Beruflich Dokumente
Kultur Dokumente
com/mientay
2. Bn cht qu tr nh phn x Khc vi phng php bay bc nhit , phn x khng l m cho v t liu b bay hi do t nng m thc cht qu tr nh phn x l qu trnh truyn ng nng . Vt liu ngun c to th nh dng cc tm bia (target) v c t ti in cc (thng l catt), trong bu ng c ht chn khng cao v n p kh him vi p sut thp (c 10 -2 mbar). Di tc dng ca in trng, cc nguyn t kh him b in ha, tng tc v chuyn ng v pha bia vi tc ln v bn ph b mt bia, truyn ng nng cho cc nguyn t vt liu ti b mt bia. Cc nguy n t c truyn ng
2. Phn x phng in xoay chi u (RF discharge sputtering) L k thut s dng hiu in th xoay chiu gia tc cho in kh him. N vn c cu to chung ca cc h phn x, tuy nhi n my pht l mt my pht cao tn s dng dng in tn s sng v tuy n (thng l 13,56 MHz). in p t trn in cc ca h chn khng l ngun xoay chiu tn s t 0,1 MHz tr ln, bin trong khong 0,5 n 1 kV . Mt dng ion t ng hp ti bia trong khong 1 mA/cm2, trong khi bi n ca dng cao t n tng hp cao hn rt nhiu (c khi ln gp mt bc hoc h n na). V dng in l xoay chi u, nn n c th s dng cho cc bia vt liu khng d n in. My pht cao t n s to ra cc hiu in th xoay chi u dng xung vung. V h s dng dng in xoay chiu nn phi i qua mt b phi hp tr khng v h t in c tc d ng tng cng su t phng in v bo v my pht. Qu tr nh phn x c hi khc so vi phn x mt chiu ch bia va b bn ph bi cc in c nng l ng cao na chu k m ca hiu in th v b bn ph bi cc in t na chu k dng. Phn x cao tn c nhiu u im hn so vi phn x cao p mt chiu, th d in p thp, p hn x trong p sut kh thp h n, tc phn x ln hn v c bit phn x c tt c cc loi vt liu t kim loi n oxit hay ch t cch in. Plasma trong phn x cao tn c hnh thnh v duy tr nh ngun cao tn, cng ging nh qu trnh ion ha x y ra trong phn x cao p. Tuy nhin, ngy nay phn x cao tn ri ng bit cng khng cn c s dng bi hiu sut phn x vn cn cha cao. Ngi ta s dng magnetron khc phc nhc im n y.
Hnh 3: S h phng in cao t n c t chn lm tng hiu sut bn ph ion. 3. Phn x magnetron L k thut phn x (s dng c vi xoay chiu v mt chiu) ci tin t cc h phn x thng dng bng cch t b n di bia cc nam chm. Nh m t phn tr n, vi cu hnh ca in cc trong c hai phng php phn x u c in trng vung gc v i b mt bia. Nhng vi magnetron chng ta c n thy t trng ca cc nam chm to ra ng sc vung gc vi in tr ng (c ngha l song song v i mt phng ca bia). V th , t trng c tp trung v tng cng plasma v ng gn bia. T trng ca nam chm c tc dng by cc in t v in li gn bia v tng hiu ng in ha, tng s ln va chm gia cc in, in t vi cc nguyn t kh ti b mt bia do l m tng tc lng ng, gim s bn ph ca in t v in trn b mt mng, gim nhit v c th to ra s phng in p sut thp h n. By gi chng ta xem by in t l m vic nh th no? Cu hnh nh m t trn hnh 4 (a, b) to ra hiu ng cun in t trong h ng Chng ta c mt hiu ng Hall, chng l n dng cu n ny v c hng chuy n ng quanh bia nh nhng con quay
Hnh 4 : S nguyn l by in t bng t trng trong h phn x magnetron. Bn knh qu o () ca con quay c xc nh bng cng thc: