes per segment Read pressure, select units: Torr, mbar, Pa Degas function Monitor gauge status Safe state allows definition of behavior in case of error Detailed alarm and warning information 0 to 10 V analog output pressure indication Two setpoint relays A + B LED network status (green / red) LED module status (green / red) DeviceNet Vacuum Gauge Device Profile CG for combination gauge no no no no 125 / 250 / 500 no no yes no no 2 1 x 10-9 to 1400 n.o., potential free 10 60 / 0.5 D-sub, 15 pin, male 11 to 25 / 0.5 20 to 28 Microstyle, 5 pin D-sub, 15 pin, male
BCG450 DeviceNet
Analog functions Visual communication indicators Specification Device type Explicit peer to peer messaging I / O peer to peer messaging Configuration consistency value Faulted node recovery Baud rates kBaud Master / Scanner I / O slave messaging Bit Strobe Polling Cyclic Change of State (COS) Setpoint relays Range mbar Relay contact Hysteresis % of reading Contact rating V / A DC Connector Supply for DeviceNet V / A DC Supply for gauge V DC Connector for DeviceNet Connector for BCG, analog output and power supply
TripleGauge BCG450
Specifications
(continued)
BCG450-SP Profibus DP
Baud rates Address Digital functions kBaud MBaud 9.6 / 19.2 / 93.75 / 187.5 / 500 1.5 / 12 2 switches (address 00 - 127) or network programmable Read pressure, select units: Torr, mbar, Pa Degas function Monitor gauge status Safe state allows definition of behavior in case of error Detailed alarm and warning information 0 to 10 V analog output pressure indication Two setpoint relays A + B No No D-sub, 9 pin, female 2 1 x 10-9 to 1400 n.o., potential free 10 60 / 0.5 D-sub, 15 pin, male
BCG450 Profibus DP
Analog functions Expanded user parameter data Sync-Mode and Freeze-Mode Connector Setpoint relays Range Relay contact Hysteresis Contact rating Connector
mbar % of reading V / A DC
TripleGauge BCG450
Specifications
(continued)
BCG450-SR RS485
Baud rates Address Digital functions kBaud 0.3 / 1.2 / 2.4 / 4.8 / 9.6 / 19.2 / 28.8 2 switches (address 00 - 127) or network programmable Read pressure, select units: Torr, mbar, Pa Degas function, Pirani full scale adjust Monitor gauge status Detailed alarm and warning information 0 to 10 V analog output pressure indication Two adjustable setpoint relays A + B D-sub, 9 pin, male D-sub, 15 pin, male 2 1 x 10-9 to 100 n.o., potential free 10 60 / 0.5
BCG450-SR with RS485
Analog functions Connector for RS485 for gauge (analog output, power, setpoints) Setpoint relays Range Relay contact Hysteresis Contact rating
mbar % of reading V / A DC
Dimensions
Accessories
Power supply 24 V DC / RS 232 C line

D-Sub, 15 pin, female 5m 24 V DC supply 5m RS232 to PC / PLC D-Sub, 9 pin, female,
1.8 m 90 to 250 V AC supply
Baffle:
Prevents contamination of the sensor. Easy installation into the vacuum connection - no tools required.
Standard
Baffle
Vacuum Gauges Pirani Standard Gauge

PSG500, PSG500-S, PSG502-S
The INFICON Pirani Standard Gauges, PSG500 and PSG502-S, employ the most advanced digital Pirani technology available in the marketplace. The rugged stainless steel sensor cell and compact design qualify them for use on semiconductor systems and for standard applications, such as fore vacuum lines.
Advantages

Easy push button ATM and HV adjustment Space saving rugged design Aluminium housing Mounts in any orientation Stainless steel measuring cell with metal-sealed feedthrough Logarithmic signal output for easy integration 10 bar absolute overpressure with threaded connections 250 C bakeable version Nickel filament option for corrosive applications Optional setpoints
Applications

Controlling high vacuum ionization gauges Fore vacuum pressure monitoring Safety circuits in vacuum systems General vacuum measurement and control in the fine and rough vacuum range
Pirani Standard Gauge Vacuum Gauges
PSG500, PSG500-S, PSG502-S (continued)

Ordering Information Type
Setpoints Filament
PSG500
none tungsten
PSG500-S
two setpoints tungsten
PSG502-S
two setpoints nickel
DN 16 ISO-KF DN 16 CF-R 1/8 NPT 8 VCR 4 VCR

350-060 350-062 350-061 350-064 350-065 350-063 350-066 350-067 350-068

tungsten
350-080 350-082 350-081 350-084 350-085 350-083 350-086 350-087 350-088
350-140 350-142 350-141 350-144 350-145 350-143 350-146 350-147 350-148

nickel
1/2 tube 7/16-20 UNF DN 16 ISO-KF long tube DN 16 CF-R long tube Replacement sensor
Filament
DN 16 ISO-KF DN 16 CF-R 1/8 NPT 8 VCR 4 VCR 1/2 tube 7/16-20 UNF DN 16 ISO-KF long tube DN 16 CF-R long tube
350-920 350-922 350-921 350-924 350-926 350-923 350-925 350-927 350-928
350-900 350-902 350-901 350-904 350-906 350-903 350-905 350-907 350-908
PSG500, PSG500-S, PSG502-S (continued)

Specifications Type
Filament
PSG500
tungsten
PSG500-S
tungsten
PSG502-S
nickel
Measuring principle Measurement range (air, O2, CO, N2) Accuracy (N2) 1 x 10-3 100 mbar 5 x 10-4 1 x 10-3 mbar 100 1000 mbar Resolution Repeatability (air) 1 x 10-3 100 mbar Output signal (measurement signal) Voltage range Measurement range Voltage vs. pressure Error signal Output impedance Minimum loaded impedance Response time Gauge identification Adjustment Setpoint Setting range Hysteresis Relay contact Switching time Supply voltage At gauge Ripple Current consumption Power consumption Electrical connection Sensor cable Cable length Materials exposed to vacuum Filament Internal volume DN 16 ISO-KF, DN 16 CF-R, 7/16-20 UNF DN 16 ISO-KF & DN 16 CF-R long tube 1/8 NPT, 4 VCR, 8 VCR, 1/2 tube Admissible pressure Admissible temperature Operation 1) Vacuum connection Storage Mounting orientation Degree of protection Weight DN 16 ISO-KF, 7/16-20 UNF DN 16 CF-R, 4 VCR 1/8 NPT, 1/2 tube 8 VCR, DN 16 ISO-KF long tube DN 16 CF-R long tube
1) 2)
mbar % of reading % of reading % of reading % of reading % of reading V V V k ms k
thermal conductance according to Pirani 5 x 10-4 to 1000 15% 50% 50% 1% 2% 0 +10.3 +1.9 +10.0 logarithmic 1.286 V/decade 0 +0.5 (filament rupture) 2 x 4.7 10, short-circuit proof 80 27.0, referenced to supply common one tactile switch for ATM and HV adjustment none 2 2 x 10-3 500 10% above lower threshold 30 / 0.5 floating <20 +14 +30 1 <500 (max. starting current) 1 FCC 68 / RJ45 appliance connector, 8 poles, male 8 poles plus shielding 100 (8 x 0.14 mm2) DIN 1.4301, DIN 1.4305, DIN 1.4435, glass, Ni, NiFe W W Ni 1.5 10 2 10, limited to inert gases +5 +60 2) 80 / 250 -20 +65 any IP40 80 100 70 130 140
mbar % of reading V DC / A DC ms V DC Vpp mA W
cm3 cm3 cm3 bar (absolute) C C C
g g g g g
In horizontal mounting orientation Long tube
PSG500, PSG500-S, PSG502-S

Dimensions mm (inches)
50 (1.97) 65 (2.56)
(continued)
20.9 (0.82)
32.8 (1.29)
15 (0.59)
70.3 (2.77)
31.5 (1.24)
29 (1.14)
19 (0.75)
DN 16 CF-R
41.5 (1.63)
DN 16 ISO-KF
14 (5.5)
1/2" tube
116 (4.57)
DN 16 ISO-KF
4 VCR
DN 16 CF-R
115 (4.53)
1/8" NPT
24 (0.95)
7/16-20 UNF
8 VCR

PSG100-S, PSG101-S
The INFICON Pirani Standard Gauges PSG100-S and PSG101-S are especially designed or easy integration into vacuum systems using Profibus DP or DeviceNetTM fieldbus protocols. The gauges are equipped with a set point and for corrosive applications, a platinum filament version is available.
Advantages
Fieldbus interface (Profibus DB, DeviceNetTM) for easy integration into vacuum systems using network communications For corrosive applications or high levels of water vapors the PSG101-S uses a platinum filament and a Al2O3 ceramic feedthrough Setpoint with adjustable threshold over a wide range Mounts in any orientation Logarithmic analog output signal Sensor cell is easily replaced
Applications

Processes with corrosive gases (PSG101-S) Fore vacuum pressure monitoring Control of high vacuum ionization gauges Safety circuits in vacuum systems General vacuum measurement and control in the fine and rough vacuum range
Ordering Information Type With setpoint With DeviceNet (PSG100-SD, PSG101-SD)

TM
PSG100-S
DN 16 ISO-KF, Tungsten
PSG101-S
DN 16 ISO-KF, Platinum
n/a 350-021 350-980 350-980
350-030 350-031 350-98 350-981
With Profibus DP (PSG100-SP, PSG101-SP) Replacement sensor (DN16 ISO KF)
Specifications
PSG100-SD DeviceNet, PSG101-SD DeviceNet

Device type Explicit peer to peer messaging I / O peer to peer messaging Configuration consistency value Faulted node recovery Baud rates Master / Scanner I / O slave messaging Bit Strobe Polling Cyclic Change of State (COS) Supply for DeviceNet Connector for DeviceNet generic no no no no 125 / 250 / 500 no yes yes yes yes 11 to 25 Phoenix Combicon, 5 pin
kBaud
V DC
Dimensions
mm (inches)

PSG050 / PSG051
Advantages

Measurement range 5 x 10-4 to 1000 mbar (3.75 x 10-4 to 750 Torr) Tungsten or platinum filament Temperature compensated 0C to 40C Constant filament temperature
PSG050: Aluminium sensing cell with tungsten filament Excellent temperature compensation PSG050 1/8 NPT: Stainless steel sensing cell with tungsten filament PSG051: Stainless steel sensing cell with platinum filament and ceramics feedthrough Well suited for corrosive processes and water vapor atmospheres
Operating Units
Vacuum Gauge Controller VGC012 / VGC023
Type DN 16 ISO-KF 1/8 NPT Replacement sensing cell DN 16 ISO-KF
Ordering information for cables see Data Sheets of VGC012 / VGC023
PSG050 399-500 350-980
PSG050 1/8 NPT 399-501
PSG051 399-502 350-981
Specifications
PSG050
Measurement range Temperature Operation (ambient) Storage Filament Filament temperature Pressure, max. absolute Volume of the sensing cell, approx. Vacuum connection Materials exposed to vacuum C bar cm3 C C 0 to +40 80 Tungsten 110 3 11 DN 16 ISO-KF Tungsten, aluminum, nickel-plated steel, stainless steel, NiFe, glass CrNi, epoxy cement mbar (Torr)
-4
PSG050 1/8" NPT

5 x 10 to 1000 (3.75 x 10 to 750) 0 to +40 80 Tungsten 110 3 11 1/8 NPT Tungsten, stainless steel, NiFe, glass, CrNi, epoxy cement
-4
PSG051
0 to +40 80 Platinum 110 10 10 DN 16 ISO-KF Platinum, stainless steel, CrNi, AL2O3, NiFe
Additional specifications see Data Sheets and Operating Manuals VGC012 / VGC023
Dimensions
35 (1.4)
144 (5.7)
135 (5.3)
122 (4.8)
DN 16 ISO-KF 1/8" NPT
5 (0.2)
20 (0.8)
40 (1.6)
mm (inch)
133 (5.2)
Vacuum Gauges Pirani Capacitance Diaphragm Gauge

PCG400, PCG410
The INFICON PCG Pirani Capacitance Diaphragm Gauge is the first vacuum gauge to combine the advantages of a ceramic capacitance diaphragm gauge and the cost effectiveness of a Pirani in one compact package. In the measurement range between 100 mbar (75 Torr) and atmosphere, where Pirani sensors lose sensitivity, the capacitance diaphragm technology supplies accurate, gas-type and flow independent measurement values up to 1500 mbar (1125 Torr). Available with up to two integrated relays, the PCG can eliminate the need for 1/2 atm or other expensive switches. To simplify tool integration, the Pirani and CDG signals are combined into a single log/linear analog output spanning the full-range of the gauge. Advantages

Gas-type-independent above 100 mbar (75 Torr) - Enables safe venting with any gas mixture Higher accuracy and reproducibility at atmosphere - For reliable detection of atmospheric pressure, no frequent readjustment at atmospheric pressure anymore Independence of mounting position - Provides engineering freedom in tool design Faster atmosphere detection - Eliminates waiting time and thus shortens process cycle time Compact design - Saves valuable space on the tool One linear/log output signal over the entire range - For easy tool integration
Applications

Loadlock control Forevacuum pressure monitoring Safety circuits in vacuum systems
General measurement and control in the medium and rough vacuum range Control of high vacuum ionization gauges
Ordering Information Type

Setpoint Connector
PCG400
none FCC 68
PCG400-S
with 2 Setpoints FCC 68
PCG410
none 9 D-Sub
PCG410-S
with 1 Setpoint 9 D-Sub
DN 16 ISO-KF 1/8 NPT DN 16 CF-F 8 VCR , female

355-000 355-001 355-002 355-004 355-005
355-010 355-011 355-012 355-014 355-015
355-020 355-021 355-022 355-024 355-025
355-030 355-031 355-032 355-034 355-035
4 VCR , female
Pirani Capacitance Diaphragm Gauge Vacuum Gauges
PCG400, PCG410 (continued)

SP1 SP1
SP2 SP2
Specifications
PCG400
FCC 68
PCG400-S
FCC 68
SP1 SP1
SP2 SP2
PCG410
9 D-Sub
PCG410-S
9 D-Sub
SP1 SP1
for INFICON VGC40x vacuum gauge controllers
for direct connection to PC / PLC
Electrical connection Measurement range Accuracy (N2) 1 x 10-3 to 50 mbar 50 to 950 mbar ATM (950 to 1050 mbar) Repeatability (N2) 1 x 10-3 to 1100 mbar Mounting orientation Setpoint Setting range (N2) Relay contact Hysteresis Contact rating Relay status Pressure, max. absolute Temperature Operation (ambient) Storage Bakeout at flange Filament Power supply Voltage Consumption, max. Output signal analog Measurement range, logarithmic Relation voltage / pressure Response time Connector Cable length, max. Materials exposed to vacuum Internal volume KF / CF Weight KF / CF Protection type
FCC 68, 8 pin mbar Torr % of reading % of reading % of reading % of reading none mbar
SP1
D-Sup, 9 pin, male 5 x 10-4 to 1500 -4 to 1125 SP1 3.8 x 10 15% 15% 2.5% 2% any
SP1 SP1 SP2 SP2
V DC / A bar C C C C V DC W V V V / Decade ms m (ft) cm3 g
2 1.5 x 10-3 to 1400 n.o. / potential free 10% of threshold 30 / 1 LED, green 5 +10 to +50 -20 to +65
none
1 1.5 x 10-3 to 1400 n.o. / potential free 10% of threshold 30 / 1 LED, green
+80 <160 15 to 30 (Ripple 1 Vpp) 2.5
0 to +10.3 0 to +9.0 +1.9 to +10.23 +2.2 to +8.68 1.286 1 10 10 FCC 68, female, 8 pin (shielded) 100 (330) Al2O3 (>99.5%), tungsten, stainless steel, Cu, glass, NiFe, Ni SnAg, AgPd 6/8 90 / 120 IP 40
Vacuum Gauges Pirani Capacitance Diaphragm Gauge
PCG400, PCG410 (continued)

Dimensions
28 (1.1)
45 (1.77)
39 (1.54)
26.3 (1.03)
52.7 (2.07)
68.3 (2.69)
45 (1.78)
DN 16 ISO-KF DN 16 CF-F
1/8" NPT 8 VCR (female)
56.3 (2.22)
4 VCR (female)
Penning Gauge Vacuum Gauges
Penning Gauge
PEG100
The INFICON Penning Gauge PEG100 provides reliable high vacuum measurements. The rugged Penning cold cathode sensor has no filament to burn out. Due to titanium cathode plates and the reduced high voltage after plasma ignition, the gauge can be operated also in sputtering applications. The fieldbus options, in addition to the logarithmic analog output signal, allow easy integration into vacuum systems using Profibus DP or DeviceNet protocols.
ADVANTAGES
Wide measurement range from 5 x 10-9 to 1 x 10-2 mbar (7.5 x 10-10 to 7.5 x 10-10 Torr) All-metal cold cathode sensor (Penning) with ceramic feedthrough New electrode geometry provides excellent ignition properties Decreased high voltage after plasma ignition and titanium cathode plates reduce risk of contamination, even during sputtering operations with argon The anode ring and the titanium cathode can be cleaned or replaced easily Minimal magnetic field intensity adjacent to gauge LED indicator for power on and plasma ignited Logarithmic analog output signal Fieldbus interface (Profibus DB, DeviceNet) for easy integration into vacuum systems using network communications
APPLICATIONS

High vacuum pressure monitoring Evaporation and sputtering systems General vacuum measurement and control in the fine and high vacuum range
Ordering Information Type DN 25 ISO-KF DN 40 CF-R Replacement cathode plates, titanium

Set of 5 pieces
PEG100 351-000 351-002 351-490
PEG100-D 351-003 351-004 351-490
with DeviceNetTM
with Profibus DPTM
PEG100-P 351-005
351-490
Vacuum Gauges Penning Gauge
PEG100 (continued)
Specifications
PEG100
Measurement range Accuracy 10-8 to 10-4 mbar Pressure, max. absolute Temperature Operation (ambient) Storage Bakeout without electronics with electronics, at flange Supply Voltage Consumption, max. Output signal analog Measurement range Relation voltage / pressure Connector Cable length, max. (analog) Materials exposed to vacuum Internal volume Weight, approx. Protection type mbar Torr % of reading bar C C C C V DC W V V V / Decade m (ft) cm3 (inch)3 g 1 x 10-9 to 1 x 10-2 7.5 x 10-10 to 7.5 x 10-3 30 10 +10 to +50 -20 to +75 350 70 14.5 to 36 <2 0 to 10.6 0.66 to 10 1.333 FCC 68, female, 8 pin (shielded) 100 (330) Stainless steel, CrNi, AI2O3, NiFe, Mo, Cu, Ni, Ti 21 (1.28) 500 IP40
Specifications
PEG100-D DeviceNet
Device type Explicit peer to peer messaging I / O peer to peer messaging Configuration consistency value Faulted node recovery Baud rates Master / Scanner I / O slave messaging Bit Strobe Polling Cyclic Change of State (COS) Supply for DeviceNet Connector for DeviceNet generic no no no no 125 / 250 / 500 no yes yes yes yes 11 to 25 Phoenix Combicon, 5 pin
kBaud
V DC
Specifications
PEG100-P Profibus DP
Supported baud rates (auto detection) Expanded user parameter data Configuring Number of input and output data Sync-Mode and Freeze-Mode Connector Vacuum Control Catalog 2005-2006 - A48 kBaud Bytes 9.6 / 19.2 / 93.75 / 187.5 / 500 / 1500 5 2 Yes D-sub, 9 pin
PEG100 (continued)
Dimensions
Vacuum Gauges Inverted Magnetron Pirani Gauge

MPG400/401
The INFICON Inverted Magnetron Pirani Gauges, MPG400 and MPG401, measure from 5 x 10-9 mbar to atmosphere (3.8 x 10-9 Torr to atmosphere). Combining technologies into one single compact unit with one logarithmic analog out put signal significantly reduces the complexity of installation, setup and integration.
ADVANTAGES

Combination gauge Inverted Magnetron & Pirani Wide measurement range from 5 x 10-9 mbar to atmosphere No filament to burn out Excellent ignition properties Easy to clean FPM or metal-sealed feedthrough LED indicator for high voltage on Logarithmic analog output signal
APPLICATIONS

High vacuum pressure monitoring Base pressure for evaporation and sputtering systems General vacuum measurement and control in the medium and high vacuum range
Ordering Information Type DN 25 ISO-KF DN 40 ISO-KF DN 40 CF-F MPG400

FPM sealed
MPG401
metal-sealed
351-010 351-011 351-012
351-020 351-021 351-022
Accessories Type Magnetic shield MPG400

FPM sealed
MPG401
metal-sealed
351-023
351-023
Vacuum Gauges
MPG400/401 - continued
Specifications
MPG400
FPM sealed
MPG401
metal-sealed
Measurement range (air, N2) Accuracy (N2) 1 x 10-8 100 mbar Repeatability 1 x 10-8 100 mbar Mounting orientation Admissible pressure Admissible temperature Operation (ambient) Storage Bake-out 1) Filament temperature (Pirani) Supply voltage At gauge At supply unit with max. cable length 2) Ripple Power consumption Fuse to be connected Output signal (measurement signal) Voltage range Measurement range Voltage vs. pressure Error signal Output impedance Minimum loaded impedance Response time p > 10-6 mbar p = 10-8 mbar Identification gauge Status Pirani-only mode Combined Pirani / cold cathode mode LED Electrical connection Sensor cable Cable length Operating voltage Operating current Materials exposed to vacuum Internal volume Weight DN 25 ISO-KF DN 40 ISO-KF DN 40 CF-F Protection category Standards
1) 2)
mbar (Torr) % of reading % of reading bar (absolute) C C C C V DC V DC Vpp W AT V V V V k ms ms k
5 x 10-9 1000 (3.8 x 10-9 760) 30% 5% any 10 (limited to inert gases) +5 +55 40 +65 150 120 +15 +30 +16 +30 1 2 1 0 +10.5 +1.82 +8.6 logarithmic, 0.6 V/decade <0.5 (no supply) >9.5 (Pirani sensor, filament rupture) 2 x 10 10, short-circuit proof <10 1000 85, referenced to supply common 0 (low) 15 30 (high) high voltage on FCC 68 appliance connector, 8 poles, female 8 poles plus shielding 50 (8 x 0.14 mm2) 3.3 500 stainless steel, Al2O3, FPM75, stainless steel, Al2O3, Ag, Cu, Sn Mo, Ni, Au, W Mo, Ni, Au, W 20 700 720 980 730 750 1010 IP 40 EN 61000-6-2, EN 61000-6-3, EN 61010-1 V
V LED green
m kV A
cm3 g g g
Without electronics and magnetic shielding. The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable.
Vacuum Gauges Inverted Magnetron Pirani Gauge
Dimensions
[mm]
Spare Parts Type Maintenance kit, comprising support/centering ring seals ignition aid Repair kit, comprising Pirani element anode anode extension 1) Cu seal 1) screw fitting 1) support/centering ring seals ignition aid Ignition aid kit, comprising Ignition aid Mounting tool for ignition aid
1)
MPG400
FPM sealed
MPG401
metal-sealed
351-999
351-997
MPG401 MPG400
60 75
60
75
351-998
351-996
92
105
55
15.5
55
28
32
63.5
63.5
351-995 351-994
351-995 351-994
MPG401 only
DN 25 ISO-KF
18.5
18
DN 40 ISO-KF
24
DN 40 CF-F
Penning Gauge
PEG050
The Penning Gauge PEG050 provides reliable high vacuum measurements. The rugged Penning cold cathode sensor has no filament to burn out. Due to titanium cathode plates and the reduced high voltage after plasma ignition, the gauge can be operated also in sputtering applications.
Advantages

