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Vacuum Components

KF Components

ISO Components

CF Components

Micro CF Components

Quick CF Components

Contents

Introduction KF Components
KF Introduction KF Flanges KF Fittings KF Flexible hoses KF Glass-to-metal connections KF Liquid feedthroughs KF Seals KF Connecting elements

Page 1-3 to 1-4

Page 1-5 to 1-6 Page 1-7 to 1-8 Page 1-8 to 1-17 Page 1-18 to 1-19 Page 1-19 Page 1-20 Page 1-21 to 1-26 Page 1-27 to 1-30

ISO Components
ISO Introduction ISO Flanges ISO Fittings ISO Flexible hoses ISO Seals ISO Connecting elements Page 1-31 to 1-33 Page 1-34 to 1-36 Page 1-37 to 1-42 Page 1-43 Page 1-44 to 1-48 Page 1-48 to 1-50

CF Components
CF Introduction CF Flanges CF Fittings CF Flexible hoses CF Glass-to-metal connections and CF quick access doors CF Liquid feedthroughs CF Seals CF Connecting elements Page 1-51 to 1-52 Page 1-53 to 1-56 Page 1-57 to 1-63 Page 1-64 Page 1-65 to 1-66 Page 1-67 Page 1-68 to 1-70 Page 1-70 to 1-72

Micro CF Components
Micro CF Flanges Micro CF Fittings Micro CF Edge welded bellows Micro CF Gaskets Micro CF Connecting elements Micro CF Mechnical feedthroughs Micro CF Electrical feedthroughs Page 1-73 Page 1-74 Page 1-74 Page 1-74 Page 1-75 Page 1-75 to 1-76 Page 1-77

Quick CF Components
Quick CF Flanges Quick CF Components Quick CF Seals Quick CF Connecting elements Page 1-79 Page 1-80 to 1-82 Page 1-82 to 1-84 Page 1-84

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Vacuum Components
General technical information
Introduction
Vacuum components are important parts of vacuum technology. These are all components of vacuum equipment which are necessary for the assembly of vacuum lines, e. g. flanges, seals and tube components (elbows, tees, crosses etc.). Applications in vacuum technology make high demands on the selection of material as well as the fabrication of these components. Varied fields of application require different connection standards which are based on different flange systems. Therefore, VACOM offers vacuum components of all important standards. Our product range covers a vast selection of standard vacuum components. VACOM also specialises in the manufacture of vacuum components to your precise requirements. Please find more detailed information in Chapter 2, Vacuum Custom Components and Vacuum Chambers.

Flange systems (KF, ISO, CF)


Three different flange systems or standards are basically used in vacuum technology. The selection of the most suitable system depends on the respective application. Please find further technical details in the introductions of the subsections. VACOM's flanges comply with the following standards:

Flange system Short term Nominal diameter Standard Vacuum range Standard seal Leak rate

Small flange KF (ISO-KF) DN10 to DN50 DIN28403 ISO2861 up to HV elastomer O-ring < 1.0E-9 mbar l / s

Clamping flange ISO (ISO-K, ISO-F) DN63 to DN630 DIN 28404 ISO1609 up to HV elastomer O-ring < 1.0E-9 mbar l / s

ConFlat compatible CF DN10 to DN250 ISO3669 up to UHV Cu gasket < 1.0E-11 mbar l / s

Materials
VACOM vacuum components are made of materials which meet the high demands of vacuum technology. Only stainless steels are processed for flanges and tubes. In addition we offer KF components of aluminium. VACOM manufactures flanges of forged stainless steel 316LN ESR for demanding applications, especially in ultra high vacuum. This electroslag remelted material is characterised by highest purity and homogeneous structure, high durability and low permeability. The stainless steel 316LN ESR processed by VACOM originates from material especially produced for VACOM. The specifications respective composition and purity are clearly closer defined by VACOM than determined by the standard.

Applied stainless steels


Material no. 1.4301 1.4305 1.4307 1.4404 / 1.4435 1.4429 1.4541 1.4571
AISI ESR

304 303 304L 316L 316LN 321 316Ti

yes -

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Vacuum Components
General technical informationen

Sealing materials
Different sealing materials are used in vacuum applications. The selection of the appropriate material depends on the required characteristics, especially with respect to: Ultimate pressure Temperature Chemical resistance Radiation resistance

O-rings of NBR or FKM are commonly used for KF and ISO components. Flat seals of copper are standard for CF components. Other materials are also used for special applications.

Elastomer seals
Material Flange system Design Applicaton Comment
NBR (nitrile butadiene rubber) FKM (fluor rubber) PFPM (perfluor rubber) PTFE (polytetrafluorethylene)

KF, ISO O-ring non corrosive standard material for KF and ISO

KF, ISO, CF O-ring or flat seal moderate corrosive standard material for KF and ISO

KF, ISO O-ring highly corrosive application mainly in semiconductor technology

KF edge seal highly corrosive high pressing forces, clamp chains or special clamps

Metal seals
Material Flange system Design Application Comment
Aluminium Copper (OFHC)

KF, ISO edge seal up to ultimate pressure 1.0E-7 mbar high pressing forces, for KF with clamp chains or special clamps usable

CF flat gasket up to ultimate pressure, radiation resistant standard material for CF, for special applications silver coated or annealed

Quality, cleaning and packing


Vacuum components by VACOM are subject to demanding quality requirements. The most important data are listed in the following table:

Leak rate Weld seams

Surface quality

< 1.0 E-9 mbar l / s, - welded part separately tested - inspection certificate on request inside or from outside through welded turning workpieces: - blank - roughness: Ra 3.2 (sealing surface: Ra 1.6 or. 0.8) welded parts: - KF and ISO: glass bead blasted inside and outside - CF: inside blank, outside polished or glass bead blasted - roughness: Ra 3.2 or better - electropolished on request - oil- and grease-free - hydrocarbon-free - ultrasonic cleaning with deionized water - dust-proof packed in bags or foils - protected against damage - cleanroom packing on request

Cleaning

Packing

Dimensions
All dimensions in mm unless specified.

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KF Components
Introduction
The Small flange or KF standard (DIN 28403, ISO 2961) is the standard connection for vacuum pipes up to the nominal diameter of DN50 used in low, fine and high vacuum. The connection between two flanges is shown in the following figure:

Functional principle
A seal is positioned between the flanges. The seal consists of a centering ring and the O-ring stretched upon. The flanges are held together by a clamp. The clamp has an inclined interior surface adequate to the conical outer surface of the flanges. Usually centering rings and standard clamps are used with wing nuts. They enable a quick and easy assembly without any tools. Trapped centering rings and special clamps or clamp chains are offered for special applications. Claw clamps or so-called bulkhead clamps are available for wall mounting.

KF flange

KF centering ring

Dimensions of KF flanges / KF centering rings


Dimension A D D2 RA L L2
DN10 DN16 DN25 DN40 DN50

30.0 12.2 10.0 14.0 5.1 3.5

30.0 17.2 16.0 19.0 4.5 3.5

40.0 26.2 25.0 28.0 4.6 3.5

55.0 41.2 40.,0 41.0 4.4 3.5

75.0 52.2 50.0 53.0 5.4 4.5

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KF Components
Introduction

Materials
Seals NBR (O-ring) FKM (O-ring) PTFE (edge seal) PTFE (centering ring / trapped centering ring) aluminium (edge seal) aluminium (centering ring / trapped centering ring) stainless steel 1.4301 (centering ring) stainless steel 1.4404 (centering ring) Flanges aluminium stainless steel 1.4301 stainless steel 1.4305 stainless steel 1.4404 Components aluminium stainless steel 1.4301 stainless steel 1.4305 stainless steel 1.4404 stainless steel 1.4435 stainless steel 1.4541 stainless steel 1.4571

Fields of application
Materials components and seals aluminium with elastomer seal stainless steel with elastomer seal stainless steel with metal seal Pressure range (mbar - bar) 1.0E-7 to 1.5 1.0E-7 to 1.5 1.0E-8 to 1.5 1.0E-8 to 1.5 1.0E-9 to 1.5 Leak rate (mbar l / s) 1.0E-8 1.0E-9 < 1.0E-9 Recommended centering ring inside outside inside outside outside Recommended connecting element standard clamp clamp chain standard clamp clamp chain clamp chain or special clamp

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KF Components
KF Flanges
KF Blank flanges

aluminium

stainless steel

Order code Aluminium KF16BA KF25BA KF40BA Stainless steel 304* KF16BS-304 KF25BS-304 KF40BS-304 Stainless steel 316L* KF16BS-316 KF25BS-316 KF40BS-316

DN 16 25 40 50

A 30 40 55 75

D 17.2 26.2 41.2 52.2

KF50BA KF50BS-304 KF50BS-316 * For clean room compatible packaging please add "-CRP" to the order code

KF Bored flanges, stainless steel

Order code Stainless steel 304 KF16B19-304 KF25B28-304 KF40B41-304 KF50B53-304 KF40B44-304 Stainless steel 316L KF16B19-316 KF16B20-316 KF25B28-316 KF40B41-316 KF50B53-316 KF40B44-316

DN 16 16 25 40 50 40

A 30 30 40 55 75 55 75

D 17.2 17.2 26.2 41.2 52.2 41.2 52.2

L 4.5 4.3 4.6 4.9 5.9 4.4 5.4

RA 19 20 28 41 53 44.5 57

L2 3.5 3.5 3.5 3.5 4.5 3.5 4.5

D2 16 16 25 40 50 40 52

50 KF50B57-304 KF50B57-316 For clean room compatible packaging please add "-CRP" to the order code

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KF Components
KF Flanges

KF Flange caps, plastics


Order code KF16CAP KF25CAP KF40CAP KF50CAP Packing unit 10 pieces DN #Fehler 16 25 40 50

KF Fittings
KF Tube, 1 m length, stainless steel
Technical data Lengthwise welded Outside and inside etched DIN Ra Ra (welding seam area) Order code St. steel 304 R304-19x1.5-1 R304-28x1.5-1 R304-41x1.5-1 R304-53x1.5-1 St. steel 316L R316-19x1.5-1 R316-28x1.5-1 R316-41x1.5-1 R316-53x1.5-1 16 25 40 50 19 28 41 53 16 25 38 50

11850 < 0.8 m < 1.6 m DN RA RI

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KF Components
KF Fittings
KF Tubulations (half nipples), stainless steel
Order code St. steel 304 St. steel 316L 16 30 13 19 TU16K13-19-304 DN A L RA

TU16K20-20-304 TU16K20-20-316 16 30 20 20 TU16K30-20-304 TU16K30-20-316 16 30 30 20 TU16K40-20-316 16 30 40 20 TU16K70-20-304 TU16K70-20-316 16 30 70 20 25 40 13 25 TU25K13-25-304 TU25K20-28-304 TU25K20-28-316 25 40 20 28 TU25K30-28-304 TU25K30-28-316 25 40 30 28 TU25K40-28-316 25 40 40 28 TU25K70-28-304 TU25K70-28-316 25 40 70 28 40 55 19 38 TU40K19-38-304 TU40K20-44.5-304 TU40K20-44.5-316 40 55 20 44.5 TU40K30-44.5-304 TU40K30-44.5-316 40 55 30 44.5 TU40K40-44.5-316 40 55 40 44.5 TU40K70-44.5-304 TU40K70-44.5-316 40 55 70 44.5 50 75 19 51 TU50K19-51-304 TU50K20-57-304 TU50K20-57-316 50 75 20 57 TU50K30-57-304 TU50K30-57-316 50 75 30 57 TU50K40-57-316 50 75 40 57 TU50K70-57-304 TU50K70-57-316 50 75 70 57 For clean room compatible packaging please add "-CRP" to the order code -

KF Hose nozzles, aluminium


Technical data Hose ID Order code KF16HNA KF25HNA KF40HNA KF50HNA

10 mm DN 16 25 40 50 A 30 40 55 75 RI 7 7 7 8

KF Hose nozzles, stainless steel


Technical data Hose ID Order code KF16HNS KF25HNS KF40HNS KF50HNS

10 mm DN 16 25 40 50 A 30 40 55 75

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KF Components
KF Fittings

KF Tubulations for PVC hose, stainless steel


Order code KF16TUH KF25TUH KF40TUH KF50TUH DN 16 25 40 50 A 30 40 55 75 RA 19 25 38 51 L 32 38 50 55

KF Hose clamps for PVC hose


Order code KF16HC KF25HC KF40HC KF50HC D = max. hose diameter DN 16 25 40 50 D 25 36 50 60

KF Hoses, wire reinforced PVC, per metre


Order code PVC16 PVC25 PVC40 PVC50 DN 16 25 40 50 RA 26 33 47 60 RI 19 25 38 50

KF Hose connectors, PVC, stainless steel


Order code KF16PVC25 KF16PVC50 KF16PVC100 KF25PVC25 KF25PVC50 KF25PVC100 KF40PVC25 KF40PVC50 KF40PVC100 KF50PVC25 KF50PVC50 KF50PVC100 DN 16 16 16 25 25 25 40 40 40 50 50 50 A 30 30 30 40 40 40 55 55 55 75 75 75 L 250 500 1000 250 500 1000 250 500 1000 250 500 1000

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KF Components
KF Fittings
KF Straight connectors (full nipples)

