Plasma Appendix

Doug Purvis, Mei Lee Gallagher IEE 572 Final Project Appendix
December 4, 2000
APPENDIX OUTLINE APPENDIX A B C D E F G H I J K CONTENTS Oxide Etch Rate Data Analysis Polysilicon Etch Rate Data Analysis PhotoResist Etch Rate Data Analysis Oxide:Polysilicon Selectivity Data Analysis Oxide:PhotoResist Selectivity Data Analysis Oxide Etch Rate Natural Logrithmic Transformation Data Analysis Oxide Etch Rate Response Surface Polysilicon Etch Rate Response Surface PhotoResist Etch Rate Response Surface Oxide:Polysilicon Selectivity Response Surface Oxide:Photo Resist Selectivity Response Surface
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Appendix A Oxide Etch Rate Data Analysis
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Require Model Model Error Error Error Error Error Model
Term Intercept A B C AB AC BC ABC Curvature Lenth's ME Lenth's SME Lenth's SME Lenth's SME
Effect 915 1954.5 168.5 -80 -105 10.5 44.7214 45.3922 451.711 1081.03 1081.03 1081.03
SumSqr 1.67445E+006 7.64014E+006 56784.5 12800 22050 220.5 4000 4120.9
% Contribtn 17.7857 81.1523 0.603156 0.13596 0.234212 0.00234212 0.0424874 0.0437715
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Use your mouse to right click on individual cells for definitions. Response: Oxide ER ANOVA for Selected Factorial Model Analysis of variance table [Partial sum of squares] Sum of Mean F Source Squares DF Square Value Prob > F Block 43560.00 1 43560.00 Model 9.315E+006 24.657E+006 242.93 < 0.0001 significant A 1.674E+006 11.674E+006 87.34 0.0002 B 7.640E+006 17.640E+006 398.53 < 0.0001 Curvature 4120.90 1 4120.90 0.21 0.6624 not significant Residual 95855.00 5 19171.00 Cor Total 9.458E+006 9 The Model F-value of 242.93 implies the model is significant. There is only a 0.01% chance that a "Model F-Value" this large could occur due to noise. Values of "Prob > F" less than 0.0500 indicate model terms are significant. In this case A, B are significant model terms. Values greater than 0.1000 indicate the model terms are not significant. If there are many insignificant model terms (not counting those required to support hierarchy), model reduction may improve your model. The "Curvature F-value" of 0.21 implies the curvature (as measured by difference between the average of the center points and the average of the factorial points) in the design space is not significant relative to the noise. There is a 66.24% chance that a "Curvature F-value" this large could occur due to noise. Std. Dev. Mean C.V. PRESS 138.46 5743.40 2.41 3.562E+005 R-Squared Adj R-Squared Pred R-Squared Adeq Precision 0.9898 0.9857 0.9622 30.657
The "Pred R-Squared" of 0.9622 is in reasonable agreement with the "Adj R-Squared" of 0.9857. "Adeq Precision" measures the signal to noise ratio. A ratio greater than 4 is desirable. Your ratio of 30.657 indicates an adequate signal. This model can be used to navigate the
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design space. Factor VIF Intercept Block 1 Block 2 A-Power 1.00 B-Pressure 1.00 Center Point 1.00 Coefficient Estimate 5733.25 -66.00 66.00 457.50 977.25 50.75 Standard DF Error 1 1 1 1 1 48.95 48.95 48.95 109.46 95% CI Low 5607.41 331.66 851.41 -230.63 95% CI High 5859.09 583.34 1103.09 332.13
Final Equation in Terms of Coded Factors: Oxide ER +5733.25 +457.50 +977.25 = *A *B
Final Equation in Terms of Actual Factors: Oxide ER = -980.61765 +3.05000 * Power +11.49706 * Pressure Diagnostics Case Statistics Standard Actual Predicted Run Order Value Value Order 1 4051.00 4232.50 0.592 -2.753 3 2 5303.00 5279.50 0.010 0.211 8 3 6227.00 6319.00 0.152 -0.899 9 4 7015.00 7102.00 0.136 -0.842 1 5 4466.00 4364.50 0.185 1.015 7
Student ResidualLeverage -181.50 0.475 23.50 0.475 -92.00 0.475 -87.00 0.475 101.50 0.475
Cook's Residual
Outlier Distance t
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6 5204.00 5147.50 56.50 0.475 0.057 0.521 4 7 6359.00 6187.00 172.00 0.475 0.532 2.389 2 8 7241.00 7234.00 7.00 0.475 0.001 0.062 6 9 5758.00 5718.00 40.00 0.600 0.063 0.417 5 10 5810.00 5850.00 -40.00 0.600 0.063 -0.417 10 Note: Predicted values include block corrections. Note: Predicted values of center points include center point coefficient. Proceed to Diagnostic Plots (the next icon in progression). Be sure to look at the: 1) Normal probability plot of the studentized residuals to check for normality of residuals. 2) Studentized residuals versus predicted values to check for constant error. 3) Outlier t versus run order to look for outliers, i.e., influential values. 4) Box-Cox plot for power transformations. If all the model statistics and diagnostic plots are OK, finish up with the Model Graphs icon. R e s id ua ls vs . P o w e r
