Nikon Catalog

Industrial Equipment Catalog 2007 Spring
Industrial Microscopes
CNC Video Measuring Systems Measuring Microscopes Autocollimators
Stereoscopic Zoom Microscopes Digital Cameras for Microscopes
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Catalog List
Catalog Title CNC Video Measuring System NEXIV VMR Models Included NEXIV VMR-12072/Z120X/LU, VMR-10080/Z120X/LU, VMR6555/Z120X/LU, VMR-H3030/Z120X, VMR-3020/Z120X/LU, VMR-1515/Z120X/LU NEXIV VMR-3020 with Wafer Loader NWL860T NEXIV VMR-K3040ZC VMR-C4540 VMA-2520 MM-400, MM-800, E-MAX Series 6B, 6D ECLIPSE L300, L300D ECLIPSE L200, L200D ECLIPSE L200A ECLIPSE LV150/LV150A/LV100D/LV100DA LV Focusing Modules LV-IM/LV-IMA/LV-FM/LV-FMA Universal Epi-Fluorescence Illuminators EPI-U, LV-UEPI, L-EP150, IM-4/IM-3, CM-10, CM-20, CM-30 EPIPHOT TME300U, TME200 ECLIPSE MA100 NWL-860 Series, NWL-641 Series AZ100 SMZ1500 SMZ1000, SMZ800 SMZ645, SMZ660 SMZ-1 SMZ-2 SM-5 Camera: DS-Fi1, DS-5Mc, DS-2Mv, DS-2MBW, DS-2MBWc Controller: DS-L2, DS-U2 DXM1200C
Automated Wafer Measuring System CNC Video Measuring System NEXIV VMR-K3040ZC Wafer Carrier Measuring System NEXIV VMR-C4540 CNC Video Measuring System iNEXIV VMA-2520 Measuring Microscopes MM-400/800 Series Autocollimators FPD/LSI Inspection Microscopes ECLIPSE L300/L300D IC Inspection Microscopes ECLIPSE L200/L200D Automated IC Inspection Microscope ECLIPSE L200A Industrial Microscopes ECLIPSE LV150/LV150A/LV100D/LV100DA LV Focusing Modules LV-IM/LV-IMA/LV-FM/LV-FMA Universal Epi-Fluorescence Illuminators Microscope Components for Reflected Light Applications Inverted Metallurgical Microscopes EPIPHOT TME300U/TME200 Compact Inverted Microscope ECLIPSE MA100 IC Inspection Wafer Loaders NWL-860/641 Multi-purpose Zoom Microscope MULTIZOOM AZ100 Stereoscopic Zoom Microscope SMZ1500 Stereoscopic Zoom Microscope SMZ1000/SMZ800 Stereoscopic Zoom Microscopes SMZ645/SMZ660 Stereoscopic Zoom Microscope SMZ-1 Stereoscopic Zoom Microscope SMZ-2 Stereoscopic Zoom Microscope SM-5 Digital Camera System for Microscopes Digital Sight Series
High-definition Digital Camera for Microscopes DXM1200C To request a catalog, please visit our website. http://www.nikon-instruments.jp/eng/
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CNC Video Measuring System
CNC Video Measuring System NEXIV VMR-H3030/Z120X...................4 CNC Video Measuring System NEXIV VMR-12072/Z120X/LU..............4 CNC Video Measuring System NEXIV VMR-10080/Z120X/LU..............5 CNC Video Measuring System NEXIV VMR-6555/Z120X/LU................5 CNC Video Measuring System NEXIV VMR-3020/Z120X/LU................6 CNC Video Measuring System NEXIV VMR-1515/Z120X/LU................6 Application Software for VMR Series ...................................................7 Automated Wafer Measuring SystemNEXIV VMR-3020 with Wafer Loader NWL860T............................................................................7 CNC Video Measuring System NEXIV VMR-K3040ZC ..........................8 Wafer Carrier Measuring System NEXIV VMR-C4540 ..........................8 CNC Video Measuring System iNEXIV VMA-2520................................9 Application Software for VMA-2520 .....................................................9
Profile Projectors
Profile Projectors V-24B/V20B/V-12B Series .....................................10 Accessories for Profile Projectors ......................................................10
Measuring Microscopes
Measuring Microscopes MM-400Basic Type .................................11 Measuring Microscopes MM-400/8003-Axis Type.........................11 Measuring Microscopes MM-400/800Motorized Type ...................12 Measuring Microscopes MM-400/800Universal Type ....................12 Accessories for Measuring Microscopes............................................13 Common Accessories for Measuring Microscopes/ Profile Projectors..........................................................................14 Data Processing Software E-Max Series ............................................15 Data Processor DP-E1........................................................................15
Autocollimators, Other Equipment and Accessories

Autocollimators and Accessories .......................................................16 Optical Flat/Optical Parallel.................................................................17 DIGIMICRO Heads/Head Accessories.................................................18
LSI Inspection Microscope ECLIPSE L300.........................................19 FPD Inspection Microscope ECLIPSE L300D .....................................19 Automated IC Inspection Microscope ECLIPSE L200A ......................20 IC Inspection Microscopes ECLIPSE L200/L200D .............................20 Industrial Microscope ECLIPSE LV150/LV150A .................................21 Industrial Microscope ECLIPSE LV100DA..........................................22 Industrial Microscope ECLIPSE LV100D ............................................22 Polarizing Microscope ECLIPSE LV100 POL/50i POL ........................23 Focusing Units IM-4/IM-3 ..................................................................23 Universal Illuminators/Reflected Light Illuminators............................24 Filters .................................................................................................24 Accessories for ECLIPSE/OPTIPHOT Series .......................................25 Focusing Modules LV-IMA/LV-IM/LV-FMA/LV-FM.............................26 Interferometry Equipment TI/DI .........................................................27 Compact Reflected MicroscopeCM Series......................................28 Objective Lenses ................................................................................29 Eyepiece Lenses .................................................................................30 Eyepiece/Objective-Related Accessories.............................................30 Inverted Metallurgical Microscopes EPIPHOT TME300U/TME200 ........................................................31 Compact Inverted Microscope ECLIPSE MA100 ................................31 IC Inspection Wafer Loaders NWL-860 Series ...................................32 IC Inspection Wafer Loaders NWL641 Series.....................................32 Multi-purpose Zoom Microscope MULTIZOOM AZ100 ......................33
Stereoscopic Zoom Microscopes

Stereoscopic Zoom Microscope SMZ1500 ........................................34 Stereoscopic Zoom Microscope SMZ1000 ........................................34 Stereoscopic Zoom Microscope SMZ800 ..........................................35 Stereoscopic Zoom Microscopes SMZ645/SMZ660 ..........................35 Stereoscopic Zoom Microscope SMZ-1 ESD .....................................36 Stereoscopic Zoom Microscope SMZ-2 .............................................36 Stereoscopic Zoom Microscope SM-5 ...............................................37 Accessories for Stereoscopic Microscopes........................................38
Digital Cameras for Microscopes/Image-related Products

Digital Cameras for MicroscopesDigital Sight Series .....................41 High-definition Digital Camera for MicroscopesDXM1200C...........41 Film-type Photomicrographic System H-III ........................................42 CCTV System Diagram .......................................................................43
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Ultrahigh-precision Type CNC Video Measuring System NEXIV VMR-H3030/H3030 Z120X
NEXIV VMR-H3030
With ultrahigh precision and versatility, this model can serve as the master instrument in your laboratory. Ideal for high-precision dies and molds. Maximum measuring range: 300 x 300mm
Magnification and field of view (mm)
Type 1 Optical magnification Total magnification Field of view Type 2 Optical magnification Total magnification Field of view Type 3 Optical magnification Total magnification Field of view 0.5 x 20 x 9.33 x 7 1x 40 x 4.67 x 3.5 2x 80 x 2.33 x 1.75 1x 40 x 4.67 x 3.5 2x 80 x 2.33 x 1.75 2x 80 x 2.33 x 1.75 4x 7.5 x 160 x 300 x 1.165 x 0.875 0.622 x 0.467
4x 8x 15 x 160 x 320 x 600 x 1.165 x 0.875 0.582 x 0.437 0.311 x 0.233
4x 8x 16 x 30 x 160 x 320 x 640 x 1200 x 1.165 x 0.875 0.582 x 0.437 0.291 x 0.218 0.155 x 0.117
Specifications
Model Stroke (X x Y x Z) With max. magnification module (high mag. lens) With max. magnification module (low mag. lens) Minimum readout Maximum workpiece weight Measuring accuracy U1X, U1Y U2XY Z-axis (L: Length in mm < W.D.) Camera Working distance Magnification/Field of view Auto focus Illuminator Power source Power consumption Dimensions (W x D x H) & weight Main unit only Main unit & table Controller Footprint (W x D) VMR-H3030 Z120X 300 x 300 x 150mm 250 x 300 x 150mm VMR-H3030
* Total magnifications listed above represent those on the monitor screen when a 19" TFT monitor is set to the SXGA (1280 x 1024 pixels) mode.
NEXIV VMR-H3030 Z120X

With an ultrahigh-precision stage and maximum magnification module, this model can measure fine workpieces with ultrahigh accuracy (e.g., critical dimensions on patterned masks and bump heights). Maximum measuring range: 300 x 300mm
Optical magnification Total magnification Field of view Optical magnification Total magnification Field of view 1x 40 x 4.67 x 3.5 16 x 640 x 0.291 x 0.218 2x 80 x 2.33 x 1.75 32 x 1280 x 0.146 x 0.109 4x 160 x 1.165 x 0.875 64 x 2560 x 0.073 x 0.055 7.5 x 300 x 0.622 x 0.467 120 x 4800 x 0.039 x 0.029
0.01m 30kg 0.6+2L/1000m (with a workpiece max. 10kg) 0.9+3L/1000m (with a workpiece max. 10kg) 0.9+L/150m B&W 1/3 in. CCD (progressive scan), color 1/3 in. CCD (option) High mag. objective lens: 9.8mm 50mm Low mag. objective lens: 32mm See tables at left TTL laser AF and Vision AF Episcopic, diascopic (with high mag. Diascopic, episcopic, 8-segment LED head only), darkfield illuminator ring light CYN-E1 (inner ring/outer ring) AC 100V 10%, 50/60 Hz Max. 7A 1000 x 1230 x 1900mm, approx. 450kg 690 x 730 x 1725mm, approx. 570kg 250 x 550 x 500mm, approx. 31kg 2400 x 1400mm
* Total magnifications listed above represent those on the monitor screen when a 19" TFT monitor is set to the SXGA (1280 x 1024 pixels) mode. * 1-7.5x with low magnification objective lens, 16-120x with high magnification objective lens.
For details, see the corresponding catalog. (Catalog list on page 2)
CNC Video Measuring System NEXIV VMR-12072/12072 Z120X/12070 LU NEXIV VMR-12072

Ultralong 1200 x 720mm stage stroke exhibits full strength in the high-precision measurement of large substrates and LCD parts. Maximum measuring range: 1200 x 720mm
4x 8x 15 x 160 x 320 x 600 x 1.165 x 0.875 0.582 x 0.437 0.311 x 0.233
4x 8x 16 x 30 x 160 x 320 x 640 x 1200 x 1.165 x 0.875 0.582 x 0.437 0.291 x 0.218 0.155 x 0.117
Specifications
Model Stroke (XxYxZ) With max. magnification module (high mag. lens) With max. magnification module (low mag. lens) Minimum readout Maximum workpiece weight Measuring accuracy U1X, U1Y U2XY Z-axis (L: Length in mm < W.D.) Camera Working distance Magnification vs field of view Auto focus Illumination VMR-12072 Z120X 1200 x 720 x 150mm 1150 x 720 x 150mm 0.1m 40kg 2.2 + 4L/1000m (workpiece max. 40kg) 3.2 + 4L/1000m (workpiece max. 40kg) 1.5 + L/150m B&W 1/3-in. CCD (progressive scan) High mag. objective lens: 9.8mm Low mag. objective lens: 32mm See tables at left TTL Laser AF and Vision AF Episcopic, diascopic (with high mag. head only), darkfield illuminator AC100V10%, 50/60 Hz Max. 15A VMR-12072 VMR-12072 LU
NEXIV VMR-12072 Z120X

Ultralong 1200 x 720mm stage stroke and a 120x optical zoom permit measurement of line widths of large FPDs (flat-panel displays) and related devices. Maximum measuring range: 1200 x 720mm
B&W 1/3-in. CCD (progressive scan), Color 1/3-in. CCD (option) 50mm Depends on objective lens Depends on objective lens Vision AF Diascopic, episcopic, 8-segment LED Diascopic, episcopic ring illumination (inner ring/outer ring) (brightfield or darkfield) Max. 13A
* Total magnifications listed above represent those on the monitor screen when a 19" TFT monitor is set to the SXGA (1280 x 1024 pixels) mode. * 1-7.5x with low-magnification objective lens, 16-120x with high-magnification objective lens.
NEXIV VMR-12072 LU
With universal illuminator and motorized nosepiece, the LU model supports brightfield, darkfield, DIC and simple polarizing applications, and is perfect for measurement and observation of large FPDs and related devices.
Power source Power consumption Dimensions (W x D x H) & weight Main unit & table 1734 x 2200 x 1750mm, approx. 1600kg Controller 250 x 550 x 500mm, approx. 31kg Footprint (W x D) 2800 x 2500mm
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Long 1000 x 800mm stage stroke enables maximum performance in the measurement of large-size LCDs and other workpieces. Maximum measuring range: 1000 x 800mm
4x 8x 15 x 160 x 320 x 600 x 1.165 x 0.875 0.582 x 0.437 0.311 x 0.233
4x 8x 16 x 30 x 160 x 320 x 640 x 1200 x 1.165 x 0.875 0.582 x 0.437 0.291 x 0.218 0.155 x 0.117
Specifications
Model Stroke (X x Y x Z) With max. magnification module (high mag. lens) With max. magnification module (low mag. lens) Minimum readout Maximum workpiece weight Measuring accuracy U1X, U1Y U2XY Z-axis (L: Length in mm < W.D.) Camera Working distance Magnification/Field of view Auto focus Illuminator Power source Power consumption Dimensions (W x D x H) & weight Main unit only Main unit & table Controller Footprint (W x D) VMR-10080 Z120X 1000 x 800 x 150mm 950 x 800 x 150mm VMR-10080 VMR-10080 LU

This model achieves ultrahigh magnification measurements with a long 1000 x 800mm stage stroke, making it ideal for measuring minute linewidths of largesize display panels. Maximum measuring range: 1000 x 800mm
* Total magnifications listed above represent those on the monitor screen when a 19" TFT monitor is set to the SXGA (1280 x 1024 pixels) mode. * 1-7.5x with low-magnification objective lens, 16-120x with high-magnification objective lens.
0.1m 40kg 2+4L/1000m (with a workpiece max. 40kg) 3+4L/1000m (with a workpiece max. 40kg) 1.5+L/150m B&W 1/3-in. CCD (progressive scan) B&W 1/3-in. CCD (progressive scan), Color 1/3-in. CCD (option) High mag. objective lens: 9.8mm 50mm Depends on objective lens Low mag. objective lens: 32mm See tables at left Depends on objective lens TTL laser AF and Vision AF Vision AF Episcopic, diascopic (with high mag. Diascopic, episcopic, 8-segment LED Diascopic, episcopic head only), darkfield illuminator ring light CYN-E1 (inner ring/outer ring) (brightfield or darkfield) AC 100V 10%, 50/60 Hz Max. 15A Max. 13A 1530 x 2200 x 1750mm, approx. 1500kg 250 x 550 x 500mm, approx. 31kg 2800 x 2500mm
NEXIV VMR-10080 LU
With universal illuminator and motorized nosepiece, the LU model supports brightfield, darkfield, DIC and simple polarizing applications, and is perfect for measurement and observation of large displays.
For details, see the corresponding catalog. (Catalog list on page 2) It is possible to attach an optical unit for metallurgical microscopes (except maximum magnification module type).

