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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

VISVESVARA A !E"#$%&%'I"A& ($IVERSI!


)nana Sangama* +E&'A(M - ,-../0

!E"#$I"A& SEMI$AR %$ --------------------------------------------------------------------------------------------------

Design of MEMS-Based Wideband Frequency Reconfigurable Microstrip Patch Antenna


-------------------------------------------------------------------------------------------------Sub itted in partial fulfill ent of the !echnical Se inar "th Se ester# E$E %nder the &uidance of DR1 "1R1 + RA REDD 'Asst( Professor# Dept of E ) $* Submitted by PAWAN KUMAR 1BI09EC063

Department of Electronics and communication Engineering

BA+&A,-RE .+S!.!%!E -F !E$/+-,-&0

BA+&A,-RE
K.R. Road, Bangalore 56000

2012-2013
/ E&E"!R%$I"S A$D "%MM($I"A!I%$ E$'I$EERIM'

Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

+A$'A&%RE I$S!I!(!E %2 !E"#$%&%'


'Affiliated to 1is2es2araya !echnological %ni2ersity* 3( R( Road# 1(1( Pura # Bangalore-456667

Department of Electronics and "ommunication Engineering

"ER!I2I"A!E !his is to certify that the se inar report entitled 8 A $ew Design of MEMS-+ased 3ideband 2requency Reconfigurable Microstrip 4atch Antenna 5 presented by 4A3A$ 6(MAR bearing %S+ /+I.-E".78# student of final year is in partial fulfill ent for the course of Bachelor of Engineering in Electronics and $o unication Engineering of the 1is2es2araya !echnological %ni2ersity during the acade ic year 96:9-:;(

E9aluated +y DR1 "1R1 + RAREDD Signature of the #1%1D Asst1 4rofessor

+a e of the student< PAWA+ 3%MAR %ni2ersity Seat +u ber< :B.6=E$65; Date<

46

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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

ACKNOWLEDGEMENT

The satisfaction and euphoria that accompanies the successful completion of any task would be incomplete without the mention of the people who made it possible. I wish to express gratitude to the guide DR. C.R.BYRA REDDY Asst. professor, electronics and communication department, for his valuable suggestions and guidance through the preparation of seminar. I am grateful for his belief on me that I would present the seminar as per expectation and for giving me a free hand in setting schedules and deadlines.

My profound gratitude to H.O.D Dr. PRASAD K. V and Principal Dr. SURESH K.R for providing the necessary infrastructure. I am also thankful to all the teaching and non-teaching staff who has directly or indirectly contributed towards the seminar.

A large amount of material has been obtained from the internet and numerous other incredible sources. I thank all those unseen faces whose contribution to my venture has been invaluable.

I thank my beloved parents for their blessings. It is their prayers that have helped me in preparation for the seminar. Finally I thank god for his blessings on me.

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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

PAWAN KUMAR

CONTENTS

:( ABS!RA$! 9( .+!R-D%$!.-+ ;( A+!E++A $-+F.&%RA!.-+ 7( -PERA!.+& PR.+$.PA, 4( MEMS A$!%A!-R $-+F.&%RA!.-+ A+D DES.&+
5( FABR.$A!.-+ PR-$ESS >( S.M%,A!.-+ RES%,!S

4 5 > " :9
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9: 94 95

"( $-+$,%S.-+ =( REFRE+$ES

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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

Design of MEMS-Based Wideband Frequency Reconfigurable Microstrip Patch Antenna


Abstract
A ne? icro achined ?ideband frequency reconfigurable icrostrip patch antenna is de onstrated in this paper( !he tunable antenna syste is fabricated by a co bination of surface and bul@ icro achining processes( !her al actuation is e ployed to precisely adAust the operating frequency ?ith 2oltage ranges co patible ?ith todayBs $M-S circuitries( A bul@ icro achined silicon e brane containing ther al actuators ser2es as a platfor for antenna patch( !he patch is eCcited by a 46D feed line through proCi ity coupling( !he out-of-plane otion of the ther al actuators nor al to the antenna surface deflects the patch do?n?ard respect to the fiCed ground plane( !his deflection reduces the air gap height bet?een the antenna patch and feed line and consequently# resonant frequency of the antenna( !he effect of initial air gap height on achie2able tuning range and band?idth of the antenna is also in2estigated and the opti u range is presented( !he up-state operating frequency of the antenna is 99(5:&/E ?hich continuously can be lo?ered to 99(:>&/E( A tuning range of 776M/E ?as achie2ed by a $M-S co patible actuation 2oltage of :(41( !he band?idth of the antenna for up and do?n-state positions are :(;7 and :(9>&/E respecti2ely( !he RF perfor ance of the antenna and its echanical beha2ior is in2estigated by FEM analysis and satisfactory results are obtained ?ithin the tuning range(

