IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 59, NO.

2, FEBRUARY 2012 277

The Impact of Fringing Field on the Device
Performance of a p-Channel Tunnel Field-Effect
Transistor With a High- Gate Dielectric
Abhijit Mallik, Senior Member, IEEE, and Avik Chattopadhyay
AbstractDetailed investigation, with the help of extensive de-
vice simulations, of the effects of varying the dielectric constant
of the gate dielectric on the device performance of a p-channel
tunnel eld-effect transistor (p-TFET) is reported for the rst time
in this paper. It is observed that the fringing eld arising out
of a high- gate dielectric degrades the device performance of a
p-TFET, which is in contrast with its n-channel counterpart of
a similar structure, where the same has been reported to yield
better performance. The impact of the fringing eld is found to
be larger for a p-TFET with higher source doping. It is also found
that the qualitative nature of the impact of the fringing eld does
not change with dimension scaling. On the other hand, the higher
electric eld due to increased oxide capacitance is found to be
benecial for a p-TFET when a high- gate dielectric is used in
it, as expected. It is also found that a low- spacer is benecial
for a p-TFET, similar to that reported for an n-TFET of similar
structure.
Index TermsBand-to-band tunneling (BTBT), fringe-induced
barrier lowering (FIBL), fringing eld, high- and low- di-
electrics, tunnel eld-effect transistor (TFET).
I. INTRODUCTION
P
OWER management has become the most crucial
issue in further scaling of complementary metal
oxidesemiconductor (MOS) technology. Due to dimension
scaling, severe short-channel effects, such as drain-induced
barrier lowering, result in substantial increase in leakage cur-
rent. Moreover, the fundamental physical limit of (kT/q). ln10
(60 mV/dec at room temperature) on subthreshold swing
S of a conventional MOS eld-effect transistor (MOSFET)
poses a major roadblock in further scaling of its power supply
voltage.
In the search for an alternative device with low S, which is
essential to maintain a high ON-state current I
ON
with an ac-
ceptable OFF-state leakage current I
OFF
, for further extending
the Moores law, a tunnel eld-effect transistor (TFET) shows
great promise [1][8]. The device exploits a band-to-band
Manuscript received September 7, 2011; revised October 14, 2011; accepted
October 21, 2011. Date of publication November 16, 2011; date of current ver-
sion January 25, 2012. This work was supported by the Department of Science
and Technology, Government of India, under Grant SR/S3/EECE/0021/2009.
The review of this paper was arranged by Editor R. Huang.
The authors are with the Department of Electronic Science, University of
Calcutta, Kolkata 700 009, India (e-mail: abhijit_mallik1965@yahoo.co.in;
avikjoy@yahoo.com).
Color versions of one or more of the gures in this paper are available online
at http://ieeexplore.ieee.org.
Digital Object Identier 10.1109/TED.2011.2173937
tunneling (BTBT) mechanism to overcome the subthreshold
swing limitation of a conventional MOSFET. Both the theoreti-
cal and experimental results showthat S can be much lower than
60 mV/dec for a TFET [6], [7]. Although the early reported
TFETs suffered from low values of I
ON
, the same has been
reported to dramatically improve by use of a SiGe [9], [10]
or Ge [11] in the source region, double-gate (DG) architecture
[10], [12], a thin silicon body [13], etc.
It is well known that the fringing eld arising out of a high-
dielectric causes fringing-induced barrier lowering (FIBL) [14].
Such FIBL has been reported to improve the device perfor-
mance of an n-channel TFET (n-TFET) [15]. However, when
used as a spacer for an n-TFET, the same deteriorates the
device performance [15][17]. Very little is, however, reported
in the literature on the impact of either a high- gate dielectric
or a spacer on the device performance of a p-channel TFET
(p-TFET). In this paper, we report a comprehensive investiga-
tion on the impact of varying the dielectric constant of both
the gate dielectric and the spacer on the device performance
of a p-TFET. Moreover, we report the effects of varying the
source doping concentration on the gate dielectric dependence
of the device characteristics for a p-TFET. Furthermore, the
impact of scaling on the gate dielectric dependence of the
device characteristics is also investigated.
