Ultraprecision Machining in Optics Manufacturing

Dipl.-Ing. Martin Weinzierl Fraunhofer IPT, Aachen, Germany 4M Workshop / CAS Conference, Sinaia October 15th 2008
WZL/Fraunhofer IPT

Contents

Introduction Diamond turning of spherical and aspherical optics Diamond milling and fly-cutting Manufacturing of high precision freeforms with fast tool servos Summary

Source: Schneider GmbH WZL/Fraunhofer IPT Seite 1

Contents

Introduction Fundamentals Diamond turning of spherical and aspherical optics Diamond milling and fly-cutting Manufacturing of high precision freeforms with fast tool servos Summary

Source: Schneider GmbH WZL/Fraunhofer IPT Seite 2

Applications - High Quality Optics in Daily Use

Medical technology Intraocular lens
Source: HumanOptics AG

Display technology for home Source: Philips entertainment

LED Frontlight
Source: Audi

Color displays for mobile communication

Source: Casio

Automotive Head-up display

Source: Siemens VDO WZL/Fraunhofer IPT Seite 3

Process Chains for the Manufacture of Micro Structured Optics

Design based on reflective, refractive or diffractive principles Prototyping or mastering of stamps or large area microstructures Recombination of stamps to large area micro structured surfaces Galvanic copying of microstructures into nickel Replication into plastics

Design Mastering

Prototyping

Designiterations

Processiterations

Recombination

Galvanics Replication Precision optics

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WZL/Fraunhofer IPT

Mastering and Mould Making

Mechanical processes Lithographic processes Recombination Galvanics

- Precision milling and turning - Micro milling - Grinding - Ultraprecision machining - Polishing - (ECM, EDM)

- Laser lithography - Electron- and Ionbeam lithography - Nano-ImprintLithography - Screening

- Step & Repeat - Silicon moulding - UV-curing

- Galvanic Nickel - Electroless Nickel

WZL/Fraunhofer IPT

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Ultraprecision Machining
200 m

Processes Turning (FTS), Milling, Fly-Cutting CAD/CAM process chains for reduced geometrical complexity Increasing machine-tool accuracy Tools Poly- and single crystalline diamond Materials Non-iron metals, Nickel-coatings, polymers Precision < 0.1 m PV (depending on size and geometry) Feature sizes down to 0.5 m (V-grooves) Surface quality Optical, down to 2 nm Ra surface roughness

Micro pyramids

Lens array

Free form surface

WZL/Fraunhofer IPT Seite 6

Ultraprecision Machining with Single Crystalline Diamonds

Poly crystalline (coarse grain) Single crystal
Cutting edge Waviness
Seite 7

Poly crystalline (fine grain) Poly crystalline (fine grain)

5 m

5 m

s 4 m

s 50 nm

2,5 m 0,5 m

2,5 m 0,5 m

w ~ 2,06 m

5 m

s 2 m

w < 0,05 m

2,5 m

s : Cutting edge radius

0,5 m

Highest surface qualities with Ra < 5 nm

w ~ 0,78 m
WZL/Fraunhofer IPT

Base Materials for Diamond Milling and Planing

Metals Aluminium Brass Nickel silver Copper Nickel coated steel samples Plastics PMMA Polycarbonate PC Nylon Acetate Brittle materials Germanium Silicon
Common materials for mould making

Cu63 Cu 8,96 129 pc 17 49-87 HV 1,69 Zn37 8,45 95-110 19-20 65-136 6,2-6,6
S6 3

Cu62Ni18 Zn20 8,72 120-135 16-17 75-190 29

ick el

NI 8,9 199,5 13,3 100-190 6,9

ilv er

ALZn MgCu0,5 2,76 72 23 170 18-22

Ce rta l iu m

Density [g/cm3] Youngs modulus [GPa] Thermal expansion [10-6 K-1] Hardness [HB] Elect. conductivity [Ohmcm]

OH FC

El ec tro le ss n

Br as sM

Ni ck el s

WZL/Fraunhofer IPT

Al u

m in

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Ultraprecision Machining Processes

Diamond turning Fly-cutting

Fast-Tool turning

Diamond milling

WZL/Fraunhofer IPT

Seite 9

Contents

Introduction Diamond turning of spherical and aspherical optics Diamond milling and fly-cutting Manufacturing of high precision freeforms with fast tool servos Summary

Source: Schneider GmbH WZL/Fraunhofer IPT Seite 10

Historical Development
USA Continuous development in energy systems, computers, military, metrology, sensors Development of the laser Requirements Components with optical surfaces Complex geometries and highest form accuracy First Applications Laser mirrors Hard drives IR-Optics Further applications Aerostatic bearings Scanner optics Video heads Copy machines for the micro structuring of surfaces machining of smallest components
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1960

1970

Development of special machines with ultraprecision

1980

Development of series machines with correlating process technology

1990

Systems and processes

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Precitech Ultra Precision Tuning Lathe

