2

CUSTOM OUTSOURCING SERVICES

YOUR ONE STOP OUT-SOURCING SOURCE
BECO
can solve all of your out-sourcing requirements because:

BECO BECO

is NOT just a valve company!

has for over FIVE (5) years been providing the following Out-Sourced services for OEMs and End Users:

Fluid Control Products

Standard and Custom Valves, fittings, Pumps, Flow Meters, Spray Guns

Custom Machining
Air Cylinders, Linear Actuators, Machine Components and Substrate Carries

Custom Plastic Fabrication

Tanks, Covers, Cabinets, Enclosures, Ducts, Plenums, Housings

Assembly Service
Plumbing, Electrical, Mechanical

Complete Turn-Key Products

Small Manually Operated Wet Stations, Filtration Systems, Testing Stations

23361 Peralta Drive Laguna Hills, CA 92653 Ph:99.458.3731 Fax: 949.458.2787 www.becomfg.com - info@becomfg.com

ASSEMBLY SERVICE

BEC O ha s been a ssembling our own fluid control products. W e a re plea sed to a nnounce tha t we a re now per forming tha t sa me ser vice for ma ny customers tha t ha ve deter mined tha t O ut Sourcing with BEC O is a via ble wa y of reducing cost a nd reducing inter na l work-loa d.

BEC O ha s a ssembly fa cilities tha t will fit a ny requirements/ specifica tions including cla ss 1 0 clea n-room a rea s.

BEC O s skilled engineering sta f fwill be plea sed to help you with the development of any assembly tha t you require. W e opera te on A utoC A D, ProE W hether your needs a re prototype or high a nd SolidWorks electronic pla tfor ms. volume BEC O ca n help. W e put together sma ll If your assembly requirements are small and simple electromecha nica l suba ssemblies or complete or large and complex BECO can show the value of: ma chines constructed of welded or bolted together components a nd tha t require ha rd Out Sourcing with BECO ( welded) a nd soft plumbing, electrica l a nd electronic control systems with or without software.

PLASTIC FABRICATION

PLASTIC FABRICATION FOR ALL APPLICATIONS FULL MACHINE SHOP WITH CNC CAPABILITIES LARGE FACILITY FOR WELDING, ROUTING, AND CUTTING 15 YEARS EXPERIENCE ENGINEERING SUPPORT CAD/PRO-E/ SOLID WORKS IN HOUSE DESIGN OR BUILD TO CUSTOMERS SPECIFICATIONS PLATING TANKS SEMICONDUCTOR INDUSTRY: TANKS, BENCHES, PLENUMS, GLOVEBOXES, ETC. OUR STOCK INCLUDES PVDF, HALAR, ACRYLIC, TEFLON, POLYPROPYLENE, FIRE RETARDENT POLYPRO, POLYCARBONATE, AND PVC

5 3

PLASTIC FABRICATION

BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

CUSTOM MACHINING SERVICE

In addititon to the high quality turn_Key products and components that BECO can provide you with Custom Machining Services for any of your plastic piece part requirements. BECOs state-of-the-art machine shop is the perfect solution for your prototype, low volume or high volume, high tolerance plastic part needs. We hav all types of CNC and manual machining equipment to ensure there is no part that we cant manufacture. To prevent ion and lubricant contamination we reserve our machinng to plastic and only plastic. We do not machine metal. If you are looking for assistance with assemblies that are comprised of both plastic and metal components we will be pleased to outsource the metal parts and assemble them with the BECO machined plastic parts to provide you with the assemby(s) you require. We have been machinng plstic for our fluid control products for almost 15 years. We ahve experience machining almost every kind of plastic available. BECOs engineering staff can help you with the development of your plastic parts, components, subassemblies, assemblies, or complete products on AutoCAD, ProE, or SolidWorks electronic platorms. Give BECO Sales a call or send us your drawing for a quotation. Let us show you the value of OUT SOURCING with BECO

Pneumatic Valves

MTV-TEFLON PNEUMATIC DIAPHRAGM VALVES

ALL TEFLON WETTED SURFACE LIGHTWEIGHT COMPACT VALVE POLYPROPYLENE ACTUATOR AVAILABLE IN 2-WAY AND 3-WAY CONFIGURATION

Specifications
Vacuum Inlet Port (common) Media Pressure Actuator Pressure Media Temperature Ambient Temperature Outlet Port NO Port NC Port 2-Way 1 Micron 40 psi 20 psi N/A N/A 40-60 psi -50 to +100C -50 to + 100C 3-Way 1 Micron 40 psi N/A N/A 20 psi 40-60 psi -50 to +100C -50 to + 100C .03 .18 .75 2.00

Cv

1/16 Orifice 1/8 Orifice 1/4 Orifice 3/8 Orifice

.03 .18 .75 2.00

MTV-TEFLON MTV-TEFLONPNEUMATIC PNEUMATICDIAPHRAGM DIAPHRAGMVALVES VALVES

1.75 DIA 10-32 UNF-2B 10-32 UNF-2B 1/4-28 UNF-2B TYP 2-56 STUD FOR MOUNTING 2 PLACES 1.66 (N.O., 3W) 1.48 (N.C.) 1/16 TUBE 1/8 TUBE 2-56 STUD FOR MOUNTING 2 PLACES 1.66 (N.O., 3W) 1.48 (N.C.) 1/8 FNPT PNEUMATIC PORT 4-40 STUD PNEUMATIC PORT .495 SQ .495 SQ 1.00 DIA .800 SQ .875 SQ 1.88 DIA 1.12 SQ .800 SQ 1.00 DIA 1/8 FNPT PNEUMATIC PORT 3.10 (N.O., 3W) 2.85 (N.C.) 1/8 FNPT PNEUMATIC PORT 3.10 (N.O., 3W) 2.85 (N.C.)

1/8 FNPT OR 1/4 FNPT

4-40 STUD FOR MOUNTING 2 PLACES

1/16 " ORIFICE SUB-MINIATURE - MTVS

1/8", 1/4", AND 3/8" ORIFICE

Ordering Format

MTV - A
A=PORT SIZE 2=1/8" 4=1/4" 6=3/8" B=ORIFICE SIZE 2=1/8" 4=1/4" 6=3/8"

E - F
E=BODY SHAPE R=Round S=Square(Mandatory for Tube Ends and Long Flare) F=VALVE SEAT T=Teflon V=Viton K=Kalrez

C=VALVE CONFIGURATION 2C=2-Way Normally Closed 2O=2-Way Normally Open 3W=3-Way D=PORT SELECTION F=Female Pipe Thread T=Tube End LF=Long Flare

MTVS - A
A=PORT SIZE 1=1/16" 2=1/4-28 3=1/8 4=10-32 B=Orifice Size 1=1/16

E - F
E=BODY SHAPE R=Round S=Square F=VALVE SEAT T=Teflon V=Viton K=Kalrez

C=VALVE CONFIGURATION 2C=2-Way Normally Closed 2O=2-Way Normally Open 3W=3-Way D=PORT SELECTION F=Female Pipe Thread M=Male Pipe Thread

BECO Manufacturing Co., Inc. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

10

CORROSION RESISTANT VALVES

Corrosion Resistant (CR) Valves offer corrosion control through a complete fluoroplastic design and construction. The wetted surface is manufactured from virgin Teflon while the pneumatic side is constructed from PVC. This is a large flow valve capable of handling tough chemicals internally while operating in severe external environments.

Size Cv

1/4" Orifice 1/2" Orifice 3/4" Orifice 0.8 2.8 7.5 10.7 60 50 40-60 240 140
Spring Return Teflon PVC

1" Orifice 1 1/2" Orifice 13.5 30.0 42 60 20 50/70 240 140

Spring Return Teflon PVC

Flow Rate (GPM @ 60 psi) 4.6 Max Pressure Inlet Port-psi 60 Outlet Port-psi 60 Actuator Pressure-min/max 40-60 Max Media Temperature 240 Max Ambient Temperature 140 Pneumatic Actuator Spring Return Wetted Surfaces Teflon Pneumatic Surfaces PVC Actuator Port 10-32 Inlet Port 1/4"FNPT Outlet Port 1/4"FNPT or Tube

23 60 22 50-70 240 140

Spring Return Teflon PVC

94 60 10 40/60 240F 140F

Spring Return Teflon PVC

1/8"FNPT 1/2"FNPT
1/2"FNPT or Tube

1/8"FNPT 3/4"FNPT
3/4"FNPT or Tube

1/8"FNPT 1"FNPT
1"FNPT or Tube

1/8"FNPT 1 1/2"FNPT
1 1/2"FNPT or Tube

11

CORROSION RESISTANT VALVES

1/8 NPT (NO) Air To Close (1/4" and 1/2") D 1/8 NPT Air To Close (1" and 1 1/2") Inlet Port C A B 1/8 NPT Air To Open

I E
3"

J H K

Outlet Port

F Long Flare G Pipe

Tube End

Size 1/4" 1/2" 3/4" 1" 1.5"

A 3.00 3.77 5.75 5.75 6.75

B 3.00 4.10 5.75 5.75 n/a

C 3.20 3.95 5.88 5.88 n/a

D 1.50 1.75 2.75 2.75 3.50

E 1.50 1.81 2.81 2.81 n/a

F 3.00 3.56 5.56 5.56 n/a

G 4.50 5.37 8.37 8.37 n/a

H 0.75 0.88 1.38 1.38 1.75

I 1.27 1.38 2.25 2.25 2.48

J 0.75 0.88 1.38 1.38 1.75

K 1.50 2.44 3.50 3.50 4.50

Ordering Format

CR 4W 8 P O C C
Corrosion Resistant Port 3 (C = Closed or O = Open) Port 2 (C = Closed or O = Open) Port 1 (C = Closed or O = Open) Port Connection P = Specify FNPT or MNPT T = Tube LF = Long Flare
Inlet

Valve Configuration Orifice Size 4 = 1/4" 2W = 2 Way 8 = 1/2" 3W = 3 Way 4W = 4 Way 12 = 3/4" 16 = 1" 24 = 1 1/2"

Port 3

Port 2

Port 1

Ordering Flow Chart

CR 2W, 3W or 4W + 4, 8, 12, 16, or 24 + P or T, LF + C or O + C or O

BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

12

DRAIN VALVES
The BECO DV series is a large orifice valve capable of handling large volumes of corrosive fluids via an all non-metallic wetted surface. For cost efficiency this valve is fabricated from PVC or Polypropylene. However, it is available in PVDF, with Kalrez O O-rings.
R

This valve is also available in 2, 3 and 4 way configurations with each port operating independently. The DV can be operated either by air to open/air to close or by spring return. Either operating method can be specified in the ordering format. Custom configurations available.

Applications
Primarily used for quick draining and filling of process tanks which contain mild solutions or DI water. For hard to handle media the DV valve, machined from PVDF, is the perfect solution.