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Appendix B Polysilicon Etch Rate Data Analysis
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Effect 148.5 148 29 -3 0 -11.5 0.67082 2.90689 16.9392 40.5387 40.5387 40.5387
SumSqr 44104.5 43808 1682 18 0 264.5 0.9 16.9
% Contribtn 49.0623 48.7325 1.87108 0.0200234 0 0.294233 0.00100117 0.0187998
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Use your mouse to right click on individual cells for definitions. Response: Polysilicon ER ANOVA for Selected Factorial Model Analysis of variance table [Partial sum of squares] Sum of Mean F Source Squares DF Square Value Prob > F Block 57.60 1 57.60 Model 87912.50 2 43956.25 111.83 < 0.0001 significant A 44104.50 1 44104.50 112.20 0.0001 B 43808.00 1 43808.00 111.45 0.0001 Curvature 16.90 1 16.90 0.043 0.8439 not significant Residual 1965.40 5 393.08 Cor Total 89952.40 9 The Model F-value of 111.83 implies the model is significant. There is only a 0.01% chance that a "Model F-Value" this large could occur due to noise. Values of "Prob > F" less than 0.0500 indicate model terms are significant. In this case A, B are significant model terms. Values greater than 0.1000 indicate the model terms are not significant. If there are many insignificant model terms (not counting those required to support hierarchy), model reduction may improve your model. The "Curvature F-value" of 0.04 implies the curvature (as measured by difference between the average of the center points and the average of the factorial points) in the design space is not significant relative to the noise. There is a 84.39% chance that a "Curvature F-value" this large could occur due to noise. Std. Dev. Mean C.V. PRESS 19.83 749.40 2.65 7132.59 R-Squared Adj R-Squared Pred R-Squared Adeq Precision 0.9781 0.9694 0.9207 21.492
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design space. Factor VIF Intercept Block 1 Block 2 A-Power 1.00 B-Pressure 1.00 Center Point 1.00 Coefficient Estimate 748.75 2.40 -2.40 74.25 74.00 3.25 Standard DF Error 1 1 1 1 1 7.01 7.01 7.01 15.67 95% CI Low 730.73 56.23 55.98 -37.04 95% CI High 766.77 92.27 92.02 43.54
Final Equation in Terms of Coded Factors: Polysilicon ER +748.75 +74.25 +74.00 = *A *B
Final Equation in Terms of Actual Factors: Polysilicon ER = +42.32353 +0.49500 * Power +0.87059 * Pressure Diagnostics Case Statistics Standard Actual Predicted Run Order Value Value Order 1 581.00 602.90 0.421 -1.864 3 2 728.00 746.60 0.303 -1.420 8 3 739.00 746.10 0.044 -0.453 9 4 889.00 899.40 0.095 -0.684 1 5 617.00 598.10 0.313 1.455 7
Student ResidualLeverage -21.90 0.475 -18.60 0.475 -7.10 0.475 -10.40 0.475 18.90 0.475
Cook's Residual
Outlier Distance t
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6 773.00 751.40 21.60 0.475 0.409 1.817 4 7 761.00 750.90 10.10 0.475 0.089 0.662 2 8 902.00 894.60 7.40 0.475 0.048 0.473 6 9 755.00 754.40 0.60 0.600 0.001 0.043 5 10 749.00 749.60 -0.60 0.600 0.001 -0.043 10 Note: Predicted values include block corrections. Note: Predicted values of center points include center point coefficient. Proceed to Diagnostic Plots (the next icon in progression). Be sure to look at the: 1) Normal probability plot of the studentized residuals to check for normality of residuals. 2) Studentized residuals versus predicted values to check for constant error. 3) Outlier t versus run order to look for outliers, i.e., influential values. 4) Box-Cox plot for power transformations. If all the model statistics and diagnostic plots are OK, finish up with the Model Graphs icon.
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Appendix C PhotoResist Etch Rate Data Analysis
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Require Model Model Model Error Error Error Error Model
Effect 407.25 280.75 175.25 55.75 33.25 -13.25 -4.13673 39.243 187.743 449.304 449.304 449.304
SumSqr 331705 157641 61425.1 6216.13 2211.13 351.125 34.225 3080.03
% Contribtn 58.9526 28.0169 10.9168 1.10477 0.392974 0.062404 0.00608267 0.5474
Use your mouse to right click on individual cells for definitions. Response: Photo Resist ER ANOVA for Selected Factorial Model Analysis of variance table [Partial sum of squares] Sum of Mean F Source Squares DF Square Value Prob > F Block 32.40 1 32.40 Model 5.508E+005 31.836E+005 83.33 0.0005 significant A 3.317E+005 13.317E+005 150.56 0.0003 B 1.576E+005 11.576E+005 71.55 0.0011 C 61425.12 1 61425.12 27.88 0.0062 Curvature 3080.03 1 3080.03 1.40 0.3025 not significant Residual 8812.60 4 2203.15 Cor Total 5.627E+005 9 The Model F-value of 83.33 implies the model is significant. There is only a 0.05% chance that a "Model F-Value" this large could occur due to noise. Values of "Prob > F" less than 0.0500 indicate model terms are significant. In this case A, B, C are significant model terms. Values greater than 0.1000 indicate the model terms are not significant. If there are many insignificant model terms (not counting those required to support hierarchy), model reduction may improve your model. The "Curvature F-value" of 1.40 implies the curvature (as measured by difference between the average of the center points and the average of the factorial points) in the design space