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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

Introduction
-ne of the ost desirable features of s art antennas in high-perfor ance ?ireless co unication syste s is the ability of precisely adAusting the operating frequency# ?hile retaining the sa e radiation pattern ?ithin the tuning range( Such antennas ha2e i pro2ed the fleCibility and perfor ance of cordless co unication syste s by eli inating the need for 2arious antenna syste s operating at different frequencies in applications li@e as reconfigurable sensor net?or@s and s art trac@ing syste s( Microelectro echanical syste s 'MEMS* technology is an e erging technology that has re2olutioniEed the i ple entation of RF co ponents ?ith reduced feature siEe and enhanced perfor ance( Recently de onstrated frequency reconfigurable icrostrip patch antennas e ploying MEMS technology are lo?-po?er# lo? cost and lo? siEe antennas that ha2e sho?n eCcellent functionality ?ithin the tuning range( !his technology has also enabled the integration of antenna syste ?ith RF analog functions into a co pact odule( /o?e2er# one of the challenging issues associated ?ith these iniaturiEed antennas is the dependency of resonant frequency on fabrication process tolerances ?hich leads to a de2iation in operating frequency( !his undesirable effect can be suppressed by the tuning capability of these s art antennas( .n this ?ay# the operating frequency of the antenna can be precisely adAusted on the desired 2alue by eans of so e MEMS-based actuation echanis s( So e ethods ha2e been proposed in literature for frequency reconfigurable icrostrip patch antenna design( .n a $PW stub ?hich MEMS bridge type capacitors are placed periodically is attached to one of the radiating slots of the icrostrip patch antenna( By application of a bias 2oltage bet?een MEMS capacitors and $PW stub the capacitance loading and hence the resonant frequency of the antenna can be tuned( A tuning range of ;66 M/E by an actuation 2oltage range of 6-::(=1 ?as achie2ed( Authors proposed a circular icrostrip patch antenna ?hich operating frequency ?as tuned through adAusting the air gap height under the suspended patch by applying an electrostatic force bet?een the patch and fiCed ground plane( By this ?ay ?ith an actuation 2oltage of :54 1 a tuning range of 9>6 M/E ?as achie2ed(

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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

!his paper presents a no2el ?ideband MEMS-based frequency reconfigurable icrostrip patch antenna( !her al actuators are choose as dri2ing echanis in order to operate at 2oltage le2els co patible ?ith $M-S circuitries( !he upstate operating frequency of the antenna is 99(5:&/E( A tuning range of 776M/E ?as achie2ed by an actuation 2oltage of :(41( !he band?idth of the antenna in up and do?n-state ';F do?n?ard deflection of patch* positions are :(;7 and :(9>&/E# respecti2ely(

Antenna "onfiguration
A sche atic 2ie? of the proposed icro achined antenna is sho?n in figure :'a*( .t consists of t?o seg entsG a icro achined silicon chip 'upper seg ent* and a 466-F thic@ RF- odule 'lo?er seg ent*( For fabrication of upper seg ent ?hich includes ther al actuators# eandered springs and 7-F thic@ suspended silicon e brane a process co bination of surface and bul@ icro achining is used( !he hot-ar s of the ther al actuators are for ed by surface icro achining o2er the silicon chip# ?hile the suspended silicon e brane# eandered springs and cold-ar s are fabricated by bul@ icro achining( !he di ension of the suspended silicon e brane 'HrI::(=* is 7J7 9 and ser2es as a platfor for a ;J; 9 thin golden patch( !he lo?er seg ent incorporates the proCi ity feed syste ( Mounting the silicon chip o2er the RF- odule introduces an air gap of ::7F bet?een antenna patch and feed line(

Figure :'a* Schematic view of the proposed micromachined antenna.


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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

Figure :'b* Conceptional operating principal of the antenna.