Specifications
Media Pressure Media Temperature PVC Polypropylene PVDF Actuation Pressure O-Ring Material 140 F /60 C 160 F /70 C 212 F /100 C 45-60 psi Ethylene Propylene (standard) Viton or KalrezO/ ChemrazO
R R

20 psi

13

DRAIN VALVES
Actuation Port (to close valve)
1/8 FNPT

Port (to open valve) Actuation Port (to open valve)

1/8 FNPT 1/8 FNPT

Inlet Port (common) G

JJ FNPT FNPT

F M L B C K A
(2-Way) (3-Way) (4-Way)

HH

Orifice Size 3/4" 1" 1.5" 2"

A 2.16 2.16 2.81 3.00

B 2.56 2.56 3.00 3.50

C 3.50 3.50 4.38 4.81

D 6.07 6.07 7.38 8.31

E 8.63 8.63 10.38 11.81

F 1.79 1.79 1.97 2.28

G 5.50 5.50 6.06 6.88

H Dia 4.00 4.00 4.00 5.00

K FNPT J FNPT Port 1 3/4" 1" 1.5" 2" 3/4" 1" 1.5" 2"

L FNPT M FNPT Port 2 Port 3 3/4" 1" 1.5" 2" 3/4" 1" 1.5" 2"

Ordering Format

DV
Drain Valve

PVC

16

EP

Valve Material of Construction Configuration PVC = Polyvinyl Chloride 2 = 2 Way POL = Polypropylene 3 = 3 Way PVDF = Polyvinylidene Fluoride 4 = 4 Way Custon Configurations Available

Orifice Media O-Ring Type Size EP = Ethylene Propylene 12 = 3/4 VT = Viton Porting 16 = 1 KA = Kalrez O /ChemrazO 1/2 Configuration 24 = 1 32 = 2 C = Spring to Close, Air to Open O = Spring to Open, Air to Close A = Air to open, Air to Close
R R

4-Way Example: COA = (C= Port 1/ O= Port 2/ A= Port 3 (Shown Top Left)

BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

14

DILUTION DRAIN VALVES

The BECO Dilution Drain Valve is ideal for cooling and diluting solutions while draining. The valve is designed to shut off the drain automatically if the water flow is interrupted. The DDV fits tanks with 1/2 and 3/4 main drain hook-up. Standard dilution ratios are 2:1 and 6:1. Other dilution rates are available at an additional charge. Note: Higher dilution rates will cause slower drain rates.

Applications Used to drain a tank while diluting and cooling the discharge.
Water In Diluted Chemical Out

Specifications
Water Pressure Media Temperature Ambient Temperature 30 - 60 psi 150 C max 100 C max
o o

15

DILUTION DRAIN VALVES

5.25 1.75 Main Drain Port 1.62 3/8 " FNPT Inlet 2.12

2.00 Dia

1/2" FNPT Outlet

Ordering Format

DDV
Dilution Drain Valve

02
Dilution Ration 02 = 2:1 (std) 06 = 6:1 (std) 10 = 10:1 20 = 20:1

08
Main Drain Port 08 = 1/2 FNPT 12 = 3/4 FNPT

V
O-Ring Type V = VitonO K = KalrezO
R R

T
Body Material T = TeflonO P = PVDF
R

BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

16

INLINE DIAPHRAGM VALVES

Features all Teflon wetted path diaphragm design for ultra pure use as a DI water valve or acid drain valve. The IDF valve can significantly reduce bacteria buildup and maintain a consistent flow via an independent mechanism. This control mechanism will allow for precise adjustments and a cleaner cavity. The IDF valve is presently offered in a two-way closed configuration. The anti-bacteria configuration can be designated by adding AB onto the suffix of the model number.

Specifications
Size Cv Max. Pressure (psi) Inlet Port Outlet Port Actuator Pressure (min./max.) Max. Media Temperature Max.Ambient Temperature Wetted Surfaces Pneumatic Surfaces Inlet Port Outlet Port Actuator Port Anti-Bacteria Valve Stem Option Adjustable Bleed By Option 1/2" 2.8 60 60 60/80 300F 140F Teflon Polypropylene 1/2" 1/2" 1/8" Polyvinylidene - Fluoride 0 - .75 GPM 3/4" 7.5 60 60 60/60 300F 140F Teflon Polypropylene 3/4" 3/4" 1/8" Polyvinylidene - Fluoride 0 2.5 GPM

17

INLINE DIAPHRAGM VALVES

G

ACTUATOR A

D C

MTG. HOLES .201 DIA.

Size 1/2" 3/4"

A 3.38 4.50

B 1.00 1.25

C 2.75 3.25

D 1.75 2.30

E 2.25 2.80

F 1.125 1.225

G 1.275 1.625

Ordering Format

IDF 103233 001 AB

Inline Diaphragm Valve Port/Orifice Size 103233 = 1/2 103188 = 3/4 End Connection 001 = FNPT 002 = Tube 003 = Longflare (Tube) Anti-Bacteria (option)

BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

18

MULTI PURPOSE VALVES

The BECO MP Valve Body is manufactured in Teflon, PVC, Polypropylene, or PVDF depending on the individual application. The Teflon configuration is ideal for anti-corrosion and elevated temperature applications as well as making an excellent acid drain valve. The PVC, Poly, and PVDF configurations are the choice for wet bench manufacturers and semiconductor facilities where ultra pure DI Water is required.

Specifications
Size Cv Max Pressure Inlet Port-psi Outlet Port-psi Actuator Pressure-psi (min/max) Max Media Temperature PVC Poly PVDF Teflon Max Ambient Temperature PVC Poly PVDF Teflon 140 F 160 F 212 F 350 F 120 F 140 F 175 F 302 F 120 F 140 F 175 F 302 F 140 F 160 F 212 F 350 F 120 F 140 F 175 F 302 F 120 F 140 F 175 F 302 F 75 45 40/80 60 10 40/80 60 10 40/80 1/2" Orifice 2.8 3/4" Orifice 7.5 1" Orifice 13.5

TEFLON is a registered trademark of The DuPont Corporation

19

MULTI PURPOSE VALVES

Size 1/2" 3/4" 1"

Inlet Port 1/2" FNPT 3/4" FNPT 1" FNPT

Outlet Port 1/2" FNPT 3/4" FNPT 1" FNPT

A 3.40 4.85 4.85

B 2.75 4.00 4.00

C 0.650 1.000 1.000

D 1.337 2.160 2.160

E 2.345 3.465 3.465

F 2.00 3.00 3.00

MP

PVC

P
Indicates Port Connection P = FNPT S = Socket LF = Longflare (PVC, POLY, and PVDF only)

RC

Material of Construction PVC = Polyvinyl Chloride Indicates Indicates POL = Polypropylene Orifice & Port Multipurpose PVDF = Polyvinylidene Size Valve Fluoride 8 = 1/2" 12 = 3/4" 16 = 1"

Option RC = Restricted Closure RO = Restricted Opening Indicates RB =Restricted Both Valve AB = Anti-Bacteria Configuration C = Closed O = Open

BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

20

TEFLON PNEUMATIC VALVES

Features
One Piece Teflon Body Optimum Anti-Corrosion Design Hi-Temp use-Upgraded Materials Justifies use as DI Water Valve No Media Contact with Elastomers, Lube or Spring

Materials of Construction
Body................... TFE Teflon Bellows/Poppet.... TFE Teflon Backing Plate....... TFE Teflon Piston.................. PVDF Cap.................... Polypropylene Spring................. Stainless Steel

Specifications
Size Cv Max Pressure2 Port A Port B Actuator Pressure-psi min/max Max Media Temperature2
2. See Pressure vs. Temperature graph for full range

1/2" Orifice 2.2 75 psi 45 psi 40/80 350F

3/4" Orifice 2.8 60 psi 10 psi 40/80 302F

1" Orifice 7.5 60 psi 10 psi 40/80 302F

1. Specifications applicable for both normally open and normally closed configurations

21

TEFLON PNEUMATIC VALVES

D 1/8" FNPT

F C

PORT A

H PORT B

G TYP

J (TAPPED HOLE FOR MOUNTING)

Type 2 2 2 3 3 Way Way Way Way Way

Size 1/2" 3/4" 1" 1/2" 3/4" or 1"

Port A
(FNPT)

Port
(FNPT)

C 3.30 4.50 4.50 3.30 4.50

D 2.50 3.56 3.56 4.25 6.00

E 1.05 1.38 1.38 1.05 1.38

F 2.06 2.69 2.69 2.06 2.69

G .700 1.210 1.210 .700 1.210

H .530 .850 .850 .530 .850

J 1/4-20 1/4-20 1/4-20 1/4-20 1/4-20

1/2" 3/4" 1" 1/2" 3/4" or 1"

1/2" 3/4" 1" 1/2" 3/4"

PRESSURE VS. TEMPERATURE

80 70 PRESSURE (PSIG) 60 50 40 30 20 10 0 100 200 TEMPERATURE F 1/2" ORIFICE 300 350 400 PRESSURE (PSIG) 80 70 60 50 40 30 20 10 0 100 200 TEMPERATURE F 3/4" & 1" ORIFICE 300 350 400

AB OPTION

.563 DIA.

.800 CLOSED .900 OPEN

22

ANTI-BACTERIA TP
This new style of TP Valve can significantly reduce bacteria build up and maintain a consistant flow via an independent mechanism. This control mechanism will allow for more precise adjustments and a cleaner cavity. This valve is presently offered only in the closed model configuration and is designated by adding -AB onto the suffix of any of our closed TP Valves.

Ordering Format

TP 2W 8 P C RC
Teflon Pneumatic 2-Way Female Pipe Port Connection Options RC = Restricted Closure RO = Restricted Open AB = Anti-Bacteria

Port Configuration Orifice & Port Size C = Closed 8 = 1/2 O = Open 12 = 3/4 16 = 1

23

WIDE BODY TP
The BECO Wide Body TP Valve series, like its smaller (2 way) counterpart, is an extremely reliable all Teflon pneumatic valve. It features the expandability of the CR line, the benefits of one piece contruction, and the purity and chemical resistance of Teflon.
D 1/2" ONLY 1.875

1/8" FNPT

1.200

3/4" & 1" ONLY

F C

PORT A PORT B 2 PLACES H (TYP)

G (TYP)

J (TAPPED HOLE FOR MOUNTING)

Ordering Format

TP 3W 8 P 0 C
Teflon Pneumatic 3-Way Orifice & Size 8 = 1/2 12 = 3/4 16 = 1 Female Pipe Port Connection Port A (1) Configuration C = Closed O = Open Port B (2) Configuration C = Closed O = Open

BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

24

SUCKBACK VALVES
BECO offers two styles of Suckback Valves. The original Suckback (this page) must be used with other valving to first shut off the flow. BECOs latest design (back page) incorporates everything into one valve, and the vacuum is adjustable.

Suckback Valve
BECO Suckback Valves are ideal for photoresist dispensing equipment to prevent excess dripping of the photoresist solution from dispense nozzles. When air pressure is removed from the valve actuator, the diaphragm is pulled up forming a vacuum in the valve body chamber, thus pulling and sucking the last drop of photoresist. The BECO Suckback Valve features all Teflon wetted surfaces.

