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difficult to maintain, inflexible, and did through the process, the pallets warp
not meet the companies’ overall significantly, sometimes greater than +/-
expectations. In the disk drive business, 2 mm (0.08”). Each pallet has unique
volume and yield requirements are high. and changing warpage characteristics.
Speed, throughput, and flexibility are
paramount. Each disk placement hole location is
slightly larger than the disk. Left-to-right
RTS provided an efficient and dynamic loading tolerance (world Y) is +/- 0.25
system that would adapt to varying mm (0.01”). The bottom outside
pallet and process conditions. The diameter of the disk is seated in a
pivotal aspect of success was the ability shallow groove with less than 0.3 mm
to enhance the AdeptOne robot’s true (0.012”) total clearance in X (in and out
point accuracy to less than 0.127 mm of pallet). If a disk falls from the pallet in
(0.005”) in the vertically oriented pallet the sputtering system, the whole
area. The application detailed here was process may have to be shutdown,
duplicated 24 times and deployed to causing hours of downtime and process
facilities in the United States and the Far recertification. It is also unacceptable to
East. touch the pallet with any disk edge other
than the landing area. A dent or scratch
on the edge is detrimental to disk drive
Sputtering Process Specifics dynamics.
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process by a monorail-like conveyance designed to be disk-type specific (Figure
system. Each pallet measures 1 meter 1). There are five different pallet types,
square and is machined from 6.3 mm and depending on the disk size, a pallet
(0.25”) thick aluminum. The pallet is can hold between 55 and 105 disks.
System Features
?? True robot accuracy of less than 0.127 mm (0.005”) in the pallet area.
?? A self-calibrating system. Precise mechanical alignments of robot-to-robot or robot-
to-pallet are not necessary. Misalignments are compensated for in software. As a
result the two robots share the same coordinate system to within 0.05 mm (0.002”).
?? Multitier calibration and verification routines.
?? Mandrel tool offsets for each part type are self-discovered utilizing the modules-
driven laser system.
?? Verification routines allow for easy “sanity checking” of each aspect of calibration.
?? Dynamically changing disk locations are measured to 0.0127 mm (0.0005”)
repeatability.
?? Each pallet hole location is determined in 5 -degree space (X/Y/Z/Ry/Rz).
?? Dual, simultaneous hole discovery gauges for increased throughput.
?? All disk placement locations are discovered – there are no taught points.
?? Adaptive load/unload strategies.
?? Loading and measurement mechanisms share access to the pallet.
?? Pallet instability detection.
?? On-the-fly sensing of disk load integrity.
?? Location skipping if a disk presence is sensed prior to loading .
?? Ability to bypass disks at load and compress at unload.
?? Tracking of groups of 25 disks from pallet load to pallet unload.
?? AGV machine loading and unloading.
?? One version of software that is flexibly configured, based on file parameters, for a
job (load/unload), working level, disk type, etc.
?? Full error handling capability with retry options. If system is E-stopped during a
move, the robot is immediately halted. Upon operator acknowledgment, the robot
will slowly complete the move in progress and continue with full speed
loading/unloading.
?? The cell is completely controlled by the robot controller; there are no PLC’s.
?? Application software is completely customized V+.
?? System throughput of 3100 disks per hour for the smallest disk size, with an
efficiency rating of 99.9%. A load time of approximately 2.2 seconds per disk.
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bottom. On the backside of the pallet, by one, each hole location is precisely
the orthogonal pair of Adept modules, in discovered and transformed to a load
a Y/Z configuration, works in a plane location for the AdeptOne robot in front
parallel to the pallet. A laser of the pallet. Hole locations are not
triangulation gauge held by the modules taught; they are mathematically
robot locates the pallet holes using edge determined points in space. This
and distance sensing techniques. One requires true robot accuracy.
Figure 2
Plan View of an Unload Cell
The end-effector is simply two opposing so that carrier changing is not needed
mandrels passively carrying 13 disks. during a single pallet cycle.
Disks are held vertically by tight
tolerance grooves in the mandrel
(Figure 3). Techniques
Carriers are shuttled in and out of the ?? Four of the five degrees of the disk
system by a U-shaped conveyance position are used in load/unload
system. Once a carrier is indexed into position compensation. The angle
the load/unload area, a comb extends associated with the fifth is compared
up from below the conveyor to lift all 25 to a limit value to designate an
disks. Each disk is held by a portion of extreme pallet warpage condition.
its circumference by a groove in the ?? By relating CAD data of the disk
comb. Disk carriers are staged in two’s locations relative to the pallet’s
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discovered fiducials, each disk’s Y/Z ?? Clean room practices require that
location is known disks be loaded top-to-bottom and
?? In order to read the backside of the unloaded bottom-to-top
pallet and relate the disk load ?? All disks in a comb must be
centerline to the loading robot, the exhausted before moving to the next
pallet is assumed to have a constant comb.
thickness
Figure 3
The robot end-effector is shown loading a disk after the location has been determined
by the modules based laser distance sensor
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necessary because the mechanical
systems and their relationships remain This grid technique mitigates three
constant. different types of error simultaneously:
the mechanical misalignment between
Calibration consists of relating the two the modules robot and the load robot in
robots to one another and then creating X/Y/Z, the load robot inaccuracies, and
a lookup table of load robot the real-world conversion factor
inaccuracies. Together each robot differences between the laser and the
moves to a grid of X/Y/Z data points. robots.
