Linear Actuators For Precision Motion Control

Linear Actuators for
Precision Motion Control

Solutions featuring Novel Piezoelectric Motors and Classical Motors
Precision Linear Actuators Overview
Motion Control with Piezoelectric / Servo / Stepper Motors
PI is the leading manufacturer
of ultra-high-precision actua-
tors for nanopositioning and
micropositioning applications
in industries such as Semi-
conductors; Biotechnology and
Medicine; Lasers, Optics, Micros-
copy; Aerospace Engineering;
Precision Machining; Astronomy
and Microsystems Technology.
Section a Section b Section c
Motorized Screw Type Actuators PILine® Ceramic Ultrasonic Piezo NEXACT® Compact Piezo
Motor Actuators Stepping Motor Actuators
DC & Stepper Motors
Forces to 400 N High-Speed Piezomotors and PiezoWalk® Drive
Travel to 50 mm Drives Compact Dimensions
Resolution to 50 nm Velocity to 800 mm/s Forces to 10 N
Compact Dimensions <0.1 nm Resolution
Travel to 150 mm (Basically Self-Locking at Rest
Unlimited) Travel to 25 mm (Basically
Forces to 7 N Unlimited)
Self-Locking at Rest Velocity to 10 mm/s
Resolution to 20 nm Non-Magnetic, Vacuum
Non-Magnetic, Vacuum Compatible
Compatible
Section c Section d Section e Section f
NEXLINE® High-Force Piezo Flexure-Guided Piezo Piezo Stack Actuators Motion Controllers (Examples)
Stepping Motor Actuators Actuators PICMA® Multilayer and Controllers for Servo Motors
PiezoWalk Drive
® PICMA® Piezoceramic PICA™ Stack Actuators and Stepper Motors
Non-Magnetic, Vacuum Multilayer Actuators Forces to 100 kN Controllers for Ultrasonic
Compatible Sub-Nanometer Resolution Sub-Nanometer Resolution Linear Motors
Forces to 600 N Fast Response (Millisecond- Fast Response (to Controllers for NEXACT ®
<0.1 nm Resolution Range) Microsecond-Range) Linear Motors

Self-Locking at Rest Excellent Guiding Precision High Reliability and Long Controllers for Piezo Actuators
Basically Unlimited Travel Travel to 1.8 mm Lifetime and Flexure Stages
High Reliability, Long Life Travel to 200 µm
High-Dynamics Mode Visit www.pi.ws for our
full selection of motion
1 controllers & software solutions.
Piezo • Nano • Positioning
M-228 Stepper Motor Actuator

Cost-Effective Stepper-Mike Linear Actuator with Limit Switches
the non-rotating-tip design of-
Ordering Information
fers several advantages:
M-228.10S
Elimination of torque-induc- Stepper-Mike Linear Actuator,
10 mm, Limit Switches
ed positioning errors
Elimination of sinusoidal Ask about custom designs!
motion errors
Elimination of wear at the
contact point
Elimination of tip-angle-
dependent wobble
Limit and Reference Switches

For the protection of your equip-
M-228 linear actuator
ment, non-contact Hall-effect
limit and reference switches are
installed. The direction-sensing
reference switch supports ad-
Cost-Effective Design
vanced automation applications
10 mm Travel Range with high precision.
46 nm Resolution with C-663 Controller
Non-Rotating Tip Technical Data
Max. Velocity 1.5 mm/s
M-228.10S Units
Non-contact Limit and Reference Switches
Active axes X
Compact Design Motion and positioning
Travel range 10 mm
Sensor resolution Cts./rev.
Design resolution 0.046* µm
Minimum incremental motion 0.15* µm
Backlash 5** µm
The linear actuators of the design offers many useful fea- Unidirectional repeatability 1 µm
M-228 series provide a travel tures such as a non-rotating
Accuracy 10 µm
range of 10 mm and are tip, limit and reference switch-
© PI 1998-2007. Subject to change without notice. This data sheet is superseded by any new
Max. velocity 1.5* mm/s

equipped with high-resolution es and a mechanical position
Origin repeatability 1 µm
stepper motors with gearbox. display.
Mechanical properties
Together with the C-663 con-
release. The newest release is available for download at www.pi.ws. 07/05/31.0.2
Non-Rotating Tip Spindle Leadscrew

troller, the M-228 provides a
Spindle pitch 0.5 mm/rev.
resolution of 46 nm for loads Compared to conventional ro-
Gear ratio 28.44444:1
up to 20 N. The cost-effective tating-tip micrometer drives,
Motor resolution 384* steps/rev.
Max. load 20 N
Max. push/pull force 20 N
Max. lateral force 0.1 N
Drive properties
Motor type 2-phase stepper motor
Operating voltage 24*** V
Limit and reference switches Hall-effect
Miscellaneous
Operating temperature range -20 to +65 °C
Material Aluminium anodized, stainless steel
Mass 0.23 kg
Cable length 0.5 m
Connector Sub-D connector 15-pin
Recommended controller/driver C-663 (single-channel)
Dimensions of the M-228 linear actuator in mm. * with C-663 stepper motor controller
Decimal places are separated by commas ** preloaded
*** 2-phase stepper motor, 24 V chopper voltage, max. 0.25 A/phase, 24 full-steps/rev.
a-1
M-227 Servo Motor Actuators
High-Resolution DC-Mike Actuators
M-227.10
DC-Mike Actuator, 10 mm
M-227.25
M-227.50
M-219.10
Ball Tip
M-250.20
Piezo Translator
Ask about custom designs!
M-227.10 (w/ piezo tip), M-227.25, M-227.50 (w/ ball tip),

high-resolution DC-Mike actuators and several tip options
10, 25 & 50 mm Travel Ranges High-Resolution Piezo Option

0.05 µm Minimum Incremental Motion All models come with standard
Non-Rotating Tip flat tips. A variety of other tips
Closed-Loop DC Motor are also available, such as a
Compatible with Leading Industrial Motion Controllers piezoelectric tip featuring 20
µm travel with sub-nanometer
Sub-nm Resolution with Optional PZT Drive
resolution for dynamic scan-
>5,000 Hours MTBF
ning and tracking (see page
7-85).
For mounting, the DC-Mikes

are clamped around the 19 mm
diameter section. High forces
M-227 are ultra-high-resolution M-227 actuators provide a cost- around the 16 mm diameter
linear actuators providing lin- effective solution for industrial section must be avoided, as
ear motion up to 50 mm with and OEM environments. Based must be lateral forces on the
sub-micron resolution in a on the successful M-222/M-226 tip.
compact package. They consist series which they replace,
of a micrometer with non-rotat- M-227 DC Mikes offer both im- Stepper-motor-driven versions
ing tip, driven by a closed-loop proved specs and reduced of the M-227 are available on
DC-motor/gearhead combina- costs. The combination of an request. For higher loads and
tion with motor-shaft-mounted extremely low stiction/friction integrated limit switches refer
high-resolution encoder (2048 construction and high-resolu- to the M-230 and M-235 (see
© PI 1998-2005. Subject to change w/o notice. Cat 118 05/09.17
counts/rev.). tion encoder allows for a mini- pages 7-78 and 7-82).
mum incremental motion of
Non-Rotating Tip 50 nanometers at speeds up to
Compared to conventional 1 mm/sec.
rotating-tip micrometer drives
the non-rotating-tip design Integrated Line Drivers
offers several advantages; it Each actuator includes an inte-
eliminates: grated 0.1 m cable with 15-pin
sub-D connector and a 3 m
Torque-induced stage extension cable. The connector
platform tilt features integrated line drivers
Sinusoidal motion errors for cable lengths up to 10 me-
Wear at the contact point ters between actuator and con-
Tip-angle-dependent wobble troller.
a-2
M-219.10 ball tip option P-250.20 piezo tip option
M-227 DC-Mike, dimensions (in mm). C-815.38 motor cable included: 3 m, sub-D, 15/15 pin (m/f).
Technical Data
Models M-227.10 M-227.25 M-227.50 Units Notes see page 7-106
Travel range 10 25 50 mm
Design resolution 0.0035 0.0035 0.0035 µm A3
Min. incremental motion 0.05 0.05 0.05 µm A4
Unidirectional repeatability 0.1 0.1 0.1 µm
Backlash 2 2 2 µm
Max. velocity 1 1 1 mm/s
Max. push/pull force* 40 40 40 N
Max. lateral force 0.1 0.1 0.1 N (at tip)
Encoder resolution 2048 2048 2048 counts/rev.
Drivescrew pitch 0.5 0.5 0.5 mm/rev.
Gear ratio 69.12:1 69.12:1 69.12:1
Nominal motor power 2 2 2 W
Motor voltage 12 12 12 V
Weight 0.16 0.22 0.26 kg
Recommended motor controllers C-842, C-844, C-860 C-842, C-844, C-860 C-842, C-844, C-860 D2 * Higher forces on request
a-3
M-230 Servo & Stepper Motor Actuators
High-Resolution Closed-Loop DC-Mike & Stepper Actuators
M-230.10
DC-Mike Actuator, 10 mm, Limit
Switches
M-230.25
DC-Mike Actuator, 25 mm, Limit
Switches
M-230.10S
Stepper-Mike Actuator, 10 mm,
Limit Switches
M-230.25S
Stepper-Actuator, 25 mm, Limit
Switches
M-230.10, M-230.25, high-resolution DC-Mike actuators, 10 and 25 mm travel range
10 & 25 mm Travel Range Integrated Line Drivers features integrated line drivers
0.05 µm Minimum Incremental Motion M-230 actuators include an for cable lengths up to 10
meters between actuator and
Non-Rotating Tip integral 0.5 m cable with 15-pin
sub-D connector and a 3 m controller.
Velocity to 2 mm/sec.
extension cable. On the DC-
Closed-Loop DC Motors and Stepper Motors A screw-in ball tip and a flat tip
servo versions, the connector
Compatible with Leading Industrial Motion Controllers are included.
Integrated Hall-Effect Origin and Limit Switches
Front Mount or Clamp Mount For higher loads and travel
>5,000 Hours MTBF ranges refer to the M-235 on
page 7-82.
M-230 are ultra-high-resolution Elimination of torque-