II. DEVICE STRUCTURES AND SIMULATIONS
Two-dimensional device simulations are done for the DG
silicon p-TFET structure, as shown in Fig. 1, using the Version
5.11.24.C Silvaco ATLAS device simulator. Unless otherwise
mentioned, the device dimensions, as shown in Fig. 1, are used
for our simulations. Gate leakage is neglected in our simula-
tions. The source and drain contacts are made of aluminum,
and the gate contact is made of a metal for which the work
function is 5.41 eV. Unless otherwise mentioned, the source
and the drain are made of highly doped (1 10
20
atom/cm
3
)
n- and p-type regions, respectively. Gaussian doping prole
with a doping gradient of 2 nm/dec is used for both the source
and the drain. The intermediate channel region is made of a
moderately doped (1 10
17
atom/cm
3
) p-type layer. The simu-
lated doping prole and the location of the metallurgical source-
channel junction are shown in Fig. 2. The results presented here
are obtained by using a nonlocal BTBT model combined with
a band-gap-narrowing model and a quantum density-gradient
model.
0018-9383/$26.00 2011 IEEE
278 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 59, NO. 2, FEBRUARY 2012
Fig. 1. Device structure for a DG p-TFET.
Fig. 2. Simulated doping prole and location of the metallurgical junction for
the device, as shown in Fig. 1.
III. RESULTS AND DISCUSSIONS
A. Effects of Variation in the Gate Dielectric Constant
The purpose of using a high- gate dielectric in CMOS tech-
nology is to achieve lower equivalent oxide thickness (EOT)
without enhancing the gate leakage. This is achieved by increas-
ing the value of the gate dielectric while keeping its physical
thickness constant. In doing so, a high- dielectric induces a
higher electrical eld at the surface due to the increased oxide
capacitance. The impact of such higher electric eld at the
surface is investigated by keeping the physical thickness of the
gate dielectric constant, as done in [12] and [16] for an n-TFET.
On the other hand, the fringing eld arising out of a high- gate
dielectric causes FIBL [14]. Although such FIBL is known to
degrade the performance of a conventional MOSFET [14], [18],
it actually helps improve the performance of an n-TFET [15].
The impact of such fringing eld arising out of a high- gate
dielectric in a p-TFET is studied by keeping the EOT of the
gate dielectric constant, as done in [15] for an n-TFET.
1) Impact of Fringing Field (Constant EOT): We rst inves-
tigate the impact of the fringing eld arising out of a high- gate
dielectric by keeping the EOT of the gate dielectric constant.
The effects of varying the value of the gate dielectric on the
transfer characteristics at drain-to-source voltage V
DS
= 1 V
of the p-TFET, as shown in Fig. 1, with a drawn gate length
L = 50 nm and EOT = 2 nm, are shown in Fig. 3(a). No spacer
is used in this case. The values of the gate dielectric used are
3.9, 7.5, 21, 50, 100, and 200. It may be noted that, although a
Fig. 3. Impact of varying the value of the gate dielectric for the device in
Fig. 1 with L = 50 nm and EOT = 2 nm but without a spacer. (a) Transfer
characteristics at V
DS
= 1 V. (b) Variation of V
T
and I
ON
with the value.
symmetric device structure is used for the simulations, only the
p-type branch is shown in Fig. 3(a) for simplicity. The values
of threshold voltage V
T
and I
ON
for different values of the
gate dielectric are extracted from the transfer characteristics in
Fig. 3(a) and are plotted in Fig. 3(b) as a function of the
value. In this paper, the constant current (10
7
A/m) method
is used for extracting V
T
, and I
ON
is assumed to be the value
of drain current I
D
corresponding to a gate-to-source voltage
V
GS
swing of 1 V from the point where the current changes
from p-i-n leakage to tunneling. It is observed in Fig. 3 that
an increase in the value, except from = 100 to 200, results
in corresponding degradation of device performance in terms
of both V
T
and I
ON
. An improvement in both V
T
and I
ON
is
observed for = 200, compared with that for = 100. This is
in contrast with that reported for an n-TFET, where an increase
in the value of the gate dielectric results in improvement
of the device performance [15], except when is relatively
low. When is increased from 3.9 to 21, a deterioration and
improvement in I
D
have been reported in [15] for relatively
low and high values of V
GS
, respectively. We have also veried
that the qualitative results presented in this paper for I
ON
do not
change when the same is extracted at a constant gate overdrive
voltage V
GT
= V
GS
V
T
.
