You may make hard copies o! Ihis mahual !or your orgahisaIioh's ihIerhal use ih cohhecIioh wiIh Ihe sysIem wiIh which iI was supplied, provided IhaI Ihe ihIegriIy o! Ihe mahual is maihIaihed ahd Ihis copyrighI hoIice is reproduced. OIher Ihah as permiIIed above, you may hoI reproduce or IrahsmiI ahy parI o! Ihis documehI, elecIrohically or mechahically wiIhouI Ihe prior wriIIeh permissioh o! Ox!ord IhsIrumehIs NahoSciehce.
Ox!ord IhsIrumehIs' policy is ohe o! cohIihued improvemehI. 1he Compahy reserves Ihe righI Io alIer wiIhouI hoIice Ihe speci!icaIioh, desigh or cohdiIiohs o! supply o! ahy o! iIs producIs or services. AlIhough every e!!orI has beeh made Io ehsure IhaI Ihe ih!ormaIioh ih Ihis mahual is accuraIe ahd up Io daIe, errors may occur. Ox!ord IhsIrumehIs NahoSciehce shall have ho liabiliIy arisihg !rom Ihe use o! or reliahce by ahy parIy oh Ihe cohIehIs o! Ihis mahual ahd, Io Ihe !ullesI exIehI permiIIed by law, excludes all liabiliIy !or loss or damages howsoever caused.
1he Ox!ord IhsIrumehIs Logo is a Irademark o! Ox!ord IhsIrumehIs plc or iIs subsidiaries. 1he use o! our Irademarks is sIricIly cohIrolled ahd mohiIored ahd ahy uhauIhorised use is !orbiddeh.
Oxford lnstruments Nano5cience, 2006. All rights reserved. 4 1 Warnings 1. 8efore you attempt to install or operate this equipment for the first time, please make sure that you are aware of the precautions that you must take to ensure your own safety. 2. High Voltage Hazard. lsolate this equipment by switching off the external AC electrical supply, disconnecting and removing the external supply cable. 3. 7he AC electrical supply is considered to be the disconnect device for the equipment. Access to this must not be restricted at any time. 7he external AC electrical supply cable must remain accessible for disconnection of the equipment. 4. Maintenance: Dnly qualified and authorised persons should carry out servicing and repair work on this equipment. 5. High Voltage Hazard: High voltages are present inside this equipment. lsolate this equipment by switching off the external AC electrical supply, disconnecting and removing the external supply cable before any covers are removed. 6. lf the equipment is used in a manner not specified by the manufacturer, the protection provided by the equipment may be impaired. 7. 7he equipment is not suitable for use with explosive or flammable gases. 7he equipment is not suitable for use in explosive, flammable or hazardous environments. 8. 7he equipment does not provide protection against the ingress of water. 7he equipment should be positioned so that it will not be exposed to water ingress. 5 2 Cautions
CDDLlNG HAZAkD. lnternal components are air-cooled. Ensure the front lower ventilation space is not obstructed.
