Flow Meters and Controllers

Analog Mass Flow Meters

Analog Mass Flow Controllers

Digital Mass Flow Controllers

Accessories

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Control Unit

Contents
Introduction Analog Mass Flow Meters
Elastomer Seal Metal Seal 10-6 10-7 10-3 to 10-5

Analog Mass Flow Controllers

Electromagnetic Control Valve, Elastomer Seal Electromagnetic Control Valve, Metal Seal High Temperature Control Valve Piezoelectric Control Valve, Metal Seal 10-8 10-9 10-10 10-11

Digital Mass Flow Controllers

Electromagnetic Control Valve, Elastomer Seal Electromagnetic Control Valve, Metal Seal Piezoelectric Control Valve, Metal Seal 10-12 to 10-13 10-14 10-15

Accessories
Gate Valve, Metal Seal Gas Filter Clamp Ring Adapter, Stainless Steel 10-16 to 10-17 10-17 10-18

Control Unit

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Introduction
Thermal mass flow meters (MFM) and mass flow controllers (MFC) are devices for measuring, positioning and controlling of process gases within the vacuum system. Mass flow meters and controllers are calibrated for each individual flow and a specific gas. Criteria for choosing a MFC for your individual needs are the following: Gas type Maximal flow Response time Accuracy Repeatability VACOM offers mass flow meters and mass flow controllers from the brand AERA by ADVANCED ENERGY. These stand out with special precision and reliability. Please find more detailed information about these devices on the following pages. We also introduce to you accessories such as gate valves, gas filters, as well as controlling devices for up to 4 MFC in this chapter.

Measuring Principle The measuring method used in ADVANCED ENERGY mass flow controllers and meters (MFC/MFM) is based on the principle of heat transmission within gases along a capillary. The gas flow is controlled via an installed control valve. The gas flowing through the MFC/MFM is divided into two flows: the main flow, which is lead through a bypass configuration, and a minor flow passing a thermal sensor. The ratio between main and bypass flow stays constant throughout the whole measuring process. Therefore the measurements taken with at the bypass flow are representative for the total flow through the MFC/MFM. The thermal sensor consists of a thin sensor tube made of stainless steel, around which two heating resistors are wrapped, which heat the tube. Both heating resistors are part of a Wheatstone bridge circuit. Without the gas flowing through, a thermal balance is established. But if the gas flows through, the first heating resistor is going to be cooled down more than the second one. This leads to a resistance change, which can be measured as an electrical signal within the bridge circuit. The temperature difference is mostly dependend on the amount of the transmitted gas and its specific heat capacity cp. If one knows the gas type and therefore the specific heat capacity cp, it is possible to calculate the gas flow (mass flow) on the basis of the temperature difference. But since the gas flow is usually given as a volume flow and not as a mass flow, it is essential to define the respective ambient conditions. The standard conditions (temperature 0 C, pressure 1013 mbar) are always valid for theMFC and MFM by ADVANCED ENERGY. The above described output signal of the bridge circuit will be compared with the nominal value. The resulting differential input controls a control valve, such that a constant mass flow close-by the nominal value is achieved.

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Gas Connection When ordering you can choose between the following two gas connection types: SwagelokTM Cajon VCRTM

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Introduction
Control Valves
ADVANCED ENERGY offers two different types of control valves: Electromagnetic control valve Available normally open or closed Rapid control response time (approx. 1 - 2 s) Longterm running Piezoelectric control valve Available normally open or closed Ultra fast response time (approx. 0.2 - 1 s) Very small dead volume, thus small scavenging time Ultra clean because of electropolished surfaces and metal seals

Sealing Materials ADVANCED ENERGY offers for its MFC/MFM two different sealing materials: Elastomer Seal Suitable at standard applications for most gases FPM (standard) or NBR Leakage rate 1 x 10-6 mbar l/s He Metal Seal For ultra clean applications and processes with corrosive gases Stainless steel (316L) Leakage rate 1 x 10-10 mbar l/s He Control Valves electromagnetic piezoelectric Elastomer seal (FPM, NBR) FC-7700, FC-D770 Metal seal (stainless steel, nickel coated, high temperature optional) FC-7800, FC785/86, FC-780CHT (optional surface electropolished) FC-900 (surface electropolished standard)

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Interfaces Analog flow controllers offer an output signal of 0 - 5 V DC and a current interface of 0 - 2.5 mA. Digital flow controllers possess a RS485, RS232 or profibus interface. Additionally, they offer a second analog output signal.