Order code Aluminium SC16KA SC25KA SC40KA * Stainless steel 304* SC16K-304 SC25K-304 SC40K-304 Stainless steel 316L* SC16K-316 SC25K-316 SC40K-316

DN 16 25 40 50

A 30 40 55 75

L 80 100 130 130

SC50K-304 SC50K-316 For clean room compatible packaging please add "-CRP" to the order code Special lengths on request

KF Tubulated reducing adapters, aluminium


Order code KF25R16A-40 KF40R16A-40 KF40R25A-40 KF50R40A-40 DN 25 40 40 50 DN2 16 16 25 40 A 40 55 55 75 A2 30 30 40 55

KF Tubulated reducing adapters, conical, stainless steel

Order code Stainless steel 304 KF25R16/CO-304 KF40R16/CO-304 KF40R25/CO-304 KF50R25/CO-304 Stainless steel 316L KF25R16/CO-316 KF40R16/CO-316 KF40R25/CO-316 KF50R25/CO-316

DN 25 40 40 50 50

DN2 16 16 25 25 40

A 40 55 55 75 75

A2 30 30 40 40 55

D 26 41 41 52 52

D2 17 17 26 26 41

KF50R40/CO-304 KF50R40/CO-316 For clean room compatible packaging please add "-CRP" to the order code

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KF Components
KF Fittings

KF Tubulated reducing adapters, stainless steel


Order code St. steel 304 KF25R16-304 KF40R16-304 KF40R25-304 KF50R25-304 St. steel 316L KF25R16-316 KF40R16-316 KF40R25-316 KF50R25-316 25 40 40 50 16 16 25 25 40 30 55 30 55 40 75 40 DN DN2 A A2

50 40 75 55 KF50R40-304 KF50R40-316 For clean room compatible packaging please add "-CRP" to the order code

KF to ISO-K Adapters, stainless steel


Order code St. steel 304 SK6325-304 SK6340-304 SK6350-304 St. steel 316L SK6325-316 SK6340-316 SK6350-316 63 25 63 40 63 50 95 40 95 55 95 75 DN DN2 A A2

SK1040-304 SK1040-316 Other adapters on request

100 40 130 55

For clean room compatible packaging please add "-CRP" to the order code

KF to ISO-K Adapters, conical, stainless steel


Order code SK6340/CO SK6350/CO SK8040/CO SK8050/CO SK1040/CO DN DN2 63 63 80 80 100 40 50 40 50 40 A 95 95 110 110 130 A2 55 75 55 75 55 D 70 70 83 83 102 D2 41 52 41 52 41

100 50 130 75 102 52 SK1050/CO For clean room compatible packaging please add "-CRP" to the order code

KF to CF Adapters, stainless steel


Order code KA1616 KA3516 KA3525 KA3540 KA6325 DN 16 35 35 35 63 DN2 16 16 25 40 25 A 34 70 70 70 114 114 A2 30 30 40 55 40 55 L 36 36 36 50 50 50

63 40 KA6340 Other adapters on request

For clean room compatible packaging please add "-CRP" to the order code

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KF Components
KF Fittings
KF-G Adapter, G outside thread, stainless steel 316L
Order code KF16GA12 KF16GA14 KF16GA34 KF16GA38 KF25GA1 KF25GA12 KF25GA34 KF25GA114 KF40GA114 KF40GA112 DN 16 16 16 16 25 25 25 25 40 40 A 30 30 30 30 40 40 40 40 55 55 GZ 1/2" 1/4" 3/4" 3/8" 1" 1/2" 3/4" 1 1/4" 1 1/4" 1 1/2" D 14 7 16 10 25 14 16 25 34 34 L 24 20 26 24 29 24 26 35 35 32 SW 16 10 18 13 27 16 18 27 36 36

50 75 2" 49 40 KF50GA2 For clean room compatible packaging please add "-CRP" to the order code

KF-G Adapter, G outside thread, stainless steel with FKM seal


Order code KF16EF KF25EF KF40EF DN 16 25 40 A 30 40 55 GZ 1/2" 1" 1 1/2" D 16 25 41 L 35 45 50 L2 15 25 30

KF-R Adapter, R outside thread, stainless steel, 316L


Order code KF16RA12 KF25RA1 KF40RA112 DN 16 25 40 A 30 40 55 GZ 1/2" 1" 1 1/2" D 14 25 38 L 27 32 40 SW 19 27 41

50 75 2" 51 43 KF50RA2 For clean room compatible packaging please add "-CRP" to the order code

KF-G Adapter, G inside thread, stainless steel, 316L


Order code KF16GI18 KF25GI14 KF25GI12 KF25GI34 KF40GI12 KF40GI1 DN 16 25 25 25 40 40 A 30 40 40 40 55 55 GZ 1/8" 1/4" 1/2" 3/4" 1/2" 1" L 7 10 15 20 15 20 SW 19 27 27 41

40 55 1 1/4" 22 KF40GI114 For clean room compatible packaging please add "-CRP" to the order code

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KF Components
KF Fittings

KF to NPT Adapters, NTP outside thread, stainless steel, 316L


Order code KF16NPT14 KF16NPT12 KF16NPT34 KF25NPT14 KF25NPT34 DN 16 16 16 25 25 A 30 30 30 40 40 GZ 1/4" 1/2" 3/4" 1/4" 3/4" D 7.4 14.9 16 7.4 16 L 25 32 34 25 34 SW 19 19 19

40 55 1/2" 14.9 32 19 KF40NPT12 For clean room compatible packaging please add "-CRP" to the order code

KF to NPT Adapters, NTP inside thread, stainless steel, 316L


Order code KF16NPT18F KF16NPT14F KF25NPT14F DN 16 16 25 A 30 30 40 GZ 1/8" 1/4" 1/4" L 10 13 13 SW 13 19 19

25 40 1/8" 10 13 KF25NPT18F For clean room compatible packaging please add "-CRP" to the order code

KF to Swagelok Adapters, metric, stainless steel, 316L


Order code KSWA166 KSWA168 KSWA1610 KSWA256 KSWA258 KSWA2510 KSWA406 KSWA408 DN 16 16 16 25 25 25 40 40 A 30 30 30 40 40 40 55 55 55 D 4.8 6.4 7.9 4.8 6.4 7.9 4.8 6.4 7.9 L 35 38 44 33 38 44 33 38 44 RM 6 8 10 6 8 10 6 8 10

40 KSWA4010 Swagelok compatible

For clean room compatible packaging please add "-CRP" to the order code

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KF Components
KF Fittings
KF to Swagelok Adapters, imperial, stainless steel, 316L
Order code KSWA167 KSWA169 KSWA1613 KSWA257 KSWA259 KSWA2513 KSWA407 KSWA409 DN 16 16 16 25 25 25 40 40 A 30 30 30 40 40 40 55 55 55 D 4.8 7.1 10.4 4.8 7.1 10.4 4.8 7.1 10.4 L 35 44 53 33 44 53 33 44 53 RZ 1/4" 3/8" 1/2" 1/4" 3/8" 1/2" 1/4" 3/8" 1/2"

40 KSWA4013 Swagelok compatible

For clean room compatible packaging please add "-CRP" to the order code

KF to VCR Adapters, female or male, stainless steel, 316L

female

male

Order code Female KVCR166F KVCR1613F KVCR256F KVCR2513F KVCR406F KVCR4013F VCR compatible Male KVCR166M KVCR1613M KVCR256M KVCR2513M KVCR406M KVCR4013M

DN 16 16 25 25 40 40

A 30 30 40 40 55 55

D 4.8 10.4 4.8 10.4 4.8 10.4

L 36 41 36 41 36 41

RZ 1/4" 1/2" 1/4" 1/2" 1/4" 1/2"

For clean room compatible packaging please add "-CRP" to the order code

KF Pinch screw connection, stainless steel, FKM seal


Order code KF16TA12 KF25TA12 KF25TA25 KF40TA25 DN 16 25 25 40 A 30 40 40 55 D 13.1 13.1 25.8 25.8 L 50 50 60 60 RA 12.7 12.7 25.4 25.4

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KF Components
KF Fittings

KF Elbows, 90

aluminium

stainless steel

Order code Aluminium EL16KA EL25KA EL40KA * Stainless steel 304* EL16K-304 EL25K-304 EL40K-304 Stainless steel 316L EL16K-316 EL25K-316 EL40K-316

DN 16 25 40 50

A 30 40 55 75

SL 40 50 65 70

EL50K-304 EL50K-316 For clean room compatible packaging please add "-CRP" to the order code

KF Tees

aluminium

stainless steel

Order code Aluminium TE16KA TE25KA TE40KA * Stainless steel 304 TE16K-304 TE25K-304 TE40K-304 Stainless steel 316L* TE16K-316 TE25K-316 TE40K-316

DN 16 25 40 50

A 30 40 55 75

L 80 100 130 140

SL 40 50 65 70

TE50K-304 TE50K-316 For clean room compatible packaging please add "-CRP" to the order code

KF Unequal tees, stainless steel


Order code UTE2516K UTE4016K UTE4025K UTE5016K UTE5025K DN DN2 25 40 40 50 50 16 16 25 16 25 A 40 55 55 75 75 A2 30 30 40 30 40 L 100 130 130 140 140 SL 40 40 50 50 65

50 40 75 55 140 65 UTE5040K For clean room compatible packaging please add "-CRP" to the order code

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KF Components
KF Fittings
KF 4-way crosses, aluminium

aluminium

stainless steel

Order code Aluminium X16KA X25KA X40KA * Stainless steel 304* X16K-304 X25K-304 X40K-304 Stainless steel 316L* X16K-316 X25K-316 X40K-316

DN 16 25 40 50

A 30 40 55 75

L 80 100 130 140

X50K-304 X50K-316 For clean room compatible packaging please add "-CRP" to the order code

KF Reducing 4-way crosses, stainless steel


Order code X25K16 X40K16 X40K25 X50K25 DN DN2 25 40 40 50 16 16 25 25 A 40 55 55 75 A2 30 30 40 40 L 100 130 130 140 SL 80 80 100 100

50 40 75 55 140 130 X50K40 For clean room compatible packaging please add "-CRP" to the order code

KF 6-way crosses, stainless steel


Order code XX16K XX25K XX40K DN 16 25 40 A 30 40 55 L 80 100 130

50 75 140 XX50K For clean room compatible packaging please add "-CRP" to the order code

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KF Components
KF Flexible hoses

KF Flexible hoses, stainless steel


Technical data Flange material Hose material

1.4301 1.4404

Order code Stainless steel 304 FX16K25-304 FX16K50-304 FX16K75-304 FX16K100-304 FX25K25-304 FX25K50-304 FX25K75-304 FX25K100-304 FX40K25-304 FX40K50-304 FX40K75-304 FX40K100-304 FX50K25-304 FX50K50-304 FX50K75-304 Stainless steel 316L FX16K25-316 FX16K50-316 FX16K75-316 FX16K100-316 FX25K25-316 FX25K50-316 FX25K75-316 FX25K100-316 FX40K25-316 FX40K50-316 FX40K75-316 FX40K100-316 FX50K25-316 FX50K50-316 FX50K75-316 Stainless steel 304 annealed FX16K25AN-304 FX16K50AN-304 FX16K75AN-304 FX16K100AN-304 FX25K25AN-304 FX25K50AN-304 FX25K75AN-304 FX25K100AN-304 FX40K25AN-304 FX40K50AN-304 FX40K75AN-304 FX40K100AN-304 FX50K25AN-304 FX50K50AN-304 FX50K75AN-304

DN A 16 30 16 30 16 30 25 40 25 40 25 40 40 55 40 55 40 55 50 75 50 75 50 75

L 250 500 750 250 500 750 250 500 750 250 500 750

Bending radius 50 50 103 103 103 103 90 90 90 90 120 120 120 120

16 30 1000

25 40 1000

40 55 1000

FX50K100-304 FX50K100-316 FX50K100AN-304 For clean room compatible packaging please add "-CRP" to the order code

50 75 1000

KF Braided flexible hoses, stainless steel


Order code BFX25K13 BFX25K25 BFX40K13 BFX40K25 BFX50K13 BFX50K25 DN 25 25 40 40 50 50 A 40 40 55 55 75 75 L 135 250 135 250 135 250

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KF Components
KF Flexible hoses
KF Hydroformed bellows connectors, stainless steel
Technical data Flange material Bellows material Tolerances Order code KF16FXB KF25FXB KF40FXB DN 16 25 40

1.4301 1.4404 L 2 mm A 30 40 55 Lmin 64 63 84 L 70 80 100

50 75 84 100 KF50FXB For clean room compatible packaging please add "-CRP" to the order code

KF Glass-to-metal Connections
KF Glass-to-metal connections, Kodial / Pyrex
Technical data Flange material Tolerances Bakeout temperature Bakeout rate Order code Kodial KF16T13 KF25T19 KF25T25 KF40T25 Pyrex KF16T13P KF25T19P-L137 KF25T25P KF40T25P 16 25 25 40 30 40 40 55 13 19 25 25

1.4301 RA 1 mm, L 3 mm max. 200 C 2 - 3 C/min DN A RA

40 55 38 KF40T38 KF40T38P For detailed information see chapter viewports.