US-American machine tool builder since 1986 Diamond tuning lathes since 1960 (Rank Pneumo) More than 1000 UPMachines installed Portfolio: Diamond turning Fast-, Slow-Tool Fly-Cutting, Grooving Milling Focus: Multi axes machines Diamond tuning Fly-Cutting, Grooving
WZL/Fraunhofer IPT Source: Precitec Seite 12

Single Crystalline Diamond Tools - Standards

Typical products: Turning of contact lenses Ruling or lenticular lenses Geometry: Radius Angle of rake Clearance
conic

Diamond: natural/synthetic Radii: defined, 5 m - 10 mm Negative and positive rake angles Controlled waviness Standard optional < 0,25 m < 0,05 m

r = 1 mm = 0 =12 = 100
Source: Contour Fine Tooling Seite 13

Opening angle
WZL/Fraunhofer IPT

Diamond Turning Process Characteristics

Kinematics: Transverse tool movement Rotation of the work piece Longitudinal turning and facing Continuous cut Rotational symmetric shapes Advantages: High geometrical variety Direct machining of optical surfaces (Ra < 10 nm) Realization of highest form accuracies (P-V < 250 nm) Machining of metals, crystalline materials and polymers
WZL/Fraunhofer IPT Seite 14

Longitudinal turning

Facing

Off-Axis Diamond Turning

Process characteristics: Work piece is mounted at an offset of the spindle centre Discontinuous cut Symmetric mounting of work piece (at least two) due to rotor balance Advantages: Machining of non-symmetric work piece surfaces No centre artefacts due to tool misalignment Turning of non-symmetric work piece surfaces without using fast- or slow-tools servos Disadvantages: Discontinuous cut High centripetal forces may cause deviations in the work piece surface Difficult alignment of the work pieces on the spindle

WZL/Fraunhofer IPT

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Challenges in Diamond Turning: Machining of Continuous Diffractive Structures

Diffractive structures: LED technology High performance optics Structure: 0.5 5 m Blazed geometry Aspheric base geometry Blazed diffractive structure
Step hight down to 0.5 m Contrast: Sharp corner geometry Smooth optical surface
15 m

vf

WZL/Fraunhofer IPT

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Contents

Introduction Diamond turning of spherical and aspherical optics Diamond milling and fly-cutting Manufacturing of high precision freeforms with fast tool servos Summary

Source: Schneider GmbH WZL/Fraunhofer IPT Seite 17

Ultraprecision Machine for Large Area Micro Structuring

Max. working area 1000 x 1000 x 200 mm Rotary table (C-axis) Hydrostatic bearings for the main feed axes (not realised in vertical direction) Two portal slides for either mass compensation or usage of two tools Linear direct drives and hydrostatic lead screws Equipped with standard NC controller

Source: Fraunhofer IPT WZL/Fraunhofer IPT Seite 18

Basic Machine Design

Vertical slides (z1- and z2-axis) Rotary table (c-axis) Table (y-axis) Hydrostatic lead screw Portal slides (x1- and x2-axis) Portal bridges (cast iron)

Bridge support (granite)

Base (granite)

WZL/Fraunhofer IPT

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Diamond Milling Process Characteristics

Diamond ball-end milling tools
Available tool radii: 0.2 mm - 1.5 mm

Vertical alignment of the tool

Tilted alignment of the tool

Source: ALMT, Fraunhofer IPT WZL/Fraunhofer IPT Seite 20

Diamond Milling Applications

Channel Structures Spherical cavities Aspherical lens arrays

Source: ALMT, Kaleido, Fraunhofer IPT WZL/Fraunhofer IPT Seite 21

Fly-Cutting Process Characteristics

Rotating diamond tool Air bearing spindle Linear feed movement of the spindle over the work piece surface Rotor revolutions between 2000- 3000 rpm Infeed up to 2 mm Feed rates between 5 100 mm/min Main process parameters: Spindle rotor revolution Feed rate Infeed Applications: Linear micro structuring Planing of surfaces Accuracy: 0.1 m / 100 mm Ra < 20 nm
WZL/Fraunhofer IPT

Rotational axis of the spindle rotor Feed direction x Single crystal diamond tool

aP aP = Infeed x= Structure pitch 1 mm

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Micro structure

Single Crystal Diamond Tools for Surface Structuring

Single crystal diamond Posalux tool shaft
50 m

Tool geometry Blade radius

Radius blade

Cutting edge radius < 50 nm Waviness < 250 nm

g b a a g

20 m V-shape tool Facet tool

200 m
Seite 23

: Clearance angle : Wedge angle

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Fly-Cutting Applications

100 mm

Master of an illumination panel Retroreflector element

10 mm 100 m

10 mm

Hot embossing tool

Master structure of a large surface reflector

0,5 mm

0,5 mm

2 mm WZL/Fraunhofer IPT

50 mm Seite 24

Planing Process Characteristics

Rotating tool Linear movement of the spindle across the work piece surface Rotating speeds between 1000 - 3000 rpm Infeed up to 1 mm Feed rates between 5 100 mm/min Process parameter: Spindle revolution Feed rate Infeed Applications: Planing of optical surfaces Machining of reference surfaces
WZL/Fraunhofer IPT

