Beruflich Dokumente
Kultur Dokumente
SECTION 1 INTRODUCTION
Microelectromechanical systems (MEMS) are small integrated devices
or systems that combine electrical and mechanical components. They range in size
from the sub micrometer level to the millimeter level and there can be any number,
from a few to millions, in a particular system. MEMS extend the fabrication
techniques developed for the integrated circuit industry to add mechanical elements
such as beams, gears, diaphragms, and springs to devices.
MEMS are not about any one application or device, nor are they defined
by a single fabrication process or limited to a few materials. They are a fabrication
approach that conveys the advantages of miniaturization, multiple components, and
microelectronics to the design and construction of integrated electromechanical
systems. MEMS are not only about miniaturization of mechanical systems; they are
also a new paradigm for designing mechanical devices and systems.
The MEMS industry has an estimated $10 billion market, and with a
projected 10-20% annual growth rate, it is estimated to have a $34 billion market in
2002. Because of the significant impact that MEMS can have on the commercial and
defense markets, industry and the federal government have both taken a special
interest in their development.
MEMS devices are manufactured either using processes based on Integrated Circuit
fabrication techniques and materials, or using new emerging fabrication technologies
such as micro injection molding. These former processes involve building the device
up layer by layer, involving several material depositions and etch steps. A typical
MEMS fabrication technology may have a 5 step process. Due to the limitations of
this "traditional IC" manufacturing process MEMS devices are substantially planar,
having very low aspect ratios (typically 5 -10 micro meters thick). It is important to
note that there are several evolving fabrication techniques that allow higher aspect
ratios such as deep x-ray lithography, electrodeposition, and micro injection molding.
A common MEMS actuator is the "linear comb drive" (shown above) which consists
of rows of interlocking teeth; half of the teeth are attached to a fixed "beam", the other
half attach to a movable beam assembly. Both assemblies are electrically insulated.
By applying the same polarity voltage to both parts the resultant electrostatic force
repels the movable beam away from the fixed. Conversely, by applying opposite
polarity the parts are attracted. In this manner the comb drive can be moved "in" or
"out" and either DC or AC voltages can be applied. The small size of the parts (low
inertial mass) means that the drive has a very fast response time compared to its
macroscopic counterpart. The magnitude of electrostatic force is multiplied by the
voltage or more commonly the surface area and number of teeth. Commercial comb
drives have several thousand teeth, each tooth approximately 10 micro meters long.
Drive voltages are CMOS levels.
The linear push / pull motion of a comb drive can be converted into
rotational motion by coupling the drive to push rod and pinion on a wheel. In this
manner the comb drive can rotate the wheel in the same way a steam engine
functions!
Since 1970, the complexity of ICs has doubled every two to three years.
The minimum dimension of manufactured devices and ICs has decreased from 20
microns to the sub micron levels of today. Current ultra-large-scale-integration (ULSI)
technology enables the fabrication of more than 10 million transistors and capacitors
on a typical chip.
Around 1982, the term micromachining came into use to designate the
fabrication of micromechanical parts for Si microsensors. The micromechanical parts
were fabricated by selectively etching areas of the Si substrate away in order to leave
behind the desired geometries. Isotropic etching of Si was developed in the early
1960s for transistor fabrication. Anisotropic etching of Si then came about in 1967.
Various etch-stop techniques were subsequently developed to provide further process
flexibility.
SILICON
POLYMERS
METALS
Metals can also be used to create MEMS elements. While metals do not
have some of the advantages displayed by silicon in terms of mechanical properties,
when used within their limitations, metals can exhibit very high degrees of reliability.
Metals can be deposited by electroplating, evaporation, and sputtering processes.
Commonly used metals include gold, nickel, aluminum, chromium, titanium,
tungsten, platinum, and silver
There are three basic building blocks in MEMS technology, which are,
Deposition Process-the ability to deposit thin films of material on a substrate,
Lithography-to apply a patterned mask on top of the films by photolithograpic
imaging, and Etching-to etch the films selectively to the mask. A MEMS process is
usually a structured sequence of these operations to form actual devices.
Common for all these processes are that the material deposited is physically
moved on to the substrate. In other words, there is no chemical reaction which
forms the material on the substrate. This is not completely correct for casting
processes, though it is more convenient to think of them that way.
The two most important CVD technologies in MEMS are the Low
Pressure CVD (LPCVD) and Plasma Enhanced CVD (PECVD). The LPCVD process
produces layers with excellent uniformity of thickness and material characteristics.
The main problems with the process are the high deposition temperature (higher than
600°C) and the relatively slow deposition rate. The PECVD process can operate at
lower temperatures (down to 300° C) thanks to the extra energy supplied to the gas
molecules by the plasma in the reactor. However, the quality of the films tend to be
inferior to processes running at higher temperatures. Secondly, most PECVD
deposition systems can only deposit the material on one side of the wafers on 1 to 4
wafers at a time. LPCVD systems deposit films on both sides of at least 25 wafers at a
time. A schematic diagram of a typical LPCVD reactor is shown in the figure below.
CVD processes are ideal to use when you want a thin film with good
step coverage. A variety of materials can be deposited with this technology; however,
some of them are less popular with fabs because of hazardous by-products formed
during processing. The quality of the material varies from process to process, however
a good rule of thumb is that higher process temperature yields a material with higher
quality and less defects.
ELECTRODEPOSITION
EPITAXY
EVAPORATION
SPUTTERING
This discussion will focus on optical lithography, which is simply lithography using a
radiation source with wavelength(s) in the visible spectrum.
Figure 6: Poor alignment mark design for a DRIE through the wafer etches (cross
hair is released and lost).
As there is no pattern on the wafer for the first pattern to align to, the
first pattern is typically aligned to the primary wafer flat (as shown in figure 8).
Depending on the lithography equipment used, this may be done automatically, or by
manual alignment to an explicit wafer registration feature on the mask
There are also higher order effects, such as interference patterns in thick
resist films on reflective substrates, which may affect the pattern transfer quality and
sidewall properties.
If the surface being exposed is not flat, the high-resolution image of the
mask on the wafer may be distorted by the loss of focus of the image across the
varying topography. This is one of the limiting factors of MEMS lithography when
high aspect ratio features are present. High aspect ratio features also experience
problems with obtaining even resist thickness coating, which further degrades pattern
transfer and complicates the associated processing.
The designer influences the lithographic process through their selections of materials,
topography and geometry. The material(s) upon which the resist is to be deposited is
important, as it affects the resist adhesion. The reflectivity and roughness of the layer
beneath the photoresist determines the amount of reflected and dispersed light present
during exposure. It is difficult to obtain a nice uniform resist coat across a surface
This is a simple technology, which will give good results if you can find
the combination of etchant and mask material to suit your application. Wet etching
works very well for etching thin films on substrates, and can also be used to etch the
substrate itself. The problem with substrate etching is that isotropic processes will
cause undercutting of the mask layer by the same distance as the etch depth.
Anisotropic processes allow the etching to stop on certain crystal planes in the
substrate, but still results in a loss of space, since these planes cannot be vertical to the
surface when etching holes or cavities. If this is a limitation for you, you should
consider dry etching of the substrate instead. However, keep in mind that the cost per
wafer will be 1-2 orders of magnitude higher to perform the dry etching
If you are making very small features in thin films (comparable to the
film thickness), you may also encounter problems with isotropic wet etching, since
the undercutting will be at least equal to the film thickness. With dry etching it is
possible etch almost straight down without undercutting, which provides much higher
resolution.
The dry etching technology can split in three separate classes called
reactive ion etching (RIE), sputter etching, and vapor phase etching.
In RIE, the substrate is placed inside a reactor in which several gases are
introduced. Plasma is struck in the gas mixture using an RF power source, breaking
the gas molecules into ions. The ion is accelerated towards, and reacts at, the surface
of the material being etched, forming another gaseous material. This is known as the
chemical part of reactive ion etching. There is also a physical part which is similar in
nature to the sputtering deposition process. If the ions have high enough energy, they
can knock atoms out of the material to be etched without a chemical reaction. It is
very complex tasks to develop dry etch processes that balance chemical and physical
etching, since there are many parameters to adjust. By changing the balance it is
possible to influence the anisotropy of the etching, since the chemical part is isotropic
and the physical part highly anisotropic the combination can form sidewalls that have
shapes from rounded to vertical. A schematic of a typical reactive ion etching system
is shown in the figure below.
Vapor phase etching is another dry etching method, which can be done
with simpler equipment than what RIE requires. In this process the wafer to be etched
is placed inside a chamber, in which one or more gases are introduced. The material to
be etched is dissolved at the surface in a chemical reaction with the gas molecules.