Specifications
Actuator Pressure (min/max) Max Media Temperature 40/60psi 160F/ 70C

Ordering Format

SBV
SUCKBACK VALVE ORIFICE SIZE All Orifices are 1/8

M
PORT SIZE M = MNPT F = FNPT T = TubeCompression LF = Tube Longflare

PORT SIZE 2 = 1/8 4 = 1/4

TYPE PORT F M T LF
TEFLON is a registered trademark of The DuPont Corporation

A 1/4 FNPT 1/4 MNPT 3/8 Tube 3/8 Longflare

B 2.25 2.25 2.25 3.15

25

SUCKBACK VALVES
Suckback Valve #SBV-104168
This BECO Suckback Valve, is a normally closed Diaphram Valve. As the air pressure is removed from the valve actuator, a diaphram moves upward creating a vacuum. The adjustment knob on top of the valve allows the amount of vacuum to be controlled, thus controlling the volume of suckback. The BECO Suckback Valve features all Teflon wetted surfaces.

Specifications
Actuator Pressure (min/max) Max Media Temperature 40/60psi 160F/ 70C

Ordering Format

SBV
SUCKBACK VALVE

104168
PORT SIZE M = MNPT F = FNPT T = Tube-Compression LF = Tube Longflare

TYPE PORT F M T LF

A 1/4 FNPT 1/4 MNPT 3/8 Tube 3/8 Longflare

B 2.745 2.745 2.745 3.625

BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

26

WATER VALVES
The BECO Water Valve (WV) is manufactured from industrial plastics such as PVC, Polypropylene, and PVDF. The valve has a spring return and is pneumatically actuated to open or close depending upon the model. The valve is compact and comes with four tapped holes on the base for ease of mounting. Porting is generally 1/2" or 1" FNTP. Butt weld end configurations are available on the PVDF model to eliminate any chance of bacteria build up in the pipe threads.

Applications
Primarily used for DI water in rinse tanks and quick dump applications. Valves of PVC are the most widely used, but for severe applications, polypropylene or PVDF will generally meet the requirements.

Specifications
Size Cv Max Pressure Inlet Max Media Temperature PVC Polypropylene PVDF Actuator Pressure (min/max) 140F/ 60C 160 F/ 70 C 212 F/100 C 35/70 psi 1/4" 0.8 80 psi 1/2" 2.8 80 psi 3/4" 7.5 60 psi 1" 13.5 60psi

TEFLON is a registered trademark of The DuPont Corporation

27

WATER VALVES

Orifice Size A B 1/4" 1.520 1.000 1/2" 1.690 .955 1/2" 1.146 1.146 3/4" 2.280 1.330 1" 3.825 1.685 =Low Profile (in line) water valve

C 2.440 2.780 2.250 3.660 4.425

D Dia 2.25 2.75 2.75 3.00 4.00

E Thd 1/4"-20 UNC-2B 1/4"-20 UNC-2B 1/4"-20 UNC-2B 1/4"-20 UNC-2B 1/4"-20 UNC-2B

F Dia 1.81 2.00 2.00 2.50 3.44

Ordering Format

WV
WATER VALVE

PVC

8
ORIFICE SIZE
4 = 1/4 12 = 3/4

8
PORT SIZE
8 = 1/2 16 = 1

P
PORT TYPE P = FNPT LF = Longflare

NC
VALVE CONFIGURATION NC = Normally Closed NO = Normally Open

EP
O-RING TYPE EP = Ethylene Propylene VT = Viton KA = Kalrez

MATERIAL OF CONSTRUCTION PVC = Polyvinyl Chloride POL = Polypropylene PVDF = Polyvinylidine Fluoride

IWC
INLINE (Low Profile) WATER VALVE

PVC
MATERIALS OF CONSTRUCTION PVC = Polyvinyl Chloride POL = Polypropylene PVDF = Polyvinylidine Fluoride

2C8
VALVE CONFIGURATION 1/2 2 Way Normally Closed

EP
O-RING TYPE EP = Ethylene Propylene VT = Viton KA = Kalrez

Options:
Eliminate Bacterial Build-Up: A PVC adjusting screw is installed off Center at top of valve. Clockwise screw rotation prevents complete Valve closure thereby allowing a controlled "drip". Ideal for DI Water users. Add "-AST" to suffix of part number. Example: WV-PVC-88NC-EP-AST. Metering Effect: A PVC Adjusting screw is installed at center of valve base. Clockwise rotation will decrease orifice opening. Add "-ASB" to suffix of Part number. Example: WV-PVC-88NC-EP-ASB.

BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

28

QUICK DUMP
The Quick Dump (QD) Valve is designed to be welded to the bottom of a tank and allows for quick drainage. This valve is manufactured in polypropylene, or PVDF stainless steel depending on the individual application. The Quick Dump is available with either an ORing of domed hardseat design which prevents ponding and allows for slight trickle action. The valve is compact and comes with optional air to open/spring to close or air to open/air to close configurations.

Specifications
Actuator Pressure-psi min/max Media Temperature Polypropylene PVDF

2
60/70

4
45/70

6
25/30

160 F/70 C 212 F/ 100 C

TEFLON is a registered trademark of The DuPont Corporation

29

QUICK DUMP

P/N 104520 104521 103809 103952

A 2 2 4 4 4 4 6 6

B 3 3 5 5 5 5 7 7

C 3.0 3.0 3.0 3.0 4.0 4.0 6.6 6.6

D .78 .78 .80 .80 1.5 1.5 2.5 2.5

4(High Flow) 104602 104683 6 103951 104162

Ordering Format O-Ring Seat

QD

103809

POL

EP

001
CONFIGURATION 001 = Air Open/ Spring Close 002 = Air Open/ Air Close O-RING TYPE EP = Ethylene Propylene VT = Viton KA = Kalrez

QUICK DUMP BECO PART NUMBER 104520 - 2 103809 - 4 104602 - 4 High Flow 103951 - 6

MATERIAL OF CONSTRUCTION POL = Polypropylene PVDF = Polyvinylidene Fluoride

Hard Seat

QD

103952

POL

001
CONFIGURATION 001 = Air Open/ Spring Close 002 = Air Open/ Air Close

QUICK DUMP

BECO PART NUMBER 104521 - 2 103952 - 4 104683 - 4 High Flow 104162 - 6

MATERIAL OF CONSTRUCTION POL = Polypropylene PVDF = Polyvinylidene Fluoride

BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

30

TEFLON ASPIRATORS
Air & Liquid
BECO Aspirators are machine from virgin Teflon, and are designed for efficient and rapid siphoning of hard to handle chemicals. The Air Aspirator, using city or DI Water pressures from10-50 psi or more will effect aspiration of viscous acids such as HF and H2SO4. Both Liquid & Air Aspirators may be ordered individually or in kit form.

Air & Liquid Aspirator (Common Dimensions)

TEFLON is a registered trademark of The DuPont Corporation

31

TEFLON ASPIRATORS
How To Order Air Aspirators
Part No. A-A-1866 KA-A-1866 KA-A-1866-CHK KA-A-1866 PRO AH-1 A-A-1886 KA-A-1886 KA-A-1886-CHK KA-A-1886 PRO AH-2 Description Air Aspirator 3/8 suction Air Aspirator Kit (standard) Air Aspirator Kit with Check Valve Air Aspirator Kit with Poly Fittings Handle, 3/8 Suction Air Aspirator 1/2 suction Air Aspirator Kit (standard) Air Aspirator Kit with Check Valve Air Aspirator Kit with Poly Fittings Handle, 1/2 Suction Inlet Port 3/8 FNPT 3/8 FNPT 3/8 FNPT 3/8 FNPT N/A 3/8 FNPT 3/8 FNPT 3/8 FNPT 3/8 FNPT N/A Siphon Port 3/8FNPT 3/8FNPT 3/8FNPT 3/8FNPT N/A 1/2FNPT 1/2FNPT 1/2FNPT 1/2FNPT N/A Outlet Port 1/2FNPT 1/2FNPT 1/2FNPT 1/2FNPT N/A 1/2FNPT 1/2FNPT 1/2FNPT 1/2FNPT N/A

Liquid Aspirators
Part No. L-A-1866 KL-A-1866 KL-A-1866-CHK KL-A-1866 PRO AH-1 L-A-1886 KL-A-1886 KL-A-1886-CHK KL-A-1886 PRO AH-2 Description Liquid Aspirator 3/8 suction Liquid Aspirator Kit (standard) Liquid Aspirator Kit with Check Valve Liquid Aspirator Kit with Poly Fittings Handle, 3/8 Suction Liquid Aspirator 1/2 suction Liquid Aspirator Kit (standard) Liquid Aspirator Kit with Check Valve Liquid Aspirator Kit with Poly Fittings Handle, 3/8 Suction Inlet Port 3/8 FNPT 3/8 FNPT 3/8 FNPT 3/8 FNPT N/A 3/8 FNPT 3/8 FNPT 1/2 FNPT 1/2 FNPT N/A Siphon Port 3/8FNPT 3/8FNPT 3/8FNPT 3/8FNPT N/A 1/2FNPT 1/2FNPT 3/8FNPT 3/8FNPT N/A Outlet Port 1/2FNPT 1/2FNPT 1/2FNPT 1/2FNPT N/A 1/2FNPT 1/2FNPT 1/2FNPT 1/2FNPT N/A

Standard Kits 1. Standard Kit includes: Aspirator, Handle, 3 Teflon Compression Fittings mounted to each port and 8 of Teflon Tubing. 2. Check Valve Kit includes: Aspirator, Handle, 2 Teflon Compression Fittings mounted to inlet and outlet ports, a Teflon Check Valve mounted to the siphon port and 8 of Teflon Tubing. 3. Poly Fitting Kit includes: Aspirator, Handle, I Teflon Compression Fitting mounted to the siphon port, 2 polypropylene compression fittings mounted to inlet and outlet pods and 8 of teflon Tubing. Recommendations for Air Aspirator 1. Minimum pressure to initiate siphoning - 5psi. 2. Suction and flow can be slightly increased by using the A-A-1886 model. Further variations of performance can be expected due to viscosity changes in fluids being siphoned.

3. For maximum continuous flow it is best to actuate the Aspirator with 30 psi of air for 5-10 seconds then turn off air supply and allow Aspirator to work by siphoning action only. 4. When mounting in a hood, it is recommended that the Air Aspirator be mounted approximately 14 below the point of suction.

BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

32

TEFLON CHECK VALVE

Tthe BECO Check Valve features all Teflon wetted surfaces to make this valve inert to corrosives, able to handle varying viscosities and maitain purity levels. External materials used in addition to Teflon, are polypropylene, and/ or anodized aluminum. Custom configurations available.

Applications

Prevents unwanted fluids from backflowing into clean process tanks or other plumbing. Ideal for applications where directional control is a must.