The simulated electron energy band diagram for the p-TFET
biased at V
GS
= V
DS
= 1 V at a distance of 1 nm below
the top oxidesemiconductor interface is shown in Fig. 4 for
MALLIK AND CHATTOPADHYAY: IMPACT OF FRINGING FIELD ON PERFORMANCE OF p-TFET 279
Fig. 4. Simulated energy band diagram near the tunneling junction at a depth
of 1 nm from the oxidesemiconductor interface as a function of the value of
the gate dielectric at V
GS
= V
DS
= 1 V.
different values of the gate dielectric. The band diagram
is shown only around the tunneling junction. In a p-TFET,
the BTBT of holes occurs from the source to the channel,
resulting in the drain current. This is equivalent to the BTBT
of electrons from the valance band of the channel, which is
henceforth referred to as the tunnel source, into the conduction
band of the source, which is henceforth referred to as the tunnel
destination. The potential barrier formed by the band gap of
the semiconductor across which the tunneling takes place is
henceforth referred to as the tunneling junction. The fringing
eld arising out of a high- dielectric causes fringe-induced
barrier lowering for an n-channel device [14]. In contrast, it is
observed in Fig. 4 that the bands are pushed up in energy when
the value of the gate dielectric is increased in the case of a
p-TFET, which is simply due to the use of opposite polarity
(negative) of the gate bias in such devices. The fringing eld
in the device is shown in Fig. 5 for two different values
of the gate dielectric, corresponding to SiO
2
and HfO
2
. It is
observed in Fig. 5 that the fringing eld in the source near the
gate edge is larger for a device with a high- gate dielectric,
compared with that with a low- dielectric. As a result, as
evident in Fig. 4, the impact of the fringing eld is found to
be larger near the gate edge than the rest of the device. It is also
evident in Fig. 4 that, when the value is increased from 3.9
to 100, the amount by which the energy bands are pushed up,
which is henceforth referred to as the impact of fringing eld,
becomes larger for the tunnel destination than that for the tunnel
source. This results in a larger value of the minimum tunnel
width and a correspondingly smaller value of the maximum
electric eld across the tunneling junction, when the value
of the gate dielectric is increased from 3.9 to 100, as can be
veried in Fig. 6. This, in turn, causes degradation of the device
performance for increasing the value of the gate dielectric up
to = 100, as observed in Fig. 3. It is also noticed in Fig. 4
that an increase in the value results in a corresponding shift
in the location of the tunneling junction toward the source. Due
to a signicant shift in the location of the tunneling junction
when the value is increased from 100 to 200, the impact
of the fringing eld, which is always maximum at the gate
edge, becomes larger on the tunnel source than that on the
tunnel destination. As a result, an improvement in the device
Fig. 5. Fringing eld plot for the p-TFET biased at V
GS
= V
DS
= 1 V
for two different values of the gate dielectric of EOT = 2 nm. (a) = 3.9.
(b) = 21.
Fig. 6. Minimum tunnel width and maximum electric eld across the tunnel-
ing junction for the p-TFET biased at V
GS
= V
DS
= 1 V for different
values of the gate dielectric of the same EOT.
performance is observed in Fig. 3 when the value is increased
from 100 to 200.