This model enables high-speed measurement with a large stroke stage. Optimal for measurements of PCB patterns and external dimensions of a display panel. You can save on inspection costs by measuring a number of small parts at one time after placing them together on the stage. Maximum measuring range: 650 x 550mm
4x 8x 15 x 160 x 320 x 600 x 1.165 x 0.875 0.582 x 0.437 0.311 x 0.233
4x 8x 16 x 30 x 160 x 320 x 640 x 1200 x 1.165 x 0.875 0.582 x 0.437 0.291 x 0.218 0.155 x 0.117
Specifications

Amazing 120x zoom combined with a big stage enables ultrahigh magnification measurements on big workpieces. Ideal for measuring high-density PCBs and their masks. Maximum measuring range: 650 x 550mm
0.1m 30kg 1.5+2.5L/1000m (with a workpiece max. 30kg) 2.5+2.5L/1000m (with a workpiece max. 30kg) 1.5+L/150m B&W 1/3-in. CCD (progressive scan) B&W 1/3-in. CCD (progressive scan), Color 1/3-in. CCD (option) High mag. objective lens: 9.8mm 50mm Depends on objective lens Low mag. objective lens: 32mm See tables at left Depends on objective lens TTL laser AF and Vision AF Vision AF Episcopic, diascopic (with high mag. Diascopic, episcopic, 8-segment LED Diascopic, episcopic head only), darkfield illuminator ring light CYN-E1 (inner ring/outer ring) (brightfield or darkfield) AC 100V 10%, 50/60 Hz Max. 15A Max. 13A 1220 x 1680 x 1750mm, approx. 600kg 250 x 550 x 500mm, approx. 31kg 2400 x 2000mm
NEXIV VMR-6555 LU
With universal illuminator and motorized nosepiece, the LU model supports brightfield, darkfield, DIC and simple polarizing applications, and is best suited for measurement and observation of display panels.
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CNC Video Measuring System NEXIV VMR-3020/3020 Z120X/3020 LU
NEXIV VMR-3020
The standard model of the NEXIV VMR series. It handles a variety of measurement tasks, including those for mechanical parts, molded parts, stamped parts and various other workpieces. Maximum measuring range: 300 x 200mm
4x 8x 15 x 160 x 320 x 600 x 1.165 x 0.875 0.582 x 0.437 0.311 x 0.233
4x 8x 16 x 30 x 160 x 320 x 640 x 1200 x 1.165 x 0.875 0.582 x 0.437 0.291 x 0.218 0.155 x 0.117
Specifications

Its maximum magnification module achieves measurements of fine workpieces. Perfect for measurements of topical MEMS parts, high-density PCBs and semiconductor packages. Maximum measuring range: 300x 200mm
0.1m 20kg 1.5+4L/1000m (with a workpiece max. 5kg) 2.5+4L/1000m (with a workpiece max. 5kg) 1.5+L/150m B&W 1/3 in. CCD (progressive scan), color 1/3 in. CCD (option) High mag. objective lens: 9.8mm 50mm Low mag. objective lens: 32mm See tables at left TTL laser AF and Vision AF Episcopic, diascopic (with high mag. Diascopic, episcopic, 8-segment LED head only), darkfield illuminator ring light CYN-E1 (inner ring/outer ring) AC 100V 10%, 50/60 Hz Max. 13A Max. 11A 625 x 728 x 1195mm, approx. 200kg 690 x 730 x 1725mm, approx. 240kg 250 x 7550 x 7500mm, approx. 31kg 2100 x 71100mm
Depends on objective lens Depends on objective lens Vision AF Diascopic, episcopic (brightfield or darkfield)
NEXIV VMR-3020 LU
With universal illuminator and motorized nosepiece, the LU model supports brightfield, darkfield, DIC and simple polarizing applications, and is perfect for measurement and observation of small LCDs, organic EL panels, and ICs.

This affordably priced, small stroke NEXIV VMR series model is widely used for measuring small electronic parts, molded and stamped parts. Maximum measuring range: 150 x 150mm
4x 8x 15 x 160 x 320 x 600 x 1.165 x 0.875 0.582 x 0.437 0.311 x 0.233
4x 8x 16 x 30 x 160 x 320 x 640 x 1200 x 1.165 x 0.875 0.582 x 0.437 0.291 x 0.218 0.155 x 0.117
Specifications
Model Stroke (X x Y x Z) With max. magnification module (high mag. lens) With max. magnification module (low mag. lens) Minimum readout Maximum workpiece weight Measuring accuracy U1X, U1Y U2XY Z-axis (L: Length in mm < W.D.) Camera Working distance Magnification/Field of view Auto focus Illuminator Power source Power consumption Dimensions (W x D x H) & weight Main unit only Main unit & table Controller Footprint (W x D) VMR-1515 Z120X 150 x 150 x 150mm 100 x 150 x 150mm 0.1m 20kg 1.5 + 4L/1000m (workpiece max. 5kg) 2.5 + 4L/1000m (workpiece max. 5kg) 11.5 + L/150m B&W 1/3-in. CCD (progressive scan) High mag. objective lens: 9.8mm Low mag. objective lens: 32mm See tables at left TTL Laser AF and Vision AF Episcopic, diascopic (with high mag. head only), darkfield illuminator AC100V10%, 50/60Hz Max. 15A 512 x 703 x 1200mm, approx. 180kg 690 x 730 x 1725mm, approx. 220kg 250 x 550 x 500mm, approx. 31kg 2100 x 1100mm VMR-1515 VMR-1515 LU

With 120x optical zoom, this model is perfect for observation and measurement of small high-density PCBs, precision dies and molds, and MEMS parts. Maximum measuring range: 150 x 150mm
B&W 1/3-in. CCD (progressive scan), Color 1/3-in. CCD (option) 50mm Depends on objective lens Depends on objective lens Vision AF Diascopic, episcopic, 8-segment LED Diascopic, episcopic ring illumination (inner ring/outer ring) (brightfield or darkfield) Max. 13A
NEXIV VMR-1515 LU
With universal illuminator and motorized nosepiece, the LU model supports brightfield, darkfield, DIC and simple polarizing applications, and is perfect for measurement and observation of small LCDs, organic EL panels, and ICs.
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Application Software for VMR Series Report generating program: VMR Report Generator
This software is fully compatible with the NEXIV VMR AutoMeasure software and enables the quick generation of inspection results sheets in various report forms including user-designed forms. Users can even customize the program for easier use by making macro scripts.
Operating environment: Windows Excel2000/XP Memory space: 64MB or more An example of macro scripts written by users: In order to input manually the data measured by other instruments and compile them into one complete report, the macro automatically makes cell blanks and displays them in sky blue and a message prompts manual inputs.
3D surface analysis program: NEXIV Bird's-Eye View

Running on OriginTM, this program allows data obtained using the Scan Measure feature provided with TTL Laser AF to be plotted in a 3-dimensional format. After that, 3dimensional shape analysis and 2-dimensional crosssection shape analysis can be performed.
Note: OriginTM is software developed by OriginLab Corporation.
Gear evaluation software

This software provides evaluations on various parameters of the measured workpiece, including pitch deviations, tooth space runout, base tangent length, and dimension overpin, based on industrial standards.
Surface analysis software: D-SURF

This software not only draws 3D graphics of a minuscule workpiece surface measured by the NEXIV system, but it also provides various analyses such as the calculation of various evaluation values.
Automated Wafer Measuring SystemNEXIV VMR-3020 with Wafer Loader NWL860T

With a wafer loading/unloading system, this system measures the whole contents of a wafer carrier automatically. Compatible wafer size: 200mm/150mm
Specifications
VMR-3020+NWL860T Compatible wafer size Standard wafer carriers 150mm/200mm (SEMI/JEIDA compliant, silicon) Entegris 150mm: PA152-60MB, 200mm: 192-80M 200mm: 192-80M 8 minutes + NEXIVs measurement time
Processing speed per carrier (Continuous transfer of 25 wafers) Orientation flat/notch detection Wafer transfer/chuck Main unit dimensions (excluding PC rack) Footprint (excluding areas for operation and maintenance) Main unit weight Requirements Electricity Vacuum
Non-contact, transmitted-type sensor Vacuum chuck, mechanical transfer 1700 x 960 x 1735mm
2750 x 1100mm
Approx. 370kg AC100V10%, 50/60Hz, Max. 11.5A 800hPa(600mmHg), 10NI/min
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CNC Video Measuring System NEXIV VMR-K3040ZC
NEXIV VMR-K3040ZC
Nikons original confocal optical system works brilliantly to measure the thickness of resists and similar films by detecting their top and bottom surfaces. This enables the fastest and most precise three-dimensional evaluation ever of cutting-edge packages. A multi-detect head incorporating an LFC optical system and two-dimensional zoom optics allows both 2D and 3D measurements in the same field of view.
Specifications
Objectives Magnification W.D. Confocal optics (Area height measurement) Maximum scan height Field of view Measuring accuracy (2 ) Scanning time Camera Brightfield optics (2D measurement) Magnification changing method Field of view Illumination Auto focus Main body Stroke (X, Y, Z) Guaranteed loading capacity Measuring accuracy U1X/Y U2XY Z-axis (L: Length in mm < W.D.) Main unit/operation rack weight Power source/power consumption Operating condition Acquired standard 1.5x 24mm 1mm 8 x 6mm 0.6m 3x 24mm 1mm 4 x 3mm 0.35m 1.5 sec./FOV 2 million pixels (1600 x 1200) 7.5x 5mm 1mm 1.6 x 1.2mm 0.25m
VMR-K3040ZC
8 x 6mm to 0.53 x 0.4mm
Motorized 5-stage zoom (magnification ratio 15x) 4 x 3mm 1.6 x 1.2mm to 0.27 x 0.2mm to 0.11 x 0.08mm Diascopic, Coaxial epi-fl, Oblique LED TTL Laser AF 300 x 400 x 150 mm 20 kg (including workpiece holder) 1.5 + 4L/1000m 2.5 + 4L/1000m 1.5 + 4/1000m Approx. 900 kg / 250 kg (standard set) AC 100 to 240 V 10% 50/60 Hz / 13 A to 6.5 A Temperature 20C0.5K / Humidity 70% or less CE marking (low voltage/EMC/laser)
300mm Wafer Loader NWT-3000
Wafer Carrier Measuring System NEXIV VMR-C4540

Non-contact, fully automatic measurement provides outstanding throughput. Perfect for measuring FOUP and FOSB. Compatible carrier size: 300mm/200mm
Specifications
VMR-C4540 Compatible carries (FOUP, FOSB, OC) SEMI-compliant 300mm wafer carriers, 200mm wafer carriers (with dedicated adapter)
Stroke Measuring head (X x Y x Z) 480 x 180 x 400mm Rotary table Minimum readout Head travel speed Kinematic plate rotation speed Camera Optical magnification Field of view Max. workpiece weight Measuring accuracy Repeatability (2 ) Illuminator Auto focus Power source Power consumption (approx.) Dimensions Weight OS Monitor 360 (in 90 increments) 0.1m XZ axis: 200mm/s, Y axis: 50mm/s (max.) 90/2 sec. B&W 1/2-in. CCD 0.27 to 2.74x (5-step 10x zoom) 20 x 16mm to 2.0 x 1.6mm 15kg (10 + 10L/1000) m (L = measuring length in mm) 2m Episcopic, diascopic, darkfield Laser AF, Vision AF AC100-120V 10%, 50/60 Hz AC100-120V: 13A (main unit), 9A (PC) AC200-240V: 7A (main unit), 5A (PC) 1400 x 1739 x 2530mm Approx. 1400kg Windows XP 19-in. TFT
NEXIV VMR-C4540
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CNC Video Measuring System iNEXIV VMA-2520 iNEXIV VMA-2520
This entry-level, low-magnification model with a compact, lightweight design offers the functionality and image processing capability of the NEXIV VMR series. The long 200mm Z-axis stroke, 73.5mm working distance and 250mm x 200mm XY stroke enable easy Z-axis measurement of 3D parts with uneven surfaces, including mechanical parts, plastic injection molding parts and medical devices.
Optical magnification Total magnification Field of view (mm) 0.35x 14x 13.3 x 10 0.6x 24x 7.8 x 5.8 1x 40x 4.7 x 3.5 1.8x 73x 2.6 x 1.9 3.5x 141x 1.33 x 1
Specifications
Stroke (X x Y x Z) Minimum readout Maximum workpiece weight MPE 250 x 200 x 200mm (10"x 8" x 8") 0.1m 15kg (up to 5kg accuracy guaranteed) XY MPEE1: 2+8L/1000m (workpiece weight less than 5kg) XY MPEE2: 3+8L/1000m Z MPEE1: 3+L/50m 1/3-in. 3CCD color Progressive scan (B/W optional) 73.5mm (63mm with optional Laser AF) See the above table Vision AF and optional Laser AF Diascopic, episcopic, 8-segment LED ring illumination 100V-240V, 50/60Hz 5A-2.5A (excluding power consumption of host computer and its peripherals) 565 x 690 x 740mm (minimum height), 72kg 650 x 700 x 1360mm, 123kg 145 x 400 x 390mm, 13kg 2000 x 1000mm (including table, tower type PC and PC rack)
Camera Working distance Magnification/F.O.V. Auto focus Illuminator Power source Power consumption Dimensions (W x D x H) & weight Main body Main body, table and controller Controller Footprint (W x D)
Application Software for VMA-2520 Imaging documentation program: NEXIV EDF/Stitching Express
This optional software makes EDFExtended Depth of Field images by extracting focused pixel information from multiple captured images in Z-axis direction. Also, it generates 2D stitching images from different FOV images captured with CNC XY stage motion, making a wide FOV observation possible. Both functions contribute to image documentation.
2D image stitching
Two-dimensional profile shape analysis program: iNEXIV VMA Profiler/CAD Reader

iNEXIV VMA Profiler makes it possible to measure and judge 2-dimensional profile shapes in a workpiece that cannot be measured in the normal geometric mode. Now more accurate quantitative measurements can be taken than with the chart comparison method using profile projectors and/or conventional measuring microscopes. With the iNEXIV VMA CAD Reader nominal shape data can be created from CAD data in the DXF/IGES file format.
EDF (Extended Depth of Field)
CAD interface off-line teaching support program: iNEXIV VMA Virtual AutoMeasure
This program enables CAD data to be read into the Virtual Video Window on a separate computer, allowing the operator to use iNEXIVs teaching program with the same operational procedures as on the online computer. This eliminates the necessity of using an actual workpiece during teaching sessions and lets the iNEXIV VMA system concentrate on automatic measurement for increased productivity. The software imports IGES, DXF, DMIS, NC files, Gerber, and so on.
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Profile Projectors V-24B/V-20B/V-12B Series
Profile Projectors are inspection instruments that enlarge and project the workpiece onto the screen with perfect magnification accuracy. And when combined with a precision stage or data processing unit or similar device, they can observe and measure the shape and dimensions of the workpiece. These projectors are ideal for measuring and inspection of high-precision parts, dies, and the like used in the automobile, machine tool, electronic parts, and other industries. Maximum workpiece size: 250 x 150mm Magnification range: 5-500x (Depending on projection lens)
V-24B
Profile Projectors Large effective screen diameter of 600mm. Superior magnification accuracy ideal for measurement and inspection of profiles, surface conditions and other aspects of a large workpiece.
Specifications
Model Screen Projection lens Magnification accuracy Stage Max. workpiece height Power source Dimensions and weight V-24B 600mm rotatable screen; 360 rotatable (with digital reading to 1 minute of arc) 5x, 10x, 20x, 50x, 100x (all parfocal lenses); 3-lens turret mount 0.05% for contour illumination, 0.075% for surface illumination 9V stage directly mountable, vertical move: motorized (stepless gear, gear ratio: 10:1) 250mm AV 100V (50/60Hz), power consumption: approx. 450VA 1180 (W) x 1100 (D) x 1900 (H) mm (1700 (D) x 1900 (H) with hood), approx. 800kg V-12B Series V-12BDC Screen V-12BD V-12BSC V-12BS V-20B 500mm rotatable screen; provided with digital protractor fine rotation knob; 360 rotatable (with digital reading to 1 minute of arc) 5x, 10x, 20x, 50x, 100x (all parfocal lenses); 3-lens turret mount 0.1% for contour illumination, 0.15% for surface illumination 10 x 6 stage directly mountable; 8 x 6, 6 x 4, 4 x 4, 03L; 2 x 2 stage mountable via adapter 150mm (10 x 6: 120mm) AV 100V/120V (50/60Hz), power consumption: approx. 340VA 570(W) x 615(D) x 1900(H)mm (1200 (D) x 2000 (H) with hood), approx. 260kg
V-12BDC
305mm rotatable screen; etched center crossline; provided with digital protractor fine rotation knob; 360 rotatable (with digital reading to 1 minute of arc) Built-in
305mm fixed screen; etched center crossline
Counter Projection lens Magnification accuracy Stage Max. workpiece height Power source Dimensions and weight
Built-in
5x, 10x, 20x, 50x, 100x,200x, 500x (all parfocal lenses); 3-lens turret mount 0.1% for contour illumination, 0.15% for surface illumination 10 x 6, 8 x 6, 6 x 4, 4 x 4,O3L, 2 x 2 stages directly mountable 100mm (10 x 6: 70mm) AV 100V/120V (50/60Hz), power consumption: approx. 340VA 410(W) x 650(D) x 938-1038(H)mm, (693 (D) x 970 to 1070(H) with hood), approx. 80kg
Accessories for Profile Projectors Sliding Stage