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is not significant relative to the noise. There is a 30.25% chance that a "Curvature F-value" this large could occur due to noise. Std. Dev. Mean C.V. PRESS 46.94 1443.40 3.25 55078.75 R-Squared Adj R-Squared Pred R-Squared Adeq Precision 0.9843 0.9724 0.9021 23.842
The "Pred R-Squared" of 0.9021 is in reasonable agreement with the "Adj R-Squared" of 0.9724. "Adeq Precision" measures the signal to noise ratio. A ratio greater than 4 is desirable. Your ratio of 23.842 indicates an adequate signal. This model can be used to navigate the design space. Coefficient Factor Estimate VIF Intercept 1434.63 Block 1 -1.80 Block 2 1.80 A-Power 203.62 1.00 B-Pressure 140.37 1.00 C-Gas Ratio 87.62 1.00 Center Point 43.87 1.00 DF 1 1 1 1 1 1 Standard Error 16.59 16.59 16.59 16.59 37.11 95% CI Low 1388.55 157.55 94.30 41.55 -59.15 95% CI High 1480.70 249.70 186.45 133.70 146.90
Final Equation in Terms of Coded Factors: Photo Resist ER +1434.63 +203.62 +140.37 +87.62 = *A *B *C
Final Equation in Terms of Actual Factors: Photo Resist ER -701.25368 +1.35750 = * Power
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+1.65147 * Pressure +219.06250 * Gas Ratio Diagnostics Case Statistics Standard Actual Predicted Student Cook's Run Order Value Value ResidualLeverage Residual Order 1 1040.00 1001.20 38.80 0.600 0.427 1.495 3 2 1360.00 1412.05 -52.05 0.600 0.769 -3.156 8 3 1280.00 1285.55 -5.55 0.600 0.009 -0.163 9 4 1708.00 1689.20 18.80 0.600 0.100 0.578 1 5 1197.00 1180.05 16.95 0.600 0.082 0.516 7 6 1580.00 1583.70 -3.70 0.600 0.004 -0.108 4 7 1407.00 1457.20 -50.20 0.600 0.715 -2.743 2 8 1905.00 1868.05 36.95 0.600 0.387 1.377 6 9 1473.00 1476.70 -3.70 0.600 0.004 -0.108 5 10 1484.00 1480.30 3.70 0.600 0.004 0.108 10 Note: Predicted values include block corrections. Note: Predicted values of center points include center point coefficient.
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Appendix D Oxide:Polysilicon Selectivity Data Analysis
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Effect -0.2675 1.1225 -0.0525 -0.1675 -0.1525 0.0875 0.0570197 0.0614919 0.677567 1.62155 1.62155 1.62155
SumSqr 0.143113 2.52001 0.0055125 0.0561125 0.0465125 0.0153125 0.0065025 0.0075625
% Contribtn 5.10999 89.9799 0.19683 2.00356 1.66078 0.54675 0.232179 0.270028
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Use your mouse to right click on individual cells for definitions. Response: Oxide:Polysilicon Selectivity ANOVA for Selected Factorial Model Analysis of variance table [Partial sum of squares]
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Source Block Model significant A 0.14 B 2.52 Curvature 7.563E-003 not significant Residual 0.13 Cor Total 2.94
Sum of Squares DF 0.13 2.66
Mean Square 1 2 0.13 1.33
F Value 51.23 5.51 96.96 0.29
Prob > F 0.0005 0.0658 0.0002 0.6127
1 0.14 1 2.52 1 7.563E-003 5 9 0.026
The Model F-value of 51.23 implies the model is significant. There is only a 0.05% chance that a "Model F-Value" this large could occur due to noise. Values of "Prob > F" less than 0.0500 indicate model terms are significant. In this case B are significant model terms. Values greater than 0.1000 indicate the model terms are not significant. If there are many insignificant model terms (not counting those required to support hierarchy), model reduction may improve your model. The "Curvature F-value" of 0.29 implies the curvature (as measured by difference between the average of the center points and the average of the factorial points) in the design space is not significant relative to the noise. There is a 61.27% chance that a "Curvature F-value" this large could occur due to noise. Std. Dev. Mean C.V. PRESS 0.16 7.63 2.11 0.49 R-Squared Adj R-Squared Pred R-Squared Adeq Precision 0.9535 0.9349 0.8268 14.228
The "Pred R-Squared" of 0.8268 is in reasonable agreement with the "Adj R-Squared" of 0.9349. "Adeq Precision" measures the signal to noise ratio. A ratio greater than 4 is desirable. Your ratio of 14.228 indicates an adequate signal. This model can be used to navigate the design space. Factor VIF Intercept Coefficient Estimate 7.62 Standard DF Error 1 0.057 95% CI Low 7.47 95% CI High 7.76