STOP FLOW
2 1 3 4 5

THROUGH FLOW

1. Body 2. Nut 3. Spring

4. Diffuser 5. Poppet

Specifications
Opening Pressure Max Operating Pressure Media Temperature Ambient Temperature 1 psi 50 psi 100 C 50 C

33

TEFLON CHECK VALVE

A
CHECK VALVE OPTIONS: The BECO Check Valve comes standard with female pipe. Longflare and compression fittings can also be requested. With BECO, cutom configurations are available so you can configure your part to exactly what you need

B Dia

Model BCV-22 BCV-44 BCV-66 BCV-88

* Tube ends slightly longer

A* 2.13 2.49 2.75 3.13

B 1.250 1.250 1.750 1.750

Ordering Format

BCV
Check Valve

2
Orifice Size 2 = 1/8 4 = 1/4 6 = 3/8 8 = 1/2

2
Inlet & Oultet Size 2 = 1/8 4 = 1/4 6 = 3/8 8 = 1/2 12 = 3/4

P
End Connection P = FNPT T = Tube LF = Longflare

HA
Nut or Band Style HA = Halar TA = Aluminum Banded TFE

BECO MANUFACTURING CO. INC. 2 3 3 6 1 Pera lta Drive La guna Hills, C A 9 2 6 5 3 Phone: 9 4 9 -4 5 8 -3 7 3 1 Fa x: 9 4 9 -4 5 8 -2 7 8 7 www.becomfg. com info@ becomfg. com

34

Rev. 1/03

Solenoid Valves

35

TEFLON SOLENOID VALVES

BECO Solenoid Valves are offered with 3 different internal designs. The all TFE Teflon wetted surface, Teflon with Viton O-Rings or Teflon with Kalrez O-Rings. All of our valves are isolated from media with long lasting Teflon diaphragms and can be ordered in a variety of body shapes, internal designs, end connections, flow configurations and voltages.

Specifications
Type Subminiature NC Inlet 2 Way MAX Outlet 2 Way MEDIA Common 3 Way PRESSURE NC 3 Way (PSI) NO 3 Way Media Temperature Ambient Temperature Vacuum 1/16 Orifice 1/8 Orifice Cv 1/4 Orifice 3/8 Orifice 1/2 Orifice Coil Temp 100% Duty Cycle Voltage Tolerance Wattage Coil Leads NO 30 8 30 15 8 -50 to +100C -50 to +100C 1 0.18 0.75 2.00 2.80 35C 5-6 75C 35C 75C 10% 10-13 5-6 10-13 5-6 10-13 3 (12 Long) Red/White=Power, Green=Ground 3W
Lo Watt

Miniature NC
Hi Watt Lo Watt

NO
Hi Watt Lo Watt

3W
Hi Watt

30 15

30 15

40 25

30 8

40 8 30 15 6 40 25 8

.03 70C

5 2 (12 Long)

36

TEFLON SOLENOID VALVES

Subminiature Solenoid Valve
1.12 DIA. 1.12 DIA.

TYPE 2 2 2 2 3 3 Way Way Way Way Way Way NC NC NO NO

A 1.81 2.191 N/A N/A N/A N/A

B N/A N/A 2.00 2.38 2.00 2.381

C Port 1/4-28 1/8 FNPT 1/4-28 1/8 FNPT 1/4-28 1/8 FNPT

C C A

2-56 MOUNTING STUDS

2-56 MOUNTING STUDS

.500 SQ.

.500 SQ.

2 WAY N.C.

2 WAY N.O. 3 WAY

Ordering Format

S 1 2C 1A F R V
Indicates Subminiature Valve Series Indicates Port Size 1 = 1/4 -28 2 = 1/8 FNPT 3 = 10 32 Indicates 1/16 Orifice Size Indicates Valve Configuration 2C = 2 Way Normally Closed 2O = 2 Way Normally Open 3W = 3 Way Consult factory for custom porting configurations. Indicates Valve Seat V = Viton K = Kalrez T = Teflon Indicates Round Body Shape

Indicates Female Port Selection Indicates Coil Voltage 1A = 115 VAC 2A = 230 VAC 1D = 12 VDC 2D = 24 VDC

Order Flow Chart: S + 1, 2 or 3 + 2C, 2O or 3W + 1A, 2A, 1D or 2D + F + R V, T or K Note: All coils are high pot tested.

37

TEFLON SOLENOID VALVES

Miniature Solenoid Valve
1/8 - 1/4 ORIFICE 3/8 ORIFICE 1/2 ORIFICE

3.75

4.69 4.725 .75 1.12 4-40 X .56 LG MOUNTING STUD 2 PLACES 1.000 1.75 SQ. 1.750 2.87 .80 SQ. 8-32 X .28 DP MOUNTING HOLES 2.750 0.201 MOUNTING HOLES

2.12

1.12 SQ. SQUARE BODY

1.88 DIA. ROUND BODY 1.50 2.250 45 2.750

Ordering Format

1.126

M 6 6 2C 1A F S H T
Indicates Valve Series Indicates Port Size 2 = 1/8 4 = 1/4 6 = 3/8 8 = 1/2 Indicates Orifice Size 2 = 1/8 4 = 1/4 6 = 3/8 8 = 1/2 Indicates Valve Configuration 2C = 2 Way Normally Closed 2O = 2 Way Normally Open 3W = 3 Way Consult factory for custom porting configurations. Indicates Valve Seat V = Viton K = Kalrez T = Teflon Indicates Coil Wattage H = Hi Watt (10-13 Watts) L = Lo Watt (5-6 Watts) Indicates Body Shape R = Round S = Square ( Mandatory for tube ends and long flare) Indicates Port Selection F = Female NPT T = Tube Ends LF = Longflare Indicates Coil Voltage 1A = 115 VAC 1C = 110 VDC 2A = 230 VAC 1D = 12 VDC 3A = 24 VAC 2D = 24 VDC 1B = 115 VDC 5D = 105 VDC 40 = 20VDC

Order Flow Chart

1/8 Orifice M + 2 or 4 + 2 + 2C, 2O or 3W + 1A, 2A, 3A, 1B, 2B, 1D, 2D or 5D + F, T or LF + R or S H or l + V, K or T 1/4 or 3/8 Orifice M + 4 or 6 + 4 or 6 + 2C, 2O or 3W + 1A, 2A, 3A, 1B, 2B, 1D, 2D or 5D + F, T or LF + R or S H or l + V, K or T 1/2 Orifice M + 8 + 8 + 2C + 1A, 2A, 3A, 1B, 2B, 1D, 2D or 5D + F, T or LF + R or S H or l + V, K or T

38

TEFLON SOLENOID VALVES

High Pressure Solenoid Valves
Part Number 103113-1 103113-2 103113-3 (70psi)

Available with Teflon seat, 1/4 FNPT, and 115 VAC only. Description 2 Way Normally Open 2 Way Normally Closed 3 Way (123 configuration unless otherwise specified)

Port Arrangements All Beco 3 Way Teflon Solenoid Valves my be ordered with any of 6 different porting arrangements as shown in the following chart.
Standard Configuration

Other Options: Valves with special port connections such as combinations of pipe or tube ends and connectors to mate with spherical and tapered glass joints. Extra long wire leads (12" is standard). Ordering my depend on quantity and delivery lead time. Valves without studs or valves with 4 mounting studs ( 2 are standard).
C NC

NC 132 C

NO

NO 123 C

NC

C 213 NO

NC

C 231 NC

NO

NC 312 NO

NO 321

Unless otherwise specified, 3 Way valves will be supplied in the 132 configuration. To order any of the other 5 configurations simply add the appropriate three digits after the basic part number selected form the Ordering Format Chart.

Example: M223W1AFR-HT-123 This part number describes a 3 Way valve identical to the standard configuration except that the normally open and normally closed ports are reversed.

BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

39

AIR CYLINDERS
BECO air operated cylinders are frequently used where splash-back or fumes from highly aggressive chemicals is a prime consideration. Often close to corrosive chemicals, these PVC, polypropylene or PVDF cylinders are just right for providing strength, durability and reliability. Beco air cylinders are available in strokes from 1 22 inches and have standard easy to use mounting and optional postition sensors. We are also happy to discuss customizing air cylinders to fit your individual needs. Applications Remote pneumatic control for opening and closing doors, actuating drains, or positioning moving proccess loads.
Specifications
Cylinder Bore Port Connections Actuator Pressure Inlet 1 12 13 22 Ambient Temperature PVC Polypropylene PVDF 140 F/60 C 160 F/ 70 C 212 F/100 C Min. 20 psi 20 psi 1.25 1/8 FNPT Max 60 psi 50 psi

TEFLON is a registered trademark of The DuPont Corporation

40

C Air I T S A PL der Cylin

Plastic Is Better!

METAL Ai Cylind r er

CLEVIS BRACKET OPTION Beco plastic air cylinders are non-corrosive, durable, To order add -CB to part number. lightweight, inexpensive, and have many options from which to choose. We are also happy to discuss customizing air cylinders to fit your individual needs. Beco Plastic Air Cylinders are the logical and economical choice for your application.

HIGH QUALITY PLASTIC AIR CYLINDER

POSITION SENSOR OPTION

To order add -PS to part number.

Sensor has onboard LED indicator.

Sensor Specifications Reed Swtich: 120 V/ .03 A/ W max

41

AIR CYLINDER ORDERING INFORMATION

1/16" Orifice

Stroke 1" 2" 3" 4" 5" 6" 7" 8" 9" 10" 11" 12" 13" 14" 15" 16" 17" 18" 19" 20" 21" 22"

A 4.125 6.125 8.125 10.125 12.310 14.310 16.310 18.310 20.310 22.310 24.310 26.310 28.310 30.310 32.310 34.310 36.310 38.310 40.310 42.310 44.310 46.310

B 3.125 4.125 5.125 6.125 7.310 8.310 9.310 10.310 11.310 12.310 13.310 14.310 15.310 16.310 17.310 18.310 19.310 20.310 21.310 22.310 23.310 24.310

C 2.565 3.565 4.565 5.565 6.750 7.750 8.750 9.750 10.750 11.750 12.750 13.750 14.750 15.750 16.750 17.750 18.750 19.750 20.750 21.750 22.750 23.750

ORDERING FORMAT

AC
Air Cylinder

PVC

1.0
Stroke (In Inches)

EP

CB
Options (if a pplica ble) C B = C levis Bra cket PS = Position Sensor C B-PS = Both O ptions

Materials ofConstruction PV C = Polyvinyl C hloride PO L = Polypropylene PV DF = Polyvinylidine Fluoride

O-Ring Type EP = Ethylene Propylene V T = Viton K A = K a lrez

42

AIR CYLINDER FORMULAS

F e

F = P Ae e

In these equations, F equals thev amountvof force exerted by the piston depending on the actuation pressure. The Air Cylinder has avmin/max actuation pressure of 20-60 psi. Fe is thevvariable given for the force extending the piston and Fr is the variable given for the force retracting the piston.
r1=.375

F r

F = P Ar r

A1 = ~r1

= 20-60 psi

Ar
r2=.325

= A -A
2

r=.625

Ae
P

= ~r2

A2 = ~r2

= 20-60 psi

BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

43

Manual Valves

44

STOPCOCKS AND METERING VALVES

Stopcocks
BECO Stop cocks (plug valves) are precision machined valves that function in much the same way as a ball valve. When the handle points in the direction of flow, the valve is fully open; when the handle points perpendicular to the direction of flow, the valve is fully closed; o and at the 45 position the valve is halfway open and thereby has a metering effect.