(Exclusive for profile projectors V-20B/V, 12B) Stage surface diameter .......................180mm Stage glass diameter...........................107mm Measuring range.................................Observable 30mm in diameter Rotation angle ....................................360 (no increments) Max. workpiece weight......................5kg Weight................................................Approx. 10kg
V-24B-Specific 9V Stage
Surface area .................................610 (X) x 290 (Y)mm Cross travel..................................225 (X) x 100 (Y)mm Minimum readout........................0.0005mm (Linear encoder) Tool mounting groove.................Dovetail Loading capacity .........................30kg
Glass Scale Set

Used to check the magnifying accuracy of the projector being used. Standard scale (50mm) = 1mm/increments (accuracy [3+7L/1000] m) Reading scale (300mm) = 0.1mm/increments (accuracy [6+L/50] m) Magnification = 6x
Retrofit Counter/DP Unit

(Counter display is optional) Used to connect a 2-axis counter to the profile projectors V-24B, 12BD, 12BS. This unit is also necessary in configuration with the DP-E1 data processor.
Glass Reading Scale

Used to measure projection images on the screen. 200mm and 300mm scales both in 0.5mm incrementsare available. Accuracy: (15+L/20)m
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Measuring Microscopes MM-400Basic Type
These models boast high cost performance in a compact body, with a wide travel range of 150(X) x 100(Y) x 150(Z)mm. The optical head and stage are selectable to suit your use. Maximum workpiece size: 150 x 100mm (MM-400 + 6x4 stage) Magnification range: 10-1000x (Depending on combination of eyepiece and objective lenses)
MM-400/T
MM-400/M
Specifications
Z-axis movement Optical head Eyepiece Objective Stage Light source Diascopic Episcopic Max. workpiece height Dimensions (W x D x H)/weight *TE2-PS100W power supply and MM-LH50PC are required. Manual (dual side coarse/fine focus knob) Erect image monocular; inclined 30 from horizontal Dedicated 10x (Field No. 20) Erect image trinocular; inclined 25 from horizontal CFWN 10x (Field No. 20)
Measuring microscope objectives: 1x (W.D.; 79mm), 3x (W.D.; 75mm), 5x (W.D.; 64mm), 10x (W.D.; 49mm), 20x (W.D.; 20mm), 50x (W.D.; 15mm), 100x (W.D.; 4mm) 6x4, 4x4, 2x2 LED diascopic illuminator (standard), 12V-50W halogen light source (option)* Monocular LED episcopic illuminator 150mm 300 x 600 x 638mm/approx. 50kg LED episcopic illuminator
Measuring Microscopes MM-400/8003-Axis Type

These models come with focus knobs on both side and incorporate a built-in Z-axis scale. A trinocular optical FA head or trinocular optical head is selectable according to use.
MM-400/LT MM-800/LFA
Specifications
Model Z-axis movement Optical head Eyepiece Objective Stage*1 Light source Diascopic Episcopic Max. workpiece height Dimensions (W x D x H)/weight 150mm 300 x 600 x 638mm/approx. 50kg MM-400/L Manual (dual side coarse/fine focus knob) Erect image FA; erect image trinocular, inclined 25 from horizontal CFWN 10x (Field No. 20) Measuring microscope objectives: 1x (W.D.; 79mm), 3x (W.D.; 75mm), 5x (W.D.; 64mm), 10x (W.D.; 49mm), 20x (W.D.; 20mm), 50x (W.D.; 15mm), 100x (W.D.; 4mm) 6x4, 4x4, O3L, 2x2 12x8, 10x6, 8x6, 6x4, 4x4, O3L, 2x2 MM-800/L
LED diascopic illuminator (standard), 12V-50W halogen light source (option)*2 LED episcopic illuminator 200mm 380 x 735 x 725mm/approx. 65kg
*1 A stage adapter is required to mount 8x6, 6x4, O3L or 2x2 stages onto the MM-800. *2 TE2-PS100W power supply and MM-LH50PC are required. For details, see the corresponding catalog. (Catalog list on page 2)
Model
MM-400/M
MM-400/T
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Measuring Microscopes MM-400/800Motorized Type
The motorized Z-axis control simplifies operation and ensures precise movement, reducing stress on the part of the operator. Use of the microscope with a trinocular optical FA head will reduce Z-axis measurement errors down to a minimum.
MM-800/LMFA MM-400/LMFA
Specifications
Model Z-axis movement MM-400/LM Motorized (max. speed: 10mm/sec) Erect image FA; erect image trinocular, inclined 25 from horizontal CFWN 10x (Field No. 20) Measuring microscope objectives: 1x (W.D.; 79mm), 3x (W.D.; 75mm), 5x (W.D.; 64mm), 10x (W.D.; 49mm), 20x (W.D.; 20mm), 50x (W.D.; 15mm), 100x (W.D.; 4mm) 6x4, 4x4, O3L, 2x2 Diascopic Episcopic Max. workpiece height Dimensions (W x D x H)/weight 150mm 300 x 600 x 638mm/approx. 50kg 12x8, 10x6, 8x6, 6x4, 4x4, O3L, 2x2 MM-800/LM
Optical head Eyepiece Objective Stage*1 Light source
LED diascopic illuminator (standard), 12V-50W halogen light source (option)*2 LED episcopic illuminator 200mm 380 x 735 x 725mm/approx. 65kg
Measuring Microscopes MM-400/800Universal Type

An autofocus unit dedicated to the universal type microscope is now available, making it possible to perform Z-axis measurement with greater precision. High NA, low flare CFI60 optics and ample illuminator selection support the measurement of workpieces of different geometries. Motorized control of the illuminator is available. Beside brightfield, darkfield, simple polarizing and DIC, epi-fluorescence observation is also possible. Maximum workpiece size: 300 x 200mm (MM-800 + 12x8 stage) 150 x 100mm (MM-400 + 6x4 stage) Magnification range: 50-1000x (Depending on combination of eyepiece and objective lenses)
MM-800/LU MM-800/LMU
Specifications
Model Z-axis movement Optical head Eyepiece Objective Stage*1 MM-400/U MM-400/LU Manual (dual side coarse/fine focus knob) MM-800/LU MM-400/LMU MM-800/LMU Motorized (max. speed: 10mm/sec)
Y-TB binocular eyepiece tube, LV-TI3 trinocular eyepiece tube, LV-TT2 tilting trinocular eyepiece tube (with built-in reticle) CFI10x (Field No. 22), CFI10x CM (Field No. 22) CFI60 LU Plan Fluor EPI series, CFI60 LU Plan Fluor BD series, CFI60 L Plan EPI CR series 6x4, 4x4, O3L, 2x2 12x8, 10x6, 8x6, 6x4, 4x4, O3L, 2x2 6x4, 4x4, O3L, 2x2 12x8, 10x6, 8x6, 6x4, 4x4, O3L, 2x2
Light source
Diascopic Episcopic
LED diascopic illuminator (standard), 12V-50W halogen light source (option)*2 White LED illuminator LV-EPI LED, Motorized universal epi-illuminator LV-U EPI2A*2, Universal epi-illuminator LV-U EPI2*2, Universal epi-illuminator U-EPI*2, Universal epi-illuminator with Focusing Aid LV-U EPI FA 150mm 300 x 600 x 638mm/approx. 50kg 200mm 380 x 735 x 725mm/approx. 65kg 150mm 300 x 600 x 638mm/approx.50kg 200mm 380 x 735 x 725mm/approx. 65kg
Max. workpiece height Dimensions (W x D x H)/weight
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Accessories for Measuring Microscopes Digital Camera for MicroscopesDigital Sight Series
These improved digital cameras for microscopes enables easier capture and storage of more beautiful images. (Compatible with all Nikon measuring microscopes except the MM-400/M.) Standard Digital Cameras: Digital Sight DS-Fi1-L2 Digital Sight DS-Fi1-U2 Digital Sight DS-2Mv-L2 Digital Sight DS-2Mv-U2
(compatible with all models except U type)

Magnification W. D. (mm) 1x 79 3x 75 5x 64 10 x 49 20 x 20 50 x 15 100 x 4
The viewfield includes crosshairs and angle indexes, and when the knurled ring at the lower section of the eyepiece tube is turned, the crosshairs and the vernier both rotate up to 180.
Templates 1-Minute Reading Eyepiece

The following templates are available to facilitate profile comparison and measurements. All are designed for 3x objectives. Standard angle templates (Standard equipment) Concentric; diameter 0.2-4.6* *Cannot be attached to monocular type
The viewfield includes crosshairs and 60 lines, and angle indexes that can be read by appropriate microscopes. The measuring range is 360.
8-Segment LED Ring Light CYN-E1

This illuminator has been developed for observing and/or measuring plastic mold parts, drills, etc. with the 1x, 3x, 5x and 10x objective lenses of Nikons measuring microscopes. Thanks to two features, a wide 30-degree angle of illumination from the optical axis and a selection of optimum direction of illumination from eight directions, it is now possible to clearly see the edges of plastic mold parts and drills, something that was not possible with a top light or conventional ring illuminator with a small angle and no direction selector. This illuminator can also replace a bifurcated fiber optics illuminator, eliminating the need to adjust the position of fibers by hand at each measurement and/or observation. The long-life and low-powerconsuming LED light source reduces running costs compared to those of a halogen light source. Moreover, the illuminator can be controlled by E-max V type software, and it can also be attached to Nikon stereoscopic microscopes with an optional adapter ring.
Dedicated Objective lenses for Measuring Microscopes 1x, 3x, 5x, 10x, 20x, 50x, 100x
10-Minute Reading Eyepiece

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Common Accessories for Measuring Microscopes/Profile Projectors Stages
Use in combination with measuring microscope/profile projectors. The workpiece is loaded on a stage and is moved in the X/Y direction and its travel distance is read. Stages equipped with linear encoder can be connected to a data processing system or printer and display travel distances digitally to enable fast and easy measuring.
Stage Specifications
Type Surface area (mm) Stage glass dimensions (mm) 330 x 230 305 x 190 245 x 192 204 x 145 170 x 145 170 x 120 107 Crosswide travel (mm) 300 x 200 250 x 150 200 x 150 150 x 100 100 x 100 100 x 50 50 x 50 Reading method Min. reading (mm) 0.0001 0.0001 0.0001 0.0001 0.0001 0.0001 0.0001 Stage top Tool installation M6 (screw) M6 (screw) M6 (screw) M6 (screw) M6 (screw) Dovetail M6 (screw) Loading capacity (kg) 20 20 15 10 6 5 5 Weight (kg) Approx. 75 Approx. 50 Approx. 36 Approx. 27 Approx. 23 Approx. 15 Approx. 13
12 x 8 10 x 6 8x6 6x4 4x4 O3L 2x2
500 x 350 450 x 286 400 x 280 350 x 240 285 x 240 285 x 192 195 x 192
Linear encoder Linear encoder Linear encoder Linear encoder Linear encoder Linear encoder Linear encoder
360
*Accuracy: 3+L/50m (L: measurement length), excluding O3L.
Rotating Table
Used to rotate the workpiece and align it in the direction to which the stage moves.
Rotating table C D A2 Table diameter 204mm 282mm 160mm Glass insert diameter 165mm 262mm 107mm Rotation range 360 (uncalibrated) 360 (uncalibrated) 360 (2 reading) Tool installation Screw hole 6-M6 Screw hole 6-M6 Weight Approx. 5kg Approx. 8kg
T-groove/Screw hole 6-M6 Approx. 4kg
3-axis/2-axis Counters
Can be mounted on either side of the microscope and display stage axes in increments of 1mm, 0.1mm, or 0.01mm (switchable).
XY Reset Switch
Located within easy reach for quick reset.
Y-axis
X-axis
Remote Switch
Enables reset and SEND remote control of counter.
Standard 300mm Scale

Gauges stage travel accuracy up to 300mm. Both 10mm-interval sensor patterns and calibrations are provided. Made of low head-expansion glass, for minimizing the influence of heat. Accuracy: Within 1m against compensation values. (Accuracy scale provided)
Stage Adapter S
This adapter is used to mount a stage other than the 10 x 6 Stage to the V-20B profile projector.
Tilting Center Fixtures

Used to hold machined workpieces. Type A2 can be mounted directly to the Rotating Table Type 2, and Type B to the 9V Stage.
Max. workpiece diameter and length when held level A2 B 68 x 120mm 100 x 250mm Center height Tilting angle (in 1 increment) 10 15 Weight
V-Block Fixture (for the 9V or 03L Stage)

Used to hold pole-shaped workpieces horizontally. These pieces are difficult to hold with a tilting center fixture. Weighs approximately 1kg.
Diameter capacity Lower groove Upper groove 5 to 16mm 13 to 25mm Height of center 33 to 41mm 39 to 47mm
45mm 100mm
Approx. 2.2kg Approx. 6kg
Compatible Stages
A2 9V 10 x 6 8x6 6x4 k*1 B k 4x4 2x2 O3L A2 k*1 k k*2 B
*1. In conjunction with Rotating Table Type 3. *2. In conjunction with Goniometer Type 2.
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Common Accessories for Measuring Microscopes/Profile Projectors Data Processing Software E-Max Series
The ideal combination of Nikon measuring microscope and digital camera, the E-Max series comprehensively supports high-definition digital imaging and measurement. E-Max can also comfortably combine a Nikon measuring microscope with a profile projector to simplify the use of a wealth of advanced measurement/processing functions, ranging from 2D data processing and image measurement to data storage.
Functions provided by each set:
D set Data processing Navigation during replay Live video monitoring Chart measuring Automated video edge detection DS set
Compatible measuring instruments for each set:

D set Profile projector Measuring microscope DS set *
* Trinocular eyepiece tube type. * I-set, which is compatible with stereoscopic microscopes and metallurgical microscopes, is also available.
E-Max DS Set + MM-400 Measuring Microscope
Data Processor DP-E1

The DP-E1 houses a 320 x 240 pixels LCD display in a compact body, facilitating reading and use. In a seamless interface that comprises measuring microscope and profile projector, it streamlines the calculation of measurement results and data processing tasks. Compact body with built-in counter displayeasy to read and use. Measurement code buttons and result list help facilitate operationeasy measurements even for novices. Teaching files and measurement results can be saved in a USB memory stick to be used anywhere.
Accessories for Measurement Support/Data Processing

Digital Printer DPU-414
Prints out measurement results. Inspection Result Sheet Generation System
VMR Report Generator