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Block 1 Block 2 A-Power 1.00 B-Pressure 1.00 Center Point 1.00
-0.12 0.12 -0.13 0.56 0.069
1 1 1 1 0.057 0.057 0.13 -0.28 0.41 -0.26 0.013 0.71 0.40
Final Equation in Terms of Coded Factors: Oxide:Polysilicon Selectivity +7.62 -0.13 +0.56 = *A *B
Final Equation in Terms of Actual Factors: Oxide:Polysilicon Selectivity = +5.74287 -8.91667E-004 * Power +6.60294E-003 * Pressure Diagnostics Case Statistics Standard Actual Predicted Student Cook's Run Order Value Value ResidualLeverage Residual Order 1 6.97 7.07 -0.10 0.475 0.140 -0.856 3 2 7.28 7.04 0.24 0.475 0.781 5.035 * 8 3 8.43 8.43 2.750E-003 0.475 0.000 0.021 9 4 7.89 7.93 -0.038 0.475 0.019 -0.292 1 5 7.24 7.30 -0.065 0.475 0.056 -0.512 7 6 6.73 6.81 -0.075 0.475 0.075 -0.602 4 7 8.36 8.20 0.16 0.475 0.360 1.626 2 8 8.03 8.16 -0.13 0.475 0.223 -1.145 6
Outlier Distance t
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9 7.62 7.57 0.051 0.600 0.075 0.459 5 10 7.75 7.80 -0.051 0.600 0.075 -0.459 10 Note: Predicted values include block corrections. Note: Predicted values of center points include center point coefficient. * Case(s) with |Outlier T| > 3.50 Proceed to Diagnostic Plots (the next icon in progression). Be sure to look at the: 1) Normal probability plot of the studentized residuals to check for normality of residuals. 2) Studentized residuals versus predicted values to check for constant error. 3) Outlier t versus run order to look for outliers, i.e., influential values. 4) Box-Cox plot for power transformations. If all the model statistics and diagnostic plots are OK, finish up with the Model Graphs icon.
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Appendix E Oxide:Photo Resist Selectivity Data Analysis
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Require Model Model Model Model Error Error Error Model
Effect -0.4775 0.6175 -0.3575 -0.2575 -0.1025 0.0325 0.0480755 -0.097269 1.45395 3.47957 3.47957 3.47957
SumSqr 0.456013 0.762612 0.255613 0.132612 0.0210125 0.0021125 0.0046225 0.0189225
% Contribtn 27.5783 46.1205 15.4587 8.02001 1.27077 0.127758 0.279555 1.14438
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Use your mouse to right click on individual cells for definitions. Response: Oxide:Photo Resist Selectivity ANOVA for Selected Factorial Model Analysis of variance table [Partial sum of squares]
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Source Block Model significant A B C AB Curvature not significant Residual Cor Total
Sum of Squares DF 0.023 1.61 0.46 0.76 0.26 0.13 0.019 0.028 1.68
Mean F Square Value Prob > F 1 0.023 4 0.40 43.43 0.0055 1 1 1 1 1 0.46 0.76 0.26 0.13 0.019 49.30 82.45 27.64 14.34 2.05 0.0059 0.0028 0.0134 0.0323 0.2480
3 9.249E-003 9
The Model F-value of 43.43 implies the model is significant. There is only a 0.55% chance that a "Model F-Value" this large could occur due to noise. Values of "Prob > F" less than 0.0500 indicate model terms are significant. In this case A, B, C, AB are significant model terms. Values greater than 0.1000 indicate the model terms are not significant. If there are many insignificant model terms (not counting those required to support hierarchy), model reduction may improve your model. The "Curvature F-value" of 2.05 implies the curvature (as measured by difference between the average of the center points and the average of the factorial points) in the design space is not significant relative to the noise. There is a 24.80% chance that a "Curvature F-value" this large could occur due to noise. Std. Dev. Mean C.V. PRESS 0.096 3.99 2.41 0.34 R-Squared Adj R-Squared Pred R-Squared Adeq Precision 0.9830 0.9604 0.7937 19.245
The "Pred R-Squared" of 0.7937 is in reasonable agreement with the "Adj R-Squared" of 0.9604. "Adeq Precision" measures the signal to noise ratio. A ratio greater than 4 is desirable. Your ratio of 19.245 indicates an adequate signal. This model can be used to navigate the design space. Coefficient Standard 95% CI 95% CI
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Factor Estimate VIF Intercept 4.01 Block 1 -0.048 Block 2 0.048 A-Power -0.24 1.00 B-Pressure 0.31 1.00 C-Gas Ratio -0.18 1.00 AB -0.13 1.00 Center Point -0.11 1.00
DF 1 1 1 1 1 1 1
Error 0.034 0.034 0.034 0.034 0.034 0.076
Low 3.91 -0.35 0.20 -0.29 -0.24 -0.35
High 4.12 -0.13 0.42 -0.071 -0.021 0.13
Final Equation in Terms of Coded Factors: Oxide:Photo Resist Selectivity = +4.01 -0.24 *A +0.31 *B -0.18 *C -0.13 *A*B Final Equation in Terms of Actual Factors: Oxide:Photo Resist Selectivity = +1.87636 +2.29608E-003 * Power +0.011206 * Pressure -0.44688 * Gas Ratio -1.00980E-005 * Power * Pressure Diagnostics Case Statistics Standard Actual Predicted Run Order Value Value Order 1 3.90 3.95 0.310 -0.869 3 2 3.90 3.82 0.907 2.850 8 3 4.86 4.92