Rugged Insensitive to air inrushes and vibrations Easy disassembly and cleaning of the measurement system Exchangeable cathode plate Improved ignition characteristics through patented anode design Titan cathode plates grant longer lifetime
Operating Units
Vacuum Gauge Controller VGC023
Ordering Information Type DN 25 ISO-KF DN 40 ISO-KF Replacement kit, consisting of: Cathode plate (5 pcs.) Ceramic disc (5 pcs.) Gauge for clearance distance Replacement anode ring
Ordering information for cables see Data Sheet of VGC023 (tiba17e1)
PEG050 399-510 399-511 351-490
351-499
Vacuum Gauges Penning Gauge
PEG050 (continued)
Specifications
PEG050
Measurement range High voltage supply (anode potential) Temperature Operation (ambient) Storage Pressure, max. absolute Internal volume Materials exposed to vacuum Weight, approx. DN 25 ISO-KF / DN 40 ISO-KF mbar (Torr) kV C C bar cm3 (inch3) 1 x 10-9 to 10-2 (0.75 x 10-9 to 10-2) + 3.3 / +1.6 0 to +80 -25 to +80 6 21 (1.28) Stainless steel, CrNi, AL2O3, Ti 0.3 / 0.4
kg
Additional specifications see Data Sheet or Operating Manual VGC023
Dimensions
mm (inches)
50 (2.0)
127 (5)
89 (3.5)
DN 25 ISO-KF / DN 40 ISO-KF
Vacuum Gauges

VGC401, VGC402, VGC403
VGC401
Your complete solution for process measurement and control. Compatible with four measurement principles hot cathode, cold cathode, Pirani, capacitance diaphragm gauges, the VGC400 series of controllers can monitor the entire pressure range from 10-10 to 1500 mbar (10-10 to 1125 Torr).
VGC402
Advantages
Firmware upgrades available on-line are easily downloaded via the RS232 interface Programmable 0 to 10 V chart recorder output with logarithmic / linear characteristics for each gauge or gauge combination (VGC402/403 only) High resolution 16 Bit A/D converter Automatic identification of the connected INFICON gauges
User selectable measurement unit (mbar, Torr, Pascal, micron) Up to six adjustable setpoints with adjustable hysteresis may be assigned to any channel Versatile, compact bench-top model design can easily be mounted in a panel or 19 rack Widerange power supply 90 to 250V, 50 to 60Hz
VGC403
Ordering Information Type Vacuum Gauge Controller Adapter for rackmount 2HE / 3HE VGC401 398-010 398-499 VGC402 398-020 VGC403 398-021
Accessories Gauges Cable to VGC 401/402/403 in m (ft) 3 (9.9) 5 (16.5) 10 (33.0) 15 (49.5) 20 (66.0) 30 (99.0)
other lengths on request
PCG400 PSG10X / PSG400 / PSG50X PEG100 / MPG40X 398-500 398-501 398-502 398-503 398-504 398-505
BCG450 / BPG40X HPG400 BAG10X 398-520 398-521 398-522 398-523 398-524 398-525
CDG025 CDG045 CDG100 398-540 398-541 398-542 398-543 398-544 398-545
Vacuum Gauges Vacuum Gauge Controllers
VGC401, VGC402, VGC403 (continued)

Specifications
Type Measurement channels Display Range VGC401 1 LED 2 x 10-10 1500 (1.5 x 10-10 1125) 10 16 VGC402 2 LCD 5 x 10-10 1500 (3.75 x 10-10 1125) 10 16 VGC403 3 LCD 5 x 10-10 1500 (3.75 x 10-10 1125) 10 16
mbar (Torr) Rate 1/s A/D converter bit Connectable gauges with display range CDG025 / CDG045 / CDG100 Torr PCG400 mbar (Torr) PSG10X / PSG400 / PSG50X mbar (Torr) MPG40X mbar (Torr) PEG100 mbar (Torr) BCG450 mbar (Torr) BPG40X mbar (Torr) HPG400 mbar (Torr) BAG10X mbar (Torr) Measurement unit (selectable) Setpoints Setpoint relays Channel assignment Adjustment range Hysteresis Relay contact Contact rating V AC / A V DC / A Connector Analog output Range Programmable analog output Connector Interface (digital) Connector Power Supply V Frequency Hz Consumption W Temperature Operation (ambient) C
2 x 10-10 1 x 10-1 (1.5 x 10-10 7.5 x 10-2)
1 x 10-3 x FS 1 x FS 5 x 10-4 1500 (3.75 x 10-4 1125) 5 x 10-4 1000 (3.75 x 10-4 750) 5 x 10-9 1000 (3.75 x 10-9 750) 1 x 10-9 1 x 10-2 (7.5 x 10-10 7.5 x 10-3) 5 x 10-10 1500 (3.75 x 10-10 1125) 5 x 10-10 1000 (3.75 x 10-10 750) 2 x 10-6 1000 (1.5 x 10-6 750) mbar, Torr, Pascal, micron
1 1
4 1 or 2
6 1/2 or 3
30 / 1 60 / 0.5 D-sub, 9pin, male
Sensor dependent adjustable potential free change over contact 30 / 1 30 / 1 60 / 0.5 60 / 0.5 D-sub, 25pin, female D-sub, 25pin, female 0 10.3 Volt, sensor analog output signal 1 1 D-sub, 9pin, male D-sub, 9pin, male RS 232 C RS 232 C D-sub, 9pin, female D-sub, 9pin, female 90 250 50 60 45 5 50 90 250 50 60 65 5 50
D-sub, 9pin, male RS 232 C D-sub, 9pin, female 90 250 50 60 30 5 50
Dimensions
VGC401
106.2 (4.18) 91.2 (3.6)
3.5 (0.14)
VGC402 / VGC403
285 (11.2) 204.5 (8.05)
106.3 (4.19) 91.4 (3.6)
2.5 (0.1)
103.6 (4.08)
3.5 (0.14)
285 (11.2) 204.5 (8.05)
2.5 (0.1)
103 (4.06)
67.3 (2.65)
122.5 (4.82) 128.5 (5.06)
para
ch
para
mm (inch)
110 (4.33)
78 (3.07) 84 (3.3)
Vacuum Gauges
Vacuum Gauge Controller

VGC023
This controller for standard applications, with its three measurement channels (2x Pirani Standard Gauge and 1x Penning Gauge) covers the entire range of 12 decades between 1 x 10-9 mbar and 1000 mbar. Advantages
Selectable dual LCD display combining the advantages of analog and digital readouts (over 12 decades) Automatic switch over from Pirani to Penning (cold cathode) operation Clear display of pressure and operating status with analog trend indication, can also be read from a great distance Easy to operate Two adjustable switching thresholds with relay contact per measurement channel Logarithmic / linear 0 to 10V chart recorder output
Compact, rugged Penning gauge is capable of withstanding operation at high pressures Temperature compensated Pirani sensors Inexpensive replacement sensing cells and electrodes Fault indication for each channel in the event of a broken filament, a broken cable or failed plasma discharge Compact bench-top unit (1/4 19, 3 HU) with metal enclosure, which may also be installed in panel cut-outs and 19 racks Full remote control via RS 232 C interface
Applications
General pressure measurements on pump systems, for example: -Turbomolecular pump systems -Diffusion pump systems -Cryo pump systems
Vacuum melting, soldering and annealing furnaces Coating systems Analytical instruments
Type US version with 2m long main cord, Torr readout, 120V AC Euro version with 2m long main cord, mbar readout, 230V AC Japan version with 2m long main cord, mbar readout, 100V AC Pirani Standard Gauge Sensors: PSG050, DN 16 ISO-KF PSG050, 1/8 NPT PSG051, DN 16 ISO-KF Penning Gauge Sensors: PEG050, DN 25 ISO-KF PEG050, DN 40 ISO-KF 399-510 399-511 399-500 399-501 399-502 VGC023 399-556 399-557 399-558 Cable for 5 m (9.9 ft) 10 m (16.5 ft) 15 m (33 ft) 20 m (65.6 ft) 30 m (98.5 ft) 40 m (131 ft) 50 m (164 ft) 75 m (246 ft) 100 m (328 ft) PSG050 PSG051 399-600 399-601 399-617 399-602 399-603 399-604 399-614 399-615 399-616 PEG050 399-605 399-606 399-613 399-607 399-608 399-609 399-610 399-611 399-612
VGC023 (continued)
Specifications
VGC023
Measurement channels Display range Measurement unit (selectable) Measurement uncertainty Penning Gauge Pirani Standard Gauge Display Type of gas (selectable) Setpoints Adjustment range Penning Gauge Pirani Standard Gauge Hysteresis for the switching relay Ready indication Contact rating Contact life at 5 A Chart recorder output (Ra 2.5k) Penning Gauge Pirani Standard Gauge Control input for Penning Gauge Interface (digital) Mains connection 50/60 Hz Power consumption Storage temperature range Nominal temperature range Max. rel. humidity Weight V VA C C % kg cycles mbar mbar mbar (Torr) 2 Pirani channels, 1 Penning channel 1 x 10-9 to 1000 (0.75 x 10-9 to 750) mbar, Torr, Pa, Micron approx. 30% of the measurement value in the range 10-8 to 10-4 mbar/Torr approx. 20% of the measurement value in the range 10-3 to 10-2 mbar/Torr approx. 15% of the measurement value in the range 10-2 to 10 2 mbar/Torr digital, 7 segment LCD, analog, LCD bar graph Air, N2,Ar 6, 2 per channel, floating changeover contacts 1 x 10-8 to 1 x 10-2 5 x 10-3 to 500 standard 10% of trigger value, free adjustment for PSG and PEG 1 contact per channel, closed when ready AC 250 V / 5 A (resistive load), DC 60 V / 0.7 A (resistive load) 6 x 104 0 to 10 V, log./lin. divisions logarithm.: (0V; 1 x 10-9 mbar) 1.43 V / decade logarithm.: (0V; 1 x 10-3 mbar) 1.67 V / decade Prog. contr. compatible digital 24 V input, logic level (LOW) < 7V, 0 A; (HIGH) > 13 V, 7mA RS 232 C 100 / 120 / 200 / 230, +10/-15% (pre-selected) 35 -40 to +60 0 to 40 80 non-condensing 2.3
Additional specifications see Data Sheets and Operating Manuals PEG050 and PSG050/051
Dimensions
mm (inches)
122.5 (4.8)
112 (4.4)
128.5 (5)
Dimensional drawing and panel cut-out for Controller VGC023
282 (11.1)
91,5 (3.6)
106,5 (4.2)
350 (13.7)
104,5 (4.1)
353.5 (13.9)
Vacuum Gauges
Vacuum Gauge Controller

VGC012
Two channel gauge controller for operating thermal conductivity sensors (Pirani Gauges) covering a measuring range of 5 x 10-4 to 1000 mbar. (5 x 10-4 to 750 Torr). The relays built into the VGC012 make these instruments the ideal choice for process control systems. Advantages
Selectable dual LCD display combining the advantages of analog and digital readouts Clear display of pressure and operating status with analog trend indication, can also be read from a great distance Easy to operate temperature compensated Pirani sensors Two adjustable switching thresholds with relay contact per measurement channel Logarithmic / linear 0 to 10V chart recorder output
Fault indication for each channel in the event of a broken filament Compact bench-top unit (1/4 19, 3 HU) with metal enclosure, which may also be installed in panel cut-outs and 19 racks Full remote control via RS 232 C interface
Applications
General purpose pressure measurement and control in the fine and rough vacuum ranges, vacuum furnaces and analytical instruments Monitoring the operation of backing pumps and vacuum systems Control of ionization vacuum gauges
Type US version with 2m long main cord, Torr readout, 120V AC Euro version with 2m long main cord, mbar readout, 230V AC Japan version with 2m long main cord, mbar readout, 100V AC Pirani Standard Gauge Sensors: PSG050, DN 16 ISO-KF PSG050, 1/8 NPT PSG051, DN 16 ISO-KF 399-500 399-501 399-502 VGC012 399-552 399-553 399-554 Cable for 5 m (9.9 ft) 10 m (16.5 ft) 15 m (33 ft) 20 m (65.6 ft) 30 m (98.5 ft) 40 m (131 ft) 50 m (164 ft) 75 m (246 ft) 100 m (328 ft) PSG 399-600 399-601 399-617 399-602 399-603 399-604 399-614 399-615 399-616
VGC012 (continued)
Specifications
VGC012
Measurement channels Display range Measurement unit (selectable) Measurement uncertainty Pirani Standard Gauge Display Type of gas (selectable) Setpoints Adjustment range Pirani Standard Gauge Hysteresis for the switching relay Ready indication Contact rating Contact life at 5 A Chart recorder output (Ra 2.5k) Pirani Standard Gauge Interface (digital) Mains connection 50/60 Hz Power consumption Storage temperature range Nominal temperature range Max. rel. humidity Weight V VA C C % kg cycles mbar (Torr) mbar (Torr) 2 Pirani channels 5 x 10-4 to 1000 (3.75 x 10-4 to 750) mbar, Torr, Pa, Micron approx. 20% of the measurement value in the range 5 x 10-3 to 10-2 mbar/Torr approx. 15% of the measurement value in the range 10-2 to 10 2 mbar/Torr digital, 7 segment LCD, analog, LCD bar graph Air, N2,Ar 4, 2 per channel, floating changeover contacts 5 x 10-3 to 500 (3.75 x 10-3 to 375) standard 10% of trigger value, free adjustment 1 contact per channel, closed when ready AC 250 V / 5 A (resistive load), DC 60 V / 0.7 A (resistive load) 6 x 104 0 to 10 V, log./lin. divisions logarithm.: (0V; 1 x 10-3 mbar) 1.67 V / decade RS 232 C 100 / 120 / 200 / 230, +10/-15% (pre-selected) 12 -40 to +60 0 to 40 80 non-condensing 2
Additional specifications see Data Sheet and Operating Manual PSG050
Dimensions
mm (inches) Dimensional drawing and panel cut-out for Controller VGC012
122.5 (4.8)
112 (4.4)
128.5 (5)
282 (11.1)
91,5 (3.6)
106,5 (4.2)
350 (13.7)
104,5 (4.1)
353.5 (13.9)
Vacuum Switch
Vacuum Gauges
Vacuum Switch
VSA100A
The pressure switch VSA100A is used as a safety switch in vacuum systems. For example, to automatically interrupt the gas supply when venting vacuum systems with a purge gas at a pressure of 6 mbar below atmospheric pressure. At a differential pressure of 6 mbar resp. return switching pressure of 3 mbar below atmospheric pressure, an elastic diaphragm actuates a changeover contact which in turn may be used to switch directly any ancillary equipment. The electrical connections are protected by a plastic cover. Advantages

Reliable and budget-priced vacuum switch Long service life Rugged design Easy to integrate IP 44 protection Can be connected to a programmable control
Applications

Control of load lock chambers Safety shutdown of vacuum systems
Type
DN 16 ISO-KF, complete with 3 m (9.9 ft) cable
VSA100-A
399-001
Vacuum Gauges Vacuum Switch
VSA100A - continued
Specifications
Switching pressure Back switching Operating pressure (absolute) Helium permeation Leak rate Temperature Operation Storage Switching contacts (gold plated) Voltage max. Current max. Load min. Electrical connector Cable length, standard Vacuum connection Protective type Mounting orientation Internal volume Materials exposed to vacuum Weight g cm3 (inch3) m (ft) mbar mbar bar mbar l/s mbar l/s C C VDC/VAC mA mA 6 2 (below atmosphere) 3 2 (below atmosphere) <2 <10-6 <5 x 10-8 0 ... +85 -20 ... +85 Change over contact 24/24 30 (24 VDC) / 100 (24 VAC) 1 Cable, bare wire 3 (9.9) DN 16 ISO-KF IP 44 vertical (standing) 2 (0.122) Stainless steel 1.4305, EPDM, PTFE (Teflon) 315
Technical Note: Due to the diaphragm material used (EPDM) the Vacuum Switch VSA100A is not suited for applications in which the process gas -6 contains large quantities of helium. The leak rate of the diaphragm for helium is >10 mbar l/s.
Dimensions
72 (2.83)
DN16 KF
48.5 (1.9)
mm (inch)
50 (1.97)
Vacuum Feedthroughs
Vacuum Feedthroughs
Contents
VACUUM FEEDTHROUGHS
FRH DN 16 - DN 63 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B1
FRU DN 16 - DN 40 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B3
Rotary/Linear Motion Feedtroughs ISO-KF

FCH DN 16 - DN 40 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5

FPU DN 16 - DN 40 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7
DN 16 ISO-KF. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9 DN 40 CF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B11
Coxial Feedthroughs ISO-KF / CF-F

BNC / MHV DN 16 - 40 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B13
Vacuum Feedthroughs
METAL-CERAMIC CONNECTIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B15

DN 40 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B17
Viewports
DN 25 - DN 50 ISO-KF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B19 DN 63 - DN 160 ISO-K . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B21 DN 16 - DN 160 CF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B23 DN 63 - DN 160 ISO-F . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B25
Vacuum Feedthroughs
VACUUM BALL BEARINGS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B27 LUBRICANTS AND SEALING MATERIALS . . . . . . . . . . . . . . . . . . . . . . . . . . . . B29
Vacuum Control Catalog 2005-2006 - Bii
Rotary Feedthroughs
Vacuum Feedthroughs

FRH DN 16 - DN 63
Properties

For transmitting high torque With FPM shaft seal and ball bearings
Selection Data
Vacuum connection Feedthrough/seal Shaft measure mm DN 16 ISO-KF FPM 5 DN 25 ISO-KF FPM 8 DN 40 ISO-KF FPM 12 DN 63 ISO-K FPM 20
Type Part No. FRH016-H 214-300 FRH025-H 214-302 FRH040-H 214-304 FRH063-H 214-306 2)
Specifications
Transferable torque Rotational speed 1) Nm rpm 1.5 1500 3 6 60 30 20 000 000 1 x 10-9 6 1000 4 8 150 50 20 000 000 1 x 10-9 50 110 stainless steel 420/1.4021 aluminum 6063/3.2315 elastomer FPM kg 0.1 0.2 0.6 2 25 750 5 10 250 60 20 000 000 1 x 10-9 1 x 10-9 mbar ... 1 bar C C 100 500 10 20 500 100 10 000 000 1 x 10-9
Idling torque under vacuum Ncm Starting torque under vacuum Ncm Shaft load vacuum sided Radial force Axial force Service life Tightness, static Pressure (absolute) Operating temperature Bakeout temperature Materials exposed to process media Weight
1) 2)
N N Revolutions mbar l/s
When a reduced service life is acceptable, the rotation can be increased by up to a factor of two Centering ring / CR/aluminum Part No. 212-251 / FPM / stainless steel Part No. 212-281 not included in delivery
Vacuum Control Catalog 2005-2006 - B1
Vacuum Feedthroughs
Rotary Feedthroughs
FRH DN 16 - DN 63 - continued
Dimensions
FRH016-H
FRH025-H
FRH040-H
FRH063-H
Rotary Feedthroughs
Vacuum Feedthroughs
FRU DN 16 - DN 40
Properties

Bellow sealed All-metal version For very demanding vacuum requirements
Selection Data
Vacuum connection Feedthrough / seal Shaft connection mm DN 16 CF-F bellow 4 DN 40 CF-F bellow 8 DN 40 CF-F bellow 12
Type Part No. FRU016-H 214-310 FRU040-N 214-312 FRU040-L 214-314
Specifications
Transferable torque Dynamic Dynamic, at 300 C Static Rotational speed At max. torque Shaft load vacuum sided Radial force Axial force Service life Scale division Tightness Pressure (absolute) Operating temperature Bakeout temperature Materials exposed to process media Weight kg C C 304L/1.4306 304/1.4301 /2.4360 0.3 Nm Nm Nm rpm rpm N N Revolutions Degree mbar l/s 0.4 0.2 0.2 200 4 2 3 1000 500 60 20 2 000 000 5 x 10-11 1 x 10 mbar ... 2 bar
-10
10 2 5 500 300 100 30 1 000 000
10 5 1 000 000 10
300 300 304L/1.4306 304/1.4301 /2.4360 1.5 304L/1.4306 304/1.4301 303/1.4305 3.0
Vacuum Feedthroughs
Rotary Feedthroughs
FRU DN 16 - DN 40 - continued
Dimensions
FRU016-H
FRU040-N
FRU040-L
Rotary/Linear Motion Feedthroughs Vacuum Feedthroughs
Rotary/Linear Motion Feedthroughs ISO-KF