Inspection result sheet generation software that rationalizes and reduces inspecting processes. Enables speedy creation of various format result sheets. Can be used on Microsoft Excel, and can be used simultaneously with macro program. OS: Windows Excel 2000/XP Memory: 64MB or more
* This software is developed by Nippon Filcon Co. Ltd.
Foot Switch
Used to send load-and-go commands to the DP-303, DP-202, and DPU414. Frees both hands to enhance measurement efficiency.
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Autocollimators Autocollimators 6B/6D
Specifications
6B/6D Telescope magnification Objective effective diameter Objective focal length Measuring range Minimum readout Readout method Measuring accuracy Field of view Light source Power supply Dimensions Weight (main unit + table) 38x 70mm 700mm 30 (horizontal/vertical 2 axes) 0.5 Adjustment in view field and reading on micrometers Measurement area. Within 5 , 0.5 ; Within 30 , 1 6B: Brightfield; 6D: Darkfield 6V-15W special electric bulb AC 100V, 50/60 Hz Mirror barrel diameter: 68mm; Total length: approx. 490mm Approx. 30kg (incl. stand)
Autocollimator Accessories
Autocollimator Mirror B
Reflective surface effective diameter: 70mm Mirror feet interval: 100mm Permanent magnet: removable Handle: provided with On/Off switch
Autocollimator Mirror D
Reflective surface effective diameter: 42mm Mirror feet interval: 100mm
Autocollimator Mirror C
Outer diameter: 30mm Thickness: 12mm Parallelism: 2"
12-Plane Mirror
Guaranteed accuracy: 1" to corrected value Outer diameter: 117mm Center hole diameter: 20mm Thickness: 46mm
8-Plane Mirror
Guaranteed accuracy: 1" to corrected value Outer diameter: 117mm Center hole diameter: 20mm Thickness: 46mm
Mirror Adapter
For Autocollimators 6B and 6D. *The field of view on the monitor is narrower than that through the eyepiece. (Measurement range 20 on a 2/3-in. CCD)
Pentagonal Prism
Guaranteed accuracy*: 2 Dimensions: 65 x 65 x 45mm *Optical right-angleness
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Optical Flat/Optical Parallel Optical Flat
The optical flat is a glass disk, whose one surface is precisely finished flat and mirror smooth. It is used to check the flatness level of a surface provided with mirror-smooth finish. Flatness level can be measured by observing interference fringes by placing the optical flat in contact with the workpiece. It is idea for measuring surfaces in block gauges, micrometers and snatch gauges.
Specifications
Diameter Thickness Flatness level Glass (60mm) 15mm 0.1m Glass (130mm) 27mm 0.1m
Optical Parallel
Both planes of the optical parallel have been precisely finished flat and parallel. It is used to check the flatness and parallel levels of a workpiece by observing interference fringes by placing the optical parallel in contact with the workpiece.
Specifications
Diameter Thickness Flatness level Parallel level 30mm 12mm, 12.12mm, 12.25mm, 12.37mm 0.1m or less 0.2m or less
Optical flats and parallels with greater precision are available by custom order.
b a
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DIGIMICRO DIGIMICRO Head MF-1001
Specifications
Main unit + counter Measurement range Minimum readout 0.1m, switchable to 0.5m or 1m 3m 500mm/sec. or less Down direction 1.225 to 1.813N (variable to approx. 0.441N) Lateral direction 0.637 to 1.225N RS-232C, Dedicated printer output 0 to +40C Approx. 610g MF-1001+MFC-101 0-100mm 0.01m, switchable to 5m, 1m, 0.1m, or 0.05m MF-1001+TC-101
Accuracy (20C) Response speed Measuring force
External output Operating temperature Weight
DIGIMICRO Head MF-501/MH-15M

Specifications
Main unit + counter Measurement range Minimum readout MF-501+MFC-101 MF-501+TC-101 MH-15M+TC-101 0-15mm 0.01m, switchable to 5m, 1m, 0.1m, or 0.05m 0.7m 500mm/sec. or less 100mm/sec. or less Down direction 1.127 to 1.617N (variable to approx. 0.294N) Lateral direction 0.637 to 1.225N Up direction 0.245N, Down direction 0.637N, Lateral direction 0.441N *With lifting release 0-50mm 0.1m, switchable to 0.5m or 1m 1m
MF-1001 + MFC-101 Counter + MS-21
Accuracy (20C) Response speed
Measuring force
External output Operating temperature Weight
RS-232C, Dedicated printer output 0 to +40C Approx. 460g Approx. 140g
MF-501 + TC-101 Counter + MS-11C
DIGIMICRO Head Accessories Printer MF-9PW

Connected to the MFC-101 or TC-101 counter, it performs with a few key strokes not only printing, but also statistical calculation, accept/reject judgment, and histogram generation, enhancing efficiency in data processing.
Measurement Attachments
Standard measurement attachment Pin attachment
Plastic attachment
Measurement Stands
Specifications
MS-11C Platform material Stage size Weight Ceramics 110 x 110mm 6.3kg MS-21 Steel 150 x 150mm 18.4kg MS-31G* Granite 120 x 180mm 6.0kg MS-4G Granite 400 x 300mm 36kg MS-5C Ceramics 100mm 11kg
Off-center attachment
Flat attachment
Roller attachment
*It is also possible to measure workpieces by placing them on a large platform with its lower surface as its reference plane.
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LSI Inspection Microscope ECLIPSE L300 ECLIPSE L300 (Episcopic Illumination Type)
Utilizes the CFI60 optical systema fusion of Nikons renowned CF design and infinity optics. CFI60 achieves new levels of brightness, contrast and operability, providing support to advanced inspections of large-size wafers. Maximum workpiece size: 300mm Magnification range: 15-2000x (Depending on combination of eyepiece and objective lenses)
Specifications
Main body Power source: 12V-100W illuminator power source built in; power source for motorized control built in Focusing mechanism: Stroke 29mm Coarse: 12.7mm/rotation (torque adjustable, with refocusing mechanism) Fine: 0.1mm/rotation (in 1m increments) Control: Nosepiece rotation, Light intensity control, Aperture diaphragm open/close Nosepiece: Motorized universal sextuple nosepiece (with centering mechanism and DIC prism slot) 12V-100 halogen lamp illuminator Motorized aperture diaphragm (centerable) Field diaphragm (fixed, with focus target) Pinhole slider (option) mountable 25mm filters (NCB11, ND16, ND4) mountable Polarizer/analyzer mountable One epi filter cube (V, BV, B, G) mountable L2-TT2 ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 030-): F.O.V. 22/25; Beamsplit ratio 100 : 0 / 20 : 80 L2-TT ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 030-): F.O.V. 22/25; Beamsplit ratio 100 : 0 / 0 : 100 YM-T12 erect-image trinocular eyepiece tube: F.O.V. 22/25; Beamsplit ratio 100 : 0 / 0 : 100 14 x 12 stage: Stroke 354 x 302 mm (diascopic illumination observation range: 354 x 268 mm) Coarse/fine-movement changeover possible Fixed-position X-Y fine-movement control CFI eyepiece lens series CFI LU/L Plan series
Episcopic illuminator
Eyepiece tube
Stage
Eyepieces Objectives
L300-TT2-DIC (halogen illuminator)
FPD Inspection Microscope ECLIPSE L300D ECLIPSE L300D (Diascopic/Episcopic Illumination Type)
Utilizes the CFI60 optical systema fusion of Nikons renowned CF design and infinity optics. CFI60 achieves new levels of brightness, contrast and operability, providing support to advanced inspections of large-size LCDs. Stage stroke: 354 x 302 mm (diascopic illumination range 354 x 268mm) Magnification range: 15-2000x (Depending on combination of eyepiece and objective lenses)
Specifications
Power source: 12V-100W illuminator power source built in; power source for motorized control built in Focusing mechanism: Stroke 29mm Coarse: 12.7mm/rotation (torque adjustable, with refocusing mechanism) Fine: 0.1mm/rotation (in 1m increments) Control: Nosepiece rotation, Light intensity control, Aperture diaphragm open/close, Diascopic/episcopic illumination switching Nosepiece: Motorized universal sextuple nosepiece (with centering mechanism and DIC prism slot) Episcopic 12V-100 halogen lamp illuminator illuminator Motorized aperture diaphragm (centerable) Field diaphragm (fixed, with focus target) Pinhole slider (option) mountable 25mm filters (NCB11, ND16, ND4) mountable Polarizer/analyzer mountable One epi filter cube (V, BV, B, G) mountable Diascopic 12V-100 halogen lamp illuminator illuminator Aperture diaphragm, Field diaphragm (centerable) 45mm filters (NCB11, NDA, NDB) mountable Polarizer mountable LWD condenser built in (with up/down movement mechanism) Eyepiece tube L2-TT2 ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 030): F.O.V. 22/25; Beamsplit ratio 100 : 0 / 20 : 80 L2-TT ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 030): F.O.V. 22/25; Beamsplit ratio 100 : 0 / 0 : 100 YM-T12 erect-image trinocular eyepiece tube: F.O.V. 22/25; Beamsplit ratio 100 : 0 / 0 : 100 Stage 14 x 12 stage: Stroke 354 x 302 mm (diascopic illumination observation range: 354 x 268 mm) Coarse/fine-movement changeover possible Fixed-position X-Y fine-movement control Eyepieces CFI eyepiece lens series Objectives CFI LU/L Plan series For details, see the corresponding catalog. (Catalog list on page 2) Main body
L300D-TT2-DIC
Maximum workpiece size: 17-inch FPD
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Automated IC Inspection Microscope ECLIPSE L200A
With motorized control of major sections, including focus, aperture, brightfield-darkfield switching and lamp intensity, the L200A can be ideally configured with wafer loaders to provide macro inspection of wafers, meeting the stringent requirements of the latest semiconductor fabs. Maximum workpiece size: 200mm Magnification range: 50-2000x (Depending on combination of eyepiece and objective lenses)
Specifications
Main body 12V-100W illuminator power source built in, Remote controller provided Focusing mechanism: Stroke 29mm, ALF (Auto Link Focusing system) equipped Control mechanism: Nosepiece rotation, Light intensity control, Aperture diaphragm open/close, Z-axis control, Optical path switching Nosepiece: Motorized sextuple universal nosepiece AF unit can be mounted (optional) 12V-100W halogen lamp light source, Motorized aperture diaphragm (centerable), Fixed field diaphragm (with focus target), Motorized optical path switching (BF/DF), Pinhole slider (optional) mountable, four 25mm filters (NCB11, ND16, ND4) mountable, Motorized DIC unit (optional) mountable
Episcope illuminator (built-in)
Eyepiece tube L2-TT2 ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 0-30): F.O.V. 22/25; Beamsplit ratio 100 : 0 / 20 : 80 L2-TT ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 0-30): F.O.V. 22/25; Beamsplit ratio 100 : 0 / 0 : 100 LV-TI3 Trinocular (erect image, F.O.V. 22/25) Stage 8 x 8 Stage, Stroke: 205 x 205mm, Coarse/fine switching, Fixed fine control position CFI eyepiece lens series CFI LU/L Plan series
L200A-TT-M-DIC
Eyepiece Objective
IC Inspection Microscopes ECLIPSE L200/L200D

Nikon uses CFI60 infinity optics in its IC inspection microscopes to produce images of the highest possible contrast and minimum flare.
ECLIPSE L200 (Episcopic illumination type)

Maximum workpiece size: 200mm Industrial Microscopes Magnification range: 15-2000x (Depending on combination of eyepiece and objective lenses)
ECLIPSE L200D (Diascopic/Episcopic illumination type)

Stroke: 205 x 205mm (Depending on Diascopic illumination range: 150 x 150mm) Magnification range: 15-2000x (Depending on combination of eyepiece and objective lenses)
Specifications
Focusing mechanism Stroke: 29mm, Coarse: 12.7mm/rotation (torque adjustable, refocusing mechanism provided), Fine: 0.1mm/rotation, Scale: 1m, Max. workpiece height: 13mm (22mm with stage glass) Nosepiece: Motorized sextuple universal nosepiece, DIC attachment slot provided
Episcope illuminator (built-in) 12V-100W halogen lamp light source, Motorized aperture diaphragm (centerable), Fixed field diaphragm (with focus target), Pinhole slider (optional) mountable, four 25mm filters (NCB11, ND16, ND4) mountable, Polarizer/Analyzer mountable Diascopic illuminator (L200D only) (built-in) Eyepiece tube 12V-100W halogen lamp light source, Aperture diaphragm, two 25mm filters (NCB11, ND4) mountable, LWD condenser built in L2-TT2 ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 030): F.O.V. 22/25; Beamsplit ratio 100 : 0 / 20 : 80 L2-TT ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 030): F.O.V. 22/25; Beamsplit ratio 100 : 0 / 0 : 100 LV-TI3 Trinocular (erect image, F.O.V. 22/25) 8 x 8 Stage, Stroke: 205 x 205mm (Diascopic observation range: 150 x 150mm), Coarse/fine switching, Fixed fine control position CFI LU/L Plan series
L200-TT-DIC
Stage
Objective
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Industrial Microscope ECLIPSE LV150/LV150A ECLIPSE LV150 (Manual nosepiece type) ECLIPSE LV150A (Motorized nosepiece type)
The ECLIPSE LV Series realizes groundbreaking versatility based on a new concept module design. This ECLIPSE LV150/LV150A is a new industrial-use microscope that flexibly responds to observation needs in development, quality management, and inspecting manufacturing processes.
Specifications
Main body Baseless type (spacer insertable between arm and stand); Max. sample height 47mm (when configured with 3x2 stage/6x4 stage), 82mm with column riser, 116.5mm with Suruga Seiki B2360CR; 12V-50W brightness control built in transformer Coaxial coarse/fine focus knob, left: coarse/fine, right: fine; Stroke 40mm, coarse 14.0mm/rotation (torque adjustable, with refocusing mechanism), fine focusing 0.1mm/rotation (1mm/increments) C-N6 Nosepiece (brightfield, sextuple), L-NBD5 Nosepiece (bright/darkfield quintuple, with flare prevention), L-NU5 Nosepiece (universal quintuple, with flare prevention), LV-NU5A Nosepiece (for LV150A, high-durability motorized universal quintuple, with flare prevention) 12V-50W high-intensity halogen lamp; Field (centerable) and aperture diaphragms synchronized with B/D changeover; 25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer insertable 12V-50W high-intensity halogen lamp; Precentered mercury-fiber illuminator Intensilight (with brightness control, no centering necessary) mountable; Centerable field and aperture diaphragms synchronized with B/D changeover; 25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer/l plate insertable, excitation balancer insertable LV-TI3 Trinocular (erect image, F.O.V. 22/25), LV-TT2 Tilting Trinocular (erect image, F.O.V. 22/25), Y-TF2 Trinocular (inverted image, F.O.V. 22/25), Y-TT2 Trinocular (inverted image, F.O.V. 22/25) LV-S32 3x2 Stage (stroke: 75x50 mm including glass plate), ESD-applied (excluding glass plate) LV-S64 6x4 Stage (stroke: 150x100 mm including glass plate), ESD-applied (excluding glass plate) LV-S6 6x6 Stage (stroke: 150x150 mm; only for episcopic illumination) CFI eyepiece series CFI60 series 1000-10V, within 0.2 sec. 1.2A/75W Approx. 8.6kg (LV150), approx. 8.7kg (LV150A)
Focusing mechanism Nosepiece
Episcopic illuminator LV-U EPI Episcopic illuminator LV-U EPI2
Eyepiece tube
Stage
Eyepiece Objective lens Electrostatic decay time Power consumption Weight (main body)
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Industrial Microscope ECLIPSE LV100DA A motorized system that optimizes image capturing conditionsLV100DA
Among performance requirements demanded of a microscope, those associated with digital imagingdigital image capture, analysis, and database formationare growing faster than ever before. The LV100DA motorized system squarely addresses these demands and now comes equipped with a mechanism that automatically optimizes observation technique and illuminationand these settings can be quantitatively controlled from external devices. Maximum workpiece size: 150 x 100mm Magnification range: 15-3000x (depends on the combination of eyepiece and objectives)
Specifications
Main body Focusing mechanism Interface Nosepiece Baseless type (column riser insertable between arm and stand); Max. sample height 29mm (with LV-S32 3x2 Stage or LV-S64 6x4 Stage), 64mm with column riser; 12V-50W brightness control built-in transformer Coaxial coarse/fine focus knob, left: coarse/fine, right: fine; Stroke 30mm, coarse 14.0mm/rotation (torque adjustable, with refocusing mechanism), fine focusing 0.1mm/rotation (1mm/increments) Motorized nosepiece: LV-NU5A Nosepiece, LV-NU5AC Nosepiece (with centering mechanism) Episcopic illuminator: LV-UEPI2A, Precentered mercury-fiber illuminator Intensilight LV-NU5A Nosepiece (high-durability motorized universal quintuple, with flare prevention mechanism) LV-NU5AC Nosepiece (high-durability motorized universal quintuple, with flare prevention and centering mechanisms) 12V-50W high-intensity halogen lamp; Precentered mercury-fiber illuminator Intensilight; Motorized operation/control of illumination changeover turret; Motorized aperture diaphragm (centerable, automatically optimized for the selected objective)/field diaphragm (centerable) synchronized with B/D changeover; 25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer/l plate insertable, excitation balancer insertable 12V-50W high-intensity halogen lamp; Field (centerable) and aperture diaphragms; Built-n filters (ND8, NCB11) LWD Achromat, Sliding Achromat 2-100x, C-C Abbe, C-C Achromat, Darkfield (dry) LV-TI3 Trinocular (erect image, F.O.V. 22/25), LV-TT2 Tilting Trinocular (erect image, F.O.V. 22/25), Y-TF2 Trinocular (inverted image, F.O.V. 22/25), Y-TT2 Trinocular (inverted image, F.O.V. 22/25) LV-S32 3x2 Stage (stroke: 75x50 mm including glass plate) LV-S64 6x4 Stage (stroke: 150x100 mm including glass plate) Eyepiece Objective lens Electrostatic decay time Power consumption Weight (main body) CFI eyepiece series CFI60 series 1000-10V, within 0.2 sec. 1.2A/90W Approx. 9.9kg
Episcopic illuminator
Diascopic illuminator Condenser Eyepiece tube Stage
Industrial Microscope ECLIPSE LV100D ECLIPSE LV100D (Episcopic/Diascopic Illumination Type)

