DC Probe Station 4 (PM5 with AGILENT IMPEDANCE ANALYZER 4294A )

Standard Operating Procedure (SOP) Ver1.0

<07 March of 2012>
th

<MANIKANT>
MANIKANTSINGH@CENSE.IISC.ERNET.IN, TEL-080-22933181

NOTICE:Reading this instruction does not give you authorization to use the Equipment. Please contact either <MANIKANT>, (MANIKANTSINGH@CENSE.IISC.ERNET.IN, TEL-080-22933181 ) or <STERIN (STERINNS@CENSE.IISC.ERNET.IN, TEL080-22933253) regarding authorization and training. 1. Introduction:The SUSS microtec PM5 Probe station which is coupled with Agilent 4294A precision impedance analyzer which is an integrated solution for efficient impedance measurement and analysis of components and circuits. The 4294A covers a broader test-frequency range (40 Hz to 110 MHz) with Basic impedance accuracy:+/-0.08 %. Excellent High Q/Low D accuracy enables analysis of low-loss components. The wide signal-level ranges enable device evaluation under actual operating conditions. The test signal level range is 5m V to 1 Vrms or 200 uA to 20m Arms, and the DC bias range is 0 V to +/-40 V or 0m A to +/-100m A. Advanced calibration and error compensation functions eliminate measurement error factors when performing measurements on infixture devices. General Features Frequency: 40 Hz to 110 MHz DC BIAS: 0 V to 40 V Operation temperature range-20 C to 75 C Basic impedance accuracy: 0.8% Measurement Capabilities Operating frequency 40 Hz to 110 MHz, 1 mHz resolution Basic impedance accuracy 0.08% Q accuracy 3% (typical) @ Q = 100, f 10 MHz Measurement time 3 msec/point @ f 500 kHz, BW = 1 (fast) Number of points per sweep 2 to 801 points Measurement type Four-terminal-pair measurement (standard) 7-mm one port measurement (with the 42942A) measurable grounded devices Impedance probe measurement (with the 42941A) measurable grounded devices Impedance parameters IZI, IYI, , R, X, G, B, L, C, D, Q DC bias 0 to 40 V/100 mA, 1 mV/40 A resolution Constant voltage/constant current mode, DC bias V/I monitor function OSC level 5 mV to 1 Vrms/200 A to 20 mArms OSC level V/I monitor function Sweep parameter Frequency, OSC level (V/I), DC bias (V/I) Sweep type Linear, log, list: manual sweep mode: up/down sweep
Micro and Nano Characterization Facility, <Electrical>, <DC PROBE STATION 04 WITH 4294A>, SOP_ver1.0 Page 1

TEST STATION-04

MONITOR PM5 PROBE STATION

COMPUTER

4294A

POWER CONSOLE UNIT

Micro and Nano Characterization Facility, <Electrical>, <DC PROBE STATION 04 WITH 4294A>, SOP_ver1.0

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2.

Turning on the equipment

Standby Conditions: Before beginning, check that the system is in standby condition as follows: 1. 2. 3. 4. Chuck is not lifted up. Probes raised well above chuck. Vacuum off. Light off.

Operating Procedure: Use the following procedures to set up a sample for probing. Step 1 Make the MCB ON provided in power console (shown in fig-1), it automatically turns on vacuum pump, microscope lamp, power supply. You just need to turn on the Impedance Analyzer & Monitor as shown in images below:.
PRESS THIS SWITCH

TURN ON THE MCB

SWITCH TO TURN ON

Micro and Nano Characterization Facility, <Electrical>, <DC PROBE STATION 04 WITH 4294A>, SOP_ver1.0

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PM5 PROBE STATION

MICROSCOPE

KNOB TO ADJUST MICROSCOPE HEIGHT

PANEL MOUNT CONNECTORS

MICROSCOPE LAMP CONTROLLER

MICROMANIPULATORS TUNGSTEN TIPS

VACUUM SWITCH FOR CHUCK

CHUCK PLATEN TO LIFT CHUCK

MICRO X,Y ADJUSTMENT KNOB FOR CHUCK

ARM TO MOVE THE CHUCK

MICROMANIPULATOR
Y POSITION ADJUSTMENT

Z POSITION ADJUSTMENT

PRESS TO RELEASE THE VACUUM

X POSITION ADJUSTMENT

Micro and Nano Characterization Facility, <Electrical>, <DC PROBE STATION 04 WITH 4294A>, SOP_ver1.0