Fe ed

Schematic process description

di re ct io

Raw work piece surface

Infeed

Optical surface

Diamond tool

Rotational direction of the spindle

z x y Feed direction

In machine quality control of the surface (Fizeau interferometer)

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Planing - Applications
Mould master with optical reference surfaces

Detail: Mould insert with a plane optical surface Reference surfaces

Injection moulding tool with optical mould inserts

WZL/Fraunhofer IPT

Functional surface

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Challenges in Diamond Milling: Large Area Micro Structuring

Workpiece: Structured area: 640 x 640 mm2 Structure: 4-sided pyramids Process: Tool: single crystalline diamond Spindle rotation: 3000 rpm Tooth engagement frequency: 50 Hz Feed: 40 mm/min Machining time: 15 days Distance of cut: 546 m Investigation on tool wear Active compensation geometrical offsets
WZL/Fraunhofer IPT

10 mm
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Tool Wear and Characteristic Damages During Fly-Cutting

Cutting edge break out: Excessive load on the cutting edge : Mechanical reasons: e.g. planing at high infeeds Chemical reasons: Material (ironcontents!) Effect: crucial to structure quality Crater wear: Long term non-stop machining in combination with high infeeds Effect: drawbacks in surface quality
Crater wear: Cutting edge Break out:

WZL/Fraunhofer IPT

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Tool Referencing and Tool Wear Investigation

Quasi-continuous investigation of tool wear Optical inspection of the cutting edge High resolution CCDcamera (pixel size approx. 4 m) Hardware resolution of 0.4 m by use of 10-fold telecentric objective Interpolated resolution < 0.1 m by measurement software Automated tool exchange In-process offset compensation via NCcontrol
WZL/Fraunhofer IPT Seite 29

Tool tip

50 m
Name Point 1 X Y Z 0.00000 0.000018 0.000000

Contents

Introduction Diamond turning of spherical and aspherical optics Diamond milling and fly-cutting Manufacturing of high precision freeforms with fast tool servos Summary

Source: Schneider GmbH WZL/Fraunhofer IPT Seite 30

Fast Tool Servo

Design
Aerostatic CFR-Light-weight Voice-Coil Invar housing

Specification
Stroke: 10 mm Max. Force: 500 N Resolution: 2 nm (after interpolation) Stiffnes/pad: 90 N/m Max. Force: 100 N each direction Accelaration: amax=500 m/s2 Control loop: 16 kHz, 32 kHz

Fast Tool Servo

Source: FHG IPT Seite 31

WZL/Fraunhofer IPT

Fast-Tool-Servo Machining Composition of Free Form Surfaces

Splitting of function-based surface encoding

z* = f (r, ) =
rotationally-symmetric optical element

f (r)rs

f (r, )nrs
non-rotationally-symmetric optical element

WZL/Fraunhofer IPT

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Limitations of Fast-Tool-Servo Machining

Main limitation: Tool geometry Clearance angle limits the infeed angle Examples: Linear groove Clearance angle: 20 Length: 20 m Depth: 5 m Usable length: 5 m
vc
tool angle of structure workpiece FTS-dynamic 20 m Usable groove length 5 m Nonrotationally symmetric structure

vc

mm

angle of structure

micro lens array

Lens array Clearance angle: 20 Radius: 2,5 mm Max. depth: 130 m

D = 1,6 mm
WZL/Fraunhofer IPT Seite 33

R=

2,5

Fast-Tool-Servo Machining Applications

Examples: Phase modulation mirror to reduce the transversal coherency of lasers Facet mirror for beam shaping and beam guiding Optical free form surfaces E.g. mould inserts for glass moulding Materials: Copper (OFHC) Aluminium (6061, Certal)
Phase modulation mirror Facet mirror

Source: OEC AG, Fraunhofer IPT WZL/Fraunhofer IPT

Mould insert

Glass lens

00 m Application
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Challenges in Production
Design
Calculation of optical surface Analysis of machinability

Data conformity
Interface compatibility Fitting and referencing

FTS control system design

Online set point calculation (conformity) Controller of system

Metrology
Characterisation of surface without symmetry Data analysis

Shrinkage compensation (replication)

No symmetry for simplification Volumetric shrinkage approach
WZL/Fraunhofer IPT Seite 35

Contents

Introduction Diamond turning of spherical and aspherical optics Diamond milling and fly-cutting Manufacturing of high precision freeforms with fast tool servos Summary

Source : Schneider GmbH WZL/Fraunhofer IPT Seite 36

Summary
Optical mould and die making with diamond machining processes offers: Structure sizes of only a few microns with submicron resolution Optical surface quality Great variety of machinable materials Freeform Optics are the latest development in optics manufacturing and of high interest for beam shaping: Advertisement, illumination, compact optic design Enabling element for LED illumination Replication of optics requires an iterative optimization: Data conformity Machine & control optimization Deterministic characterisation New means for compensation
Source: Schneider GmbH WZL/Fraunhofer IPT Seite 37

Thank you for your attention !

For more information visit: www.opticsmanufacturing.net

WZL/Fraunhofer IPT

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