%perating 4rinciple
!he dielectric aterial type and its thic@ness ha2e a significant effect on resonant frequency of the icrostrip patch antennas( .n literature# any ethods ha2e been proposed for reconfigurable icrostrip patch antenna design( A ong these# the effecti2e ethod is the idea of introducing an adAustable air gap bet?een the antennaBs patch and ground plane( .n this ?ay# by controlling the height of the air gap# the effecti2e dielectric constant and consequently# operating frequency of the antenna can be tuned( Another beneficial outco e of this ethod is that the air gap enhances the band?idth of the antenna( For the proposed icrostrip patch antenna syste # the dielectric layer is co posed of epitaCial silicon 'silicon e brane*# air gap ca2ity and RFodule( !he air gap ca2ity gi2es the antenna frequency tuning capability and increases the band?idth( A conceptional operating principal of the antenna is sho?n in figure :'b*( As the picture suggests# do?n?ard deflection of the suspended silicon e brane by ther al actuators reduces the air gap height and hence changes the effecti2e dielectric constant of the antenna( Any 2ariation in the effecti2e dielectric constant influences the operating frequency and band?idth of the antenna(
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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

Figure 9 sho?s the resonant frequency shift of the antenna 2ersus the air gap height 2ariations( As the figure indicates# ?ith decreasing the air gap# resonant frequency of the antenna decreases( !o in2estigate the effect of initial air gap height and its 2ariations on the achie2able tuning range a finite ele ent analysis is done( First# ?e designed an antenna ?ith initial air gap of 466F operating at 9=(=5&/E( Decreasing the air gap height reduces the resonant frequency and degrades the return loss of the antenna( /ere the aCi u reduction of the air gap height for a return loss better than :6dB is ;46F ?hich yields a frequency shift of 4(55&/E( !?o other antennas ?ere designed ?ith initial air gaps of 9"6 and :96F operating at frequencies of 95(55 and 9;(::&/E# respecti2ely( Si ulation results are su ariEed in table .( !his table re2eals that the 9;(:: &/E antenna ?ith initial air gap of :96F pro2ides larger frequency shift as a function of do?n?ard deflection of the patch(

!A+&E I SIMULATION R SULTS O! T" ANT NNAS #IT" $I!! R NT INITIAL AIR %A&S.

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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

Figure 9 Resonant fre' shift of the antenna vers(s the air gap height variations

Figure ;( Resonant fre'(enc) shift of the *+.,, %"- antenna .) decreasing the
air gap height.

Figure ; depicts the resonant frequency shift of the 9;(:: &/E antenna by decreasing the air gap height(

/.

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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

2igure ;1

ffect of the initial air gap height on .andwidth of the antenna

Another si ulation is carried out to in2estigate the effect of initial air gap on band?idth of the antenna( Figure 7 presents the si ulation result( As the figure suggests for air gap heights around :96F # the antenna band?idth is about 4(>7K( By further decreasing the air gap height# the band?idth of the antenna decreases al ost onotonically( Based on afore entioned si ulation results# the initial air gap of the proposed antenna syste is decided to be around :96F ( the 2alue of achie2able tuning range is dependent on the do?n?ard deflection produced by ther al actuators ?hich are discussed in the neCt section( As the do?n?ard deflection of ther al actuators increases# the tuning range of the antenna increases too(

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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

MEMS A"!(A!%R "%$2I'(RA!I%$ A$D DESI'$


A. lectro/thermal act(ator config(ration
An air gap height# a large actuation 2oltage is required hence electro-ther al actuation is used instead of electrostatic actuation as a dri2ing echanis ( Electro-ther al icroactuators ha2e the ad2antage of achie2ing higher deflections ?ith considerable force by actuation 2oltage ranges co patible ?ith todayBs $M-S circuitries and can be fabricated by .$-co patible fabrication techniques( .n our study a horiEontal %-shape electro-ther al actuator that can achie2e 2ertical otion is presented( !he sche atic 2ie? of the proposed ther al actuator is sho?n in figure 4( .t consists of t?o layers separated by an air gap bet?een the G the upper layer# ?hich actuation 2oltage is applied# is called hot ar and is fabricated by surface icro achining of a polysilicon layer o2er the epitaCial silicon( !he lo?er layer is called cold ar and is for ed by bul@ icro achining of epitaCial layer of silicon( !hese t?o layers are connected to each other on the tip of the icroactuator by a shuttle through a 2ery thin layer of silicon nitride ?hich ser2es as an electrical isolator( By applying an actuation 2oltage# t?o hot-ar s elongate and deflect the tip of the actuator do?n?ard( !he di ensions and aterial properties of the ther al actuator are gi2en in tables .. and ...# respecti2ely(