linear actuators providing lin- induced positioning errors
ear motion up to 25 mm with Elimination of sinusoidal
sub-micron resolution in a motion errors
compact package. They consist Elimination of wear at the
of a micrometer with non-rotat- contact point
ing tip driven by a 2-phase Elimination of tip-angle-
stepper motor or a closed-loop dependent wobble
DC motor/gearhead combina-
tion with motor-shaft-mounted,
high-resolution encoder (2048 M-230 actuators provide a cost-
counts/rev.). effective solution for heavier-
duty industrial and OEM envi-
Non-Rotating Tip ronments. They feature ex
Compared to conventional tremely low-stiction, low-fric-

rotating-tip micrometer drives, tion construction, allowing for
the non-rotating-tip design minimum incremental motion
offers several advantages: as low as 50 nanometers and
speeds up to 2 mm/sec.
Application Examples
Non-Contact Limit and Origin
Photonics packaging
Switches
Fiber alignment Integrated, non-contact, high-
Quality control precision Hall-effect origin and
limit switches protect your M-230. Cable length: 500 mm,
Test equipment equipment and increase versa- 15-pin sub-D connector with
integrated line drivers (DC motor
Metrology tility in automation applica-
models). Dimensions in mm.
tions.
a-4
Ball tip (included) Flat tip (included)
Technical Data
Models M-230.10 M-230.25 M-230.10S M-230.25S Units Notes
see page 7-106
Travel range 10 25 10 25 mm
Design resolution 0.0046 0.0046 0.0012 0.0012 µm A3
Min. incremental motion 0.05 0.05 0.05 0.05 µm A4
Unidirectional repeatability 0.1 0.1 0.1 0.1 µm
Backlash 2 2 2 2 µm
Max. velocity 1.5 1.5 2 2 mm/s
Max. push/pull force 70 70 45** 45** N
Max. lateral force 30 20 30 20 N (at tip)
Encoder resolution 2048 2048 - - counts/rev.
Motor resolution - - 1200* 1200* steps/rev.
Drivescrew pitch 0.4 0.4 0.4 0.4 mm/rev.
Gear ratio 42.92:1 42.92:1 28.44444:1 28.44444:1 C-815.38 motor cable
Nominal motor power 2 2 * * W included: 3 m, sub-D,
15/15 pin (m/f).
Motor voltage 12 12 24* 24* V
* 2-phase stepper, 24 V
Origin and limit switches Hall-Effect Hall-Effect Hall-Effect Hall-Effect chopper voltage, max.
Weight 0.30 0.35 0.30 0.35 kg 250 mA / phase, 1,200
microsteps with C-600,
Recommended motor C-843, C-848, C-862 C-843, C-848, C-862 C-600, C-630 C-600, C-630 D2 C-630 controllers
controllers ** at up to 1 mm/sec.
a-5
M-231 Servo Motor Actuator
High-Resolution Closed-Loop DC-Mike Actuators
M-231.17
DC-Mike Actuator, 17 mm,
Limit Switches
M-231.17 high-resolution DC-Mike actuator, 17 mm travel range
17 mm Travel Range sub-D connector and a 3 m

0.1 µm Minimum Incremental Motion Non-Contact Limit and Origin extension cable. The connector
Switches features integrated line drivers
Velocity up to 2.5 mm/sec.
Integrated, non-contact, high- for cable lengths up to 10
Closed-Loop DC Motor meters between actuator and
precision Hall-effect origin and
Compatible with Leading Industrial Motion Controllers controller.
limit switches protect your
Integrated Hall-Effect Origin and Limit Switches equipment and increase versa-
Fits M-105 & F-110 Fiber Aligners tility in automation applica- Stepper-motor-driven versions
>5,000 Hours MTBF tions. of the M-231 are available on
request.
Integrated Line Drivers
For higher loads and travel
The M-231 is an ultra-high-res- tion construction allowing for Each actuator includes an inte- ranges, refer to the M-230 and
olution linear actuator provid- minimum incremental motion gral 0.5 m cable with 15-pin M-235 on pages 7-78 and 7-82.
ing linear motion up to 17 mm of 100 nanometers at speeds
with sub-micron resolution in a up to 2.5 mm/sec.
compact package. It consists of
a leadscrew which is driven by
a closed-loop DC motor/gear-
head combination with motor-
shaft-mounted, high-resolution
encoder (2048 counts/rev.).
Upgrade for Manual Aligners

The M-231 was especially de-
signed to fit existing manual M-231 mounted on
translation stages (e.g. M-105, M-105 XYZ positioning
see page 7-30) and F-110 piezo- systems
electric fiber alignment sys-

tems (see page 8-24 in the
“Photonics” section) as a direct Technical Data
replacement for a manual Models M-231.17 Units Notes see p. 7-106
micrometer. Travel range 17 mm
Design resolution 0.007 µm A3
M-231 actuators provide a cost-
Min. incremental motion 0.1 µm A4
effective solution in industrial

Unidirectional repeatability 0.2 µm
and OEM environments. They
Backlash 2 µm
feature a low-stiction low-fric-
Max. velocity 2.5 mm/s
Application Examples Max. lateral force 0 N (at tip)
Encoder resolution 2048 counts/rev.
Photonics packaging
Drive screw pitch 0.4 mm/rev.
Fiber alignment Gear ratio 28.44444:1
Quality control Nominal motor power 2 W

Motor voltage 12 V
Test equipment M-231, dimensions (in mm). Weight 0.17 kg
Cable length: 500 mm, 15-pin, sub-D
Metrology connector with integrated line drivers
Recommended motor C-843, C-848, D2
controllers C-862
a-6
M-232 Servo Motor Actuator

Compact, High-Resolution, Closed-Loop DC-Mike Actuator
M-232.17
Compact DC-Mike Actuator,
17 mm, Limit Switches
Integrated Line Drivers
M-232.17 high-resolution DC-Mike actuator

Each actuator includes an inte-
mounted on M-105 translation stage gral 0.5 m cable with 15-pin
sub-D connector and a 3 m
extension cable. The connector
17 mm Travel Range features integrated line drivers
0.1 µm Minimum Incremental Motion for cable lengths up to 10
meters between actuator and
Velocity up to 2.5 mm/sec.
controller.
Closed-Loop DC Motor
Compatible with Leading Industrial Motion Controllers Stepper-motor-driven versions
Integrated Hall-Effect Limit and Origin Switches of the M-232 are available on
Fits M-105 & F-110 Fiber Aligners request. For higher loads and
>5,000 Hours MTBF travel ranges refer to the M-230
and M-235 datasheets on
pages 7-68 and 7-72.
The M-232 is an ultra-high-res- environments. They feature a Index
olution linear actuator provid- low-stiction, low-friction con-

ing linear motion up to 17 mm struction allowing for mini-
with sub-micron resolution in a mum incremental motion of
compact package. It features a 100 nanometers at speeds of
space-saving design with a up to 2.5 mm/sec.
leadscrew side-by-side to a
closed-loop DC motor / gear- Non-Contact Limit and Origin
M-232,
head combination and a high- Switches dimensions
(in mm).
resolution encoder (2048 Integrated, non-contact, high- Cable length:
counts/rev.). precision Hall-effect origin and 500 mm,
limit switches, protect your 15-pin sub-D
Upgrade for Manual Stages connector with
equipment and increase versa- integrated line
The M-232 was especially de- tility in automation applications. drivers.
signed to fit existing manual
translation stages (e.g. M-105) Technical Data
and F-110 piezoelectric fiber Models M-232.17 Units Notes see p. 7-106
alignment systems as a direct
Travel range 17 mm
replacement for a manual Design resolution 0.007 µm A3
micrometer. M-232 actuators
Min. incremental motion 0.1 µm A4
provide a cost-effective solu-
Unidirectional repeatability 0.2 µm

tion in industrial and OEM
Backlash 2 µm
Max. velocity 2.5 mm/s
Application Examples Max. lateral force 0 N (at tip)
Encoder resolution 2048 counts/rev.
Photonics packaging Drive screw pitch 0.4 mm/rev.
Fiber alignment Gear ratio 28.44444:1