Explanation of symbols used in the lnstrument
Attention, please refer to the manual
Functional earth
Protective earth 6 3 lntroduction 1he Pump CohIrol 8ox is used Io disIribuIe power Io Iwo or Ihree vacuum pumps ih coh|uhcIioh wiIh Ihe ICH elecIrohics uhiI. 3.1 About this Nanual 1his mahual provides operaIihg ahd service ih!ormaIioh !or Ihe Ox!ord IhsIrumehIs Pump CohIrol 8ox. 3.2 lmportant note 1his mahual is parI o! Ihe producI IhaI you have boughI. Please keep iI !or Ihe whole li!e o! Ihe producI ahd make sure IhaI you ihcorporaIe ahy amehdmehIs which may be sehI Io you. I! you sell or give away Ihe producI Io someohe else please give Ihe mahual Ioo. 8e!ore you aIIempI Io ihsIall or operaIe Ihis equipmehI !or Ihe !irsI Iime, please make sure IhaI you are aware o! Ihe precauIiohs IhaI you musI Iake Io ehsure your owh sa!eIy. 3.3 Disposal and recycling 8e!ore disposihg o! Ihis equipmehI, iI is imporIahI Io check wiIh Ihe appropriaIe local orgahisaIiohs Io obIaih advice oh local rules ahd regulaIiohs abouI disposal ahd recyclihg. You must cohIacI Ox!ord IhsIrumehIs NahoSciehce CusIomer SupporI (givihg !ull producI deIails) be!ore ahy disposal begihs. 7 4 5afety 1he !ollowihg geheral sa!eIy precauIiohs musI be observed durihg Ihe operaIioh, service ahd repair o! Ihis ihsIrumehI. 4.1 Protective Ground 1o mihimise elecIric shock hazard Ihe ihsIrumehI musI be cohhecIed Io ah elecIrical grouhd. 1he grouhd wire (greeh/yellow) ih Ihe ihsIrumehI AC power cable musI be cohhecIed Io Ihe ihsIallaIioh elecIrical grouhd sysIem. Do hoI use exIehsioh cords wiIhouI a proIecIive earIh cohducIor. Do hoI discohhecI Ihe proIecIive grouhd ihside or ouIside Ihe ihsIrumehI. 4.2 Hazardous Voltages on Connectors 1here are hazardous volIages presehI oh Ihe ouIpuI maihs cohhecIors. Lhsure Ihe cohhecIor covers are ih place whehever a cohhecIor has ho cable aIIached Io iI. 4.3 Repairs Service ahd repair Iasks may be carried ouI oh Ihis ihsIrumehI ohly by persohhel auIhorised by Ihe mahu!acIurer. Such persohhel musI observe all sa!eIy precauIiohs. II is essehIial Io isolaIe Ihe pump cohIrol box be!ore commehcihg ahy repair. See Ihe Warhihgs secIioh. 8 5 lnstallation 5.1 lnspection Wheh Ihe equipmehI is uhpacked, check !or ahy delivery damage. I! Ihere is evidehce o! delivery damage cohIacI Ox!ord IhsIrumehIs. 5.2 Classification 1he Pump CohIrol 8ox is Class1 LquipmehI, 1he equipmehI is NO1 suiIable !or use ih Ihe presehce o! a !lammable ahaesIheIic mixIure wiIh air or wiIh oxygeh or hiIrous oxide. 5.3 Irip Currents Io set the trip current of the (NCU) Notor Controller Unit, the front panel of the cabinet needs to be opened. Ihis should only be done with the 3 - phase mains inlet lead disconnected.
All Ihe pump ouIpuI porIs have ah ihdividual MoIor CohIroller UhiI, whose Irip limiI has beeh seI aI Ihe FacIory Io Ihe values giveh ih 1able 1 (!or C81), 1able 2 (!or C82) ahd 1able 3 (!or C83). Ih case a pump is chahged, Ihe Irip currehI o! Ihe MCU heeds Io be seI Io 95% o! Ihe hew moIor Full Load CurrehI by screwdriver ad|usImehI (0.1amp precisioh) aI Ihe !rohI o! each circuiI breaker.
Pump voltage NCB/Notor circuit controller N5116-10A (operates between 6.3-10A) NCB/Notor circuit controller N5116-6.3A (operates between 4-6.3A) NCB/Notor circuit controller N5116-4A (operates between 2.5-4 A) 220 VAC, 3phase Full load currehI raIihg o! pump 9.7 A 1rip currehI seI Io 0.95 x 9.7 = 8.7 A
380 VAC, 3phase Full load currehI raIihg o! pump 5.6 A 1rip currehI seI Io 0.95 x 5.6 = 5.0 A
Iable 1 Irip currents for CB1 (for He3 pump)
9
Pump voltage NCB/Notor circuit controller N5116-10A (operates between 6.3-10 A) NCB/Notor circuit controller N5116-6.3A (operates between 4-6.3 A) NCB/Notor circuit controller N5116-4A (operates between 2.5-4 A) 220 VAC, 3phase Full load currehI raIihg o! pump 6.3 A 1rip currehI seI Io 0.95 x 6.3 = 5.7 A
380 VAC, 3phase Full load currehI raIihg o! pump 3.7 A 1rip currehI seI Io 0.95 x 3.7 = 3.3 A
Iable 2 Irip currents for CB2 (for ROOI5 pump)
Irip currents for CB3 (He4 pump) Pump voltage NCB/Notor circuit controller N5116-10A (operates between 6.3-10 A) NCB/Notor circuit controller N5116-6.3A (operates between 4-6.3 A) NCB/Notor circuit controller N5116-4A (operates between 2.5-4 A) 220 VAC, sihgle phase
Full load currehI raIihg o! pump 4 A 1rip currehI seI Io 0.95 x 4 = 3.8 A Iable 3 Irip current for CB3 (for He4 pump) 10 5.4 Replacing Nains Fuses
Warning High Voltage Hazard: Ensure the equipment is isolated at the external disconnection device before accessing any connection. 1he maihs supply is swiIched ahd !used ih all Ihree phases. 1he !uses are locaIed ihside Ihe deIachable cover. Ih case o! a !use replacemehI, iI musI be replaced wiIh a Iype ahd value speci!ied ih Ihe supply speci!icaIioh sheeI !or IhaI parIicular parI humber o! Pump CohIrol 8ox.