Fields of Application Mass flow meters and mass flow controllers are used among other things in the fabrication of gas compositions, CVD, PVD, optical glass coatings and during processes in the semiconductor industry (ion implantation, etching processes). Depending on the chemical properties of the process gases, elastomer or metal sealed mass flow controllers should be used.

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Introduction
Configuration of Electric Connections
Mass Flow Meters
FM-390, FM-391, FM-326J, FM-1000, FM-860, FM861 series

Analog Mass Flow Controllers

FC-7700, FC-7800, FC-780CHT, FC-900 series

Digital Mass Flow Controllers

FC-D980 series

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FC-D770 series

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Analog Mass Flow Meters

FM-390, FM-391, FM-326J Series, Elastomer Seal

Technical Data Sealing material Leakage rate Repeatability Pressure difference Max. pressure Temperature range Output signal Operating voltage Max. power consumption Mounting position

FPM or NBR 1 x 10-6 mbar l/s (He) < 0.2 % final control range value 2 - 20 kPa 1000 kPa (10 bar) 5 - 45 C 0 - 5 V DC +15 V 2 % (25 mA), -15 V 2 % (25 mA) 0.8 W optional

Type Maximal flow Accuracy

FM-390 10 sccm-5 slm 1% final control range value

FM-391 6 - 50 slm 1 % final control range value 2 % final control range value at 20 - 50 slm)

FM-362J 20 - 400 slm 2 % final control range value 1/4 VCRTM, 1/4 SwagelokTM 6 mm SwagelokTM 3/8 VCRTM, 3/8 SwagelokTM

Standard connections

1/4 VCRTM 1/4, 6 mm SwagelokTM 0.4 12.5 57 105 (1/4 VCRTM) 108 (1/4 SwagelokTM 6 mm SwagelokTM) 15 47 77 83 25 22 47 84 90 32 5 M4 0.5 15

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Weight (kg) A B

2.2 133.5 183.8 (1/4 VCRTM) 192.4 (1/4 SwagelokTM 6 mm SwagelokTM) 189.3 (3/8 VCRTM) 192.5 (3/8 SwagelokTM) 25.5 101.5 144.9 152 37.5

D E F G H I J

For electrical connection configurations see page 10-5

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Analog Mass Flow Meters

FM-1000, FM-860, FM861 Series, Metal Seal

Technical Data Sealing material Leakage rate Accuracy Repeatablility Pressure differences Max. pressure Temperature range Output signal Operating voltage Max. power consumption Mounting position Type Maximal flow Standard connections Weight (kg) A B C D E F G H I J
For electrical connection configurations see page 10-5

stainless steel (316L) 1 x 10-10 mbar l/s (He) 1 % 0.2 % final control range value < 2 kPa 1000 kPa (10 bar) 5 - 45 C 0 - 5 V (DC) +15 V 2 % (25 mA) -15 V 2 % (25 mA) 0.8 W optional FM-1000 1 - 5 sccm 1/ 8 VCRTM 1 16 76 121 22 46 140 147 32 15 24.5 M4 140 146 153 38 26 85.5 151 28 1.1 FM-860 10 sccm - 5 slm 1/4 VCRTM 1.3 19 87 FM-861 6 - 20 slm

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Analog Mass Flow Controllers

FC-7700 Series, Electromagnetic Control Valve, Elastomer Seal

Technical Data Valve Sealing material Leakage rate Control response time Repeatability Max. pressure Temperature range Max. power consumption Mounting position Optional

normally open (NO) or normally closed (NC) FPM or NBR 1 x 10-6 mbar x l/s (He) 2 s (FC-7720 3 s), 2 % of the final control range value to be adjusted 0.2 % final control range value 981 kPa (9.81 bar) 5 - 45 C 3.1 W optional warning signal display current control mode with surface treatment (e. g. electropolishing) for housing, bypass bolting and connections FC-7700 FC-7700C, FC-7700CD normally closed 2 - 100 1 % final control range value 0.5 % final control range value 49 - 275 0 - 5 V (DC) 0 - 2.5 mA (DC) +15 V 2 % (25 mA), -15 V 2 % (180 mA) 1/4 VCRTM, 1/4, 6 mm SwagelokTM 0.9 12.7 76
1)

