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INTRODUCTION
Technical Specifications
Model Make Terminal Voltage Charging Ion sources Ion beams Beam lines Beam energy Beam current 5UDH-2 NEC, USA 5MV Pelletron charging system Two (SNICS and RF) H, He, C, Si, Ni, Cu, & Au Two (-15o and -30o) Up to 25MeV (depends on the charge state of the ion beam) Up to 200nA
Data acquisition system LINUX BASED COMPUTER CONTROLLED SYSTEM Data analysis software RUMP FOR RBS/ERDA SPECTRUM ANALYSIS GUPIX FOR X-RAY SPECTRUM ANALYSIS SIMNRA FOR NUCLEAR REACTION ANALYSIS Detection System Si surface barrier detector Resolution=11KeV Si(Li) detector Resolution=138eV NaI scintillator (-Ray detection) (X-ray detection) (Particle detection)
Materials science Biology Solid State Physics Nano-technology Nuclear Physics Environmental Science Chemistry Archeology Geology
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TECHNIQUES AVAILABLE
Rutherford Backscattering Spectrometry (RBS) Elastic Recoil Detection Analysis (ERDA) Particle Induced X-ray Emission (PIXE) Nuclear Reaction Analysis (NRA) Ion Beam Channeling
Sensitivity: 10-3 at. Fraction for light elements & 10-5 for heavy elements Accuracy: <1% Stoichiometry & 4% thickness Depth resolution 10 nm Elemental composition of complex materials i.e. alloy films, oxides, ceramics, glassy carbon, etc. Low-Z element sensitivity
Sensitivity:0.3% . Accuracy:10% for Hydrogen). Depth resolution 1-10nm. Accessible depth range is 1m.
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Probed depth tens of m. Sensitivity up to 1ppm. Accuracy 10%. Higher signal to background ratio as compared to electron beam induced x-ray spectroscopy. Low velocities at PIXE energies as compared to electron, hence no bremsstrahlung. PIXE is 100 times more sensitive than EDX.
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The yield of reaction products is proportional to the concentration of elements present in the sample. The depth profile is measured by stepping the energy of accelerator to produce reactions with narrow resonances. The absolute concentrations are determined with the help of standard samples. Probed depth is ~m with depth resolution 1-20nm. Accuracy is 10%.
and 14N(p,)15O for 15N & 14N profiling at resonance energies 429 and 898 KeV respectively. 19F(p,)16O at resonances 340, 484, and 872KeV for fluorine profiling. 18O(p,)19F is used for oxygen profiling.
EXAMPLES
RBS of 500 Ti-O-N-C thin film on Si substrate using 2.275 MeV He.
DETECTOR
Channeled yield
The channeling phenomena gives information about the crystal structure of single crystal and thin films. Types of Channeling RBS channeling PIXE channeling NRA channeling
The ratio of the aligned yield to random yield is called the minimum yield, min. Generally the yield is reduced by a factor of 100 from an aligned sample. For a crystal the min of 2-3 % shows high degree of crystallinity.
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EXAMPLES
Channeling and random spectra from a MgO <1 0 0> single crystal S. Thevuthasan et. al NIMA 420, 81 (1999)
Randomand <0 00 1> aligned RBS spectra of GaN:Eras grown sample and samples implanted at 200 and 400 keV S.F. Song, Journal of Crystal Growth 265 (2004) 7882