Course Overview

Course:

Class Times:
Instructor:

618-Lecture 0
ECE 618 - Microfabrication of Semiconductor Devices
T&H, 9:30 a.m. to 10:45 a.m - Swift 820 Prof. Andrew Steckl a.steckl@uc.edu Office Hours: M-F, 8:00 - 9:00 AM 899 Rhodes Hall 556-4777

Teaching Assist : Ray Wang, Ph.D. student, wangri@email.uc.edu, 910 Rhodes Hall 556-4829, email to schedule an apt.
Class Notes: Microfabrication of Semiconductor Devices by A. J. Steckl hardcopy or web: www.engrlib.uc.edu/e-reserves/elec/618-steckl/index.html
Lecture Notes:
Reference Text:
Grading:
Copyright A.J. Steckl J.C. Heikenfeld All rights reserved 2007

available before each class on www.blackboard.uc.edu Planar Processing Primer, G. Anner Van Nostrand Reinhold, 1990 2 quizzes Final Exam 50% 50%

What is course about?

What you are used to:

618-Lecture 0

This is not a course on device physics, this is a course on: s/c and device fab Device integration

E or C

B
Copyright A.J. Steckl J.C. Heikenfeld All rights reserved 2007

C or E

A Few Whys

618-Lecture 0

Why semiconductors? -non-mechanical switches -control over a wide-variety of properties -efficient light emitters / detectors -etc -can be microfabricated!

Why microfabrication? Compare to bread boarding or circuit boards - speed (size) - functions (density) - cost (but large wafers!) - power or efficiency
Copyright A.J. Steckl J.C. Heikenfeld All rights reserved 2007

Computers, displays (CRT vs. LCD), lighting (LEDs), sensors, etc

First transistor

618-Lecture 0

How does this course apply historically, or to nano

The first transistor was invented at Bell Laboratories on December 16, 1947 by William Shockley, John Bardeen, and Walter Brattain. This was perhaps the most important electronics event of the 20th century, as it later made possible the integrated circuit and microprocessor that are the basis of modern electronics.

Copyright A.J. Steckl J.C. Heikenfeld All rights reserved 2007

This is macrofabrication, leading edge novel device researchers still create devices like this

First Integrated Circuit

618-Lecture 0

How does this course apply historically, to nano

1958: Jack Kilby at TI, developed the 1st IC using BJT technology (differential amplifier, 5 transistors). At nearly same time Robert Noyce at Fairchild also developed one. Parallel fabrication! Not micro yet, but using similar non-mechanical processes.
Copyright A.J. Steckl J.C. Heikenfeld All rights reserved 2007

Macro Micro Nano

618-Lecture 0
6 transistor SRAM cell, 45 nm tech., photo at left

How does this course apply historically, to nano

Fabrication: Physics:

Macro serial traditional

Micro parallel traditional

Nano parallel (smaller) quantum

most
-Fab techniques good for nano (just more sophisticated!) To maximize your success in fields ranging from VLSI to single device work, to even PCB integration of discrete devices, a fundamental understanding is needed in: electronics
solid state physics
fabrication limitations / options this course

Copyright A.J. Steckl J.C. Heikenfeld All rights reserved 2007


Fab Challenges

618-Lecture 0

Want to be successful directly in the eld of micro or nanofabrication?

Tetrahedron of inter-relationships

Micro fabrication

Copyright A.J. Steckl J.C. Heikenfeld All rights reserved 2007

Fig. 0.1a Relationship between basic materials properties, semiconductor, microfabrication techniques and resulting device characteristics.

Fall 2007 - Calendar 1

MONDAY TUESDAY Sept. 18

618-Lecture 0
WEDNESDAY THURSDAY Sept. 20 Class Organization Sept. 25 Introduction to
-Fab Lecture 1 Oct. 2 Defects Lecture 3 Oct. 9 Epitaxy: Mechanisms Lecture 5 Oct. 16 Oxidation: Mechanisms Lecture 7 Oct. 23 Sept. 27 Crystal Structure Lecture 2 Oct. 4 Particle Kinetics Lecture 4 Oct. 11 Si epi Lecture 6 Oct. 19 Oxidation: Wet and Dry Lecture 8 Oct. 25 Diffusion I Lecture 9 FRIDAY

Copyright A.J. Steckl J.C. Heikenfeld All rights reserved 2007

Quiz #1

Fall 2007 - Calendar 2

MONDAY TUESDAY Oct. 30 Diffusion in Si

618-Lecture 0

WEDNESDAY

THURSDAY Nov. 1 Diffusion: npn BJT Lecture 11 Nov. 8 Ion Implantation: Dose/Damage Lecture 13 Nov. 15 Etching Lecture 14

FRIDAY

Lecture 10 Nov. 6 Ion Implantation: Mechanisms Lecture 12 Nov. 13 QUIZ #2 Nov. 20 Lithography/ Resist Lecture 15 Nov. 27 Physical Vapor Deposition Lecture 16
Copyright A.J. Steckl J.C. Heikenfeld All rights reserved 2007

Nov. 22 No School Thanksgiving Nov. 29 Overflow Extras Dec. 5 Dec. 6 Dec. 7

Dec. 3

Dec. 4

FINALS

WEEK