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Step 2
1. Adjust micromanipulators to mean position in X & Y directions by rotating the probe position knobs. Raise the probes Z adjustment all the way up. 2. Zoom out of the view completely. 3. Raise the stage/chuck 4. Press and hold the X & Y pushbuttons to move the stage to centre of the Microscope, move until the hole in the centre of the stage appears aligned to the centre of the screen. 5. Holding the vacuum switch on the micromanipulator, move each micromanipulator so that its probe is under the microscope & aligned them to the center of the screen. Ensure that the probe tip is few millimeters above the stage surface. Note: - Look at the probe tip in the T.V, not through the microscope. 6. Iteratively zoom slightly and re-adjust the stage center and tips as to align them to center of the screen. 7. Adjust for focus by rotating the focus knob on located on rear of zoom knob. 8. Bring the chuck down and zoom out completely. 9. Move the stage towards yourself (outermost position), now carefully put the wafer on the chuck and turn on the vacuum. 10. Move the stage under the microscope, raise it and focus on the DUT. Adjust for focus if needed. Minor or coarse adjustment knob can be used to move the stage in order to select the desired device. 11. Move the probes to the spot to be probed by moving manipulators x & y adjustment knobs. 12. Finally, lower them on the wafer (Rotate anticlockwise). You will know that the tips are on the sample when a) The image of the probe tip coincides with the probe itself. b) Probe appears to slide. 13. Devices on the same wafer can be probed by simply raising the Tip (Rotate clockwise) moving the chuck so that the new device is in view, and lowering the Probe Tip (Rotate anticlockwise). 14. When switching wafers, step 8 10 need to be performed. 15. When you complete the measurements, return the system to standby by raising the probe tips so that they will not touch a wafer, lowering the chuck, moving the chuck out under the microscope, removing your sample, turning off the lamp & vacuum and all the equipments you used. 16. To reiterate, when you are done with the probe station, raise the probe tips completely (Rotate Clockwise) and ensure the chuck is lowered so that the next user doesnt jam the probe tips into the wafer, damaging both.

Note:- Before starting the measurements make sure that you know which SMU you have connected to which probe. Each SMU Triax cable has number written on them, which represents the SMU number.

Micro and Nano Characterization Facility, <Electrical>, <DC PROBE STATION 04 WITH 4294A>, SOP_ver1.0

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MEASUREMENT PROCEDURE:OPERATION OF 4294A:Press the power switch to turn on the power to the Agilent 4294A. The Agilent 4294A performs a power-on self-test. During the self-test, the model name, firmware revision number/date, options, copyright notice, and other information appear on the LCD. When the self-test is completed, the measurement screen appears on the LCD.

4294A IMPEDANCE ANALYZER

TRACE OPTIONS MEASUREMENT CONTROLS

LCD DISPLAY ENTRY BLOCK

MARKER BLOCK STIMULUS BLOCK

INSTRUMENT STATE

POWER SWITCH

Micro and Nano Characterization Facility, <Electrical>, <DC PROBE STATION 04 WITH 4294A>, SOP_ver1.0

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1. Go to display and choose split ON options, this splits screen in two trace A & B. Each can be individually specified and controlled by A & B Switch on the panel. 2. Go to Scale ref and choose auto scale option, it auto scale the trace selected (A or B). 3. When not using any adapter Set the Adapter Type to NONE. Press the Measurement key and choose the parameter, Measurements options available Select |Z|-_ as the Measurement Parameter To select the measurement parameter, follow these steps: Step 1. Press the [Meas] key to display the Measurement Parameter menu. Step 2. Make sure that the |anyone among shown below|-_ key is selected (this key is selected by default in the preset state).With the ||-_ key selected, Trace A reflects the absolute impedance value while Trace B reflects the impedance phase.