Type Maximal flow Valve type Control range (%) Accuracy Linearity Pressure difference (kPa) Output signal Operating voltage Standard connections Weight (kg) A B C D E F G H I

FC-7710

FC-7710C, FC-7710CD normally closed

FC-7720

FC-7720C

10 sccm - 5 slm normally open

6 - 20 slm normally open

35 - 150 slm normally open 5 - 100 2 % final control range value 1 % final control range value 147 - 275 0 - 5 V (DC) +15 V 2 % (25 mA), -15 V 2 % (200 mA) 1/4, 3/8 VCRTM, 1/4, 3/8, 6 mm SwagelokTM 2.3 12.7 78.5 15 133.5
2)

normally closed

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69 - 275

15

22 66 127 5

18.3

3)

22 66 119 127 32 5

18.3 69 125 8) 4.75

25.5 101.5 151 152.6 37.5 16

69 4) 125 5) 4.75

For electrical connection configuations see 10-5 124 (1/4 VCRTM); 127 (1/4 SwagelokTM, 6 mm SwagelokTM) 2) 183.8 (1/4 VCRTM); 192.4 (1/4 SwagelokTM, 6 mm SwagelokTM); 189.3 (3/8 VCRTM); 192,5 (3/8 SwagelokTM)
1) 3) 4)

22 (for FC-7710C 66 (for FC-7710C) 5) 127 (for FC-7700C)

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Analog Mass Flow Controllers

FC-7800 Series, Electromagnetic Control Valve, Metal Seal

Technical Data Valve Sealing material Leakage rate Repeatability Control range Max. pressure Temperature range Output signal Max. power cConsumption Mounting position Optional

normally open (NO) or normally closed (NC) Stainless steel (316L) 1 x 10-10 mbar x l/s (He) 0.2 % final control range value 2 - 100 % 1000 kPa (10 bar) 5 - 45 C 0 - 5 V (DC) 3.1 W optional warning signal display current control mode with surface treatment (e. g. electropolishing) for housing, bypass bolting and connections FC-7800 FC-7800C, FC-7800CD normally closed 2 - 100 < 1 s, 2 % of nominal value 1 % final control range value 0.5 % final control range value 49 - 275 +15 V 2 % (25 mA), -15 V 2 % (180 mA) 1/4 VCRTM 1.2 12.7 76 124 18 69 115 122 32 3.5 26 6.5 11) 119 7) 125 9) 19 87 151 28 46 121 128 1.5 12.7 1) 82 2) 124 18.3
3) 5)

Type Maximal flow Valve type Control range (%) Control response time Accuracy Linearity Pressure difference (kPa) Operating voltage Standard connections Weight (kg) A B C D E F G H I

FC-7810 6 - 30 slm normally open

FC-7810C, FC-7810CD 6 - 50 slm normally closed

FC-7820

FC-7820C

10 sccm - 5 slm normally open

35 - 150 slm normally open 5 - 100 normally closed

< 3 s, 2 % nominal value 2 % final control range value 1 % final control range value 147 - 275 +15 V 2 % (25 mA), -15 V 2 % (200 mA) 1/4VCRTM, 3/8 VCRTM 2.8 15 138.7
4)

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69 - 275

138.7
4)

25.5 90 148 149.6 38 24.3

25.5 90 148 149.6

69 6) 125 8) 131 10)

For electrical connection configurations see page 10-5

1) 3) 2) 87 (for FC-7800C) 19 (for FC-7800C) 5) 28 (for FC-7800C) 151 (for FC-7810C) 4) 183.8 (1/4 VCRTM); 192.4 (3/8 VCRTM) 6) 8)

46 (for FC-7810C) 121 (for FC-7810C) 10) 128 (for FC-7810C)

7) 9)

115 (for FC-7800C) 122 (for FC-7800C) 11) 26 (for FC-7800C)

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Analog Mass Flow Controllers

FC-780CHT Series, High Temperature Version of FC-7800 Series

Technical Data Bakeout temperature Working temperature Control valve Sealing material Leakage rate Repeatability Control range Max. pressure Output signal Max. power consumption Mounting position Optional

up to 150 C up to 85 C magnetic, normally open (NO) stainless steel (316L) 1 x 10-10 mbar x l/s (He) 0.2 % final control range value 2 - 100 % 1000 kPa (10 bar) 0 - 5 V (DC) 3.1 W optional warning signal display current control mode with surface treatment (e. g. electropolishing) for housing, bypass bolting and connections