Figure 1 lnside view of Pump Control Box 5.5 Control Port 5.5.1 lGH PORI Power !or Ihe pumps is cohIrolled by Ihe ICH. 1here is a cable, which ihIer!aces Ihe ICH LlecIrohics wiIh Ihe Pump CohIrol 8ox. 11 5.5.2 V5K PORI 1his cohhecIioh is Io mohiIor Ihe pressure di!!erehce beIweeh ihleI ahd ouIleI vacuum porI o! Ihe H3 pump. 1he Irip pressure is hormally seI Io 700 mbar. I! Ihe pressure exceeds Ihe Irip pressure, iI sIops Ihe ouIpuI power !rom Ihe Pump CohIrol 8ox. 5.6 Pump connection Caution: Ensure the He3 pump and the Roots (lf supplied with the system) pumps are connected to the correct connector on the Pump Control Box. 5.6.1 Connecting the cables from Pump Control Box to He3 pump 1he He3 pump is hard wired aI Ihe !acIory !or Ihe volIage seIIihg o! Ihe desIihaIioh couhIry. 1he oIher ehd o! Ihe hard-wired cable musI be cohhecIed Io Ihe Pump CohIrol 8ox ouIpuI porI, which is assighed ahd marked !or Ihe He3 Pump. 5.6.2 Connecting the cables from Pump Control Box to ROOI5 pump 1he ROO1S pump is hard wired aI Ihe !acIory !or Ihe volIage seIIihg o! Ihe desIihaIioh couhIry. 1he oIher ehd o! Ihe hard-wired cable musI be cohhecIed Io Ihe Pump CohIrol 8ox ouIpuI porI, which is assighed ahd marked !or Ihe ROO1S Pump. 5.6.3 Connecting the cables from Pump Control Box to He4 pump 1he He4 pump is a sihgle-phase pump ahd has a deIachable maihs cohhecIioh. 1he cable musI be cohhecIed Io Ihe Pump CohIrol 8ox ouIpuI porI, which is assighed ahd marked !or Ihe He4 Pump. 5.7 5upply Connections 1he Pump CohIrol 8ox is a Ihree-phase uhiI. 1here are !our di!!erehI versiohs o! Pump CohIrol box depehdihg oh Ihe couhIry ahd humber o! pumps Io be driveh - 1o cohhecI Ihe Maihs ihpuI Io Pump cohIrol box ah isolaIed (swiIched) 3 phase 4 - wire cord !or 208 V, 3 PHASL wiIh sockeI cohhecIor CW62016 or equivalehI ahd 5-Wire !or 415V 3 phase supply wiIh SockeI Iype CW 62 020 or equivalehI ahd cable 1YPL SY or beIIer wiIh currehI hahdlihg capaciIy o! 32 Amps should be used.
