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Indium antimonide (InSb) single crystals have been plastically deformed between A176 and 400 degC, i.e. Below and above the brittle-to-ductile transition temperature situated around 150-160 degC. The evolution of the macroscopic mechanical data (hardness and critical resolved shear stress) with temperature suggests the existence of three deformation regimes with transitions at T tr1 = 150 degC and t tr2 = 20 degC
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Originaltitel
Plasticity of indium antimonide between −176 and 400 °C under hydrostatic pressure. Part I Macroscopic aspects of the deformation
Indium antimonide (InSb) single crystals have been plastically deformed between A176 and 400 degC, i.e. Below and above the brittle-to-ductile transition temperature situated around 150-160 degC. The evolution of the macroscopic mechanical data (hardness and critical resolved shear stress) with temperature suggests the existence of three deformation regimes with transitions at T tr1 = 150 degC and t tr2 = 20 degC
Indium antimonide (InSb) single crystals have been plastically deformed between A176 and 400 degC, i.e. Below and above the brittle-to-ductile transition temperature situated around 150-160 degC. The evolution of the macroscopic mechanical data (hardness and critical resolved shear stress) with temperature suggests the existence of three deformation regimes with transitions at T tr1 = 150 degC and t tr2 = 20 degC
Plasticity of indium antimonide between 176 and 400 C under
hydrostatic pressure. Part I: Macroscopic aspects of the deformation
B. Kedjar, L. Thilly * , J.-L. Demenet, J. Rabier PHYMAT, University of Poitiers (UMR CNRS 6630), SP2MI, 86962 Futuroscope, France Received 18 August 2009; received in revised form 26 October 2009; accepted 27 October 2009 Available online 2 December 2009 Abstract Indium antimonide (InSb) single crystals have been plastically deformed between 176 and 400 C, i.e. below and above the brittle-to- ductile transition temperature situated around 150160 C, via the use of microindentation below room temperature (RT) and the Pat- erson press (compression under gaseous pressure) above RT. The evolution of the macroscopic mechanical data (hardness and critical resolved shear stress) with temperature suggests the existence of three deformation regimes with transitions at T tr1 = 150 C and T tr2 = 20 C. T tr1 coincides with the brittle-to-ductile temperature, while T tr2 may coincide with a transition in the nature of dislocations with dislocations propagating in the glide set above T tr2 while moving in the shue set below T tr2 . 2009 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved. Keywords: Semiconductor; Indium antimonide; Brittle-to-ductile transition; Compression; Indentation 1. Introduction The development of technological applications of semi- conductors (SCs) has created demand for electronic devices of ever-increasing performance. This requirement is one of the driving forces for the interest of the scientic commu- nity in the properties of SCs. Although optoelectronic properties have been widely studied and improved via the control of crystal growth processes of elemental and com- pound SCs, the defects that are created during fabrication still appear highly detrimental to the devices functionality and usually lead to their untimely degradation. Moreover, the survival of devices is highly dependent on the function- ing conditions since defect density may evolve with temper- ature as dierential dilatation is produced in the devices, which in turn creates stress concentrations. As a conse- quence, knowledge of the mechanical behaviour of SCs and their deformation mechanisms is still of great impor- tance for the design of improved devices. In addition to this technological aspect, SCs have long been considered as model materials on which to study the eects of temperature, strain rate and impurity content on deformation mechanisms, and in particular on disloca- tion nucleation and propagation. SCs serve as model mate- rials because (i) the fabrication of large single crystals of SCs has been undertaken for many decades and (ii) SCs exhibit a brittle-to-ductile transition (BDT, usually situated around 0.6T m , where T m is the melting temperature) that is still the subject of investigation. Moreover, with the increasing miniaturization of devices, new properties have been reported: for instance, the mechanical properties