Type Maximal flow

For electrical connection configurations see page 10-5

FC-780CHT 10 sccm - 5 slm

FC-781CHT 6 slm - 20 slm

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Analog Mass Flow Controllers

FC-900 Series, Piezoelectric Control Valve, Metal Seal

Electropolished and supersonically cleaned surfaces Smallest surface and dead volume Small flow rate (1 sccm final control range value) Excellent particle vacancy (no particles after 126,000 cycles) All gas contacting parts made of stainless steel 316L electropolished Technical Data Sealing material Leakage rate Control response time Repeatability Max. pressure Temperature range Operating voltage Output signal Fitting position stainless steel (316L) 1 x 10-10 mbar l/s (He) 1 s, 2 % of the final control range value to be adjusted 0.2 % final control range value 1000 kPa (10 bar) 5 - 45 C +15 V DC 2 % (35 mA), -15 V DC 2 % (50 mA) 0-5V optional

Type Maximal flow Valve type Control response time Accuracy Linearity Control range (%) Pressure difference Max. power consumption (W) Standard connections Weight (kg) A B C D E F G H

FC-901 1 - 5 sccm

FC-980

FC-980C normally closed

FC-981 normally open

FC-981C normally closed

FC-982 normally open

FC-982C normally closed

10 sccm - 5 slm

6 - 20 slm

30 - 50 slm

normally open

1 s, 2 % of nominal value 1 % final control range value 0,5 % final control range value 2 -100 1 - 100 50 - 275 1.3 1/4 VCRTM 1.1 12.7 78.8 124 18.6 38.2 125 129 38 1 1.3 19 106 151 28 46 136.5 140.5 2 - 100 1 - 100 2 -100 100 - 275 2 % final control range value 1 % final control range value 5 -100 196 - 275 1.5 1/4 VCRTM, 3/8 VCRTM 2.3 15 138.7
1)

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25.5 90 138 142

1) 183.8 (1/4 VCRTM); 192.4 (3/8 VCRTM)

For electrical connection configurations see page 10-5

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Digital Mass Flow Controller

FC-D770 Series, Electromagnetic Control Valve, Elastomer Seal

Digital multi-gas, multi-range functionality Short response time (< 1.5 sec. for flow adjustment during nominal value changes) High reliability (zero point deviation < 0.5 % of value range over 1 year) Particularly suitable for industrial applications, easy process integration (mechanical dimensions and electrical connections) Opening and closing magnetic control valve Technical Data Valve Sealing material Leakage rate Maximal flow Control range Accuracy normally open (NO) or normally closed (NC) FPM 1 x 10-6 mbar x l/s (He) 10 - 5 slm, N2 equivalent 5 - 100 % of final control range value 1 % of nominal value in range of 25 - 100 % of final control range value, 0.25 % of final control range value in the range of 5 - 25 % of final control range value 1.5 sec. (above 10 % of final control range value) 0.5 % of final control range value 0.2 % of final control range value 0.5 % of final control range value/year 49 - 275 kPa 30 min. 5 - 50 C 9.81 bar Sub D plug (15-pin) unipolar 12 to 32 V DC, bipolar 6 bis 16 V DC 4 to 20 mA, 0 to 5 V DC, 0 to 10 V DC 4 to 20 mA, 0 to 5 V DC, 0 to 10 V DC 4.5 W EIA standard RS-485 or EIA standard RS-232 software for RS-485/232 support provided 1/4" SwagelokTM, 1/4" VCRTM 1 kg FC-D770 1/4 VCRTM 12.7 76.0 123.0 18.3 69.0 165.0 169.0 32.0 3.5
For electrical connection configurations see page 10-5

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Control response time Linearity Repeatability Zero drift Pressure difference Heating period Temperature range Max. pressure Electrical connection Operating voltage Nominal value input Actual value input Max. power consumption Interface Standard connections Weight Type Standard connections A B C D E F G H I

FC-D770C 1/4 SwagelokTM 12.7 76.0 112.7 18.3 69.0 165.0 169.0 32.0 3.5 1/4 VCRTM 12.7 76.0 123.0 18.3 69.0 165.0 169.0 32.0 3.5 1/4 SwagelokTM 12.7 76.0 112.7 18.3 69.0 165.0 169.0 32.0 3.5

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Digital Mass Flow Controller