12 EU 59-ZRZ3352EKlI EU 59-ZRZ3340EKlI U5A/Canada 59-ZRZ3353EKlI U5A/Canada 59-ZRZ3343EKlI lNPUI VOLIAGE 3 phase 380-420 V 5% , 50 Hz 415-460 V 5% , 60 Hz 3 phase 380-420 V 5% , 50 Hz 415-460 V 5% , 60 Hz 3 phase 208 V 5%, 60 Hz
3 phase 208 V 5%, 60 Hz NAX lNPUI POWER 4450 W 3000 W 4400 W 3000 W He3 pump OUIPUI 3 phase 380-420 V 5% , 50 Hz 415-460 V 5% , 60 Hz 2200 W 3 phase 380-420 V 5% , 50 Hz 415-460 V 5% , 60 Hz 2200 W 3 phase 208 V 5%, 60 Hz 2200 W 3 phase 208 V 5%, 60 Hz 2200 W ROOI5 pump OUIPUI 3 phase 380-420 V 5% , 50 Hz 415-460 V 5% , 60 Hz 1500 W NO ROO1S pump O/P POR1 3 phase 208 V 5%, 60 Hz 1500 W NO ROO1S pump O/P POR1
13 EU 59-ZRZ3352EKlI EU 59-ZRZ3340EKlI U5A/Canada 59-ZRZ3353EKlI U5A/Canada 59-ZRZ3343EKlI
He4 pump OUIPUI
Sihgle phase 220 V 5%, 50/60 Hz 550 W Sihgle phase 220 V 5%, 50/60 Hz 550 W Sihgle phase 208 V 5%, 60 Hz 550 W Sihgle phase 208 V 5%, 60 Hz 550 W lNIERNAL FU5E IYPE aM aM Class CC 1ype wiIh re|ecIioh Iype !use holder Class CC 1ype wiIh re|ecIioh Iype !use holder lNIERNAL FU5E RAIlNG F1-F3 1 20AH 500 VAC F4-F6 10.5AH 500 VAC F7-F10 1 1AH500 VAC F1-F3 1 20AH500 VAC F4-F6 1 0.5AH500 VAC F7-F9 1 1AH500 VAC F1-F3 1 32AH 600 VAC F4-F6 1 0.5AH600 VAC F7-F14 1 1AH600 VAC F15-17120AH600 VAC F18-20115AH600 VAC F21-22115AH600 VAC F1-F3 1 32AH600 VAC F4-F6 1 0.5AH600 VAC F7-F12 1 1AH600 VAC F13-15 1 20AH600 VAC F16-17 1 15AH600 VAC Iable 4 Fuse types and ratings 14 5.8 Environment 1he !ollowihg operaIihg ehvirohmehI cohdiIiohs musI be observed, Maximum magheIic !ield 50 Causs AmbiehI IemperaIure 18 Io 30 C AImospheric pressure 700 Io 1060 mbar (10 Io 15 psi) RelaIive humidiIy 30% Io 75% hoh- cohdehsihg
5.9 Handling and storage including transport 1he module may be sIored !or up Io 15 weeks ih a sIorage ehvirohmehI as !ollows, AmbiehI IemperaIure -20 Io 55 C RelaIive humidiIy 30% Io 75% (hoh- cohdehsihg) AImospheric pressure 700 Io 1060 mbar I! sIorage is !or less Ihah 3 days Iheh Ihe !ollowihg ehvirohmehIal resIricIiohs apply, AmbiehI IemperaIure -40 Io 55 C RelaIive humidiIy 30% Io 75% (hoh- cohdehsihg) AImospheric pressure 700 Io 1060 mbar Markihg !or packagihg ahd hahdlihg complies wiIh ihIerhaIiohal sIahdards ISO 780/8S2770.
5.10 Naintenance Preventive maintenance Warning Access within the equipment and removal of connecting cables is restricted to suitably skilled and competent persons. 5ee WARNlNG5 and CAUIlON5. Naintenance interval I! Ihe IhsIrumehI !ails Io operaIe correcIly cohIacI Ihe Ox!ord IhsIrumehIs service deparImehI. 15 5.11 Cleaning External cleaning IhIerval beIweeh cleahihg is as required by appearahce. Warning Ensure that the AC supply to the equipment is isolated at the external disconnect device before cleaning. 5ee WARNlNG5 and CAUIlON5. 1o remove sur!ace dusI ahd lighI markihgs, Ihe equipmehI may be wiped dowh usihg lihI !ree cloIh, barely moisIehed wiIh cleah waIer. For removal o! heavy marks, Ihe use o! a proprieIary aerosol !oamihg cleaher is permissible. 1esI care!ully oh a small ihcohspicuous area Io ehsure IhaI Ihe producI does hoI damage Ihe sur!ace !ihish.
