Phase-Shifting Interferometry Techniques and Error Analysis

Part 9 Phase Shifting Interferometry
Classical Interferogram Classical Interferogram Analysis Analysis Phase Shifting Advantages Phase Shifting Advantages Phase Shifters Phase Shifters Algorithms Algorithms Removing Phase Ambiguities Removing Phase Ambiguities Error Sources Error Sources
Optics 505 - James C. Wyant Part 9 Page 1 of 36
Classical Analysis of Interferograms
Surface Error = (/2) (/S)
Classical Analysis
Measure positions of fringe centers. Deviations from straightness and equal spacing gives aberration.
Optics 505 - James C. Wyant Page 1
Computer Analysis of Interferograms Largest Problem Largest Problem

Getting interferogram data into Getting interferogram data into computer computer
Solutions Solutions
Graphics Tablet Graphics Tablet Scanner Scanner CCD Camera CCD Camera Phase-Shifting Interferometry Phase-Shifting Interferometry
Advantages of Phase-Shifting Interferometry

High measurement accuracy (>1/1000 High measurement accuracy (>1/1000 fringe, fringe following only 1/10 fringe, fringe following only 1/10 fringe) fringe) Rapid measurement Rapid measurement Good results with low contrast fringes Good results with low contrast fringes Results independent of intensity Results independent of intensity variations across pupil variations across pupil Phase obtained at fixed grid of points Phase obtained at fixed grid of points Easy to use with large solid-state Easy to use with large solid-state detector arrays detector arrays
Phase-Shifting Interferometry
TEST 1) MODULATE PHASE SOURCE REF INTERFEROGRAM 0 90 180 2) RECORD MIN 3 FRAMES 3) CALCULATE OPD
OPD = TAN-1 C - B 2 A-B
Optics 505 - James C. Wyant
Part 9 Page 5 of 36
Phase Shifting - Moving Mirror

Move /8 /2 Phase Shift PZT Pushing Mirror
Part 9 Page 6 of 36
Phase Shifting - Diffraction Grating
Diffraction Grating +1 Order
/2 Phase Shift
Move 1/4 Period
Part 9 Page 7 of 36
Phase Shifting - Bragg Cell

Bragg Cell fo fo+f fo Frequency f +1 Order 0 Order
Part 9 Page 8 of 36
Phase Shifting - Tilted Glass Plate
/2 Phase Shift
Part 9 Page 9 of 36
Phase Shifting - Rotating Half-Wave Plate
Circularly Polarized Light
Half-Wave Plate 45 Rotation
/2 Phase Shift
Part 9 Page 10 of 36
Four Step Method

I(x,y) = I0 + I' cos[(x,y)+ (t)]
I1(x,y) = I0 + I' cos [ (x,y)] I2(x,y) = I0 - I' sin [ (x,y) ] I3(x,y) = I0 - I' cos [ (x,y) ] I4(x,y) = I0 + I' sin [ (x,y) ]
Tan [(x,y)] =
(t) = 0 (t) = /2 (t) = (t) = 3/2
I4(x,y) -I2(x,y) I1(x,y) -I3(x,y)
Relationship between Phase and Height
I (x, y ) I 2 (x, y ) (x, y ) = Tan 1 4 I 1 ( x, y ) I 3 ( x, y ) (x, y ) Height Error(x, y ) = 4
Phase-Measurement Algorithms
Three Measurements I I = tan1 I3 I2 1 2 I I = tan1 I4 I2 1 3
[ [
] ]
Four Measurements
Hariharan Five Measurements
2(I2 I4 ) = tan1 2 I I I 3 5 1
Carr Equation [3(I2 I3 ) (I1 I4 )][(I2 I3 ) (I1 I4 )] = tan1 ( I2 + I3 ) ( I1 + I4 )
Phase-Measurement Algorithm for N Intensity Measurements
N Measurements
= -tan-1
Ii sin i i=1 Ii cos i i=1

N
i = 2N i for i = 1,..., N
Technique is also known as synchronous detection
Phase-Stepping Phase Measurement
/2 /4 A B C TIME D
DETECTED SIGNAL
MIRROR POSITION
A 0
B C D /2 3/2 2 PHASE SHIFT
Integrated-Bucket Phase Measurement
/2 /4 A B C D
DETECTED SIGNAL
MIRROR POSITION
0 TIME
A B C D /2 3/2 2 PHASE SHIFT
Integrating-Bucket and PhaseStepping Interferometry

Measured irradiance given by
Ii = 1
i +/2
i
= Io 1 + osinc cos[ + i ] 2
Integrating-Bucket = Phase-Stepping
Io {1 + o cos[ + i (t)]}d (t) /2
>@
=0
Phase Ambiguities
If we know sign of Sin and sign of Cosine the Arc Tangent is calculated modulo 2. Must correct for 2 ambiguities.
Typical Fringes For Spherical Surfaces
Fringes
Phase map
Phase Ambiguities
-Before Integration
2 Phase Steps
Phase Ambiguities
- After Integration
Phase Steps Removed
Removing Phase Ambiguities

Arctan Mod 2 (Mod 1 wave) Arctan Mod 2 (Mod 1 wave) Require adjacent pixels less than Require adjacent pixels less than difference difference (1/2 wave OPD) (1/2 wave OPD) Trace path Trace path When phase jumps by > When phase jumps by > Add or subtract N2 Add or subtract N2 Adjust so < Adjust so <
Error Sources
Incorrect phase shift between data frames Vibrations Detector non-linearity Stray reflections Quantization errors Frequency stability Intensity fluctuations
Three /2 Steps
Phase error due to 5% phase shift calibration error .
Peak
Valley Error +Radians /
0.0785398
0.04
Phase Error +Radians/
0.02
-0.02
-0.04
0 Phase measured
Four /2 Steps
Peak
0.0785302
0.04
0.02
-0.02
-0.04
0 Phase measured
Phase Error Compensating Techniques
Two data sets with /2 phase shift.