!AB,E ..< $IM NSIONS O! T" RMAL ACTUATOR

!AB,E ...< MAT RIAL &RO& RTI S O! T" T" RMAL ACTUATOR
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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

Po?er dissipation and ther al distribution are of ost challenging issues associated ?ith electro-ther al icroactuator design( Fro the proposed antenna standpoint# as the do?n?ard deflection produced by ther al actuator increases# the tuning range of the antenna increases too(

2igure ,1 The schematic view of the proposed thermal act(ator

Figure 5 sho?s the frequency shift of the antenna respect to air gap height 2ariations( As sho?n on the figure a tuning range of 776M/E can be achie2ed by a do?n?ard deflection of ;F fro ::7F up-state position(

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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

2igure 71 !re'(enc) shift of the proposed antenna respect to air gap height variations

2igure <1 0ertical downward deflection c(rve of the thermal act(ator respect to applied voltages

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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

Figures > and " sho? the 2ertical do?n?ard deflection and po?er dissipation cur2es of the ther al actuator respect to applied 2oltages# respecti2ely( As indicated on the figures# the respecti2e actuation 2oltage and po?er dissipation of the ther al actuator for a ;F deflection are :(41 and 9 W(

2igure 01 &ower dissipation c(rve of the thermal act(ator respect to applied voltages

!her al distribution o2er the actuator for a :(41 applied actuation 2oltage is illustrated in figure =(

/,

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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

2igure -1 Thermal distri.(tion over the act(ator for a ,.10 applied act(ation voltage

2. Mechanical sta.ilit) considerations


Any suspended structure# is subAect to un?anted echanical noises such as 2ibrations and shoc@s( !o ha2e a echanically stable syste # the designer needs to shift the echanical natural frequencies of the suspended structure to a higher range respect to frequency range of echanical noises( .n this design the suspended silicon e brane is echanically fiCed through a nu ber of suspension syste s ?hich are a co bination of ther al actuators and eandered springs( !he echanical functionality and po?er dissipation of the antenna structure is ainly dependent on the nu ber of suspension syste s connected to the silicon e brane( !o in2estigate the echanical resonant odes of the structure# a finite ele ent analysis is done for 7# 5 and " nu bers of suspension syste s connected to the silicon e brane( Si ulation results are su ariEed in table .1(
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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

!A+&E IV= nat(ral fre'(encies of antenna str(ct(re for $ifferent n(m.ers of s(spension s)stems connected to the silicon Mem.rane

!able .1 i plies that increasing the nu ber of connected suspension syste s# enhances the echanical robustness of the structure( /o?e2er# the po?er dissipation increases( /ence for a high echanically stable antenna structure# the nu ber of suspension syste s is choose by considering echanical 2ibration and noise frequency range and po?er dissipation constraints of the obile syste s e ploying the antenna(

2A+RI"A!I%$ 4R%"ESS
Fabrication process of the proposed antenna structure is $M-S co patible in all of the fabrication steps( Figure :6 presents the fabrication process flo?( !he process begins ?ith a che ical-physical polishing of a silicon substrate to a height of :96F ( A 6(>4-F -thic@ silicon-oCide layer is gro?n by ther al oCidation and for ed as sacrificial layer 'a*(

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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

For electrically isolating bet?een hot and cold ar s# a 966-n thic@ layer of silicon-nitride is coated by PE$1D process and structured 'b*(

For for ation of hot-ar s and shuttle a 9-F deposited and structured by R.E process 'c*(

thic@ polysilicon layer is

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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

!he hot-ar s are released by etching the sacrificial layer in a gas phase /F 'd*(

!o for ation of the patch# a :46n process 'e*(

gold layer is deposited through lift-off

/-

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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

A bul@ etching on the bac@ side of the silicon substrate is perfor ed by 3-/ solution to for a 7-F -thic@ silicon e brane 'f*(

Finally# by the aid of a 2ery thic@ photo resist layer# the R.E is perfor ed to for the cold ar s# eandered springs and floating silicon e brane 'g*

Anchor

deposited patch

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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

SIM(&A!I%$ RES(&!S
Return loss of the proposed antenna is plotted in figure :: for 2arious applied 2oltages(