With the load robot stationary, the
modules robot measures the position of Figure 4 demonstrates the system
the load robot and calculates the error realignment and robot accuracy
between the actual and desired enhancement. Eight vertical rows of
positions. A grid pitch of 20 mm load robot grid point data were read by
provides an adequate number of the measurement robot. The graphs
horizontal points while keeping the show a quasi-repeating pattern in each
calibration time to a minimum. row. There are 47 points in each row.
The “Before Enhancement” data is the
At runtime, after the measurement robot inaccuracy data taken at each of the
has relayed a hole location to the load grid points. The “After Enhancement”
robot, inaccuracy factors in X/Y/Z are data was taken when the load robot was
interpolated from the lookup table and moved to a point midway between grid
added to the location. points after applying the interpolated
compensation data from the lookup
The interpolation between 20 mm grid table. This could be considered as the
points can only be valid if the robot can worst case positioning error. There are
accurately achieve positions between more “Before” data points because the
the grid points. The Adept SCARA, “After” data points are midpoints within
while not inherently accurate to the the larger mapped area.
desired level of 0.127 mm (0.005”), was
“linearly accurate” between grid points.
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Point Inaccuracy Before Enhancement Worst Case Point Inaccuracy After Enhancement
0.008 0.008
0.006 0.006
I I 0.004
0.004
n n
0.002 0.002
c c
0 0
h h
-0.002 e -0.002
e
s -0.004 s -0.004
-0.006 -0.006
-0.008 -0.008
1 47 93 139 185 231 277 323 1 45 89 133 177 221 265 309
0.02
0.02
0.015
0.015 I
I 0.01
0.01 n
n 0.005
0.005 c
c 0
0 h
h -0.005
-0.005 e
e
s -0.01
s -0.01
-0.015
-0.015
-0.02
-0.02
1 45 89 133 177 221 265 309
1 47 93 139 185 231 277 323
Vertical Row Number - World Y
Vertical Row Number- World Y
0.008 0.008
0.006 0.006
I I
0.004 0.004
n n
0.002 0.002
c c
0 0
h h
e -0.002 e -0.002
s -0.004 s -0.004
-0.006 -0.006
-0.008 -0.008
1 47 93 139 185 231 277 323 1 45 89 133 177 221 265 309
Vertical Row Number - World Z Vertical Row Number - World Z
0.08 0.1
D 0.06 0.08
D
e 0.04 0.06
e
g 0.04
0.02 g
r
0 r 0.02
e
e 0
e -0.02
e -0.02
s -0.04 s
-0.04
-0.06
-0.06
1 47 93 139 185 231 277 323
1 45 89 133 177 221 265 309
Vertical Row Number - Theta
Vertical Row Number - Theta
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Figure 4
The linear trending of points in a row is within the positioning tolerance of the
due to the mechanical misalignment axis.
between the two robots. The nonlinear
relationship of points in a row Enhancement of robot world Y accuracy
demonstrates the load robot’s is minimal because the theta deviation
inaccuracies. directly affects Y point-to-point accuracy
as defined by the SCARA robot module.
Inaccuracies of theta about Z are not Since the application is most tolerant
mapped out because of the nonlinearity along the Y axis, this is not an issue.
between points. The “After” The application is most critical of world
enhancement theta data presented is X (in and out of the pallet), which
only readings at the enhanced X/Y/Z demonstrates the least amount of error
locations. The deviation shown is within after correction.
two or three encoder counts, which is
Application Challenges
?? Because of interference between the robot quill cover and the pallet conveyor, the
outer-most mandrel slot is 7 inches out from robot quill centerline (Figure 3).
Because of that, theta resolution and repeatability are crucial. One encoder tick
relates to a 0.127 mm (0.005”) translation in Y and a 0.05 mm (0.002”) translation in
X, the most critical axis.
?? SCARA robots are designed to work in a horizontal plane, this application works in a
vertical plane. The benefits of Z axis rigidity in a horizontal workspace is of no
benefit here.
?? Each robot has unique mechanical differences.
?? The coordinate system origin and, reference frame of the modules robot are adopted
by the load robot cell. The modules inherent accuracy must be an order of
magnitude greater than the minimum accuracy requirement of the cell.
?? While inaccuracies at any fixed location in the pallet plane were mapped out, the
accurate control over the path for the loading motion was still critical for good load
integrity.
?? Regardless of finish or color of the pallet, the laser must read linearly over the entire
surface.
?? The laser sensor edge triggering capabilities must have low hysteresis.
?? The robot controller must be able to latch encoder locations repeatably, at high
speed, as a result of that trigger.
?? The vertical reach of the SCARA arm was limiting. A six axis robot was tested in this
application and failed. The arm could not linearly move between grid points within
the required accuracy.
Conclusion
It is feasible to enhance the accuracy of some robots even though the precision
required is not available off-the-shelf. It is not possible to bridge the gap between
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inherent capability and enhanced capability without a powerful robot controller and an
in-depth understanding of robots, controls, coordinate transformations and sensing
techniques. Once a level of accuracy can be guaranteed, a new class of robust and
adaptable applications can be realized.
________________________________
Bruce Fiala is a Senior Software Engineer in the Robotics and Vision Group at RTS
Wright Industries LLC, 1520 Elm Hill Pike, Nashville, TN 37075; 615-361-4111 ext.
3241, bruce.fiala@rts-group.com.
For this application, RTS Wright was presented the Advanced Technology Achievement
Award by Adept Technologies.
________________________________
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