Nanotribology, Nanomechanics and Bio/Nanotechnology

Prof. Bharat Bhushan Ohio Eminent Scholar and Howard D. D Winbigler Professor and Director of NLBB
Bhushan.2@osu.edu

Nanoprobe Laboratory for Bio- & Nanotechnology and Biomimetics

Micro/nanoscale studies
Bio/nanotribology Bio/nanomechanics Biomimetics

Materials/Device Studies
Materials/coatings SAM/PFPE/Ionic liquids Biomolecular films CNTs

Materials sci., sci biomedical eng., eng physics & physical chem. chem

Techniques
AFM/STM Microtriboapparatus Nanoindentor Micro/nanofabrication

Numerical modeling and simulation

Collaborations

Applications
MEMS/NEMS BioMEMS/NEMS Superhydrophobic surfaces Reversible adhesion Beauty care products Probe-based data storage

Nanoprobe Laboratory for Bio- & Nanotechnology and Biomimetics

Nanotribology
To develop p fundamental understanding g of interfacial p phenomena on a
small scale

Engineering Interface

Tip - based microscope Simulation of a single asperity contact

Examples of MEMS/NEMS with tribological issues

RF Microswitch (Courtecy IMEC IMEC, Belgium)

B. Bhushan et al., Nature 374, 607 (1995); B. Bhushan, Handbook of Micro/Nanotribology, second ed., CRC Press, 1999; B. Bhushan, Introduction to Tribology, Wiley, NY, 2002; B. Bhushan, Springer Handbook of Nanotechnology, 2004; B. Bhushan, Nanotribology and Nanomechanics An Introduction, Springer, 2005. Nanoprobe Laboratory for Bio- & Nanotechnology and Biomimetics

AFM Schematic and Examples

Schematic of AFM/FFM Topography and friction maps

STM images of a C60 film

Friction force maps for HOPG

Wear study

Surface potential map

1 N

Nanofabrication

9 N

Surface wear maps

Nanoprobe Laboratory for Bio- & Nanotechnology and Biomimetics

Nanomechanics
Si Nanobeams
dV
AFM

Fatigue g
Piezo tube scanner
Freq. = 4.2 Hz

Dtip = sens. x dVAFM

Dpiezo
D2

Dbeam

D1

Compensate for piezo drift 75 nm every 300s

Dbeam = Dpiezo - Dtip ti

Time

100

Lo oad, Fbeam ( N) )

80 60 40 20 0 0

w1=295 nm

Si
a

Diamond tip

Bending stress (GPa) B

Bending

Fracture toughness
c d Beam

Fbeam = Ftip = stiffness of cantilever x Dtip

25 20 15 10 5 0 100 101 102

> 30k cycles Bending g strength

E<110> = 189 GPa

200 400 600 800 1000

L d Load Beam

Substrate
Stress concentration

Beam

103

104

105

Beams Beams exhibit linear elastic behavior and fail abruptly indicating brittle fracture

Displacement, Dbeam (nm)

Number of cycles

Fracture l d load Beam

Fatigue lives of nanobeams at various stress levels

Nanoprobe Laboratory for Bio- & Nanotechnology and Biomimetics

Modeling of Dynamic Modes in AFM

Objective & Motivation
Analytical and numerical models that can accurately simulate surface-coupled dynamics of AFM cantilevers are essential for quantitative measurement of surface properties, optimal cantilever design, and development of AFM techniques

Analytical modeling of TR mode

Tapping mode (TM)

Torsional resonance (TR) mode

Lateral contact stiffness can be calculated from the torsional resonance frequency of the tip-cantilever tip cantilever system
GJ {[tan[ (1 ) L] 1/ tan( L)} l2 I 2 = P c 2 klat =
GJ

FE Modeling of tapping mode (TM)

c : Torsional resonance frequency

Tip-cantilever system under viscoelastic interaction

: Ratio of the distance from tip location to free end of cantilever to cantilever length

klat is related to the effective shear modulus G * as

klat = 8ac G *

( ac : contact radius )
Steady-state cantilever responses for two different effective shear moduli

Lateral contact viscosity can be obtained from the cantilever torsional phase shift
lat =
I a klat l [e
2 2 Ra L

Detailed view of steady-state cantilever rotation

s1 s2 ] + (klat l Ra GJr1 ) s4 (klat l Ra + GJr1 )e Ra l 2 [e 2 Ra L s1 s2 ] + I a l 2 [e 2 Ra L s3 s4 ]

2 2

2 Ra L

s3

la t is an index of the energy dissipation capacity of

sample surfaces

In TM, compared to vibration amplitude, phase shift and interaction force are much more sensitive to the changes of in-plane in plane surface properties. Therefore, instead of vibration amplitude, phase shift (and interaction force, if possible) can provide better imaging of in-plane surface properties in TM.

Nanoprobe Laboratory for Bio- & Nanotechnology and Biomimetics

Nanoindentation and Nanoscratch

Schematic of a depth-sensing nanoindenter

Load-displacement plots and the hardness, elastic modulus and fracture toughness for various 100-nm thick DLC coatings and an uncoated Si substrate

Load-displacement plots and SEM images of indentations at elevated loads on 400-nm thick DLC coatings for fracture toughness measurement Friction profile as a function of ramping normal load for Si (100), where the abrupt increase in the coefficient of friction is associated with ith a damage e event ent

The step in the loading cycle and the associated energy release is related to the fracture toughness by: E K Ic = 2 1 ) 2 CR ( U t
1/ 2

Nanoprobe Laboratory for Bio- & Nanotechnology and Biomimetics

Nanotribology of BioMEMS
Schematic of a bioFET sensor
Biomolecules, such as proteins, on silicon based surfaces are of importance in various bioMEMS application including silicon microimplants and biosensors biosensors.

