mm Numerical

40
investigation
60
of80liquid film
100 120
flow on a rotating disk

40 Doris Prieling1 , Helfried Steiner1 , Petr Vita2

1 Instituteof Fluid Mechanics and Heat Transfer

Graz University of Technology
2 PetroleumProduction and Processing
60 University of Leoben

Ercoftac ADA PC meeting

Vienna, 6.11.2009
80
 Institute of Fluid Mechanics and Heat Transfer

Outlinemm
40 60 80 100 120

1 Motivation

2 Problem
40 statement
3 Asymptotic solution

4 Numerical Simulation - VoF Method

60
5 Test cases

6 Results

7 Conclusions
80

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 Institute of Fluid Mechanics and Heat Transfer

Motivation
mm 40 60 80 100 120

Spin Processor Technology

Single wafer one-sided
etching
40
Liquid supplied from above
Rotating chuck

Objective
60
Film flow on rotating surface
CFD solvers:
FLUENT, OpenFOAM
80

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 Institute of Fluid Mechanics and Heat Transfer

Problem
mm
statement
40 60 80 100 120
Impinging jet on rotating disk

40

Film motion governed by highly complex dynamics

60

80

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 Institute of Fluid Mechanics and Heat Transfer

Asymptotic
mm
solution
40 60 80 100 120
Nusselt solution Asymptotic solution

ū 2 Rauscher et al. (1973) [1]:

Ro 2  1, Ro 2 =


ωr
40
 
δ 62 2 −1 ∗−10/3
∂ 2 vr =r ∗−2/3
+ − F r +O(r −4 )
ν 2 = −r ω 2 h0 315 9
∂z
Film thickness 2πg ν
with F −1 = r ∗ = r /l
3ω 2 Q
,
603 Qν  13
 1 
1
2 4
δ= characteristic lengths: l = 4π9Q2 νω and h0 = ν 2
2π ω 2 r 2 ω

Viscous− Centrifugal−
Resistance Force leading order balance
80 Inertial− Gravitational− Coriolis−
Force Force Force higher order correction

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 Institute of Fluid Mechanics and Heat Transfer

Numerical
mm
Simulation - VoF Method (Hirt, Nichols [3])
40 60 80 100 120
Volume fraction α Surface tracking

1
 liquid Interpolation of face values:
α(~x , t) = 0 gas boundedness criterion
40 
preserve sharp interface
0 < α < 1 2-phase zone

Surface tracking methods
Advection equation (∇ · ~u = 0) Higher Order Differencing
∂α (HRIC, Inter-γ, QUICK, ...)
+ ∇ · (α~u ) = 0
60 ∂t Reconstruction Schemes
(PLIC, ...)
interface αf

n
θ
α80 αD df αA
U

flow direction Figure adopted from [2]

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 Institute of Fluid Mechanics and Heat Transfer

Test cases
mm
(Experiments: Thomas et al. 1991, Ozar et al. 2003)
40 60 80 100 120

Radially injected liquid sheet Schematic of experimental setup

Volumetric flowrate Q,
40 speed ω
rotational
and δ0 prescribed.
Inner radius: r1 =50.8mm,
outer radius: r2 =203mm.
60 case I:
Test
ω = 200rpm, Q = 7lpm
Test case II:
ω = 300rpm, Q = 3lpm
80 Thomas et al., 1991 [4],
Ozar et al., 2003 [5]

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 Institute of Fluid Mechanics and Heat Transfer

Test case
mm
I - Instantaneous film thickness (ω = 200rpm, Q = 7lpm)
40 60 80 100 120
Instantaneous film thickness after t=2s Instantaneous film thickness after t=2s
0.4 0.4

0.3 0.3
δ [mm]

δ [mm]
0.2 40 0.2
FLUENT HRIC, α=0.5
FLUENT PLIC, α=0.5 OpenFOAM Inter−γ, α=0.5
0.1 0.1
Asympt. Rauscher et al. Asympt. Rauscher et al.
Exp. Thomas et al. Exp. Thomas et al.
0 0
50 100 150 200 50 100 150 200
r [mm] r [mm]
Instantaneous film thickness after t=2s Temporal film thickness variation, monitor at r=180mm
0.4 60 0.4
FLUENT PLIC
FLUENT HRIC
0.3 0.3 FLUENT QUICK
OpenFOAM Inter−γ
δ [mm]

δ [mm]
0.2 0.2
FLUENT QUICK, α=0.5
OpenFOAM Inter−γ, α=0.5
0.1 0.1
Asympt. Rauscher et al.
80
Exp. Thomas et al.
0 0
50 100 150 200 1.85 1.9 1.95 2
r [mm] t [s]

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 Institute of Fluid Mechanics and Heat Transfer

Test case
mm
II - Instantaneous film thickness (ω = 300rpm, Q = 3lpm)
40 60 80 100 120

Instantaneous film thickness after t=2s Instantaneous film thickness after t=2s
0.4 0.4
FLUENT PLIC, α=0.5 FLUENT HRIC, α=0.5
0.3
Asympt. Rauscher et al.
0.3 OpenFOAM Inter−γ, α=0.5
Exp. Ozar et al. Asympt. Rauscher et al.
δ [mm]

δ [mm]
0.2 40 0.2
Exp. Ozar et al.