KF Glass-to-metal connections, quartz


Technical data Flange material Tolerances Bakeout temperature Bakeout rate Construction

1.4301 RA 1 mm, L 3 mm max. 200 C 2 - 3 C/min metal-to-quartz transition using intermediate glass layers DN 16 25 25 40 A 30 40 40 55 RA 13 19 25 25 L 143 155 165 165

Order code KF16T13Q KF25T19Q KF25T25Q KF40T25Q

40 50 38 175 KF40T38Q For detailed information see chapter viewports.

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KF Components
KF Liquid Feedthroughs

KF 1-way liquid feedthroughs, stainless steel, 316L

for liquid

for liquid nitrogen

Order code Liquid LFKF16PP LFKF40PP LFKF40PPL LFKF40PSL Liquid nitrogen LNFKF16PP LNFKF40PP LNFKF40PPL LNFKF40PSL

DN 16 40 40 40

A 30 55 55 55

RA 6 6 12 12

L 75 75 75 114

L2 45 45 45 45

Vacuum side tube tube tube tube Swagelok 12 mm

Atmosphere side tube tube tube Swagelok 12 mm Swagelok 12 mm

40 55 12 114 84 LFKF40SSL LNFKF40SSL For clean room compatible packaging please add "-CRP" to the order code Other lengths and connections on request Swagelok compatible

KF 2-way liquid feedthroughs, stainless steel, 316L

for liquid

for liquid nitrogen

Order code Liquid LFKF402PP LFKF402PS Liquid nitrogen LNFKF402PP LNFKF402PS

DN 40 40

L 45 45

L2 75 103

L3 75 75

L4 45 73

Vacuum side tube tube Swagelok 6 mm

Atmosphere side tube Swagelok 6 mm tube

40 73 75 103 45 LFKF402SP LNFKF402SP For clean room compatible packaging please add "-CRP" to the order code Other lengths and connections on request Swagelok compatible

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KF Components
KF Seals
KF O-rings, elastomer
Technical data Temperature range

-10 C to 150 C (intermittent to 200 C) DN D2 10 16 25 40 15 18 28 42

Order code FKM treated KF10VR-BEH KF16VR-BEH KF25VR-BEH KF40VR-BEH FKM vacuum baked* KF10VR-VB KF16VR-VB KF25VR-VB KF40VR-VB

50 55 KF50VR-BEH KF50VR-VB * For clean room compatible packaging please add "-CRP" to the order code

Chemically resistant KF O-rings, treated FKM


The commonly used elastomer seals suffer irreversible damage in corrosive environments and have a short life cycle. Therefore VACOM developed a procedure which considerably raises the durability of FKM O-rings used in aggressive processes. The procedure involves the pores of FKM so that corrosive liquids and gases cannot directly penetrate the O-ring structure. The significant reduction in contact surface enables a considerable increase in resistance to reactive substances. Fields of application: Fore vacuum, exhaust pipes and all kinds of processes involving aggressive gases and liquids.

Vacuum baked KF O-rings


The rate between the residual gas contamination and the pumping speed has to be considered in order to provide an ultrapure vacuum. The desorption of water molecules from the O-ring contaminates the vacuum and causes higher pumping speeds. O-ring particles can disturb delicate vacuum processes. A considerable particle reduction and low outgassing rates can be achieved by our special treatment of the O-rings. The spectrum inspection shows that our treatment of the O-rings enables a significant reduction in water content and volatile elements.

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KF Components
KF Seals

KF O-rings, elastomer
Technical data Temperature range NBR Temperature range FKM

-10 C to 100 C -10 C to 150 C (intermittent 200 C) DN 10 16 25 40 50 D2 15 18 28 42 55

Order code NBR KF10NR KF16NR KF25NR KF40NR KF50NR FKM KF10VR KF16VR KF25VR KF40VR KF50VR

KF Edge seals, aluminium, PTFE


Technical data Temperature range aluminium Temperature range PTFE Connecting elements Order code Aluminium KF10/16MS KF20/25MS KF32/40MS KF50MS PTFE KF10/16TS KF20/25TS KF32/40TS KF50TS 16 25 40 50 32 42 57 77

to 150 C to 120 C KF clamp chains DN D

KF Centering rings, NBR


Technical data Temperature range Order code Aluminium KF10ANCR KF16ANCR KF25ANCR KF40ANCR KF50ANCR Stainless steel KF10SNCR KF16SNCR KF25SNCR KF40SNCR KF50SNCR 10 16 25 40 50 12 17 26 41 52 10 16 25 40 50

-10 C to 100 C DN D D2

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KF Components
KF Seals
KF Centering rings, FKM
Technical data Temperature range

-10 C to 150 C (intermittent 200 C) DN D D2

Order code Aluminium Stainless steel 304 KF10AVCR KF10SVCR-304 KF16AVCR KF16SVCR-304 KF25AVCR KF25SVCR-304 KF40AVCR KF40SVCR-304 KF50AVCR KF50SVCR-304

10 12 10 16 17 16 25 26 25 40 41 40 50 52 50

KF Centering rings, FKM, stainless steel 316L


Technical data Temperature range Option

-10 C to 150 C (intermittent 200 C) vacuum baked or with improved chemical resistance (see page 1-21)

Order code FKM* KF10SVCR-316 KF16SVCR-316 KF25SVCR-316 KF40SVCR-316 FKM treated KF10SVCR-BEH-316 KF16SVCR-BEH-316 KF25SVCR-BEH-316 KF40SVCR-BEH-316 FKM vacuum baked KF10SVCR-VB-316 KF16SVCR-VB-316 KF25SVCR-VB-316 KF40SVCR-VB-316

DN 10 16 25 40 50

D 12 17 26 41 52

D2 10 16 25 40 50

KF50SVCR-316 KF50SVCR-BEH-316 KF50SVCR-VB-316 * For clean room compatible packaging please add "-CRP" to the order code

KF Mesh centering rings, stainless steel


Technical data Temperature range NBR Temperature range FKM Mesh size Wire size Order code NBR KF16MCR1N KF25MCR1N KF40MCR1N KF50MCR1N FKM KF16MCR1V KF25MCR1V KF40MCR1V KF50MCR1V 16 25 40 50 17 26 41 52 14 23 38 48

-10 C to 100 C -10 C to 150 C (intermittent 200 C) 1 mm 0.3 mm DN D D2

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KF Components
KF Seals

KF Centering rings with sintered metal screen, stainless steel - FKM


Technical data Temperature range Filter material Pores width Order code KF16FMCRV KF25FMCRV KF40FMCRV KF50FMCRV

-10 C to 150 C (intermittent 200 C) stainless steel 20 m DN 16 25 40 50 D 17 26 41 52 D2 15 24 39 49

KF Outer centering rings, aluminium


Technical data Temperature range NBR Temperature range FKM

-10 C to 100 C -10 C to 150 C (intermittent 200 C) DN 16 25 40 50 D 32 42 57 77 A 30 40 55 75

Order code NBR KF16AZRN KF25AZRN KF40AZRN KF50AZRN FKM KF16AZRV KF25AZRV KF40AZRV KF50AZRV

KF Trapped centering rings with support ring, stainless steel, NBR, aluminium
Technical data Temperature range Outer ring material Centering ring material Order code KF16TCRN KF25TCRN KF40TCRN KF50TCRN DN 16 25 40 50

-10 C to 100 C aluminium stainless steel D 32 42 57 77 A 30 40 55 75 D2 16 25 40 50

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KF Components
KF Seals
KF Trapped centering rings, FKM
Technical data Temperature range Outer ring material Centering ring material

-10 C to 150 C (intermittent 200 C) aluminium stainless steel

Order code Alu/Stainless steel 304 KF16TCRV-304 KF25TCRV-304 KF40TCRV-304 KF50TCRV-304 Alu/Stainless steel 316L KF16TCRV-316 KF25TCRV-316 KF40TCRV-316 KF50TCRV-316 PTFE/PTFE KF16TVCR KF25TVCR KF40TVCR KF50TVCR

DN 16 25 40 50

D 32 42 57 77

A 30 40 55 75

D2 16 25 40 50

KF Reducing centering rings, aluminium


Technical data Temperature range NBR Temperature range FKM

-10 C to 100 C -10 C to 150 C (intermittent 200 C)

Order code NBR KF10/16ANRCR KF20/25ANRCR KF32/40ANRCR FKM KF10/16AVRCR KF20/25AVRCR KF32/40AVRCR

DN 16 25 40

DN2 10 20 32

D 17 26 41

D2 10 20 32

D3 12 22 34

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KF Components
KF Seals

KF Adapter centering rings, stainless steel


Technical data Temperature range NBR Temperature range FKM

-10 C to 100 C -10 C to 150 C (intermittent 200 C)

Order code NBR KF10/16SNRCR KF20/25SNRCR FKM KF10/16SVRCR

DN 16

DN2 10 20 32

D 17 26 41

D2 10 20 32

D3 12 22 34

25 KF20/25SVRCR 40 KF32/40SNRCR KF32/40SVRCR * For clean room compatible packaging please add "-CRP" to the order code

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KF Components
KF Connecting elements
KF Clamp chains, polyamide
Technical data Temperatures (short-term) Colour Spec. resistance Dielectr. strength Link material Lock material Bolt material Suitable seals Order code to 60 C W16 W25 W40 W50 to 100 C WH16 WH25 WH40 WH50 16 25 40 50 51 61 76 96 22 32 47 67 18 18 18 20 48 55 59 68 Type W to 60 C (70 C) black 10E12 Ohm cm 26 kV/mm polyamide 6 (30 % glass fibre) stainless steel and aluminium stainless steel elastomer DN D D2 Type WH to 100 C (120 C) gray 10E15 Ohm cm 32 kV/mm polyamide (35 % glass fibre) stainless steel and aluminium stainless steel elastomer L R Max. internal pressure (bar) 5 4 3 3

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KF Components
KF Connecting elements

KF Clamp chains, aluminium


Technical data Temperature Link material Lock material Bolt material Suitable seals Order code XA16 XA25 XA40 DN 16 25 40

to 150 C AlMgSi 1 stainless steel stainless steel elastomer, aluminium, copper D 51 61 76 D2 22 32 47 L 18 18 18 R 45 50 61 Max. internal pressure (bar) 10 8 6 Closing moment (Nm) 2.5 3.5 5.0 6.0

50 96 67 20 73 6 XA50 Please mention the closing moments during over pressure application.

KF Claw clamps, aluminium


Order code KFC DN 10 16 20 25 32 40 50 C 45 45 55 55 71 71 91 DN 16 - 50 Number of required clamps 2 2 3 3 3 3 3 #Fehler

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KF Components
KF Connecting elements
KF Clamp rings, aluminium
Technical data Temperature range Order code KF16C KF25C KF40C KF50C DN 16 25 40 50

-10 C to 200 C D 62 72 90 113 D2 42 52 70 90 L 16 16 16 20

KF Clamp rings, stainless steel


Technical data Temperature range Order code KF16CLR KF25CLR KF40CLR KF50CLR

-10 C to 125 C DN 16 25 40 50 D 50 63 76 100

KF Clamp rings for metal seals, aluminium


Technical data Temperature range Order code KF10/16MSCA KF20/25MSCA KF32/40MSCA KF50MSCA

to 200 C DN 16 25 40 50 D 52 75 90 115 L 18 20 23 28

KF Clamp rings for metal seals, stainless steel


Technical data Temperature range Order code KF10/16MSC KF20/25MSC KF32/40MSC DN 16 25 40

to 450 C D 54 64 82 D2 22 32 47 L 17 18 18

50 112 62 20 KF50MSC For clean room compatible packaging please add "-CRP" to the order code

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KF Components
KF Connecting elements

KF Bulkhead clamps, aluminium

Order code BHC16 BHC25 BHC40 BHC50 BHC16K BHC25K BHC40K BHC50K Suitable screws 10-32 UNF x 5/8"

DN 16 25 40 50 16 25 40 50

D 50 60 75 95 50 60 75 95

C 38 48 62 83 38 48 63 83

L 9 10 9 10 11 11 11 12

L2 5 5 5 5 7 7 7 7

Incl. screws yes yes yes yes no no no no

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ISO Components
Introduction
The ISO-KF standard for clamp connections (DIN 28404, ISO 1609) is the standard connection for vacuum pipes starting from the nominal diameter DN63 and larger used in fine and high vacuum. The various possibilities of connection between two flanges are shown in the following figures:

Functional principle
Figure 1: Connection with claw clamps
ISO-K: Two single flanges are connected with the help of claw clamps. The flanges have a groove on the back in which the claw clamps are hooked which press the flanges together. Such as KF connections there is a sealing with centering ring and O-ring between the flanges. Mostly an additional trapped centering ring is used which produces an assembly with constant distance.

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ISO Components
Introduction

Figure 2: Connection with screws

ISO-K flanges with holes are called ISO-F flanges and the sealing is the same as for ISO-K flanges. Both flanges can be easily combined with each other. An ISO-K flange can be transformed into a rotatable ISO-F flange by means of a rotatable bolt ring with retaining ring. Screws hold the flanges together.

Figure 3: Combination ISO-K / ISO-F

ISO-F flanges are commonly used for wall mounting or with gate valves. An ISO-K flange can be fastened thereon with the help of claw clamps. Claw clamps are available for tapped blind holes as well as for through bolt holes.