FCH DN 16 - DN 40
Properties

Two FPM shaft seals Direct push/pull and rotary actuation With locking ring and optional anti-rotation device
Selection Data
Vacuum connection Feedthrough/seal Shaft connection Travel mm DN 16 ISO-KF FPM M 3 / 5mm 50 DN 25 ISO-KF FPM M 4 / 8mm 100 DN 40 ISO-KF FPM M 6 / 12mm 150
Type Rotary/linear feedthrough Anti-rotation device Part No. Part No. FCH016-H 214-320 214-072 FCH025-H 214-322 214-073 FCH040-H 214-324 214-074
Specifications
Shaft load Radial force at max.travel Torsion torque Tightness, static Pressure (absolute) Operating temperature Bakeout temperature Materials exposed to process media Weight kg 0.1 C C N Nm mbar l/s 10 2 15 8 1 x 10-9 1 x 10 mbar ... 1bar
-8
30 20
50 110 stainless steel 304/1.4301 aluminum 6063/3.2315 0.2 0.3
Vacuum Feedthroughs
Rotary/Linear Motion Feedthroughs
FCH DN 16 - DN 40 - continued
Dimensions
FCH016-H
FCH025-H
FCH040-H
Feedthrough
Feedthrough
Feedthrough
Anti-rotation device
Linear Motion Feedthroughs
Vacuum Feedthroughs

FPU DN 16 - DN 40
Properties
With bellows for more demanding vacuum requirements Direct push and pull actuation High accuracy adjustment using micrometer screw
Selection Data
Vacuum connection Feedthrough/seal Shaft connection Actuator Travel DN 16 CF-R bellow M4x16 mm manual 25 DN 40 CF-R bellow M6x10 mm, 10 mm manual 50 DN 16 CF-R bellow M4x16 mm micrometer screw 20 DN 40 CF-R bellow M6x10mm, 10 mm micrometer screw 50
mm
Type Part No. FPU016-H 214-330 FPU040-H 214-332 FPU016-Z 214-334 FPU040-Z 214-336
Specifications
Travel per revolution Scale division Shaft load Radial force at max. Axial force vacuum Axial force against atm Torsion torque Tightness Pressure (absolute) Bakeout temperature Feedthrough Micrometer screw Materials exposed to process media Weight kg 0.15 0.75 C C 300 300 mm mm N N N Nm mbar l/s 5 20 85 100 0.2 10 100 140 200 0.5 0.5 0.01 20 185 200 0.2 5 x 10-11 1 x 10-10 mbar ... 2 bar 300 100 stainless steel 304L/1.4301 stainless steel 316Ti/1.4571 0.25 1 300 100 1 0.005 100 440 500 0.5
Vacuum Feedthroughs
Linear Motion Feedthroughs
FPU DN 16 - DN 40 - continued
Dimensions
FPU016-H FPU040-H FPU016-Z FPU040-Z
Vacuum Feedthroughs
DN 16 ISO-KF
Selection Data
Vacuum connection Number of feedthroughs Voltage per pole Current per pole V A DN 16 ISO-KF 4 50 1 DN 16 ISO-KF 9 50 2 DN 16 ISO-KF 9 50 2
Feedthrough Connector: vacuum side Connector: atmospheric side 214-111 214-171 214-112 214-172 214-113 214-191 214-172
Specifications
Connection Vacuum side Atmospheric side Diameter of connecting wire Tightness Pressure (absolute) Bakeout temperature (feedthrough and connector) Housing Insulator Seal Contacts (feedthrough and connector) mm mbar l/s solder connection connector 0.6 solder connection connector 1.2 1 x 10-9 1 x 10-8 mbar ... 2.5 bar C 130 stainless steel 303/1.4305 PEEK / Araldite FPM gold-plated bronze connector connector 1.2
Vacuum Control Catalog 2005 - B9
Vacuum Feedthroughs
DN 16 ISO-KF - continued
Dimensions
214-111 214-112 214-113
Feedthrough
Feedthrough
Feedthrough
214-191
Connector: vacuum side
214-171
214-172
214-172
Connector: air side
Vacuum Feedthroughs
DN 40 CF
Selection Data
Vacuum connection Number of feedthroughs Voltage per pole Current per pole
1) With water-cooling
kV A
DN 40 CF-F 1 0.3 70
DN 40 CF-F 1 1 200/1000 1)
DN 40 CF-F 2 0.3 70
DN 40 CF-F 4 1 8
DN 40 CF-F 9 1 8
Feedthrough Connection piece: vacuum side Connector: atmospheric side Connector: atm. side, H2O cooled 214-136 214-195 214-176 214-127 214-196 214-177 214-178 214-128 214-195 214-176 214-116 214-192 214-173 214-117 214-198 214-181
Specifications
Bakeout temperature Tightness Pressure (absolute) Flange Conductor Insulator Weight Connection piece: vacuum side Current A Bakeout temperature C Material Connector: atmospheric side Current max. Insulated, for use up to Bakeout temperature Contact Pieces A VAC/VDC C 304/1.4301 OFC 2.0040 Al2O3 0.15 2 20 400 304/1.4301 2 100 not insulated 150 silver-plated brass 304/1.4301 OFC 2.0040 Al2O3 0.5 1 10001) 400 2.0061 1 250 30/60 150 silver-plated brass C mbar l/s 400 5 x 10-11 1 x 10-10 mbar ... 2 bar 304/1.4301 OFC 2.0040 Al2O3 0.45 2 100 400 304/1.4301 2 100 30/60 50 silver-plated brass 304/1.4301 304/1.4301 Al2O3 0.3 5 12 400 304/1.4301 5 25 30/60 50 gold-plated brass 304/1.4301 304/1.4301 Al2O3 0.5 10 12 400 304/1.4301 10 25 30/60 50 gold-plated brass
Vacuum Feedthroughs
DN 16 CF - continued
Dimensions
214-126 214-195 214-176
10
19.5
25
KU 077
SW 8
M6
53
Coaxial Feedthroughs
Vacuum Feedthroughs
Coaxial Feedthroughs ISO-KF / CF-F

BNC / MHV DN 16 - 40
Properties

Based on MIL-C-39012A Voltage up to 5 kV DC With atmospheric connector
Selection Data
Vacuum connection Number of feedthroughs DN 16 ISO-KF 1 DN 16 ISO-KF 1 DN 16 CF-F 1 DN 16 CF-F 1 DN 40 CF-F 3
Type Part No. BNC 214-151 MHV 214-152 BNC 214-155 MHV 214-156 MHV 214-157
Specifications
Voltage AC, 50 Hz DC Current Frequency Impedance Insulation resistance at 20C Tightness Pressure (absolute) Housing, flange, conductor Feedthrough, seal Bakeout temperature With connector Without connector Standart connection Atmospheric connector Cable Weight kg C C kV kV A MHz mbar l/s 0.35 0.5 3 150 50-60 1010 1 x 10-9 1 x 10 mbar to 2.5 bar stainless steel Al2O3
-8
3.5 5 3
0.35 0.5 3 150 50-60 1010 1 x 10-10 1 x 10 mbar to 2.5 bar stainless steel Al2O3
-9 -8
3.5 5 3
3.5 5 3
1010 1 x 10-9 1 x 10 mbar to 2.5 bar stainless steel Al2O3 50 200 UG 932/U RG 59/U 0.1
1010 1 x 10-10 1 x 10 mbar to 2.5 bar stainless steel Al2O3

-9
1010 1 x 10-10 1 x 10-9 mbar to 2.5 bar stainless steel Al2O3 50 400 UG 932/U RG 59/U 0.5
50 200 UG 88/U RG 58/U 0.1
50 400 UG 88/U RB 58/U 0.14
50 400 UG 932/U RG 59/U 0.14
Vacuum Feedthroughs
Coaxial Feedthroughs
BNC / MHV DN 16 - 40 - continued

Dimensions
214-151 214-152 214-155 214-156 214-157
Vacuum Feedthroughs
Vacuum Feedthroughs
Vacuum Feedthroughs
METAL-CERAMIC CONNECTIONS
Properties
High grade materials allow repeated bakings at 400C
Selection Data
Voltage 1) 3 kV 2 kV 5 kV 10 kV
Part No. 214-161 214-162 214-163 214-164
Specifications
Insulator Connection a b Bakeout temperature Tightness Weight
1)
Al2O3 Fe-Ni Fe-Ni C mbar l/s g 400 5 x 10-11 5
Al2O3 Fe-Ni stainless steel 304/1.4301 400 5 x 10-11 12
Based on VDE 0110 for air and surface-leakage in atmosphere on both sides. Higher values up to factor two are admissible in pressures <10-4 mbar.
Vacuum Feedthroughs
Vacuum Feedthroughs
METAL-CERAMIC CONNECTIONS - continued

Dimensions
214-162 214-163 214-164
214-161
Liquid Feedthroughs
Vacuum Feedthroughs

DN 40
Properties

For H2O and LN2 Thermically insulated Especially suited for very hot and very cold applications
Selection Data
Vacuum connection Feedthrough/seal Tube dimensions Number of tubes mm DN 40 ISO-KF welded 8x1 2 DN 40 CF-F welded 8x1 2
Part No. 214-101 214-102
Specifications
Tightness Pressure Temperature range Material Weight kg C mbar l/s 1 x 10-9 10-8 mbar ... 10 bar -200 ... +150 stainless steel 304/1.4301 0.3 1 x 10-10 10-9 mbar ... 10 bar -200 ... +400 stainless steel 304/1.4301 0.4
Vacuum Feedthroughs
Liquid Feedthroughs
DN 40 - continued
Dimensions
214-101 214-102
Viewports Vacuum Feedthroughs
Viewports
DN 25 - DN 50 ISO-KF
Average transmittance curve Sapphire Kodial Borosilicate
Properties
Wide viewing angle
Selection Data
Vacuum connection Window Seal Flange Bakeout temperature DN 25 ISO-KF DN 40 ISO-KF borosilicate glass FPM aluminum 6082/3.2315 150 DN 50 ISO-KF
Part No. 214-003 214-004 214-005
Specifications
Tightness Pressure (absolute) Max. at 150 C Window thickness Weight mbar l/s bar mm g 20 30 1 x 10-9 1 x 10 mbar ... 4 bar 3
-8
3.8 40
Vacuum Feedthroughs
Viewports
DN 25 - DN 50 ISO-KF - continued
Dimensions
214-003
214-004
214-005
Mounting
Claws, screws and clamping ring not included
Viewports
DN 63 - DN 160 ISO-K
Properties
Wide viewing angle
Selection Data
Vacuum connection Window Seal Flange Bakeout temperature DN 63 ISO-K DN 100 ISO-K borosilicate glass FPM aluminum 6082/3.2315 150 DN 160 ISO-K
Part No. 214-006 214-007 214-008
Specifications
Tightness Pressure (absolute) Max. at 150 C Window thickness Weight
1)
mbar l/s bar mm kg 6 0.2
1 x 10-9 1 x 10 mbar ... 2 bar 1

-8
8 0.3
10 0.4
Claws not included
Vacuum Feedthroughs
Viewports
DN 63 - DN 160 ISO-K - continued

Dimensions
214-006
214-007
214-008
Mounting
Viewports
DN 16 - DN 160 CF
Properties

Protection window With Fe-Ni alloy as transition material
Selection Data
Vacuum connection Window Seal Flange Bakeout temperature DN 16 CF-F kodial glass DN 40 CF-F kodial glass DN 40 CF-F DN 63 CF-F DN 100 CF-F kodial glass DN 160 CF-F kodial glass sapphire glass kodial glass iron/nickel stainless steel 304/1.4301 400
Viewport Bolt set 214-021 213-416 214-022 standard 214-032 standard 214-023 standard 214-024 standard 214-025 standard
Specifications
Tightness Pressure (absolute) Min. Max. Max. at 400 C Window thickness Weight mbar l/s mbar bar bar mm kg 1.5 0.04 3 0.24 3 0.35 5 x 10-11 1 x 10-10 2 1 3.5 0.85 6 1.4 8 2.8
Vacuum Feedthroughs
Viewports
DN 16 - DN 160 CF - continued
Dimensions
214-006
214-007
214-008
Mounting
Viewports
DN 63 - DN 160 ISO-F
Properties
Wide viewing angle
Selection Data
Vacuum connection Window Seal Flange Centering ring Snap ring Bakeout temperature DN 63 ISO-F DN 100 ISO-F borosilicate glass FPM black anodized aluminum 6063/3.2315 aluminum 6063/3.2315 stainless steel 304/1.4301 150 DN 160 ISO-F
Viewport 1) Protective glass, 5 pcs.
1)
214-016 214-046
214-017 214-047
214-018 214-048
Claws, bolts, nuts and washer included
Specifications
Tightness Pressure (absolute) Max. at 150 C Window thickness Protective glass thickness Weight mbar l/s bar mm mm kg 7.5 2.5 0.8 1 x 10-9 1 x 10 mbar ... 2 bar 1
-8
11 2.5 1.4
15 2.5 3
Vacuum Feedthroughs
Viewports
DN 63 - DN 160 ISO-F - continued

Dimensions
214-006 214-007 214-008
Mounting
Vacuum Ball Bearings
Vacuum Feedthroughs
Vacuum Feedthroughs
VACUUM BALL BEARINGS
Properties
Especially suited for clean vacuum applications and extreme residual gas requirements With shields (non-rubbing seals) With dry lubrication Bearing clearance
Selection Data
Service life 1) (revolutions) Pressure (absolute) Operating temperature 2) Material mbar C > 20 Mio. 1 x 10-12 ... 1 x 10-2 -200 ... +300 stainless steel 440C/1.3543, 304/1.4301
Type Part No. 624 214-211 605 214-212 626 214-213 608 214-214 6000 214-215 6001 214-216
Specifications
Rotational speed at 20 C 300 C Load capacity 3) Static CO Dynamic C Axial load Fit according to ISO Weight
1) 2) 3)
rpm rpm N N
5000 1500 400 50 <<C G6 / f6 3
4000 1500 400 50 <<C G6 / f6 4
3000 1000 800 100 <<C G6 / f6 8
2500 800 1000 150 <<C G6 / f6 13
2000 500 1500 200 <<C G6 / f6 20
1500 300 2000 250 <<C G6 / f6 25
At half load and > 1000/min At -200 C reduction of tenacity At 20 C; half value at 300 C
Vacuum Feedthroughs
Vacuum Ball Bearings
VACUUM BALL BEARINGS - continued

Dimensions
214-211 214-212 214-213 214-214 214-215
Lubricants and Sealing Materials Vacuum Feedthroughs
Vacuum Feedthroughs
LUBRICANTS AND SEALING MATERIALS
High Temperature Lubricant

Prevents seizing of stainless steel screw connections at atmosphere even at high temperatures Remains fully effective for at least 10 bakeout cycles
Selection Data
Temperature resistance In packages of 1000 C 28 g
Type Part No. C 100 214-231
Sealing Material
For sealing small leaks
Selection Data
Temperature resistance Version In packages of C g -40 - 200 Paste 200 350 Spray 170
Type Part No. Rhodosil 340 214-233 Sprayseal 214-234
Vacuum Feedthroughs
Lubricants and Sealing Materials
LUBRICANTS AND SEALING MATERIALS - continued

Vacuum Grease/Oil

For sliding elastomer seals Low vapor pressure Good adhesiveness
Selection Data
Temperature resistance Vapor pressure at 20 C 100 C In packages of Material C mbar mbar 10 - 30 <10-8 25 g mineral grease -40 - 200 <5 x 10-7 <7 x.10-6 50 g silicon grease -20 - 200 < 10-12 < 10-7 10 g fluorinated grease -60 - 300 < 10-12 < 10-7 30 g fluorinated grease with MoS2 -60 - 300 < 10-12 < 10-7 10 ml fluorinated oil
Type Part No. Apezon M 214-236 Dow Corning 214-237 FU 090 214-238 FM 090 214-239 OL 090 214-240
Characteristics
Lubricity Resistance to Oxidation Chemicals Thermal decomposition very good good very good good very good good very good very good good good/very good very good very good good good very good very good good
Vacuum Valves
Vacuum Valves
Contents
VACUUM VALVES
DN 5 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C1

DN 16 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C4 DN 25 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C7 DN 40 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10
Solenoid Actuated Angle Valves

DN 16-40 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13

DN 63 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15
Manually Actuated Angle Valves

DN 16-63 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C18

DN 100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C20

DN 160 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C23

DN 250 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C25
Manually and Pneumatically Actuated

VBH063-X / VBP063-X/Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C27 VBH100-X / VBP100-X/Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C31 VBH160-X / VBP160-X/Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C35
Butterfly Valve
VBP250-X . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C39
Coarse Gas Dosing Valve

VDH010-A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C41
Dosing and Shut-Off Valve

VDH016-X . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C42

VDH040-U / VDE040-U / VCE500 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C44 Vacuum Control Catalog 2005-2006 - Cii
Contents Vacuum Valves

Gas Dosing Systems
Control Valve VDE016-X . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C49 Controller VCC500-Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C50 Interface Module VCA200-Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C51

VVH010-A/X . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C52

VVM010-A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C53

VSM DN 16 - DN 100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C55

VIM010-A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C57

VSA016-X . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C58

DN 10-40 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C59
Vacuum Control Catalog 2005-2006 - Ciii
Angle and Inline Valves
Vacuum Valves

DN 5
Manually Actuated

Angle valve Spindle drive
Pneumatically Actuated

Angle valves With and without pilot valve
Solenoid Actuated
Angle and inline valves
Selection Data
Actuation Feedthrough Vacuum connection Service life1) Attributes
1)
manual mm cycles bellows 5 / M 14 x 1 angle valve
pneumatic bellows 5 / M 14 x 1 5 Mio angle valve w/o pilot valve
el.-pneumatic bellows 5 / M 14 x 1 5 Mio angle valve with pilot valve
solenoid without 5 / M 14 x 1 2 Mio angle valve
solenoid without 5 / M 14 x 1 2 Mio inline valve normally closed
solenoid without 5 / M 14 x 1 2 Mio inline valve normally open
Under clean operating conditions
Type Valve / Part No. Normally closed Normally open VAH005-X 250-070 VAP005-X 250-040 VAP005-X 250-050 250-060 VAM005-X 250-000 VIM005-X 250-010 VIM005-Z 250-020
Spare Parts
Seal set Spare parts set 215-373 215-369 215-372 215-368 215-372 215-368 215-371 215-365 215-371 215-366 215-371 215-367
Connection Elements
Type Part No. Flange DN 10 ISO-KF 250-080 For pipe OD 1/4 250-085 For pipe OD 6mm 250-086
Vacuum Control Catalog 2005-2006 - C1
Vacuum Valves
DN 5 - continued
Specifications Type
Actuation
VAH005-X
manual
VAP005-X
pneumatic
VAP005-X
el.-pneumatic
VAM005-X
solenoid
VIM005-X
solenoid
VIM005-Z
solenoid
Tightness Conductance for air Molecular flow Laminar flow Pressure range (absolute) Pressure difference p In closing direction In opening direction Opens against p1) Temperature Ambient Closing time Opening time Switching frequency Degree of protection Supply voltage/ Power consumption Materials Housing Actuator Bellows Valve plate Guiding tube Armature Seals Weight
1) 2)
mbar l/s l/s l/s mbar bar bar bar bar C ms ms 1/min V DC W
1 x 10-9 0.4 4 10-8 4 4 4 4 52) 70 304/1.4301 Al & plastic 304/1.4301 304/1.4301 FPM
1 x 10-9 0.4 4 10-8 4 3 3 3 52) 80 35 / 35 150 IP 65 304/1.4301 anodized Al 304/1.4301 304/1.4301 FPM 0.20
1 x 10-9 0.4 4 10-8 4 3 3 3 52) 40 35 / 35 150 IP 65 24 1 304/1.4301 anodized Al 304/1.4301 304/1.4301 FPM 0.20
1 x 10-9 0.3 3 10-8 10 5 1.5 1 52) 40 7 / 30 300 IP 65 24 10 304/1.4301 303/1.4105 303/1.4105 FPM 0.26
1 x 10-9 0.2 2 10-8 10 5 1.5 1 52) 40 7 / 30 300 IP 65 24 10 304/1.4301 303/1.4105 303/1.4105 FPM 0.28
1 x 10-9 0.2 2 10-8 10 4 2 4 52) 40 30 / 10 300 IP 65 24 10 304/1.4301 303/1.4105 303/1.4105 FPM 0.30
kg
0.15
Compressed air: overpressure 4 bar 15 C, if the ambiance is free of condensable gases
Vacuum Valves
Dimensions
VAH005-X
VAP005-X
2 (0.08)
4 (0.16)
VAP005-X
35 (1.38)
4 (0.16)
VAM005-X
10.3 (0.4)
66.1 (2.60)
M14x1 16 (0.63)
16 (0.63)
59.5 (2.34)
M14x1 16 (0.63)
M14x1
8 (0.31)
64 (2.52)
8 (0.31)
8 (0.31)
8 (0.31) M14x1
21 (0.83)
8 (0.31) M14x1
21 (0.83)
8 (0.31)
8 (0.31)
8 (0.31) M14x1
21 (0.83)
mm (inch)
21 (0.83)
29 (1.14)
29 (1.14)
3.5 (0.14)
M14x1
30.5 (1.2)
mm (inch)
300 (11.81)
32 (1.26)
mm (inch)
500 (19.68)
30 (1.18)
31.5 (1.24)
VIM005-X
M14x1
VIM005-Z
M14x1
DN 10 ISO-KF
8 (0.31)
8 (0.31)
82 (3.23)
82 (3.23)
18 (0.71)
HOD 1/4"
8 (0.31)
8 (0.31)
14.5 (0.57)
M14x1
M14x1
HOD 6mm
31.5 (1.24)
31.5 (1.24)
14.5 (0.57)
mm (inch)
500 (19.68)
30 (1.18)
mm (inch)
500 (19.68)
30 (1.18)
mm (inch)
Compressed air connection Power connection
16 (0.63)
mm (inch)
76 (2.99)
M14x1
Vacuum Valves

DN 16
Manually Actuated

Bellows feedthrough Quick opening with 130 turn Soft start in four steps

Bellows feedthrough Visual indication of the open and closed position Electrical position indicator for open and closed position For system manufacturers - without pilot valve, without position indicator Extremely long service life
Selection Data
Angle valve Inline valve Housing material DN 16 ISO-KF aluminum -/3.2373 DN 16 ISO-KF stainless steel 304/1.4301 DN 16 ISO-KF stainless steel 304/1.4301
AISI/DIN
Ordering Information - Manually Actuated

Type Angle valve Inline valve Part No. Part No. VAH016-A 250-260 VAH016-X 250-265 VIH016-X 250-365
Spare Parts
Seal set Bellows set for manually actuated valves 215-025 215-042 215-025 215-042 215-025 215-042
Specifications - Manually Actuated

Service life Conductance for molecular flow Tightness Pressure, absolute, min. / max. Pressure resistance Differential pressure in closing / opening direction Opens to a pressure difference of Ambient temperature Mounting orientation Seals Weight Mio cycles l/s mbar l/s mbar / bar bar (abs.) bar bar C 10 4.5 1 x 10-9 10-8 / 2 6 2/2 2 0 50 any FPM 0.3 10 4.5 1 x 10-9 10-8 / 2 6 2/2 2 0 50 any FPM 0.4 10 2.5 1 x 10-9 10-8 / 2 6 2/2 2 0 50 any FPM 0.55
kg
Vacuum Valves
DN 16 - continued
Selection Data
AISI/DIN
Ordering Information - Pneumatically Actuated

Type Angle valve w/o pilot valve, w/o position indicator Angle valve w/o pilot valve, with position indicator Inline valve w/o pilot valve, with position indicator Valve with pilot valve, with position indicator 24 V DC Part No. 24 V AC Part No. 100 115 V AC Part No. 200 240 V AC Part No. 24 VDC, normally open Part No. VAP016-A 250-290 250-204 250-200 250-201 250-202 250-203 250-206 VAP016-X 250-295 250-214 250-210 250-211 250-212 250-213 250-216 VIP016-X 250-314 250-310 250-311 250-312 250-313 250-316
Spare Parts
Seal set Bellows set for pneumatically actuated valves 215-025 215-027 215-025 215-027 215-025 215-027
Specifications - Pneumatically Actuated

Service life Conductance for molecular flow Tightness Pressure, absolute, min. / max. Pressure resistance Differential pressure in closing / opening direction opens to a pressure difference of Ambient temperature Switching frequency Closing time Opening time Electrical position indicator, Load capacity Compressed air, overpressure Air cylinder volume Mounting orientation Seals Weight
1)
Mio cycles l/s mbar l/s mbar / bar bar (abs.) bar bar C 1/min ms ms VAC / A VDC / A bar cm3
10 4.5 1 x 10-9 10-8 / 2 4 4/2 4 0 50 100 200 100 250 / 0.125 50 / 0.25 3 71) 5.5 any FPM 0.3
10 4.5 1 x 10-9 10-8 / 2 4 4/2 4 0 50 100 200 100 250 / 0.125 50 / 0.25 3 71) 5.5 any FPM 0.4
10 2.5 1 x 10-9 10-8 / 2 4 4/2 4 0 50 100 200 100 250 / 0.125 50 / 0.25 3 71) 5.5 any FPM 0.44
kg
No-type 3-5 bar
Vacuum Valves
DN 16 - continued
Dimensions - Manually Actuated
5 (0.2)
VAH016-A / VAH016-X
5 (0.2)
VIH016-X
118.3 (4.66)
DN 16 ISO-KF
118.3 (4.66)
40 (1.57) DN 16 ISO-KF
DN 16 ISO-KF
40 (1.57)
40 (1.57)
40 (1.57)
DN 16 ISO-KF
44 (1.73)
mm (inch)
62 (2.44)
44 (1.73)
mm (inch)
62 (2.44)
Dimensions - Pneumatically Actuated

VAP016-A / VAP016-X VAP016-A / VAP016-X VIP016-X
104.2 (4.10)
4, 6, or x 1/4"
154 (6.06)
DN 16 ISO-KF
139.5 (5.49)
DN 16 ISO-KF
4, 6, or x 1/4"
4, 6, or x 1/4"
DN 16 ISO-KF
22 (0.87)
40 (1.57)
40 (1.57)
DN 16 ISO-KF
40 (1.57) DN 16 ISO-KF
40 (1.57)
DN 16 ISO-KF
80 (3.15)
44 (1.73)
mm (inch)
44 (1.73)
51 (2.00)
51 (2.00)
60 (2.36)
mm (inch)
60 (2.36) 100 (3.94)
mm (inch)
100 (3.94)
Angle valve w/o pilot valve, w/o position indicator
Angle valve with and w/o pilot valve, with position indicator
Inline valve with and w/o pilot valve, with position indicator
Vacuum Valves
Angle and Inline Valves ( VAH, VIH, VAP, VIP )

DN 25
Manually Actuated


Bellows feedthrough Visual indication of the open and closed position Electrical position indicator for open and closed position For system manufacturers - without pilot valve, without position indicator Extremely long service life
Selection Data
AISI/DIN

Spare Parts

Service life Conductance for molecular flow Tightness Pressure, absolute, min. / max. Pressure resistance Differential pressure in closing / opening direction Opens to a pressure difference of Ambient temperature Mounting orientation Seals Weight Mio cycles l/s mbar l/s mbar / bar bar (abs.) bar bar C 10 16 1 x 10-9 10-8 / 2 6 2/2 3 0 50 any FPM 0.43 10 16 1 x 10-9 10-8 / 2 6 2/2 3 0 50 any FPM 0.75 10 16 1 x 10-9 10-8 / 2 6 2/2 3 0 50 any FPM 1.35 Vacuum Control Catalog 2005-2006 - C7
kg
Vacuum Valves
DN 25 - continued
Selection Data
AISI/DIN

Type Angle valve w/o pilot valve, w/o position indicator Angle valve w/o pilot valve, with position indicator Inline valve w/o pilot valve, with position indicator Valve with pilot valve, with position indicator 24 V DC Part No. 24 V AC Part No. 100 115 V AC Part No. 200 240 V AC Part No. 24 VDC, normally open Part No. VAP025-A 250-291 250-204 250-224 250-220 250-221 250-222 250-223 250-226 VAP025-X 250-295 250-296 250-234 250-230 250-231 250-232 250-233 250-236 VIP025-X 250-330 250-331 250-332 250-333 250-336
Spare Parts

Service life Conductance for molecular flow Tightness Pressure, absolute, min. / max. Pressure resistance Differential pressure in closing / opening direction Opens to a pressure difference of Ambient temperature Switching frequency Closing time Opening time Electrical position indicator, load capacity Compressed air, overpressure Air cylinder volume Mounting orientation Seals Weight
1)
Mio cycles l/s mbar l/s mbar / bar bar (abs.) bar bar C ms ms VAC / A VDC / A bar cm3
10 16 1 x 10-9 10-8 / 2 4 4/2 4 0 50 100 / min 290 110 250 / 0.125 50 / 0.25 3 71) 12.1 any FPM 0.44
10 16 1 x 10-9 10-8 / 2 4 4/2 4 0 50 100 / min 290 110 250 / 0.125 50 / 0.25 3 71) 12.1 any FPM 0.75
10 8 1 x 10-9 10-8 / 2 4 4/2 4 0 50 100 / min 290 110 250 / 0.125 50 / 0.25 3 71) 12.1 any FPM 0.73
kg
No-type 3-5 bar
Vacuum Valves
DN 25 - continued
VAH025-A / VAH025-X
10 (0.39)
VIH025-X
10 (0.39) 136 (5.35)
154.5 (6.1)
DN 25 ISO-KF
DN 25 ISO-KF
31.5 (1.24)
DN 25 ISO-KF
50 (1.97)
50 (1.97)
DN 25 ISO-KF
100 (3.94)
58 (2.28)
58 (2.29)
mm (inch)
79 (3.1)
mm (inch)
58 (2.29)

135.3 (5.33)
4, 6, or x 1/4"
157.4 (6.20)
DN 25 ISO-KF
4, 6, or x 1/4"
4, 6, or x 1/4"
176 (6.93)
DN 25 ISO-KF
DN 25 ISO-KF
50 (1.57)
31.5 (1.24)
50 (1.57)
DN 25 ISO-KF
50 (1.97) DN 25 ISO-KF
50 (1.97)
DN 25 ISO-KF
100 (3.94)
56 (2.20)
mm (inch)
56 (2.20)
63 (2.48)
63 (2.48)
74 (2.91)
mm (inch)
74 (2.91) 108 (4.25)
mm (inch)
108 (4.25)
Angle valve w/o pilot valve, without position indicator
Angle valve with and without pilot valve, with position indicator
Inline valve with and without pilot valve, with position indicator
Vacuum Valves
Angle and Inline Valves ( VAH, VIH, VAP, VIP )

DN 40
Manually Actuated


Bellows feedthrough Visual indication of the open and closed position Electrical position indicator for open and closed position For system manufacturers - without pilot valve without position indicator Extremely long service life
Selection Data
AISI/DIN

Spare Parts

Service life Conductance for molecular flow Tightness Pressure, absolute, min. / max. Pressure resistance Differential pressure in closing / opening direction Opens to a pressure difference of Ambient temperature Mounting orientation Seals Weight Mio cycles l/s mbar l/s mbar / bar bar (abs.) bar bar C 10 40 1 x 10-9 10-8 / 1.5 2.5 2 / 1.5 4 0 50 any FPM 0.48 10 40 1 x 10-9 10-8 / 1.5 2.5 2 / 1.5 4 0 50 any FPM 0.85 10 20 1 x 10-9 10-8 / 6 2.5 2 / 1.5 4 0 50 any FPM 1.4
kg
Vacuum Valves
DN 40 - continued
Selection Data
AISI/DIN

Type Angle valve w/o pilot valve, w/o position indicator Angle valve w/o pilot valve, with position indicator Inline valve w/o pilot valve, with position indicator Valve with pilot valve, with position indicator 24 V DC Part No. 24 V AC Part No. 100 115 V AC Part No. 200 240 V AC Part No. 24 VDC, normally open Part No. VAP040-A 250-292 250-244 250-240 250-241 250-242 250-243 250-246 VAP040-X 250-297 250-254 250-250 250-251 250-252 250-253 250-256 VIP040-X 250-354 250-350 250-351 250-352 250-353 250-356
Spare Parts

Service life Conductance for molecular flow Tightness Pressure, absolute, min. / max. Pressure resistance Differential pressure in closing / opening direction Opens to a pressure difference of Ambient temperature Switching frequency Closing time Opening time Electrical position indicator load capacity Compressed air, overpressure Air cylinder volume Mounting orientation Seals Weight
1)
Mio cycles l/s mbar l/s mbar / bar bar (abs.) bar bar C 1/min ms ms VAC / A VDC / A bar cm3
10 40 1 x 10-9 10-8 / 1.5 2.5 2 / 1.5 2 0 ... 50 75 500 250 250 / 0.125 50 / 0.25 3 7 1) 26.2 any FPM 0.9
10 40 1 x 10-9 10-8 / 1.5 2.5 2 / 1.5 2 0 ... 50 75 500 250 250 / 0.125 50 / 0.25 3 71) 26.2 any FPM 1.6
10 20 1 x 10-9 10-8 / 1.5 2.5 2 / 1.5 2 0 ... 50 75 500 250 250 / 0.125 50 / 0.25 3 71) 26.2 any FPM 1.5
kg
No-type 2-6 bar
Vacuum Valves
DN 40 - continued
VAH040-A / VAH040-X
12 (0.47)
VIH040-X
12 (0.47)
173.8 (6.84)
DN 40 ISO-KF
154.3 (6.07)
DN 40 ISO-KF
DN 40 ISO-KF
65 (2.56)
65 (2.56)
DN 40 ISO-KF
45.5 (1.79)
130 (5.12)
82 (3.23)
mm (inch)
106 (4.17)
82 (3.23)
mm (inch)
82 (3.23)

161.5 (6.36)
4, 6, or x 1/4"
DN 40 ISO-KF
196.5 (7.74)
DN 40 ISO-KF
177 (6.97)
4, 6, or x 1/4"
4, 6, or x 1/4"
DN 40 ISO-KF
65 (2.56)
45.5 (1.79)
65 (2.56)
DN 40 ISO-KF
65 (2.56) DN 40 ISO-KF
65 (2.56)
DN 40 ISO-KF
130 (5.12)
80 (3.15)
mm (inch)
80 (3.15)
83 (3.27)
83 (3.27)
98 (3.86)
mm (inch)
98 (3.86) 120 (4.72)
mm (inch)
120 (4.72)
Angle valve w/o pilot valve, without position indicator
Inline valve with and without pilot valve, with position indicator
Solenoid Actuated Angle Valves with ISO-KF Flanges Vacuum Valves
Solenoid Actuated Angle Valves with ISO-KF Flanges ( VAM )

DN 16-40
Advantages

Bellows feedthrough High conductance Compact design Electrical and visual (LED) position indication Selectable operating mode Remote control via PLC or PC Local operation Wide voltage range
Selection Data
Vacuum connection Housing material AISI / DIN DN 16 ISO-KF aluminum 3.2374 DN 16 ISO-KF stainless steel 304/1.4304 DN 25 ISO-KF aluminum 3.2374 DN 25 ISO-KF stainless steel 304/1.4304 DN 40 ISO-KF aluminum 3.2374 DN 40 ISO-KF stainless steel 04/1.4304
Type Part No. VAM016-A 250-661 VAM016-X 250-666 VAM025-A 250-671 VAM025-X 250-676 VAM040-A 250-681 VAM040-X 250-686
Spare Parts
Seal set Bellows set Part. No. Part No. 215-029 215-032 215-029 215-032 215-079 215-082 215-079 215-082 215-129 215-122 215-129 215-122
Vacuum Valves
Solenoid Actuated Angle Valves with ISO-KF Flanges
DN 16-40 - continued
Specifications
VAM016-A Service life Conductance for molecular flow Tightness Pressure (absolute) min. / max Differential pressure in closing, opening direction Opens to a pressure difference of Ambient temperature Bakeout temperature Housing Actuator, idle Supply voltage Pickup / holding current Power consumption Closing / opening time Closing delay Switching frequency at 40C 50C Supply Pickup power Bellows Protection Mounting orientation Seals Weight cycles l/s mbar l/s mbar bar bar C C C V / Hz A W ms ms 1/min 1/min V DC / mA V DC / mA 5.2 / 0.7 400 100 / 240 50 30 20 15 - 30 / 3 - 5 15 - 30 / 100 Stainless steel IP54 any FPM 1.3 5.2 / 0.7 400 100 / 240 50 30 20 2 000 000 3 1 x 10-9 10-9 / 1300 1.3 1.3 0 50 120 50 VAM016-X 2 000 000 3 1 x 10-9 10-9 / 1300 1.3 1.3 0 50 120 50 VAM025-A 2 000 000 12 1 x 10-9 10-9 / 1300 1.3 1.3 0 50 120 50 5.3 / 0.7 400 120 / 240 170 30 20 VAM025-X 2 000 000 12 1 x 10-9 10-9 / 1300 1.3 1.3 0 50 120 50 5.3 / 0.7 400 120 / 240 170 30 20 VAM040-A 2 000 000 32 1 x 10-9 10-9 / 1300 1.3 1.3 0 50 120 50 4.8 / 0.7 400 230 / 700 500 30 20 VAM040-X 2 000 000 32 1 x 10-9 10-9 / 1300 1.3 1.3 0 50 120 50 4.8 / 0.7 400 230 / 700 500 30 20
80 250 / 50/60
15 - 30 / 3 - 5 15 - 30 / 3 - 5 15 - 30 / 3 - 5 15 - 30 / 3 - 5 15 - 30 / 3 - 5 15 - 30 / 100 15 - 30 / 100 15 - 30 / 100 15 - 30 / 100 15 - 30 / 100 Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel IP54 any FPM 1.45 IP54 any FPM 2.2 IP54 any FPM 2.9 IP54 any FPM 4 IP54 any FPM 5.4
kg
Dimensions
VAM016-A / VAM016-X
11 (0.43)
VAM025-A / VAM025-X
12 (0.47)
VAM040-A / VAM040-X
13 (0.51)
160 (6.23)
194 (7.64)
DN 16 ISO-KF
DN 25 ISO-KF
230 (9.06)
DN 25 ISO-KF
DN 25 ISO-KF
40 (1.57)
50 (1.97)
40 (1.57)
DN 16 ISO-KF
65 (2.56)
50 (1.97)
65 (2.56)
DN 25 ISO-KF
3 (0.12)
3 (0.12)
mm (inch)
mm (inch)
mm (inch)
59 (2.32)
75 (2.95)
3 (0.12)
3 (0.12)
96 (3.78)
12.5 (0.49) 125.5 (4.94)
7.5 (0.29)
88.5 (3.48)
10 (0.39)
109 (4.29)
3 (0.12)
3 (0.12)
Angle Valves
Vacuum Valves

DN 63
Manually Actuated

Spindle drive with hand wheel Smooth opening Visual position indicaton

Visual indication for open and closed position Electrical position indicator for open and closed position For system manufacturers without pilot valve
Selection Data
Angle valve Housing material AISI/DIN DN 63 ISO-K aluminum -/3.2373 DN 63 ISO-K stainless steel 304/1.4301

Type Angle valve Part No. VAH063-A 250-470 VAH063-X 250-475
Spare Parts
Seal set Bellows set for manually actuated valves 215-251 215-254 215-251 215-254

Service life Conductance for molecular flow Tightness Pressure absolute, min. / max. Pressure resistance Differential pressure in closing / opening direction Opens to a pressure difference of Ambient temperature Mounting orientation Seals Weight Mio cycles l/s mbar l/s mbar / bar bar (abs.) bar bar C 1.5 140 1 x 10-9 10-8 / 1,5 4 1.5 / 1.5 1.5 5 60 any FPM 3.6 1.5 140 1 x 10-9 10-8 / 1,5 4 1.5 / 1.5 1.5 5 60 any FPM 6.5
kg
Vacuum Valves
Angle Valves
DN 63 - continued
Selection Data
Angle valve Housing material AISI/DIN DN 63 ISO-K aluminum /3.2373 DN 63 ISO-K stainless steel 304/1.4301

Type Angle valve w/o pilot valve, with position indicator Valve with pilot valve, with position indicator 24 V DC Part No. 24 V AC Part No. 100 115 V AC Part No. 200 240 V AC Part No. VAP063-A 250-404 250-400 250-401 250-402 250-403 VAP063-X 250-414 250-410 250-411 250-412 250-413
Spare Parts
Seal set Bellows set for pneumatically actuated valves 215-521 215-253 215-251 215-253

Service life Conductance for molecular flow Tightness Pressure, absolute, min. / max. Pressure resistance Differential pressure in closing / opening direction Opens to a pressure difference of Ambient temperature Switching frequency Closing time Opening time Electrical position indicator load capacity Compressed air, overpressure Air cylinder volume Mounting orientation Seals Weight Mio cycles l/s mbar l/s mbar / bar bar (abs.) bar bar C 1/min ms ms VAC / A VDC / A bar cm3 1.5 140 1 x 10-9 10-8 / 1,5 4 1.5 / 1.5 1.5 5 60 60 300 300 250 / 0.125 50 / 0.25 48 75 any FPM 4.0 1.5 140 1 x 10-9 10-8 / 1,5 4 1.5 / 1.5 1.5 5 60 60 300 300 250 / 0.125 50 / 0.25 48 75 any FPM 6.8
kg
Angle Valves
Vacuum Valves

VAH063-A / VAH063-X
20 (0.79) 266 (10.47)
DN 63 ISO-K
88 (3.64)
88 (3.64)
DN 63 ISO-K
124 (4.88)
mm (inch)
150 (5.90)

VAP063-A / VAP063-X
14 (0.55)
DN 63 ISO-K
250 (9.84) 88 (3.46)
88 (3.46)
DN 63 ISO-K
mm (inch)
168 (6.61)
6, or x 1/4"
130 (5.12)
Vacuum Valves
Manually Actuated Angle Valves with CF Flanges
Manually Actuated Angle Valves with CF-Flanges ( VAH )

DN 16-63
Standard

For UHV and HV applications Bakeable at up to 180C in open and closed position FPM sealed Maintenance-free
All-metal

For UHV applications Bakeable at up to 300C in open and closed position Copper sealed Maintenance-free
Selection Data
Vacuum connection Tightness mbar l/s Bakeout temperature w/o hand wheel C DN16 CF-R 1 X 10-10 180
STANDARD DN40 CF-R 1 X 10-10 180
DN 63 CF-R 1 X 10-10 180
DN16 CF-R 5 X 10-11 300
ALL - METAL DN40 CF-R 5 X 10-11 300
DN 63 CF-R 5 X 10-11 300
Type Part No. VAH016-Z 250-731 VAH040-Z 250-736 VAH063-Z 250-741 VAH016-U 250-730 VAH040-U 250-735 VAH063-U 250-740
Specifications
Service life Conductance for molecular flow Pressure (absolute) min. / max. Tightening torque Heating and cooling rate Bellows, stainless steel AISI/DIN Housing, stainless steel AISI/DIN cycles l/s mbar/bar Nm C/min 50 000 3 1 x 10-9 / 4 1 321/1.4541 304/1.4301 welded FPM 304/1.4301 0.35 50 000 38 1 x 10-9 / 4 1.8 321/1.4541 304/1.4301 welded FPM 304/1.4301 1.8 50 000 100 1 x 10-9 / 4 2.5 321/1.4541 304/1.4301 welded FPM 304/1.4301 4.8 1000 3 1 x 10-10 / 4 8-10 4 321/1.4541 304/1.4301 welded copper 304/1.4301 0.4 1000 38 1 x 10-10 / 4 20-40 4 321/1.4541 304/1.4301 welded copper 304/1.4301 2.0 1000 100 1 x 10-10 / 4 30-60 2 321/1.4541 304/1.4301 welded copper 304/1.4301 5.0
Valve plate, seal Valve plate, stainless steel AISI/DIN Weight kg
Spare Parts
FPM seal, 10 pieces Copper seal, 2 pieces Part No. Part No. 215-341 215-342 215-343 215-344 215-345 215-346
Manually Actuated Angle Valves with CF Flanges Vacuum Valves
DN 16-63 - continued
Dimensions
VAH016-Z
15.2 (0.60) 26.6 (1.05)
VAH040-Z
36.4 (1.43)
VAH063-Z
DN 16 CF-R
104 (4.09) 151 (5.94)
DN 40 CF-R
231 (9.09) 63 (2.48)
DN 63 CF-R
mm (inch)
38 (1.50)
DN 16 CF-R
105 (4.13)
38 (1.50)
mm (inch)
63 (2.48)
DN 40 CF-R
mm (inch)
105 (4.13)
DN 63 CF-R
VAH016-U
15.2 (0.60) 26.6 (1.05)
Size 8 (0.31)
VAH040-U
36.4 (1.43)
Size 17 (0.67)
VAH063-U
Size 22 (0.87)
DN 16 CF-R
DN 40 CF-R
DN 63 CF-R
88 (3.46)
138 (5.43)
210 (8.27) 63 (2.48) 105 (4.13)
38 (1.50)
mm (inch)
38 (1.50)
DN 16 CF-R
mm (inch)
63 (2.48)
DN 40 CF-R
mm (inch)
105 (4.13)
DN 63 CF-R
Vacuum Valves
Angle Valves

DN 100
Manually Actuated

Bellows feedthrough Spindle drive with hand wheel Smooth opening Visual position indication

Bellows feedthrough Visual indication of the open and closed position Electrical position indicator for open and closed position For system manufacturers without pilot valve
Selection Data
Angle valve Housing material AISI(AA)/DIN DN 100 ISO-K aluminum - / 3.2373 DN 100 ISO-K stainless steel 303 /1.4305

Type Part No. VAH100-A 250-480 VAH100-X 250-485
Spare Parts
Seal set Bellows set for manually actuated valves 215-271 215-274 215-271 215-274

Service life Conductance for molecular flow Tightness Pressure absolute, min. / max. Pressure resistance Differential pressure in closing / opening direction Opens to a pressure difference of Ambient temperature Mounting orientation Seals Weight Mio cycles l/s mbar l/s mbar / bar bar (abs.) bar bar C 1.5 330 1 x 10-9 10-8 / 1,5 4 1.5 / 1.5 1.5 5 60 any FPM 6.1 1.5 330 1 x 10-9 10-8 / 1,5 4 1.5 / 1.5 1.5 5 60 any FPM 11.1
kg
Angle Valves
Vacuum Valves
DN 100 - continued
Selection Data
Angle valve Housing material AISI (AA) /DIN DN 100 ISO-K aluminum - / 3.2373 DN 100 ISO-K stainless steel 303 / 1.4305

Type Angle valve w/o pilot valve, with position indicator Valve with pilot valve, with position indicator 24 V DC Part No. 24 V AC Part No. 100 115 V AC Part No. 200 240 V AC Part No. VAP100-A 250-424 250-420 250-421 250-422 250-423 VAP100-X 250-434 250-430 250-431 250-432 250-433
Spare Parts
Seal set Bellows set for pneumatically actuated valves 215-571 215-273 215-271 215-273

Service life Conductance for molecular flow Tightness Pressure, absolute, min. / max. Resistance to pressure Differential pressure in closing / opening direction Opens to a pressure difference of Ambient Temperature Switching frequency Closing time Opening time Electrical position indicator, load capacity Compressed air, overpressure Air cylinder volume Mounting orientation Seals Weight Mio cycles l/s mbar l/s mbar / bar bar (abs.) bar bar C 1/min ms ms VAC / A VDC / A bar cm3 1.5 330 1 x 10-9 10-8 / 1,5 4 1.5 / 1.5 1.5 5 ... 60 60 400 400 250 / 0.125 50 / 0.25 48 195 any FPM 6.7 1.5 330 1 x 10-9 10-8 / 1,5 4 1.5 / 1.5 1.5 5 ... 60 60 400 400 250 / 0.125 50 / 0.25 48 195 any FPM 11.7
kg
Vacuum Valves
Angle Valves
DN 100 - continued
25 (1.00) 320 (12.68)
VAH100-A / VAH100-X
DN 100 ISO-K
108 (4.25)
108 (4.25)
DN 100 ISO-K
164 (6.46)
mm (inch)
190 (7.48)

VAP100-A / VAP100-X
14 (0.55)
DN 100 ISO-K
282 (11.10)
108 (4.25)
108 (4.25)
DN 100 ISO-K
mm (inch)
208 (8.19)
6, or x 1/4"
170 (6.69)
Angle Valves
Vacuum Valves

DN 160
Advantages

Visual indication for open and closed position Electrical position indicator for open and closed position For system manufacturers without pilot valve
Selection Data
Angle valve Housing material AA/DIN DN 160 ISO-K aluminum -/3.2373
Type Angle valve w/o pilot valve, with position indicator Valve with pilot valve, with position indicator 24 V DC Part No. 24 V AC Part No. 100 115 V AC Part No. 200 240 V AC Part No. VAP160-A 250-444 250-440 250-441 250-442 250-443
Spare Parts
Seal set Bellows set for pneumatically actuated valves 215-591 215-293
Specifications
Service life Conductance for molecular flow Tightness Pressure, absolute, min. / max. Pressure resistance Differential pressure in closing / opening direction Opens to a pressure difference of Ambient Temperature Switching frequency Closing time Opening time Electrical position indicator, load capacity Compressed air, overpressure Air cylinder volume Mounting orientation Seals Weight Mio cycles l/s mbar l/s mbar / bar bar (abs.) bar bar C 1/min ms ms VAC / A VDC / A bar cm3 1.5 800 1 x 10-9 10-8 / 1,5 4 1.5 / 1.5 1.5 5 60 40 650 600 250 / 0.125 50 / 0.25 48 570 any FPM 11.4
kg
Vacuum Valves
Angle Valves
DN 160 - continued
Dimensions
VAP160-A
14 (0.55)
DN 160 ISO-K
366 (14.41)
138 (5.43)
138 (5.43)
DN 160 ISO-K
mm (inch)
264 (10.39)
6, or x 1/4"
221 (8.70)
Pneumatically Actuated Angle Valves
Vacuum Valves

DN 250
Advantages

Visual indication for open and closed position Electrical position indicator for open and closed position Bellows feedthrough High conductance
Selection Data
Angle valve Housing material AISI /DIN DN 250 ISO-K 304/1.4301
Type Valve without coil Coil 230 V, 50 Hz 115 V, 60 Hz 24 V, 50 Hz 24 V DC Part No. Part No. Part No. Part No. Part No. VAP250-X 250-800 215-804 215-809 215-814 215-819
Specifications
Service life Tightness Conductance for molecular flow Pressure min./max. Differential pressure in either direction Opening / closing time Compressed air, overpressure Compressed air cylinder volume Weight cycles mbar l/s l/s mbar/bar bar s bar cm3 kg 1 000 000 1 x 10-9 2700 10-7 / 2 1 6/6 4-8 2100 66
Spare Parts
Seal set Bellows set Part No. Part No. 215-375 215-385
Vacuum Valves
Pneumatically Actuated Angle Valves
DN 250 - continued
Dimensions
650 (25.60)
DN 250 ISO-K
200 (7.87)
250 (9.84) mm (inch)
DN 250 ISO-K
DN 16 ISO-KF
20
(8
.1
9)
DN 50 ISO-KF
DN 40 ISO-KF
205 (8.07)
163 (6.42)
20 8 (8 .1 9)
mm (inch)
Manually and Pneumatically Actuated Butterfly Valves
Vacuum Valves

VBH063-X / VBP063-X/Z
Advantages

High conductance Compact design, low installation height With or without gauge and valve connections
Selection Data - Manually Actuated

Housing with lateral connection flanges Connection flange Lateral vacuum connections DN 63 ISO-F DN 16 ISO-KF DN 10 ISO-KF Housing without lateral connection flanges

Type Part No. VBH063-X 250-560
Specifications
Service life Tightness Conductance for air (molecular flow) Pressure min. / max. Differential pressure in either direction Bakeout temperature: housing Housing, valve plate, valve shaft Seals Weight cycles mbar/ls l/s mbar/bar bar C AISI/DIN kg 100 000 1 x 10-9 350 10-8 / 4 4 150 stainless steel 304/1.4301 FPM 3.1
Vacuum Valves
VBH063-X / VBP063-X/Z - continued

Selection Data - Pneumatically Actuated
Housing with lateral connection flanges Connection flange Lateral vacuum connections DN 63 ISO-F DN 16 ISO-KF DN 10 ISO-KF Housing without lateral connection flanges DN 63 ISO-F

Type Valve without position indicator without pilot valve Position indicator Pilot valve 230 V / 50 Hz 115 V / 50 Hz 24 V / 50 Hz 24 V DC Part No. Part No. Part No. Part No. Part No. VBP063-X 250-600 215-135 215-131 215-132 215-133 215-134 VBP063-Z 250-605 215-135 215-131 215-132 215-133 215-134
Specifications
Service life Tightness Conductance for air (molecular flow) Pressure min. / max. Differential pressure in either direction Ambient temperature Housing Actuator Closing / opening time Pickup / holding power Compressed air, overpressure Air cylinder volume Housing, valve plate, valve shaft Seals Weight cycles mbar/ls l/s mbar/bar bar C C C s VA bar cm3 AISI/DIN kg 100 000 1 x 10-9 350 10-8 / 4 4 150 80 0.5/0.5 10 / 6 4-8 50 stainless steel 304/1.4301 FPM 3.8 100 000 1 x 10-9 400 10-8 / 4 4 150 80 0.5/0.5 10 / 6 4-8 50 stainless steel 304/1.4301 FPM 3.5
Vacuum Valves

Accessories
Set of connection elements Part No.
Connection Elements
1 ISO K-Flanges 2 Valve Housing 3 ISO seal (not included) 3a O-ring (included) 100 4 Claw grip
2
3
215-212
for VBH063X for VBP063X
5 1
215-213
for VBP063Z
5 1
4 3
3a
100
3
4 6
4 6
Spare Parts
Seal Set Part No. 215-143
M8
M8
215-213
Vacuum Valves

Dimensions
Manually actuated
16 (0.63) 40 (1.57) 16 (0.63)
DN 63 ISO-F
55 (2.17) 75 (2.95) 75 (2.95)
DN 63 ISO-F
DN 16 ISO-KF
130 (5.12)
DN 10 ISO-KF
134 (5.28)
mm (inch)
VBH063-X
Pneumatically actuated
16 (0.63) 40 (1.57) 16 (0.63)
80 (3.15)
16 (0.63) 40 (1.57) 16 (0.63)
DN 63 ISO-F
104.7 (4.12)
DN 63 ISO-F
104.7 (4.12)
16 (0.63) 40 (1.57) 16 (0.63)
DN 63 ISO-F
104.7 (4.12)
2
48.7 (1.92)
2
48.7 (1.92)
2
48.7 (1.92)
1
DN 16 ISO-KF
98 (3.86)
1
DN 16 ISO-KF
98 (3.86)
DN 16 ISO-KF
130 (5.12)
130 (5.12)
DN 10 ISO-KF
154.5 (6.08)
77 (3.03)
mm (inch)
DN 10 ISO-KF
154.5 (6.08)
77 (3.03)
130 (5.12)
mm (inch)
DN 10 ISO-KF
154.5 (6.08)
77 (3.03)
mm (inch)
VBP063-X Valve without pilot valve w/o position indicator
VBP063-X Valve with pilot valve
VBP063-X Valve with position indicator
16 (0.63) 35 (1.38) 21 (0.83)
16 (0.63) 35 (1.38) 21 (0.83)
DN 63 ISO-F
104.7 (4.12)
DN 63 ISO-F
104.7 (4.12)
16 (0.63) 35 (1.38) 21 (0.83)
DN 63 ISO-F
104.7 (4.12)
mm (inch)
2
48.7 (1.92)
2
48.7 (1.92)
2
48.7 (1.92)
98 (3.86)
98 (3.86)
130 (5.12)
130 (5.12)
154.5 (6.08)
mm (inch)
154.5 (6.08)
mm (inch)
130 (5.12)
154.5 (6.08)
VBP063-Z Valve without pilot valve w/o position indicator
VBP063-Z Valve with pilot valve
VBP063-Z Valve with position indicator
98 (3.86)
98 (3.86)
Vacuum Valves

Advantages

High conductance Compact design, low installation height With and without, gauge and valve connections

Housing with lateral connection flanges Connection flange Lateral vacuum connections DN 100 ISO-F DN 25 ISO-KF 2 x DN 10 ISO-KF Housing without lateral connection flanges

Specifications
Service life Tightness Conductance for air (molecular flow) Pressure min. / max. Differential pressure in either direction Bakeout temperature: housing Housing, valve plate, valve shaft Seals Weight kg cycles mbar/ls l/s mbar/bar bar C AISI/DIN 100 000 1 x 10-9 1000 10-8 / 4 4 150 stainless steel 304/1.4301 FPM 10.6
Vacuum Valves

Housing with lateral connection flanges Connection flange Lateral vacuum connections DN 100 ISO-F DN 25 ISO-KF 2 x DN 10 ISO-KF Housing without lateral connection flanges DN 100 ISO-F

Type Valve without position indicator, without pilot valve Position indicator Pilot valve 230 V / 50 Hz 115 V / 50 Hz 24 V / 50 Hz 24 V DC Part No. Part No. Part No. Part No. Part No. VBP100-X 250-610 215-136 215-131 215-132 215-133 215-134 VBP100-Z 250-615 215-136 215-131 215-132 215-133 215-134
Specifications
Service life Tightness Conductance for air (molecular flow) Pressure min. / max. Differential pressure in either direction Ambient temperature Housing Actuator Closing / opening time Pickup / holding power Compressed air, overpressure Air cylinder volume Housing, valve plate, valve shaft Seals Weight cycles mbar/ls l/s mbar/bar bar C C C s VA bar cm3 AISI/DIN kg 100 000 1 x 10-9 1000 10-8 / 4 4 150 80 0.5/0.5 10 / 6 4-8 130 stainless steel 304/1.4301 FPM 6.5 100 000 1 x 10-9 1400 10-8 / 4 4 150 80 0.5/0.5 10 / 6 4-8 130 stainless steel 304/1.4301 FPM 4.9
Vacuum Valves

Accessories
Connection Elements
1 ISO K-Flanges 2 Valve Housing 3 ISO seal (not included) 3a O-ring (included) 100 4 Claw grip
2
3
215-214
for VBH100-X for VBP100-X
5 1
215-215
for VBP100-Z
5 1
4 3
3a
100
3
4 6
4 6
M8
M8
Spare Parts
Seal Set Part No. 215-145 215-246
Vacuum Valves

Dimensions
Manually actuated
30 (1.18) 50 (1.97) 22 (0.87)
DN 100 ISO-F
55 (2.17) 75 (2.95) 75 (2.95)
DN 100 ISO-F
DN 25 ISO-KF
I SO -K
10
165 (6.50)
DN
mm (inch)
150 (5.90)
VBH100-X
30 (1.18) 50 (1.97) 22 (0.87) 30 (1.18) 50 (1.97) 22 (0.87)
80 (3.15)
DN 100 ISO-F
DN 100 ISO-F
30 (1.18) 50 (1.97) 22 (0.87)
117.5 (4.63)
117.5 (4.63)
60.5 (2.38)
60.5 (2.38)
1
DN 25 ISO-KF
1
DN 25 ISO-KF
60.5 (2.38)
DN 25 ISO-KF
F
DN
-K
-K
ISO
-K
ISO
ISO
10
10
98 (3.86)
10
98 (3.86)
DN
165 (6.50)
165 (6.50)
183 (7.20)
75 (2.95)
mm (inch)
183 (7.20)
75 (2.95)
mm (inch)
165 (6.50)
183 (7.20)
75 (2.95)
mm (inch)
30 (1.18) 35 (1.38) 37 (1.46)
30 (1.18) 35 (1.38) 37 (1.46)
30 (1.18) 35 (1.38) 37 (1.46)
DN 100 ISO-F
DN 100 ISO-F
DN 100 ISO-F
2
117.5 (4.63)
2
117.5 (4.63)
2
60.5 (2.38)
117.5 (4.63)
60.5 (2.38)
60.5 (2.38)
98 (3.86)
98 (3.86)
165 (6.50)
165 (6.50)
165 (6.50)
183 (7.20)
75 (2.95)
mm (inch)
183 (7.20)
75 (2.95)
mm (inch)
183 (7.20)
75 (2.95)
mm (inch)
98 (3.86)
98 (3.86)
DN
DN
117.5 (4.63)
DN 10 -K IS O F
DN 100 ISO-F
DN 10
DN
10 ISO F -K
10
ISO -K F
ISO -K F
Vacuum Valves

Advantages

High conductance Compact design, low installation height With and without gauge and valve connections

Housing with lateral connection flanges Connection flange Lateral vacuum connections DN 160 ISO-F DN 25 ISO-KF 2 x DN 10 ISO-KF Housing without lateral connection flanges

Specifications
Service life Tightness Conductance for air (molecular flow) Pressure min. / max. Differential pressure in either direction Bakeout temperature: housing Housing, valve plate, valve shaft Seals Weight kg cycles mbar/ls l/s mbar/bar bar C AISI/DIN 500 000 1 x 10-9 3400 10-8 / 4 4 150 stainless steel 304/1.4301 FPM 10.6
Vacuum Valves

Housing with lateral connection flanges Connection flange Lateral vacuum connections DN 160 ISO-F DN 25 ISO-KF 2 x DN 10 ISO-KF Housing without lateral connection flanges DN 160 ISO-F

Type Valve without position indicator, without pilot valve Position indicator Pilot valve 230 V / 50 Hz 115 V / 50 Hz 24 V / 50 Hz 24 V DC Part No. Part No. Part No. Part No. Part No. Part No. VBP160-X 250-620 215-136 215-131 215-132 215-133 215-134 VBP160-Z 250-625 215-136 215-131 215-132 215-133 215-134
Specifications
Service life Tightness Conductance for air (molecular flow) Pressure min. / max. Differential pressure in either direction Ambient temperature Housing Actuator Closing / opening time Pickup / holding power Compressed air, overpressure Air cylinder volume Housing, valve plate, valve shaft Seals Weight cycles mbar/ls l/s mbar/bar bar C C C s VA bar cm3 AISI/DIN kg 500 000 1 x 10-9 3400 10-8 / 4 4 150 80 0.5 / 0.5 10 / 6 48 130 stainless steel 304/1.4301 FPM 11.6 500 000 1 x 10-9 4000 10-8 / 4 4 150 80 0.5 / 0.5 10 / 6 48 130 stainless steel 304/1.4301 FPM 9.5
Vacuum Valves

Accessories
Connection Elements
1 ISO K-Flanges 2 Valve Housing 3 ISO seal (not included) 3a O-ring (included) 117 4 Claw grip 5 Threaded pin 6 Nut
4 6 2
3
215-216
for VBH160X for VBP160X
5 1
215-217
for VBH160Z
5 1
4 3
3a
102
3
4 6
Spare Parts
M10
M10
215-148
Vacuum Valves

Dimensions
Manually actuated
54.5 (2.15) 50 (1.97) 48.5 (1.91)
DN 160 ISO-F
78 (3.07) 100 (3.93) 100 (3.93)
DN 160 ISO-F
DN 25 ISO-KF
ISO -K F
10
DN
225 (8.86)
mm (inch)
202 (7.95)
VBH160-X
54.5 (2.15) 50 (1.97) 48.5 (1.91) 54.5 (2.15) 50 (1.97) 48.5 (1.91)
115 (4.53)
DN 160 ISO-F
DN 160 ISO-F
54.5 (2.15) 50 (1.97) 48.5 (1.91)
117.5 (4.63)
59.5 (2.34)
117.5 (4.63)
59.5 (2.34)
1
DN 25 ISO-KF
F
1
DN 25 ISO-KF
F
59.5 (2.34)
1
DN 25 ISO-KF
DN 10 -K ISO
ISO -K
ISO -K
10
10
DN
DN
98 (3.86)
98 (3.86)
DN
10
ISO -K
225 (8.86)
225 (8.86)
mm (inch)
214 (8.43)
75 (2.95)
mm (inch)
214 (8.43)
225 (8.86)
75 (2.95)
mm (inch)
214 (8.43)
75 (2.95)
58.5 (2.30)
58.5 (2.30)
DN 160 ISO-F
58.5 (2.30)
DN 160 ISO-F
DN 160 ISO-F
54.5 (2.15) 40 (1.57)
54.5 (2.15) 40 (1.57)
54.5 (2.15) 40 (1.57)
117.5 (4.63)
117.5 (4.63)
59.5 (2.34)
59.5 (2.34)
59.5 (2.34)
98 (3.86)
98 (3.86)
225 (8.86)
225 (8.86)
mm (inch)
214 (8.43)
75 (2.95)
mm (inch)
214 (8.43)
75 (2.95)
225 (8.86)
mm (inch)
214 (8.43)
75 (2.95)
98 (3.86)
117.5 (4.63)
98 (3.86)
117.5 (4.63)
DN 10 ISO F -K
DN 10 -K ISO F
DN 160 ISO-F
DN 10 -K ISO F
Pneumatically Actuated Butterfly Valves
Vacuum Valves
Pneumatically Actuated Butterfly Valve

VBP250-X
Advantages

High conductance Compact design, low installation height With and without, gauge and valve connections
Selection Data
Housing with lateral connection flanges Connection flange Lateral vacuum connections DN 250 ISO-K DN 40 ISO-KF 2 x DN 10 ISO-KF DN 25 ISO-KF
Type Valve without position indicator, without pilot valve Position indicator Pilot valve 230 V / 50 Hz 115 V / 50 Hz 24 V / 50 Hz 24 V DC Part No. Part No. Part No. Part No. Part No. Part No. VBP250-X 250-630 215-137 215-131 215-132 215-133 215-134
Specifications
Service life Tightness Conductance for air (molecular flow) Pressure min. / max. Differential pressure in either direction Ambient temperature Housing Actuator Closing / opening time Pickup / holding power Compressed air, overpressure Air cylinder volume Housing, valve plate, valve shaft Seals Weight cycles mbar/ls l/s mbar/bar bar C C C s VA bar cm3 AISI/DIN kg 100 000 1 x 10-9 8200 10-8 / 4 4 150 80 2/5 10 / 6 5-9 700 stainless steel 304/1.4301 FPM 15.7
Vacuum Valves
Pneumatically Actuated Butterfly Valves

Accessories
Claw grips Part No. 3 x 212-225
Spare Parts
Dimensions
99 (3.90) 88 (3.46) 69 (2.72)
99 (3.90) 88 (3.46) 69 (2.72)
DN 250 ISO-K
99 (3.90) 88 (3.46) 69 (2.72)
DN 250 ISO-K
DN 250 ISO-K
2
87 (3.43)
2
87 (3.43)
2
87 (3.43)
DN 250 ISO-K
290 (11.42)
DN 250 ISO-K
290 (11.42)
DN 250 ISO-K
290 (11.42)
ISO -KF
ISO -K
40
40
40
DN
10
ISO
ISO
-KF
DN 25 ISO-KF
DN
10
DN
DN
ISO
174 (6.85)
174 (6.85)
(6.0 6)
174 (6.85)
6)
DN
-KF
IS 10 DN
O-K
-KF
DN
DN 25 ISO-KF
10
ISO
-KF
1 DN
0 IS
O-K
DN 25 ISO-KF
DN
10
ISO
-KF
216 (8.50)
216 (8.50)
(6.0 6)
154
(6.0
205
(8.0
205
7)
(8.0
7)
205
(8.0
7)
mm (inch)
397 (15.63)
mm (inch)
397 (15.63)
mm (inch)
397 (15.63)
216 (8.50)
154
154
154
154 (6.0 6)
154
(6.0 6)
6) (6.0
Manually Actuated Coarse Gas Dosing Valve
Vacuum Valves
Manually Actuated Coarse Gas Dosing Valve