2) Impact of Varying the Source Doping: We now see the
impact of varying the source doping concentration on the gate-
dielectric dependence of the device performance. The device
structure, as shown in Fig. 1, with L = 50 nm and EOT = 2 nm
but without a spacer, as in the previous case, is simulated for
two different values of the source doping concentration as 3
10
20
and 5 10
19
atoms/cm
3
. For each of the source doping
concentrations, the transfer characteristic is plotted in Fig. 7 for
280 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 59, NO. 2, FEBRUARY 2012
Fig. 7. Transfer characteristics at V
DS
= 1 V showing the impact of
varying the source doping concentration on the gate-dielectric dependence of
p-TFET characteristics. No spacer is used in this case. The EOT of the gate
dielectric is kept constant at 2 nm.
Fig. 8. Impact of varying the source doping concentration on the simulated
energy band diagram near the tunneling junction of the p-TFETs with different
gate dielectrics biased at V
GS
= V
DS
= 1 V.
two different values of the gate dielectric, corresponding to
SiO
2
and HfO
2
. The corresponding energy band diagrams at
V
GS
= V
DS
= 1 V are shown in Fig. 8. For a given value
of , it is observed in Fig. 7 that an increase in the source
doping concentration results in corresponding improvement in
the device performance, as expected. This is simply due to the
fact that a relatively higher source doping not only causes more
band lowering of the tunnel destination but it also reduces the
source depletion and, hence, less depletion width, as evident
in Fig. 8. As a result, the minimum value of the tunnel width
is reduced, and the maximum electric eld is increased across
the tunneling junction. It is, however, interesting to note that,
in Fig. 7, a relatively lower source doping reduces the gate-
dielectric dependence of the device performance, which is in
contrast with that intuitively expected. This can be attributed to
the combined inuence of the following two: First, a decrease in
the source doping concentration results in corresponding shift
in the location of the tunneling junction toward the source,
which is due to larger source depletion for lower source doping,
as evident in Fig. 8. Second, a larger impact of the fringing eld
arising out of the gate dielectric is observed at the gate edge
than the rest of the device, as can also be veried in Fig. 8. As
a result, for a device with higher source doping, the impact of
the fringing eld across the tunneling junction is found to be
much larger on the tunnel destination, compared with that on
Fig. 9. Plot showing the variations of V
T
and I
ON
with the value of the gate
dielectric for a p-TFET with L = 30 nm and EOT = 1 nm. The inset shows the
plot for a p-TFET with L = 100 nm and EOT = 4 nm.
the tunnel source. This, in turn, results in signicant widening
of the tunnel width, thereby degrading the device performance
drastically. In contrast, due to a shift in the location of the
tunneling junction toward the source for a device with lower
source doping, the impact of the fringing eld on the tunnel
source partly compensates its impact on the tunnel destination.
As a result, the gate-dielectric dependence of the device char-
acteristics is somewhat reduced when a relatively lower source
doping concentration is used.
3) Impact of Device Scaling: The impact of device scaling
on the gate-dielectric dependence of p-TFET characteristics is
now investigated. For this purpose, device simulation is done
for two different p-TFETs: one with L = 100 nm and EOT =
4 nm and the other with L = 30 nm and EOT = 1 nm. All
other device dimensions and parameters are kept the same as
in the previous case. Fig. 9 shows the plot of V
T
and I
ON
as a function of the value of the gate dielectric for the
device with L = 30 nm and EOT = 1 nm, whereas the inset
of Fig. 9 shows the plot for the device with L = 100 nm and
EOT = 4 nm. It is evident in Fig. 9 that the qualitative nature
of the impact of fringing eld does not change with dimension
scaling. An increase in value, except from = 100 to 200,
results in corresponding degradation of the device performance
in terms of both V
T
and I
ON
for both the devices, similar to
that observed in Fig. 3(b) for a device with L = 50 nm and
EOT = 2 nm. In addition, an improvement in both V
T
and I
ON
is observed for = 200, compared with that for = 100 in
Fig. 9 for both the devices, similar to that observed in Fig. 3(b).