Further combination possibilities:

It is possible to dispense with the screws, if the O-ring lies in a groove on the flange. But claw clamps with mated length have to be used in this case.

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ISO Components
Introduction

ISO Flange

ISO Centering ring

Dimensions of ISO-K flanges and centering rings


Nominal diameter A D D2 RA L L2 L3 L4 L5 Number of clamps Number of claw clamps Claw clamp size Number of screws Screw size 63 95 70 66 / 70 70 / 76 12 8/6 8 3.9 5.3 4 4 M8 x 35 4 M8 x 40 80 110 83 100 130 102 160 180 153 200 240 213 250 290 261 320 370 318 318 324 17 10 14 5.6 7 8 12 12 400 450 400 400 406 17 10 14 5.6 7 8 16 16 500 550 501 501 508 17 10 14 5.6 7 12 16 16 630 690 651 651 660 22 15 14 5.6 7 12 20 20

81 / 83 100 / 102 150 / 153 200 / 213 250 / 261 85 / 89 104 / 108 154 / 159 204 / 219 254 / 267 12 8/6 8 3.9 5.3 4 8 M8 x 35 8 M8 x 40 12 8/6 8 3.9 5.3 4 8 8 12 8/6 8 3.9 5.3 4 8 8 12 8/6 8 3.9 5.3 6 12 12 12 8/6 8 3.9 5.3 6 12 12

M8 x 35 M10 x 40 M10 x 40 M10 x 40 M12 x 50 M12 x 50 M12 x 50 M12 x 55 M8 x 40 M10 x 50 M10 x 50 M10 x 50 M12 x 60 M12 x 60 M12 x 60 M12 x 70

Materials
Sealing NBR (O-ring) FKM (O-ring) aluminium (edge sealing) aluminium (centering ring / trapped centering ring) stainless steel 304 (centering ring) Flange stainless steel 304 stainless steel 316L Components stainless stainless stainless stainless stainless steel steel steel steel steel 304 304L 316L 321 316Ti

Fields of application
Materials Components and sealings Stainless steel with elastomer sealing Stainless steel with metal sealing Pressure range (mbar - bar) 1.0E-7 - 1.5 1.0E-9 - 1.5 Leak rate (mbar l / s) 1.0E-9 < 1.0E-9

Recommended connecting element with claw clamp or wall clamp with chain clamp or ISO-F with nuts

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ISO Components
ISO Flanges

ISO-K Claw clamp blank flanges, stainless steel


Order code St. steel 304 ISO63BK-304 ISO80BK-304 ISO100BK-304 ISO160BK-304 ISO200BK-304 ISO250BK-304 * St. steel 316L* ISO63BK-316 ISO80BK-316 ISO100BK-316 ISO160BK-316 ISO200BK-316 ISO250BK-316 63 95 70 12 80 110 83 12 100 130 102 12 160 180 153 12 200 240 213 12 250 290 261 12 DN A D L

320 370 318 17 ISO320BK-304 ISO320BK-316 For clean room compatible packaging please add "-CRP" to the order code

ISO Blank flanges, conical, stainless steel


Order code KF63BS-304 KF80BS-304 DN 63 80 A 87 114 D 70 83 102 L 5 12 12

100 134 KF100BS-304 Mountable with ISO clamp chains

ISO-F Blank flanges, stainless steel


Order code ISO63FBK-304 ISO80FBK-304 ISO100FBK-304 ISO160FBK-304 ISO200FBK-304 ISO250FBK-304 ISO320FBK-304 DN A D 110 125 145 200 260 310 395 D2 9 9 9 11 11 11 14 L 12 12 12 16 16 16 20

63 130 80 145 100 165 160 225 200 285 250 335 320 425

ISO-F Chamber flanges, stainless steel


Technical data Flange O-ring Bolts Temperature range Application Order code ISOF40KAM-316 ISOF63KAM-316 ISOF100KAM-316 ISOF160KAM-316 DN

stainless steel 1.4404 FKM DIN 7964KE, A2 -10 C to 150 C wall mounting A D 80 110 145 200 L M

40 100 63 130 100 165 160 225

12 M6 12 M8 12 M8 12 M10

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ISO Components
ISO Flanges
ISO-K Claw clamp bored flanges, stainless steel

Order code Stainless steel 304 ISO63B70-304 ISO63B76-304 ISO80B85-304 ISO80B89-304 ISO100B104-304 ISO100B108-304 ISO160B154-304 ISO160B159-304 ISO200B204-304 ISO200B219-304 ISO250B254-304 ISO250B267-304 * Stainless steel 316L ISO63B70-316 ISO63B76-316 ISO80B85-316 ISO80B89-316 ISO100B104-316 ISO100B108-316 ISO160B154-316 ISO160B159-316 ISO200B204-316 ISO200B219-316 ISO250B254-316 ISO250B267-316

DN 63 63 80 80 100 100 160 160 200 200 250 250

A 95 95 110 110 130 130 180 180 240 240 290 290 370

D 70 70 83 83

D2 66 70 81 83

RA 70 76 85 89 104 108 154 159 204 219 254 267 324

L 12 12 12 12 12 12 12 12 12 12 12 12 17

L2 8 6 8 6 8 6 8 6 8 6 8 6 10

102 100 102 102 153 151 153 153 213 200 213 213 261 250 261 261 318 318

320 ISO320B324-304 ISO320B324-316 For clean room compatible packaging please add "-CRP" to the order code

ISO Bored flanges, conical, stainless steel


Order code KF63B63-304 KF80B76-304 DN 63 A 87 D 70 83 RA 63 76 102 L 5 12 12

80 114

100 134 102 KF100B102-304 Mountable with ISO clamp chains

ISO-F Bored flanges, stainless steel


Order code ISO63F70-304 ISO80F85-304 ISO100F104-304 ISO160F154-304 ISO200F204-304 ISO250F254-304 ISO320F324-304 DN A D D2 D3 9 9 L RA 70 85 104 154 204 254 324

63 130 110 80 145 125 100 165 145

70 12 83 12

9 102 12

160 225 200 11 153 16 200 285 260 11 213 16 250 335 310 11 261 16 320 425 395 14 318 20

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ISO Components
ISO Flanges

ISO Rotatable bolt rings with retaining ring, steel, nickel plated

Order code ISO63R ISO80R ISO100R ISO160R ISO200R ISO250R ISO320R

DN 63 80 100 160 200 250 320

A 130 145 165 225 285 335 425

D 110 125 145 200 260 310 395

D2 9 9 9 11 11 11 14

D3 95 110 130 180 240 290 371

L 12 12 12 16 16 16 20

Number of holes 4 8 8 8 12 12 12

For clean room compatible packaging please add "-CRP" to the order code

ISO Replacement retaining rings for rotatable bolt rings


Order code ISO63RR ISO80RR ISO100RR ISO160RR ISO200RR ISO250RR ISO320RR L 3 3 3 5 5 5 5 Accessories for ISO63R ISO80R ISO100R ISO160R ISO200R ISO250R ISO320R

ISO Flange caps, plastics


Order code ISO63CAP ISO100CAP ISO160CAP ISO200CAP ISO250CAP DN 63 100 160 200 250 Pack size 10 10 10 1 1

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ISO Components
ISO Fittings
ISO Tube, 1 m length, stainless steel
Technical data Lengthwise welded Outside and inside etched DIN Ra Ra (welding seam area) Order code St. steel 304 R304-70x2.0-1 R304-85x2.0-1 R304-104x2.0-1 R304-154x2.0-1 R304-204x2.0-1 St. steel 316L R316-70x2.0-1 R316-85x2.0-1 R316-104x2.0-1 R316-154x2.0-1 R316-204x2.0-1 63 80 66 81 70 85

11850 < 0.8 m < 1.6 m DN RI RA

100 100 104 160 150 154 200 200 204

ISO-K Claw clamp tubulations (half nipples), stainless steel


Order code ISO63TU ISO63TU-70 ISO80TU ISO80TU-85 ISO100TU-316 ISO100TU-104-316 ISO160TU ISO160TU-154 ISO200TU ISO200TU-204 ISO250TU ISO250TU-254 DN 63 63 80 80 100 100 160 160 200 200 250 250 A 95 95 110 110 130 130 180 180 240 240 290 290 RA 76 70 89 85 108 104 159 154 219 204 267 254

320 370 324 ISO320TU For clean room compatible packaging please add "-CRP" to the order code

ISO-K Straight connectors (full nipples), stainless steel


Order code ISO63SC ISO80SC ISO100SC ISO160SC ISO200SC DN 63 80 100 160 200 A 95 110 130 180 240

250 290 ISO250SC For clean room compatible packaging please add "-CRP" to the order code

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ISO Components
ISO Fittings

ISO-K Straight connectors with lateral KF ports, stainless steel


Order code ISO63SC4016K ISO100SC4016K DN 63 A 95 SL2 80 75 SL3 60 L 88

100 130

75 108

160 180 100 100 138 ISO160SC4016K For clean room compatible packaging please add "-CRP" to the order code

ISO-K Tubulated reducing adapters, stainless steel

Order code Stainless steel 304 ISO100R63-304 ISO160R63-304 ISO160R100-304 ISO200R100-304 Stainless steel 316L* ISO100R63-316 ISO160R63-316 ISO160R100-316 ISO200R100-316

DN 100 160 160 200 250

DN2 63 63 100 100 100

A 130 180 180 240 290

A2 95 95 130 130 130

L 50 50 50 90 90

ISO250R100-304 ISO250R100-316 For clean room compatible packaging please add "-CRP" to the order code *

ISO-K Tubulated reducing adapters, conical, stainless steel


Order code ISO80R63/CO ISO100R63/CO ISO100R80/CO ISO160R63/CO DN DN2 80 100 100 160 A A2 95 D 83 D2 70 70 83 70

63 110 63 130 63 180

95 102 95 153

80 130 110 102

160 100 180 130 153 102 ISO160R100/CO For clean room compatible packaging please add "-CRP" to the order code

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ISO Components
ISO Fittings
ISO-K to KF Adapters, stainless steel
Order code St. steel 304 SK6325-304 SK6340-304 SK6350-304 St. steel 316L* SK6325-316 SK6340-316 63 25 63 40 95 40 95 55 DN DN2 A A2

63 50 95 75 SK6350-316 100 40 130 55 SK1040-304 SK1040-316 * For clean room compatible packaging please add "-CRP" to the order code

ISO-K to KF Adapters, conical, stainless steel


Order code SK6340/CO SK6350/CO SK8040/CO SK8050/CO SK1040/CO DN DN2 63 63 80 80 100 40 50 40 50 40 A 95 95 95 95 130 A2 55 75 55 75 55 D 70 70 83 83 102 D2 41 52 41 52 41

100 50 130 75 102 52 SK1050/CO For clean room compatible packaging please add "-CRP" to the order code

ISO-K to CF Adapters, stainless steel


Order code SA6363 SA1063 SA1010 SA1510 DN 63 100 100 150 DN2 63 63 100 100 A 114 152 152 203 A2 95 95 130 130

150 160 203 180 SA1516 For clean room compatible packaging please add "-CRP" to the order code

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ISO Components
ISO Fittings

ISO-K Elbows 90, stainless steel

Order code Stainless steel 304 ISO63E-304 ISO80E-304 ISO100E-304 ISO160E-304 * Stainless steel 316L* ISO63E-316 ISO80E-316 ISO100E-316 ISO160E-316

DN 63 80 100 160 200

A 95 110 130 180 240

SL 88 98 108 138 178

Form swept swept swept mitred mitred

ISO200E-304 ISO200E-316 For clean room compatible packaging please add "-CRP" to the order code

ISO-K Tees, stainless steel


Order code St. steel 304 ISO63TE-304 ISO80TE-304 ISO100TE-304 ISO160TE-304 * St. steel 316L* ISO63TE-316 ISO80TE-316 ISO100TE-316 ISO160TE-316 63 95 176 88 80 110 196 98 100 130 216 108 160 180 276 138 DN A L SL

200 240 356 178 ISO200TE-304 ISO200TE-316 For clean room compatible packaging please add "-CRP" to the order code

ISO-K Unequal tees, stainless steel

Order code Stainless steel 304 ISO100TE63-304 ISO160TE63-304 Stainless steel 316L* ISO100TE63-316 ISO160TE63-316

DN 100 160 160

DN2 63 63 100

A 130 180 180

A2 95 95 130

L 216 276 276

SL 107 130 131

ISO160TE100-304 ISO160TE100-316 For clean room compatible packaging please add "-CRP" to the order code *

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ISO Components
ISO Fittings
ISO-K to KF Reducing tees, stainless steel

Order code Stainless steel 304 ISO63TE25-304 ISO63TE40-304 Stainless steel 316L* ISO63TE25-316 ISO63TE40-316

DN 63 63 100

DN2 25 40 40

A 95 95 130

A2 40 55 75

L 204 204 260

SL 79 76 111

ISO100TE40-304 ISO100TE40-316 For clean room compatible packaging please add "-CRP" to the order code *