The LV100D is an episcopic/diascopic illumination metallurgical microscope that based on the CFI60 infinity optics. This microscope provides powerful support for top-notch inspections in a broad array of applications such as semiconductors, magnetic heads, LCDs. Industrial Microscopes Max. sample size: 150 x 100mm Magnification range: 153000x (Depending on the combination of eyepiece and objective lenses)
Specifications
Main body Focusing section Nosepiece Episcopic illuminator LV-U EPI Episcopic illuminator Baseless type (spacer insertable between arm and stand); Max. sample height 29mm, 64mm with column riser; 12V-50W brightness control built in transformer Coaxial coarse/fine focus knob, left: coarse/fine, right: fine; Stroke 30mm, coarse 14.0mm/rotation (torque adjustable, with refocusing mechanism), fine focusing 0.1mm/rotation (1mm/increments) C-N6 Nosepiece (brightfield, sextuple), L-NBD5 Nosepiece (bright/darkfield quintuple, with flare prevention), L-NU5 Nosepiece (universal quintuple, with flare prevention) 12V-50W high-intensity halogen lamp; Field (centerable) and aperture diaphragms synchronized with B/D changeover; 25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer insertable 12V-50W high-intensity halogen lamp; Precentered mercury-fiber illuminator Intensilight mountable; Centerable field and aperture diaphragms synchronized with B/D changeover; 25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer/l plate insertable, excitation balancer insertable 12V-50W high-intensity halogen lamp; Field (centerable) and aperture diaphragms synchronized with B/D changeover; Filters (ND8, NCB11) insertable LV-TI3 Trinocular (erect image, F.O.V. 22/25), LV-TT2 Tilting Trinocular (erect image, F.O.V. 22/25), Y-TF2 Trinocular (inverted image, F.O.V. 22/25), Y-TT2 Trinocular (inverted image, F.O.V. 22/25) LV-S32 3x2 Stage (stroke: 75x50 mm including glass plate) LV-S64 6x4 Stage (stroke: 150x100 mm including glass plate) CFI eyepiece series CFI60 series 1000-10V, within 0.2 sec. 1.2A/75W Approx. 9.4kg
Diascopic illuminator Eyepiece tube
Stage Eyepiece Objective lens Electrostatic decay time Power consumption Weight (main body)
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Polarizing Microscopes ECLIPSE LV100 POL/50i POL
The base of the ECLIPSE-series polarizing microscopes has been reengineered to further improve the lineups already reputed optics, durability and ease of operation.
Specifications
Model Focusing ECLIPSE LV100 POL Coaxial coarse/fine focus knob; Focus stroke: 30mm; Coarse: 14mm per rotation; Fine: 0.1mm; Minimum reading: in 1mm increments ECLIPSE 50i POL Coaxial coarse/fine focus knob; Focus stroke: 30mm; Coarse: 13.8mm per rotation; Fine: 0.1mm; Minimum reading: in 1mm increments
ECLIPSE LV100 POL

Magnification range: 40-2000x (Depending on combination of eyepiece and objective lenses)
Nosepiece Episcopic illuminator
Reversed centering quintuple nosepiece (detachable); DIN slot LV-UEPI Universal Epi-illuminator 12V-50W illumination transformer, built-in Requires external power supply (TE2-PS100W)
ECLIPSE 50i POL

Diascopic illuminator
New illuminator (Brighter than a 100W lamp) 12V-50W halogen lamp 6V-30W halogen lamp (HK type) (Newly developed LV-HL50W) 12V-50W DC transformer, built-in 6V-30W transformer, built-in Precentered lamphouse with back mirror Diascopic/Episcopic changeover switch Fly-eye lens, built-in Diffusers, built-in ND8, NCB11 filters insert/remove ND8 filter insert/remove P-TT2 Trinocular Tube for polarizing microscopy; P-TB Binocular Tube for polarizing microscopy Analyzer insert/remove; Conoscopic/Orthoscopic observations switchable; Plate/compensator slot; Built-in focusable Bertrand lens, removable from optical path Top-grade dedicated circular graduated stage 360 rotary dial; Minimum reading angle 0.1 Fixed to the bottom of the condenser holder; P-T polarizer fixed to the bottom of the with scale condenser Dedicated strain-free swing-out, P Achromat (N.A. 0.9) CFI 10x (F.O.V. 22mm), CFI 10xM (F.O.V. 22mm), CFI 10xCM (F.O.V. 22mm) CFI P Achromat 4x, 10x, 20x, 40x, 100x CFI Plan Fluor 4x, 10x, 20x, 40x, 100xH CFI LU Plan Fluor Epi P 5x, 10x, 20x, 50x, 100x Dedicated circular graduated stage
Eyepiece tube Intermediate tube Stage Analyzer Polarizer Condenser Eyepiece Objectives
Focusing Units IM-4/IM-3

IM-4 Accepts the CFI60 compliant LV-UEPI Universal Epi-illuminator ESD, LV-EPILED White LED Illuminator and motorized nosepiece. High durability and large loading ability. IM-3 Accepts the EPI-U universal epi-illuminator and motorized nosepiece, which support the CF Infinity Corrected optical system. High durability and large loading ability.
Combination example of IM-4
Specifications
Z-axis stroke Coarse focusing Fine focusing Minimum fine scale Arm max. loading weight 30mm 5.2mm/rotation 0.1mm/rotation 1m 4kg Expandable to 10kg (IM-4)/8kg (IM-3) by adding a balancer 141mm (from objectives optical axis)
Combination example of IM-3
Distance to the mounting surface
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Universal Illuminators/Reflected Light Illuminators
Specifications
Model Illuminator Universal Epi-illuminator LV-UEPI LV-UEPI 2A Brightfield, darkfield, Normarski DIC, qualitative polarizing, Epi-fluorescence (motorized illumination changeover turret) Centerable 1.5x magnification, centerable Attachable to aperture diaphragm, centerable 12V-50W/12V-100W halogen illuminator, Metal halide illuminator, Hg/Xe high-intensity illuminator 1.64x magnification 1.5x magnification, centerable 1.5x magnification, centerable LV-UEPI2 Brightfield, darkfield, Normarski DIC, qualitative polarizing, Epi-fluorescence LV-EPILED Brightfield Brightfield, darkfield, Normarski DIC, qualitative polarizing
Field diaphragm Aperture diaphragm Pinhole diaphragm
Light source
12V-50W halogen illuminator
12V100W halogen illuminator Precentered mercury-fiber illuminator Intensilight
12V-50W halogen illuminator Precentered mercury-fiber illuminator Intensilight
White LED illuminator
Universal Epi-illuminator with 12V-50W halogen lamphouse
LV-UEPI Universal Epi-illuminator ESD with 12V-50W halogen lamphouse
LV-UEPI2A Motorized Universal-Epi-illuminator 2 with 12V-50W halogen lamphouse
LV-UEPI2 Universal Epiilluminator with 12V-50W halogen lamphouse
LV-EPILED White LED Illuminator
Filters
Items Test plates A B 45mm Filters ND2 Filters For controlling brightness ND16 (neutral density) ND32 25mm 25mm 25mm 45mm Reduce light quantities to 1/16. For diascopic illumination with OPTIPHOT Reduce light quantities to 1/32. Reduce light quantities by half For higher contrast (green) Remarks 300 pcs/mm Class 1 600 pcs/mm Class 2 For color temp. compensation Items 45mm NCB11 25mm GX1 GIF 25mm For light dispersion 45mm Lemon skin 25mm Diffuser For B/W photography 45mm 45mm For B/W photography For DIC For color photography Remarks
25
Accessories for ECLIPSE/OPTIPHOT Series
Eyepiece Tubes
LV-TI3 TT BT UWTT Y-TF2 Y-TT2 LV-TT2
L2-TT/ L2-TT2 BI TI Y-TB C-TE
For OPTIPHOT series For ECLIPSE series
For OPTIPHOT Series

Eyepiece tubes Image F.O.V. Inclination Beam split ratio (eyepiece: photo) Adjustable interpupillary distance 51-80mm 51-80mm 51-75mm 51-80mm 51-75mm
For ECLIPSE Series

Model Eyepiece tubes Image F.O.V. Sleeve diameter 30mm 30mm 30mm 30mm 30mm 30mm 30mm Beam-split ratio (eyepiece: photo) 100: 0, 20: 80 100: 0, 0: 100 100: 0, 0: 100 100: 0, 0: 100, 20: 80 100: 0, 20: 80 ISO photo port Option Option Option Option Detachable
LV-TT2 Tilting trinocular tube LV-TI3 Trinocular tube Y-TF2 Y-TT2 C-TE Y-TB Trinocular tube F UW Trinocular tube T UW Ergonomic binocular tube EX Binocular tube B
Erect Erect
22/25 22/25
Ultra-wide tilting trinocular tube UWTT Erect Tilting trinocular tube TT Trinocular tube TI Tilting binocular tube BT Binocular tube TI Erect Erect Erect Inverted
25 20 20 20 20
10-30 10-30 20 10-30 30
100: 0, 20: 80 100: 0, 20: 80 100: 0, 0: 100
Inverted 22/25 Inverted 22/25 Inverted 22 Inverted 22 Erect 22/25
L2-TT2 Ultra-wide tilting trinocular tube L2-TT2 (ESD-applied) L2-TT Ultra-wide tilting trinocular tube L2-TT
Erect
22/25
30mm
100: 0, 0: 100
Detachable
ECLIPSE Stages
For ECLIPSE L300 series For ECLIPSE L200 series For ECLIPSE LV series For ECLIPSE LV series 14 x 12 Stage (Cross travel: 354 x 302mm; ESD-applied) 8 x 8 Stage (Cross travel: 205 x 205mm) LV-S6 6 x 6 Stage (Cross travel: 150 x 150mm, ESD-applied)
For ECLIPSE LV series
LV-S64 6 x 4 Stage (Cross travel: 150 x 100mm, ESD-applied, except glass plate)
Stage Holders
Wafer holders for OPTIPHOT: 200mm, 150mm, 125mm, 100mm, 150mm holder frame Wafer holders for ECLIPSE L200 series: 200mm, 150mm Wafer holders for ECLIPSE LV150 series: 150mm
Mask holders 150mm, 125mm (Use 6-inch holder frame with 8 x 8 stage for ECLIPSE L200 series and OPTIPHOT 200.)
LV-S32 3 x 2 Stage (Cross travel: 75 x 50mm, ESD-applied, except glass plate)
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Focusing Modules LV-IMA (motorized)/LV-IM (manual)/LV-FMA (motorized)/LV-FM (manual)
Four types of new focusing modules are available. For incorporation into system: LV-IMA IM Module A (motorized) LV-IM IM Module (manual) For incorporation into microscope: LV-FMA FM Module A (motorized) LV-FM FM Module (manual) The new offerings complement Nikons rich variety of modular unitssuch as the LV-UEPI2A Motorized Universal Illuminator, LV-NU5A Motorized Universal Nosepiece, LV-NU5AC Motorized Universal Nosepiece with centering mechanism, and LV-ECON E Controllerto give you greater flexibility in configuring a system best suited to your purpose.
LV-IMA IM Module A (motorized)
LV-IM IM Module (manual)
LV-FMA FM Module A (motorized)
LV-FM FM Module (manual)
Specifications
LV-IMA (motorized)/LV-IM (manual)/ LV-FMA (motorized)/LV-FM (manual)
Main body LV-IMA IM Module/LV-FMA FM Module A (motorized) Motorized nosepiece up/down section: stroke 20mm, resolving power 0.025m, max. speed 2.5mm/sec. (resolving power 0.05m) LV-IM IM Module/IV-FM FM Module (manual) Coarse/fine focus knob: stroke 30mm, coarse 5.2mm/rotation, fine 0.1mm/rotation (in 1mm increments) C-N6 Nosepiece (brightfield, sextuple), L-NBD5 Nosepiece (bright/darkfield quintuple, with flare prevention), L-NU5 Nosepiece (universal quintuple, with flare prevention), LVNU5A Nosepiece (high-durability motorized universal quintuple, with flare prevention), LV-NU5AC Nosepiece (high-durability motorized universal quintuple, with flare prevention and centering mechanism) 12V-50W high-intensity halogen lamp; Field (centerable) and aperture diaphragms synchronized with B/D changeover; 25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer insertable 12V-50W high-intensity halogen lamp; Precentered mercury-fiber illuminator Intensilight; Centerable field and aperture diaphragms synchronized with B/D changeover; 25mm filter (NCB11, ND16, ND4) insertable; 2 epi-filter cubes insertable; Polarizer/analyzer/ plate insertable, excitation balancer insertable 12V-50W high-intensity halogen lamp; Precentered mercury-fiber illuminator Intensilight; Motorized operation/control of illumination changeover turret; Motorized aperture diaphragm (centerable, automatically optimized for selected objective)/field diaphragm (centerable) synchronized with B/D changeover; 25mm filter (NCB11, ND16, ND4) insertable; 2 epi-filter cubes insertable; Polarizer/analyzer/ plate insertable, excitation balancer insertable LV-TI3 Trinocular (erect image, F.O.V. 22/25), LV-TT2 Tilting Trinocular (erect image, F.O.V. 22/25), Y-TF2 Trinocular (inverted image, F.O.V 22/25), Y-TT2 Trinocular (inverted image, F.O.V 22/25), TV tube lens unit 0.5x, 1x CFI eyepiece series CFI60 series 1000-10V, within 0.2 sec. LV-IMA: approx. 3.7kg, LV-IM: approx. 3.5kg, LV-FMA: approx. 6.0kg, LV-FM: approx. 5.8kg,
Nosepiece
Episcopic illuminator LV-UEPI Episcopic illuminator LV-UEPI2
Episcopic illuminator LV-UEPI2A Eyepiece tube Eyepiece Objective lens Electrostatic decay time Weight (main body)
LV-ECON Controller
Interface Motorized nosepiece: LV-NU5A, LV-NU5AC (with centering mechanism) Episcopic illuminator: LV-UEPI2A, LV-EPILED, Precentered mercury-fiber illuminator Intensilight Motorized focusing module: LV-IMA, LV-FMA Halogen lamphouse (powered by TE2-PS 100W power source): LV-LH50PC PC (USB1.1) *Software Development Kit (SDK) is available.
27
Interferometry Equipment TI/DI
The Michaelson (TI) and Mirau (DI) types are available. Configured with the LV-UEPI Universal Epi-illuminator ESD, these interferometry units can check minute unevenness of a sample surface by observing the change in light intensity, interference colors or fringes through micrometer eyepieces or cameras. Because measurements are taken completely non-contact, it eliminates the danger of damaging the
Specifications
Eyepieces CFN Filar Micrometer Eyepiece Objectives Illuminator Interference filter Stage Measurement range CFI 10x (F.O.V. 22), CFI UW 10x (F.O.V. 25) 10xA (used with ME600 UW adapter) CF Plan EPI DI10x, 20x, 50x, CF Plan EPI TI 2.5x, 5x 12V-100W halogen lamp 25mm (for 100W illumination) Tilting stage (used with YM tilting stage adapter) 0.05 to 2m Eyepieces Items Objectives CF Plan EPI TI 2.5x *2 CF Plan EPI TI 5x *2 CF Plan EPI DI 10x CF Plan EPI DI 20x CF Plan EPI DI 50x CFI 10x (2) CFI UW 10x (2) Interference filter 25mm (no frame) CFN filar micrometer eyepiece 10xA UW adapter (exclusively for ME600L) YM tilting stage adapter *1 Only TI objectives are usable with the LV150 Series. *2 Used with YM TI objective adapter.
sample surface. Also, as interference fringes can be seen with white light, 0-level black or white interference fringes can be used as a base for deciding fringe numbers. Can also be used for ultra-wide field (F.O.V. 25) applications in addition to standard field of view (F.O.V. 22).
Configurations
Configurations Standard (wide field) 10/20/50x Set Ultra-wide field 10/20/50x Set
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Compact Reflected MicroscopesCM Series Compact and lightweight, best-selling mount-type microscopes
These microscopes boast high cost performance and take advantage of the excellent performance of Nikons industry-proven microscope objectives. They are mounted onto equipment that requires highprecision image processing or high-definition alignment, to serve as sensors in manufacturing lines. The L Type that is compatible with CFI60 objectives is newly available, as are interchangeable parts for 8mm light guides (standard equipment).
Specifications
Model Camera mount Tube lens magnification Compatible objectives Illuminator system Attachment points Dimensions (W x D x H) Weight (Approx.) 40 x 40 x 186.5mm 410g 3 40 x 40 x 224.5mm 440g 40 x 40 x 125.5mm 290g Objectives for measuring microscopes CM-5A CM-10A/CM-10L C-mount (ENG-mount possible with option) 1x 0.5x 1x CM-20A/CM-20L CM-30A/CM-30L C-mount 0.4x/1x CM-70L
The direction of the light guide fixing screw can be changed to the desired direction by the user. Nikon welcomes consultation from users regarding the mounting of these microscopes on equipment, or other matters.
CFI Plan EPI objectives/CFI60 objectives Koehler illumination (high-grade telecentric illuminator) 4 40 x 40 x 107.3mm 400g 3 40 x 117 x 156.1mm 690g
Dimensional Diagram
CM-5A
C-mount
Image formation plane
CM-10A/CM-10L
C-mount port C-mount
Image formation plane
C-mount port
4-M4 depth 5 (installation screw)
Fiber insertion hole
Objective port Fiber insertion hole 126 (same focal length)
Objective port CM-10A : 45 CM-10L : 60 Sample side
Sample side
CM-20A/CM-20L
Image formation plane C-mount
CM-30A/CM-30L
C-mount port C-mount 4-M4 depth 5 (installation screw)
Image formation plane C-mount port
4-M4 depth 5 (installation screw) Fiber insertion hole
Fiber insertion hole
Objective port (same focal length) Objective port CM-20A : 45 CM-20L : 60 CM-30A : 45 CM-30L : 60 Sample side
Sample side
CM-70L Fiber light Guide