Nominal motor power 2 W
Quality control
Motor voltage 12 V
Test equipment Limit switches Hall-Effect
Weight 0.17 kg
Metrology
Recommended motor controllers C-843, C-848, C-862 D2
a-7
M-235 Servo & Stepper Motor Actuators
Heavy-Duty High-Resolution Closed-Loop DC-Mike & Stepper Actuators
high-speed positioning appli-
cations.
M-235.2DG
Heavy-Duty, High-Resolution DC-
Non-Contact Limit and Origin
Mike Actuator, 20 mm, Ballscrew,
Switches Limit Switches
Integrated, non-contact, high- M-235.2VG
precision Hall-effect origin and Vacuum Version of M-235.2DG
limit switches, protect your
M-235.2DD
equipment and increase versa- Heavy-Duty, High-Resolution DC-
tility in automation applica- Mike Actuator, Direct Drive, 20 mm,
tions. Ballscrew, Limit Switches
M-235.2VD
M-235.2DG (top) and Integrated Line Drivers Vacuum Version of M-235.2DD
M-235.5DG (bottom) high-
M-235 actuators with DC
resolution DC-Mike, ballscrew. M-235.22S
motors include an integral Heavy-Duty, High-Resolution
0.5 m cable with 15-pin sub-D Stepper-Mike Actuator, 20 mm,
connector and a 3 m extension Ballscrew, Limit Switches
20 mm or 50 mm Travel Range
cable. The connector features
0.1 µm Minimum Incremental Motion
integrated line drivers for cable
M-235.5DG
Heavy-Duty, High-Resolution DC-
High-Speed Direct Drive Option lengths up to 10 meters Mike Actuator, 50 mm, Ballscrew,
120 N Push/Pull Load between actuator and con- Limit Switches
100 N Lateral Load Limit troller. M-235.5VG

Preloaded Ultra-Low-Friction Ball Screw with Vacuum Version of M-235.5DG
A screw-on ball tip and a flat tip
Non-Rotating Tip M-235.5DD
are included. Heavy-Duty, High-Resolution
Closed-Loop DC Motors and Stepper Motors DC-Mike Actuator, Direct Drive,
Compatible with Leading Industrial Motion Controllers For smaller sizes and lower- 50 mm, Ballscrew, Limit Switches
duty applications, refer to the
Integrated Hall-Effect Limit & Origin Switches M-235.5VD
M-230, M-231, M-232 and
>20,000 Hours MTBF M-227 and M-168 see p. 7-76,
Vacuum Version of M-235.5DD
Vacuum Versions p. 7-78, p. 7-80, p. 7-81, and M-235.52S
p. 7-84. Heavy-Duty, High-Resolution
Stepper-Mike Actuator, 50 mm,
The M-235 is an ultra-high-res- Non-Rotating Tip Ballscrew, Limit Switches
olution linear actuator provid- Compared to conventional ro- Higher speed M-235 versions on
ing linear motion of up to 50 tating-tip micrometer drives, request
mm with sub-micron resolu- the non-rotating-tip design Ask about custom designs!
tion in a compact package. It offers several advantages:
consists of a preloaded ultra-
low-friction, heavy-duty ball- Elimination of torque-
screw which is driven by a induced positioning errors
2-phase stepper motor or a Elimination of sinusoidal
closed-loop DC motor with mo- motion errors
tor-shaft-mounted, high-reso- Elimination of wear at the
lution encoder (2048 counts/
contact point
rev.). Elimination of tip-angle-
dependent wobble
M-235 actuators provide a cost-
Quality control effective solution for heavy-
duty industrial and OEM envi-
Test equipment
ronments. They feature an
Flexible automation extremely low stiction, low-fric-
Metrology tion construction, allowing for
minimum incremental motion
Photonics packaging as low as 100 nanometers. The M-235.52S high-resolution
M-235.5DD version is equipped Stepper-Mike, 50 mm travel range, ballscrew.
Fiber alignment
with a direct drive motor for
a-8
Ball tip (included) M-235.22S and M-235.52S dimensions (in mm). M-235.2DD, .2DG and M-235.5DD,
.5DG. Cable length: 500 mm, 15-pin
sub-D connector with integrated line
drivers. Dimensions in mm.
Technical Data
Models M-235.2DG M-235.2DD M-235.22S M-235.5DG M-235.5DD M-235.52S Units Notes
see page 7-106
Travel range 20 20 20 50 50 50 mm
Design resolution 0.016 0.5 0.05 0.016 0.5 0.05 µm A3
Min. incremental motion 0.1 0.5 0.1 0.1 0.5 0.1 µm A4
Unidirectional repeatability 0.1 0.5 0.2 0.1 0.5 0.2 µm
Bidirectional repeatability 1 1 1 1 1 1 µm
Max. velocity 3 >30 20 3 >30 20 mm/s
Max. push/pull force 120 >50 100** 120 >50 100** N
Max. lateral force (at tip) 100 100 100 100 100 100 N
Encoder resolution 2048 2048 - 2048 2048 - counts/rev.
Motor resolution - - 20,000* - - 20,000* steps/rev.
Ballscrew pitch 1 1 1 1 1 1 mm/rev.
Gear ratio 29.6:1 - - 29.6:1 - -
Nominal motor power 4 17 -* 4 17 -* W
Motor voltage 12 12 24 * 12 12 24 * V
Origin and limit switches Hall-Effect Hall-Effect Hall-Effect Hall-Effect Hall-Effect Hall-Effect
Mass 0.55 0.50 0.65 0.7 0.65 0.8 kg
Recommended motor controllers C-843, C-848, C-862 C-600, C-630 C-843, C-848, C-862 C-600, C-630 D2
C-862 C-862
C-815.38 motor cable included: 3 m, sub-D, 15/15 pin (m/f).
* 2-phase stepper, 24 V chopper voltage, max. 0.8 A / phase, 20,000 microsteps with C-600, C-630 controllers. ** at up to 10 mm/sec
a-9
M-238 Servo Motor Actuators
High-Load, High-Resolution Linear Actuator with Optional Linear Encoder
high-efficiency PWM (pulse
width modulation) servo-
amplifier mounted side-by- M-238.5PG
Heavy-Duty DC-Mike Actuator,
side with the DC-Motor and 400 N, 50 mm, ActiveDrive™
offers several advantages:
M-238.5PL*
Heavy-Duty DC-Mike Actuator,
Increased efficiency, by 400 N, 50 mm, ActiveDrive™,
eliminating power losses Direct-Metrology Encoder
between the amplifier and
* Ask for availability in your region
motor
Reduced cost of ownership
and improved reliability,
because no external driver Ballscrews for High Speed,
is required Precision and Lifetime
Elimination of PWM amplifi-
The precision-ground ball-
er noise radiation, by
screw is maintenance-free and
M-238.5PL Heavy-Duty Mike actuator (with CD for size comparison) mounting the amplifier and
preloaded to eliminate mecha-
motor together in a single,
nical play. Its significantly re-
electrically shielded case
duced friction, compared to
High Load Capacity to 400 N
conventional leadscrews, allows
Travel Range 50 mm Non-Rotating Tip
for higher velocity, lower
Resolution to 0.1 µm Compared to conventional power consumption and longer
Max. Velocity 30 mm/s rotating-tip micrometer drives, lifetime.
the non-rotating-tip design
Preloaded Frictionless Ball Screw
offers several advantages:
Optional 0.1 µm Direct-Metrology Linear Encoder for Limit and Reference Switches
Exceptional Precision For the protection of your
Elimination of torque-
MTBF >20,000 h induced positioning errors
equipment, non-contact Hall-
effect limit and reference
Vacuum-Compatible Versions Available for 10-6 hPa Elimination of sinusoidal
switches are installed. The
motion errors
direction-sensing reference
The M-238 is a high-load, high- Direct Metrology Linear Elimination of wear at the
switch supports advanced
precision actuator providing Encoder to Compensate contact point
automation applications with
linear motion up to 50 mm, a Mechanical Play Elimination of tip-angle
high precision.
load capacity to 400 N and high The M-238.5PL model is dependent wobble
velocity to 30 mm/s. It consists equipped with a non-contact,
of a low-friction, heavy-duty The lateral guiding of the tip
release. The newest release is available for download at www.pi.ws. R1 06/08/24.0
optical, linear encoder (direct

ballscrew, driven by a closed- metrology) with an output withstands lateral forces of up
loop, ActiveDrive™ DC-Motor resolution of 0.1 µm. Because to 100 N.
with gearbox. The M-238 the encoder measures the actu-
is therefore well suited for al position of the non-rotating
high duty-cycle operation in actuator tip, drive-train errors
industrial environments. An like backlash and elastic defor-
optional linear encoder pro- mations are eliminated. A
vides exceptional accuracy and lower-cost version with a ro-
repeatability. tary encoder is available as
model number M-238.5PG.
Quality assurance testing ActiveDrive™ DC-Motor
Testing equipment DC motor drives offer several

advantages, such as high
Precision machining dynamics, high torque at low
Astronomy rotational speed, low heat
and low vibration.
Flexible automation
Metrology The ActiveDrive™ design,
M-238 dimensions in mm
developed by PI, features a
a-10
M-238.5PL velocity at 30 mm/s is highly constant.
M-238.5PL repeatability is better than 0.3 µm.
The settling time for a 30 mm step is less than 1.5 seconds.
Technical Data
Models M-238.5PG M-238.5PL Units Tolerance
Active axes X X
Motion and positioning
Travel range 50 50 mm
Integrated sensor Rotary encoder Linear encoder
Sensor resolution 4000 cts/rev. 0.1 µm
Design resolution 0.13 0.1 µm typ.
Min. incremental motion 0.5 0.3 µm typ.
Backlash 3 1 µm typ.
Unidirectional repeatability 1 0.3 µm typ.
Max. velocity 30 30 mm/s
Origin repeatability 1 1 µm ±20 %
Spindle pitch 2 2 mm/rev.
Gear ratio 3.71:1 3.71:1
Push / pull force 400 400 N Max.
Lateral force 100 100 N Max.
Drive properties
Motor type DC-motor, ActiveDrive™ DC-motor, ActiveDrive™
Operating voltage 24 (PWM) 24 (PWM) V
Electrical power 80 80 W nominal
Miscellaneous
Operating temperature range -10 to 50 -10 to 50 °C
Material Al (anodized), steel Al (anodized), steel
Mass 2.4 2.4 g ±5 %
Cable length 3 3 m ±10 mm
Connector D-Sub 15 (m) D-Sub 15 (m)
Recommended controller/driver C-862, C-843 C-862, C-843
a-11
M -122 Servo Motor Linear Slide