ISO-K 4-way crosses, stainless steel


Order code St. steel 304 ISO63X-304 ISO80X-304 ISO100X-304 ISO160X-304 St. steel 316L* ISO63X-316 ISO80X-316 ISO100X-316 63 95 176 88 80 110 196 98 100 130 216 108 DN A L SL

160 180 276 138 ISO160X-316 200 240 356 178 ISO200X-304 ISO200X-316 For clean room compatible packaging please add * "-CRP" to the order code

ISO-K Unequal 4-way crosses, stainless steel

Order code Stainless steel 304 ISO100X63-304 ISO160X63-304 Stainless steel 316L* ISO100X63-316 ISO160X63-316

DN 100 160 160

DN2 63 63 100

A 130 180 180

A2 95 95 130

L 114 260 262

SL 108 138 138

ISO160X100-304 ISO160X100-316 * For clean room compatible packaging please add "-CRP" to the order code

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ISO Components
ISO Fittings

ISO-K to KF Reducing crosses, stainless steel

Order code Stainless steel 304 ISO63X25-304 ISO63X40-304 * Stainless steel 316L* ISO63X25-316 ISO63X40-316

DN 63 63 100

DN2 25 40 40

A 95 95 130

A2 40 55 55

L 204 204 260

SL 58 76 95

ISO100X40-304 ISO100X40-316 For clean room compatible packaging please add "-CRP" to the order code

ISO-K 6-way crosses, stainless steel


Order code ISO63XX ISO80XX ISO100XX ISO160XX DN 63 80 100 160 A 95 110 130 180 L 176 196 216 276 SL 88 98 108 138

200 240 356 178 ISO200XX For clean room compatible packaging please add "-CRP" to the order code

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ISO Components
ISO Flexible Hoses
ISO-K Flexible hoses, stainless steel
Technical data Flange material Bellows material Order code ISO63FX25 ISO63FX50 ISO63FX75 ISO63FX100 ISO80FX25 ISO80FX50 ISO80FX75 ISO80FX100 ISO100FX25 ISO100FX50 ISO100FX75 ISO100FX100 ISO160FX25 ISO160FX50 ISO160FX75

1.4301 1.4404 DN 63 63 63 63 80 80 80 80 100 100 100 100 160 160 160 A 95 95 95 95 110 110 110 110 130 130 130 130 180 180 180 L 250 500 750 1000 250 500 750 1000 250 500 750 1000 250 500 750

160 180 1000 ISO160FX100 For clean room compatible packaging please add "-CRP" to the order code

ISO-K Hydroformed bellows connectors, stainless steel


Technical data Flange material Bellows material Tolerances Order code ISO63FXB-304 ISO80FXB ISO100FXB-304 ISO160FXB ISO200FXB

1.4301 1.4404 L 3 mm DN 63 80 100 160 200 A 95 110 130 180 240 Lmin 112 112 112 192 180 L 130 130 130 220 200

250 290 180 200 ISO250FXB For clean room compatible packaging please add "-CRP" to the order code

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ISO Components
ISO Seals

ISO O-rings, elastomer


Technical data Temperature range

-10 C to 150 C (intermittent to 200 C) DN 63 80 D L

Order code FKM treated ISO63VR-BEH ISO80VR-BEH FKM vacuum baked* ISO63VR-VB ISO80VR-VB

76 5.3 88 5.3

ISO100VR-BEH ISO100VR-VB ISO160VR-BEH ISO160VR-VB ISO200VR-BEH ISO200VR-VB ISO250VR-BEH ISO250VR-VB

100 107 5.3 160 158 5.3 200 209 5.3 250 253 5.3

320 330 7 ISO320VR-BEH ISO320VR-VB * For clean room compatible packaging please add "-CRP" to the order code

Chemically resistant ISO O-rings, treated FKM


The commonly used elastomer seals suffer irreversible damage in corrosive environments and have a short life cycle. Therefore VACOM developed a procedure which considerably raises the durability of FKM O-rings used in aggressive processes. The procedure involves the pores of FKM so that corrosive liquids and gases cannot directly penetrate the O-ring structure. The significant reduction in contact surface enables a considerable increase in resistance to reactive substances. Fields of application: Fore vacuum, exhaust pipes and all kinds of processes involving aggressive gases and liquids.

Vacuum baked ISO O-rings


The rate between the residual gas contamination and the pumping speed has to be considered in order to provide an ultrapure vacuum. The desorption of water molecules from the O-ring contaminates the vacuum and causes higher pumping speeds. O-ring particles can disturb delicate vacuum processes. A considerable particle reduction and low outgassing rates can be achieved by our special treatment of the O-rings. The spectrum inspection shows that our treatment of the O-rings enables a significant reduction in water content and volatile elements.

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ISO Components
ISO Seals
ISO O-rings, elastomer
Technical data Temperature range NBR Temperature range FKM

-10 C to 100 C -10 C to 150 C (intermittent 200 C) DN 63 80 100 160 200 D 76 88 107 158 209 L 5.3 5.3 5.3 5.3 5.3

Order code NBR ISO63NR ISO80NR ISO100NR ISO160NR ISO200NR ISO250NR FKM ISO63VR ISO80VR ISO100VR ISO160VR ISO200VR

250 253 5.3 ISO250VR 320 330 7 ISO320NR ISO320VR * For clean room compatible packaging please add "-CRP" to the order code

ISO Centering rings, NBR


Technical data Temperature range

-10 C to 100 C

Order code Aluminium ISO63ANCR ISO80ANCR ISO100ANCR ISO160ANCR ISO200ANCR ISO250ANCR Stainless steel ISO63SNCR ISO80SNCR ISO100SNCR ISO160SNCR ISO200SNCR ISO250SNCR

DN 63 80 100 160 200 250 320

D 70 83 102 153 213 261 318

D2 68 81 100 150 210 258 315

L 8 8 8 8 8 8 14

L2 3.9 3.9 3.9 3.9 3.9 3.9 5.6

L3 5.3 5.3 5.3 5.3 5.3 5.3 7

ISO320ANCR ISO320SNCR Larger nominal widths on request

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ISO Components
ISO Seals

ISO Centering rings, FKM


Technical data Temperature range Option

-10 C to 150 C (intermittent 200 C) vacuum baked or with improved chemical resistance (see page 1-44)

Order code Aluminium ISO63AVCR ISO80AVCR ISO100AVCR ISO160AVCR ISO200AVCR ISO250AVCR Stainless steel 304 ISO63SVCR-304 ISO80SVCR-304 ISO100SVCR-304 ISO160SVCR-304 ISO200SVCR-304 ISO250SVCR-304

DN 63 80 100 160 200 250 320

D 70 83 102 153 213 261 318

D2 68 81 100 150 210 258 315

L 8 8 8 8 8 8 14

L2 3.9 3.9 3.9 3.9 3.9 3.9 5.6

L3 5.3 5.3 5.3 5.3 5.3 5.3 7

ISO320AVCR ISO320SVCR-304 Larger nominal widths on request

ISO Centering rings, FKM, stainless steel 316L


Technical data Temperature range Option

-10 C to 150 C (intermittent 200 C) vacuum baked or with improved chemical resistance (see page 1-44)

Order code FKM* ISO63SVCR-316 ISO80SVCR-316 ISO100SVCR-316 ISO160SVCR-316 ISO200SVCR-316 ISO250SVCR-316 * FKM treated ISO63SVCR-BEH-316 ISO80SVCR-BEH-316 ISO100SVCR-BEH-316 ISO160SVCR-BEH-316 ISO200SVCR-BEH-316 ISO250SVCR-BEH-316 FKM vacuum baked* ISO63SVCR-VB-316 ISO80SVCR-VB-316 ISO100SVCR-VB-316 ISO160SVCR-VB-316 ISO200SVCR-VB-316 ISO250SVCR-VB-316

DN 63 80 100 160 200 250 320

D 70 83 102 153 213 261 318

D2 68 81 100 150 210 258

L 8 8 8 8 8 8

L2 3.9 3.9 3.9 3.9 3.9 3.9 5.6

L3 5.3 5.3 5.3 5.3 5.3 5.3 7

ISO320SVCR-316 ISO320SVCR-BEH-316 ISO320SVCR-VB-316 For clean room compatible packaging please add "-CRP" to the order code

315 14

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ISO Components
ISO Seals
ISO centering rings with outer ring, NBR
Technical data Temperature range

-10 C to 100 C

Order code Alu/Alu ISO63ANCRT ISO80ANCRT ISO100ANCRT ISO160ANCRT ISO200ANCRT ISO250ANCRT Alu/Stainless steel ISO63SNCRT ISO80SNCRT ISO100SNCRT ISO160SNCRT ISO200SNCRT ISO250SNCRT

DN 63 80 100 160 200 250 320

D 94 109 128 179 239 287 358

D2 70 83 102 153 213 261 318

L 8 8 8 8 8 8 14

L2 3.9 3.9 3.9 3.9 3.9 3.9 5.6

L3 5.3 5.3 5.3 5.3 5.3 5.3 7

ISO320ANCRT ISO320SNCRT Larger nominal widths on request

ISO centering rings with outer ring, FKM


Technical data Temperature range Option

-10 C to 150 C (intermittent 200 C) vacuum baked or with improved chemical resistance (see page 1-44)

Order code Alu/Alu ISO63AVCRT ISO80AVCRT Alu/Stainless steel 304 ISO63SVCRT-304 ISO80SVCRT-304 Alu/Stainless steel 316L* ISO63SVCRT-316 ISO80SVCRT-316 ISO100SVCRT-316 ISO160SVCRT-316 ISO200SVCRT-316 ISO250SVCRT-316

DN 63

D 94

D2 70 83

L 8 8 8 8 8 8

L2 3.9 3.9 3.9 3.9 3.9 3.9 5.6

L3 5.3 5.3 5.3 5.3 5.3 5.3 7

80 109

ISO100AVCRT ISO100SVCRT-304 ISO160AVCRT ISO160SVCRT-304 ISO200AVCRT ISO200SVCRT-304 ISO250AVCRT ISO250SVCRT-304 *

100 128 102 160 179 153 200 239 213 250 287 261

ISO320AVCRT ISO320SVCRT-304 ISO320SVCRT-316 For clean room compatible packaging please add "-CRP" to the order code Larger nominal widths on request

320 358 318 14

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ISO Components
ISO Seals

ISO Mesh centering rings, stainless steel, FKM


Technical data Temperature range Mesh size MCRV Mesh size MCR1V Wire size MCRV Wire size MCR1V Order code 4 mm, 0.9 mm ISO63MCRV ISO100MCRV ISO160MCRV 1 mm, 0.3 mm ISO63MCR1V ISO100MCR1V ISO160MCR1V 63 100 160 70 102 153

-10 C to 150 C (intermittent 200 C) 4 mm 1 mm 0.9 mm 0.3 mm DN D

ISO Connecting Elements


ISO Clamp chains, aluminium
Technical data Temperature FKM gasket Temperature aluminium gasket Lock material Bolt material Flange type Order code XA63 XA80 DN 63 80

150 C 150 C stainless steel stainless steel conical ISO flanges D 112 144 D2 77 103 R 78 107 L 20 34

100 164 123 113 34 XA100 Closing moment depends on sealing material, see data sheet.

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ISO Components
ISO Connecting Elements
ISO Nut bolt and washer sets for two bolted flanges
Technical data Bolt Nut Washer Order code ISO63NBW ISO80NBW ISO100NBW ISO160NBW ISO200NBW ISO250NBW ISO320NBW DN 63 80 100 160 200 250 320

ISO 4014, 4017, A2 ISO 4032, A2 ISO 7089, A2 GM M8 M8 M8 M10 M10 M10 M12 L 40 40 40 50 50 50 60 Pack size 4 8 8 8 12 12 12

ISO Double claw clamps, aluminium


Technical data Application Order code ISO63/100DCA ISO160/250DCA ISO320/500DCA DN 63 - 100 160 - 250 320 - 500

with centering ring M M8 L Lmax Lmin 50 28 34 50 22 23 36

M10 51 M12 67

ISO Double claw clamps


Technical data Application

with centering ring

Order code Mild steel, zinc plated ISO63/250DCMS ISO320/500DCMS Stainless steel ISO63/250DCSS ISO320/500DCSS

DN 63 - 250 320 - 500 630

M M10 M12 M12

L 60 76 86

Lmax 27 37 46

Lmin 16 27 36

ISO630DCMS For clean room compatible packaging please add "-CRP" to the order code *

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ISO Components
ISO Connecting Elements

ISO Claw clamps


Technical data Application

for blind tapped holes with centering rings

Order code Aluminium ISO63/100WCA ISO160/250WCA * Mild steel, zinc plated ISO63/100WCMS ISO160/250WCMS Stainless steel ISO63/100WCSS ISO160/250WCSS

DN 63 - 100 160 - 250 320 - 500

M M8 M10 M12

L 34 35 48

L2 23 23 30

L3 14 14 21

ISO320/500WCA ISO320/500WCMS ISO320/500WCSS For clean room compatible packaging please add "-CRP" to the order code

ISO Claw clamps, steel nuts and washers


Technical data Application

for through bolt holes with centering rings

Order code Aluminium ISO63/100WCNA ISO160/250WCNA ISO320/500WCNA Mild steel, zinc plated ISO63/100WCN ISO160/250WCN ISO320/500WCN

DN 63 - 100 160 - 250 320 - 500

M M8 M10 M12

L 44 50 59

L2 23 23 36

L3 14 14 21

ISO Claw clamps, mild steel, zinc plated


Technical data Application

with O-ring without centering ring DN 63 - 100 150 - 250 320 - 500 M M8 L 35 L2 18 19 30 L3 10 10 15

Order code ISO63/100WCO ISO160/250WCO ISO320/500WCO

M10 41 M12 58

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CF Components
Introduction
The generation of ultra high vacuum (UHV) makes great demands on the material and connections. Therefore the CF standard was created in the UHV technology (ISO 3669; enhancement ISO/TS 3669-2). The following figure shows the principle construction:

Functional principle
CF flanges are manufactured from circular blanks of stainless steel on CNC machines. Rotatable flanges are bipartite and consist of an inner part with the seal face and an outer part with the bolt holes. CF flanges have an annular groove on the vacuum side for the reception of the gasket and a knife-edge. Sealing is achieved by means of a flat gasket of oxygen-free (OFHC) copper because of the low leak rate and high bakeout temperature necessary for UHV technology. This gasket can be used generally only once due to the plastic deformation by the knife-edge. Fastening is achieved by bolts which must be tightened uniformly crosswise in order to avoid any kind of distortion. Such flange connections have a leak rate of < 1.0E-11 mbar l/s and are bakeable up to 450 C.