25 (15) 10 (10) 25 3 20 15 10 3 10 5 fiber handle
Image formation plane (0.4x) C-mount
Image formation plane (1x) C-mount
C-mount port 7
Fiber transformer side
CM side
Setting screw allowance
4-M4 depth 5 (installation screw) Fiber insertion hole
Length of fiber guide: 1m/1.5m/2m/5m. Custom lengths are also available.
Objective port
8 Light guide adapter

8 26.3 (light guide installation hole) 21
Sample side
60 (same focal length)
(same focal length)
(same focal length)
Unit: mm
29
Objective Lenses
The CFI60 system combines the CF design with infinity optics, while adopting a wide 60mm parfocal distance for their objectives. The result: longer working distances and high N.A.s, with crisp and clear images that offer high contrast yet minimal flare. The ideal optical system combines Nikons renowned CF optics with infinity optics. In a major breakthrough, flare is dramatically reduced for better resolution and increased sharpness.
CFI Objectives
Type CF E Plan EPI Mag. 5x 10x N.A. 0.10 0.25 0.40 0.75 0.90 0.045 0.075 0.13 0.3 0.46 0.8 0.95 0.95 0.95 0.95 0.95 0.1 0.25 0.4 0.75 0.9 0.13 0.3 0.46 0.65 0.8 0.9 0.9 0.9 0.9 0.9 0.13 0.3 0.46 0.8 0.9 0.4 0.55 0.8 0.21 0.35 0.45 0.73 0.4 0.55 0.8 0.4 0.55 0.8 0.3 0.4 0.55 0.075 0.13 0.4 0.55 0.8 W.D. (mm) 20.0 12.5 3.8 0.48 0.23 3.6 8.8 22.5 16.5 3.1 0.54 0.3 0.35A 0.32 0.2 0.2 12.0 7.0 3.1 0.54 0.34 10.0 6.5 3.1 1.0 0.54 0.39 0.42 0.4 0.29 0.3 10.0
CFI60 Objectives
Type CFI L Plan Epi CFI LU Plan Fluor Epi Magnification 2.5x 5x 10x 20x 50x 100x CFI LU Plan Apo Epi 100x 150x CFI L Plan Apo Epi WI Brightfield type CFI LU Plan Epi ELWD 150x 20x 50x 100x CFI L Plan Epi SLWD 20x 50x 100x CFI L Plan Epi CR (with coverglass correction 0-1.2mm) (with coverglass correction 0-1.2mm) (with coverglass correction 0-0.7mm) (with coverglass correction 0.6-1.3mm) CFI LU Plan Fluor BD 20x 50x 100x 100x 5x 10x Bright/darkfield type 20x 50x 100x CFI LU Plan BD ELWD 20x 50x 100x CFI LU Plan Apo BD 100x 150x CFI LU Epi P Polarizing type 5x 10x 20x 50x 100x N.A. 0.075 0.15 0.30 0.45 0.80 0.90 0.95 0.95 1.25 0.40 0.55 0.80 0.35 0.45 0.70 0.45 0.7 0.85 0.85 0.15 0.30 0.45 0.80 0.90 0.40 0.55 0.80 0.90 0.90 0.15 0.30 0.45 0.80 0.90 W.D. (mm) 8.8 CF Plan EPI Achromat Brightfield type 23.5 17.3 4.5 1.0 1.0 0.4
20x 50x 100x 1.5x *1 2.5x 5x 10xA 20x 50x 100xA 0.3 CF Plan EPI Apochromat 0.25 100x 13.0 150xA 10.1 200x 3.5 CF E Plan BD 24.0 10x 17.0 20x 6.5 50x 10.0 to 10.9 100x 3.0 to 3.9 0.85 to 1.2 0.95 to 1.3 18.0 15.0 4.5 1.0 1.0 13.0 9.8 3.5 0.51 0.42 23.5 17.3 4.5 1.0 1.0 Long working distance type CF Plan EPI SLWD CF Plan EPI ELWD CF Plan BD DIC CF Plan BD Achromat 5x 10xA Bright/darkfield type 20x 40x 50x 100xA CF Plan BD Apochromat 50x 100x 150x 200x 5x 10xA 20xA 50x 100xA 20xA 50x 100x 10x 20xA 50xA 100x CF Plan BD ELWD 20x 50x 100x CF Plan BD ELWD DIC 20x 50x 100x CF Plan EPI DI for interferometry 10xA 20x Special use type 50x CF Plan EPI TI for interferometry 2.5x 5x CF Plan LCD CR for inspecting LCDs (With cover glass correction 0.6-1.2mm) 20x 50x 100x 5x 50x
3.1 0.54 0.39 11.0 8.7 2.0 20.3 20.5 13.8 4.7 11.0 8.2 2.0 11.0 8.2 2.0 7.4 4.7 3.4 10.3 9.3 10.11-10.54 7.71-8.15 1.10-1.12
CF Objectives
Type Long working distance type Bright/darkfield type CF M Plan Magnification 5x *2 10x *2 CF M Plan DIC CF M Plan Apo Bright/darkfield type CF M Plan LWD CF M Plan SLWD 10x *2 150x * 20x *2 100x *2
2
N.A. 0.10 0.25 0.25 0.95 0.40 0.75
W.D. (mm) 20.0 9.0 9.0 0.2 6.0 4.7
*1 Use in conjunction with analyzers and polarizers. Some peripheral parts cannot be covered with widefield-type eyepiece lenses having more than 20 F.O.V. *2 The production of this product has been discontinued and only objectives in inventories are available for purchase.
6.5
30
Eyepiece Lenses CF/CFI Eyepieces
Type Name/Mag. CFWN 10x High eye-point/widefield CFWN 15x CFWN 10xM CFWN 10xCM CFI UW 10x High eye-point/ultra-widefield (For Optiphot, Epiphot) F.O.V. 20 14 20 20 25 Focal length (mm) 25 Diopter adjustable from 8 to +5. 21mm micrometer insertable. 16.7 25 25 25 Photomask included. Diopter adjustable from 7 to+4. Crosshairs and micrometers included. Diopter adjustable from 7 to +4. Diopter adjustable from 8 to +5. For OPTIPHOT and ECLPISE L300, L200, L150 series and ME600L. For CF Infinity optics. Diopter adjustable from 8 to +5. Photomask included. For OPTIPHOT and ECLIPSE L300, L200, L150 series and ME600L. For CF Infinity optics. Diopter adjustable from 8 to +5. Diopter adjustable from 8 to +5. Photomask included. ESD-applied Diopter adjustable from 7 to +4. Diopter adjustable from 8 to +5. Diopter adjustable from 8 to +5. Crosshairs and micrometers included. Remarks
CFI UW 10xM
25
25
CFI 10x High eye-point/ultra-widefield (For ECLIPSE series) CFI 10xM L-W10xESD CFI 12.5x CFI 15x CFI 10xCM PL 2x PL 2.5xN PL 4x Photomicrography projection lens PL 5x PLI 2.5x PLI 4x PLI 5x
22 22 22 16 14.5 22 21.6 18 11.8 9.4 18 11.8 9.4
25 25 25 20 16.7 25 78.5 66.4 35 28.5 66.4 35 28.5
For FX-III series photomicrographic systems.
Eyepiece/Objective-Related Accessories Eyepiece Micrometer

Configured with an objective micrometer, this accessory is used primarily to check objective magnifications. Calibrated in hundredths of 10 millimeters.
CFN Filar Micrometer Eyepiece 10xA

This accessory is used to measure the sample size by combining it with objectives of 10x to 100x magnifications.
10 : 100
0 10 20 30 40 50 60 70 80 90 100
Main scale Sub scale 0.1mm/calibration; Stroke: 10mm 0.01mm/calibration
* UW eyepiece tube adapter is an option.
Objective Micrometer
Configured with an eyepiece micrometer, this accessory is used to check objective magnifications. Calibrated in hundredths of a millimeter.
Plotting Objective Micrometer

Calibrated in 0.01mm grids.
31
Inverted Metallurgical Microscopes EPIPHOT TME300U/TME200
Inverted microscopes have the following benefits over upright microscopes: 1. Not necessary to move the stage while changing workpieces. 2. Can easily measure large workpieces because there is no limitation on the height of the workpiece.
Specifications
Model Focusing system Light distribution TME300U TME200 Stroke: 4mm, Coarse: 4mm/rotation, Fine: 0.1mm/rotation, Scale: 1m Observation: side port = 100:0/20:80 Observation: photo = 100:0/20:80 35mm: large format = 100:0/0:100 Intermediate magnification Scale 0.8-2x zooming (stops with a click at 1.0x, 1.25x, 1.5x)
EPIPHOT TME300U
EPIPHOT TME200
Nosepiece Illuminator Eyepiece tube
5/10/10/20/50/100x scale for objective lens, Grain reticle (Austenite reticles No. 1-8 and Grid: 0.5mm steps, 20 for horizontal/vertical each), imprinted at primary image plane Quintuple brightfield nosepiece, Brightfield/darkfield nosepiece, Universal nosepiece 12V-100W halogen lamp (standard), 12V-50W halogen lamp, Hg/Xe lamp Dedicated binocular eyepiece tube Binocular Tube X2B, Trinocular Tube X2T
Stage Photomicrography
Rectangular stage with universal joint, Cross travel: 70mm x 50mm Built-in (Auto, 60% integrated FX-III series photomicrographic average, control box stands alone system can be mounted via from main body), 35mm/large format trinocular eyepiece tube selectable CFWN 10x (F.O.V. 20) CFWN 10xEPM (F.O.V. 20)
Eyepieces
Objectives
TME300U-BD
CF IC EPI Plan, CF IC EPI E Plan, CF IC BD E Plan, CF IC BD Plan, CF IC BD Plan DIC
TME200-BD
Compact Inverted Microscope ECLIPSE MA100

The ECLIPSE MA100 is a compact-size inverted microscope specially designed for reflected illumination. This instrument was developed for brightfield observation and simple polarizing observation. Thanks to its compact, durable design and simple operation in addition to its highcontrast observation and image capture, it is excellent for metallographic and electronic components as well as use at product sites in the materials field and quality control departments. Magnification range: 25-2250x (Depending on combination of eyepiece and objective lenses)
Specifications
Optics Observation image Observation method CFI60 optics (EPI series) Upright back image
Focusing section
Vertical action revolver (fixed stage) Single-axis coarse/fine adjustment handle with 8.5mm stroke (coarse adjustment of 37.7mm per turn, fine adjustment of 0.2mm per turn) Brightfield 5-position nosepiece 170 x 230mm (includes two holders for acrylic samples, 30mm aperture, crescent aperture) Can be combined with MA-SRSH1 Universal Specimen Holder or MA-SH3 Specimen Holder 3
Nosepiece Stage MA-SP Plain Stage
TI-SM Mechanical 126 x 80mm stroke; handle can be attached on the right or left side Stage CH of the stage Can be combined with MA-SH1 Specimen Holder 1, or MA-SH2 Specimen Holder 2 or C-HU Universal Holder MA-SR 50 x 50mm stroke (includes two sample holders with 20mm and Rectangular Stage 40mm apertures) and handle fixed on right side Can be combined with MA-SRSH1 Universal Specimen Holder or MA-SH3 Specimen Holder 3 Illuminator Internal power supply 6V 30W Halogen Lamp (long-life type) Built-in condenser (lever operated), 25mm filter (includes NCB11 and ND4) can be inserted Built-in mirror type, 45 depression angle and 50mm to 70mm interpupillary adjustment 96VA 228 x 663 x 382mm Approx. 9kg
Eyepiece tube
Max. power consumption Dimensions (W x D x H) Weight
Brightfield and simple polarizing (when using MA-P/A Simple Polarizing Set)
32
IC Inspection Wafer Loaders NWL-860 Series NWL860TMB/TMB-SP/INX-TMB/TM/T
A wide variety of models are available, including those for backside macro inspections, dedicated macro inspections, a model with a stainless-steel body, and another with an SMIF elevator.
Specifications
NWL860TMB/TMB-SP/INX-TMB/TM/T Wafer size Wafer cassette Inspection mode 150mm to 200mm (conforms to both SEMI and JEIDA)* Fluoroware PA182-60MB, PA192-80M type (holds 25 or 26 wafers) 1. Micro inspection, 2. Pattern-side macro inspection, 3. Backside periphery macro inspection, 4. Backside center macro inspection (1-4 with TMB, 1-2 with TM, 1 with T series) By non-contact/transmitted-type sensor. Wafer angle before and after inspection can be specified in 90 increments Dedicated stage (rotatable 360; with vacuum chuck) Nikon ECLIPSE L200A/L200 535 x 625 x 360mm/786 x 752 x 442mm (INX series) (with IC Inspection Microscope): 900 x 620mm/1450 x 800mm (INX series) Approx. 50/60kg (INX series)
Orientation flat/notch detection
Stage Compatible microscopes Dimensions Main unit (INX series) Footprint (W x D)
NWL860INX-TMB+ECLIPSE L200
Weight
* For INX series, a 150mm type and a 200mm type are separately available. Class-1 laser equipment For details, see the corresponding catalog. (Catalog list on page 2)
NWL860TMB-SP+ECLIPSE L200
IC Inspection Wafer Loaders NWL641 Series NWL641M/641