Student ResidualLeverage -0.046 0.725 0.078 0.725 -0.057 0.725
Cook's Residual
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0.477 -1.209 9 4 4.11 4.09 0.024 0.725 0.087 0.409 1 5 3.73 3.68 0.046 0.725 0.310 0.869 7 6 3.29 3.37 -0.078 0.725 0.907 -2.850 4 7 4.52 4.46 0.057 0.725 0.477 1.209 2 8 3.80 3.82 -0.024 0.725 0.087 -0.409 6 9 3.90 3.86 0.043 0.600 0.107 0.632 5 10 3.91 3.95 -0.043 0.600 0.107 -0.632 10 Note: Predicted values include block corrections. Note: Predicted values of center points include center point coefficient. Proceed to Diagnostic Plots (the next icon in progression). Be sure to look at the: 1) Normal probability plot of the studentized residuals to check for normality of residuals. 2) Studentized residuals versus predicted values to check for constant error. 3) Outlier t versus run order to look for outliers, i.e., influential values. 4) Box-Cox plot for power transformations. If all the model statistics and diagnostic plots are OK, finish up with the Model Graphs icon.
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3 .0 0
1 .5 0
0 .0 0
-1 .5 0
-3 .0 0
10
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R un N um ber
DESIGN-EXPERT Plot
3 .0 0
December 4, 2000
1 .5 0
0 .0 0
-1 .5 0
-3 .0 0
600
650
700
750
800
850
900
O utlie r T
3 .5 0
Power
1 .7 5
O u tlie r T
0 .0 0
-1 .7 5
-3 .5 0
10
R un N um ber
DESIGN-EXPERT Plot
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Appendix F Oxide Etch Rate Natural Logrithmic Transformation Data Analysis
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Effect 0.167822 0.348355 0.0328423 -0.0432998 -0.0264106 -0.0064998 0.0101903 0.024703 0.149125 0.356884 0.356884 0.356884
SumSqr 0.0563284 0.242702 0.00215724 0.00374974 0.00139504 8.44947E-005 0.000207686 0.00122047
% Contribtn 18.2976 78.839 0.700754 1.21806 0.453163 0.0274472 0.0674645 0.396457
99 97
95 90 85 80 70 60 40 20 0
0 .0 0
0 .0 9
0 .1 7
0 .2 6
0 .3 5
|E ffe c t|
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Use your mouse to right click on individual cells for definitions. Response: Oxide ER Transform: Natural log Constant: 0 ANOVA for Selected Factorial Model Analysis of variance table [Partial sum of squares] Sum of Mean F Source Squares DF Square Value Prob > F Block 1.852E-003 1 1.852E-003 Model 0.30 2 0.15 98.44 < 0.0001 significant A 0.056 1 0.056 37.09 0.0017 B 0.24 1 0.24 159.79 < 0.0001 Curvature 1.220E-003 1 1.220E-003 0.80 0.4111 not significant Residual 7.594E-003 5 1.519E-003 Cor Total 0.31 9 The Model F-value of 98.44 implies the model is significant. There is only a 0.01% chance that a "Model F-Value" this large could occur due to noise. Values of "Prob > F" less than 0.0500 indicate model terms are significant. In this case A, B are significant model terms. Values greater than 0.1000 indicate the model terms are not significant. If there are many insignificant model terms (not counting those required to support hierarchy), model reduction may improve your model. The "Curvature F-value" of 0.80 implies the curvature (as measured by difference between the average of the center points and the average of the factorial points) in the design space is not significant relative to the noise. There is a 41.11% chance that a "Curvature F-value" this large could occur due to noise. Std. Dev. Mean C.V. PRESS 0.039 8.64 0.45 0.028 R-Squared Adj R-Squared Pred R-Squared Adeq Precision 0.9752 0.9653 0.9091 19.719
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design space. Factor VIF Intercept Block 1 Block 2 A-Power 1.00 B-Pressure 1.00 Center Point 1.00 Coefficient Estimate 8.64 -0.014 0.014 0.084 0.17 0.028 Standard DF Error 1 1 1 1 1 0.014 0.014 0.014 0.031 95% CI Low 8.60 0.048 0.14 -0.052 95% CI High 8.67 0.12 0.21 0.11
Final Equation in Terms of Coded Factors: Ln(Oxide ER) +8.64 +0.084 +0.17 = *A *B
Final Equation in Terms of Actual Factors: Ln(Oxide ER) = +7.42675 +5.59406E-004 * Power +2.04915E-003 * Pressure Diagnostics Case Statistics Standard Actual Predicted Student Cook's Run Order Value Value ResidualLeverage Residual Order 1 8.31 8.36 -0.057 0.475 0.732 -4.121 * 3 2 8.58 8.56 0.017 0.475 0.069 0.576 8 3 8.74 8.74-2.448E-003 0.475 0.001 -0.078 9 4 8.86 8.88 -0.024 0.475 0.130 -0.818 1 5 8.40 8.39 0.014 0.475 0.041 0.438 7
Outlier Distance t