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CF Components
Introduction

Dimensions
VACOM provides CF flanges and components of the dimensions DN10 to DN250 according to the pre-norm ISO/TS 3669-2. These flanges are fully interchangeable with ConFlat and CF flanges of other manufacturers. Micro CF flanges of the dimension DN10 are exclusively supplied by VACOM. Please consider that individual standards of institutions are also available in the market. Please add the auxiliary dimensions (DN25, DN50, DN75, DN125) in case of requests and offers of CF flanges and components. In addition please add the size and the number of required bolts and the necessary copper gasket for dimensions from DN250.

Dimensions of CF Flanges
AD (mm (inch)) 25.4 (1) 34 (1.33) 54 (2.12) 70 (2.75) 86 (3.38) 114 (4.5) 117 (4.62) 154 (6) 171 (6.75) 203 (8) 254 (10) 305 (12) 305 (12) Thickness (mm) 6 8 12 13 16 17 18 20 21 22 25 25 27 AD CU gasket (mm) 13.4 21 33 48 61 82 92 120 142 171 222 272.7 270 Bolt circle (mm) 18 27 41 59 72 92 102 130 152 181 232 284 283 Number of holes 6 x M3 6 x M4 4 x M4 6 x M6 6 x M6 8 x M8 10 x M8 16 x M8 18 x M8 20 x M8 24 x M8 32 x M8 32 x M10

Nominal diameter DN10 DN16 DN25 DN40 DN50 DN63 DN75 DN100 DN125 DN160 DN200 DN250 DN250 "imperial"

Materials
Seals FKM OFHC copper OFHC copper silver coated OFHC copper soft annealed Flanges stainless stainless stainless stainless steel steel steel steel 304 304L 316L 316LN ESR Components stainless stainless stainless stainless steel steel steel steel 304 304L 316L 316Ti

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CF Components
CF Flanges
CF Blank flanges, fixed, stainless steel
Technical data Option

with tapped holes

Order code Stainless steel 304 F16-304 F40-304 F63-304 F100-304 F160-304 F200-304 Stainless steel 316L F10-316 F16-316 F40-316 F63-316 F100-316 F160-316 F200-316 Stainless steel 316LN ESR F16-316LNS F40-316LNS F63-316LNS F100-316LNS F160-316LNS F200-316LNS

DN 10 16 40

A 25 34 70

D2 3.2 4.3

L 6 7

6.7 13 8.3 17 8.3 20 8.3 22 8.3 24 8.3 25

63 114 100 152 160 203 200 254 250 304

F250-304 F250-316 F250-316LNS For clean room compatible packaging please add "-CRP" to the order code

CF Blank flanges, rotatable, stainless steel


Technical data Options

with tapped holes

Order code Stainless steel 304 F40R-304 F63R-304 F100R-304 F160R-304 F200R-304 Stainless steel 316L F16R-316 F40R-316 F63R-316 F100R-316 F160R-316 F200R-316 Stainless steel 316LN ESR F16R-316LNS F40R-316LNS F63R-316LNS F100R-316LNS F160R-316LNS F200R-316LNS

DN 16 40

A 34 70

D2 4.3

L 7

6.7 13 8.3 17 8.3 20 8.3 22 8.3 24 8.3 25

63 114 100 152 160 203 200 254 250 304

F250R-304 F250R-316 F250R-316LNS For clean room compatible packaging please add "-CRP" to the order code

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CF Components
CF Flanges

CF Double sided blank flanges, stainless steel


Order code St. steel 304 F16DB F40DB F63DB F100DB St. steel 316LN ESR F16DBLNS F40DBLNS F63DBLNS F100DBLNS 16 34 7 40 70 13 63 114 17 100 152 20 DN A L

160 203 22 F160DB F160DBLNS For clean room compatible packaging please add "-CRP" to the order code

CF Bored flanges, fixed, stainless steel


Technical data Option

with tapped holes

Order code Stainless steel 304 F16B19-304 F40B41-304 F40B42-304 F63B63-304 F63B70-304 F100B101-304 F100B104-304 F160B152-304 F160B154-304 F200B204-304 Stainless steel 316L F10B10-316 F16B19-316 F40B41-316 F40B42-316 F63B70-316 F100B104-316 F160B154-316 F200B204-316 Stainless steel 316LN ESR F16B19-316LNS F40B41-316LNS F40B42-316LNS F63B70-316LNS F100B104-316LNS F160B152-316LNS F160B154-316LNS F200B204-316LNS

DN 10 16 40 40

A 25 34 70 70

RA D 10 9

L 6 7

L2 3 4.8 4.8 4.8 7.9 7.9 9.5 9.5 9.5 9.5 9.5 12.7

19 16

41 38 13 42 38 13 63 61 17 70 66 17

63 114 63 114

100 152 101 98 20 100 152 104 100 20 160 203 152 149 22 160 203 154 154 22 200 254 204 200 25 250 304 254 250 25

F250B254-304 F250B254-316 F250B254-316LNS For clean room compatible packaging please add "-CRP" to the order code

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CF Components
CF Flanges
CF Bored flanges, rotatable, stainless steel
Technical data Option

with tapped holes

Order code Stainless steel 304 F16RB19-304 F40RB41-304 F40RB42-304 F63RB63-304 F63RB70-304 F100RB101-304 F100RB104-304 F160RB152-304 F160RB154-304 F200RB204-304 Stainless steel 316L F16RB19-316 F40RB41-316 F40RB42-316 F63RB70-316 F100RB104-316 F160RB154-316 F200RB204-316 Stainless steel 316LN ESR F16RB19-316LNS F40RB41-316LNS F40RB42-316LNS F63RB70-316LNS F100RB104-316LNS F160RB152-316LNS F160RB154-316LNS F200RB204-316LNS

DN 16 40 40

A 34 70 70

RA D 19 16

L 7

L2 4.8 4.8 4.8 7.9 7.9 9.5 9.5 9.5 9.5 9.5 12.7

41 38 13 42 38 13 63 61 17 70 66 17

63 114 63 114

100 152 101 98 20 100 152 104 100 20 160 203 152 149 22 160 203 154 154 22 200 253 204 200 25 250 305 254 250 25

F250RB254-304 F250RB254-316 F250RB254-316LNS For clean room compatible packaging please add "-CRP" to the order code

CF Double sided bored flanges, stainless steel


Technical data Option Order code St. steel 304 F16D16-304 F40D38 F63D63 F100D100 St. steel 316LN ESR F16D16LNS F40D38LNS F63D66LNS F100D100LNS 16 34 13 7 16 34 16 7 40 70 38 13 63 114 61 17 63 114 66 17 100 152 100 20

radial connections DN A D L

160 203 150 22 F160D150 F160D150LNS For clean room compatible packaging please add "-CRP" to the order code

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CF Components
CF Flanges

CF Reducer flanges, stainless steel

Order code Stainless steel 304 ZL016010-304 ZL040010-304 ZL040016-304 ZL063016-304 ZL063040-304 ZL100040-304 ZL100063-304 ZL160040-304 ZL160063-304 ZL160100-304 ZL200100-304 Stainless steel 316LN ESR ZL040016-316LNS ZL063016-316LNS ZL063040-316LNS ZL100040-316LNS ZL100063-316LNS ZL160040-316LNS ZL160063-316LNS ZL160100-316LNS ZL200100-316LNS

DN 16 40 40 63 63 100 100 160 160 160 200 200

DN2 10 10 16 16 40 40 63 40 63 100 100 160

A 34 70 70 114 114 152 152 203 203

D 9 9 16 16 38 38 66 38 66

M M3 M4 M4 M4 M6 M6 M8 M6 M8 M8 M8 M8

L 10 13 13 17 17 20 20 22 22 22 25 25

203 100 253 100 253 150

ZL200160-304 ZL200160-316LNS For clean room compatible packaging please add "-CRP" to the order code

CF Flange caps, plastics


Technical data Packing unit Order code CF16CAP CF40CAP CF63CAP CF100CAP CF160CAP

10 pieces DN #Fehler 16 40 63 100 160

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CF Components
CF Fittings
CF Tube, 1 m length, stainless steel
Technical data Lengthwise welded Outside and inside etched DIN Ra Ra (welding seam area) Order code St. steel 304 R304-19x1.5-1 R304-41x1.5-1 R304-70x2.0-1 R304-104x2.0-1 R304-154x2.0-1 R304-204x2.0-1 St. steel 316L R316-19x1.5-1 R316-41x1.5-1 R316-70x2.0-1 R316-104x2.0-1 R316-154x2.0-1 R316-204x2.0-1 16 40 63 16 38 66 19 41 70

11850 < 0.8 m < 1.6 m DN RI RA

100 100 104 160 150 154 200 200 204

CF Tubulations, rotatable, stainless steel


Technical data Option

with tapped holes

Order code Stainless steel 304 TU16R TU40R TU63R TU63R105-70 TU100R TU100R-104 TU160R TU160R-154 Stainless steel 316LN ESR TU16RLNS TU40RLNS TU63RLNS TU100RLNS TU160RLNS

DN 16 40 63 63 100 100 160 160 200

A 34 70 114 114 152 152 203 203 254

L 38 63 105 105 135 135 167 167 167

RA 19 41 63 70 101 104 152 154 204

TU200R-204 TU200RLNS For clean room compatible packaging please add "-CRP" to the order code

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CF Components
CF Fittings

CF Straight connectors, stainless steel, 1 flange rotatable


Technical data Option

with tapped holes with fixed flanges Material 1.4404 others lengths DN 16 40 63 100 160 A 34 70 114 152 203 L 76 126 210 270 334

Order code SC16R SC40R-304 SC63R SC100R SC160R

200 254 334 SC200R For clean room compatible packaging please add "-CRP" to the order code

CF Tubulated reducing adapters, small flange rotatable, stainless steel


Order code TA040016R TA063016R TA063040R TA100040R TA100063R TA160063R DN 40 63 63 100 100 160 DN2 16 16 40 40 63 63 A 70 114 114 152 152 203 A2 34 34 70 70 114 114 L 70 70 70 70 70 127

160 100 203 152 127 TA160100R For clean room compatible packaging please add "-CRP" to the order code

CF to KF adapters, stainless steel


Order code KA016016 KA040016 KA040025 KA040040 KA063025 KA063040 KA063050 KA100025 DN 16 40 40 40 63 63 63 100 DN2 16 16 25 40 25 40 50 25 A 34 70 70 70 114 114 114 152 A2 30 30 40 55 40 55 75 40 L 36 36 36 50 50 50 50 50

100 40 152 55 50 KA100040 For clean room compatible packaging please add "-CRP" to the order code

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CF Components
CF Fittings
CF to ISO-K adapters, stainless steel
Order code SA063063 SA100063 SA100100 SA160100 DN 63 100 100 160 DN2 63 63 100 100 A 114 152 152 203 A2 95 95 130 130

160 160 203 180 SA160160 For clean room compatible packaging please add "-CRP" to the order code

CF to Quick CF adapters, stainless steel


Order code QCFA16-304 QCFA40-304 QCFA63-304 DN 16 40 63 A 30 55 87 A2 34 70 114 L 50 50 50

100 134 152 100 QCFA100-304 For clean room compatible packaging please add "-CRP" to the order code

CF to VCR adapters, stainless steel

female

male

Technical data Flange material Adapter material

stainless steel 304 stainless steel 316L Order code DN 16 16 40 40 40 40 40 A 34 34 70 70 70 70 70 D 4.6 10.1 4.6 7.1 10.1 15.7 22 L 36 41 41 46 46 53 58 RZ 1/4" 1/2" 1/4" 3/8" 1/2" 3/4" 1"

Female F16VCR6F F16VCR13F F40VCR6F F40VCR9F F40VCR13F F40VCR19F F40VCR25F VCR compatible

Male F16VCR6M F16VCR13M F40VCR6M F40VCR9M F40VCR13M F40VCR19M F40VCR25M

For clean room compatible packaging please add "-CRP" to the order code

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CF Components
CF Fittings

CF to Swagelok adapters, metric, stainless steel


Technical data Flange material Adapter material Order code F16SWA6M F16SWA8M F16SWA10M F40SWA6M F40SWA8M DN 16 16 16 40 40

stainless steel 304 stainless steel 316L A 34 34 34 70 70 70 D 4.8 7.9 7.9 4.8 6.4 7.9 L 38 44 44 43 47 49 RM 6 8 10 6 8 10

40 F40SWA10M Swagelok compatible

For clean room compatible packaging please add "-CRP" to the order code

CF to Swagelok adapters, imperial, stainless steel


Technical data Flange material Adapter material Order code F16SWA7 F40SWA7 F40SWA9 DN 16 40 40 A 34 70 70 70

stainless steel 304 stainless steel 316L D 4.8 4.8 7.1 10.4 L 38 43 48 52 RZ 1/4" 1/4" 3/8" 1/2"

40 F40SWA13 Swagelok compatible

For clean room compatible packaging please add "-CRP" to the order code

CF Elbows 90, 2 flanges rotatable, stainless steel


Order code St. steel 304 EL16R EL40R EL63R EL100R EL160R St. steel 316LNS EL16R-316LNS EL40R-316LNS EL63R-316LNS EL100R-316LNS EL160R-316LNS 16 40 34 70 38 63 DN A SL

63 114 105 100 152 135 160 203 167

200 254 203 EL200R EL200R-316LNS For clean room compatible packaging please add "-CRP" to the order code

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CF Components
CF Fittings
CF Tees, 2 flanges rotatable, stainless steel
Technical data Bolt hole orientation

staggered

Order code Stainless steel 304 TE16R TE40R TE63RS TE100R TE160R Stainless steel 316LNS TE16RS-316LNS TE40RS-316LNS TE63RS-316LNS TE100RS-316LNS TE160RS-316LNS

DN 16 40 63 100 160 200

A 34 70 114 152 203 254

L 76 126 210 270 334 406

SL 38 63 105 135 167 203

TE200R TE200RS-316LNS For clean room compatible packaging please add "-CRP" to the order code

CF Unequal tees, 2 flanges rotatable, stainless steel


Technical data Bolt hole orientation

staggered

Order code Stainless steel 304 UTE040016RS UTE063040R UTE100040R UTE100063R UTE160063R Stainless steel 316LNS UTE100040R-316LNS -

DN 40 63 100 100 160 160

DN2 16 40 40 63 63 100

A 70 114 152 152 203 203

A2 34 70 70 114 114 152

L 126 210 270 270 334 334

SL 60 77 95 95 120 120

UTE160100R For clean room compatible packaging please add "-CRP" to the order code

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CF Components
CF Fittings

CF 4-way crosses, 2 flanges rotatable, stainless steel


Technical data Bolt hole orientation

staggered

Order code Stainless steel 304 X16R X40R X63RS X100RS X160RS Stainless steel 316LNS X19RS-316LNS X40RS-316LNS X63RS-316LNS X100RS-316LNS X160RS-316LNS

DN 16 40 63 100 160 200

A 34 70 114 152 203 254

L 76 126 210 270 334 406

X200R X200RS-316LNS For clean room compatible packaging please add "-CRP" to the order code

CF 4-way reducing crosses, 2 flanges rotatable, stainless steel


Technical data Bolt hole orientation

staggered

Order code Stainless steel 304 UX040016R UX063040RS UX100063RS UX160063R Stainless steel 316LNS UX1063RS-316LNS -

DN 40 63 100 160 200

DN2 16 40 63 63 100

A 70 114 152 203 254

A2 34 70 114 114 152

L 126 210 270 334 406

L2 120 154 190 240 290

UX200100RS For clean room compatible packaging please add "-CRP" to the order code

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CF Components
CF Fittings
CF 6-way crosses, 3 flanges rotatable, stainless steel
Technical data Bolt hole orientation

staggered

Order code Stainless steel 304 XX16R XX40RS XX63RS XX100RS XX160R Stainless steel 316LNS XX40RS-316LNS XX63RS-316LNS XX100RS-316LNS XX1600RS-316LNS

DN 16 40 63 100 160 200

A 34 70 114 152 203 254

L 76 126 210 270 334 406

XX200R For clean room compatible packaging please add "-CRP" to the order code

CF Cubes
Order code CUBE16 CUBE40 CUBE63 CUBE100 CUBE160 DN 16 40 63 100 160 D 15 38 63 101 152 L 35 70 114 152 203

200 200 254 CUBE200 For clean room compatible packaging please add "-CRP" to the order code

CF Cluster flanges, stainless steel

Order code CF3P CF4P Other versions on request

DN 100 160

DN2 40 40

No. of ports 3 4

A 152 203

A2 70 70

SL 135 167

R2 208 250 11.9 13

For clean room compatible packaging please add "-CRP" to the order code

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CF Components
CF Flexible Hoses

CF Flexible hoses, 1 flange rotatable, stainless steel


Technical data Flange material Hose material Order code FX16CF25R FX16CF50R FX16CF75R FX16CF100R FX40CF25R FX40CF50R FX40CF75R FX40CF100R FX63CF25R FX63CF50R FX63CF75R FX63CF100R FX100CF25R FX100CF50R FX100CF75R

stainless steel 304 stainless steel 316L DN 16 16 16 16 40 40 40 40 63 63 63 63 100 100 100 A 34 34 34 34 70 70 70 70 114 114 114 114 152 152 152 L 250 500 750 1000 250 500 750 1000 250 500 750 1000 250 500 750

100 152 1000 FX100CF100R For clean room compatible packaging please add "-CRP" to the order code

CF Hydroformed bellows, 1 flange rotatable, stainless steel


Technical data Flange material Bellows material Order code FXB16R FXB40R FXB63R FXB100R DN 16 40 63 100

stainless steel 304 stainless steel 316Ti A 34 70 114 152 L 110 175 250 250 Lmin 74 150 230 230

160 203 270 240 FXB160R For clean room compatible packaging please add "-CRP" to the order code

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CF Components
CF Glass-to-Metal Connections and Quick Access Doors
CF Quick access doors with exchangeable viewport, stainless steel / aluminium
Technical data Assembly

Bakeout temperature Flange type Door frame Door sealing Viewport Leak rate Order code QAD63VP-AL-304 QAD100VP-AL-304 DN

directly at the chamber, by hexagon socket screws up to 150 C, up to 200 C intermittent stainless steel 304 aluminium, anodised FKM Borofloat < 1.0E-8 mbar l/s D D2 125 164 D3 63 100 L 30 33

63 152 100 194

160 211 238 150 35 QAD160VP-AL-304 For clean room compatible packaging please add "-CRP" to the order code

CF Quick access doors without viewport, stainless steel / aluminium


Technical data Assembly

Bakeout temperature Flange type Door frame Door sealing Leak rate Order code QAD40BK-AL-304 QAD63BK-AL-304 QAD100BK-AL-304 DN

directly at the chamber, by hexagon socket screws up to 150 C, up to 200 C intermittent stainless steel 304 aluminium, anodised FKM < 1.0E-9 mbar l/s D D2 80 125 164 D3 38 63 100 L 24 30 33

40 108 63 152 100 194

160 211 238 150 35 QAD160BK-AL-304 For clean room compatible packaging please add "-CRP" to the order code

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CF Components
CF Glass-to-Metal Connections and Quick Access Doors

CF Glass-to-metal connections, Pyrex


Technical data Flange material Tolerances Bakeout temperature Bakeout rate Seal

stainless steel 304 RA 1 mm, L 3 mm max. 200 C 2 - 3 C/min OFHC copper, vacuum annealed DN 16 40 40 63 A 34 70 70 114 D 13 25 38 64 L 104 104 104 190

Order code T13P T25P T38P T64P

CF Glass-to-metal connections, quartz


Technical data Flange material Tolerances Bakeout temperature Bakeout rate Seal Construction

stainless steel 304 RA 1 mm, L 3 mm max. 200 C 2 - 3 C/min OFHC copper, vacuum annealed metal-to-quartz transition using intermediate glass layers DN 16 40 40 A 34 70 70 D 13 25 38 L 143 165 165

Order code T13Q T25Q T38Q

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CF Components
CF Liquid Feedthroughs
CF 1-way liquid feedthroughs, stainless steel

for liquid nitrogen

for liquid nitrogen

Order code Liquid LF16PP LF16PS LF40PP LF40PS LF40PPL LF40PSL Liquid nitrogen LNF16PP LNF16PS LNF40PP LNF40PS LNF40PPL LNF40PSL

DN 16 16 40 40 40 40

A 34 34 70 70 70 70

L1 75 103 75 65 75 75

L2 45 45 45 70 65 85

Vacuum side tube 6 mm tube 6 mm tube 6 mm tube 6 mm tube 12 mm tube 12 mm

Atmosphere side tube 6 mm Swagelok 6 mm tube 6 mm Swagelok 6 mm tube 12 mm Swagelok 12 mm

CF 2-way liquid feedthroughs, stainless steel

for liquid nitrogen

for liquid nitrogen

Order code Liquid LF402PP LF402PS LF402SP LF402SS Liquid nitrogen LNF402PP LNF402PS LNF402SP LNF402SS

L1 75 75 103 103

L2 45 73 45 73

L3 45 45 73 73

L4 75 103 75 103

Vacuum side tube 6 mm tube 6 mm Swagelok 6 mm Swagelok 6 mm

Atmosphere side tube 6 mm Swagelok 6 mm tube 6 mm Swagelok 6 mm

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CF Components
CF Copper Gaskets

CF Copper gaskets
Technical data Material Hardness Bakeout temperature Order code CU10 CU16 CU40 CU63 CU100 CU160 CU200 DN 10 16 40 63 100 160 200

OFHC copper approx. 85 Brinell to 450 C D 13.4 21 48 82 120 171 222 D2 8.5 16 39 63 101 152 203 Pack size 10 10 10 10 10 5 5

250 272.7 254 5 SPCU250 For clean room compatible packaging please add "-CRP" to the order code

CF Copper gaskets, annealed


Technical data Material Hardness Bakeout temperature Application

Packing unit Order code CUA16 CUA40 CUA63 CUA100 CUA160 CUA200 DN 16 40 63 100 160 200

OFHC copper approx. 45 Brinell to 450 C feedthroughs, viewports, glass-to-metal connections 5 pieces D 21 48 82 120 171 222 D2 16 39 63 101 152 203

250 272.7 254 SPCUA250 For clean room compatible packaging please add "-CRP" to the order code

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CF Components
CF Copper Gaskets
CF Copper gaskets, silver plated
Technical data Material Hardness Bakeout temperature Packing unit Order code CU16SP CU40SP CU63SP CU100SP CU160SP CU200SP DN 16 40 63 100 160 200

OFHC copper, silver plated approx. 85 Brinell to 450 C 5 pieces D 21 48 82 120 171 222 D2 16 39 63 101 152 203

250 272.7 254 SPCU250SP For clean room compatible packaging please add "-CRP" to the order code

CF Copper gaskets, silver plated, annealed


Technical data Material Hardness Bakeout temperature Packing unit Order code CUA16SP CUA40SP CUA63SP CUA100SP CUA160SP CUA200SP DN 16 40 63 100 160 200

OFHC copper approx. 45 Brinell to 450 C 5 pieces D 21 48 82 120 171 222 D2 16 39 63 101 152 203

250 272.7 254 SPCUA250SP For clean room compatible packaging please add "-CRP" to the order code

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CF Components
CF Copper Gaskets

CF Gaskets, FKM
Technical data Temperature range Application Order code VGF10 VGF16 VGF40 VGF63 VGF100 VGF160 VGF200 DN 10 16 40 63 100 160 200

-10 C to 150 C (intermittent 200 C) multiple use possible D 13.4 21 48 82 120 171 222 D2 7 16 37 63 101 152 202

250 272.7 254 VGF250-BA For clean room compatible packaging please add "-CRP" to the order code

CF Connecting Elements
CF Hexagonal bolt sets, stainless steel
Technical data Bolt Nut Washer Packing unit Order code NBW316 NBW420 NBW635 NBW845 NBW850 NBW860 NBW865

ISO 4014, 4017, A2 ISO 4032, A2 ISO 7089, A2 25 pieces DN 10 16 40 63 100 160 - 200 250 GM M3 M4 M6 M8 M8 M8 M8 L 16 20 35 45 50 60 65

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CF Components
CF Connecting Elements
CF Hexagonal bolt sets for double sided flanges, stainless steel
Technical data Bolt Nut Washer Packing unit Order code NBW435 NBW650 NBW860D NBW870 NBW880 NBW890

ISO 4014, 4017, A2 ISO 4032, A2 ISO 7089, A2 25 pieces DN 16 40 63 100 160 200 GM M4 M6 M8 M8 M8 M8 L 35 50 60 70 80 90

CF Hexagonal bolt sets for tapped flanges, stainless steel


Technical data Bolt Washer Packing unit Order code BW312 BW416 BW625 BW830 BW835 BW845

ISO 4014, 4017, A2 ISO 7089, A2 25 pieces DN 10 16 40 63 100 - 160 200 GM M3 M4 M6 M8 M8 M8 L 12 16 25 30 35 45

CF Allen head bolt sets for tapped flanges, stainless steel


Technical data Bolt Washer Packing unit Order code CW416 CW625 CW830 CW835 CW845

ISO 4762, A2 ISO 7089, A2 25 pieces DN 16 40 63 100 - 160 200 GM M4 M6 M8 M8 M8 L 16 25 30 35 45

Please see our range of vented bolts, nuts und washers for constructions in high and ultra high vacuum in chapter 15.