of nanocrystalline materials or micro- and nano-objects have been improved (the HallPetch strengthening with grain size reduction is an example of such eect). Therefore, dur- ing the last decade, the study of small objects has devel- oped, such as in microelectromechanical systems (MEMS), which are fabricated from silicon wafers by etch- ing techniques or focused ion beam (FIB) milling. In such small-scale objects, complex stress tensors are developed and the deformation response may dier from that found in bulk systems. As an example, Michler and co-workers have recently fabricated micrometer-sized columns (so- 1359-6454/$36.00 2009 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved. doi:10.1016/j.actamat.2009.10.050 * Corresponding author. Tel.: +33 5 49 49 68 31; fax: +33 5 49 49 66 92. E-mail address: ludovic.thilly@univ-poitiers.fr (L. Thilly). www.elsevier.com/locate/actamat Available online at www.sciencedirect.com Acta Materialia 58 (2010) 14181425 called micropillars) by FIB milling a GaAs wafer and compressed these objects in a scanning electron microscope at room temperature (RT) [1]: they observed that pillars with a diameter of 10 lm are brittle and fail in compression without experiencing plastic deformation, while pillars with a diameter of 1 lm exhibit plasticity (with nucleation of Shockley partial dislocations and microtwinning). The sup- pression of brittleness is not understood but could be related to a complex stress tensor inhibiting crack propaga- tion, thereby favouring plasticity. As a matter of fact, all these elements show that the study of elemental deforma- tion mechanisms in SCsespecially in high-stress domainsis valuable from the theoretical and applied points of view. In this study, the IIIVSCcompound indiumantimonide (InSb) has been chosen because of its low melting tempera- ture (T f = 525 C = 798 K). This characteristic enables InSb tocover a wide temperature range, andis especially useful for studying the deformation microstructures above and below the BDT temperature. InSb is narrow-band-gap SC with E g 0.2 eV and crystallizes, as most IIIV compounds, in the zincblende structure (space group F 43m) based on a face-centred cubic lattice with In at (0, 0, 0) and Sb at (1/ 4, 1/4, 1/4). This structure canbe seenas the superimposition of {1 1 1} planes made exclusively of Inor Sbatoms: InSbis a polar material as illustratedby Fig. 1. Moreover, the distance between adjacent {1 1 1} planes can be of two types: two planes which are closely spaced dene the glide set (Fig. 1b); otherwise they dene the shue set. InSb under- goes several phase transitions under pressure: the rst tran- sition pressure, P s = 2 GPa, corresponds to a SC-to-metal transition (similar to b-Sn) [2]. The most complete phase- temperature diagrams can be found in Refs. [3,4]. The macroscopic mechanical properties of InSb have been studied since the 1960s using various deformation techniques such as 3-point or 4-point bending [5,6], uniax- ial compression at room pressure [712], uniaxial compres- sion under solid conning pressure (in the Griggs apparatus) [13,14] and microindentation [15,16]. It should be pointed out that none of the previously cited studies reports a systematic study of InSb mechanical properties over the entire temperature range. Nevertheless, when taken together, the macroscopic data show overall that: (i) the yield stress of InSb increases rapidly below 300 C, suggesting that dislocation glide is highly thermally acti- vated [11] and (ii) when deformed at room pressure, InSb becomes brittle below 150160 C [11]. With compression under solid conning pressure, Suzuki and co-workers deformed InSb to 130 C, and evidenced at a temperature T tr , close to RT, a change in the yield stress evolution vs. temperature: this so-called hump has been discussed in terms of a change of deformation mechanism with disloca- tions propagating in the glide set above RT while moving in the shue set at very low temperature [14]. This study is divided into two parts: in the present paper (part I), the macroscopic mechanical properties of InSb are revisited from 400 down to 176 C by means of two com- plementary deformation techniques: uniaxial compression under gaseous conning pressure from 400 C down to RT and microindentation below RT. From these experi- ments, the evolution of the yield stress with temperature is presented and compared to available literature data. Observations of slip traces on the surfaces of the samples