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6 8.56 8.53 0.026 0.475 0.151 0.897 4 7 8.76 8.71 0.046 0.475 0.475 2.102 2 8 8.89 8.91 -0.019 0.475 0.085 -0.646 6 9 8.66 8.65 9.115E-003 0.600 0.041 0.335 5 10 8.67 8.68-9.115E-003 0.600 0.041 -0.335 10 Note: Predicted values include block corrections. Note: Predicted values of center points include center point coefficient. * Case(s) with |Outlier T| > 3.50 Proceed to Diagnostic Plots (the next icon in progression). Be sure to look at the: 1) Normal probability plot of the studentized residuals to check for normality of residuals. 2) Studentized residuals versus predicted values to check for constant error. 3) Outlier t versus run order to look for outliers, i.e., influential values. 4) Box-Cox plot for power transformations. If all the model statistics and diagnostic plots are OK, finish up with the Model Graphs icon.
99 95 90 80 70 50 30 20 10 5 1
-2 .0 1
-1 . 1 0
-0 . 2 0
0 .7 1
1 .6 2
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3 .0 0
1 .5 0
0 .0 0
-1 . 5 0
-3 . 0 0 8 .3 6 8 .5 0 8 .6 4 8 .7 7 8 .9 1
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P r e d ic te d
1 .5 0
0 .0 0
-1 . 5 0
-3 . 0 0 8 .3 6 8 .5 0 8 .6 4 8 .7 7 8 .9 1
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P r e d ic te d
December 4, 2000
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3 .0 0
1 .5 0
0 .0 0
-1 . 5 0
-3 . 0 0 8 .3 6 8 .5 0 8 .6 4 8 .7 7 8 .9 1
P re d ic te d
3 .0 0
1 .5 0
0 .0 0
-1 . 5 0
-3 . 0 0 8 .3 6 8 .5 0 8 .6 4 8 .7 7 8 .9 1
P re d ic te d
DESIGN-EXPERT Plot
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B o x-C o x P lo t fo r P o w e r T ra ns fo rm s
1 4 .5 5
1 3 .7 2
L n (R e s id u a lS S )
1 2 .8 8
1 2 .0 4
1 1 .2 0 -3 -2 -1 0 1 2 3
Lam bda
DESIGN-EXPERT Plot
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APPENDIX G Oxide Etch Rate Response Surface Analysis
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4 7 0 .0 0
December 4, 2000
O xid e E R
6 6 9 9 .9 6 2 2 1 .6 5
4 2 7 .5 0
B : P re s s u re
3 8 5 .0 0
57432 .4
3 4 2 .5 0
5 2 6 5 .1 5 4 7 8 6 .9
3 0 0 .0 0 6 0 0 .0 0 6 7 5 .0 0 7 5 0 .0 0 8 2 5 .0 0 9 0 0 .0 0
A: P o w e r
P e rturb a tio n
7241
B
6 4 4 3 .5
A C C
O xid e E R
5646
A B
4 8 4 8 .5
4051 -1 .0 0 0 -0 .5 0 0 0 .0 0 0 0 .5 0 0 1 .0 0 0
D e via tio n fro m R e fe r e n c e P o in t
DESIGN-EXPERT Plot
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Inte ra c tio n G ra p h
7 3 1 9 .8
B : P re s s u r e
6 5 0 2 .6
O xid e E R
5 6 8 5 .4
4 8 6 8 .2
4051 6 0 0 .0 0 6 7 5 .0 0 7 5 0 .0 0 8 2 5 .0 0 9 0 0 .0 0
A: P o w e r
7 1 7 8 .1 5 6 4 6 0 .7 8 5 7 4 3 .4 5 0 2 6 .0 3 4 3 0 8 .6 5
O xid e E R
4 7 0 .0 0 4 2 7 .5 0 3 8 5 .0 0 9 0 0 .0 0 8 2 5 .0 0 7 5 0 .0 0 6 7 5 .0 0
B : P re s s u re 3 4 2 .5 0
3 0 0 .0 0 6 0 0 .0 Plot 0 DESIGN-EXPERT
A: P o w e r
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APPENDIX H Polysilicon Etch Rate Response Surface Analysis
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4 7 0 .0 0
P o lys ilic o n
8 4 8 .2 3 3
4 2 7 .5 0
7 9 8 .8 1 7
B : P re s s u re
3 8 5 .0 0
7 42 9 .4
6 9 9 .9 8 3
3 4 2 .5 0
6 5 0 .5 6 7
3 0 0 .0 0 6 0 0 .0 0 6 7 5 .0 0 7 5 0 .0 0 8 2 5 .0 0 9 0 0 .0 0
A: P o w e r
P e rturb a tio n
902
8 2 1 .7 5
BA
P o lys ilic o n
7 4 1 .5
AB
6 6 1 .2 5
581 -1 .0 0 0 -0 .5 0 0 0 .0 0 0 0 .5 0 0 1 .0 0 0
D e via tio n fr o m R e fe re n c e P o in t
DESIGN-EXPERT Plot
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9 1 4 .5 3 6
B : P re s s u re
8 3 1 .1 5 2
7 4 7 .7 6 8
6 6 4 .3 8 4
P o lys ilic o n
581 6 0 0 .0 0 6 7 5 .0 0 7 5 0 .0 0 8 2 5 .0 0 9 0 0 .0 0
A: P o w e r
8 9 7 .6 5 8 2 3 .5 2 5 7 4 9 .4 6 7 5 .2 7 5 6 0 1 .1 5
P o lys ilic o n
4 7 0 .0 0 4 2 7 .5 0 3 8 5 .0 0 9 0 0 .0 0 8 2 5 .0 0 7 5 0 .0 0 6 7 5 .0 0 6 0 0 .0 0 3 0 0 .0 0
B : P re s s u re 3 4 2 .5 0
A: P o w e r
DESIGN-EXPERT Plot
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APPENDIX I Photo Resist Etch Rate Response Surface Analysis
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P ho to R e s is t
1 6 7 2 .7 3
4 2 7 .5 0
B : P re s s u re
1 5 5 8 .0 7
23 .4 144
3 8 5 .0 0
1 3 2 8 .7 3
3 4 2 .5 0
1 2 1 4 .0 7
3 0 0 .0 0 6 0 0 .0 0 6 7 5 .0 0 7 5 0 .0 0 8 2 5 .0 0 9 0 0 .0 0
A: P o w e r
P e rturb a tio n
1905
1 6 8 8 .7 5
P h o to R e s is t
A B C C B A
1 4 7 2 .5
1 2 5 6 .2 5
1040 -1 .0 0 0 -0 .5 0 0 0 .0 0 0 0 .5 0 0 1 .0 0 0
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O ne F a c to r P lo t
1905
1 6 8 8 .7 5
1 2 5 6 .2 5
P h o to R e s is t
1 4 7 2 .5
1040 1 .8 0 2 .0 0 2 .2 0 2 .4 0 2 .6 0
C : G a s R a tio
1 7 3 4 .6 5 1 5 8 9 .0 3
1 2 9 7 .7 8 1 1 5 2 .1 5
P h o to R e s is t
1 4 4 3 .4
DESIGN-EXPERT Plot
9 0 0 .0 0 8 2 5 .0 0 7 5 0 .0 0 2 .2 0 2 .0 0 1 .8 0 6 0 0 .0 0 2 .6 0 2 .4 0
A: P o w e r6 7 5 .0 0
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C : G a s R a tio
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APPENDIX J Oxide:Polysilicon Selectivity Response Surface Analysis
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4 7 0 .0 0
O xid e :P o lys ilic o n