Metering Valves
BECO Metering Valves use a tapered plug-stem to give a fine adjustment to the flow in addition to a full, open, or positive shutoff postition.

Specifications
Media Pressure Media temperature Ambient temperature Sealing Shutoff All Wetted Surfaces Vacuum to 60 psi o 100 C o 50 C Bubble tight Positive Virgin Teflono
R

Specifications
Media Pressure Media temperature Operation Operating Position All Wetted Surfaces Vacuum to 40 psi 40 o C Manual Any Virgin Teflono
R

oTEFLON is a registered
R

trademark of The DuPont Corporation

45

STOPCOCKS AND METERING VALVES

ORDERING FORMAT
Stopcocks
Part No. SC-400 SC-401 SC-402 SC-403 SC-404 SC-405 SC-409 SC-410 SC-411 SC-412 SC-413 SC-414 SC-500 SC-501 SC-502 Orifice Size Body Style 2-way 3-way 4-way 2-way 3-way 4-way 2-way 3-way 4-way 2-way 3-way 4-way 2-way 3-way 4-way End Connections 1/8" FNPT Part No. SC-503 SC-504 SC-505 SC-600 SC-601 SC-602 SC-609 SC-610 SC-611 SC-700 SC-701 SC-702 SC-709 SC-710 SC-711 Orifice Size 1/4" Body Style 2-way 3-way 4-way 2-way 3-way 4-way 2-way 3-way 4-way 2-way 3-way 4-way 2-way 3-way 4-way End Connections 1/4" Tube

1/8" Tube

3/8" FNPT

1/8"

3/8"

1/4" FNPT

3/8" Tube

1/4" Tube

1/2" FNPT

1/2"

1/4"

1/4" FNPT

1/2" Tube

Options: Panel mount add - P to part number suffix.

Longflare connection add - LF to part number suffix.

Metering Valves
Straight Thru Flow MV-22P-A MV-22T-A MV-24P-A MV-24T-A MV-34P-A MV-33T-A MV-34T-A MV-44P-A MV-44T-A MV-66P-A MV-66T-A MV-88P-A MV-88T-A Angle Flow Pattern MV-22P-B MV-22T-B MV-24P-B MV-24T-B MV-34P-B MV-33T-B MV-34T-B MV-44P-B MV-44T-B MV-66P-B MV-66T-B MV-88P-B MV-88T-B Orifice Size 1/8" End Connections 1/8" FNPT 1/8" Tube 1/4" FNPT 1/4" Tube 1/4" FNPT 3/16" Tube 1/4" Tube 1/4" FNPT 1/4" Tube 3/8" FNPT 3/8" Tube 1/2" FNPT 1/2" Tube

3/16" 1/4" 3/8" 1/2"

Options: Other handles available.

Longflare connection add - LF to part number suffix
BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

46

PRESSURE RELIEF VALVES

Features all Teflon and elastomer wetted fluid path. This relief valve is fully adjustable from 1090 psi by simply adjusting the upper stainless steel screw and locking in place with the stainless steel nut.

Applications
Ideal for applications such as pumps, pressure containers or other fluid handling components where excess pressure must be relieved to protect the plumbing system or individual components.

Specifications
Media Pressure Media Temperature Ambient Temperature Adjustment Range To 90 psi To 150C To 100C 10-90 psi

47

PRESSURE RELIEF VALVES

A

E END CONNECTION D

Size 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2"

A 2.87 2.75 3.75 2.87 2.75 3.75 3.25 2.87 3.95

B 1.75 1.75 1.75 1.75 1.75 1.75 1.75 1.75 1.75

C 2.38 2.38 2.38 2.38 2.38 2.38 2.56 2.56 2.56

D 1.75 1.75 1.75 1.75 1.75 1.75 1.75 1.75 1.75

E 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2"

P T LF P T LF P T LF

Ordering Format

RV 4 4 P EP
Pressure Relief Valve Orifice Size 4=1/4 6=3/8 8=1/2 End Size 4=1/4 6=3/8 8=1/2 End Connection P=FNPT T=Tube LF=Longflare O-Ring Type EP=Ethylene Propylene KA=Kalrez VT=Viton

BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

48

Hand Sprays

49

TEFLON HAND SPRAYS

Spray Guns (SG)
Our spray guns are constructed of Teflon and polypropylene to provide them with a longer life span in harsh acidic or corrosive environments than comparable sprays on the market. Due to their design and comfortable grip BECO Spray Guns are quickly becoming the industry standard in semiconductor fab plants, wet benches and work processing stations. All the sprays may be purchased individually or with a variety of fittings, hoses and Orings.

Recirculating Spray Gun (RC)

The BECO recirculating hand sprays all have molded Teflon bodies with PVDF pistons. This hand spray is designed so that there is very little dead space for bacteria to grow. DI water is able to circulate up to the sealing seat through out the entire gun and piston. From the sealing seat on, bacteria build up is kept to a minimum by using a 1/16" thick spray nozzle.

Dispense Guns (DG)

Both of the BECO dispense guns, standard or high flow, are designed with the spring totally isolated from the media, thus making them the perfect choice for dispensing acids and solvents. The longer nozzle on the dispense guns allows for them to be inserted into a container thus minimizing splashing.

Eye Wash (EW)

BECOs Teflon Eye Wash is designed to provide emergency eye/facial rinse. When activated a soft flow of aerated water is released. The non-metallic aerator converts harsh city water into a bubbly smooth stream while the Teflon body remains inert to its potentially hostile chemical environment.

Nitrogen Sprays (Nitro)

Our Teflon Nitrogen spray (Nitro) can deliver maximum anti-corrosion protection wherever extreme chemical environments are used in the vicinity of nitrogen dispensing or dying. Like its companion, the DI Water Spray, Nitro is manufactured of the same durable materials to resist acid attacks.

50

TEFLON HAND SPRAYS

DI SPRAY/ RINSING GUNS
(Max. operating pressure 75 psi)
2.0

Part No. Description SG-103 Standard spray gun with 1/2" FNPT inlet thread. SG-102 Spray gun with 3/8" FNPT inlet thread. SG-101 Spray gun with 1/4" FNPT inlet thread. SG-100 Spray Gun with 29/32"-16 inlet thread.* * NOTE: This style gun has a shallow thread engagement zone, and is highly susceptible to thread stripping as opposed to the FNPT models, in the event overtightening occurs. Assemblies Part No. SG-207 SG-206 SG-204 SG-203 SG-202 SG-201 SG-200 Gun SG-103 SG-103 SG-103 SG-103 SG-103 SG-103 SG-100 Hose 504 502 101 101 100 300 100 Intercon. Fitting MC-F-68-HA J68 J108 J108 J88 MC-F-88-HA SW-10 Source Fitting MC-F-68-HA J68 J108 J88 MC-F-88-HA -

3.9

SG-100, SG-101, SG-102, SG-103

SG-206

SG-204

RECIRCULATING SPRAY GUNS

(Max. operating pressure 75 psi)
3.90

2.62 2.60

Part No. RC-103 Assemblies Part No. RC-104 RC-105 RC-106 RC-105330 RC-105330

Description Recirculating spray gun with 1/2" FNPT inlet thread (gun only). Gun RC-103 RC-103 RC-103 RC-103 RC-103 Hose Assy. Notes RC-1 RC-3 RC-5 RC-5 With swivel interconnect fitting. RC-5 With swivel interconnect fitting and hook.

3.50

RC-103

RC-104

RC-106

51

TEFLON HAND SPRAYS

NITROGEN DISPENSING/ DRYING GUNS
(Max. operating pressure 90 psi)
2.0

Part No. Nitro 1 Nitro 2

Description Standard nitrogen hand spray with 1/4" FNPT inlet thread, filter housing with disposable filter. Same as Nitro 1 only using a standard spray gun body configuration Intercon. Hose Assy. Fitting 603 J44 603 J44 605 MC-F-44-HA 605 MC-F-44-HA Source Fitting J44 J44 MC-F-44-HA MC-F-44-HA

3.7

3.9

1.5

NITRO 1

NITRO 2

Assemblies Part No. Gun Nitro 3 Nitro 1 Nitro 4 Nitro 2 Nitro 4T Nitro 2 All Teflon Components Nitro 16904 Nitro 2

NITRO 3

NITRO 4

EYE WASH
(Max. operating pressure 75 psi) Part No. EW-101 Assemblies Part No. EW-302 EW-303 Description Standard eye wash with 1/4" FNPT inlet thread. Gun EW-101 EW-101 Hose 502 502 Intercon. Fitting J64 J64 Source Fitting J64

EW-101

EW-303

52

TEFLON HAND SPRAYS

LIQUID DISPENSING
(Max. operating pressure 75 psi) Standard dispense gun with isolated spring, flow rate 1 gpm. Available in choice of O-ring material: Ethylene Propylene (EP), for use with solvents; Viton (VT), for use with most acids; Kalrez (KA), for use with highly aggressive fluids. To order dispense gun with the correct O-ring, replace "XX" in the DG part number; with the applicable suffix (EP, VT or KA). Part No. DG-501-XX DG-502-XX DG-503-XX DG-800-XX Description Standard dispense gun with 1/4" FNPT inlet thread Standard dispense gun with 3/8" FNPT inlet Standard dispense gun with 1/2" FNPT inlet thread High flow dispense gun (replaces DG-504). Features the same isolated spring design, but has a flow rate of 3 gpm. 1/2" FNPT inlet thread. Gun DG-503-XX DG-503-XX DG-503-XX DG-503-XX DG-502-XX DG-800-XX DG-800-XX DG-800-XX DG-800-XX Hose 101 101 300 502 502 101 101 300 502 Intercon. Fitting J108 J108 MC-F-88-HA J68 J66 J108 J108 MC-F-88-HA J68 Source Fitting J108 MC-F-88-HA J68 J66 J108 MC-F-88-HA J68

3.94

3.9

DG-501, DG-502, DG-503

4.56

3.90

DG-800

Assemblies Part No. DG-601-XX DG-602-XX DG-605-XX DG-606-XX DG-607-XX DG-901-XX DG-902-XX DG-905-XX DG-906-XX

DG-602

DG-603

BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

53

HAND SPRAY SPARES & ACCESSORIES

Part No. 100 Description Hose #1 - .250 ID x .500 OD x 8 long. Nylon braided clear PVC hose. Very flexible - Ends cut and sealed Completely bonded. Not recommended for use with solvents and/or highly aggressive fluids. Hose #2 .380 ID x .630 OD x 8 long. Same description and characteristics as P/N 100 above. Hose #3 (BEPE-500-063) - .375 ID x .500 OD x 8 long bendable Teflon tubing for use with solvents and/or highly aggressive fluids. Hose #4 - .250 ID x .375 OD x 7 long (fully extended). Black PVC coiled hose. Hose #5 Same description and characteristics as P/N 502 above plus includes J66 fittings on both ends. Hose #6 - .250 ID x .375 OD coiled FEP tubing. Hose #7 Same description as P/N 504 plus Teflon fittings on both ends. Hose #8 - .150 ID x .250 OD x 7 long (fully extended). Black PVC coiled hose. Hose #9 Same description as P/N 602 above, plus J44 fittings on both ends. Hose #10 - .125 ID x .250 OD coiled FEP tubing. Hose #11 Same description as P/N 604 above, plus Teflon compression fittings on both ends. Hose #12 Number 101 hose with PVC interconnecting and source fitting plus Teflon recirculating tube. Hose #13 Number 300 hose with Teflon source and interconnecting fitting, plus Teflon recirculating tube. Hose #14 Number 504 hose with Teflon source and interconnecting fitting, plus Teflon recirculating tube. Hose #15 - .250 ID x .375 OD coiled FEP tubing with Teflon recirculating tube. Teflon source fitting for recirculating spray gun. PVC source fitting for recirculating spray gun.