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CF Components
CF Connecting Elements

CF Plate nuts, stainless steel


Technical data Packing unit Order code PN16 PN40 PN63 PN100 PN160 DN 16 40 63 L 20 41 51

25 pieces L2 13 29 35 25 28 L3 GM 7 11 12 12 12 M4 M6 M8 M8 M8 Gravure M 2.75 114 150 200

100 44 160 44

200 45 30 13 M8 250 PN200 For clean room compatible packaging please add "-CRP" to the order code

CF Horse shoe plate nuts, stainless steel


Technical data Scope of delivery

with screws and washers DN 16 40 63 100 D 34 70 113 151 D2 20 43 65 103 L 6 9 12 12

Order code PN16HS PN40HS PN63HS PN100HS

160 202 154 12 PN160HS For clean room compatible packaging please add "-CRP" to the order code

CF Thread lubricant
Technical data Application

loosening of screws after bakeout Material MoS #Fehler

Order code TL100

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Micro CF Components
Micro CF Flanges
Micro CF Blank flanges, fixed, stainless steel
Technical data Option Order code DN

with tapped holes A D2 L

10 25 3.2 6 F10-316 For clean room compatible packaging please add "-CRP" to the order code

Micro CF Bored flanges, fixed, stainless steel


Technical data Option Order code DN A

with tapped holes D L L2 RA

10 25 9 6 3 10 F10B10-316 For clean room compatible packaging please add "-CRP" to the order code

Micro CF Reducer flanges, stainless steel 316L


Order code ZL1610 DN 16 DN2 10 A 34 D 9 L 10

40 10 70 9 13 ZL4010 For clean room compatible packaging please add "-CRP" to the order code ZL1610: applicable with 6 x M4 hexagon sockets and 6 x M3 hex-head screws

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Micro CF Components
Micro CF Fittings

Micro CF Tubulations (half nipples), fixed, stainless steel


Order code DN A L RA

10 25 30 10 TU10 For clean room compatible packaging please add "-CRP" to the order code

Micro CF Welded Bellows


Micro CF Welded bellows
Technical data Flange material Bellows material Bakeout temperature Order code DN D

stainless steel 316L stainless steel 316L to 450 C D2 Lmax Lmin 57 47 Hub 10

10 20 10 EWB10-10 Other lengths on request

For clean room compatible packaging please add "-CRP" to the order code

Micro CF Gaskets
Micro CF Gaskets
Order code CU10 DN 10 D 13.4 D2 8.5 L 2 Material OFHC

10 13.5 7.5 3 FKM VGF10 For clean room compatible packaging please add "-CRP" to the order code

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Micro CF Components
Micro CF Connecting Elements
Micro CF Bolts, stainless steel
Technical data Packing unit Order code NBW316 NBW635 BW312 CW416 DN 10 40 10 16

25 pieces M M3 M6 M3 M4 L 16 35 12 16 Screw type hexagon hexagon hexagon allen

Micro CF Mechanical Feedthroughs


Micro CF Rotary feedthrough
Smallest UHV compartible rotary feedthrough High torque / size ratio Compact Technical data Construction Housing material Shaft style Brake-away torque Maximum no load spin speed Maximum shaft axial thrust Bakeout temperature Order code DN

one piece stainless steel 316L stub, 3.5 mm, with flattening 0.18 Nm 200 rpm 20 N to 250 C Description

10 MD10-feedthroughs MD10TX000Z Please see other versions in chapter 8 "Mechanical Feedthroughs".

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Micro CF Components
Micro CF Mechanical Feedthroughs

Micro CF Linear translator


High capability Rugged frame construction Smooth and precise motion along the Z axis (1 mm stroke / handwheel revolution) Technical data Actuation Standard stroke Bellows material Life cycle Bakeout temperature Order code LSM10-25H

manual handwheel 25 mm stainless steel 316L 10,000 cycles to 250 C DN #Fehler 10

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Micro CF Components
Micro CF Electrical Feedthroughs
Micro CF Feedthrough, 4 pins
Very compact Stainless steel housing, ceramic insulator, gold-plated Kovar pins Atmosphere side: standard MINI-SNAP connector, strain-relieved Technical data Leak rate Temperature range Current (all contacts loaded) Magnetic Order code

< 1.0E-9 mbar l/s -200 C to 350 C 5.25 A yes DN#Fehler

10 CF10-VB-0B-04 Please see chapter 7 "Electrical Feedthroughs" for further information.

Micro CF SMA feedthrough, grounded shield


Very compact Stainless steel housing, ceramic insulator, gold-plated Kovar pins Atmosphere and vacuum side: standard MINI-SNAP connector, strain-relieved Technical data Leak rate Impedance Temperature range Current Magnetic Order code

< 1.0E-9 mbar l/s 50 ohm -200 C to 350 C 10 A yes DN#Fehler

10 CF10-VB-SMA2 Please see chapter 7 "Electrical Feedthroughs" for further information.

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Quick CF Components
Introduction
Quick CF (QCF) components and the appropriate clamp chains VaCFix are developed by VACOM. The new QCF flanges combine the sealing principle of ConFlat flanges with the simple mounting principle of KF connections. They fully comply with the UHV demands such as a leakrate <1.0E-11 mbar l/s and bakeability to 350 C. Standard CF copper gaskets can be used for all dimensions. QCFcomponents can be assembled quick, easy and space saving. They can be connected to all existing vacuum systems by adapters. VaCFix clamp chaines are compatible with KF and conical ISO flanges. QCF components and clamp chains are available in the following dimensions: DN 16, 40, 63 and 100. Other dimensions on request.

Sealing principle QCF flanges with clamp chain

Exploded drawing assembly parts

XS40

XS100

Application
QCF use the proven OFHC flat seals of ConFlat flanges The VaCFix clamp chains generate a most uniform tightening torque on the flange by using a torque wrench. This fact is very beneficial for stress-sensitive flange components. Copper seals can be used up to three times in case of defined torque increase. Clamp chains up to DN63 can be assembled with one, from DN100 with two bolts. The very short assembly time is a significant advantage in case of frequently opened flange connections. The assembly of clamp chains is much more convenient than of conventional bolt connections especially in case of limited space Components with QCF flange can be assembled such as rotatable flanges in any angle position QCF components are bakeable to 350 C

Materials
Flanges stainless steel 1.4301 stainless steel 1.4404 (on request) stainless steel 1.4429 (on request) Tubes stainless steel 1.4301 stainless steel 1.4404 Clamp Chains non-magnetic stainless steel

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Quick CF Components
Quick CF Flanges

Quick CF Blank flanges, conical, stainless steel


Order code QCF16-304 QCF40-304 QCF63-304 DN 16 40 63 A 30 55 87 134 L 6.5 6.5 7.5 14

100 QCF100-304 Other nominal widths on request

For clean room compatible packaging please add "-CRP" to the order code

Quick CF Bored flanges, conical, stainless steel


Order code QCF16B19-304 QCF40B38-304 QCF40B41-304 QCF63B63-304 QCF63B70-304 QCF100B101-304 DN 16 40 40 63 63 A 30 55 55 87 87 RA 19 38 41 63 70 L 10 10 10 11 11 19 19 L2 8 8 8 10 10 17 17 D 16 35 38 61 63 98 100

100 134 101

100 134 104 QCF100B104-304 Other nominal widths on request

For clean room compatible packaging please add "-CRP" to the order code

Quick CF Flange caps, plastics


Order code QCF16CAP QCF40CAP QCF63CAP QCF100CAP 10 pieces per packing unit DN #Fehler 16 40 63 100

Quick CF Fittings
Quick CF Tube, 1 m length, stainless steel
Technical data DIN Lengthwise welded Outside and inside etched Ra Ra (welding seam area) Order code
Stainless steel 316L Stainless steel 304

11850

< 0.8 m < 1.6 m DN 16 40 63 RI 16 38 66 RA 19 41 70

R316-19x1.5-1 R316-41x1.5-1 R316-70x2.0-1 R316-104x2.0-1

R304-19x1.5-1 R304-41x1.5-1 R304-70x2.0-1 R304-104x2.0-1

100 100 104

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Quick CF Components
Quick CF Fittings
Quick CF Tubulations (half nipples), stainless steel
Order code TU16QCF-304 TU40QCF-304 TU63QCF-304 DN 16 40 63 A 30 55 87 L 38 63 105 RA 19 41 70

100 134 135 104 TU100QCF-304 For clean room compatible packaging please add "-CRP" to the order code

Quick CF Straight connectors (full nipples), stainless steel


Order code SC16QCF-304 SC40QCF-304 SC63QCF-304 DN 16 40 63 A 30 55 87 L 76 126 210

100 134 270 SC100QCF-304 For clean room compatible packaging please add "-CRP" to the order code

Quick CF to CF Adapters, stainless steel


Order code QCFA16-304 QCFA40-304 QCFA63-304 DN 16 40 63 A 30 55 87 A2 34 70 114 L 50 60 90

100 134 152 100 QCFA100-304 For clean room compatible packaging please add "-CRP" to the order code

Quick CF Elbows 90, stainless steel


Order code EL16QCF-304 EL40QCF-304 EL63QCF-304 DN 16 40 63 A 30 55 87 SL 38 63 105

100 134 135 EL100QCF-304 For clean room compatible packaging please add "-CRP" to the order code

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Quick CF Components
Quick CF Fittings

Quick CF Tees, stainless steel


Order code TE16QCF-304 TE40QCF-304 TE63QDF-304 DN 16 40 63 A 30 55 87 L 76 126 210 SL 38 63 105

100 134 270 135 TE100QCF-304 For clean room compatible packaging please add "-CRP" to the order code

Quick CF 4-way crosses, stainless steel


Order code X16QCF-304 X40QCF-304 X63QCF-304 DN 16 40 63 A 30 55 87 L 76 126 210 SL 38 63 105

100 134 270 135 X100QCF-304 For clean room compatible packaging please add "-CRP" to the order code

Quick CF 6-way crosses, stainless steel


Order code XX16QCF-304 XX40QCF-304 XX63QCF-304 DN 16 40 63 A 30 55 87 L 76 126 210 SL 38 63 105

100 134 270 135 XX100QCF-304 For clean room compatible packaging please add "-CRP" to the order code

Quick CF Gaskets
Quick CF Copper gaskets
Technical data Material Hardness Bakeout temperature Packing unit Order code CU16 CU40 CU63

OFHC copper ca. 85 Brinell to 450 C 10 pieces DN 16 40 63 D 21 48 82 D2 16 39 63

100 120 101 CU100 For clean room compatible packaging please add "-CRP" to the order code

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Quick CF Components
Quick CF Gaskets
Quick CF Copper gaskets, vacuum-annealed
Technical data Material Hardness Bakeout temperature Application

Packing unit Order code CUA16 CUA40 CUA63

OFHC copper ca. 45 Brinell to 450 C feedthroughs, viewports, glass-to-metal connections 5 pieces DN 16 40 63 D 21 48 82 D2 16 39 63

100 120 101 CUA100 For clean room compatible packaging please add "-CRP" to the order code

Quick CF Copper gaskets, silver plated


Technical data Material Hardness Bakeout temperature Packing unit Order code CU16SP CU40SP CU63SP

OFHC copper ca. 85 Brinell to 450 C 5 pieces DN 16 40 63 D 21 48 82 D2 16 39 63

100 120 101 CU100SP For clean room compatible packaging please add "-CRP" to the order code

Quick CF Copper gaskets, silver plated, vacuum-annealed


Technical data Material Hardness Bakeout temperature Packing unit Order code CUA16SP CUA40SP CUA63SP

OFHC copper ca. 45 Brinell to 450 C 5 pieces DN 16 40 63 D 21 48 82 D2 16 39 63

100 120 101 CUA100SP For clean room compatible packaging please add "-CRP" to the order code

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Quick CF Components
Quick CF Gaskets

Quick CF Flat gaskets, FKM


Technical data Temperature range Application Order code VGF16 VGF40 VGF63 VGF100

-10 C bis 150 C (intermitted 200 C) multiple use possible DN 16 40 63 100 D 21 48 82 120 D2 16 37 63 101

Quick CF Connecting Elements


Quick CF Clamp chains, stainless steel
Technical data Material Suitable flanges

Suitable seals Assembly Accessories

stainless steel non-magnetic QCF flanges KF flanges conical ISO flanges copper gaskets FKM seals with torque wrench spares (eye screw nut) heating sleeve on request DN 16 40 63 D 21 46 73 D2 53 82 121 R 47 67 89 L 24 24 28 Number of links 3 4 5 SW 13 15 19 Weight (g) 220 430 980 2540

Order code XS16 XS40 XS63

100 117 176 117 41 6 24 XS100 For clean room compatible packaging please add "-CRP" to the order code

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