The TFET characteristics are known to be independent of the
channel length down to about 20 nm [9], [21], [22]. A careful
examination of I
ON
values in Fig. 9, however, reveals that I
ON
increases with decreasing channel length for a given k value of
the gate dielectric. We have veried that such increase in I
ON
is due to the scaling of the EOT in our devices. I
ON
has been
found to be less sensitive to channel length scaling when the
EOT is kept at the same value, which is in consistence with the
reported results.
4) Impact of Higher Electric Field (Constant Physical
Thickness): We now investigate the impact of the higher elec-
tric eld at the surface of a p-TFET, when a high- gate
dielectric is used in it, by keeping the physical thickness of the
gate dielectric constant. For this purpose, device simulation is
MALLIK AND CHATTOPADHYAY: IMPACT OF FRINGING FIELD ON PERFORMANCE OF p-TFET 281
Fig. 10. V
T
and I
ON
as a function of the value of the gate dielectric of
3-nm physical thickness for a p-TFET with L = 50 nm but without a spacer.
done for a p-TFET, as shown in Fig. 1, with L = 50 nm, for
varying values of the gate dielectric with a physical thickness
of 3 nm. The values used in this case are 3.9, 7.5, 21, and
29. No spacer is used in this case also, as earlier. The values
of V
T
and I
ON
are extracted for different values of the gate
dielectric from the simulated transfer characteristics. Fig. 10
shows the plot of V
T
and I
ON
as a function of the value
of the gate dielectric. It is observed in Fig. 10 that the device
performance is improved, both in terms of I
ON
and V
T
, when a
high- gate dielectric of the same physical thickness is used in a
p-TFET. A high- gate dielectric of the same physical thickness
has larger oxide capacitance that is expected to increase the
tunneling probability as per [12, eq. (4)], which was originally
derived in [19] for silicon-on-insulator MOSFETs. To verify it,
we plot in Fig. 11 the simulated electron energy band diagram
around the tunneling junction for the p-TFET biased at V
GS
=
0.6 V and V
DS
= 1 V at a distance of 1 nm below the
top oxidesemiconductor interface for different values of
the gate dielectric of the same physical thickness. Increasing
the value of the gate dielectric, of the same physical thickness,
results in higher surface electric eld under the gate. As a result,
a larger impact of the high- gate dielectric is observed in
Fig. 11 for the tunnel source, compared with that for the tunnel
destination. This results in better device performance for higher
value of the gate dielectric of the same physical thickness, as
observed in Fig. 10. It may also be noted that, when the value
of the gate dielectric is increased while keeping its physical
thickness constant, the impact of the higher electric eld due to
increased oxide capacitance, which results in improved device
performance, dominates over that of the fringing eld, which
results in degraded performance, as observed earlier.
B. Effects of Variation in the Spacer Dielectric Constant
The impact of a spacer on the device performance of a
p-TFET is studied by varying the value of the spacer while
keeping its width xed at 50 nm for the device structure,
as shown in Fig. 1, with L = 50 nm. A silicon dioxide of
1-nm thickness is used as the gate insulator in this case. The
values of the spacer used are 3.9, 7.5, 21, and 50. The effects of
varying the value of the spacer on the transfer characteristics
of the p-TFET are shown in Fig. 12. The device characteristic
Fig. 11. Simulated energy band diagram near the tunneling junction at a
depth of 1 nm from the oxidesemiconductor interface as a function of the
value of the gate dielectric of 3-nm physical thickness at V
GS
= 0.6 V and
V
DS
= 1 V.
Fig. 12. Impact of varying the value of the spacer on the transfer character-
istics for the device in Fig. 1 with L = 50 nm. The inset shows the variations of
V
T
and I
ON
with the value of the spacer. Silicon dioxide of 1-nm thickness
is used as the gate dielectric in this case.
for a p-TFET without a spacer is also shown in Fig. 12 for
comparison. The values of V
T
and I
ON
are extracted from the
transfer characteristics in Fig. 12, and plotted in the inset of
Fig. 12 as a function of the value of the spacer. It is evident
in Fig. 12 that an increase in the value of the spacer results
in a corresponding degradation of the device performance, in
terms of both V
T
and I
ON
, of a p-TFET. This is very similar
to that reported in [17] for an n-TFET of similar structure. The
impact of the fringing eld arising out of the spacer is expected
to be larger for the source (tunnel destination) than that for the
channel (tunnel source) for such a p-TFET structure that causes
degradation of the device performance when the value of the
spacer is increased.