0.1 0.1

0 0
50 60 80 100 120 140 160 180 200 50 100 150 200
r [mm] r [mm]

0.4
60
Instantaneous film thickness after t=2s
0.4
Temporal film thickness variation, monitor at r=180mm

FLUENT QUICK, α=0.5 FLUENT PLIC

0.3 OpenFOAM Inter−γ, α=0.5 0.3
FLUENT HRIC
Asympt. Rauscher et al. FLUENT QUICK
δ [mm]

Exp. Ozar et al. δ [mm] OpenFOAM Inter−γ

0.2 0.2

0.1 0.1
80
0 0
50 100 150 200 1.85 1.9 1.95 2
r [mm] t [s]

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 Institute of Fluid Mechanics and Heat Transfer

Test case
mm
I - Time averaged values (ω = 200rpm, Q = 7lpm)
40 60 80 100 120
Test case I
ω=200rpm, Q=7lpm, νL=1x10−6m2/s, θ=10deg
0.4
FLUENT PLIC
FLUENT HRIC
0.35
FLUENT QUICK
40 OpenFOAM Inter−γ
0.3 Nusselt solution
Asympt. Rauscher et al.
0.25 Exp. Thomas et al.
δ [mm]

0.2
60
0.15

0.1

0.05

0 80
50 60 80 100 120 140 160 180 200
r [mm]

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 Institute of Fluid Mechanics and Heat Transfer

Test case
mm
I - Time averaged values (ω = 200rpm, Q = 7lpm)
40 60 80 100 120
Test case I
ω=200rpm, Q=7lpm, νL=1x10−6m2/s, θ=10deg
0.4
FLUENT PLIC
FLUENT HRIC
0.35
FLUENT QUICK
40 OpenFOAM Inter−γ
0.3 Nusselt solution
Asympt. Rauscher et al.
0.25 Exp. Thomas et al.
δ [mm]

0.2
60
Temporal averages
0.15
good agreement with experimental data
0.1 QUICK ≈ Inter-γ (smooth)
approach asymptotic solution in outer
0.05 region

0 80
50 60 80 100 120 140 160 180 200
r [mm]

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 Institute of Fluid Mechanics and Heat Transfer

Test case
mm
II - Time averaged values (ω = 300rpm, Q = 3lpm)
40 60 80 100 120
Test case II
ω=300rpm, Q=3lpm, νL=0.66x10−6m2/s, θ=10deg
0,4
FLUENT PLIC
FLUENT HRIC
0,35 40 FLUENT QUICK
OpenFOAM Inter−γ
0,3 Nusselt solution
Asympt. Rauscher et al.
0,25 Exp. Ozar et al.
δ [mm]

0,2
60
0,15

0,1

0,05
80
0
50 60 80 100 120 140 160 180 200
r [mm]

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 Institute of Fluid Mechanics and Heat Transfer

Test case
mm
II - Time averaged values (ω = 300rpm, Q = 3lpm)
40 60 80 100 120
Test case II
Exp. data overpredicted ω=300rpm, Q=3lpm, νL=0.66x10−6m2/s, θ=10deg
0,4 HRIC, Inter-γ: enhanced
waviness FLUENT PLIC
Smaller Ro 2 (ω ↑, Q ↓) FLUENT HRIC
0,35 40 FLUENT QUICK
OpenFOAM Inter−γ
0,3 Nusselt solution
Asympt. Rauscher et al.
0,25 Exp. Ozar et al.
δ [mm]

0,2
60
0,15

0,1

0,05
80
0
50 60 80 100 120 140 160 180 200
r [mm]

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 Institute of Fluid Mechanics and Heat Transfer

Conclusions
mm
1/2
40 60 80 100 120

Comparison: OpenFOAM - FLUENT

Both CFD codes produce comparable time

40
averaged values
Significant differences in instantaneous values
associated with surface tracking method
PLIC: interface highly distorted ?
60 HRIC,Inter-γ and QUICK show smoother
solutions with smaller waviness
Sensitivity of instantaneous results to surface
tracking schemes requires further investigations

80

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 Institute of Fluid Mechanics and Heat Transfer

Conclusions
mm
2/2
40 60 80 100 120

Comparison against Experiments & Asymptotic solution

Asymptotic solution:
40 good agreement of time averaged values in
both cases
Experimental:
Good agreement for Test case I ?
60 (ω = 200rpm, Q = 7lpm)
Overpredictions for Test cases II
( ω = 300rpm, Q = 3lpm)
→ possibly enhanced 3d-effects?
→ influence of measurement technique?
80

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 Institute of Fluid Mechanics and Heat Transfer

J. Rauscher, R. Kelly, J. Cole, An asymptotic solution for the laminar

flowmm
of thin films 40
on a rotating60disk, Appl. 80 100(1973) 43–47.
Mechanics 40 120

R. Scardovelli, S. Zaleski, Direct numerical simulation of free-surface

and interfacial flow, Annu. Rev. Fluid Mech. 31 (1999) 567–603.
C. Hirt,
40 B. Nichols, Volume of fluid VOF method for the dynamics of
free boundaries, Journal of Computational Physics 39 (1981) 201–225.
S. Thomas, A. Faghri, W. Hankey, Experimental analysis and flow
visualization of a thin liquid film on a stationary and rotating disk,
60 of Fluids Engineering 113 (1991) 73–80.
Journal
B. Ozar, B. Cetegen, A. Faghri, Experiments on the flow of a thin
liquid film over a horizontal stationary and rotating disk surface,
Experiments in Fluids 34 (2003) 556–565.
80

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