are also reported. All these results are nally discussed to propose a schematic view of the yield stress evolution with temperature in the context of the appearance of the BDT. Part II of this study is devoted to the microscopic char- acteristics of the deformation of InSb, and the dislocation microstructures are characterized from 400 down to 176 C. 2. Experimental In this study, bulk S-doped InSb single crystal (n = 4.88 10 16 cm 3 ) has been chosen for the compres- sion tests under hydrostatic pressure. The bulk single crys- tal was cut into parallelepipeds with typical size 3 3 8 mm 3 . All faces were carefully mechanically pol- Fig. 1. (a) Zincblende structure (space group F 43m) of InSb, based on a face-centred cubic lattice with In at (0, 0, 0) and Sb at (1/4, 1/4, 1/4). (b) Structure observed along the 110 direction, showing the superimposition of {1 1 1} planes made exclusively of In or Sb atoms. The distance between adjacent {1 1 1} planes can be of two types: two planes closely spaced are the glide set; otherwise they are the shue set. B. Kedjar et al. / Acta Materialia 58 (2010) 14181425 1419 ished and subsequently chemically polished to remove any surface defects that would act as surface dislocation sources and hinder the observation of in-volume disloca- tions via the slip traces that they create when emerging at the sample surface. The samples were inserted into fully annealed aluminium cylinders to t into the deformation assembly of the compression apparatus. The compression axis was chosen to be 213 to favour single slip on the a/2011111 slip system (the lateral surfaces are com- posed of 111, 111, 451 and 451 faces). Uniaxial compression tests were performed in the Paterson appara- tus [17,18] under an argon conning pressure of 300 MPa at a strain rate of 2 10 5 s 1 , from RT up to 400 C. After deformation, the samples were removed from the Al jackets for optical observation of the slip traces at sam- ples surface, and thin foils were cut parallel to the 111 primary glide plane for transmission electron microscopy (TEM) observations of the deformation microstructure (see part II). For the low-temperature mechanical charac- terization, h1 1 1i-oriented Te-doped InSb wafer was selected for microindentation tests; both 111 In-atom- terminated face and 111 Sb-atom-terminated face have been indented. For this purpose, a Shimadzu microindenter was installed inside a controlled-atmosphere chamber lled with argon to avoid ice formation at the sample surface upon cooling, while a liquid nitrogen circulation was installed under the sample holder to decrease the sample temperature from RT down to 176 C. Several hundred Vickers indentations were performed at dierent tempera- tures under a maximum load of 50 g (with holding time of 10 s) and the hardness was calculated from the in situ measurement of the dimensions of the indents. After inden- tation, the InSb wafer was optically observed to check for the presence of cracks and subsequently thinned for TEM observations of the deformation microstructure (see part II). In both experiments, the temperature was monitored during mechanical testing with accuracy better than 2 C. 3. Results 3.1. Compression tests A number of tests were performed at 20, 100, 150, 300 and 400 C, i.e. below and above the BDT temperature (about 150 C). Because the samples are inserted into Al cylinders, the mechanical data that are recorded during the tests comprise the results from both InSb and Al. To remove the contribution of the Al jacket, a procedure was developed that consists of preliminary tests on pure Al samples under identical conditions to those used for the InSb + Al tests. The obtained stressstrain Al curve is then subtracted from the InSb + Al mechanical data fol- lowing a rule of mixture (ROM) that takes into account the InSb and Al volume fractions. The validity of the ROM law is based on the fact that the two phases, InSb and Al, are tested in parallel without interactions at interfaces and they obey isostrain conditions: the validity of the ROM has been veried by nite-element modelling (FEM) of the compression tests under hydrostatic pressure [19]. In addition, the stiness of the compression apparatus and its temperature dependence have been taken into account. As a consequence, the mechanical properties of InSb are obtained in the form of stressstrain curves as reported in Fig. 2, where the engineering stress r InSb is plot- ted vs. engineering strain e InSb at 20, 100, 