Fast Miniature Linear Translation Stage with Integrated Optical Linear Encoder
M-122.2DD Accessories
High-Precision Translation Stage, M-122.AP1
25 mm, Direct-Drive DC Motor, Angle bracket for vertical
Ballscrew mounting of M-122 stages
Ask about custom designs
The M-122.2DD miniature
translation stage features
an optical linear encoder
with 0.1 µm position reso-
lution and a highly effi-

cient ballscrew
Travel Range 25 mm
0.1 µm Optical Linear Encoder for Highest
Accuracy & Repeatability
Min. Incremental Motion to 0.2 µm
Max. Velocity 20 mm/s
Cross-Roll Bearings
Recirculating Ball Screw Drives Provide High
Speeds & Long Lifetimes
M-122.2DD dimensions in mm,
The M-122 palm-top-sized trans- efficiency than leadscrews, and 3 m cable, Sub-D connector 15-pin
lation stage combines small allows maintenance-free, high
dimensions, high speeds and duty-cycle operation at high Technical Data
very high accuracy at a compet- velocities up to 20 mm/sec. M-122.2DD
itive price. It features a space- Active axes X
saving, folded drive train with XY and XYZ Combinations Motion and positioning
the servo motor and drive screw M-122 stages can be combined Travel range 25 mm
side-by-side. Equipped with a to very compact XY and XYZ Integrated sensor Linear encoder
non-contacting optical linear systems. The M-122.AP1 moun- Sensor resolution 0.1 µm
encoder and a preloaded, preci- ting bracket is available to Design resolution 0.1 µm
sion-ground, ball-screw, these mount the Z-axis. Min. incremental motion 0.2 µm
stages can provide much higher Backlash 0.2 µm
accuracy and better repeatabili- Limit and Reference Switches Unidirectional repeatability 0.15 µm
Pitch ±150 µrad
release. The newest release is available for download at www.pi.ws. 07/06/019.0
ty than conventional stepper For the protection of your equip-

Yaw ±150 µrad
motor stages or rotary encoder- ment, non-contact Hall-effect
Max. velocity 20 mm/s
equipped servo motor stages. limit and reference switches are
Origin repeatability 1 µm
installed. The direction-sensing Mechanical properties
Low Friction, High Speed, reference switch supports Drive screw Recirculating ballscrew
Maintenance-Free advanced automation applica- Thread pitch 0.5 mm
Due to its low-friction, the back- tions with high precision. Stiffness in motion direction 0.25 N/µm
lash-free ball screw yields sig- Max. load 50 N
Low Cost of Ownership Max. push/pull force 20 N
nificantly higher mechanical
The combination of these posi- Max. lateral force 25 N
Application Examples tioners with the networkable, Drive properties
single-channel C-862 Mercury™ Motor type DC motor
Photonics packaging servo motor controller (s. p. 9-6) Operating voltage 0 to ±12 V
Electrical power 2.25 W
Fiber positioning offers high performance for a
very competitive price in both
Metrology single- and multiaxis configura-
Miscellaneous
Operating temperature range -20 to +65
Quality assurance testing tions. For multiaxis applica-
Material Aluminum, steel
tions, the C-843 PC plug-in con-
Testing equipment Dimensions 86 x 60 x 20.5 mm
troller board with on-board Mass 0.22 kg
Micromachining servo amplifiers (s. p. 9-8) is Recommended controller/driver C-862 (single-axis)
another cost-effective alternative. C-843 PCI board (up to 4 axes)
a-12
M-413 Servo & Stepper Motor Linear Slides
High-Load Translation Stages for Cost-Sensitive Precision Positioning Applications
3 Linear Translation Stage with leadscrew,
120 mm wide
4 Precision-Linear Stage with ball screw,
120 mm wide PD ActiveDrive™ DC Motor
(includes 24 V power
supply)
M-41 . DG DC Motor Gearhead

2S 2-Phase Stepper Motor
VP ActiveDrive™ DC Motor
1 Travel Range 100 mm
(includes 24 V power
2 Travel Range 200 mm supply), Vacuum Compati-
3 Travel Range 300 mm ble to 10-6 hPa
M-413 linear stage versions (from right: the M-413.1PD, M-413.2PD and
M-413.3PD provide travel ranges from 100 to 300 mm (CD for size comparison)
VG DC Motor Gearhead, Vacu-
um Compatible to 10-6 hPa
For Cost-Sensitive Precision Positioning Applications are polished to guide the car- together in a single, electri-
Travel Ranges 100 to 300 mm riage with optimum straight- cally shielded case
Resolution to 0.018 µm ness and flatness.
M41x.xDG models are equipp-
Min. Incremental Motion to 0.1 µm Low Cost of System ed with a DC motor with a low-
Preloaded Precision Leadscrew or Recirculating Ball Screw Ownership backlash gearhead and a shaft-
Drives Provide High Speeds & Long Lifetimes The combination of these mounted optical encoder to
Stress-Relieved Aluminum Base for Highest Stability stages with the networkable give a minimum incremental
Vacuum-Compatible Versions Available single-axis C-862 Mercury™ motion of 0.1 µm.
M-413 and M-414 Versions for Reduced Load Requirements (s. p. 9-6) and C-663 Mercury™ M-41x.x2S models feature a
Step controllers offers high per- cost-effective direct-drive,
The M-413 and M-414 linear ture a low-friction ball screw formance for a very competi- 2-phase stepper motor, provid-
translation stage series provide offering a minimum incremen- tive price in both single and ing very smooth operation and
cost effective solutions for pre- tal motion down to 0.1 µm. multiaxis configurations. Alter- a resolution of 0.2 µm.
cision positioning of higher Three motor drive options natively, the C-843 motion con-
loads up to 50 kg over travel allow the optimum adaptation troller PCI card with on-board Limit and Reference Switches
ranges up to 300 mm. to the requirements of different servo amplifiers (!) is available. For the protection of your
They are designed with a preci- automation applications. equipment, non-contact Hall-
sion-machined, high-density, M-413s and M-414s are avail- Three Motor Drive Options effect limit and reference
stress-relieved aluminum base able in 3 lengths providing trav- M-41x.xPD high-speed versions switches are installed. The
for exceptional stability and el ranges from 100 to 300 mm. come equipped with the high- direction-sensing reference
robustness. The highly precise The stages can carry up to performance ActiveDrive™ sys- switch supports advanced
M-413 drive includes a preload- 50 kg and push/pull up to 50 N. tem. The ActiveDrive™ design, automation applications with
ed leadscrew, providing a mini- Special versions for vacuum developed by PI, features a high precision.
mum incremental motion of applications are available (see high-efficiency PWM (pulse
0.2 µm. ordering information). width modulation) servo-ampli- Other Family Members
fier mounted side-by-side with The M-403/M-413 and M-404/
High Resolution Ball Screws & the DC motor and offers sever- M-414 series of linear stages
Lead Screws Maintenance-Free, High al advantages: form a modular system. The
For higher velocities and a long Guiding Precision
Increased efficiency, by elim- M-403 is the basic family, pro-
lifetime the M-414 versions fea- All models are equipped with viding travel ranges from
inating power losses be-
high-precision linear guiding 25 to 200 mm. M-413 is
Application Examples tween the amplifier and
rails and recirculating ball designed for higher loads with
motor
Automation bearings. The recirculating ball travel ranges from 100 to 300
bearings are maintenance free Reduced cost of ownership
mm. The M-404 and M-414
R&D and immune to cage migration. and improved reliability,
stages have the same travel
The choice of components and because no external driver is
Semiconductor technology ranges and load capacities, but
careful mounting guarantees required
Metrology offer higher precision and more
high load capacity, longer life- Elimination of PWM amplifi- speed.
Quality assurance testing time and high guiding accura- er noise radiation, by moun-
cy. Additionally the bearings ting the amplifier and motor
a-13
M-413 and M-414

dimensions in mm,
Sub-D connector
15-pin, 3 m cable
Polished bearings provide excellent guiding accuracy: better than

15 arcseconds (75 µrad) over 200 mm of travel, as shown above for the
M-414 stage
M-414.1xx M-414.2xx M-414.4xx M-414.xPD M-414.xDG M-414.x2S

M-413.1xx M-413.2xx M-413.4xx F 120 133 105.5
A 255 355 455 G 59.5 56 59.5
B 65 115 165
C 59.5 109.5 159.5 M-413.xPD M-413.xDG M-414.x2S
D 54 (±50) 104 (±100) 154 (±150) F 120 122 105.5
E 40 90 140 G 59.5 56 59.5
Technical Data
M-414.xPD M-414.xDG M-414.x2S M-413.xPD M-413.xDG M-413.x2S Units