Study of morphological changes, adhesion, friction, and wear

Silica soaked in DI water for 2h Silica soaked in PBS for 2h Silica soaked in PBS for 2 h and rinsed off salts

Superhydrophobicity
SEM images of various leaves

H d h bi l Hydrophobic leaves
Nelumbo nucifera (lotus) and colocasia esculenta Rough surface of many bumps called papillae Hydrophobic wax on surface Combination of rough surface and wax cause a very hydrophobic surface Polymer nanopatterns

Model of optimized roughness distribution

Wenzels equation:

cos = R f cos o

Nanoprobe Laboratory for Bio- & Nanotechnology and Biomimetics

Gecko Adhesion
Geckos have developed the most complex hairy attachment system capable of smart adhesion. Hierarchical structures provide adaptability.

Self-Assembled Monolayers
SAMs can used as lubricant to reduce the adhesion and wear of NEMS/MEMS

Contact angle, adhesion, friction, and wear of SAMs

Perfluoropolyethers
Molecular structures and schematic of bonding Durability of PFPEs

Z-15

Z-DOL

Adhesion and friction of PFPEs

H idit effect Humidity ff t

High Vacuum System with Mass Spectrometer

Schematic of high g vacuum tribotester Degradation g of Z-DOL on Si
Z-DOL Z-DOL Z-DOL (Untreated ) ( Partially bonded ) (Fully bonded) Normal pressure = 100 kPa Vacuum pressure = 2 10-7 Torr
C Coefficient of friction o 0. 8 0. 6 0. 44 0.3 22 1 00 4 3 2 1 0 4 Partial pressure (10 0-10 torr) 3 2 1 0 4 3 2 1 0 4 3 2 1 0 4 3 2 1 0 8 6 4 2 0 0 0. 8 0. 6 0. 44 0.3 22 1 04 0 3 2 1 0 4 3 2 1 0 4 3 2 1 0 4 3 2 1 0 4 3 2 1 0 8 0. 8 0. 6 0. 44 0.3 22 1 00 4 3 2 1 0 4 3 2 1 0 4 3 2 1 0 4 3 2 1 0 4 3 2 1 0 8 6 4 2 0 0

CF2 CF3

CF2 CF3

CF2 CF3

CF2CFO

CF2CFO

CF2CFO

CF3

CF3

CF3

CF2O

CF2O

CF2O

HCF2

HCF2

HCF2

Degradation mechanisms of Z-DOL

Triboelectrical reaction induced by y low energy gy electrons generated during sliding Mechanical scission of C-O and C-C bonds in the molecule chain by the asperities on the rubbing surfaces.

CF
2

CF2

CF2

CFO

50

100

CFO 6 4 2 0 0 50 100 Sliding distance (m)

CFO

50

100

Contact Modeling
The objectives j are to develop p multilayered y rough g surfaces contact models to predict p the contact statistics and stresses, and to identify optimum surface topography and layer properties for magnetic storage and MEMS/NEMS applications
=1 nm, *= 0.5 m, pn/ E3 = 1 10-5, H3 / E3 = 0.05

Multilayered y Dry y Contact

h1 / = h2 / = 1, , H1 = H2 = H3, E3 = 100 GPa

E1 / E3 = 1, E2 / E3 = 0.5

( pn / E3 ) 10 -2

Rough surface Layer I Layer II Substrate

4 0 0 10

y (m)

20 20

10

z ( h / 20 0)

10 15 20 0 5 10 15 20

x (m)

10

P
Contact area C

J 2 at y = ymax
4

10

x (m)

Wet Contact
Fra actional contact area a (%)

E1 = E2 = E3 E1 / E3 = E2 / E3 = 0.5 E1 / E3 = E2 / E3 = 2 E1 / E3 = 1, E2 / E3 = 0.5 E1 / E3 = 1, E2 / E3 = 2

( pn / E3 ) ( 10-7 )

Meniscus Fm / W

hm / = 1

( pn / E3 ) ( 10-7 )

Nanoprobe Laboratory for Bio- & Nanotechnology and Biomimetics

Application: DMD
Digital g micromirror devices

Schematic of DMD and AFM image of mirror array

The soft stuck micromirror

Weak bonds exist close to the uncovered sites

Wear could initiate if contact occurs at the defects sites

PFDA delaminated Formation of high energy surface from the interface increases the water adsorption leading to large adhesion

Assembled molecules

Defects Uncovered in PFDA sites

Residual head groups

Molecular fragments

Water molecule

Mechanisms for Wear and Stiction The hard stuck micromirror

Nanoprobe Laboratory for Bio- & Nanotechnology and Biomimetics

Application: Human Hair

Surface height Friction
Chemically damaged

Chemically damaged treated (1 cycle)

Outer layer, cuticle, is hard and protects hair Damage, conditioner, and environment affect tribological g and mechanical p properties p
Chemically damaged treated (3 cycles) Virgin

Damaged

Conditioner deposits heavily near scale edge base

Effect of temperature and relative humidity on coefficient of friction

Treated

Nanoprobe Laboratory for Bio- & Nanotechnology and Biomimetics