2igure //. Ret(rn loss of the antenna for vario(s applied voltages

.t is ob2ious fro the figure that the resonant frequency shifts do?n?ard ?ith increasing the bias 2oltage( At 61# antenna is in up-state position and resonates at 99(5:&/E( As the bias 2oltage increases# the antenna pro2ides a do?n?ard frequency shift# at :(41 the suspended patch antenna deflects do?n?ard about ;F and resonates at 99(:>&/E( A tuning range of about 776M/E is achie2ed by an actuation 2oltage range of 6-:(41( !he antenna de onstrates a ?ide band?idth of :(;7&/E in up-state and :(9>&/E in do?n-state ';F do?n?ard deflection of the patch* positions( !he radiation pattern for total gain at E and / planes for different resonant frequencies is illustrated in figure :9(

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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

E-plane 2igure /:1 Radiation pattern for total gain at

/-plane and "/planes3 4a5 Up/state

::

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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

E-plane 2igure /:1 Radiation pattern for total gain at

/-plane and "/planes3 4.5 *6m deflection

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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

E-plane 2igure /:1 Radiation pattern for total gain at

/-plane and "/planes3 4c5 +6m deflection

As the figure suggests# the antenna pro2ides stable radiation characteristic ?ithin the tuning range(

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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

"%$"&(SI%$
An electro-ther ally dri2en ?ideband frequency reconfigurable icrostrip patch antenna fabricated by icro achining techniques has been proposed in this paper ?hich has a stable radiation pattern ?ithin the tuning range( !her al actuators are choose as dri2ing echanis in order to operate at 2oltage le2els co patible ?ith $M-S circuitries( !he RF perfor ance and echanical functionality of the antenna is in2estigated by FEM si ulations and satisfactory results are obtained( !he upstate operating frequency of the antenna is 99(5:&/E ?hich continuously can be lo?ered to 99(:>&/E( A tuning range of 776M/E is achie2ed by an actuation 2oltage range of 6-:(41( !he tuning range of the proposed antenna can also be increased by further do?n?ard deflection of the patch by ther al actuators( Si ulation results sho? that the band?idth of the antenna in up-state position is about :(;7 &/E and :(9>&/E in do?n-state ';F deflection fro up-state* position( !he MEMS-based ?ideband frequency reconfigurable antenna of this study can be a pro ising choice for realiEation of lo?-cost# light-?eight and MM.$ co patible antenna syste s(

:,

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Design of MEMS-based wideband frequency reconfigurable microstrip patch antenna

RE2ERE$"ES
L:M E re Erdil# 3( !(# Meh et %nlu# -Ele Aydin $i2i# and !ayfun A@in# NFrequency !unable Microstrip Patch Antenna %sing RF MEMS !echnology(N IEEE transactions on antennas and propagation 44'7*< ::=;-::=5# April 966>( L9M Ra adoss# R( O( O( a( R(# NA MEMS-based electrostatically tunable circular icrostrip patch antennaN J. Micromech. Microeng( :>< :-"# 966>( L;M Balanis# $( A(# Antenna theory: analysis and design( +e? 0or@< Wiley# :==># p(>99->>4( L7M O(S( Dahele# Sen( Me # and 3(F( ,ee# N!heory and eCperi ent on icrostrip antennas ?ith air gapsN 1EE PROCEEDIN !" #ol. 1$%" Pt. &" No. '" Decem(er 1)*+. L4M $aglar Elbu@en# +eEih !opaloglu# Patricia M( +ie2a## Mustafa 0a2uE# Oan P( /uissoon# NModeling and analysis of a 9-D-F bidirectional electro-ther al icroactuator#N Microsyst ,echnol<>:;->99# :5 Oanuary 966=( L5M D( 0an# NMechanical Design and Modeling of MEMS !her al Actuators for RF Applications#N Master of Applied Science# Waterloo# Waterloo# 9669( L>M !ai-Ran /su" MEM! and Microsystem: design" man-.act-re and nanoscale engineering second ed( 2ol( :( +e? Oersey< Oohn Wiley ) Sons# .nc(# 966"# pp( 974-9"7( L"M Oorge 1arona# Margarita !ecpoyotl-!orres# Oesus Escobedo-Alatorre# Anas A( /a oui# NDesign and Fabrication of a MEMS !her al Actuator for ;D -ptical S?itching Applications#N IEEE/0EO! !-mmer ,opical Meetings< ;:-;9# Ouly 966"( L=M 1iAay 3( 1aradan# 3( O( 1(# and 3(A( Oose# R1 MEM! and their applications# Wiley# 9669# pp( :-:64#;77-;57(

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