Travel range for all models: 100 / 200 / 300 mm (see Ordering Information)
Integrated sensor Rotary encoder Rotary encoder — Rotary encoder Rotary encoder —
Sensor resolution 4000 2000 — 4000 2000 — cts/rev.
Design resolution 0.5 0.023 0.31 0.25 0.018 0.16 µm
Min. incremental motion 0.5 0.1 0.4 0.25 0.2 0.2 µm
Backlash 0.5 4 2 6 10 6 µm
Unidirectional repeatability 0.5 1 1 1 1 1 µm
Pitch 100 100 100 300 300 300 µrad
Yaw 100 100 100 300 300 300 µrad
Max. velocity 100 3 6 10# 2.5 3 mm/s
Origin repeatability 1 1 1 1 1 1 µm
Spindle Recirculating Recirculating Recirculating Leadscrew Leadscrew Leadscrew
ballscrew ballscrew ballscrew
Spindle pitch 2 2 2 1 1 1 mm
Gear ratio — 42.92063:1 — — 28.44444:1 —
Motor resolution — — 6400* — — 6400* steps/rev.
Stiffness in motion direction 6000 6000 6000 6000 6000 6000 N/µm
Max. load 500 500 500 500 500 500 N
Max. push/pull force 50 50 50 50 50 50 N
Max. lateral force 200 200 200 200 200 200 N
Drive properties
Motor type ActiveDrive™ DC motor, 2-phase ActiveDrive™ DC motor, 2-phase
DC motor gearhead stepper motor* DC motor gearhead stepper motor*
Operating voltage 24 0–12 24 24 0–12 24 V
Electrical power 70 3.6 4.8 70 3.6 4.8 W
Torque 80 3 200 80 3 200 Ncm
Limit and reference switches Hall-effect Hall-effect Hall-effect Hall-effect Hall-effect Hall-effect
Miscellaneous
Operating temperature range -20 to +65 -20 to +65 -20 to +65 -20 to +65 -20 to +65 -20 to +65 °C
Material for all models: Aluminum (black anodized)
Mass (depends on dimensions/travel range) 4.4 / 5.4 / 6.6 4.2 / 5.2 / 6.4 4.4 / 5.4 / 6.6 4.4 / 5.4 / 6.6 4.2 / 5.2 / 6.4 4.4 / 5.4 / 6.6 kg
Recommended controller/driver C-862 (single-axis)C-862 (single-axis)C-663 (single-axis) C-862 (single-axis) C-862 (single-axis)C-663 (single-axis)
C-843 PCI board C-843 PCI board C-843 PCI board C-843 PCI board
(up to 4 axes) (up to 4 axes) (up to 4 axes) (up to 4 axes)
*2-phase stepper motor, 24 V chopper voltage, max. 0.8 A/phase, 400 full steps/rev., motor resolution with C-663 stepper motor controller
#
Max. recommended velocity
a-14
M-674 Ceramic Ultrasonic Motor Actuators
PILine® RodDrive Integrated Piezo Linear Motor Drive
Working Principle
The M-674 PILine® RodDrive, RodDrives employ a patented
shown with C-184 OEM and M-674.164
C-185 bench-top driver elec- ultrasonic drive developed by PILine® RodDrive, 50 mm, 7 N
tronics, provides 7 N pushing PI. The highly compact, inte-
force and travel ranges of 50, M-674.264
grated P-664 piezomotors can
100 and 150 mm PILine® RodDrive, 100 mm, 7 N
provide velocities of 450 mm/s,
together with high resolution M-674.364
PILine® RodDrive, 150 mm, 7 N
and holding force. The maxi-
mum travel is determined by
the length of the rod and
is basically unlimited. Cus-
tomized adaptations in terms
of operating and holding force Closed-Loop Operation:
are feasible by varying type Optimized for High Velocity
and number of motors used. and Rapid Step/Settling
Because the integrated ceramic Together with a position sen-
motors are preloaded against sor, RodDrives can be operat-
the rod, RodDrives resist ed in closed-loop with the
motion with an intrinsic hold- C-866.D64 piezo motor con-
ing force when at rest. The troller. This specialized servo-
result is very high position sta- controller also integrated the
Drive-Component for Integration into Micropositioning bility without the heat dissipa- motor drive electronics and
Systems tion common with convention- enables highly constant speeds
Travel Ranges to 150 mm al linear motors. Furthermore, up to 350 mm/s with very short
Push/Pull Forces to 7 N there are no gears, leadscrews settling times (10´s of msecs).
Min. Incremental Motion to 0.05 µm or other mechanical compo- RodDrives can also be operat-
Velocity to 450 mm/s nents to contribute play or ed with conventional servo-
backlash. controllers. In this case, the
Self-Locking at Rest
C-185 (to be ordered separate-
Variety of Drivers / Controllers ly) external drive electronics is
PILine® piezomotors require a required which accepts a ±10 V
M-674 PILine® RodDrives repre- They consist of a rod which is drive electronics for exciting analog signal from the con-
sent a level of integration be- preloaded by piezo linear mo- the ultrasonic oscillations. The troller.
tween PILine® OEM piezo linear tors from two sides. Depend- drive electronics is available as
motors such as P-664 and guiding on the way of integration, OEM board, stand-alone device Note
release. The newest release is available for download at www.pi.ws. R2 07/08/21.0.5
ed micropositioning systems either the rod or the motor or integrated inside a closed- The products described in this
such as the M-682 series block is coupled to the moving loop motion controller and document are in part protected
stages. platform. therefore not included in the by the following patents:
RodDrives may replace classi- delivery. US-Pat. No. 6,765,335
cal drive elements like rotary Advantages of PILine®
motor/leadscrew assemblies, Micropositioning Systems
or magnetic linear drives inte- The ultrasonic piezoceramic
grated into a micropositioner. drives used in PILine® micro-
positioners have a number
of advantages over classical
Application Examples drives:
System Integration for Higher Accelerations, up to

Micropositioning Products 10 g
Speeds up to 500 mm/s
Automation
Small Form Factor
Handling Self-Locking When Powered
Down
Micromanipulation
No Shafts, Gears or Other
Biotechnology Rotating Parts
Metrology Non-Magnetic and Vacuum
Constancy of closed-loop velocity at 200 mm/s of an integrated M-674 RodDrive
Compatible Drive Principle
b-1
L1
L2
1
52
,1R
9,7
5
L3
38
6,1
83
,45
R2
02
3,1
4,4
2,0
The M-674 integrated into a
Micropositioning Stage
26,1
0D 0 0 0

/
/
/
Dimensions of the M-674.00 RodDrive in mm
Technical Data
Models M-674 M-674 M-674 Units Tolerance
M-674.164 M-674.264 M-674.364
Travel range 50 100 150 mm x
Minimum incremental motion, open-loop 0.05* 0.05* 0.05* µm typ.
Max. velocity 450 450 450 mm/s
Max. acceleration 20 20 20 m/s
Stiffness when powered down 5** 5** 5** N/µm ±10 %
Holding force when powered down 7 7 7 N max.
Push / pull force 7 7 7 N max.
Drive properties
Resonant frequency 155 155 155 kHz, typ.
Integrated piezo motor 2 x PILine® P-664 2 x PILine® P-664 2 x PILine® P-664
(Dual Motor) (Dual Motor) (Dual Motor)
Motor voltage range 200 (peak-peak)*** 200 (peak-peak)*** 200 (peak-peak)*** V
70 (RMS)*** 70 (RMS)*** 70 (RMS)***
Operating voltage drive electronics 12 12 12 V
Max. elec. power consumption 15 15 15 W
drive electronics
Miscellaneous
Operating temperature range -20 to +50 -20 to +50 -20 to +50 °C
Body material PEEK-PTFE PEEK-PTFE PEEK-PTFE
Mass 0.1 0.12 0.14 kg ±5 %
Cable length 1.5 1.5 1.5 mm ±10 mm
Connector LEMO connector LEMO connector LEMO connector LEMO connector
Recommended controller/driver C-184.D64 OEM drive C-184.D64 OEM drive C-184.D64 OEM drive
electronics board electronics board electronics board
C-185.D64 driver C-185.D64 driver C-185.D64 driver
C-866.D64 Controller for C-866.D64 Controller for C-866.D64 Controller
closed-loop operation closed-loop operation closed-loop operation
* The minimum incremental motion is a typical value that can be achieved in the open-loop mode of a piezomotor stage.
To reach the specs it is important to follow the mounting guidelines of the OEM-motors.
** Stiffness at 25 °C.
*** The operationg voltage is supplied by the drive electronics.
b-2
P-652 Miniature Ultrasonic Motor Actuator
Cost-Effective PILine® Piezo Ceramic Linear Drive for High Volume Applications
P-652
Miniature PILine® OEM-Drive
Custom versions on request
without the heat dissipation