Calculate a phase for each set from algorithm, and then average phases. Average Numerator and Denominator, and then calculate phase.
Example of Algorithm Derivation

Averaging Technique
4-FRAME (offset = 0)
frames # 1,2,3,4
4-FRAME (offset = /2)

frames# 2,3,4,5
I4 - I2 N1 = I1 - I3 D1
5-FRAME
I4 - I2 N2 = I5 - I3 D2
tan =
N1 + N2 2(I4 - I2 ) = D1 + D 2 I1 + I5 - 2 I3
Schwider-Hariharan Five /2 Step Algorithm

Peak
0.0030859
0.0015
0.001 0.0005 0 -0.0005 -0.001 -0.0015
0 Phase measured
Error due to vibration
Probably the most serious impediment to wider use of PSI is its sensitivity to external vibrations. Vibrations cause incorrect phase shifts between data frames. Error depends upon frequency of vibration present as well as phase of vibration relative to the phase shifting.
Error due to vibration for Schwider-Hariharan algorithm

P
V phase error due to 0.02 zero to peak waves of vibration
0.25
0.2 0.15 0.1 0.05 0 0 0.2 Frequency
+in units of frame rate /
0.4
0.6
0.8
Best way to fix vibration problem
Reduce vibration Take data fast Take all frames at once Measure vibration and introduce vibration 180 degrees out of phase to cancel vibration
Error due to detector nonlinearity

Generally CCDs have extremely linear response to irradiance Sometimes electronics between detector and digitizing electronics introduce nonlinearity Detector nonlinearity not problem in well designed system. Schwider-Hariharan algorithm has no error due to 2nd order nonlinearity. Small error due to 3rd order.
Schwider-Hariharan
Phase error due to 1% detector of order 3.
Peak
Valley Error +Radians / 0.002
nonlinearity
0.00480903
0.001 0 -0.001 -0.002
0 Phase measured
Error due to Stray Reflections

Stray reflections in laser source interferometers introduce extraneous interference fringes. Stray reflections add to test beam to give a new beam of some amplitude and phase. Difference between this resulting phase and phase of test beam gives the phase error.
Error Stray Reflections

Phase Error
Measured Beam
Stray Beam
Test Beam
Correct Phase
Phase-Shifting Interferometer
TEST SAMPLE PZT PUSHING MIRROR BS IMAGING LENS DETECTOR ARRAY DIGITIZER PZT CONTROLLER
LASER
COMPUTER

Phase-Shifting Interferometry Techniques and Error Analysis

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Part 9 Phase Shifting Interferometry

Classical Analysis of Interferograms

Surface Error = (/2) (/S)

Optics 505 - James C. Wyant Page 1

Computer Analysis of Interferograms Largest Problem Largest Problem

Advantages of Phase-Shifting Interferometry

Optics 505 - James C. Wyant Page 2

OPD = TAN-1 C - B 2 A-B

Optics 505 - James C. Wyant

Phase Shifting - Moving Mirror

Optics 505 - James C. Wyant

Optics 505 - James C. Wyant Page 3

Phase Shifting - Diffraction Grating

Diffraction Grating +1 Order

Move 1/4 Period

Optics 505 - James C. Wyant

Phase Shifting - Bragg Cell

Optics 505 - James C. Wyant

Optics 505 - James C. Wyant Page 4

Phase Shifting - Tilted Glass Plate

Optics 505 - James C. Wyant

Phase Shifting - Rotating Half-Wave Plate

Circularly Polarized Light

Half-Wave Plate 45 Rotation

Optics 505 - James C. Wyant

Optics 505 - James C. Wyant Page 5

Four Step Method

(t) = 0 (t) = /2 (t) = (t) = 3/2

I4(x,y) -I2(x,y) I1(x,y) -I3(x,y)

Optics 505 - James C. Wyant

Relationship between Phase and Height

I (x, y ) I 2 (x, y ) (x, y ) = Tan 1 4 I 1 ( x, y ) I 3 ( x, y ) (x, y ) Height Error(x, y ) = 4

Optics 505 - James C. Wyant

Optics 505 - James C. Wyant Page 6

Hariharan Five Measurements

Carr Equation [3(I2 I3 ) (I1 I4 )][(I2 I3 ) (I1 I4 )] = tan1 ( I2 + I3 ) ( I1 + I4 )

Optics 505 - James C. Wyant

Phase-Measurement Algorithm for N Intensity Measurements

Ii sin i i=1 Ii cos i i=1

Optics 505 - James C. Wyant Page 7

Phase-Stepping Phase Measurement

B C D /2 3/2 2 PHASE SHIFT

Optics 505 - James C. Wyant

Integrated-Bucket Phase Measurement

A B C D /2 3/2 2 PHASE SHIFT

Optics 505 - James C. Wyant

Optics 505 - James C. Wyant Page 8

Integrating-Bucket and PhaseStepping Interferometry

Io {1 + o cos[ + i (t)]}d (t) /2

Optics 505 - James C. Wyant

Optics 505 - James C. Wyant Page 9

Typical Fringes For Spherical Surfaces

Optics 505 - James C. Wyant

Optics 505 - James C. Wyant

Optics 505 - James C. Wyant Page 10

Phase Steps Removed

Optics 505 - James C. Wyant

Removing Phase Ambiguities

Optics 505 - James C. Wyant Page 11

Optics 505 - James C. Wyant

Optics 505 - James C. Wyant

Optics 505 - James C. Wyant Page 12