VDH010-A
Advantages
For admitting a reproducible flow of gas into a vacuum chamber
Selection Data
Vacuum connection Gas flow, controllable Min. Max. mbar l/s mbar l/s DN 10 ISO-KF 40 1700
Type Part No. VDH010-A 250-520
Specifications
Tightness Pressure range Bakeout temperature Housing Seals Weight kg mbar l/s mbar to bar C 1 x 10-8 1x 10-7 to 4 100 aluminum FPM 0.2
Spare Parts
Seal set 215-207
Dimensions
101 (3.98)
96 (3.78)
DN 10 ISO-KF
40 (1.57)
DN 10 ISO-KF
mm (inch)
30 (1.18)
30 (1.18)
Vacuum Control Catalog 2005 - C41
Vacuum Valves
Manually Actuated Dosing and Shut-Off Valve

VDH016-X
Advantages

Very wide control range Optimal control characteristics Digital display Excellent reproducibility Extremely small dead volume Integrated shut-off valve Closing without change of flow setting
Selection Data
Vacuum connection Gas flow, controllable Min. Max. mbar/ls mbar/ls DN 16 ISO-KF 5 x 10-6 1000
Type Part No. VDH016-X 250-500
Specifications
Tightness Differential pressure Dead volume Operating temperature Bakeout temperature, flanges Housing, needle, filter Dosing sleeve Seal Weight kg mbar/ls bar cm3 C C 1 x 10-9 2.5 0.032 80 150 stainless steel Fluorplastomer FPM 0.4
Accessories
Filter, vacuum side 590 mbar l/s 1250 mbar l/s Part No. Part No. 215-462 215-463
Vacuum Valves
VDH016-X - continued
Dimensions
42 (1.65)
12.5 (0.49)
40 (1.57)
117.5 (4.63)
DN 10 ISO-KF
20 (0.79)
DN 16 ISO-KF
30 (1.18)
30 (1.18)
mm (inch)
Vacuum Valves

VDH040-U / VDE040-U / VCE500
Advantages

Minimal dead volume Controlled routing of the gas flow using capillaries Operating temperature 200 C Control of total pressure or gas flow Automatic control in conjunction with VDE40-U and VCE500
Selection Data
Actuator manual manual and thermo-mechanical
Ordering Information VDH040-U / VDE040-U

Type Valve VDH040-U 250-700 VDE040-U 250-720
Specifications
Connection flange Input Output Gas flow, controllable Min.
Max.
DN 16 CF-R DN 40 CF-F mbar/ls

mbar/ls
DN 16 CF-R DN 40 CF-F 1 x 10-10 100 1) 1 x 10-11 1 x 10-10/30 0.7 200 350 2) sapphire copper stainless steel 1.4
1 x 10-10
600
Tightness Pressure absolute min/max Conductance for molecular flow Operating temperature Bakeout temperature Valve plate Valve seat Housing Weight
1) Can be regulated with the VCE500 Controller 2) Without cable
mbar/ls mbar/ls l/s C C
1 x 10-11 1 x 10-11/30 0.7 200 350 sapphire copper stainless steel
kg
1.4
All-Metal Dosing Valves and System Vacuum Valves
VDH040-U / VDE040-U / VCE500 - continued

Accessories
Type Capillary complete, vacuum side, 1m Heater, 200 C Adapter DN 40/16 CF VDH040-U 215-708 250-701 213-071 VDE040-U 215-708 250-701 213-071
Options
Tool kit 215-707 215-707
Spare Parts
Valve plate, sapphire Valve seat Standard Gold plated 215-715 215-716 215-717 215-715 215-716 215-717
Ordering Information VCE500

Controller Part No. VCE500 250-920
Specifications
Power supply Frequency Power consumption Regulating characteristic Reset time Proportional gain Internal nominal value Scale divisions External nominal value Protection class V Hz VA s 115 / 230 50 - 60 20 proportional-integral (PI) 2 - 30 2 - 1000 0 - 1000 0 - +10 IP 20
VCD/100 k
Cable
Standard, 80C 3m 12 m Extension, 200C 2m Part No. 202-924 Part No. Part No. 202-914 202-916
Vacuum Valves
VDH040-U / VDE040-U / VCE500 - continued

Dimensions
46 (1.81)
VDE040-U
DN 40 CF-F 85.5 (3.37)
M5 50 (1.97)
mm (inch)
32.5 (1.28)
101 (3.98)
DN 16 CF-R
Gas Dosing Systems Vacuum Valves
Gas Dosing Systems

Gas Dosing Systems
User Advantages

Higher yield Optimized cycle time Excellent reproducibility Easy system integration
GAS DOSING SYSTEMS
e.g. PC, IPC, PLC, MC
Pressure Gauge
Controller VCC500-Z
Process Chamber
e.g. PC, IPC, PLC, MC
Interface Module VCA200-Z
Control Valve VDE016-X
Control Valve VDM005-X
Vacuum Valves
Gas Dosing Systems
CONTROL VALVE VDM005-X

User Advantages

Fast response Wide control range at low cost Withstands corrosive gases - stainless steel / FPM Closed automatically in case of a power failure Smooth electromagnetic drive
Selection Data
Vacuum connection Gas flow, controllable Min. Max. Pressure, absolute Min. Max. Response time DN 5 mm / M 14 x 1 1 x 10-5 mbar l/s 100 mbar l/s 1 x 10-8 mbar 2.0 bar 10 ... 15 ms ( 0 ... 90 % of stroke)
Technical Data
Tightness Actuator Controller Ambient temperature Duty cycle Protection category Control voltage Power Housing Seals Weight 1 x 10-8 mbar l/s solenoid VCC500-Z 5 ... 50 C 100 % IP 51 0 ... 24 V DC 2 W max. stainless steel FPM 80 g
Type Part No. VDM005-X 250-515
Technical Drawing Cable VCC - VDM

3m 5m 10m 15m 20m 25m Part No. Part No. Part No. Part No. Part No. Part No. 216-160 216-161 216-162 216-163 216-164 216-165
8 (0.31) 17 (0.67) 33 (1.30) DN 10 ISO-KF 48 (1.89) 2.8 (0.11) x 0.5 (0.02) 21 (0.83)
46.3 (1.82)
6.5 (0.26) 8 (0.31)
16 (0.63)
M14 x 1
Size 17
mm (inch)
Connections
DN 10 ISO-KF For pipe OD 1/4 For pipe OD 6 mm Part No. Part No. Part No. 250-080 250-085 250-086
18 (0.71)
OD 1/4"
14.5 (0.57)
OD 6mm 14.5 (0.57)
CONTROL VALVE VDE016-X

User Advantages

Broad control range Excellent reproducibility Status information and commands via digital interface Withstands corrosive gases - stainless steel / FPM Combined with the VCC500-Z controller, the valve closes automatically in case of a power failure
Selection Data
Vacuum connection Gas flow, controllable Min. Max. Pressure absolute Min. Max. Closing / opening time DN 16 ISO-KF 5 x 10-6 mbar l/s 1250 mbar l/s 1 x 10-8 mbar 2.5 bar 3/4s
Technical Data
Tightness Actuator Control Digital Analog Ambient temperature Supply Housing Dosing sleeve Seals Weight1)
1) Connector included
1 x 10-9 mbar l/s Stepper motor VCC500-Z, VCA200-Z 0 ... 10 V DC 5 ... 40 C 24 V DC / 12 VA stainless steel fluorplastomer FPM 0.5 kg
Ordering Information1)
Type Part No.
1) Connector included
VDE016-X 250-505
Technical Drawing
Cable VCC - VDE

3m 5m 10 m 15 m 20 m 25 m Part No. Part No. Part No. Part No. Part No. Part No. 216-150 216-151 216-152 216-153 216-154 216-155
152 (5.98)
30 (1.18)
35 (1.38)
DN 16 ISO-KF
60 (2.36)
mm (inch)
60 (2.36)
90 (3.54)
Vacuum Valves
Gas Dosing Systems
CONTROLLER VCC500-Z
User Advantages

Simple operation - user friendly LCD display and function keys Analog/digital inputs, outputs and interfaces 99 PI pre-programmed control adjustments for quick and easy operation Adjustable PID control algorithm Wide variety of pre-programmed pressure gauges
Selection Data
Analog input Analog output 0 ... 10 V DC nominal pressure, gas flow 0 ... 10 V DC pressure, valve position
Technical Drawing
106 (4.17)
3.5 (0.14)
91 (3.58)
Type Part No.
VCC500-Z 250-900
106 (4.17)
128 (5.04)
Ordering Information1)
122.5 (4.82)
mm (inch)
Technical Data
Operating modes 8 available digital inputs 8 available digital outputs Pressure control Gas flow adjustment
3.5 (0.14)
91 (3.58)
208.5 (8.21)
3 (0.12)
Flow adjustment, opening/closing the valve, switching between pressure and gas flow control Valve position indication, setpoint status reached, status messages - sensor, valve, pressure control upstream and downstream Switching on after power failure Output nominal value reached, adjustable tolerance mbar, Pa, Torr, mV English, German RS232C, RS485 Auto = PI - selectable control speed steps 1-99 PID = PID - user definable parameters 5 % FS sensors 0.2 % FS sensor 90 ... 250 V AC 50 VA 1.65 kg
mm (inch)
Features Units Languages Interfaces Controller types Control accuracy Display accuracy Supply Voltage Consumption Weight
122.5 (4.82)
128 (5.04)
INTERFACE MODULE VCA200-Z

User Advantages

Easy and economic system integration Connects an RS232C interface to the digital interface of the Control Valve VDE016-X Inquiry of status and valve position
Selection Data
Interface Supply RS232C 24 VDC / 0.5 A
Type Part No. VCA200-Z 250-915
Technical Data
Installation Connection Ambient temperature Weight DIN mounting rail (symmetric or asymmetric) terminals 5 ... 50 C 40 g
Technical Drawing
54 (2.12)
18 (0.71)
62 (2.44)
63 (2.48)
Vacuum Valves

VVH010-A/X
Advantages
Simple opening and closing of the valve by loosening or tightening the screw cap
Selection Data
Vacuum connection Housing AISI / DIN DN 10 ISO-KF aluminum / 3.0615 DN 10 ISO-KF stainless steel 303 / 1.4305
Type Part No. VVH010-A 250-840 VVH010-X 250-841
Specifications
Tightness Pressure absolute min./max Valve plate Screw cap Seal Weight kg mbar l/s mbar/bar 1 x 10-9 1 x 10-8 / 5 aluminum brass nickel-plated FPM 0.1 1 x 10-9 1 x 10-8 / 5 stainless steel 304 / 1.4301 brass nickel-plated FPM 0.15
Spare Parts
O-ring B 4070 207 PV B 4070 207 PV
Dimensions
51 (2.0) 30 (1.18)
42 (1.77)
mm (inch) DN 10 ISO-KF
Vacuum Valves

VVM010-A
Advantages

No vacuum feedthrough Long service life Mountable in any position
Selection Data
Vacuum connection DN 10 ISO-KF
Type 230 V AC, 50/60 Hz 115 V AC, 50/60 Hz 24 V AC, 50/60 Hz 24 V DC Part No. Part No. Part No. Part No. VVM010-A 250-533 250-532 250-531 250-530
Specifications
Service life Tightness Conductance for molecular flow Conductance at 1mbar Pressure absolute min./max. Duty cycle cycles mbar l/s l/s l/s mbar/bar % 1 500 000 1 x 10-9 1 3.5 1 x 10-8 100 10 / 1 2 5 40 35 / 15 10 60 / 45 50 aluminum FPM kg 0.46
Differential pressure in closing / opening direction bar opens to a pressure difference of bar Ambient temperature Pickup / holding power Pressure resistance Closing / opening time Switching frequency Housing Seals Weight C VA bar ms 1/min
Vacuum Valves
VVM010-A - continued
Options
Filter with port, centering ring and clamping ring 215-152
Spare Parts
Seal set Filter 215-208 B 4161 210 4F
Dimensions
60 (2.36)
DN 10 ISO-KF
42 (1.89)
44 (1.73)
105 (4.13)
mm (inch)
DN 10 ISO-KF
30 (1.18)
30 (1.18)
mm (inch)
14 (0.55)
Vacuum Valves

VSM DN 16 - DN 100
Advantages
Fast-closing high vacuum isolation valve for separating the vacuum chamber from the backing pump Venting valve for roughing pumps Immediate closing action upon power failure Opening action only after the intake line has been evacuated
Selection Data
Vacuum connection DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KF DN 63 ISO-K DN 100 ISO-K
Type 200 - 230 V AC 100 - 115 V AC 24 V DC VSM016-A 253-004 253-002 253-000 VSM025-A 253-014 253-012 253-010 VSM040-A 253-024 253-022 253-020 VSM063-A 253-034 253-032 253-030 VSM100-A 253-044 253-042 253-040
Specifications
Nominal power Type of protection Conductance Installation position Tightness Pressure range Required pressure difference up for the safety valves to function properly in closing direction in opening direction Temperatures Solenoid coil Bakeout Materials Weight ambiance ambiance 20C ambiance 20C housing actuator housing, flange seals 0.3 kg 0.5 kg body valve plate 3.8 l/s 11 l/s any < 1x10-9 mbar l/s < 1x10-5 mbar l/s 1x10-8 mbar 1 bar (abs.) DC AC 2.5 W 5 / 3.7 VA (starting / holding) IP 65 according to DIN 40 050 30.5 l/s 126 l/s 300 l/s
> 150 mbar < 150 mbar 5C 50C < 55C < 80C < 60C < 50C aluminum FPM 0.9 kg 2.4 kg 5.1 kg
Vacuum Valves
VSM DN 16 - DN 100 - continued

Spare Parts
Seal set 215-055 215-056 215-057 215-058 215-059
Dimensions
DN DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KF
A 139 162 178
B 40 50 65
C 49 49 49
D 44 56 82
DN DN 63 ISO-K DN 100 ISO-K
A 220 264
B 88 108
D 124 164
Vacuum Valves

VIM010-A
Advantages
For automatic venting of pumps, system or vacuum chambers in case of a power failure
Selection Data
Vacuum connection Venting time for a 50 l vessel DN 10 ISO-KF 270 s
Type 200 - 230 V, 50/60 Hz 24 V DC 115 V, 50/60 Hz VIM010-A 250-851 250-850 250-852
Specifications
Part number Tightness Ambient temperature Switching frequency Service life Opening time Closing time Housing Seal Nominal power Pickup Holding Protection class Weight kg W / VA W / VA 2.5 / 2.5 / /5 / 3.7 IP 65 0.1 mbar l/s C 1/min Mio cycles ms ms 250-850 250-851 1 x 10-7 0 50 60 3 30 30 aluminum FPM /5 / 3.7 250-852
Dimensions
65.8 (2.60) 41 (1.61) 27 (1.06)
30 (1.18)
64 (2.52)
mm (inch)
DN 10 ISO-KF
Vacuum Valves

VSA016-X
Advantages

Protects vacuum systems from pressure >1.5bar Relief trigger point 1.2 to 1.5 bar absolute
Selection Data
Vacuum connection DN 16 ISO-KF
Type Part No. VSA016-X 250-555
Specifications
Tightness Pressure absolute min./max. Gas flow Ambient temperature Bakeout temperature Housing Seal Weight kg mbar l/s mbar / bar l/min C C 1 x 10-9 1 x 10-8 / 1.2 (absolute) 06 0 50 150 stainless steel FPM 0.1
Dimensions
20 (0.79)
G 1/8"
37 (1.46)
mm (inch) DN 16 ISO-KF
Vacuum Valves

DN 10-40
Advantages

Rugged and cost effective Simple opening and closing by lever Unobstructed passage
Selection Data
Vacuum connection DN 10 ISO-KF DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KF
Part No. 215-860 215-861 215-862 215-863
Specifications
Tightness Conductance for molecular flow Pressure absolute min./max. Bakeout temperature Housing Seals Weight
1) With outer centering ring
mbar/ls l/s mbar/bar C
1 x 10-5 1.5 10-5 / 5 1) 80 brass nickel plated PTFE
1 x 10-5 3 10-5 / 5 1) 80 brass nickel plated PTFE 0.35
kg
0.35
Dimensions
B
DN DN 10 ISO-KF DN 16 ISO-KF
C
A 75 100 130 160
B 83 95 110 160
C 47 51 64 85
DN 25 ISO-KF DN 40 ISO-KF
DN
DN
Vacuum Valves
Vacuum Fittings
Fittings and Ultra-High Components
Vacuum Fittings
Contents
VACUUM FITTINGS
CONNECTION ELEMENTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D1 SEALS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D3 FLANGES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D6 PIPE FITTINGS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D7 BELLOWS / HOSE WITH FLANGES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D9 TRANSITION PIECES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D11 HOSE, HOSE CONNECTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D14

CONNECTION ELEMENTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D16 SEALS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D17 FLANGES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D20 PIPE FITTINGS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D22 BELLOWS / HOSE WITH FLANGES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D24 TRANSITION PIECES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D25 PROTECTIVE LIDS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D26

FLANGE COMPONENTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D27
UHV CF Components
CONNECTION ELEMENTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D29 SEALS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D30 FLANGES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D32 PIPE FITTINGS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D36 BELLOWS / HOSE WITH FLANGES, COMPENSATOR . . . . . . . . . . . . . . . . . . . D38 TRANSITION PIECES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D39 PROTECTIVE LIDS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D40
Vacuum Control Catalog 2005-2006 - Dii
ISO-KF Small Flange Components Vacuum Fittings

CONNECTION ELEMENTS
Clip Clamping Ring

Ring: Stainless steel 301/1.4301 Bolt: steel, zinc plated Nut: Polymer POM
DN ... ISO-KF 10 16 20 25 32 40
Part No. 211-012 211-013 211-014
A 38 48 63
B 47 57 70
C 12 12 12
Set of 5 pcs. 5 pcs. 5 pcs.
Clamping Ring
Clamping ring half: Aluminum 380.0/3.2162 Bolt & nut: Steel nickel plated
DN ... ISO-KF 10 16 20 25 32 40 50
Part No. 211-001 211-002 211-003 211-004
A 45 55 70 95
B 61 72 90 123
C 16 16 18 25
Rapid Fastening Clamp

Spring: Steel Clamping ring half: Aluminum 380.0/3.2162 Lever: Polyamide
DN ... ISO-KF 10 16 20 25 32 40
Part No. 211-005 211-006 211-007
A 52 61 75
B 70 81 98
C 16 16 18
Hose Clip Clamping Ring
DN ... ISO-KF
Part No. 211-016 211-017 211-018
A 42 52 67
B 54 64 79
C 16 16 16
Clamping ring half: Aluminum 380.0/3.2162 10 16 Band: Stainless steel 430/1.4016 20 25 Bolt & nut thread: Steel zinc plated 32 40
Clamping Element
Clamping Element: Aluminum 380.0/3.2162 Bolt: Stainless steel Nut: Steel zinc plated
DN ... ISO-KF 10 16 20 25 32 40 50
Part No. 211-008 211-009 211-010 211-011
A 52 55 70 95
B 72 90 123
C 18 16 18 25
Vacuum Control Catalog 2005-2006-2006 - D1
Vacuum Fittings
CONNECTION ELEMENTS - continued
Chain Clamp
DN ... ISO-KF
Part No. 211-021 211-022 211-023 211-024
A 71 82 98 117
B 52.5 65 79 97.5
C 18 18 18 20
Chain link: Aluminum 6081/3.2215 10 16 Screw & nut & bolts: Stainless steel 20 25 32 40 50
Claw Grip
Claw: Screw & washer: Aluminum 6081/3.2215 Stainless steel
DN ... ISO-KF Part No. A 10 50 211-015 19.5
B 11.5
C 12.5
D 20
E 14
Set of 4 pcs.
Vacuum Control Catalog 2005-2006-2006 - D2

SEALS
Centering Ring
Ring: Aluminum 2011/ Seal: Elastomer CR DN ... ISO-KF 10 16 20 25 32 40 50 10 16 20 25 32 40 50 10 16 20 25 32 40 50 Part No. 211-051 211-052 211-053 211-054 211-055 211-056 211-057 211-058 211-059 211-060 211-061 211-062 211-063 211-064 211-065 211-066 211-067 211-068 211-069 211-070 211-071 A 12 17 22 26 34 41 52 12 17 22 26 34 41 52 12 17 22 26 34 41 52 B 10 16 20 25 32 40 50 10 16 20 25 32 40 50 10 16 20 25 32 40 50 C 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 D 3.9 3.9 3.9 3.9 3.9 3.9 3.9 3.9 3.9 3.9 3.9 3.9 3.9 3.9 3.9 3.9 3.9 3.9 3.9 3.9 3.9
Ring: Aluminum 2011/ Seal: Elastomer FPM
Ring: Stainless steel 303/1.4305 Seal: Elastomer FPM
External Centering Ring

Ring: Aluminum 2011/ Seal: Elastomer CR
DN ... ISO-KF 10-16 20-25 32-40 50 10-16 20-25 32-40 50
Part No. 211-081 211-082 211-083 211-084 211-085 211-086 211-087 211-088
A 32 42 57 77 32 42 57 77
B 30.2 40.2 55.2 75.2 30.2 40.2 55.2 75.2
C 7 7 7 7 7 7 7 7
D 3.9 3.9 3.9 3.9 3.9 3.9 3.9 3.9
Ring: Aluminum 2011/ Seal: Elastomer FPM
Reducing Centering Ring