FC-PB770C Series, Electromagnetic Control Valve, Elastomer Seal

Technical Data Profibus connection Valve Sealing material Leakage rate Repeatability Max. pressure Temperature range Heating period Operating voltage Max. power consumption Output signal Electrical connection Mounting position

existent normally open (NO) or normally closed (NC) FPM or NBR 1 x 10-6 mbar x l/s (He) 0.2 % final control range value 981 kPa (9.81 bar) 5 - 45 C < 30 min. 20...24...30 V DC to 31.5 V DC; max. 250 mA 3.75 W analog (0 - 5 V DC), profibus DP (via profibus DP master) analog (9-pin Sub D plug male), profibus DP (9-pin sub D plug female) optional

Type Maximal flow Valve type Control range Accuracy Control response time Linearity Pressure difference (kPa)

FC-PB770C 10 sccm - 5 slm

FC-PB771C 6 - 50 slm

FC-PB772 35 - 200 slm normally open

FC-PB772C normally closed

normally closed 2 - 100 % of final control range value 1 % of final control range value < 2 s, 2 % of nominal value 0.5 % of final control range value 49 - 275 69 - 275

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5 - 100 % of final control range value 2 % of final control range value < 3 s, 2 % of nominal value 1 % of final control range value 147 - 275 147 - 275

Standard connections

1/4 VCRTM, 1/4 SwagelokTM, 6 mm SwagelokTM 1.0 76 124 18.3 69 140 145.5 32

1/4 VCRTM, 1/4 SwagelokTM, 3/8 VCRTM, 3/8 SwagelokTM, 6 mm SwagelokTM 2.5 133.5 183.8 25.5 101.5 172 177.5 37.5

Weight (kg) B C D E F G H
For electrical connection configurations see page 10-5

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Digital Mass Flow Controllers

FC- PB780C Series, Electromagnetic Control Valve, Metal Seal

Technical Data Profibus connection Ventil Sealing material Leakage rate Repeatability Max. pressure Temperature interval Heating period Operating voltage Max. power consumption Output signal Electrical connection Mounting position Type Maximal flow Valve type

available normally open (NO) or normally closed (NC) metal 1 x 10-10 mbar x l/s (He) 0.2 % of final control range value 1000 kPa (10 bar) 5 - 45 C < 30 min. 20...24...30 V (DC) to 31.5 V DC, max. 250 mA 3.75 W analog (0 - 5 V DC), profibus DP (via profibus DP master) analog (9-pin Sub D plug male), profibus DP (9-pin Sub D plug female) optional FC-PB780C 10 sccm - 5 slm normally closed 2 - 100 % of final control range value 1 % of final control range value < 2 s, 2 % of nominal value 0.5 % of final control range value 49 - 275 1/4 1/4 SwagelokTM, 6 mm SwagelokTM 1.2 76 124 18.3 69 140 145.5 32 38 1.5 VCRTM, 69 - 275 FC-PB781C 5 slm - 30 slm

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Control range Accuracy Control response time Linearity Pressure difference (kPa) Standard connections Weight (kg) B C D E F G H
For electrical connection configurations see page 10-5

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Digital Mass Flow Controllers

FC- D980 Series, Piezoelectric Control Valve, Metal Seal

All gas contacting parts electropolished and ultra clean Multiple gas calibration: up to 8 gases (11 calibration points per gas) Technical Data Valve Sealing material Leakage rate Control responding time Repeatability Control range Max. pressure Temperature range Output signal Max. power consumption Mounting position Standard connection Nominal value Interface

normally open (NO) or normally closed (NC) stainless steel (316L) 1 x 10-10 mbar x l/s (He) < 1 s, 2 % of the final control range value to be adjusted 0.2 % of final control range value 2 - 100 % 1000 kPa (10 bar) 5 - 45 C 0 - 5 V DC 1.3 W optional 1/4 VCRTM up to 8 PID datasets RS-485 (RS-232 with converter module)

Typ

FC-D980

FC-D980C

FC-D981

FC-D981C

-1: 10 sccm - 30 sccm -2: 30 sccm - 100 sccm Maximal Flow*

-3: 100 sccm - 300 sccm -4: 300 sccm - 1 slm -5: 1 slm - 3 slm -6: 3 slm - 5 slm
normally open 1.0 12.7 78.8 124 18.6 38.2 125 129 38 20.3 normally closed