101

300

502 503

504 505 602 603 604 605 RC-1

RC-3

RC-5

RC-7 RC-9 RC-11

54

HAND SPRAY SPARES & ACCESSORIES

Part No. Description

J44

JACO (interconnecting and/or source fitting) Male Connector Polypropylene Off white color Plastic gripper. Requires one each tube insert TI-4. No washers necessary. Teflon tape required. 1/4" tube x 1/4" MNPT. Same as J44, but with 3/8" tube x 1/4" MNPT: Requires one each tube insert TI-6. Same as J44, but with 3/8" tube x 1/2" MNPT: Requires one each tube insert TI-6. Same as J44, but with 1/2" tube x 1/2" MNPT: Requires one each tube insert TI-4. Same as J44, but with 5/8" tube x 1/2" MNPT: Requires one each tube insert TI-10. Tube insert for 1/4" OD x .150 ID tubing Polypropylene. Natural or White in color. Tube insert for 3/8" OD x 1/4" ID tubing Polypropylene. Natural or White in color. Tube insert for 5/8" OD x .380 ID tubing PVC. Gray in color. Nitrogen filter housing. Nitrogen filter retaining ring. Nitrogen filter O-ring. Disposable nitrogen filters. Each filter is composed of a 25mm diameter .45micron PVC copolymer filter element sandwiched between and supported by two pieces of molded acrylic plastic. Available in quantities of 10, 50, or 100. Eye Wash Aerated Head Assembly. Polypropylene construction complete with screens. Accessories and spare parts are not covered under any warranty unless such parts are installed at for by BECO Mfg., and are used for the purposes for which they are designed.

J64 J68 J88 J108 TI-4 TI-6 TI-10 900 901 902 N2F-10 N2F-50 N2F-100 EW-AHA NOTE:

BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

55

Fittings

56

TEFLON FITTINGS
Materials of Construction
BODIES AND FERRULES: Precision machined from high density 100% Virgin TFE Teflon. NUTS: The "HA" style nuts are precision machined from solid Halar. The "TA" style nuts are machined from TFE Teflon and include an external anodized aluminum band.

Size Codes
FRACTIONAL/PIPE/LONGFLARE: 2 = 1/8" 5 = 5/16" 10 = 5/8" 3 = 3/16" 6 = 3/8" 12 = 3/4" 4 = 1/4" 8 = 1/2" 16 = 1" METRIC 4 = 4mm 6 = 6mm 8 = 8mm 9 = 9mm 10 = 10mm 12 = 12mm

Fitting Numbering Code

XX _____ __ __ _____
Fitting Style Always given Fitting Category F = Fractional M = Metric P = Pipe LF = Longflare* Size Code Tube first If Applicable Nut or Band Style HA = Halar Nut TA = Aluminum

*Longflare connections made of TFM

Example: RU F 4 2 HA
Halar Nut 1/8 Tube 1/4 Tube Fractional Reducing Union

3
Price Code

57

BULKHEAD UNION S/B - BU - ___ - ___ - ___

MALE BRANCH TEE MBT - ___ - __ __ - ___

FEMALE BRANCH TEE FBT - ___ - __ __ - ___

MALE RUN TEE MRT - ___ - __ __ - ___

FEMALE RUN TEE FRT - ___ - __ __ - ___

BULKHEAD MALE CONNECTOR BMC - ___ - __ __ - ___

UNION ELBOW REDUCER 2 UER - ___ - __ __ - ___

UNION ELBOW UE - ___ - ___ - ___

BULKHEAD FEMALE CONNECTOR BFC - ___ - __ __ - ___

UNION U - ___ - ___ - ___

TEE T - P - ___ - ___

MALE ELBOW ME - ___ - __ __ - ___

58

FEMALE ELBOW FE - ___ - ___ - ___ - ___

REDUCING UNION RU - ___ - ___ ___ - ___

MALE CONNECTOR MC - ___ - ___ - ___

FEMALE CONNECTOR FC - ___ - ___ ___ - ___

ELBOW E - P - ___ - ___

BARB S/B - BF - ___ - ___

BUSHING B - P - ___ ___ - ___

COUPLING C - P - ___ - ___

PIPE NIPPLE PN - P - ___

SB - P - ___ - ___

NUT N - ___ - ___ - ___

FERRULE F - ___ - ___

PLUG P - P - ___

59

TEFLON FITTINGS
PANEL NUT PN - ___ - ___ 7 FEMALE REDUCER FR - P - ___ - ___ - ___ 7 UNION TEE UT - ___ - ___ - ___ A

PIPE UNION PU - P - ___ - ___

UNION CROSS UC - ___ - ___ - ___

BUGLE BUG STRAIGHT D BUG - ___ - ___

Tube OD Glass Joint (Bug End) (Opposite Bug)

BUGLE BUG TEE BUG - ___ - ___ - ___

Tube OD Glass Joint Tube OD (Bug End) (Opposite Bug) (Branch)

E If you still havent found what youre looking for just call our sales department or your local distributor We will make every effort to provide you with that special fitting for your application.

Temperature, pressure and combinations of both will affect the performance of these fittings. The user shall be responsible for determining the correct use of this product Beco Manufacturing cannot be held responsible for the incorrect use of these fittings and is not liable for injuries or losses.

BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

60

TEFLON DISC FILTER

The BECO Teflon Filter has been designed to fulfill the special requirements of inline micro filtration for sensitive medias. All contact surfaces are constructed so that nothing but Teflon comes into contact with the media being filtered. The Disc Filter utilizes replaceable Zitex* filter elements which form a continuous mat of Teflon fibers. These fibers are fused together to form a screenlike membrane structure. The resultant membrane is hydrophobic, hence aqueous suspensions must be filtered at high rates to overcome surface tension. Because of the non-stick characteristics of Teflon, the natural lubricity of all wetted surfaces, and the easy replacement of filter elements, entrapped contaminates may be easily removed. * DuPont Trademark * Chemplast Trademark

PTFE Filter Membranes

No Non-Teflon backing Doesnt support fungi or bacterial growth Easily cleaned auto-clavable or clean with bactericial solutions Will withstand temperatures to 20C Fluted membranes, special sizes and shapes available Available in large pore sizes for venting applications Available in extra strength, easy to handle small pore sizes Chemically inert, non-contaminating, non-flammable High retention efficiency Self gasketing, heat sealable

61

TEFLON DISC FILTER

Membrane Properties:
Grades Finest Pore(m) 0.20 Thickness(mm) 0.065 Extra Fine Medium 0.45 0-20 0.07 0.13 Coarse 20-30 0.20 G104 5-6 0.10 G108 3-5 0.20 G110 1-3 0.25

1 GPM/ft2 13.5psi 2 Time in seconds required for 100cc to pass thru 1 square inch P = .176 psi 3 Pressure differential necessary to overcome hydrophobic resistance

2.50

INLET

OUTLET 2.50

How to Order:

(Assemblies with filters A-I)

BDF 47 FIN 4T
BECO Disc Filter 47mm 90mm Fin(Finest) (47mm Only) EXF (Extra Fine) (47mm Only) MED (Medium) (47mm & 90mm) COR (Course) (47mm & 90mm) G104 (47mm Only) G108 (47mm Only) G110 (47mm Only) 2T 1/8 Tube (47mm Only) 4T 1/4 Tube (47mm & 90mm) 4MP 1/4 MNPT (47mm & 90mm) 4FP 1/4 FNPT (47mm & 90mm) 6T 3/8 Tube (90mm Only) 6MP 3/8 MNPT (90mm Only) 6FP 3/8 FNPT (90mm Only)

Example: Shown is a 47mm diameter Beco Desc Filter with a 0.20 m pore and 1/4 tube fittings.

BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

62 56

HIGH TEMPERATURE FILTER HOUSINGS

The constantly increasing demand for quality and safety standards of the ultra-clean electronic and semiconductor manufacturing processes requires innovative solutions to fluid movement and aggressive chemical filtration. In an ultra clean manufacturing environment, it has always been difficult to reliably pump and filter corrosive liquids over a broad spectrum of operating pressures and temperatures. BECO provides the innovative solutions for chemical filtration that meet or exceed the demanding performance criteria of the eletronic and semiconductor manufacturing environment. BECO is committed to provide the highest quality filter housings to solve the problems of the filtration of aggressive fluids.