common in conventional linear
motors. During operation, the
oscillating piezoceramic moves
the slider over the length of the
motor. There are no gears,
leadscrews or other mechani-
cal components to contribute
play or backlash.
P-652.01 OEM-Drive with customized mounting interface
(golf ball for size comparison) Operation with conventional
controllers
The high-frequency oscilla-
Self-Locking, No Lubricants, No Classical Bearings tions for the PILine® motors are
Cost-Effective, High-Volume-Production Drive created by driver electronics,
which can in turn be controlled
Velocity to 80 mm/s
by short pulses as low as 3 V.
Generated Forces up to 0.2 N
The output frequency of the
Piezo Micromotor: only 9x5.7x2.2 mm driver electronics self-adjusts
Travel Range 3.2 mm to the resonant frequency of
the motor ceramic, so no indi-
vidual tuning is necessary.
Notes
P-652 PILine® OEM piezomotor stator, affixing the load to the The products described in this
drives are ideal for OEM appli- slider and making the electrical document are in part protected
cations where space is limited connections. by the following patents:
and moved masses are small. The motors are designed for German Patent
These minute linear position- moving small objects such as No. 102004059429
ers can be used to replace clas- glass fibers, optical, micro- or
International Patent
sical drive elements like minia- electro-mechanical elements No. WO2006/027031A1
turized motor/spindle systems fast and precisely.
or other linear motors, which
P-652 outclasses with its speed Working Principle
of up to 80 mm/s. The basic P-652 drives employ a new,
advantages PILine® piezo linear patented, ultrasonic piezomo-
motors offer compared to clas- tor drive developed by PI. The
sical drives are: highly compact, integrated
piezomotor can provide accel-
High velocities
erations of up to 2.5 g and
Compact design
velocities of up to 80 mm/s
High push/pull and holding
together with high position res-
forces relative to the drive
olution and—considering its
size
length of only 9 mm—high
holding force. Because the
The integration of P-652 in an ceramic stator is pressed
application is simple, because against the slider, piezomotor
the moving slider and the piezo drives resist motion with an
actuator are delivered assem- intrinsic holding force when
bled as a unit. All that remains the unit is at rest. The result is
is to provide for mounting the very high position stability
b-3
5,7 2,2
6,1R 3,9 1,5
57,5
2,3
9
2,92
0,1
1
P-652.01 OEM-Drive, dimensions in mm.
Technical Data
P-652
Travel range 3.2 mm X
Minimum incremental motion, open-loop 0.1 µm* typ.
Typ. step size, open-loop 13 µm** typ.
Max. velocity 80 mm/s max.
Typ. velocity 25 mm/s** typ.
Holding force when powered down 0.2 N max.
Push / pull force 0.11 N* max.
Drive properties
Resonant frequency 470 kHz
Integrated piezo motor PILine® P-652
Driver electronics operating voltage 2.8–5.0 V
Driver electronics, max. elec. power consumption 500 mW
Driver electronics, current consumption 55 mA
Miscellaneous
Mass 0.6 g ±5 %
Recommended controller/driver C-180K001, dimensions 25 x 10 x 3 mm
Dimensions 9 x 5.7 x 2.2 mm
* The minimum incremental motion cited is a typical value that can be achieved in open-loop mode. To reach this specification,
it is important to follow the mounting guidelines for these motors.
** Pulsed operation, 1 ms pulse length, 50 % on time
b-4
M-664 Ceramic Ultrasonic Motor Linear Slide
Low-Profile High-Speed PILine® Translation Stage with Linearencoder
No Shafts, Gears or Other Ordering Information
Rotating Parts
M-664.164
Non-Magnetic and Vacuum- PILine® Micro Positioning Stage
Compatible Drive Principle with P-664 Piezo Linear Motor,
25 mm, 6 N
Optimized Controller and Ask about custom designs!
Drive Electronics
PILine® motors require a spe- PILine® drives at high resolu-
cial drive electronics to gener- tions.
ate the ultrasonic oscillations
for piezoceramic element. For Optionally, for use with third
optimum performance the party servo controllers, the
highly specialized C-866 mo- C-185 analog drive electronic
tion controller is recommend- (stand-alone unit) is available.
ed. This sophisticated con- It controls the motor speed by
troller also integrates the drive an analog ±10 V signal. For
Fast and compact M-664 piezo translation stage with linear encoder electronics. Furthermore, the optimum performance this
controller has a number of spe- driver must be tuned together
cial features, including dy- with the stage and should be
Travel Range 25 mm namic parameter switching for ordered at the same time as
the motor/stage.
Max. Velocity 400 mm/s an optimized high-speed mo-
Ultra-Low Profile, 15 mm tion and settling behavior to
Notes
take into account the motion
Direct Metrology Linear Encoder with 0.1 µm Resolution
characteristics typical of The products described in this
High Guiding Accuracy with Crossed Roller Bearings
piezomotors. The broad-band document are in part protected
Compact XY Combinations encoder input (35 MHz) sup- by the following patents:
Piezo Linear Motor with 6 N Drive Force ports the outstanding high US Pat. No. 6,765,335
Self Locking at Rest accelerations and velocities of German Patent No. 10154526
M-664 micropositioning sys- For improved guiding accura-

7,5
tems are low-profile, high- cy, the M-664 uses two crossed
accuracy translation stages roller bearings mounted on

2,5
15
with piezo linear encoders. The ground aluminum profiles. The

5
M-664 stage is next-larger in integrated P-664 PILine® linear 40

4,3
the series of piezomotor-driven motor can generate forces up
stages of which the M-663 is to 6 N and maximum closed- 60
the smallest. loop velocities to 400 mm/s 50
over a 25 mm travel range. 25
Application Examples 12
Advantages of PILine ®
Biotechnology
Micropositioning Systems
Micromanipulation
The ultrasonic piezoceramic
Microscopy drives used in PILine® micro-
positioners have a number
Quality assurance testing
4x M3 3
of advantages over classical

90
75
20
63
Metrology drives:
Mass storage device Higher Accelerations,
testing up to 10 g
Speeds up to 500 mm/s
R&D Small Form Factor
Photonics packaging Self-Locking When Powered
M-664 dimensions in mm
Down
b-5
PILine® Micropositioning stages: M-682, M-664 and M-663 (from left)
Technical Data
Models M-664.164 Tolerance
Active axes X
Travel range 25 mm
Integrated sensor Linear encoder
Sensor resolution 0.1 µm
Min. incremental motion 0.1 µm typ.
Backlash ±0.2 µm typ.
Unidirectional repeatability 0.2 µm typ.
Pitch ±50 µrad typ.
Yaw ±50 µrad typ.
Max. velocity 400 mm/s
Reference switch repeatability 1 µm typ.
Max. load 25 N
Max. push/pull force 6N
Max. holding force 4N
Drive properties
Motor type P-664 PILine® ultrasonic piezo drive
Operating voltage 168 V (peak-to-peak) *
60 V (RMS) *
Electrical power 10 W ** nominal
Current 800 mA **
Miscellaneous
Material Al (black anodized)
Dimensions 90 x 60 x 15 mm
Mass 0.190 kg ±5 %
Cable length 1.5 m ±10 mm
Connector MDR, 14-pin
Recommended controller/driver C-866.164 single-axis controller/driver
C-185.164 drive electronics
* The stage supply power is drawn from the drive electronics, which runs on 12 V.
** For drive electronics
b-6
N-310 Piezo Stepping Motor Linear Actuator
Compact NEXACT® OEM Piezo Ceramic Stepping Drives with Long Travel Ranges
Self-locking when powered Ordering Information
down; no holding current
N-310.01
Zero backlash, no wear or NEXACT® OEM linear drive,
maintenance, no mechani- 20 mm, 10 N
cal components like gears Ask about custom designs

or leadscrews.
Non-Magnetic and Vacuum
Compatible Operating Prin-
ciple
Working Principle for

Application Flexibility nuts. Therefore, mechanical
NEXACT® PiezoWalk® technolo- limitations such as backlash
gy overcomes the limitations and wear are eliminated and
N-310 Piezo Stepping Motor Linear Actuator of conventional nanoposition- the drive is maintenance-free.
ing drives and combines virtu-
ally unlimited travel ranges Self-Locking PiezoWalk® Piezo
with high stiffness in a very Stepping Drive
20 mm Standard Travel Range small package. Furthermore, NEXLINE® and NEXACT® exhib-
Compact and Cost-Effective Design NEXACT® actuators provide it high stiffness and are self-
0.03 nm Resolution piezo-class resolution (far locking even when powered
below one nanometer) and
To 10 N Push/Pull Force down due to the clamping
millisecond responsiveness.
Low Operating Voltage action of the piezo actuators in
The special drive design
Self Locking, with no Heat Dissipation, Nanometer Stability reduces the operating voltage
the mechanics. This entails
nanometer position stability at
Non-Magnetic and Vacuum-Compatible Working Principle to 40 V and below. rest, with no heat dissipation
or servo-dither.
In operation, piezoceramic
bending elements act on the Controller and Drive
runner, which is connected to Electronics appropriated for
the moving part of the applica- the Application
N-310 NEXACT® PiezoWalk® lin- The N-310 can be operated in tion. The length of the runner
ear drives feature travel ranges open-loop and closed-loop mo- determines the travel range NEXACT® actuators require
of 20 mm and push/pull force de (with the addition of an ex- and can be chosen as required. special drive electronics to
capacities to 10 N in a compact ternal position sensor). A varie- Force capacity, resolution and control the complex stepping
package of only 25 x 25 x 12 mm. ty of NEXACT® controllers facil- velocity are determined by the sequences. The E-860 series
With their high resolution, itates the integration into micro- piezo geometry and drive elec- NEXACT® controllers are avail-
NEXACT® drives, are ideal for or nanopositioning applications. tronics and are scalable. To able in different open-and
high-precision positioning over move the runner over longer closed-loop versions. For
long travel ranges. Advantages of PiezoWalk® distances the steping mode is example, the E-861 includes a
piezo stepping drives used, whereas for distances complete NEXACT® servo-con-
smaller than one step, the lin- troller with low-noise, 24-bit
Application Examples NEXLINE® and NEXACT® drives drivers and a powerful DSP. It
offer several advantages over ear (analog) mode enables
high-dynamics positioning also comes with ample soft-
Semiconductor technology traditional drive technologies:
with resolutions far below one ware for easy integration and
Wafer inspection Resolution in the picometer highly effective computer con-
nanometer.
range trol. For applications which do
Nano lithography
Compact dimensions not require the highest resolu-
Wear and Maintenance-Free
Surface Measurement High drive forces from ten tion lower-priced drive elec-
Technique newtons (NEXACT®) up to In contrast to ordinary DC or tronics, ranging all the way to
Profilometry stepper motor drives, the OEM boards, can be ordered.
several hundred newtons
PiezoWalk® drives effect linear
Microscopy (NEXLINE®)
motion directly, without the The products described in this
High dynamic performance need to transform rotation with document are in part protected
Motion in strong magnetic
with sub-microsecond res- mechanical elements such by the following patents:
fields
ponse as gears, leadscrews and German Patent No. P4408618.0
c-1
0

Translation stage with N-310 NEXACT® drive. The positioner offers 20 mm travel

range with an encoder resolution of 25 nm

Technical Data

Models N-310.01 Tolerance

Active axes X
Travel range ±20 mm
Step size (in step mode) 5 nm to 5 µm
Travel range in analog operation 7 µm max.
Open-loop resolution 0.025 nm typ.
Step frequency 1.5 kHz* max.

