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3a
Model Definition
The geometry, fabrication, and operation of the device are discussed in Stationary Analysis of a Biased Resonator2D. This model computes the pull-in voltage for the resonator by solving an inverse problem. The y-coordinate of the resonator midpoint is computed using an integration operator (intop1). The inverse problem that COMSOL solves computes the DC voltage that must be applied to the beam in order to move the midpoint to a set y-coordinate, yset. This is achieved by adding a global equation for the DC voltage, VdcSP, applied to the resonator. The equation intop1(y)-yset=0 is solved to determine the value of VdcSP. This means that VdcSP is adjusted until the midpoint of the resonator has a y-coordinate given by the set value, yset. Essentially COMSOL is being asked to find the voltage that will allow the beam to exist in equilibrium (stable or unstable) at a given displacement. Solving the problem in this manner avoids complications with trying to solve a problem with no solution (which is what happens if the voltage is continuously ramped up eventually exceeding the pull-in voltage). The result of the analysis is a displacement versus voltage plot, with a minimum at the pull-in voltage. Note that for a linear spring, the pull-in displacement corresponds to 1/3 of the gap distance. Although the inclusion of geometric nonlinearities in the solid
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mechanics solver means that the pull-in displacement will change slightly from this value, it is usually most efficient to search around this point for the pull-in voltage.
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Figure 1: Voltage required to achieve a set displacement versus the target displacement. The pull-in voltage is the minimum of the plot: 59.6 V.
Figure 2: z-displacement of the resonator at pull-in. The displacement at pull-in is 73 nm. For a linear spring the displacement at pull in would be 66 nm.
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Figure 2 shows the y-displacement of the resonator at the pull-in voltage. The maximum displacement at pull-in is 73 nm. This differs somewhat from the linear spring value of 66 nm, however the spring will be non linear as a result of geometric nonlinearity as the beam deforms.
Reference
1. F.D. Bannon III, J.R. Clark and C.T.-C. Nguyen, High-Q HF Microelectromechanical Filters, IEEE Journal of Solid State Circuits, vol. 35, no. 4, pp. 512526, 2000.
Modeling Instructions
Open the existing stationary study (filename: biased_resonator_2d_basic.mph).
1 From the View menu, choose Model Library. 2 Go to the Model Library window. 3 In the Model Library tree, select MEMS Module>Actuators>biased resonator 2d basic.
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4 Click Open.
Parameters
1 In the Model Builder window, expand the Global Definitions node, then click Parameters. 2 In the Parameters settings window, locate the Parameters section. 3 In the table, enter the following settings:
NAME EXPRESSION DESCRIPTION
yset
100[nm]
Integration 1
1 Right-click Definitions and choose Model Couplings>Integration. 2 In the Integration settings window, locate the Source Selection section. 3 From the Geometric entity level list, choose Point. 4 Select Point 38 only.
Change the drive potential to the value VdcSP - which will be solved for in a global equation.
ELECTROMECHANICS
Electric Potential 3
1 In the Model Builder window, expand the Model 1>Electromechanics node, then click Electric Potential 3. 2 In the Electric Potential settings window, locate the Electric Potential section. 3 In the V0 edit field, type VdcSP.
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Global Equations 1
1 In the Model Builder window, right-click Electromechanics and choose Global>Global Equations. 2 In the Global Equations settings window, locate the Global Equations section. 3 In the table, enter the following settings:
NAME F(U,UT,UTT,T) INITIAL VALUE (U_0) INITIAL VALUE (U_T0)
VdcSP
(intop1(y)-yset)/yset
In the Model Builder window, right-click the root node and choose Add Study.
MODEL WIZARD
1 Go to the Model Wizard window. 2 Find the Studies subsection. In the tree, select Preset Studies>Stationary. 3 Click Finish.
STUDY 2
Step 1: Stationary
1 In the Model Builder window, under Study 2 click Step 1: Stationary. 2 In the Stationary settings window, click to expand the Study Extensions section. 3 Select the Continuation check box. 4 Click Add. 5 In the table, enter the following settings:
CONTINUATION PARAMETER
yset
6 Click Range. 7 Go to the Range dialog box. 8 In the Start edit field, type 120[nm]. 9 In the Stop edit field, type 140[nm]. 10 In the Step edit field, type 2[nm].
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The inverse problem is highly non-linear, so the solver settings need to be adjusted accordingly.
Solver 2
1 In the Model Builder window, right-click Study 2 and choose Show Default Solver. 2 Expand the Solver 2 node. 3 In the Model Builder window, expand the Study 2>Solver Configurations>Solver 2>Stationary Solver 1 node, then click Fully Coupled 1. 4 In the Fully Coupled settings window, click to expand the Method and Termination
section.
5 From the Nonlinear method list, choose Automatic highly nonlinear (Newton). 6 In the Model Builder window, click Study 2. 7 In the Study settings window, locate the Study Settings section. 8 Clear the Generate default plots check box. 9 Right-click Study 2 and choose Rename. 1 0 Go to the Rename Study dialog box and type Pull In in the New name edit field. 1 1 Click OK. 1 2 Right-click Study 2 and choose Compute.
1D Plot Group 4
1 In the Model Builder window, right-click Results and choose 1D Plot Group. 2 In the 1D Plot Group settings window, locate the Data section. 3 From the Data set list, choose Solution 2. 4 Right-click Results>1D Plot Group 4 and choose Global. 5 Right-click Results>1D Plot Group 4>Global 1 and choose Plot. 6 In the Global settings window, locate the y-Axis Data section. 7 In the table, enter the following settings:
EXPRESSION UNIT DESCRIPTION
VdcSP
8 Locate the x-Axis Data section. From the Parameter list, choose Expression.
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9 In the Expression edit field, type yset. 10 In the Model Builder window, right-click 1D Plot Group 4 and choose Rename. 11 Go to the Rename 1D Plot Group dialog box and type Pull In Plot in the New name
edit field.
12 Click OK.
Compare the resulting plot with Figure 1. The pull in voltage is the minimum of the curve: 59.6 V at yset=126 nm. Produce a plot of the y displacement of the structure at pull-in.
Biased Displacement 1
1 In the Model Builder window, under Results right-click Biased Displacement and
choose Duplicate.
2 Right-click Biased Displacement 1 and choose Rename. 3 Go to the Rename 2D Plot Group dialog box and type Pull In Displacement in
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