FH-PTFE Series of Filter Housings

Manufactured with Certified 100% Virgin PTFE (no metallic components) Designed for use with filters for high temperature (to 190C @ 45psi) acids and chemicals. Industry Proven Seal design prevents leaks between cap and body during heat cycling and high temperature use. Non-Scoring Removable Top Cap: Filter Cartridge can be changed without damaging o-rings. (No particles generated by the cap twisting into the filter housing body) Design of housing body helps to prevent o-ring from losing its seal. (Seal is between filtered and unfiltered fluid) Built in pulsation dampener eliminates the need for external dampener, absorbs hammering and pulsation of incoming fluid to help prevent particles dislodging from the filter. Optional fluid input and output configuration available, as well as size and location to meet customers needs. Compatible with a wide range of standard 10 inch filter cartridges 12 Month Warranty

63

HIGH TEMPERATURE FILTER HOUSINGS

FH-PolyPro Series of Filter Housings
Manufactured with Certified 100% Polypropylene (no metallic components) Designed for use with filters for low temperature (to 55C) acids and chemicals. Industry proven seal design prevents leaks between cap and body during heat cycling and high temperature use. Non-Scoring Removable Top Cap: Filter Cartridge can be changed without damaging o-rings. (No particles generated by the cap twisting into the filter housing body) Design of housing body helps to prevent o-ring from losing its seal. (Seal is between filtered and unfiltered fluid) Built in pulsation dampener, eliminates the need for external dampener, absorbs hammering and pulsation of incoming fluid to help prevent particles from dislodging from the filter. Optional fluid input and output configuration available, as well as size and location to meet customers needs. Compatible with a range of standard 10 inch filter cartridges 12 month warranty
.50 X .50 DEEP 3/4" FNPT FILTERED CHEMICALS 3/4" FNPT USED CHEMICALS

FHT/FHP Series of Filter Housings Specifications

Model: FH-104033-PTFE Weight: 10.2kg/22.5lbs. Vent Tube: 1/8" NPT (F) with 1/8" PFA tube Inlet/Outlet Connections: 3/4" FNPT Welded Fittings and Tubes (optional) Mounting Holes: 12.7mm (1/2") diameter 12.7mm (1/2") deep 10.16cm (4") centers Filter Requirements: 25.4 cm/ 10" cartridge 2-222 double O-ring flat end Performance: Operating Temp: 20C to 190C (68F to 374F) Max Pressure: 3.15 bar/ 45 psi FH-104033-Polypro 6.1kg/13.45lbs. 1/8" NPT (F) with1/8" PFA tube 3/4"FNPT Welded Fittings and Tubes (optional) 12.7mm (1/2") diameter 12.7mm (1/2") deep 10.16cm (4") centers 25.4 cm/ 10" cartridge 2-222 double O-ring flat end

20C to 190C (68F to 374F) 3.15bar/45psi

4.0

1.25 + + 6.0 +

MOUNTING HOLES 1.0 1 1 2.2 1 14.8 NOTES: 1 STANDARD DIMENSIONS APPLY CONSULT FACTORY FOR CUSTOM LOCATIONS.

BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

64

Pumps/ Fluid Metering

65

METERING PUMP

BECOs large "Family" of metering pumps illustrated above ensures accurate, programmable chemical pump availability for every application.
TEFLON is a registered trademark of The DuPont Corporation

66

METERING PUMP
The BECO Metering Pump offers a precision method for chemical dispensing. Designed for process applications where reliability, purity, accuracy, repeatability, programmability and chemical compatibility are a must. These unique pumps are available in unlimited dispense capacity with programmable dispense volume and programmable rate from 0.1cc to 350.0cc per minute and are repeatedly accurate to +/-.50%. Continuous feedback confirms performance during operation. All wetted surfaces are PTFE or Chemraz 570. Design includes Chemraz rolling diaphragm between the nitrogen-purged electronics compartment and the wetted section to insure 100,000 MCBF. These nonpulsing pumps are the perfect solution for single tank wet processing, accurate in insitu solution generation, precision dilute chemical development and measured spray dispensing. BECO metering pumps can be ordered in unlimited dispense volume and in any of the configurations shown on the cover including the flange mounted version, the bottle mount and the stackable nesting box. All of the pumps can dispense from a reservoir (bottle or tank) or from a pressurized line (chemical distribution system (CDS) and are capable of dispensing chemicals or solutions that have a viscosity rating of up to 60 units. BECO Metering Pumps can be controlled and operated by a PC, PLC (with stepper motor signal generator module) or the BECO Process Controller that can operate up to 8 pumps and can store up to ten recipes. The output pressure will vary due to variations in viscosity. The " Output Pressure" graph below is typical for fluid having a viscosity of 5 centipoise. High pressure pumps are available for high viscosity fluids and precision measured spray applications. Please consult the factory.

67

METERING PUMP

PFA WETTED SURFACES HIGHLITED IN YELLOW

68

METERING PUMP

BECO Metering Pump Specifications: High Purity Flow Rate Accuracy Safety PTFE / Chemraz 570 Construction 0.1 to 350.0 cc/min +/- .25% Accuracy Leak detection Durable outer casing Continuous feedback confirming performance during operation Address up to eight (8) pumps for use with one BECO controller

Flexibility Compact Design RS-485 Communication

BECO Process Controller Specifications: Stores up to 10 recipes Easily program each recipe with up to nine (9) steps Operate up to eight (8) pumps with one controller LCD readout with backlight Alarm indicators for: leak detection, temperature, N2 purge, operation, of pump 12 Volt DC Power Requirement 8 Optically isolated inputs 4 SPDT Output Relays
ORDERING INFORMATION: Consult Factory 800-926-2326

BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com

69

Tanks

70

YIELD ENHANCEMENT PROCESS TANKS

The interior process chamber of BECO's Yield Enhancement Process Tanks are fabricated from a single piece of sheet material. The sheet is precision machined, and then in the Japanese "origami" method, folded into the form of a tank. This unique approach minimizes welding, and provides smooth, seamless, rounded interior corners void of traps, and leaks due to poor workmanship, thermal cycling, and chemical contact. The tank includes weir containment for chemistry recirculation. Ports for fill and recirculation on the Yield Enhancement Tanks are located on opposing sides near the bottom providing optimum processing recirculation flow, An optional perforated diffuser plate provides for an even laminar flow through the chemical processing tank to help improve process uniformity. All plumbing connections are longflare types unless otherwise specified. Tanks can be fitted with product/ carrier locating "furniture" that is welded into the tank to prevent the particle traps that are associated with "drop in" or temporary style furniture. BECO Yield Enhancement Tanks can be supplied with any available megasonic, or can be prepared for the megasonic of your choice. Shown Above: The tank's interior is fabricated from a single, precision machined and folded sheet of plastic. This minimizes welds, and provides smoth rounded interior corners. Please refer to our Tank Ordering Worksheet for part numbers and ordering information.

71

YIELD ENHANCEMENT QUICK DUMP TANKS

BECO's Yield Enhancement Quickdump Rinse Tanks are fabricated with the same "origami" style techniques as used in the Process Tanks. A single piece of sheet material is precision machined and folded to result in smooth, rounded interior corners. This provides the rinse tanks with the same construction quality benefits, and for rinsing applications, the smooth corners also improve rinsing dynamics which reduces rinsing time and water consumption. All of the BECO Quickdump Tanks are equipped with spray manifolds that assist in preventing particle reattachment, and rinse the interior of the tank during the dumping function. The cone pattern spray nozzles are staggered from side to side Quickdump designs can and are positioned high above the tank to provide either be the "drop botthe best coverage. BECO's optional articulatd tom" style shown here for ultra-fast dumping, or the spray manifolds and nozzle covers ensure robot traditional circular paddle clearance when necestype. Also shown here, is sary, and minimize the optional articulated operator strain where spray manifold. manual wafer transfer baths is required. The articulated nozzle covers prevent chemical "drag out" from dripping on the spray nozzles and being deposited on the clean, rinsed wafers during the spray cycle. All the plumbing connections are longflare types unless otherwise specified. Tanks can be fitted with product/ carrier locating "furniture" that is welded into the tank to prevent the particle traps that are associated with "drop in" or temporary style furniture. BECO Quickdump Tanks can also be supplied with any available megasonic, or can be prepared for the megasonic of your choice.

72

YIELD ENHANCEMENT TANKS

STANDARD ORDERING FORMAT
QUICK DUMP TANKS
The Single Construction Quick Dump Tank comes complete with fill manifold, adjustable spray bars and your choice of Quick Dump valve or full bottom drop. The fill inlets do not involve outside piping welded to the tank. Channels for filling the batch are integrated into the walls of the seamless tank. BECO tanks are furnished with longlfare fittings. Crossbars are located on the ends of the tank for mounting. Also, ask BECO sales about creating your own Yield Enhancement Tank Kit in which you can include pilot valves, media valves, plumbing and a Quick Dump Rinser!

SQD S4 P V D F QD
SQD = Single Const. Quick Dump Tank Material of Contruction POL = Polypropylene PVDF = Polyvinyldifluride PFA = Perfluoroalkoxy (Teflon) QD = Quick Dump valve on bottom of tanks* Wafer Size Full bottom of tank will F = 4", 5", 6", 8", 12" drop during Quick Dump available operation

S = Single cassette size D = Double cassette size

*Note: One QD valve for an 'S' designated tank and two for a 'D' designated tank.

CHEMICAL PROCESS TANKS

SCT S4 P V D F
SQD = Single Const. Chemical Tank

S = Single cassette size D = Double cassette size

Material of Contruction POL = Polypropylene The chemical tank comes standard with PVDF = Polyvinyldifluride PFA = Perfluoroalkoxy (Teflon) fill manifalds and longflare fittings for the drains. Drains are located in the inner tank and in the overflow weir. Wafer Size 4", 5", 6", 8", 12" Dont forget to ask BECO sales about available our Yield Enhancement Tanks Kits coming soon!

Like the Quick Dump, the inner tank is manufactured as a single piece. The fill inlet configuration is integrated directly into the tank.

73

CUSTOM YIELD ENHANCEMENT TANKS ORDERING WORKSHEET

BECO Manufacturings capabilities allow for excellent custom components. We can cover all of your specifications thanks to our knowledgable enginering staff and highly skilled machininsts and fabricators.
Yield Enhancement Tank Ordering
Tank Style Process Quickdump Megasonic Process Megasonic Quickdump Inner Tank Length "A" Width "B" Height "C" Outer Tank Length "D" Width "E" Height "F" Tank Material Polypropylene PFA PVDF Halar PVC Other: Material Thickness 3/8" 1/2" 5/8" Recirculation Y/N Cover Manual Auto Quickdump Style Drop Bottom Qucikdump Valve Quickdump Valve Size Specifiy: Dump Rate Required Specifiy: Ozone Compatible Y/N BECO Quickdump Controller Y/N Product Locating Furniture Specifiy: Drain Port Size Specifiy: Drain Port Location Specifiy: BECO Drain Valve Specifiy: Extra Drain Port Y/N Megasonic Y/N Megasonic Supplier BECO Other: Overflow Configuration Knife Edge, Sawtooth (all 1"x1" standard pitch) Knife Edge, Scallop Knife Edge, Straight Spray Bar Stationary Articulated Spray Pattern Fan Cone Level Sensors Y/N Fill Location Bottom of sides with opposing ports Other: Fill Rate Specifiy: BECO Fill Control Valve Specifiy: Recirculation Rate Specifiy: Plumbing Connection Type Flare Fittings Compression Tube FNPT Plumbing Connection Size 1/4, 3/8, 1/52, 5/8, 3/4, 1" Diffuser Plate Y/N Diffuser Plate Design Hole Size: Hole Pattern: Tank Mounting Specifiy: Temperature Control Y/N Y/N/X

We customize anything to fit your needs and strive to make any project a perfect fit for your application.