Virani et al. [20] proposed an advanced dual- spacer tech-
nology for an n-TFET consisting of a 2-nm-wide high- inner
spacer adjacent to the gate and an 8-nm-wide low- outer
spacer for a 20-nm-gate-length device, which has been found
to improve the device performance of such devices. Moreover,
it has also been reported in [20] that the fringing eld out
of a high- gate dielectric deteriorates the performance of
an n-TFET, in the presence of such a dual- spacer, which
is in contrast to that reported in [15] for a relatively simple
n-TFET structure. It may be mentioned here that, in this pa-
per, the impact of a high- gate dielectric and a spacer on
282 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 59, NO. 2, FEBRUARY 2012
the device performance is investigated for a relatively simple
p-TFET structure, similar to that used in [12], [15][17] for an
n-TFET, to develop basic understanding on this subject. Since
it is done, it is now open for the researchers to take up a study
to investigate the impact of a similar dual- spacer technology
for a p-TFET.
IV. CONCLUSION
A systematic investigation of the impact of the fringing eld
arising out of a high- gate dielectric on the device performance
of a p-TFET has been made. The fringing eld arising out of a
high- gate dielectric has been found to deteriorate the perfor-
mance of a p-TFET, in contrast with its n-channel counterpart,
where it has been reported to improve the performance. It
has also been found that the fringing eld arising out of a
high- gate dielectric has greater impact for a p-TFET with
higher source doping concentration. In addition, the qualitative
nature of the impact of fringing eld has been found to be
independent of dimension scaling. The impact of a spacer on
a p-TFET, however, has been found to be very similar to that on
an n-TFET of similar structure, as reported earlier. Our ndings
can be a guide for the design of a p-TFET for complementary
TFET applications.
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Abhijit Mallik (M00SM06) received the M.Sc.
degree in electronic science from the University of
Calcutta, Kolkata, India, in 1989 and the Ph.D. de-
gree in electrical engineering from Indian Institute
of Technology (IIT), Bombay, India, in 1994. His
Ph.D. dissertation was on reoxidized nitrided ox-
ide metaloxidesemiconductor (MOS) devices for
radiation-hard applications.
He played a key role in developing a radiation-
hard chip going up to 1 Mrad(Si) while he was with
IIT, Bombay. From 1994 to 1995, he was a Postdoc-
toral Fellow with the Department of Electrical Engineering, Yale University,
New Haven, CT, where he worked on process development and interface
characterization of jet-vapor-deposited (JVD) silicon nitride as an alternative
gate insulator for ultralarge-scale-integration applications. He was with the
Department of Electronics and Communication Engineering, Kalyani Govern-
ment Engineering College, Kalyani, India, for ten years before joining the
University of Calcutta, Kolkata, India, in 2007, where he is currently a Professor
with the Department of Electronic Science. His research interests include the
physics, technology, characterization, and modeling of both classical and novel
complementary metaloxidesemiconductor devices.
Dr. Mallik is currently the Vice-Chairperson of the IEEE Electron Devices
Society Calcutta Chapter.
Avik Chattopadhyay received the B.Tech. degree
in electronics and communication engineering from
West Bengal University of Technology, Kolkata,
India, in 2006 and the M.Tech. degree in very large
scale integration design, in 2009, from the University
of Calcutta, Kolkata, where he is currently working
toward the Ph.D. degree, with nanoelectronics as the
area of specialization, in the Department of Elec-
tronic Science.
From 2006 to 2007, he was with Cognizant Tech-
nology Solutions Pvt. Ltd., Kolkata, as a Program-
mer Analyst. His current research interests include novel complementary
metaloxidesemiconductor devices such as tunnel eld-effect transistors.