150, 300 and 400 C. The mechanical properties appear highly tempera- ture dependent with increasing strength as the temperature decreases. Furthermore, two behaviours can be distin- guished, indicated by the presence or absence of a stress peak before a hardening phase. In the rst case (at 20, 100, 150 and 300 C), the presence of this upper and lower yield stress (UYS and LYS) is generally attributed to a low initial dislocation density and the need for higher stress to trigger dislocation sources followed by dislocation ava- lanches that lead to a reduction in the macroscopic stress. The absence of the stress peak at 400 C may be related to the remaining surface defects acting as dislocation sources that hinder the avalanche phenomenon. In addi- tion, at this temperature, thermal activation could be high enough to stimulate activity of dislocation sources emitting dislocations in a sucient number to accommodate mechanical distortion. To study the evolution of the elastic limit vs. temperature, we compare the LYS (at 20, 100, 150 and 300 C) to the stress at intersection between the elastic regime and the constant hardening regime (at 400 C). As a result, the critical resolved shear stress (CRSS), s c , is calcu- lated at each temperature as the resolved stress in the pri- mary 111 slip plane, i.e. the LYS multiplied by the Schmid factor, m, equal to 0.47 (for a a/2011111 sys- tem and stress applied along 213). The values of s c are plotted in Fig. 3 as a function of the absolute temperature, T, and can be compared to lit- erature data on InSb deformed by compression under Fig. 2. Stressstrain curves obtained from the compression of InSb single crystals at 20, 100, 150, 300 and 400 C, after correcting from the inuence of the Al jacket and the temperature dependence of the stiness of the compression apparatus. 1420 B. Kedjar et al. / Acta Materialia 58 (2010) 14181425 hydrostatic pressure in the Griggs apparatus (from 373 down to 143 K) [14], i.e. where the hydrostatic pressure is obtained by compression of a solid medium (lead or salt). Our data are systematically higher than the ones obtained in the Griggs apparatus: rst, unlike the Pater- son apparatus, where the load cell is installed inside the pressure vessel, the data from the Griggs apparatus are measured by an external load cell and are potentially screened or smoothed by elevated solid/solid friction between sample and conning medium; second and most importantly, as shown by FEM [19], the friction between sample and solid conning medium creates unavoidable shear stresses at the sample surface (and corners) when pressurized: the resulting Von Mises stresses lead to early yielding of the sample during subsequent axial compres- sion. The apparent yield stresses are then reduced com- pared to the ones obtained in the Paterson apparatus (gaseous conning pressure). This eect is more pro- nounced in InSb at high temperature because of its strong softening above the BDT temperature. Therefore, the data obtained here are considered to be reliable. After removal from the Al jacket, the deformed InSb parallelepipeds were optically inspected on their lateral faces to observe the slip traces. Beside the primary a/ 2011111 slip system with a Schmid factor m = 0.47, two secondary slip systems can be equivalently activated during a [2 1 3] compression: a/2[1 1 0] 111 and a/ 2011 (1 1 1) with m = 0.35. A ternary slip system may as well be activated, a/2[1 0 1] 111 with m = 0.29. Fig. 4 presents optical micrographs for each lateral face, 111, 111, 451 and 451, of InSb samples deformed at 400, 300, 150, 100 and 20 C; in addition, theoretical directions of slip traces are added. For the latter tempera- ture, Fig. 5 exhibits a high magnication view of the 111 face. Table 1 summarizes the slip trace observations: after a plastic deformation of 4% at 400 C, only traces of the pri- mary slip system are observed to be homogeneously dis- tributed on the samples surface, with no trace of cracks. After a plastic deformation of 5% at 300 C, the primary and one secondary (a/2011(1 1 1)) slip systems are observed on all lateral faces and the ternary slip system is additionally observed on the 111 face. Again no cracks are observed. After a plastic deformation of 7% at 150 C, the 111 and 451 faces exhibit traces of the pri- mary and one secondary (a/2011(1 1 1)) slip systems; the 111 face presents traces of the primary and the ternary slip systems while only traces of the primary slip system are