8 .0 9 3 3 3
4 2 7 .5 0
7 .8 6 1 6 7
B : P re s s u re
3 8 5 .0 0
23 7 .6
7 .3 9 8 3 3
3 4 2 .5 0
7 .1 6 6 6 7
3 0 0 .0 0 6 0 0 .0 0 6 7 5 .0 0 7 5 0 .0 0 8 2 5 .0 0 9 0 0 .0 0
A: P o w e r
8 .5 2 0 0 2
B : P re s s u r e
8 .0 7 2 5 1
7 .6 2 5 0 1
7 .1 7 7 5
6 .7 3 6 0 0 .0 0 6 7 5 .0 0 7 5 0 .0 0 8 2 5 .0 0 9 0 0 .0 0
A: P o w e r
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P e rturb a tio n
8 .4 3
B
8 .0 0 5
A C
7 .5 8
C A
7 .1 5 5
6 .7 3 -1 .0 0 0 -0 .5 0 0 0 .0 0 0 0 .5 0 0 1 .0 0 0
D e via tio n fro m R e fe re n c e P o in t
8 .3 2 5 7 .9 7 7 5
7 .6 3
7 .2 8 2 5 6 .9 3 5
4 7 0 .0 0 4 2 7 .5 0 3 8 5 .0 0 9 0 0 .0 0 8 2 5 .0 0 7 5 0 .0 0 6 7 5 .0 0 6 0 0 .0 0 3 0 0 .0 0
B : P re s s u re 3 4 2 .5 0
A: P o w e r
DESIGN-EXPERT Plot
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APPENDIX K Oxide:Photo Resist Selectivity Response Surface Analysis
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4 7 0 .0 0
O xid e :P ho to R e s is t
4 .4 8 5 7 5 4 .3 0 3 2 5 4 .1 2 0 7 5
4 2 7 .5 0
B : P re s s u re
3 8 5 .0 0
3 .9 3 8 2 5
3 4 2 .5 0
3 .7 5 5 7 5
3 0 0 .0 0 6 0 0 .0 0 6 7 5 .0 0 7 5 0 .0 0 8 2 5 .0 0 9 0 0 .0 0
A: P o w e r
P e rturb a tio n
4 .8 6
4 .4 6 7 5
O xid e :P h o to R e s is t
A C
4 .0 7 5
3 .6 8 2 5
C A
3 .2 9 -1 .0 0 0 -0 .5 0 0 0 .0 0 0 0 .5 0 0 1 .0 0 0
D e DESIGN-EXPERT via tio n fr o m R e fe re n c e P o in t Plot
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4 .8 6
B : P re s s u re
4 .4 6 7 5
4 .0 7 5
3 .6 8 2 5
3 .2 9 6 0 0 .0 0 6 7 5 .0 0 7 5 0 .0 0 8 2 5 .0 0 9 0 0 .0 0
A: P o w e r
4 .4 0 9 5 4 .2 0 0 7 5
3 .7 8 3 2 5 3 .5 7 4 5
3 .9 9 2
9 0 0 .0 0 8 2 5 .0 0 7 5 0 .0 0 2 .2 0 2 .0 0 1 .8 0 6 0 0 .0 0 2 .6 0 2 .4 0
A: P o w e r6 7 5 .0 0
C : G a s R a tio
DESIGN-EXPERT Plot
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Doug Purvis, Mei Lee Gallagher IEE 572 Final Project Appendix