74

Turn-Key Products

75

WET PROCESS STATIONS

Custom Process Applications

Wafers MEMS Photo-masks

76

WET STATION OPTIONS

Please fill out information tables to define bench specification. Information such as pressure ratings, chemistry specific notes, vendor specific components, or any special application needs can be requested in the appropriate notes column. We have an engineering staff that can help you with any questions you may have.
Cabinet Facility Connections Notes

Facility Connection
Ambient D I Water Clean Dry Air (CDA) Nitrogen (N2) Inlet Chemical Inlets (please list) Plenum Drain Chemical Drains Exhaust Electrical

Size/Location

Hardware Configurations Process Tool

Feature
Load Capacity (wafer size and qty) Carrier Part Number Carrier Handle

Notes

Cabinet Feature
Material of Construction Cabinet Dimensions Cabinet Style Exhaust Location Liquid Facility Connections Drain Location DI Water Spray Gun N2 Spray Gun Deck Included Deck Height Plenum Access Door Beaker Wash Sink with Gooseneck Glove Wash

Notes

77

WET STATION OPTIONS

Sample Tank Options
Feature
Process Chemistry Tank Material Fill Type Megasonic Re-Circulation Filtration In-Line Heater Immersion Heater Process Time Process Temperature Time to Reach Process Temp Overflow Lid Tank Level Sensors Tank Drain Alarm(s)

(Multiple tanks may be requested)

Process Tank Notes

Quickdump Rinse Tank Feature

Process Chemistry Tank Material Rinse Tank Style Fill Type Process Time Process Temperature Overflow Rinse to Resistivity N2 Process Agitiation Dump Drain Alarm(s)

Notes

78

BECO STANDARD WET PROCESS STATION

The Manual Wet Process Station from BECO offers a cleaning and rinsing station designed with the smallest footprint in the industry. Construction is available in PVC or White, Natural, Flame Retardant Polypropylene, CP7, Halar, or CPVC. The Wet Process Station is compatible with most Megasonic cleaning systems, and comes standard with BECOs Quick Dump Rinse Tank. All BECO Wet Stations are adaptable to other types of process tanks. Other standard features include: active spray bar with cover, recirculating DI spray gun, adjustable legs, and wrap around clear operator/process shield. The shield guarantees operator safety and process integrity with a load/unload door providing easy access to the process environment. All processes are controlled by BECO Programmable Process Controller with optional touch screen I/O panel with fully programmable controller. The BECO Wet Process Station is designed to optimize Laminar Flow characteristics in the process area. Consideration of flow effects led to the open case design which eliminates the more conventional headcase style station. Another feature which allows for clean laminar flow is our floating tank pedestal.

For controller details refer to the programmable process controllers page.

BECO MANUFACTURING CO. INC. 23361 Peralta Drive Laguna Hills, CA 92653 Phone: 949-458-3731 Fax: 949-458-2787 www.becomfg.com info@becomfg.com
Rev. 1/03

79

PROGRAMMABLE PROCESS CONTOLLER

The BECO controller is designed to operate Chemical and Quick Dump Rinsing processes. Easy to use six key touch pad Keypad surface is Lexan polycarbonate with an epoxy hard coat for durability Messages displayed on a 24 character LCD display featuring super twist technology for high contrast viewing and LED backlighting for visiblitiy in all lighting conditions. The enclosure is an industry standard 3" wide by 7" tall and is molded from chemical resistant plastic. The enclosure is also provided with front mounting for easy installation All connections are made to plug-in terminal blocks for ease of wiring and maintenance Powered from 12VDC nominal (other voltages or AC input available) Stores up to five recipes Recipes may contain up to 64 steps Operates pilot valves for FILL, SPRAY, and DUMP Can actuate up to 16 pilot valves for special applications Special programming instructions include: WAIT, LOOP, and BEEPR Four LEDs are located under the LCD to indicate Run, Program, Test, and Error status Heater/ Temperature Regulator Option Available
Your logo goes here!

80

PROGRAMMABLE PROCESS CONTROLLER

Process Overwiew:
The recipe is a made series of steps. Each step contains a function, a start time, and an end time. The steps are shown in the table (right). All timing is in seconds. Steps may overlap in time or coincide. There are three special programming instructions to provide further convenience.

Sample Recipes: Recipe 0 (REC0) Simple Quick Dump Rinse

Step Number 0 01 02 Function FILL SPRAY DUMP Begin Time 0000 0050 0060 End Time 0060 0070 0070 Segment Notes Display SG1 Fill the tank for 60 seconds SG1 SG1 Run the sprayer for 20 seconds from 0050 to 0070 Dump the tank for 10 seconds from 0060 to 0070. This overlaps spray; the spray will be on while the tank is dumping At 0075 seconds (dump is over), start over and repeat this segment 0003 times * Programming not required. Beeps when recipe is complete

STEP NAME FILL SPRAY DUMP LOOP WAIT

03

LOOP BEEPR

0075 *

0003 *

SG1

Recipe 1 (REC1) Quick Dump Rinse with 10 Minute Overflow

Step Number 0 01 02 Function FILL SPRAY DUMP Begin Time 0000 0050 0060 End Time 0060 0070 0070 Segment Display SG1 SG1 SG1 Notes Fill the tank for 60 seconds Run the sprayer for 20 seconds from 0050 to 0070 Dump the tank for 10 seconds from 0060 to 0070. This overlaps spray; the spray will be on while the tank is dumping At 0075 seconds (dump is over), start over and repeat this segment 0003 times Fill (overflow) for 0600 seconds (10 minutes) With each segment the time starts over at 0000 * Programming not required. Beeps when recipe is complete

BEEPR MODE NAME RUN PROG TEST ERROR

DESCRIPTION Fill tank Spray nozzles Empty the tank Used to repeat a group of recipe steps "x" number of times Used to pause a program until its corresponding input is satisfied Special output that beeps at end of recipe and can be programmed to beep when specified in a recipe ACTION Runs the recipe Mode in which you program the recipe Test your recipe process stopped

03 04

LOOP FILL BEEPR

0075 0000 *

0002 600 *

SG1 SG2

Recipe 2 (REC2) Quick Dump Rinse with Rinse to Resistivity

Step Number 0 01 02 03 04 Function FILL SPRAY DUMP LOOP FILL Begin Time 0000 0050 0060 0075 0000 End Time 0060 0070 0070 0002 0600 Segment Display SG1 SG1 SG1 SG1 SG2 Notes Fill the tank for 60 seconds Run the sprayer for 20 seconds from 0050 to 0070 Dump the tank for 10 seconds from 0060 to 0070. This overlaps spray; the spray will be on while the tank is dumping At 0075 seconds (dump is over), start over and repeat this segment 0002 times Fill (overflow) for 0600 seconds (10 minutes) With each segment the time starts over at 0000 Program halts after '0300 seconds of fill and waits for Input 1 to come on. After Input 1 is made, timer continues and will continue timing to '0600 A resistivity controller must be connected to Input 1 (supplied by customer). * Programming not required. Beeps when recipe is complete

Temperature Regulator Option available.

WAIT1 BEEPR

0300 *

N/A *

SG2

Recipe 3 (REC3) Maintenance Recipe to Prevent Bacteria

Step Number 0 01 03 Function FILL DUMP LOOP Begin Time 0000 3600 3610 End Time 0060 3610 9999 Segment Display SG1 SG1 SG1 Notes Fill the tank for 60 seconds Dump the tank after 1 hour (3600 seconds) for 10 seconds After dump, loop the recipe 9999 times. This recipre will run for 9999 hours (416 dyas). Press STOP to cancel recipe

81

PROGRAMMABLE PROCESS CONTROLLER

2.46 TYP .38 PANEL THICKNESS 2.75 VIEW A
2X SCALE
+ COM + 12 V TO SUPPLY SENSORS 12 V COM INPUT 8 INPUT 7 INPUT 6 INPUT 5 INPUT 4 (WAIT 4) INPUTS (- TRUE)

Input/ Output
RS-485 COMM (NOT USED IN THIS APPLICATION)

6.38
PROCESS CONTROLLER

RUN

PROG

TEST

ERROR

MENU

6.00

ITEM

STOP

INPUT 3 (WAIT 3) INPUT 2 (WAIT 2) INPUT 1 (WAIT 1) NORM OPEN NORM CLOSED COMMON NORM OPEN NORM CLOSED COMMON NORM OPEN NORM CLOSED COMMON

START

RELAY 1

BECO
3.00 SEE VIEW A

RELAY 2

RELAY 3

NORM OPEN NORM CLOSED COMMON GND +

RELAY 4

THIS TERMINAL BLOCK MAY BE USED TO SUPPLY POWER TO OTHER CONTROLLER OR ACCESSORIES.

INLET

12 V EARTH GROUND (IMPORTANT FOR NOISE IMMUNITY) 12 V +

1 2

3 4 5

6 7

9 10

FILL SPRAY DUMP

5/1 6 "

TUBE, CDA INLET

Optically isolated inputs are provided for remote start and stop, liquid level, safety interlock, and resistivity control. Outputs are provided to interface with remote pneumatic valves (or relays). The remote pneumatic valves provide for easy separation of electrical and pneumatic circuits and simplify installation. Four on-board relay outputs are provided to interface external electrical euipment, such as megasonic cleaning equipment. All connections are made to plug-in terminal blocks for ease of wring and maintenance.

Part Number: PLC-106752- 000 004 008 016

PROCESS CONTROLLER

number of neumatic actuator ports desired on pilot valve

AIR SUPPLY

RUN

PROG

TEST

ERROR

MENU

ITEM

STOP

Process Controller/ Quick Dump Rinser shown below in application.

START

BECO

1 2 3

4 5 6

7 8 9 10

INLET

CHEMISTRY SUPPLY

CHEMICAL TANK PUMP

QUICK DUMP RINSE TANK

DUMP FILL SPRAY DI WATER SUPPLY DI WATER RETURN

DI WATER DRAIN

CHEMISTRY DRAIN

82

PROGRAMMABLE PROCESS CONTROLLER

Also, check out our Pnuematic Valves, Yield Enhancement Tanks, and Wet Process Station pages for more information on our capabilities and our custom products.

Some of our commonly used media valves are our Quick Dump (above) and our Teflon Pneumatic Valves (below)

Yield Enhancement Chemical and Quick Dump Tanks (shown left) can be ordered custom for your application.

83

PLASTIC
FABRICATION

MACHINING

OUTSOURCING

84

BECO MANUFACTURING CO., INC.

High Temperature Filter Housings

Teflon Spray Guns

Programmable Process Controller

Nitrogen Purge Plate

Engineering Services
Pro-E, SolidWorks, and AutoCad platforms

85

PRODUCTS AND CAPABILITIES

CNC Routing

Fabrication

Outsourcing

Testing and Quality

86

Fax 949.458.2787
Fax a copy of this form and we will send you a product catalog and information regarding your specific request Thank you for your interest. We look forward to hearing from you!

Name: Title: Company: Address:

City: Country: Phone: E-mail: Web Site: Type of Business: ( ) -

State:

Zip:

Fax:

Specific Interest:

www.becom www .becomfg.com fg.com

1.800.926.BECO

23361 PERALTA DRIVE LAGUNA HILLS, CA 92653 PH: 949.458.3731 F: 949.458.2787 INFO@BECOMFG.COM
87