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Why silicon?
It is a semiconductor One of the most abundant elements on Earth It forms a high quality oxide Most semiconductor devices in microelectronics are silicon based
Unit cell
a = 0.543 nm
(atomic constant)
Unit cell
a = 0.543 nm
(atomic constant)
Description: two interpenetrating face-centred cubic lattices, displaced along the body diagonal of the cubic cell by one quarter the length of the diagonal
Lets go step by step... two interpenetrating face-centred cubic lattices, displaced along the body diagonal of the cubic cell by one quarter the length of the diagonal
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Wafer shaping
Crystal defects
Wafer engineering
Epitaxial wafers
epitaxial Si
particles
Si substrate
Si substrate
Si substrate
5. Backside polish/etch
epi Si oxide Si substrate
EEE8103/EEE8019 Semiconductor device fabrication
4. Bonding
3. Oxide growth
oxide epi Si p++ epi Si Si substrate
oxide Si substrate
2. Bonding
oxide oxide donor Si wafer Si substrate
3. Splitting
donor Si wafer reusable Si oxide oxide Si substrate
SOI: SIMOX
1. Oxygen implant 2. Annealing
Si substrate
Si oxide Si substrate