5.12 Connections Warning High Voltage Hazard. Ensure that the AC supply to the equipment is isolated at the external disconnect device before accessing any connection. Check all cables ahd cohhecIiohs Io Ihe equipmehI !or mechahical securiIy ahd ehsure all covers are securely !ixed ih place. 5.13 Nains cord selection Maihs supply cord shall be raIed !or Ihe maximum currehI !or Ihe equipmehI ahd Ihe cable used shall meeI Ihe requiremehIs o! ILC227 or ILC245, maihs cords cerIi!ied or approved by ahy recoghised haIiohal IesI house are regarded as meeIihg Ihis requiremehI. Creeh/Yellow covered cohducIors shall be used ohly !or cohhecIioh Io proIecIive cohducIor Iermihals. 5.14 Nounting instruction 1he equipmehI is desighed Io be placed oh Ihe !loor hear Io Ihe pumps. Lhsure Ihe cables are held ih a sa!e posiIioh ahd do hoI presehI Irip hazard Io persohhel.
16 6 Operation of the lnstrument 6.1 Description of the lnstrument 1he equipmehI mohiIors Ihe phase sequehce ahd volIage level o! Ihe 3 phase ihpuI. I! Ihe maihs ihpuI has a wrohg phase sequehce, or Ihe ihpuI phase Io phase volIage goes dowh 85% o! oIher phase Io phase volIage, iI Irips Ihe 3 phase ouIpuI. 1he equipmehI proIecIs Ihe pumps ih case o! ah overload !rom sIallihg or shorI circuiI. 6.2 Pre- start checks Please ehsure Ihe vacuum pump oil levels are correcI ahd all Ihe pump cohhecIors have beeh correcIly cohhecIed Io Pump cohIrol box.
Figure 2 Front view of Pump Control Box
17 6.3 Pump Iurn on 5equence and Lamp status Check all cables are cohhecIed properly, Iheh swiIch oh Ihe maih 3-phase elecIrical supply Io Ihe equipmehI. I! Ihe ICH is powered Ihe DC ON will Iurh oh. 1he maihs !ail lamp will Iurh oh ahd Ihe over pressure lamp will also Iurh oh. Press Ihe Maihs ON ahd ReseI swiIch Io reseI all Ihe ihIerlocks, should Ihe over pressure lamp sIill cohIihue Io be oh seI Ihe poIehIiomeIer oh Ihe gauge o! He3 pump uhIil iI Iurhs o!!. Now Ihe pumps are ready Io be operaIed by Ihe ICH LlecIrohics. Should ahy o! Ihe Mahual circuiI breaker ( C81 or C82 OR C83) seI Io less Ihah 95% o! !ull load currehI o! pump iI mighI Irip ahd correspohdihg lamp would Iurh oh. 1urh o!! Ihe Pump cohIrol box, discohhecI Ihe maihs ihpuI Io pump cohIrol box, opeh Ihe !rohI pahel ahd check Ihe Irip currehI seIIihg o! Mahual circuiI breaker (C81 or C82 OR C83) ahd seI iI Io 95% o! !ull load currehI o! pump. Close Ihe !rohI pahel, recohhecI Ihe maihs ihpuI, ahd Press Ihe Maihs ON ahd ReseI swiIch 6.4 Pump Iurn Off 5equence Ih order Io mahually Iurh o!! Ihe pumps, !ollow Ihis sequehce usihg Ihe !rohI pahel o! Ihe ICH LlecIrohics UhiI 1. SWI1CH OFF ROO1S pump 2. SWI1CH OFF He3 pump 3. SWI1CH OFF He4 pump
18 7 Oxford lnstruments part numbers for fuses and circuit diagrams
Description Part number Pump CohIrol 8ox Wirihg Diagram - 3 PorI - LU Versioh ZRZ3352 FUSL, 1 1AH 500VAC aM 1YPL, CL APPROVLD 59-LFF2410 FUSL 1 20AH 500VAC aM 1YPL, CL APPROVLD 59-LFF4320 FUSL 10.5AH 500VAC aM 1YPL, CL 59-LFF2405 ILC SOCKL1 RLWIRA8LL 59-LPP6003