Appendix A Oxide Etch Rate Data Analysis

Require Model Model Error Error Error Error Error Model

SumSqr 1.67445E+006 7.64014E+006 56784.5 12800 22050 220.5 4000 4120.9

% Contribtn 17.7857 81.1523 0.603156 0.13596 0.234212 0.00234212 0.0424874 0.0437715

Final Equation in Terms of Coded Factors: Oxide ER +5733.25 +457.50 +977.25 = *A *B

Appendix B Polysilicon Etch Rate Data Analysis

Require Model Model Error Error Error Error Error Model

SumSqr 44104.5 43808 1682 18 0 264.5 0.9 16.9

% Contribtn 49.0623 48.7325 1.87108 0.0200234 0 0.294233 0.00100117 0.0187998

Final Equation in Terms of Coded Factors: Polysilicon ER +748.75 +74.25 +74.00 = *A *B

Appendix C PhotoResist Etch Rate Data Analysis

Require Model Model Model Error Error Error Error Model

SumSqr 331705 157641 61425.1 6216.13 2211.13 351.125 34.225 3080.03

% Contribtn 58.9526 28.0169 10.9168 1.10477 0.392974 0.062404 0.00608267 0.5474

Appendix D Oxide:Polysilicon Selectivity Data Analysis

Require Model Model Error Error Error Error Error Model

SumSqr 0.143113 2.52001 0.0055125 0.0561125 0.0465125 0.0153125 0.0065025 0.0075625

% Contribtn 5.10999 89.9799 0.19683 2.00356 1.66078 0.54675 0.232179 0.270028

Sum of Squares DF 0.13 2.66

Mean Square 1 2 0.13 1.33

F Value 51.23 5.51 96.96 0.29

Prob > F 0.0005 0.0658 0.0002 0.6127

1 0.14 1 2.52 1 7.563E-003 5 9 0.026

Block 1 Block 2 A-Power 1.00 B-Pressure 1.00 Center Point 1.00

-0.12 0.12 -0.13 0.56 0.069

1 1 1 1 0.057 0.057 0.13 -0.28 0.41 -0.26 0.013 0.71 0.40

Appendix E Oxide:Photo Resist Selectivity Data Analysis

Require Model Model Model Model Error Error Error Model

SumSqr 0.456013 0.762612 0.255613 0.132612 0.0210125 0.0021125 0.0046225 0.0189225

% Contribtn 27.5783 46.1205 15.4587 8.02001 1.27077 0.127758 0.279555 1.14438

Error 0.034 0.034 0.034 0.034 0.034 0.076

Low 3.91 -0.35 0.20 -0.29 -0.24 -0.35

High 4.12 -0.13 0.42 -0.071 -0.021 0.13

Student ResidualLeverage -0.046 0.725 0.078 0.725 -0.057 0.725

Appendix F Oxide Etch Rate Natural Logrithmic Transformation Data Analysis

Require Model Model Error Error Error Error Error Model

SumSqr 0.0563284 0.242702 0.00215724 0.00374974 0.00139504 8.44947E-005 0.000207686 0.00122047

% Contribtn 18.2976 78.839 0.700754 1.21806 0.453163 0.0274472 0.0674645 0.396457

APPENDIX G Oxide Etch Rate Response Surface Analysis

D e via tio n fro m R e fe r e n c e P o in t

APPENDIX H Polysilicon Etch Rate Response Surface Analysis

APPENDIX I Photo Resist Etch Rate Response Surface Analysis

APPENDIX J Oxide:Polysilicon Selectivity Response Surface Analysis

O xid e :P o lys ilic o n

O xid e :P o lys ilic o n

O xid e :P o lys ilic o n

D e via tio n fro m R e fe re n c e P o in t

O xid e :P o lys ilic o n

APPENDIX K Oxide:Photo Resist Selectivity Response Surface Analysis

D e DESIGN-EXPERT via tio n fr o m R e fe re n c e P o in t Plot

Das könnte Ihnen auch gefallen

Final Equation in Terms of Coded Factors: Oxide ER +5733.25 +457.50 +977.25 = A B

Final Equation in Terms of Coded Factors: Polysilicon ER +748.75 +74.25 +74.00 = A B