Max. speed 10 mm/s* max.
Push/Pull force (active) 10 N max.
Drive properties
Drive type NEXACT® linear drive
Operating voltage -10 V to +40 V
Miscellaneous
Operating temperature range 0 to 50 °C
Body material Stainless steel
Mass 50 g ±5 %
Cable length 1.5 m ±10 mm
Connector NEXACT® linear drive
(D-Sub 15, 3 row)
Recommended controller/driver E-860-series
N-310.01 Actuator, dimensions in mm
* Depending on the control electronics.
c-2
NEXLINE® High-Force OEM Piezo Ceramic Nanopositioning Stepping Drive
all be optimized for a particular
application.
N-111.30
NEXLINE® OEM Nanopositioning
NEXLINE PiezoWalk Piezo-
® ®
Drive, 5 mm, 50 N
ceramic clamping and shear
N-111.3A
elements act directly on a mov- NEXLINE® OEM Nanopositioning
ing runner that is coupled to Drive, 5 mm, 50 N, Closed-Loop,
the moved object. While the 5 nm Resolution
runner can be moved larger Ask about custom designs
distances in step mode, analog
operation over a distance of
less than one step enables
high-dynamics positioning
with resolutions far below one Self-locking when powered
nanometer. The patented down; no holding current
PiezoWalk® overcomes the Zero backlash, no wear or
limitations of conventional maintenance, no mechanical
N-111 compact high-load OEM nanopositioning actuators and components like gears or
nanopositioning actuator
combines long travel ranges leadscrews.
with high resolution and stiff- Non-magnetic and vacuum
ness. compatible operating prin-
5 mm Travel ciple
To 50 N Pull / Push Force and 80 N Holding Force Advantages of PiezoWalk®
Self Locking at Rest, no Heat Generation Piezo Stepping Drives NEXLINE® Actuators are
Non-Magnetic and Vacuum-Compatible Working Principle distinguished by a number of
NEXLINE® and NEXACT® drives unique outstanding features:
offer several advantages over
traditional drive technologies: Cleanroom compatibility
Vacuum compatibility
The innovative N-111 NEX- del. Both can be operated Resolution in the picometer Operation under conditions,
LINE® OEM drives are compact with the sophisticated E-755 range which prohibit usage of
actuators for nanopositioning NEXLINE® motion controller. Compact dimensions magnetic drives
with travel ranges to 5 mm, The N-111.3A is equipped with High drive forces from ten
Notes
high resolution, and generated a 5 nm resolution linear enco- newtons (NEXACT®) up to

forces to 50 N. der for long-range position several hundred newtons The products described in this
control. Due to its low-noise, (NEXLINE®) document are in part protected
release. The newest release is available for download at www.pi.ws. R2 07/08/06.0
Two versions are available, the 24 bit D/A converters, the E-755 High dynamic performance by the following patents:
N-111.3A closed-loop model controller can provide pico- with sub-microsecond res- German Patent No. 10148267
and N-111.30 open-loop mo- meter level resolution in the ponse US Patent No. 6,800,984
highly-dynamic short-range /
dithering mode.
NEXLINE® Working Principle
Semiconductor for Application Flexibility
technology NEXLINE® PiezoWalk® drives
can be used wherever high
Semiconductor testing
loads must be positioned very
Wafer inspection precisely over long distances
Nano lithography and then perhaps subjected to
small-amplitude dynamic ad-
Nano imprint justment, as for active vibra-
Nanometrology tion control. By varying the
combination of longitudinal
Active vibration damping and shear piezo elements, the
Motion in strong step size, dynamic operating Z / tip / tilt platform with NEXLINE® drives and position sensors;
range (analog travel), clamping 300 mm (12”) diameter, 200 N load capacity, 1.3 mm travel range, 10 mrad tilt range
magnetic fields
force, speed and stiffness can
c-3
5,5
64
57,8
6
M3
8 g6
6,5 3,4
3,4 30 2,5x45¡
8
82
61
72
1 2 3 4
38
46
N-111 dimensions in mm
Technical Data
Models N-111.30 N-111.3A Tolerance
Active axes X X
Travel range 5 mm 5 mm
Step size (in step mode) 10 nm to 5 µm 10 nm to 5 µm
Integrated sensor - Linear encoder
Sensor resolution - 5 nm
Analog mode travel range 2.5 µm 2.5 µm Max.
Open-loop resolution 0.025 nm 0.025 nm Typ.
Closed-loop resolution - 5 nm
Step frequency 100 Hz* 100 Hz*
Velocity 0.2 mm/s** 0.2 mm/s**
Stiffness in motion direction 15 N/µm 15 N/µm ±20 %
Push / Pull force (active) 50 N 50 N Max.
Holding force (passive) 80 N 80 N Min.
Drive properties
Drive type NEXLINE® linear drive NEXLINE® linear drive
Operating voltage ±250 V ±250 V
Miscellaneous
Operating temperature range -40 to 80 °C -40 to 80 °C
Mass 115 g 135 g ±5 %
Cable length 1.5 m 1.5 m ±10 mm
Connector Sub-D NEXLINE® connector, Sub-D NEXLINE® connector,
single-channel single-channel; sensor connector
Recommended controller / driver E-755.101: E-755.1A1
* Depends on control electronics
** Depends on control electronics. The maximum speed in step mode is set so as to ensure the highest possible velocity constancy, with no speed
fluctuations while steps are being performed.
c-4
NEXLINE ® High-Force Piezo Ceramic Nanopositioning Stepping Drive
justment, as for active vibra-
tion control. By varying the
combination of longitudinal N-214.00
NEXLINE® High-Load Actuator,
and shear piezo elements, the
20 mm, 200 N, linear encoder,
step size, dynamic operating 5 nm resolution
range (analog travel), clamping
N-215.00
force, speed and stiffness can NEXLINE® High-Load Actuator,
all be optimized for a particular 20 mm, 400 N, open-loop
application.
NEXLINE® PiezoWalk® Piezo-

ceramic clamping and shear
elements act directly on a mov- clamping moves. That is why
ing runner that is coupled to piezo stepping drives have no
the moved object. While the intrinsic travel limitation and
N-215 NEXLINE® high-load actuator
runner can be moved larger can be used flexibly. The max.
distances in step mode, analog step frequency of 100 Hz and is
operation over a distance of determined by the controller.
less than one step enables It allows velocities up to
20 mm Travel Range
high-dynamics positioning 1 mm/s, depending on the step
0.03 nm Resolution Open-Loop and 5 nm Closed-Loop
with resolutions far below size and / or analog range.
To 400 N Push / Pull Force and 600 N Holding Force one nanometer. The patented
Self Locking when Power down, No Heat Generation PiezoWalk® overcomes the limi- Unlimited Lifetime
Non-Magnetic and Vacuum-Compatible Working Principle tations of conventional nanopo- The application area of NEX-
sitioning actuators and com- LINE® drives often lies in the
bines long travel ranges with difficult-to-access internals of
high resolution and stiffness. machines, where nanometer-
The innovative N-214 / N-215 PiezoWalk® supports two differ- realm adjustment and vibration
NEXLINE® OEM linear drives ent motion modes: a high-reso- High-Resolution Dynamic cancellation are required.
are ultra-precision nanoposi- lution, high-dynamics short Operation
tioning actuators with travel range (analog) mode and a In analog mode the motion is Long lifetime is therefore a
ranges to 20 mm and push / stepping mode with virtually effectuated exclusively by the basic requirement for NEX-
pull forces to 400 N. The novel, unlimited travel range. very stiff shear elements, pro- LINE® actuators. To promote
patented NEXLINE® PiezoWalk® viding a resonant frequency in long lifetime, the controller can
drive design combines long Two versions are available, the the direction of motion of sev- reduce the operating voltage
travel ranges with high N-214 closed-loop model and eral kilohertz. The motion reso- on all the piezo elements to
mechanical stiffness and piezo- N-215 open-loop model. Both lution here is limited only by zero at any position and still
class resolution of better than can be operated with the the stability of the drive elec- maintain the full holding force.
0.1 nm. sophisticated E-755 NEXLINE® tronics, or, in closed-loop oper-
motion controller. The N-214 is ation, by the sensor. Note
equipped with a 5 nm resolu-
The products described in this
tion linear encoder for long- Basically Unlimited Travel
Application example document are in part protected
range position control. Due to Range by the following patents:
Semiconductor its low-noise, 24 bit D/A conver-
Step mode involves a sequence German Patent No. 10148267
technology ters, the E-755 controller can
of coordinated shear and US Patent No. 6,800,984
provide picometer level resolu-
Semiconductor testing tion in the highly-dynamic
Wafer inspection short-range / dithering mode.
Nano lithography NEXLINE® Working Principle