Specifications
Model Wafer size Wafer cassette Inspection mode NWL641M NWL6411 100mm to 150mm (conforms to both SEMI and JEIDA) Fluoroware H-BAR type (holds 25 wafers) Micro inspection, Pattern-side macro inspection Micro inspection
Orientation flat/notch detection Stage Compatible microscopes Dimensions Main body (W x D x H) Table (W x D) Weight
By non-contact/transmitted-type sensor. Wafer angle before and after inspection can be specified in 90 increments Dedicated stage (rotatable 360; with vacuum chuck) Nikon ECLIPSE LV150A/LV150/L150A/L150
266 x 685 x 245mm 598 x 730mm Approx. 23.5kg
246 x 655 x 245mm
Approx. 21.0kg
Class-1 laser equipment (Output 40W, Wavelength 780nm) For details, see the corresponding catalog. (Catalog list on page 2)
NWL641M
33
Multi-purpose Zoom Microscope MULTIZOOM AZ100
This multi-purpose zoom microscope has the combined advantages of a stereoscopic microscope with a wide field of view and a long working distance, and an industrial microscope boasting high-resolution images. It enables on-axis observation and image capture in the macro region and allows a wide array of observation methods suited to specific samples and applications. It offers Nomarski DIC and fluorescence observation with episcopic illumination, oblique illumination, and simple polarizing observation with diascopic illumination. It also provides for simultaneous mounting of diascopic DIC and epifluorescence attachments. Magnification range: 5-400x (Depending on combination of eyepiece and objective lenses)
Specifications
Total magnification 5-400x (Depending on eyepiece and objective used) (When coaxial episcopic illuminator is attached: 6.25-500x) 1-8x (zoom ratio: 8:1) AZ-TE100 Ergonomic Trinocular Tube 100 (beamsplit ratio 100:0/0:100, 0.6x reduction optics built into photo port) AZ-TE80 Ergonomic Trinocular Tube 80 (beamsplit ratio 100:0/20:80, 0.6x reduction optics built into photo port) AZ-TP DSC Tube 0.6x (direct tube type, 0.6x reduction optics built in) 0-30 (eyepiece tube AZ-TE100/AZ-TE80) 50 to 75mm (eyepiece tube AZ-TE100/AZ-TE80)
Zoom range Eyepiece tubes
Eyepiece inclination Interpupillary distance adjustment Eyepiece Focus mount adapters
AZ-W 10x (F.O.V. 22) AZ-FM AZ Focusing Mount Adapter (for AZ stand) AZ-SMZ SMZ Focusing Mount Adapter (for SMZ stand) AZ-LV LV Focusing Mount Adapter (for LV-IMA/LV-IM) AZ-STE Episcopic Stand/AZ-STD Diascopic Stand: (Focus mount section: focusing stroke, 85mm; coarse, 18.5mm/rotation; fine, 3.27mm/rotation Stage focus section: focusing stroke, 10mm; coarse, 37.7mm/rotation ; fine, 0.27mm/rotation) C-PS160 Plain Stand, C-BD Diascopic Bright/Darkfield Stand AZ-STGE EPI Stage (150 x 150mm stroke) AZ-STGD DIA Stage (150 x 100mm stroke) AZ-NP3 Triple Nosepiece AZ-NPS Single Nosepiece AZ-FLDIC FL-DIC Prism Holder (when simultaneously mounting epifluorescence and diascopic DIC attachments) AZ-Plan Apo 0.5x (NA: 0.05/W.D. 54mm) AZ-Plan Apo 1x (NA: 0.1/W.D. 35mm) AZ-Plan Fluor 2x (NA: 0.2/W.D. 45mm) AZ-Plan Apo 4x (NA: 0.4/W.D. 20mm) AZ-Plan Fluor 5x (NA: 0.5/W.D. 15mm) AZ-ICI Coaxial Episcopic Illuminator (C-FI115/230 Fiber Illuminator: 12V 100W halogen lamp); device magnification: 1.25x AZ-LED LED Ring Illuminator C-FID Plastic Fiber Optics Bifurcated Illuminator (C-FI115/230 Fiber Illuminator: 12V 100W halogen lamp) C-HGFI HG Precentered Fiber Illuminator (130W mercury lamp), C-HGFIE HG Precentered Fiber Illuminator (motorized, 130W mercury lamp) Lamphouse HMX-4B (100W mercury lamp) Reflected light: coaxial illumination, Nomarski DIC, fluorescence (up to four filter cubes are mountable), and LED illumination observation Transmitted light: brightfield, Nomarski DIC, simple polarizing, and oblique illumination observation Coaxial illumination configuration: 26kg, epi-fluorescence + diascopic DIC configuration: 28kg
Stands
Stages
Objective lens mounts
Objectives
Illuminators
Light source for epifluorescence observation
Observation methods
Weight
34
Stereoscopic Zoom Microscope SMZ1500
The SMZ1500 represents a new-century standard for stereoscopic zoom microscopes created by Nikon after a total review of specifications and performances from the bottom up and the application of Nikons industry-leading optical technologies. Magnification range: 3.75-540x (Depending on combination of eyepiece and objective lenses)
Specifications
Optical system Total magnification Parallel-optics zoom system 3.75-540x (Depending on eyepiece and objective used) (When coaxial episcopic illuminator is attached: 5.6506x) 20 (Standard Binocular and Low-Eye-level Binocular), 0-30 (Tilting Binocular) 48 to 75mm C-W10x (F.O.V. 22), C-W15x (F.O.V. 16), C-W20x (F.O.V. 12.5), C-W30x (F.O.V. 7) 0.75 to 11.25x 15 : 1 P-HR Plan Apo 0.5x, 1x, 1.6x (Can be used with diascopic illumination only.)
Eyepiece inclination
Interpupillary distance adjustment Eyepieces (with diopter adjustment)
Zoom range Zoom ratio Objectives
SMZ1500-1

The SMZ1000 offers the highest levels of optical performance, expandability, ergonomic operability, and cost efficiency. Magnification range: 4-480x (Depending on combination of eyepiece and objective lenses)
Specifications
Optical system Total magnification Parallel-optics zoom system 4-480x (Depending on eyepiece and objective used) (When coaxial episcopic illuminator is attached: 6-540x) 20 (Standard Binocular and Low-Eye-level Binocular), 0-30 (Tilting Binocular) 48 to 75mm C-W10x (F.O.V. 22), C-W15x (F.O.V. 16), C-W20x (F.O.V. 12.5), C-W30x (F.O.V. 7) 0.8 to 8.0x 10 : 1 P-Plan Apo 0.5x, 1x; P-ED Plan Apo 1.5x, 2x; P-Plan 1x; P-Achro 0.5x; P-ERG Plan 1x ERGO (Can be used with zoom magnification 1x or higher.)
Zoom range Zoom ratio Objectives
SMZ1000-1
35
Ergonomics are incorporated into every aspect of the SMZ800. It offers image sharpness on a par with upper-class microscopes and expandability at an affordable price. Magnification range: 5-378x (Depending on combination of eyepiece and objective lenses)
Specifications
Optical system Total magnification Parallel-optics zoom system 5-378x (Depending on eyepiece and objective used) (When coaxial episcopic illuminator is attached: 7.5-425x) 20 (Standard binocular tube/low-eye-level binocular tube), 0-30 (tilting binocular tube) 48 to 75mm
Interpupillary distance adjustment
Eyepieces (with diopter adjustment) C-W10x (F.O.V. 22), C-W15x (F.O.V. 16), C-W20x (F.O.V. 12.5), C-W30x (F.O.V. 7) Zoom range Zoom ratio Objectives 1 to 6.3x 6.3 : 1 P-Plan Apo 0.5x, 1x; P-ED Plan 1.5x, 2x; P-Plan 1x; PAchro 0.5x; P-ERG Plan 1x ERGO
SMZ800-1
Stereoscopic Zoom Microscopes SMZ645/660

The SMZ645/660 represents a basic model in the SMZ series, developed by completely renewing optical performance and operability. It offers all the advantages of airtight, anti-mold and anti-electrostatic design. Magnification range: 4-300x (Depending on combination of eyepiece and auxiliary objective lenses)
Specifications
Model Optical system Total magnification Eyepiece inclination Interpupillary distance adjustment Eyepieces (with diopter adjustment) Zoom range Zoom ratio Auxiliary objectives Working distance Antistatic function Airtight construction SMZ645 Twin zooming objective SMZ660
45 52 to 75mm
60
C-W10x (F.O.V. 22), C-W15x (F.O.V. 16), C-W20x (F.O.V. 12.5), C-W30x (F.O.V. 7) 0.8 to 5x 6.3 : 1 AL0.5x (W.D. 211mm), AL0.7x (W.D. 150mm), AL1.5x (W.D. 61mm), AL2x (W.D. 43.5mm), AL ERG 0.77-1.06x (W.D. 102-48mm) 115mm Discharge time: less than 0.2 sec. JIS dew prevention standard Type 1 compliant
SMZ660
SMZ645
4-300x (Depending on eyepiece and auxiliary objective used)
36
Stereoscopic Zoom Microscope SMZ-1 ESD
The SMZ-1 offers legendary Nikon stereo performance at an affordable price. Magnification range: 3.5-90x (Depending on combination of eyepiece and auxiliary objective lenses)
Specifications
Optical system Total magnification Twin zooming objective 3.5-90x (Depending on eyepiece and auxiliary objective used) 60 54 to 75mm C-W10x (F.O.V. 22), SM E15xA (F.O.V. 14), SM E20xA (F.O.V. 12), C-W30x (F.O.V. 7) 0.7 to 3x 4.28 : 1 AL0.5x (W.D. 211mm), AL0.7x (W.D. 150mm) 100mm
Eyepiece inclination Interpupillary distance adjustment Eyepieces (with diopter adjustment)
Zooming range Zooming ratio Auxiliary objectives Working distance
SMZ-1
Stereoscopic Zoom Microscope SMZ-2

The SMZ-2 features high-resolution optics perfect for inspection, assembly and measurement in the electronics industry. Magnification range: 4-120x (Depending on combination of eyepiece and auxiliary objective lenses)
Specifications
Optical system Total magnification Twin zooming objective 4-120x (Depending on eyepiece and auxiliary objective used) 45 56 to 75mm 10x (F.O.V. 23), 15x (F.O.V. 14), 20x (F.O.V. 12.5), C-W30x (F.O.V. 7) 0.8 to 4x 6.3 : 1 77.5mm
Zooming range Zooming ratio Working distance
SMZ-2
37
Stereoscopic Zoom Microscope SM-5
A standard stereoscopic microscope featuring fixed magnification. With a 45 eyepiece tube inclination, the SM-5 is ideal for use on a desktop. Magnification range: 10-60x (combination of eyepiece and objective lenses)
Specifications
Optical system Total magnification Fixed type 20x: standard (with 2x objective), 10x-60x (depending on the eyepiece and auxiliary objective used) 45 56 to 75mm SM E10xA (standard), SM E15xA, SM E20xA, C-W30x 2x 0.5x, 0.7x 100mm (standard)
Eyepiece inclination Interpupillary distance adjustment Eyepieces Objectives Auxiliary objectives Working distance
SM-5 (Clemmer is optional)
38
Accessories for Stereoscopic Microscopes
Eyepiece Tubes/Eye-level Riser
e q
SM-S4L 4 x 4 Stage
1. Standard binocular eyepiece tube (inclination 20) 2. Low eye-level eyepiece tube (inclination 20) 3. Tilting eyepiece tube (inclination 0-30) 4. Eye-level riser: 25mm
SMZ1500 SMZ800 SMZ1000 SMZ1500 SMZ645/660 SMZ1000 SMZ-1 SMZ800
C-PS160 Plain Stand
C-PS/C-PSC Plain Stands
Used in combination with an optional extension pillar, the 4 x 4 Stage allows precise movement in the XY direction, facilitating fine alignment during highmagnification observations under episcopic illumination. (Although mountable on a diascopic stand, it is not suitable for observation as it blocks illumination.)
Beam Splitters (P-IBSS2, P-IBSD2)

SMZ1500 SMZ800 SMZ1000
SMZ645 + C-PS Plain Stand SMZ1500 SMZ645/660 SMZ1000 SMZ-1 SMZ800 SMZ1000 SMZ645/660
SMZ645 + C-PSC Plain Stand SMZ800 SMZ-1
This stand features a thin design, a large 180mm stage plate and a long 160mm distance between the pillar and optical axis to boost your working efficiency.
The narrow design offers a comfortable work area and allows easy handling of samples. The C-PSC stand has a small base that saves desk space. (The C-PSC is for SMZ645 and 660 only.)
Using a beam splitter and adapter, an FX-III series photomicrographic system, CCTV camera, or a digital still camera can be attached. The P-IBSD2 Beam Splitter D2 has two ports, allowing one photomicrographic system and one CCTV camera to be mounted at the same time.
C-DS Diascopic Stand
C-DSS Diascopic Stand

P-IBSS2
P-THSS Teaching Head

This teaching head enables the simultaneous observation of the same sample by two persons, making it ideal for teaching and educational purposes.
SMZ1000 SMZ645/660 SMZ800 SMZ-1 SMZ1500 SMZ645/660 SMZ1000 SMZ-1 SMZ800
This stand features a hand rest that ensures comfortable operation and a large-diameter stage glass.
This stand accommodates a light source and its power supply in a simple design. The angle of the built-in mirror can be easily adjusted with a knob.
P-IDT Drawing Tube

C-DSD Diascopic Stand Stereoscopic Zoom Microscopes
C-BD Diascopic Bright/ Darkfield Stand
The drawing tube enables the drawing of images while viewing. Within the visual field, the drawing is overlaid on top of the image, allowing the user to draw the image simply by tracing it.
P-FLA Epi-fluorescence attachment

The P-FLA permits quick switching between the fluorescence and brightfield methods. By adding an optional photo port, users can capture images without using a beam splitter.
SMZ1500 SMZ645/660 SMZ1000 SMZ-1 SMZ800 SMZ1500 SMZ645/660 SMZ1000 SMZ-1 SMZ800
The high-end C-DSD Diascopic Stand features condenser lenses that can be switched between low and high magnifications. A newly developed Oblique Coherent Contrast (OCC) Illumination system* allows colorless and transparent samples to be observed in high relief. *Patent pending.
This stand uses a seven-sided toroidal mirror* to substantially reduce stray light, creating high S/B ratio darkfield images. *Patent pending.
In addition, the SMZ-U Large Stand is also available.
: compatible microscopes
39
P-ICI2 Coaxial Episcopic Illuminator
This illuminator uses a 12V100W fiber-optics light source to deliver bright illumination over the entire sample surface. The thickness of the 1/4 plate has been reduced, minimizing spherical aberrations in high N.A. objectives. *Zoom magnifications that can be used vary depending on objective. For details, consult a Nikon representative.
G-LS Episcopic Illuminator (6V-10W halogen)

This illuminator offers sufficient brightness with reflection light originating from a 6V-10W halogen lamp. It can be mounted on the C-PS Plain Stand where its illumination angle can be easily adjusted.
SMZ1500
SMZ1000
SMZ800
SMZ1500
SMZ1000
SMZ800
SMZ645/660
SMZ-1
C-FIR Fiber-optics Ring Illuminator (12V-100W halogen)

This illuminator incorporates a 12V-100W halogen lamp with reflection mirrors. It supplies conical-shaped light through an optical fiber from above the sample to its center, minimizing unwanted shadow. It is ideal for photomicrography.
G-EIA Flexible Arm

This arm can be flexibly bent so that the G-LS Episcopic Illuminator can be set to the appropriate position.
SMZ1500
SMZ1000
SMZ800
SMZ645/660
SMZ-2
SM5
SMZ-1
SMZ1000
SMZ800
SMZ645/660
SMZ-1
C-FID Fiber-optics Bifurcated Illuminator (12V-100W halogen)

This illuminator incorporates a 12V-100W halogen lamp with reflection mirrors to project light beams onto the desired position via two optical-fiber arms. The direction and angle of the illumination can be changed with simple adjustments of these flexible arms.
SMZ1500 SMZ1000 SMZ800 SMZ645/660 SMZ-2 SM5 SMZ-1
C-FPS Fluorescent Ring Illuminator

A ring-shaped fluorescent tube provides uniform illumination over the entire visual field without shadows. This illuminator uses a long-life (over 500 hours) CRT of 160V-30mA, and it lights up immediately after switching ON.
SMZ1500
SMZ1000
SMZ800
SMZ645/660
SMZ-2
SM5
SMZ-1
C-DSLS Lamphouse (6V-20W halogen)