-7: 5 slm - 10 slm

-7.5: 10 slm - 20 slm -8: 10 slm - 30 slm

normally open 1.3 19 106 151 28 46 136.5 140.5
1)

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Valve Type Weight (kg) A B C D E F G H I

normally closed

* -0 bis -7.5 valid for multi gas calibration, -8 valid for single gas calibration 1) 34.5 input; 25.5 output For electrical connection configurations see page 10-5

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Accessories
Gate Valve, Metal Seal

For MFC types FC-7700CD, FC-7710CD, FC-PB770C, FC-PB771C Including mounting plate for MFC, pre-assembled Technical Data Bellow valve Leakage rate Pressure for pneumatic drive Max. pressure Temperature range Compressed air connection Materials Sealing material Gas connections Mounting position Weight

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pneumatical driven, normally open (NO) 3 x 10-10 mbar l/s (He) 4 - 6 bar 20 bar 0 - 40 C 1/8 NPT valve stainless steel (316L), bellow Ni-Co alloy (SP510) PCTFE (polychlortrifluorethylene) 1/4 VCRTM, 1/4 SwagelokTM optional 1 kg

Order code SOVO

Description gate valve, pneumatic, metal sealed

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Accessories
Gate Valve, Metal Seal

Low dead volume Allmetal seal outward, PCTFE seat Technical Data Bellow valve Leakage rate outwards via seat Pressure range Materials pneumatically operated or handwheel 1 x 10-9 mbar l/s vacuum up to 10 bar (150 psi) stainless steel 316L, electropolished, (Ra (Ave) 0.2 m) Connections Inlet Outlet 1/4 VCRTM compatible male Manual 1/4 VCR compatible female Pneumatic 1/4 SwagelokTM compatible compatible 6 mm SwagelokTM

Order Code MGAV-V14 MGAV-S14 MGAV-S06 PGAV-V14 PGAV-S14 PGAV-S06

Drive

Mounting length (mm) 70.6 77.1 77.1 70.6 77.1 77.1

1/4 VCRTM compatible male 1/4 SwagelokTM compatible 6 mm SwagelokTM compatible

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Accessories
Gas Filter

Technical Data Filter permeance Two-part PTFE bellow Housing Operating pressure Leakage rate (He leak test) Flow

< 1 ppb for particles 0,003 m 19.75 cm2 filter surface stainless steel 316L, electropolished max. 206 bar (3000 psig) at max. 121.1 C 1 x 10-9 mbar l/s up to 30 l/min

Order Code GF-915MFCP GF-915 1/4 VCRTM

Inlet compatible male 1/4 VCRTM compatible male

Outlet 9/16-18 UNF with O-ring 1/4 VCRTM compatible male

Length (mm) 79.0 84.1

Clamp Ring Adapter, Stainless Steel

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Order Code VCR14FSWA14 VCR14FSWA6

Description adapter, stainless steel 1/4 VCRTM compatible female to 1/4 SwagelokTM compatible adapter, stainless steel 1/4 VCRTM compatible female to 6 mm SwagelokTM compatible

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Control Device
FCU-4 Control Device for up to four MFC

Control device for up to 4 analog or digital MFC Well readable 4-digit LED and several status displays per channel Display and input of flow values in % of the measuring range or in sccm/slm Control via keypad or computer interface RS-232 Master/slave function 2 relays per channel for process and valve control Wide range power supply unit for global use Rack insertion 19, 2 HU Technical Data Operating voltage Sensor connections Sensor supply Anal. standard range (setpoint) Anal. input voltage range Digital MFC Setpoints Interface Weight Order Code FCU4-15V FCU4-24V FCU4-LXXC FCU4-LXXD 90..250 V AC, 50/ 60 Hz; type 25 W 15 V, max. 250 mA, + 24 V, max. 250 mA (optional) 0 ... 5 V (resolution 11 Bit) -0.5 .. 10 (resolution > 14 Bit) RS485 8 relays (je 24 V DC / 1 A) RS232 (optional USB adapter) approx. 3.2 kg Description control device for up to four MFC with 15 V power supply control device for up to four MFC with 24 V power supply connecting cable between FCU-4 and MFC (card edge): 3, 5, 7 or 10 m connecting cable between FCU-4 and MFC (sub D): 3, 5, 7 or 10 m

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Please specify the required length in meter in the order code by replacing the "XX" (e. g. XX = 03 means 3 m length).

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