Ring: Aluminum 2011/ Seal: Elastomer CR Ring: Aluminum 2011/ Seal: Elastomer FPM Ring: Stainless steel 303/1.4305 Seal: Elastomer FPM
DN ... ISO-KF 10 / 16 20 / 25 32 / 40 10 / 16 20 / 25 32 / 40 10 / 16 20 / 25 32 / 40
Part No. 211-072 211-073 211-074 211-075 211-076 211-077 211-078 211-079 211-080
A 17 26 41 17 26 41 17 26 41
B 10 20 32 10 20 32 10 20 32
C 12 22 34 12 22 34 12 22 34
D 8 8 8 8 8 8 8 8 8
E 3.9 3.9 3.9 3.9 3.9 3.9 3.9 3.9 3.9
Vacuum Control Catalog 2005-2006 - D3
Vacuum Fittings
SEALS - continued
Centering Ring with Filter
Ring: Stainless steel 303/1.4305 Seal: Elastomer FPM
Filter: Stainless steel 316L/1.4435 Pore size 0.02 mm * Air at 0C, 20 mbar differential pressure
DN ... ISO-KF 10 16 25 40 50
Part No. 211-089 211-090 211-092 211-094 211-095
A 12 17 26 41 52
B 8 14 23 35.5 48
C 8 8 8 8 8
D 3.9 3.9 3.9 3.9 3.9
E* 0.5m3/h 1.2m3/h 4.2m3/h 11.3m3/h 18.1m3/h
Recommended gas flow direction
Centering Ring with Fine Filter

Inner ring: Stainless steel 303/1.4305 Snap ring: Stainless steel 304/1.4301 Seal: Elastomer FPM
Filter: Stainless steel 316L/1.4435 Pore size 0.004 mm Degree of separation at 0.001 mm up to 98%
DN ... ISO-KF 10 16 25 40 50
Part No. 211-096 211-097 211-098 211-099 211-100
A 12 17 26 41 52
B 9 13 22 35.5 45.7
C 8 8 8 8 8
D 3.9 3.9 3.9 3.9 3.9
O-Ring
Elastomer CR
DN ... ISO-KF 10 16 20 25 32 40 50
Part No. 211-146 211-147 211-148 211-149 211-150 211-151 211-152 211-153 211-154 211-155 211-156 211-157 211-158 211-159
A 15 18 25 28 40 42 55 15 18 25 28 40 42 55
B 5 5 5 5 5 5 5 5 5 5 5 5 5 5
Set of 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs.
Elastomer FPM
10 16 20 25 32 40 50
Indium Seal
Inner ring: Stainless steel 304/1.4301 Outer ring: Aluminum 5012/ Seal: Indium
Working temperature: -196 to +60C
DN ... ISO-KF 10-16 20-25 32-40 50
Part No. 211-162 211-163 211-164 211-165
A 32 42 57 77
B 18 28 43 63
C 30 40 55 75
D 3.9 3.9 3.9 3.9
E 7 7 7 7
SEALS - continued
Aluminum Seal
Aluminum annealed 6082/3.2315
With
DN ... ISO-KF 10-16 20-25 32-40
Part No. 211-167 211-168 211-169 211-170
A 25.6 35.6 50.6 65.6
B 19.6 29.6 44.6 59.6
C 4.5 4.5 4.5 4.5
D 22.6 32.6 47.6 62.6
Support Ring
211-171 211-168 211-173 211-174
Set of 3 pieces
50
Support For Aluminum Seal

Stainless steel 301/1.4310
DN ... ISO-KF 10-16 20-25 32-40
Part No. 211-171 211-172 211-173 211-174
A 32 42 57 77
B 7 7 7 7
For Aluminum Seal 211-167 211-168 211-169 211-170
Reusable
50
Vacuum Fittings

FLANGES
Blank Flange
Aluminum 6012/
DN ... ISO-KF 10 16 25 40 50
Part No. 211-176 211-177 211-178 211-179 211-180 211-181 211-182 211-183 211-184 211-185
A 5 5 5 5 6 5 5 5 5 6
10 16 25 40 50
Flange with Tube, Short

Steel /1.0037
DN ... ISO-KF 10 16 25 40 50
Part No. 211-201 211-202 211-203 211-204 211-205 211-211 211-212 211-213 211-214 211-215
A 20 20 20 20 20 20 20 20 20 20
B 12 16 26 41 51 12 16 26 41 50
C 16 20 30 45 55 16 20 30 45 54
10 16 25 40 50
Flange with Tube, Long

Steel /1.0037
DN ... ISO-KF 10 16 25 40 50
Part No. 211-206 211-207 211-208 211-209 211-210 211-216 211-217 211-218 211-219 211-220
A 70 70 70 70 70 70 70 70 70 70
B 12 16 26 41 51 12 16 26 41 50
C 16 20 30 45 55 16 20 30 45 54
10 16 25 40 50

PIPE FITTINGS
ELBOW 90 Aluminum 6082/
DN ... ISO-KF 10 16 25 40
Part No. 211-251 211-252 211-253 211-254 211-286 211-287 211-288 211-289 211-290
A 30 40 50 65 30 40 50 65 70
B 12 16 25 39 9 15 25 40.5 49
10 16 25 40 50
ELBOW 45 Stainless steel 304/1.4301
DN ... ISO-KF 16 25 40
Part No. 211-307 211-308 211-309
A 26 32 40
B 55 68.8 87.7
C 15 25 37
TEE Aluminum 6082/
DN ... ISO-KF 10 16 25 40 10 16 25 40 50
Part No. 211-261 211-262 211-263 211-264 211-291 211-292 211-293 211-294 211-295
A 30 40 50 65 30 40 50 65 70
B 60 80 100 130 60 80 100 130 140
C 12 16 25 39 12 16 25 40.5 53
REDUCING TEE Stainless steel 304/1.4301
DN ... ISO-KF 25/16 40/16 40/25 50/16 50/25 50/40
Part No. 211-316 211-317 211-318 211-319 211-320 211-321
A 50 65 65 70 70 70
B 100 130 130 140 140 140
C 40 40 50 50 65 65
Vacuum Fittings
PIPE FITTINGS - continued

Cross
Aluminum 6082/3.2315 DN ... ISO-KF 10 16 25 40 Stainless steel 304/1.4301 10 16 25 40 50 Part No. 211-266 211-267 211-268 211-269 211-296 211-297 211-298 211-299 211-300 A 30 40 50 65 30 40 50 65 70 B 60 80 100 130 60 80 100 130 140 C 12 16 25 39 12 16 25 40.5 53
Reducing Cross
Aluminum 6082/3.2315 Stainless steel 304/1.4301
DN ... ISO-KF 25 40 25 40 50
Part No. 211-271 211-272 211-301 211-302 211-303
A 35 40 35 40 50
B 70 80 70 80 100
C 35 45 35 45 50
D 70 90 70 90 100
E 25 39 25 53
F 16 16 17 16
40.5 16
Intermediate Piece
Aluminum 6063/
DN ... ISO-KF 16 25 40
Part No. 211-227 211-228 211-229 211-277 211-278 211-279 211-280
A 80 100 130 80 100 130 140
B 16 25 40 16 25 40.5 53
16 25 40 50
Reducer
Aluminum 6063/
DN ... ISO-KF 25/16 40/16 40/25 50/40
Part No. 211-231 211-232 211-233 211-234 211-281 211-282 211-283 211-284
A 40 40 40 40 40 40 40 40
B 16 16 25 40 16 6 26 40
25/16 40/16 40/25 50/40

BELLOWS/HOSE WITH FLANGES
Bellows
Flanges: Stainless steel 304/1.4301 Bellow: Stainless steel 316Ti/ A = unstressed length D = max. deviation from axis Max. internal pressure: 4 bar DN ... ISO-KF 10 16 25 40 50 Part No. 211-326 211-327 211-328 211-329 211-330 A 70 70 80 100 100 B 3.5 6.4 8 11 10 C 3 4.1 5 7 6 D 23 21 17 15 15
Metal Hose
Flanges: Stainless Steel 304/1.4301 Bellow: Stainless steel 316Ti/
DN ... ISO-KF 10 10 10 10 16 16 16 16 25 25 25 25 40 40 40 40 50 50 50 50
Part No. 211-331 211-332 211-333 211-334 211-335 211-336 211-337 211-338 211-339 211-340 211-341 211-342 211-343 211-344 211-345 211-346 211-347 211-348 211-349 211-350
A 250 500 750 1000 250 500 750 1000 250 500 750 1000 250 500 750 1000 250 500 750 1000
B 70 70 70 70 70 70 70 70 100 100 100 100 130 130 130 130 200 200 200 200
C 32 32 32 32 50 50 50 50 60 60 60 60 100 100 100 100 130 130 130 130
Max. internal pressure: 4 bar B = radius for multiple bending C = radius for single bend
Metal Hose, Flexible

Flanges: Stainless steel 304/1.4301 Bellow: Stainless steel 316Ti/
DN ... ISO-KF 16 16 25 25 40 40 50 50
Part No. 211-515 211-516 211-519 211-520 211-523 211-524 211-527 211-528
A 250 500 250 500 250 500 250 500
B 40 40 55 55 90 90 100 100
C 25 25 36 36 60 60 65 65
Max. internal pressure: 2 bar B = radius for multiple bending C = radius for single bend
Vacuum Fittings
BELLOWS/HOSE WITH FLANGES - continued

PVC Hose
Hose: PVC with cast in steel spiral Nipple: Aluminum 6012/3.0615 Hose clamp: Stainless steel 430/ B = radius for multiple bending C = radius for single bend DN ... ISO-KF 16 16 25 25 40 40 Part No. 211-406 211-407 211-408 211-409 211-410 211-411 A 500 1000 500 1000 500 1000 B 130 130 200 200 260 260 C 65 65 100 100 130 130

TRANSITION PIECES
Adapter ISO-KF/ISO-K
Aluminum 6082/ Stainless steel 303/1.4305
ISO-KF/ISO-K 40/63 50/63 40/63 50/63 40/100
Part No. 212-171 212-172 212-173 212-174 212-175
A 40 45 40 45 40
Adapter ISO-KF/CF-F
ISO-KF/CF-F 16/16 25/16 16/40 25/40 40/40 40/63 40/100
Part No. 213-251 213-252 213-254 213-255 213-256 213-259 213-262
A 35 35 30 30 50 35 50
B 16 16 16 26 37 41 41
Adapter ISO-KF/VCR Female

Flange: Stainless steel 304/1.4301 Nut: Stainless steel 316L/1.4435
ISO-KF/VCR 16/ 1/4 25/ 1/4 25/ 1/2 40/ 3/4
Part No. 211-359 211-480 211-360 211-361
A 35.8 35.8 40.6 53.3
Width across flats in inch
Adapter ISO-KF/VCR Male

Flange: Stainless steel 304/1.4301 Nut: Stainless steel 316L/1.4435
ISO-KF/VCR 16/ 1/4 25/ 1/4 25/ 1/2 40/ 3/4
Part No. 211-362 211-481 211-363 211-364
A 35.8 35.8 40.6 53.3
Vacuum Fittings
TRANSITION PIECES - continued

Adapter ISO-KF/Swagelok
Flange: Stainless steel 304/1.4301 Nut: Stainless steel 316L/1.4435 ISO-KF/Swagelok Part No. 16/6 mm 25/10 mm 40/16 mm 16/ 1/8 25/ 1/4
1) 2)
A 37 45 53 34.5 37 37 47.5
B 15.3 17.2 24.4 12.7 15.3 15.3 22.8
211-356 1) 211-357 1) 211-358 211-477

1)
211-476 2)
2)
Width across flats metric (SI) Width across flats in inch
40/ 1/4 40/ 1/2
211-478 2) 211-479 2)
Glass Tube Connection

Flange: Tube: Aluminum 6012/ Glass Pyrex Sealing: Elastomer FPM
DN ... ISO-KF 10 40
Part No. 211-351 211-353
A 50 65
B 8 22
C 10 26
D 30 45
Screw-in Flange
Flange: Stainless steel 304/1.4301 Sealing: Elastomer FPM
Width across flats metric (SI)
ISO-KF/DN 10/ G 3/8 16/ G 1/2 25/ G 1 40/ G 1 1/2
Part No. 211-366 211-367 211-368 211-369
A 35 35 45 50
B 15 15 25 30
C G 3/8 G 1/2 G1
D 12 16 25
G 1 1/2 41
Screw-on Flange
Flange: Stainless steel 304/1.4301 Sealing: Elastomer FPM
Width across flats metric (SI)
ISO-KF/DN 10/ G 3/8 16/ G 1/2 25/ G 1 40/ G 1 1/2
Part No. 211-376 211-377 211-378 211-379
A 35 35 45 50
B 15 15 25 30
C G 3/8 G 1/2 G 1
D 10 15 24
G 1 1/2 38
TRANSITION PIECES - continued

Adapter ISO-KF/NPT Female
Stainless steel 303 ISO-KF/NPT 16/ 1/8 16/ 1/4 25/ 1/8 25/ 1/4 25 / 1/2 25 / 1 40 / 1/4 40 / 1/2
Part No. 211-566 211-567 211-569 211-570 211-571 211-572 211-574 211-575 211-576
A 19 19 19 19 26 42 19 26 26
B 8 13 10 13 18 24 13 18 23
C 12 15 12 15 25 25 15 25 41
D 1/8-27 NPT 1/4-18 NPT 1/8-27 NPT 1/4-18 NPT 1/2-14 NPT 1-11 1/2 NPT 1/4-18 NPT 1/2-14 NPT 1-11 1/2 NPT
40 / 1
Adapter ISO-KF/NPT Male

Stainless steel 303 / 1.4305
ISO-KF/NPT 16/ 1/8 16/ 1/4 25/ 1/8 25/ 1/4 25 / 1/2 25 / 1 40 / 1/4 40 / 1/2 40 / 1 40 / 1 1/4 40 / 1 1/2
Part No. 211-551 211-552 211-554 211-555 211-556 211-557 211-559 211-560 211-561 211-562 211-563 211-564
A 40 40 40 40 50 60 40 50 60 50 50 50
B 17 22 17 22 30 32 21 30 33 31.5 28 27
C 5 7 5 7 14 25 7 14 25 32 32 40
D 1/8-27 NPT 1/4-18 NPT 1/8-27 NPT 1/4-18 NPT 1/2-14 NPT 1-11 1/2 NPT 1/4-18 NPT 1/2-14 NPT 1-11 1/2 NPT 1 1/4-11 1/2 NPT 1 1/2-11 1/2 NPT 2-11 1/2 NPT
40 / 2
Vacuum Fittings

HOSE, HOSE CONNECTION
Hose Adapter 90
Aluminum 6082/
DN ... ISO-KF 16 25 40
Part No. 211-257 211-258 211-259
A 40 50 65
B 40 50 65
C 16 25 40
D 13 22 37
C = nominal connection for sleeve / hose
Hose Adapter for Rubber Hose

Aluminum 6012/
DN ... ISO-KF 16 25 40
Part No. 211-387 211-388 211-389 211-392 211-393 211-394
A 40 40 40 40 40 40
B 7 7 7 7 7 7
C 12 12 12 12 12 12
C = nominal connection for hose
16 25 40
Hose Connection
Aluminum 6012/
DN ... ISO-KF 25 16 25 40
Part No. 211-401 211-402 211-403 211-404
A 40 40 40 40
B 13 13 22 37
C 16 16 25 40
C = nominal connection for sleeve / hose
Sleeve with Hose Clamp

Hose clamp: Stainless steel 430/ Sleeve: Elastomer CR
Max. internal pressure: 1 bar
DN ... ISO-KF 16 25 40
Part No. 211-417 211-418 211-419
A 58 60 64
B 7 9 13
C 14 16 20
D 16 25 40
E 44 50 68
Hose Clamp
Stainless steel 430/
DN ... ISO-KF 16 25 40
Part No. 211-461 211-462 211-463
A 13 19 29
B 32 44 76
HOSE, HOSE CONNECTION - continued

PVC Hose
With cast in spiral
For vacuum applications Indicate length in meters
DN ... ISO-KF 16 25 40
Part No. 211-442 211-443 211-444
A 23 33 53
B 16 25 40
C 130 200 260
Rubber Hose
For vacuum applications
Indicate length in meters Hardness: 55 5 Shore A Temperature: -30 to +85 C
DN ... ISO-KF 10 16 20
Part No. 211-451 211-452 211-453
A 17 25 32
B 7 10 16
Protective Lid
Polyethylene
DN ... ISO-KF 10-16 20-25 32-40 50
Part No. 211-427 211-428 211-429 211-430
A 32 42 57 77
B 29 39 54 74
C 7.5 7.5 7.5 7.5
Vacuum Fittings

CONNECTION ELEMENTS
Clamp
Steel zinc plated 103/
DN ... ISO-K 63-250 320-500 630
Part No. 212-225 212-226 212-227 212-228 212-240
A 60 78 88 61 82
B 17 27 31 18 29
C 27 39 49 28 47
Set of 4 pcs. 4 pcs. 4 pcs. 4 pcs. 4 pcs.
63-250 320-630
Claw
Clamping flange / base plate
DN ... ISO-K 63-100 160-250 320-500 630
Part No. 212-231 212-232 212-233 212-234 212-235 212-236 212-237 212-233 212-247 212-248 212-249 212-233
A 22.5 23 36.5 41.5 18.6 19 31 36.5 20.6 21.1 33.9 36.5
B 35 35 50 55 30 35 45 50 30 35 45 50
C 13.9 13.9 20.6 25.6 10 10 15 20.6 12 12 18 20.6
Set of 4 pcs. 4 pcs. 4 pcs. 4 pcs. 4 pcs. 4 pcs. 4 pcs. 4 pcs. 4 pcs. 4 pcs. 4 pcs. 4 pcs.
Clamping flange/ base plate with groove
63-100 160-250 320-500 630
Clamping flange with groove / base plate
63-100 160-250 320-500 630
Steel zinc plated 103/
ISO-K Clamp Flange Components Vacuum Fittings

SEALS
Centering Ring
Inner & outer ring: Seal: Aluminum 6082/ Elastomer CR
DN ... ISO-K 63 80 100 160 200 250 320 400 500 630
Part No. 212-251 212-091 212-252 212-253 212-254 212-255 212-256 212-257 212-258 212-259 212-261 212-092 212-262 212-263 212-264 212-265 212-266 212-267 212-268 212-269 212-270 212-271 212-281 212-093 212-282 212-283 212-284 212-285
A 96 109 128 179 239 287 358 440 541 691 96 109 128 179 239 287 358 440 541 691 840 1040 96 109 128 179 239 287
B 70 83 102 153 213 261 318 400 501 651 70 83 102 153 213 261 318 400 501 651 800 1000 70 83 102 153 213 261
C 3.9 3.9 3.9 3.9 3.9 3.9 5.6 5.6 5.6 5.6 3.9 3.9 3.9 3.9 3.9 3.9 5.6 5.6 5.6 5.6 5.6 5.6 3.9 3.9 3.9 3.9 3.9 3.9
D 8 8 8 8 8 8 14 14 14 14 8 8 8 8 8 8 14 14 14 14 14 14 8 8 8 8 8 8
Inner & outer ring: Seal:
Aluminum 6082/ Elastomer FPM
63 80 100 160 200 250 320 400 500 630 800 1000
Inner ring: Stainless steel 304/ Outer ring: Aluminum 6082/ Seal: Elastomer FPM
63 80 100 160 200 250
Vacuum Fittings
SEALS - continued
Centering Ring with Fine Filter
Inner ring: Stainless steel 304/ Outer ring: Aluminum 6082/ Seal: Elastomer FPM Snap ring: Stainless steel 304/ Filter grit: Stainless steel 304/
Filter: Stainless steel 316L/ Pore size 0.004 mm Degree of separation at 0.001 mm up to 98%
DN ... ISO-K 63 100
Part No. 212-291 212-292
A 62 94
B 69.8 101.8
C 3.9 3.9
D 8 8
O-Ring
Elastomer CR
DN ... ISO-K 63 80 100 160 200 250 320 400 500 630
Part No. 212-386 212-387 212-388 212-389 212-390 212-391 212-356 212-357 212-358 212-359 212-392 212-393 212-394 212-395 212-396 212-397 212-366 212-367 212-368 212-369 212-370 212-371
A 75.6 88.3 107.3 158.1 208.9 253.4 329.6 405.3 506.9 658.9 75.6 88.3 107.3 158.1 208.9 253.4 329.6 405.3 506.9 658.9 808 1006
B 5.3 5.3 5.3 5.3 5.3 5.3 7 7 7 7 5.3 5.3 5.3 5.3 5.3 5.3 7 7 7 7 7 7
Set of 5 pcs. 5 pcs. 5 pcs. 5 pcs. 5 pcs. 5 pcs.
Elastomer FPM
63 80 100 160 200 250
5 pcs. 5 pcs. 5 pcs. 5 pcs. 5 pcs. 5 pcs.
Elastomer FPM
320 400 500 630 800 1000
SEALS - continued
Aluminum Seal
Aluminum annealed 6082/ DN ... ISO-K 63 100 160 250 Number of DN 63 ISO -K DN 100 ISO-K DN 160 ISO-K DN 250 ISO-K Part No. 212-301 212-302 212-303 212-305 Clamps 4 6 8 12 8 8 12 A 85.6 116.6 166.6 276.6 B 83 114 164 274 C 69.8 D 2.6 E 4.5 4.5 4.5 4.5
101.8 2.6 152.8 2.6 260.8 2.6
Claw Grips
Vacuum Fittings

FLANGES
Blank Flange
Steel nickel plated A570/
DN ... ISO-K 63 100 160 250
Part No. 212-001 212-002 212-003 212-005 212-011 212-076 212-012 212-013 212-014 212-015 212-016 212-017 212-018 212-019
A 95 130 180 290 95 110 130 180 240 290 370 450 550 690
B 12 12 12 12 12 12 12 12 12 12 17 17 17 22
63 80 100 160 200 250 320 400 500 630
Welding Flange
Steel /1.0570 Steel A570/ Stainless steel 304/
DN ... ISO-K 63 100 160 250 63 80 100 160 200 250
Part No. 212-021 212-022 212-023 212-025 212-031 212-078 212-032 212-033 212-034 212-035
A 95 130 180 290 95 110 130 180 240 290
B 76.1 108 159 267 76.1 88.9 108 159 219.1 267
C 70.3
D 12
E 6 6 6 6 6 6 6 6 6 6
102.2 12 153.2 12 261 71.5 84.9 102 155 261 12 12 12 12 12 12
213.9 12
FLANGES - continued
Flange with Tube
Flange: Steel /1.0570 Tube: Steel /1.0831 DN ... ISO-K 63 100 160 250 320 400 500 630 Stainless steel 304/ 63 100 160 200 250 320 400 500 630 Part No. 212-041 212-042 212-043 212-045 212-046 212-047 212-048 212-049 212-051 212-052 212-053 212-054 212-055 212-056 212-057 212-058 212-059 A 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 B 76.1 108 159 267 324 406 508 660 76.1 108 159 219.1 267 324 406 508 660 C 70.3 102.2 153.2 261 318 400 500 650 71.5 104 155 213.1 261 318 400 500 650
Vacuum Fittings