The two most common vapor phase etching technologies are silicon dioxide etching
using hydrogen fluoride (HF) and silicon etching using xenon diflouride (XeF2), both
of which are isotropic in nature. Usually, care must be taken in the design of a vapor
phase process to not have bi-products form in the chemical reaction that condense on
the surface and interfere with the etching process.
The first thing you should note about this technology is that it is
expensive to run compared to wet etching. If you are concerned with feature
resolution in thin film structures or you need vertical sidewalls for deep etchings in
the substrate, you have to consider dry etching. If you are concerned about the price
of your process and device, you may want to minimize the use of dry etching. The IC
industry has long since adopted dry etching to achieve small features, but in many
cases feature size is not as critical in MEMS. Dry etching is an enabling technology,
which comes at a sometimes high cost.
Deposition temperature and the film's silicon to nitride ratio can control
the stress of a silicon nitride (Si3N4) film. The films can be deposited in compression,
stress-free, or in tension.
LIMITED OPTIONS
PACKAGING
SECTION 7 APPLICATIONS
PRESSURE SENSORS
ACCELEROMETERS
The consumer market has been a key driver for MEMS technology
success. For example, in a mobile phone, MP3/MP4 player or PDA, these sensors
offer a new intuitive motion-based approach to navigation within and between pages.
In game controllers, MEMS sensors allow the player to play just moving the
controller/pad; the sensor determines the motion.
INERTIAL SENSORS
MICROENGINES
MEMS technology has the potential to change our daily lives as much as
the computer has. However, the material needs of the MEMS field are at a
preliminary stage. A thorough understanding of the properties of existing MEMS
materials is just as important as the development of new MEMS materials.
SECTION 9 CONCLUSION
INTRODUCTION
Introduction
What is MEMS Technology?
MEMS technology is based on a num ber of tools and
methodologies, which are used to form small structures with
dimensions in the micrometer scale
14 March 2009 3
BuildingBlocks InMEMS
HowMEMS areprepared?
There are three basic building blocks in MEMS technology.
1. Deposition: The ability to deposit thin films of
material on a substrate.
2. Lithography: To apply a patterned m ask on top of
the films by photolithograpic imaging.
3. Etching: To etch the films selectively to the mask.
14 March 2009 5
MEMS DepositionTechnology
MEMS deposition technology can be classified in two groups:
14 March 2009 6
14 March 2009 7
MEMS EtchingTechnology
There are two classes of etching process:
14 March 2009 8
MicrofabricationProcess
22 March 2009 11
MEMS APPLICATION
MEMSApplications
Micro-engines –Micro Reactors, Vibrating Wheel
Inertial Sensors –Virtual Reality Systems
Accelerometers –Airbag Accelerometer
Pressure Sensors –Air Pressure Sensors
Optical MEMS –Pill Camera
Fluidic MEMS -Cartridges for Printers
Bio MEMS -Blood Pressure Sensors
MEMS Memory Units-Flash Memory
14 March 2009 9
Advantages andDisadvantages
Minimize energy and materials Farmestablishment requires
use in manufacturing huge investments
Cost/performance advantages Micro-components are Costly
Improved reproducibility compare to macro-components
Improved accuracy and Design includes very much
reliability complex procedures
Increased selectivity and Prior knowledge is needed to
sensitivity integrate MEMS devices
14 March 2009 10
CONCLUSION
Conclusion
The medical, wireless technology, biotechnology, computer,
automotive and aerospace industries are only a few that will
benefit greatly fromMEMS.
14 March 2009 11
SECTION 11 REFERENCES
Online Resources
• BSAC http://www-bsac.eecs.berkeley.edu/
• DARPA MTO http://www.darpa.mil/mto/
• IEEE Explore http://ieeexplore.ieee.org/Xplore/DynWel.jsp
• Introduction to Microengineering http://www.dbanks.demon.co.uk/ueng/
• MEMS Clearinghouse http://www.memsnet.org/
• MEMS Exchange http://www.mems-exchange.org/
• MEMS Industry Group http://www.memsindustrygroup.org/
• MOSIS http://www.mosis.org/
• MUMPS http://www.memscap.com/memsrus/crmumps.html
• Stanford Centre for Integrated Systems http://www-cis.stanford.edu/
• USPTO http://www.uspto.gov/
• Trimmer http://www.trimmer.net/
• Yole Development http://www.yole.fr/pagesAn/accueil.asp
Journals