observed on the 451 face. After a plastic deformation of 6% at 100 C, all faces exhibit traces of the primary and one secondary (a/2011(1 1 1)) slip systems; the ternary slip system is additionally observed on the 111 face. After a plastic deformation of 6% at 20 C, all faces pre- sents traces of the primary and the a/2011(1 1 1) second- ary slip systems. In addition, several slip traces from the primary slip system on the 111 face exhibit double cross-slip events (as indicated in Fig. 5), leading the average direction of the slip lines to deviate from the 41 angle from the [2 1 3] compression axis. It must be emphasized that evidence of double cross-slip could only be found after RT deformation. 3.2. Microindentation tests A series of Vickers indentations was performed at RT and 176 C on both 111 In-atom-terminated and 111 Sb-atom-terminated faces. At RT, the In-face exhibits an average Vickers hardness HV = 2.2 0.1 GPa, while for the Sb-face, HV = 2.3 0.1 GPa. At 176 C, the average hardness for the In-face and Sb-face are respec- tively HV = 3.2 0.1 GPa and HV = 3.3 0.1 GPa. The observation of a softer Sb-face compared to the In-face has been similarly observed at and above RT [16]. In the following, the average hardnesses of the In- and Sb-faces are considered. After indentation, the InSb wafer was mechanically pol- ished from the opposite surface before ion milling to nally obtain electron transparency for TEM analysis of the deformation microstructure. After mechanical polishing, a very regular network of cracks could be observed to be aligned with h2 1 1i in-plane directions, as shown on the micrograph displayed in Fig. 6. 3.3. Evolution of mechanical properties between 176 and 400C To obtain a better insight into the temperature depen- dence of the macroscopic mechanical properties of InSb, the compression and indentation data are plotted together as ln(s c ) or ln(HV) as a function of 1000/T (Fig. 7). This representation provides an estimation of the apparent acti- vation energy for dislocation nucleation, Q/n (where Q is the activation energy and n is the stress exponent), follow- ing the phenomenological relation: Fig. 3. Evolution of s c vs. the absolute temperature, T, for the present study (InSb deformed by compression under gaseous conning pressure) and compared to literature data on InSb deformed by compression under hydrostatic solid pressure in the Griggs apparatus [14]. B. Kedjar et al. / Acta Materialia 58 (2010) 14181425 1421 ln s c Q=nkT 1=nln _ c ln A 1 or equivalently: ln HV Q=nkT 1=nln _ c ln B 2 where k is the Boltzmann constant, and A and B depend on the shear strain rate _ c. Q/n is then proportional to the slope of the curve ln(s c ) = f(1/T) or ln(HV) = f(1/T). Fig. 7 also shows the lit- erature data on InSb deformed in the Griggs apparatus (from 100 down to 130 C) [14] and InSb indented above 20 C [15] (following Tabors empirical law, the hardness is proportional to the yield stress, with HV 3r y ). The dierence between the Griggs-apparatus data and Paterson-apparatus data has been discussed earlier; the dif- ference between the two indentation data sets at RT may be attributed to the doping dierence (n-type in this study vs. undoped in Ref. [14]) that is known to modify the mechanical behaviour of SCs, and InSb in particular, with p-doped stronger than undoped, which is in turn stronger that n-doped [20]. Our value of s c at 150 C is unexpectedly low: several compression tests have been performed at this temperature and all yield the same value. Table 2 summarizes the apparent activation energies Q/ n that can be deduced from the slopes of the curves observed in Fig. 7; several other literature data have also been analyzed but are not shown on this gure for the sake Fig. 4. Overview of the optical micrographs for each lateral face, 111, 111, 451 and 451, of InSb samples deformed at 400, 300, 150, 100 and 20 C; theoretical directions of slip traces are added. Fig. 5. High-magnication view of the 111 face after a plastic deformation of 6% at 20 C, where several slip traces from the primary slip system exhibit double cross-slip events, as encircled. 