PIPE FITTINGS
ELBOW 90 Stainless steel 304/
DN ... ISO-K 63 100 160* 200* 250* 320*
Part No. 212-101 212-102 212-103 212-104 212-105 212-106
A 88 108 138 178 208 250
B 66 100 150 213 250 318

A
B
A
B
C
TEE Stainless steel 304/
DN ... ISO-K 63 100 160 200 250 320
Part No. 212-111 212-112 212-113 212-114 212-115 212-116
A 88 108 138 178 208 250
B 66 100 150 213 250 318
REDUCING TEE Stainless steel 304/
DN ... ISO-K 160/63 160/100 250/200
Part No. 212-196 212-197 212-198
A 138 138 190
B 276 276 380
C 130 131 208
REDUCER Stainless steel 303/
DN ... ISO-K 80/63 100/63 160/100 250/200
Part No. 212-084 212-161 212-163 212-170
A 50 50 50 50

Intermediate Piece
Stainless steel 304/ DN ... ISO-K 63 63 Part No. 212-191 212-192 A 100 176 B 70 70
B
Cross
DN ... ISO-K 63 100 160 250
Part No. 212-121 212-122 212-123 212-125
A 88 108 138 208
B 66 100 150 250
Reducing Cross
DN ... ISO-K 63 100 160
Part No. 212-131 212-132 212-133
A 88 100 100
B 44 50 50
C 66 82 107
D 64 80 107
E 59 77 105
1 x DN 16 ISO-KF, 1 x DN 25 ISO-KF, 1 x DN 40 ISO-KF
Vacuum Fittings

BELLOWS / HOSE WITH FLANGES
Bellows
Flanges: Stainless steel 304/ Bellow: Stainless steel 316Ti/
DN ... ISO-K 63 100 160 200
Part No. 212-201 212-202 212-203 212-204 212-205 212-206
A 132 132 150 150 200 250
B 20 28 22 20 30 50
C 20 28 22 20 30 50
D 66 95 153 213 261 313
E 30 30 14 12 13 12
A = unstressed length
E = max. deviation from axis Max. internal pressure 1.5 bar
250 320
Metal Hose
Flanges: Stainless steel 304/ Bellow: Stainless steel 316Ti/
DN ... ISO-K 63 63 63 63 100 100 100
Part No. 212-211 212-212 212-213 212-214 212-215 212-216 212-217 212-218
A 250 500 750 1000 250 500 750 1000
B 250 250 250 250 370 370 370 370
C 160 160 160 160 240 240 240 240
B = radius for multiple bending C = radius for single bending
Max. internal pressure 1.5 bar
100

TRANSITION PIECES
Adapter Flange
Stainless steel 304/ ISO-K / ISO-F 160/63 160/100 200/100 200/160 250/160 Part No. 212-152 212-153 212-155 212-156 212-159 A 22 25 20 25 22
Adapter
Aluminum 6082/ Stainless steel 303/
ISO-K / ISO-KF Part No. 63/40 63/50 63/40 63/50 100/40 212-171 212-172 212-173 212-174 212-175
A 40 45 40 45 40
Adapter
ISO-CF / ISO-K Part No. 63/63 100/100 160/160 213-271 213-272 213-273
A 90 90 90
B 1 1 1.5
C 1 1 1.5
Adapter
Aluminum 6082/
DN ... ISO-K 63 100 160
Part No. 212-181 212-182 212-183
A 51 56 56
B 76 107 156
Sleeve with Hose Clamp

Sleeve: Elastomer CR Hose clamp: Stainless steel 430/ Max. internal pressure: 1 bar
DN ... ISO-KF 63 100 160
Part No. 212-186 212-187 212-188
A 70 72 72
B 14 8 8
C 24 26 26
D 75 106 155
E 120 150 200
Vacuum Fittings

PROTECTIVE LIDS
Protective Lids
Polyethylene
DN ... ISO-K 63 100 160 200 250 320 400 500 630
Part No. 212-311 212-312 212-313 212-314 212-315 212-316 212-317 212-318 212-319
A 102 137 187 248 297.5 380 461 557 697
B 95 130 180 240 290 370 450 550 690
C 18 18 18 18.5 18.5 23.5 23.5 24 29
ISO-F Fixed Flange Components Vacuum Fittings

FLANGE COMPONENTS
Collar Flange with Retaining Ring

Flange: Steel nickel plated Retaining Ring: Steel nickel plated /1.0570
DN ... ISO-F 63 100 160 200 250 320 400 500 630
Part No. 212-061 212-062 212-063 212-064 212-065 212-066 212-067 212-068 212-069
A 12 12 16 16 16 20 20 20 24
B 95.5 130.5 180.7 240.7 290.7 370.8 450.8 550.8 691
C 130 165 225 285 335 425 510 610 750
Adapter Flange with ISO-K / ISO-F

DN ... ISO-F 160/63 160/100 200/100 200/160 250/160
Part No. 212-152 212-153 212-155 212-156 212-159
A 22 25 20 25 22
Measurement Flange
Aluminum 6082/3.2315 Stainless steel 304/1.4301
DN ... ISO-F 100 160 63 100 160
Part No. 212-142 212-143 212-146 212-147 212-148
A 30 30 30 30 30
B 165 225 130 165 225
C M8 M 10 M8 M8 M 10
*Claw grip DN 16 ISO-KF included
Vacuum Fittings
FLANGE COMPONENTS - continued

Set of Hexagon Bolts
Steel zinc plated
DN ... ISO-F 63-100 160-250 320-500 630
Part No. 212-241 212-242 212-243 212-244
A 40 50 70 80
B 8 10 12 12
Set of 8 pcs. 12 pcs. 16 pcs. 20 pcs.
Sealing Disk
Disk: Aluminum 6082/3.2315 O-ring: Elastomer CR
DN ... ISO-F 63 100 160 250 320 400 500 630 800 1000
Part No. 212-321 212-322 212-323 212-325 212-326 212-327 212-328 212-329 212-330 212-331
A 73 107 160 270 330 415 515 656 825 1025
B 3.9 3.9 3.9 3.9 5.6 5.6 5.6 5.6 5.6 5.6
C 98 132 185 295 375 460 560 701 870 1070
O-Ring
Elastomer CR
DN ... ISO-F 63 100 160 250 320 400 500 630 800 1000
Part No. 212-345 212-346 212-347 212-349 212-338 212-339 212-340 212-341 212-342 212-343
A 80 110 165 265 325 412 510 640 820 1023
B 5 5 5 5 8 8 8 8 8 8
Set of 5 pcs. 5 pcs. 5 pcs. 5 pcs.
UHV CF Components Vacuum Fittings
UHV CF Components
CONNECTION ELEMENTS
Hexagon Bolts with Nuts

Bolt: Nut: Stainless steel 316/1.4401 Stainless steel 316/1.4401 Washer: Stainless steel 304/1.4301
DN ... CF 16 40 63 100 160 200-250 300 350
Part No.
B 3.2 5 6.5 6.5 6.5 6.5 8 8
Set of 25 x M4 25 x M6 25 x M8 25 x M8 25 x M8 25 x M8 34 x M10 38 x M10
Required torque 3.5 Nm 10 Nm 20 Nm 20 Nm 20 Nm 20 Nm 30 Nm 30 Nm
213-401 20 213-402 35 213-403 45 213-404 50 213-405 55 213-406 60 213-408 70 213-409 70
Hexagon Bolts without Nuts

Bolt: Stainless steel 316/1.4401 Washer: Stainless steel 304/1.4301
DN ... CF 16 40 63-160
Part No.
Set of 25 x M4 25 x M6 25 x M8
Required torque 4 Nm 10 Nm 20 Nm
213-411 16 213-412 25 213-413 35
Hexagon Bolts with Duo Nuts

Bolt: Stainless steel 316/1.4401 Washer: Stainless steel 304/1.4301 Duo nut: Stainless steel 316/1.4401
DN...CF 16 40 63 100 160
Part No.
B 7 10 12 12 12
C 4 5 8 8 8
Duo nut 6 x M4/3 6 x M6/3 8 x M8/3 16 x M8/8
Required torque 4 Nm 10 Nm 20 Nm 20 Nm
213-421 20 213-422 35 213-423 45 213-424 50 213-425 55
20 x M8/10 20 Nm
Set of Stud Screws

Bolt: Nut: Stainless steel 316/1.4401 Stainless steel 316/1.4401 Washer: Stainless steel 304/1.4301
DN ... CF 16 40 63-100
Part No.
Set of 6 x M4 6 x M6 16 x M8
Required torque 4 Nm 10 Nm 20 Nm
213-431 20 213-432 35 213-433 45
Thread Lubricant
C100
Remains fully effective for at least 10 bakeout cycles
Part No. 28g
Temperature resistance
214-231 1000 C
Vacuum Fittings
UHV CF Components
UHV CF Components
SEALS
Copper Gasket
Premium quality Diamond surface finish Individual packaging Copper OFMC /2.0040
DN ... CF 16 40 63 100 160 200 250
Part No. 213-371 213-372 213-373 213-374 213-375 213-376 213-377 213-451 213-452 213-453 213-454 213-455 213-456 213-458 213-459
A 2 2 2 2 2 2 2 2.1 2.1 2.1 2.1 2.1 2.1 2.1 2.1
B 21.3 48.1 82.4 120.5 171.3 222.1 272.7 21.3 48.1 82.4 120.5 171.3 222.1 326.2 376.5
C 16.2 36.8 63.6 101.7 152.5 203.3 254 16.2 39 63.6 101.8 152.6 203.4 307 357
Set of 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 5 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 1 pcs. 1 pcs.
Standard quality Copper OFMC /2.0040
16 40 63 100 160 200 300 350
Copper Gasket Silver Plated

Premium quality Diamond surface finish Individual packaging Copper OFMC /2.0040 Silver plated
DN ... CF 16 40 63 100 160 200 250
Part No. 213-381 213-382 213-383 213-384 213-385 213-386 213-387
A 2 2 2 2 2 2 2
B 21.3 48.1 82.4 120.5 171.3 222.1 272.7
C 16.2 36.8 63.6 101.7 152.5 203.3 254
Set of 10 pcs. 10 pcs. 10 pcs. 10 pcs. 5 pcs. 5 pcs. 5 pcs.
Copper Gasket Gold Plated

Premium quality Diamond surface finish Individual packaging Copper OFMC /2.0040 Gold plated
DN ... CF 16 40
Part No. 213-471 213-472
A 2 2
B 21.3 48.1
C 16.2 36.8
Set of 5 pcs. 5 pcs.
SEALS - continued
FPM Seal
Elastomer FPM DN ... CF 16 40 Part No. 213-391 213-392 A 2 2.5 B 21 48.2 C 16 42 D Set of 5pcs. 5 pcs.
63 100 160 200
213-393 213-394 213-395 213-396
3.2 3.2 3.2 3.2
82.7
69.7
2.5 2.5 2.5
2 pcs. 2 pcs. 2 pcs. 2 pcs.
119.8 107.8 2.5 171.7 156 222.5 206
FPM Seal with Support Ring

Seal: Elastomer FPM Support ring: Aluminum 6082/
DN ... CF 250
Part No. 213-397
A 5
Set of
266.5 248.3 256.2 1 pcs.
Vacuum Fittings
UHV CF Components
UHV CF Components
FLANGES
Blank Flange
DN ... CF-F 16 40 63 100 160 200 250 300 350 16 40 63 100 160 200 250
Part No. 213-001 213-002 213-003 213-004 213-005 213-006 213-007 213-008 213-009 213-101 213-102 213-103 213-104 213-105 213-106 213-107
A 7.5 13 17.5 20 22 24.5 2405 28.5 28.5 7.5 13 17.5 20 22 24.5 24.5
B 14 38 66 104 155 205 256 306 356 14 38 66 104 155 205 256
C 1.4 1.4 1.4 1.4 1.4 1.4 1.4 1.4 1.4 1.4 1.4 1.4 1.4 1.4 1.4 1.4
Stainless steel 316L/1.4435 Stainless steel 316LN/1.4429
Blank Flange, Rotatable

DN ... CF-R 16 40 63 100 160 200 250
Part No. 213-011 213-012 213-013 213-014 213-015 213-016 213-017 213-111 213-112 213-113 213-114 213-115 213-116 213-117
A 7.5 13 17.5 20 22 24.5 24.5 7.5 13 17.5 20 22 24.5 24.5
B 5.8 7.6 12.6 14.3 15.8 17.1 18 5.8 7.6 12.6 14.3 15.8 17.1 18
C 18.6 41 71 109 160 206 257 18.6 41 71 109 160 206 257
D 14 38 66 104 155 205 256 14 38 66 104 155 205 256
E 1.4 1.4 1.4 1.4 1.4 1.4 1.4 1.4 1.4 1.4 1.4 1.4 1.4 1.4
Stainless steel 316LN/1.4429
16 40 63 100 160 200 250
FLANGES - continued
Welding Flange
Stainless steel 304/1.4301 DN ... CF-F 16 40 63 100 160 200 250 Stainless steel 316L/1.4435 Stainless steel 316LN/1.4429 300 350 16 40 63 100 160 200 250 Part No. 213-021 213-022 213-023 213-024 213-025 213-026 213-027 213-028 213-029 213-121 213-122 213-123 213-124 213-125 213-126 213-127 A 7.5 13 17.5 20 22 24.5 24.5 28.5 28.5 7.5 13 17.5 20 22 24.5 24.5 B 3.3 7.5 8 9 10 12 12 15.8 15.8 3.3 7.5 8 9 10 12 12 C 17.2 39.5 66 104 155 205 256 306 356 17.2 39.5 66 104 155 205 256 D 18 40 70 108 159 205 256 306 356 18 40 70 108 159 205 256 E 1 1.5 2 2 2 2.5 3 3 3 1 1.5 2 2 2 2.5 3
Welding Flange, Rotatable

DN ... CF-R 16 40 63 100 160 200 250
Part No. 213-041 213-042 213-043 213-044 213-045 213-046 213-047 213-141 213-142 213-143 213-144 213-145 213-146 213-147
A 7.5 13 17.5 20 22 24.5 24.5 7.5 13 17.5 20 22 24.5 24.5
B 3.3 7.5 8 9 10 12 12 3.3 7.5 8 9 10 12 12
C 17.2 39.5 66 104 155 205 256 17.2 39.5 66 104 155 205 256
D 18 40 70 108 159 205 256 18 40 70 108 159 205 256
E 1 1.5 2 2 2 2.5 3 1 1.5 2 2 2 2.5 3
16 40 63 100 160 200 250
Vacuum Fittings
UHV CF Components
FLANGES - continued
Welding Flange with Tapped Holes
Blank Flange
DN ... CF-F 16 40 63 100 Part No. 213-031 213-032 213-033 213-034 A 7.5 13 17.5 20 B 3.3 7.5 8 9 C 17.2 39.5 66 104 D 18 40 70 108 E 1 1.5 2 2 6xM4 6xM6 8xM8 16x M8
Welding Flange for Gauges

DN ... CF-F Part No. A 40 213-092 24
B 17
C 38
69.5 1.75 48
10 4
Flange with Tube

DN ... CF-F Part No. 16 40 63 100 160 213-051 213-052 213-053 213-054 213-055
A 38 63 105 135 167
B 17.2 39.5 66 104 155
C 18 40 70 108 159
D 1 1.6 2 2 2
Flange with Tube, Rotatable

DN ... CF-R Part No. 16 40 63 100 160 213-061 213-062 213-063 213-064 213-065
A 38 63 105 135 167
B 17.2 39.5 66 104 155
C 18 40 70 108 159
D 1 1.6 2 2 2
FLANGES - continued
Reducing Flange CF-F/CF-F
Stainless steel 304/1.4301 DN ... CF-F Part No. 40/16 63/40 100/40 100/63 160/40 160/100 40/16 63/40 100/40 100/63 160/40 160/100 213-071 213-073 213-075 213-076 213-078 213-080 213-171 213-173 213-175 213-176 213-178 213-180 A 13 17.5 20 20 22 22 13 17.5 20 20 22 22 B 16 39 39 66 39 104 16 39 39 66 39 104 C 22 50 55 85 60 120 22 50 55 85 60 120 D 5.5 9 9 11 9 11 5.5 9 9 11 9 11 6xM4 6xM6 6xM6 8xM8 6xM6 16xM8 6xM4 6xM6 6xM6 8xM8 6xM6 16xM8
Vacuum Fittings
UHV CF Components
UHV CF Components
PIPE FITTINGS
Intermediate Piece
DN ... CF 16 40 63 100 160
Part No. 213-201 213-202 213-203 213-204 213-205
A 76 126 210 270 334
B 0.5 1 1 1 1.5
C 0.5 1 1 1 1.5
D 16 37 104 104 155
Intermediate Piece, Insulated

Flanges: Stainless steel 304/1.4301 Insulator: Ceramic Al2O3 Transition insulator/flange: FeNi Bakeout temperature: 350 C G = Surface leakage 20 kV at 10-4 mbar
DN ... CF 40 63
Part No. 213-212 213-213
A 70 90
B 1 1
C 1 1
D 25 53
E 30 45
F 66
G 65
34.5 44
Reducer CF/CF
DN ... CF 40/16 63/40 100/40 100/63 160/100
Part No. 213-221 213-223 213-225 213-226 213-230
A 45 75 75 95 105
B 1 1 1 1 1.5
C 1 1 1 1 1.5
D 16 37 37 66 104
Elbow 90
DN ... CF 16 40 63 100 160
Part No. 213-301 213-302 213-303 213-304 213-305
A 38 63 105 135 167
B 0.5 0.5 1 1 1.5
C 0.5 0.5 1 1 1.5
D 15 38 66 100 150
TEE
DN ... CF 16 40 63 100 160
Part No. 213-311 213-312 213-313 213-314 213-315
A 38 63 105 135 167
B 0.5 0.5 1 1 1.5
C 0.5 0.5 1 1 1.5
D 15 38 66 100 150
Cross
DN ... CF 16 40 63 100 160
Part No. 213-321 213-322 213-323 213-324 213-325
A 38 63 105 135 167
B 0.5 0.5 1 1 1.5
C 0.5 0.5 1 1 1.5
D 15 38 66 100 150
Double Cross Piece

Stainless steel 304/1.4301 3 rotatable flanges 3 fix flanges
DN ... CF 40 63 100 160
Part No. 213-332 213-333 213-334 213-335
A 63 105 135 167
B 0.5 1 1 1.5
C 0.5 1 1 1.5
D 38 66 100 150
Reducing Cross
Stainless steel 304/1.4301 2 x DN 16 CF-F 2 x DN 40 CF-F
DN ... CF 100
Part No. 213-342
A 135
B 1
C 1
D 67.5
E 106
F 84
Vacuum Fittings
UHV CF Components
UHV CF Components
BELLOWS / HOSE WITH FLANGES, COMPENSATOR
Compensator
Flanges: Stainless steel 304/1.4301 Bellows: Stainless steel 316Ti/1.4571
Max. internal pressure for DN 40: 4 bar
DN...CF-F Part No. A 40 63 100 213-346 120 213-347 130 213-348 127
B 10 20 30
C 0 0 0
D 62 93
E 154 192
F 10 13 13
G 10 12 12
36.8 100
Max. internal pressure for DN 63/100: 1.5 bar
Bellows
A = unstressed length Max. internal pressure DN 40: 4 bar
DN...CF Part No. A 16 40 63 100 160 213-351 76 213-352 126 213-353 139 213-354 142 213-355 250
B 1.5 2 2 2 3
C 1.5 2 2 2 3
D 15 40 62 92 154
E 22 55 80 116 187
F 16 66
G 21 37
36.8 7.5 102 28 153 16
Max. internal pressure DN 63 ... 160: 1.5 bar
Flexible Metal
DN...CF Part No. A 16 16 16 16 213-361 250 213-362 500 213-363 750 213-365 250 213-366 500
B 23 23 23 46 46
C 16 16 16 16
D 15 15 15 15
E 22.5 22.5 22.5 22.5
F 70 70 70 70
G 50 50 50 50
213-364 1000 23
F = radius for multiple bending G = radius for single bending Max. internal pressure: 5 bar
40 40 40
36.8 40.5 53 36.8 40.5 53 36.8 40.5 53
130 100 130 100 130 100
213-368 1000 46
UHV CF Components
TRANSITION PIECES
Adapter CF-F/ISO-KF
DN...CF-F 16/16 16/25 40/16 40/25 40/40 63/40 100/40
Part No. 213-251 213-252 213-254 213-255 213-256 213-259 213-262
A 35 35 30 30 50 35 50
B 16 16 16 26 37 41 41
Adapter CF-F/ISO-K
DN ... CF-F 63/63 100/100 160/160
Part No. 213-271 213-272 213-273
A 90 90 90
B 1 1 1.5
C 1 1 1.5
D 66 104 153
Vacuum Fittings
UHV CF Components
UHV CF Components
PROTECTIVE LIDS
Protective Lids
Polyethylene
DN ... CF 16 40 63 100 160 200 250
Part No. 213-441 213-442 213-443 213-444 213-445 213-446 213-447
A 36 71.5 115.5 154 205 263 315
B 34 69.5 113.5 152 202.5 254 306
C 9.5 17.5 22 24.5 27 36 36
Vacuum Control Catalog 2005 - D40
GLOBAL HEADQUARTERS: Two Technology Place, East Syracuse, NY 13057 USA Tel: +1.315.434.1100 Fax: +1.315.437.3803 E-mail: reachus@inficon.com UNITED STATES FRANCE GERMANY LIECHTENSTEIN SWITZERLAND UNITED KINGDOM CHINA JAPAN KOREA SINGAPORE TAIWAN
Visit our website for contact infor ma tion and sales o f f i c e s wo r l d w i d e. www.inficon.com Due to our continuing program of product improvements, specifications are subject to change without notice. tilc85e1-a 2005 INFICON

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Vacuum Control

Catalog 2005 - 2006

Contents Vacuum Control Catalog

Capacitance Diaphragm Gauge

Bayard-Alpert Pirani Gauge

High Pressure Hot Ionization Pirani Gauge

Bayard-Alpert Pirani Capacitance Diaphragm Gauge

Pirani Standard Gauge

Pirani Capacitance Diaphragm Gauge

Inverted Magnetron Pirani Gauge