Using a 6V-20W halogen lamp as light source, the C-DSLS can be externally attached to generate epi-fluorescence illumination. It can also be mounted to the C-DS Diascopic Stand.
SM-LW61Ji LED Illuminator

This is a high-intensity illuminator incorporating 60 long-life white LEDs. Flickering is suppressed by adjusting the intensity control.
SMZ1500
SMZ1000
SMZ800
SMZ645/660
SMZ-1
SMZ1500
SMZ1000
SMZ800
SMZ645/660
SMZ-2
SM5
SMZ-1
SMZ-U Episcopic Arm

This arm can be mounted to the C-DSLS Lamphouse or the GLS Episcopic Illuminator.
C-POL Polarizing Attachment

SMZ1500 SMZ1000 SMZ800 SMZ645/660
The polarizer is set on the stage while the analyzer is fitted on the objective lens cover, through which diascopic illumination light passes, making it possible to observe flakes of rock or mined ore, or double refraction images of samples (in conjunction with a diascopic illuminator).
8-Segment LED Ring Light CYN-E1

SMZ1000 SMZ800 SMZ645/660
SMZ1500
SMZ1000
SMZ800
SMZ645/660
SMZ-1
Because the optimum direction of illumination can be selected from eight directions, it is now possible to clearly see the edges of plastic mold parts and drills.
: compatible microscopes
The photos are examples of configuration with microscopes. Some configurations require adapters for mounting.
40
Universal Table Stands G-US1/G-US2
Used in conjunction with the C-FMB Focusing Mount B on the SMZ645/660/1. Used in conjunction with the SM Focusing Mount and the G-USA SM US Adapter on the SM5. Can not be used with the SMZ1000/800 when photomicrographic equipment is mounted on these models.
Universal Table Stand P

Used in conjunction with the C-FMA Focusing Mount A on the SMZ1000/800/645/660/1. Used in conjunction with the SM Focusing Mount on the SM5.
G-US1 Universal Table Stand 1
Universal Stand P
413
28
364
25
90-350 28
148 228-500
38
315 10-60 126
Can be installed on the top or bottom edge.
Unit: mm The image is a configuration sample with the SMZ645.
G-US2 Universal Table Stand 2 Specifications

413
Universal Table Stand Model

28
G-US1 245mm 260mm 4.4kg
G-US2
P 229mm 272mm
Vertical cross travel

25
Horizontal cross travel Weight (approx.)
364
23.0kg
30.5kg
90-350 28
148
C-FMA Focusing Mount A C-FMB Focusing Mount B C-FMB Focusing Mount C SM Focusing Mount Use of photomicrographic equipment : Possible * G-USA Adapter is required
75
230
Unit: mm
The image is a configuration sample with the SMZ645.
Focusing Mounts
Various types of focusing mounts are available depending on use. They are used to incorporate stereoscopic microscope bodies into IC bonders or other devices. (SM Focusing Mount is for SMZ-2 and SM-5.) These mounts can also be used when attaching them to Universal Table Stands. Stereoscopic Zoom Microscopes
C-FMA Focusing Mount A SM Focusing Mount
101 30 74 24.5
C-FMB Focusing Mount B

148 116 53 101 15.8 76 25
C-FMC Focusing Mount C
160 25 100
76mm: C-FMA Focusing Mount A 62mm: SM Focusing Mount
32
76
Unit: mm
C-FMA Focusing Mount A Focusing area Weight (approx.) Compatible microscopes 40mm 0.6kg
C-FMB Focusing Mount B C-FMC Focusing Mount C 50mm 0.8kg SMZ1000/800/645/660/1 50mm 1.6kg
SM Focusing Mount 40mm 0.6kg SMZ2, SM5
452
41
Digital Cameras for MicroscopesDigital Sight Series
The Digital Sight series responds to various needs, from high-level research to standard inspections, in conjunction with a camera head and controller. Three types of camera heads are available: The DS-Fi1 is a highdefinition type; the DS-2Mv provides comfortable on-monitor observations and image capture; the DS-5Mc has a cooled camera head with a Peltier device. Control units are also selectable from the PC-use control unit DS-U2 and standalone control unit DS-L2. The DS-U2 has a USB 2.0 interface for PC connection, while the DS-L2s built-in, large-size high-definition LCD monitor allows independent operations without a PC. Standard Cameras: Digital Sight DS-2Mv-L2 Digital Sight DS-2Mv-U2 Digital Sight DS-Fi1-L2 Digital Sight DS-Fi1-U2 Cooled Cameras: Digital Sight DS-5Mc-L2 Digital Sight DS-5Mc-U2
For details, see the corresponding catalog. (Catalog list on page 2) DS-2Mv-L2 + LV150 Industrial Microscope
C-mount
High-definition Digital Camera for MicroscopesDXM1200C

DXM 1200C is equipped with a cooling mechanism that retains CCD temperature at approximately 20C below room temperature. This reduces thermally induced noise that occurs during imaging sessions requiring lengthy exposure, and enables the capture of lifelike specimen images. Super high-resolution 12.6-mega output pixels (4116 x 3072 pixel) Images are transferred at a rapid 15 fps. max speed for smooth, natural display of live image observations. Specimens are protected against photobleaching due to a shortening of the overall imaging workflow process. The imaging software NIS-Elements provides convenient functions such as scale display and annotation. Live preview, still image, and thumbnail display and capturing, can all be done on one screen.
C-mount
Configured with IC Inspection Microscope ECLIPSE LV150
Digital Cameras for Microscopes/ Image-Related Products
42
Film-type Photomicrographic System H-III
Compact and easy-to-operate photographic system. Nikons swing-out prism offers fast shutter speeds and high contrast images without internal reflection. Covers a wide range of uses.
Specifications
Exposure control Exposure metering range Control Auto 1% partial/35% average Electronic Auto: 0.01-999 sec.*, Manual: 0.01-999 sec. LED digital display
Shutter
Shutter speed Shutter speed display Multiple exposure Memory shooting mode
ISO sensitivity setting
35mm DX coded film: Auto, manual Non-DX coded film: Manual (ISO 6-20,000) 2 to +2 EV (13 steps in 1/3 EV) Telescope type (crosslines for shooting range and focusing range indication provided), use with focusing telescope (optional) in low-magnification 35mm to 4 x 5 format FDX-35 (Auto film wind/rewind/film sending to first frame) (compatible with DX coded film)
Exposure compensation Finder
Film format 35mm camera box
* e.g. with 35mm format film, ISO 100, without exposure compensation, up to 200 seconds. For details, see the corresponding catalog. (Catalog list on page 2)
Combination of H-III and SMZ800 Stereoscopic Microscope
Digital Cameras for Microscopes/ Image-Related Products
43
CCTV System Diagram
1/3 pickup plate C-mount CCTV camera 1/2 pickup plate C-mount CCTV camera 1/2 pickup plate Sony ENG-mount CCTV (38-bayonet) camera 2/3 pickup plate C-mount CCTV camera 2/3 pickup plate ENG-mount CCTV camera F-mount camera body 2/3 pickup plate C-mount CCTV camera 2/3 pickup plate ENG-mount CCTV camera
C-mount TV adapter A
Systems that can be attached to the camera port group*
C-mount TV adapter 0.35x*1
C-mount TV adapter 0.45x
ENG-mount C-mount C-mount TV TV adapter TV adapter adapter 0.45x*2, VM2.5x VM4x 0.45xT*3
C-mount TV adapter A
C-mount Adapter 0.55x*5
C-mount zoom adapter
C-mount ENG-mount ENG-mount ENG-mount TV adapter TV adapter zoom TV adapter adapter 0.6xT*3 F-mount photo adapter
ENG-C mount adapter
TV zooming lens
Relay lens 1x
TV zooming lens
Photomicrographic system projection lenses
ENG camera port conversion adapter
Direct port group
Camera port group
ENG-mount eyepiece tube group
OPTIPHOT trinocular tubes* ECLIPSE trinocular tubes* (For Y-TF2 and Y-TT2, use together with Y-T TV tube) Ultra-wide tilting trinocular tube UWTTL* Ultra-wide trinocular tube UW* Trinocular tube TP* Trinocular tube X2T* Trinocular tube X2F* LV-TT2 Tilting Trinocular Tube*4 LV-TI3 Trinocular Tube ESD*4
OPTIPHOT trinocular tubes* ECLIPSE trinocular tubes (Ultra-wide tilting trinocular tube L2-TT, ultra-wide tilting trinocular tube L2-TT2, and trinocular tube L-TI2 require VT photo adapter. Trinocular tube Y-TT2 requires V-T photo adapter and Y-T TV tube. Trinocular tube LV-TI3 and tilting trinocular tube LV-TT2 require V-T photo adapter and LVTV TV tube.) Trinocular tube Y-TF2 and Y-TT2 require YT TV tube and V-T photo adapter Ultra-wide tilting trinocular tube X2TW Ultra-wide tilting trinocular tube UW Trinocular tubes TP, etc. Trinocular tube X2T Trinocular tube X2F X2 quadruple tube SMZ-2T ENG-mount tube group + ENG camera port conversion adapter SMZ-U/10A Beam Splitter + Photo Adapter SMZ-U Side Port + Photo Adapter
FXL/FXA/SA main unit, etc. X2 TV tube
SMZ-U/10A Beam Splitter SMZ-U Side Port P-IBSS Beam Splitter S2/P-IBSD Beam Splitter D2*4
*1 Cannot be used with the double port sub-port. Use the 0.35xB adapter. *2 Cannot be used with the double port sub-port. Use the 0.45xB adapter *3 When used with the X2F eyepiece tube, use the F type adapter; use the T type with other tubes. *4: Requires a LV-TV TV tube (except when the C-mount adapter 0.55x is used). *5: Cannot be used with trinocular eyepiece tubes other than the LV-TI3 and LV-TT2. * Remove the camera installation port.
Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. May 2007 2006-7 NIKON CORPORATION WARNING
TO ENSURE CORRECT USAGE, READ THE CORRESPONDING MANUALS CAREFULLY BEFORE USING YOUR EQUIPMENT.
NIKON CORPORATION
Parale Mitsui Bldg., 8, Higashida-cho, Kawasaki-ku, Kawasaki, Kanagawa 210-0005, Japan phone: +81-44-223-2175 fax: +81-44-223-2182 http://www.nikon-instruments.jp/eng/
NIKON INSTRUMENTS INC.

1300 Walt Whitman Road, Melville, N.Y. 11747-3064, U.S.A. phone: +1-631-547-8500; +1-800-52-NIKON (within the U.S.A.only) fax: +1-631-547-0306 http://www.nikonusa.com/
NIKON SINGAPORE PTE LTD SINGAPORE phone: +65-6559-3618 fax: +65-6559-3668 NIKON MALAYSIA SDN. BHD. MALAYSIA phone: +60-3-78763887 fax: +60-3-78763387 NIKON INSTRUMENTS KOREA CO., LTD. KOREA phone: +82-2-2186-8410 fax: +82-2-555-4415 NIKON CANADA INC. CANADA phone: +1-905-625-9910 fax: +1-905-625-0103 NIKON FRANCE S.A.S. FRANCE phone: +33-1-45-16-45-16 fax: +33-1-45-16-00-33 NIKON GMBH GERMANY phone: +49-211-9414-0 fax: +49-211-9414-322 NIKON INSTRUMENTS S.p.A. ITALY phone: +39-55-3009601 fax: +39-55-300993 NIKON AG SWITZERLAND phone: +41-43-277-2860 fax: +41-43-277-2861
NIKON UK LTD. UNITED KINGDOM phone: +44-20-8541-4440 fax: +44-20-8541-4584 NIKON GMBH AUSTRIA AUSTRIA phone: +43-1-972-6111-00 fax: +43-1-972-6111-40 NIKON BELUX BELGIUM phone: +32-2-705-56-65 fax: +32-2-726-66-45
NIKON INSTRUMENTS EUROPE B.V.

P.O. Box 222, 1170 AE Badhoevedorp, The Netherlands phone: +31-20-44-96-222 fax: +31-20-44-96-298 http://www.nikon-instruments.com/
NIKON INSTRUMENTS (SHANGHAI) CO., LTD. CHINA phone: +86-21-5836-0050 fax: +86-21-5836-0030 (Beijing office) phone: +86-10-5869-2255 fax: +86-10-5869-2277 (Guangzhou office) phone: +86-20-3882-0552 fax: +86-20-3882-0580
Printed in Japan (0705-1)T
Code No. 2CE-IWWH-9

This brochure is printed on recycled paper made from 40% used material.
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Industrial Equipment Catalog 2007 Spring

CNC Video Measuring Systems Measuring Microscopes Autocollimators

Stereoscopic Zoom Microscopes Digital Cameras for Microscopes

Autocollimators, Other Equipment and Accessories

Stereoscopic Zoom Microscopes

Digital Cameras for Microscopes/Image-related Products

4x 8x 15 x 160 x 320 x 600 x 1.165 x 0.875 0.582 x 0.437 0.311 x 0.233

NEXIV VMR-H3030 Z120X

For details, see the corresponding catalog. (Catalog list on page 2)

CNC Video Measuring System NEXIV VMR-12072/12072 Z120X/12070 LU NEXIV VMR-12072

4x 8x 15 x 160 x 320 x 600 x 1.165 x 0.875 0.582 x 0.437 0.311 x 0.233

NEXIV VMR-12072 Z120X

4x 8x 15 x 160 x 320 x 600 x 1.165 x 0.875 0.582 x 0.437 0.311 x 0.233

NEXIV VMR-10080 Z120X

CNC Video Measuring System NEXIV VMR-6555/6555 Z120X/6555 LU NEXIV VMR-6555

4x 8x 15 x 160 x 320 x 600 x 1.165 x 0.875 0.582 x 0.437 0.311 x 0.233

NEXIV VMR-6555 Z120X

CNC Video Measuring System

4x 8x 15 x 160 x 320 x 600 x 1.165 x 0.875 0.582 x 0.437 0.311 x 0.233

NEXIV VMR-3020 Z120X

CNC Video Measuring System NEXIV VMR-1515/1515 Z120X/1515 LU NEXIV VMR-1515

4x 8x 15 x 160 x 320 x 600 x 1.165 x 0.875 0.582 x 0.437 0.311 x 0.233

NEXIV VMR-1515 Z120X

3D surface analysis program: NEXIV Bird's-Eye View

Gear evaluation software

Surface analysis software: D-SURF

Automated Wafer Measuring SystemNEXIV VMR-3020 with Wafer Loader NWL860T

Approx. 370kg AC100V10%, 50/60Hz, Max. 11.5A 800hPa(600mmHg), 10NI/min

For details, see the corresponding catalog. (Catalog list on page 2)

CNC Video Measuring System

8 x 6mm to 0.53 x 0.4mm

300mm Wafer Loader NWT-3000

Wafer Carrier Measuring System NEXIV VMR-C4540

For details, see the corresponding catalog. (Catalog list on page 2)

Two-dimensional profile shape analysis program: iNEXIV VMA Profiler/CAD Reader

EDF (Extended Depth of Field)

CNC Video Measuring System

305mm fixed screen; etched center crossline

For details, see the corresponding catalog. (Catalog list on page 2)

Accessories for Profile Projectors Sliding Stage

Glass Scale Set

Retrofit Counter/DP Unit

Glass Reading Scale

Measuring Microscopes MM-400/8003-Axis Type

Optical head Eyepiece Objective Stage*1 Light source

Measuring Microscopes MM-400/800Universal Type

Max. workpiece height Dimensions (W x D x H)/weight

(compatible with all models except U type)

Templates 1-Minute Reading Eyepiece

8-Segment LED Ring Light CYN-E1

10-Minute Reading Eyepiece

12 x 8 10 x 6 8x6 6x4 4x4 O3L 2x2

*Accuracy: 3+L/50m (L: measurement length), excluding O3L.

T-groove/Screw hole 6-M6 Approx. 4kg

Standard 300mm Scale

Tilting Center Fixtures

V-Block Fixture (for the 9V or 03L Stage)

Approx. 2.2kg Approx. 6kg

Compatible measuring instruments for each set:

E-Max DS Set + MM-400 Measuring Microscope

Data Processor DP-E1

Accessories for Measurement Support/Data Processing

VMR Report Generator