1422 B. Kedjar et al. / Acta Materialia 58 (2010) 14181425 of clarity. From Fig. 7 and Table 2, it appears that three distinct regimes can be distinguished for all data sets, with strong variations of apparent activation energy at 150 and 20 C, with Q/n reducing by a factor of 43 between 400 and 176 C. In the following, these three regimes will be labelled as the high-temperature (HT) regime above 150 C, the low-temperature (LT) regime between 150 and 20 C, and the very-low-temperature (VLT) regime below 20 C. In addition, the two transition temperatures will be labelled as T tr1 = 150 C = 423 K and T tr2 = 20 C = 293 K. 4. Discussion 4.1. Validity of data comparison The use of a single deformation technique spanning the VLT and HT ranges was not possible in the present study, and therefore compression tests under hydrostatic pressure above RT were complemented by indentation tests below RT. Moreover, the literature data relative to InSb also combine several deformation techniques ranging from compression tests with or without conning pressure, Table 1 Observation of slip traces on the lateral faces of samples after compression at dierent temperatures. Temperature (C) Lateral faces Slip traces Primary system [0 1 1] 111 (m = 0.47) Secondary system [1 1 0] 111 (m = 0.35) Secondary system 011 (1 1 1) (m = 0.35) Ternary system [1 0 1] 111 (m = 0.29) 400 111 111 451 451 300 111 111 451 451 150 111 111 451 451 100 111 111 451 451 20 111 111 451 451 Fig. 7. Ln(s c ) or ln(HV) as a function of 1000/T. Literature data on InSb deformed in the Griggs apparatus (from 100 down to 130 C) [14] and InSb indented above 20 C [15] have been added. Fig. 6. InSb wafer after indentation and mechanical polishing from the opposite surface: a regular network of cracks is observed to be aligned with h2 1 1i in-plane directions. B. Kedjar et al. / Acta Materialia 58 (2010) 14181425 1423 bending tests and indentation. Therefore, it is crucial to investigate the possibility of comparing the dierent data sets prior to deeper analysis. In particular, the complexity of the applied stress tensor must be discussed since the presence of hydrostatic and deviatoric components has a strong impact on the sample as the rst component may lead to phase transition if it reaches the materials rst tran- sition pressure, P s (P s = 2 GPa for InSb [2]) and the second is the cause of plastic deformation by shear. Let us consider the most unfavourable case, i.e. indenta- tion, where the hydrostatic and deviatoric components may be simultaneously elevated. For this discussion, Si is chosen as a model material since the literature data on the VLT to HT regimes is vast. It has been claimed for many decades that Si undergoes a phase transition when indented. This assertion comes from the early work of Gridneva et al. [21], which monitored the electrical resistance of Si upon indentation as a function of applied load: as a resistance decrease was observed with an increase in load, the authors concluded that phase transformation occurs at high load (i.e. high pressure) with the formation of a metallic phase (P s (Si) = 12 GPa). Moreover, they observed a decrease in the temperature dependence of the Si hardness below 400 C: it was then concluded that this hardness plateau at LT was related to uncontrolled phase transformation. Very recently, Khayyat [22] developed a similar electrical monitoring during indentation and unambiguously showed that the deformation aects the nature of electrical contacts at samples surface, leading to the formation of ohmic con- tacts that, as an artefact, induce a decrease in the measured resistance. Combining this experiment with Raman spec- troscopy, the same author showed that plastic deformation and phase transformation coexist in Si indented at RT, but no phase transformation is observed in Si when indented at 73 C. The latter result suggests that the rst transition pressure of Si increases below RT. The coexistence of phase transformation and plasticity and its impact on the hard- ness of Si and Ge, between RT and 400 C, has been exam- ined in detail by Vandeperre and co-workers via the calculation of the stress tensor under the indentor [23]: if the transition pressure is larger than two-thirds of the elas- tic limit of the non-transformed material, plasticity occurs simultaneously in the transformed and non-transformed regions. Therefore, the hardness plateau of Si at LT cannot be only imputed to a phase-transformation artefact. Addi- tionally, we may compare the mechanical properties of Si obtained with dierent techniques such as indentation [15] and deformation under high pressure in a Griggs appa- ratus [24] and in a multi-anvil setup [25]: the latter experi- ments have been performed under a conning pressure of respectively 1.5 and 5 GPa, i.e. well below the transition pressure for Si. Fig. 8 is a plot of ln(HV) and ln(s c ) as a function of 1000/T for the three data sets: they present a plateau below 200300 C that, again, cannot be only imputed to phase-transformation. As a consequence, it is possible to compare dierent data sets and the observation of a hardness plateau at LT and VLT is not indicative of phase transformation. 