Micro and Nano Characterization Facility, <Electrical>, <DC PROBE STATION 04 WITH 4294A>, SOP_ver1.0

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4. Setting Number of Points (NOP) Step 1. Press [Sweep] to display the sweep menu. Step 2. Press the NUMBER OF POINTS key. This will display the current setting for number of points in the parameter settings area in the upper-left part of the screen. Step 3. Use keys or the rotary knob in the ENTRY block in one of the following ways to specify a value for the number of points. Enter the desired value with the numeric keys ([0] to [9]) and then press the key. Turn the rotary knob until the desired value is set. Press the step keys ( to set the desired value. NOTE The number of sweep points can be set to any integer from 2 to 801. 5.Select the Sweep Parameter Step 1. Press the [Sweep] key to display the Sweep menu. Step 2. Check the PARAMETER [ ] soft key label to confirm that FREQ (frequency sweep) is shown between the brackets [ ] (this setting is selected by default in the preset state). NOTE The Sweep Parameter menu, which is not used in this tour, allows you to change the sweep parameter. You can access this menu by pressing the PARAMETER [ ] key. Set the Sweep Start Value to .. Hz:Step 1. Press the [Start] key. The current setting of the sweep start value appears in the Parameter Setting field in the upper-left area of the screen. Step 2. Specify that the value does not take any unit by pressing the key in the ENTRY block. This puts your entry into effect. Set the Sweep Stop Value to .. MHz:Step 1. Press the [Stop] key. The current setting of the sweep stop value appears in the Measurement Parameter field in the upper-left area of the screen. Step 3. Suffix your entry with M (mega) by pressing the [M/m] key in the ENTRY block. This puts your entry into effect.

6.Set the Measurement Bandwidth( ranges from 1 to 5 ):Step 1. Press the [Bw/Avg] key to display the Measurement Bandwidth/Averaging menu. Step 2. Press the BANDWIDTH [ ] key to display the Measurement Bandwidth Setting menu. Step 3. Set the measurement bandwidth to 2 by pressing the 2 key.

Micro and Nano Characterization Facility, <Electrical>, <DC PROBE STATION 04 WITH 4294A>, SOP_ver1.0

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7.Selecting Sweep Direction DUT can be measured in the desired sweep direction when its characteristics has hysteresis with the sweep parameter. Step 1. Press the [Sweep] key to display the sweep menu. Step 2. Press the DIRECTION [ ] key to select the desired sweep direction (pressing the key toggles the direction). DIRECTION [UP] Upward (from sweep start value to sweep stop value) DIRECTION [DOWN] Downward (from sweep stop value to sweep start value) NOTE Setting the sweep direction is applied commonly to traces A and B. 8.Setting Time Delay for Measurement Time delay can be set for the period before sweep or actual measurement starts after the measurement signal is applied to DUT. This function is useful, for example, when a certain period is required before the characteristics of DUT become stable after the signal is applied. Another application of this function is to observe changes in impedance of DUT in the time domain for a long span. Setting with sweep time Setting the time period for an entire sweep (sweep time) makes it possible to set equal time delays (time delay at a measurement point): from applying the signal to starting measurement and then to each measurement point. Step 1. Press the [Sweep] key to display the sweep menu. Step 2. Press the TIME key to display the sweep time menu. Step 3. Press the SWEEP TIME key. This will display the current setting for the sweep time value in the parameter settings area in the upper-left part of the screen. Step 4. Use the keys or the rotary knob in the ENTRY block in one of the following ways to specify a value for the sweep time. Enter the desired value with the numeric keys ([0] to [9], [.], and [-]) and then press one of the unit keys . Turn the rotary knob until the desired value is set. Press the step keys to set the desired value. Setting with time delay at measurement point Time delay for each measurement point (time delay at a measurement point) can be directly set. Step 1. Press the [Sweep] key to display the sweep menu. Step 2. Press the TIME key to display the sweep time menu. Step 3. Press the POINT DELAY key. This will display the current setting for the time delay at a point in the parameter settings area in the upper-left part of the screen. Step 4. Use the keys or the rotary knob in the ENTRY block in one of the following ways to specify a value for the time delay at a measurement point. Enter the desired value with the numeric keys and then press one of the unit keys. Turn the rotary knob until the desired value is set. Press the step keys to set the desired value.

Micro and Nano Characterization Facility, <Electrical>, <DC PROBE STATION 04 WITH 4294A>, SOP_ver1.0

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Setting with sweep time delay Time delay can be set at the point before sweep starts. Step 1. Press the [Sweep] key to display the sweep menu. Step 2. Press the TIME key to display the sweep time menu. Step 3. Press the SWEEP DELAY key. This will display the current setting for the sweep time delay in the parameter settings area in the upper-left part of the screen. Step 4. Use the keys or the rotary knob in the ENTRY block in one of the following ways to specify a value for the sweep time delay. Enter the desired value with the numeric keys and then press one of the unit keys. Turn the rotary knob until the desired value is set. Press the step keys to set the desired value. 9. Setting Fixed Frequency (CW Frequency) Follow the steps below to specify a fixed frequency for the signal source when the sweep Parameter is any item other than frequency (i.e., oscillator level or dc bias). Step 1. Press the [Source] key to display the signal source menu. Step 2. Press the FREQUENCY key. This will display the current setting for the fixed frequency for the segment in the parameter settings area in the upper-left part of the screen. Step 3. Use the keys or the rotary knob in the ENTRY block in one of the following ways to specify a value for the fixed frequency. Enter the desired value with the numeric keys ([0] to [9], and then press one of the unit keys. Turn the rotary knob until the desired value is set. 10.Setting Oscillator Level Follow the steps below to specify a fixed oscillator level (AC level) when the sweep parameter is any item other than oscillator level (i.e., frequency or dc bias). Step 1. Press the [Source] key to display the signal source menu. Step 2. Press the LEVEL key. This will display the current setting for the fixed oscillator level for the segment in the parameter settings area in the upper-left part of the screen. Step 3. Use the keys or the rotary knob in the ENTRY block in one of the following ways to specify a value for the fixed oscillator level. Enter the desired value with the numeric keys ([0] to [9], and then press one of the unit keys . Turn the rotary knob until the desired value is set. Press the step keys to set the desired value. Selecting Unit for Oscillator Level (Voltage or Current) Step 1. Press the [Source] key to display the signal source menu. Step 2. Press the OSC UNIT [ ] key to select the unit for setting and displaying the oscillator level (Pressing the key toggles the selection).

Micro and Nano Characterization Facility, <Electrical>, <DC PROBE STATION 04 WITH 4294A>, SOP_ver1.0

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11.Setting and Applying dc Bias Follow the steps below to apply dc bias to DUT, regardless of whether you plan to sweep by dc bias. 1. Selecting dc bias mode Step 1. Press the [Source] key to display the signal source menu. Step 2. Press the BIAS MENU key to display the dc bias menu. Step 3. Press the MODE [ ] key to display the dc bias mode menu. Step 4. Select the dc bias mode. DC bias mode Key stroke Voltage source (non-constant voltage mode) VOLT Current source (non-constant current mode) CURRENT Voltage source (constant voltage mode) VOLT CONSTANT Current source (constant current mode) CURRENT CONSTANT Setting fixed DC bias level When the sweep parameter is not dc bias, select the dc bias mode and then follow the steps below to set dc bias level. Step 1. Press the VOLTAGE LEVEL key if voltage source is selected for dc bias mode or the CURRENT LEVEL key if current source is selected. This will display the current setting for the dc voltage or the current bias level for the segment in the parameter settings located in the upper left area of the screen. Step 2. Use the keys or rotary knob of the ENTRY block in one of the following ways to specify a value for the dc voltage or current bias level. Enter the desired value with the numeric keys ([0] to [9], [.], and [-]) and then press the unit key . Turn the rotary knob until the desired value is set. Press the step keys to set the desired value. Setting limits for DC voltage When constant voltage or current is selected for the dc bias mode, follow the steps below to set limit values for the voltage (upper and lower limits) in order to protect the DUT being measured. Step 1. Press the MAX LIMIT VOLTAGE key. This will display the current setting for the upper limit of dc voltage for the segment in the parameter settings located in the upper left area of the screen. Step 2. Use the keys or rotary knob of the ENTRY block in one of the following ways to specify a value for the upper limit of dc voltage. Enter the desired value with the numeric keys ([0] to [9], [.], and [-]) and then press the unit key . Turn the rotary knob until the desired value is set. Press the step keys to set the desired value. Step 3. Press the MIN LIMIT VOLTAGE key. This will display the current setting for the lower limit of dc voltage for the segment in the parameter settings located in the upper left area of the screen. Step 4. Use the keys or rotary knob of the ENTRY block in one of the following ways to specify a value for the lower limit of dc voltage. Enter the desired value with the numeric keys ([0] to [9], [.], and [-]) and then press the unit key . Turn the rotary knob until the desired value is set. Press the step keys to set the desired value. NOTE When the dc bias applied to DUT exceeds the upper or lower voltage limit specified in the above procedure, the error message DC BIAS CONSTANT OPERATION FAILED will be displayed in the instrument message area in the upper left part of the screen.
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The dc voltage limit values specified by the MAX LIMIT VOLTAGE or MIN LIMIT VOLTAGE key take effect when the dc bias mode is constant voltage or current. The setting for these values is disabled when the dc bias mode is set to non-constant voltage or current mode. Turning dc bias ON or OFF Step 1. Press the BIAS on OFF (or BIAS ON off) key to make your selection (pressing the key toggles your selection). Softkey label Applied dc bias DC BIAS on OFF Off DC BIAS ON off On