4.2. Comparison of InSb mechanical data with literature Fig. 7 enables data obtained with dierent techniques to be compared: independently from the data set, three dis- tinct regimes can be distinguished with transition tempera- tures at T tr1 = 150 C = 423 K and T tr2 = 20 C = 293 K. Above T tr1 = 150 C, the apparent activation energy is estimated to be of the order of 0.1 eV whatever the defor- mation technique used (Table 2) with a decrease by a factor of 4 below T tr1 down to T tr2 = 20 C. Below T tr2 , the apparent activation energy decreases again by a factor of more than 10. Following the work of Karmouda [11], the BDT temperature of InSb is generally considered to take place around 150160 C: the observation of a transition of the mechanical properties at T tr1 = 150 C may therefore be correlated to the BDT. If so, the change of activation energy at T tr1 is indicative of a change in the deformation mechanism at the BDT. It should be noted that a similar decrease in the apparent activation energy was observed Table 2 Estimated apparent activation energies Q/n calculated from the literature and from the present study data sets. Reference Q/n (eV) T > 150 C 20 C < T < 150 C T < 20 C Shimizu and Sumino [6] 0.320.4 Karmouda [11] 0.20.31 Branchu [13] 0.140.17 Suzuki et al. [14] 0.190.32 0.0118 0.0193 Yonenaga and Suzuki [15] 0.170.21 0.0480.08 Present study 0.140.25 0.0350.07 0.0045 Fig. 8. Ln(HV) and ln(s c ) as a function of 1000/T for Si obtained with dierent deformation techniques such as indentation [15] and deformation under high pressure in a Griggs apparatus [24] and in a multi-anvil setup [25]. 1424 B. Kedjar et al. / Acta Materialia 58 (2010) 14181425 in GaAs between 315 and 350 C and correlated to a change in dislocation nature at the BDT taking place at this temperature [26]. A further decrease in the activation energy at T tr2 may also be the signature of another change in the deformation mechanism at VLT. This temperature domain is not very well documented because of the brittle- ness of the SCs and the elevated stress level that is required at such low temperatures. Only Suzuki et al. have also suc- ceeded in deforming InSb below RT and they too observed a sudden change in mechanical data evolution vs. temper- ature that they qualied as a hump [14]. The authors sug- gested that this transition could result from a change in dislocation nature, with dislocations propagating in the glide set above T tr2 while moving in the shue set at VLT. Nevertheless direct observation of the dislocations at VLT cannot be found for InSb. The only observations of this glide-to-shue transition are available for Si where perfect non-dissociated screw dislocations were observed after deformation at 20 C in a multi-anvil setup [2730]. Here, the observations of double cross-slip on the surface of the InSb samples after RT deformation could be indica- tive of propagation of non-dissociated perfect screw dislo- cations at VLT. 5. Summary and conclusion InSb single-crystalline samples have been successfully plastically deformed from 400 down to 176 C by the use of complementary deformation techniques, i.e. macro- scopic compression of bulk samples under gaseous conn- ing pressure above RT, and indentation below RT. The study of the evolution of macroscopic mechanical data vs. temperature leads to the following assertions: 1. A plot of ln(s c ) or ln(HV) vs. 1/T exhibits three regimes with transitions at T tr1 = 150 C = 423 K and T tr2 = 20 C = 293 K. 2. The slope of ln(s c , HV) = f(1/T) in each regime is related to the apparent activation energy for dislocation nucle- ation: this energy decreases strongly at T tr1 and T tr2 , indicating a change in deformation mechanism. 3. T tr1 coincides with the brittle-to-ductile temperature that is usually reported around 150160 C. 4. InSb samples deformed at RT exhibit double cross-slip traces at their surfaces, suggesting the occurrence of easy cross-slip that could be related either to available con- strictions on dissociated screw dislocation or the pres- ence of non-dissociated screws. 5. 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