12.Selecting a Method to Start Measurement (Trigger Source) Follow the steps below to select a trigger source, the cue generator for starting your measurement. Step 1. Press the [Trigger] key to display the trigger menu. Step 2. Press the SOURCE [ ] key to display the trigger source menu.

We only perform Manual mode at present

Step 3. Use the following keys to select the trigger source. Manual (triggering generated by pressing MANUAL key) MANUAL Softkey label Selected trigger source SOURCE [MANUAL] Manual

HOW TO SAVE: - Folow the steps to save the file

1. 2. 3. 4. 5. Click on the Excel sheet provided on the desktop. Click on the HANDSHAKE option to see the communication between 4294A & the computer. Provide the file name and click on GET DATA Data is transferred from 4294A and shown in new sheet in the same excel file. To repeat go to master sheet and do the same thing.

Micro and Nano Characterization Facility, <Electrical>, <DC PROBE STATION 04 WITH 4294A>, SOP_ver1.0

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CALIBRATION
Perform user calibration as follows: NOTE User calibration consists of two calibration data acquisition procedures: OPEN and SHORT. It is not possible to turn on or off each type of calibration data independently during your measurement. Step 1. Press the [Cal] key to display the Calibration Menu. Step 2. Select calibration (compensation) data acquisition points in accordance with Selecting Calibration/Compensation Data Points . Step 3. Press the USER CAL key to display the User Calibration Menu. Step 4. Press the EXECUTE CAL key to display the Calibration Execution Menu. Make sure that you have placed your sample are probe tips are very near to the device to be tested but not making any contacts. It must be open at the same time it should be very near to the device.

Step 5. Press the OPEN [-] key to start OPEN calibration data measurement. During the calibration data measurement, the message WAIT--MEASURING STANDARD is displayed in the instrument state area of the LCD's upper-left side. When OPEN calibration data measurement is completed, the soft key label changes to OPEN [DONE].

Step 9. Press the SHORT [-] key to start SHORT calibration data measurement. Short both the tips together be very carefull while touching as it may damage the tips. During the calibration data measurement, the message WAITMEASURING STANDARD is displayed in the instrument state area of the LCD's upper-left side. When the SHORT calibration data measurement is completed, the softkey label changes to SHORT [DONE]. When the calculation and storage of the coefficient are completed, the Agilent 4294A returns to the User Calibration Menu. If the user calibration function is off, it is automatically turned on (the key label CORRECTION on OFF changes to CORRECTION ON off). NOTE Press the cancel key to cancel the user calibration process. If the user calibration process is canceled, the previously obtained data can be used as the available user calibration coefficient.

Micro and Nano Characterization Facility, <Electrical>, <DC PROBE STATION 04 WITH 4294A>, SOP_ver1.0

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Log and Reporting :- Excel Log book is provided on the desktop. Please fill all the information
asked and also mentioned your comments and suggestion to improve the facility & your experience with the facility.

Micro and Nano Characterization Facility, <Electrical>, <DC PROBE STATION 04 WITH 4294A>, SOP_ver1.0

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LOG BOOK:-

3.

Things not to do:1. Please do not change any cal settings of device analyzer. 2. Do not try to change the tips as it may damage the manipulators. 3. Please avoid any change in microscope lamp power supply as you are provided with extender to adjust lamp intensity. 4. Please avoid going in back side of the test stations since there are numbers of power cables all around. 5. In case you have own test set up and you are using your own cables than please use standard cables only. 6. Do not open any cable from panel mount connectors. 7. Do not change the cable sequence on each side of probe station, if required please insure to connect it back in same sequence. 8. Avoid using any kind of paste or tape on chuck as it leaves mark and block vacuum holes.\

In case of emergency: - Switch of all the power M.C.B. available and inform the concerned
person immediately. All equipment owners mobile number are mentioned in online booking system.

Micro and Nano Characterization Facility, <Electrical>, <DC PROBE STATION 04 WITH 4294A>, SOP_ver1.0

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