Nano imprint for Application Flexibility
NEXLINE® PiezoWalk® drives
Nanometrology
can be used wherever high
Active vibration damping loads must be positioned very
Motion in strong precisely over long distances
magnetic fields and then perhaps subjected to
Train of 1 nm steps in open-loop analog mode with an N-215 NEXLINE® actuator
small-amplitude dynamic ad-
c-5
Six-axis parallel-kinematics Hexapod with N-215-based

NEXLINE® high-load actuators for use in strong magnetic fields.
NEXLINE® linear actuator principle
Models N-214.00 N-215.00

Active Axes X X
Travel range 20 mm 20 mm
Step size in stepping mode 10 nm to 6 µm 10 nm to 6 µm
Integrated sensor Linear encoder -
Sensor resolution 5 nm -
Travel range in analog mode 3 µm 3 µm
Open-loop resolution 0.03 nm 0.03 nm
Closed-loop resolution 5 nm -
Step frequency 100 Hz* 100 Hz*
Velocity 0.5 mm/s** 0.5 mm/s**
Stiffness in motion direction 75 N/µm 150 N/µm
Drive force (active) 200 N 400 N
Holding force (passive) 300 N 600 N
Drive properties
Drive type NEXLINE® linear drive NEXLINE® linear drive
Operating voltage ±250 V ±250 V
Miscellaneous
Operating temperature range -40 to 80 °C -40 to 80 °C
Mass 1050 g 1150 g
Cable length 4.0 m 2.0 m
Connector D-sub single-channel D-sub single-channel
NEXLINE® connector, NEXLINE® connector
plus separate sensor connector
Recommended controller / driver E-755.1A1 E-755.101
* Depends on control electronics
** Depends on control electronics. The maximum speed in step mode is set so as to ensure the highest possible velocity constancy, with no speed
fluctuations while steps are being performed.
c-6
P-601 Piezo Flexure Linear Actuator
PiezoMove® High-Precision, High-Speed, Flexure-Guided Lever-Amplified Z-Actuator
P-601.1S
PiezoMove® Lever Amplified
Actuator, 100 µm, SGS
P-601.3S
P-601.4S
P-601.10
Actuator, 110 µm, Open-Loop
P-601 PiezoMove® Lever Amplified Z-Actuators. P-603.30

Actuator, 300 µm, Open-Loop
Flexure Guidance for Frictionless, Ultra-Straight Motion P-601.40

Standard Travel Ranges to 480 µm, Custom to 1 mm Actuator, 480 µm, Open-Loop
Very Fast Resoponse, to 250µsec Feasible, Resolution to 0.2 nm
High Dynamics and Stiffness
PICMA® High-Performance Piezo Actuators
Open and Closed-Loop Versions
Ideal for OEM Applications
Lever amplified PiezoMove® tors, lever amplified actuators as well as non-magnetic ones
P-601 actuators combine large offer larger travel ranges, a are available on request.
vertical travel ranges up to much higher lateral stiff-
480 µm and a high positioning ness and guiding precision. Superior Lifetime
accuracy in a very compact Compared to single-axis nano- Reliability is assured by the use
design. With settling times of positioning stages, they offer of award-winning PICMA® mul-
only a view milliseconds and a clearly smaller dimensions. tilayer actuators, which are
resolution in the sub-nanome- PiezoMove® lever amplified integrated into a sophisticated,

ter range they are well suited actuators feature a resolution single-module, flexure guiding
for static and dynamical appli- to 0.2 nm and a repeatability to system. The PICMA® actuators
cations. 8 nm.
feature cofired ceramic encap-

sulation and thus offer better
PiezoMove® P-601 lever ampli- With their highly precise, fric- performance and reliability
fied actuators cover the range tionless flexure guidance, a than conventional piezo actua-
between direct-driven pre- very high stiffness and excel- tors. The wire-EDM-cut flexu-
loaded piezo translators, such lent straightness of motion are res are FEA modeled to make
as the P-840 series, and single- reached. Together with their them extremely precise. In
axis nanopositioning stages, small dimensions and the cost- addition they are maintenance-
like the P-611 series. Compared effective design, the P-601 free and not subject to wear.
to direct-driven piezo transla- lever amplified actuators are
especially suited for OEM
Application Example applications. Versions with
strain-gauge sensors (SGS) are
Nanopositioning
equipped with a full bridge cir-
Semiconductor Testing cuit that is insensitive to ther-
mal drift. Versions without a
Adaptronics
sensor are also available for
Photonics / Integrated open-loop applications. In
Optics addition to standard models
Biotechnology made from steel special ver-
sions from Invar or aluminum,
d-1
P-601 dimensions in mm.
Technical Data
Models P-601.10 P-601.1S P-601.30 P-601.3S P-601.40 P-601.4S Units Tolerances
Active Axis Z Z Z Z Z Z
Motion and Positioning
Integrated sensor – SGS – SGS – SGS
Travel range -20 to +120 V, open-loop 110 110 300 300 480 480 µm min.
Travel range closed-loop – 100 – 250 – 400 µm
Resolution open-loop 0.2 0.2 0.3 0.3 0.4 0.4 nm typ.
Resolution closed-loop 2 2 6 6 12 12 nm typ.
Linearity – 0.1 – 0.3 – 0.3 % typ.
Unidirectional repeatability – 8 – 10 – 30 nm typ.
Pitch 20 20 20 20 20 20 µrad typ.
Yaw 10 10 10 10 10 10 µrad typ.
Mechanical Properties
Stiffness in motion direction 0.8 0.8 0.38 0.38 0.28 0.28 N/µm ±20 %
Resonant frequency unloaded 750 750 440 440 350 350 Hz ±20 %
Resonant frequency loaded (30 g) 620 620 350 350 290 290 Hz ±20 %
Push-/pull force in motion direction 30/10 30/10 20/10 20/10 15/10 15/10 N Max.
Lateral force 30 30 30 30 30 30 N Max.
Drive Properties
Drive type PICMA® PICMA® PICMA® PICMA® PICMA® PICMA®
Electrical capacitance 1.5 1.5 3.1 3.1 4.6 4.6 µF ±20 %
DOOC 1.9 1.9 1.6 1.6 1.4 1.4 µA/(Hz x µm) ±20 %
Miscellaneous
Operating temperature range -20 to 80 -20 to 80 -20 to 80 -20 to 80 -20 to 80 -20 to 80 °C
Material Stainless Stainless Stainless Stainless Stainless Stainless
Steel Steel Steel Steel Steel Steel
Mass 50 50 75 75 110 110 g ±5 %
Cable length 250 250 250 250 250 250 mm ±10 mm
Sensor connection Open leads Open leads Open leads Open leads Open leads Open leads
Voltage connection Open leads Open leads Open leads Open leads Open leads Open leads
Recommended driver/controller A, G D, H A, G D, H A, G D, H
d-2
P-783 Piezo Flexure Linear Actuator
Piezoelectric Z-Nanopositioning Stage / Actuator with Direct Metrology Sensor
P-783.ZL
Vertical Piezo Flexure Stage,
300 µm, LVDT Sensor
the actual distance between

the fixed frame and the moving
part of the stage. This results in
higher motion linearity, long-
term stability, phase fidelity,
and—because external distur-
bances are seen by the sensor
immediately—a stiffer, faster-
responding servo-loop. See
P-783 nanopositioning stage, microprocessor shown for size comparison
p. 2-4 ff. and p. 5-2 ff. for more
information.
Z-Travel to 300 µm Working Principle / Reliability

Low Profile P-783 nanopositioning stages
Frictionless Precision Flexure Guiding System are equipped with the award
winning PICMA® piezo drives,
Internal Motion Amplifier
integrated into a sophisticated
Closed-Loop Resolution <10 nm flexure guiding system. The
PICMA® High-Performance Piezo Drives wire-EDM-cut flexures are FEA
Long Travel Range

The P-783 piezo nano-Z-axis
stage is a compact, closed-loop
actuator providing a position-
ing and scanning range of up
to 300 µm. It is designed for
applications with loads rang-
ing from a few grams to a few
hundred grams.
Direct-Metrology LVDT Sensor

P-783 stages feature direct-
measuring, non-contact LVDT
sensors (direct metrology).
Unlike indirect sensors, direct-
metrology sensors measure
Metrology
Wafer inspection
PCB inspection
Nanopositioning
Switching
Biotechnology
Micromanipulation P-783 dimensions (in mm)
d-3
modeled for zero stiction, zero

friction and exceptional guid-
ing precision. The ceramic-
encapsulated PICMA® drives
are more robust than conven-
tional piezo actuators, featur-
ing superior lifetime and per-
formance in both dynamic and
static applications.
Because guidance, actuators
and sensors are all frictionless
and maintenance-free, these
nanopositioning systems
achieve outstanding levels of
reliability.
Notes
See the “Piezo Drivers & Variety of piezo flexure nanopositioning systems.
Nanopositioning Controllers” Call your PI Sales Engineer about your application.
section, p. 6-8 ff. for our com-
prehensive line of low-noise
control electronics.
See the “Selection Guide” on
p. 2-14 ff. for comparison with
other nanopositioning systems.
Technical Data
Models P-783.ZL Units Notes see p. 2-84
Active axes Z
Open-loop travel @ 0 to 100 V 300 µm ±20% A2
Closed-loop travel 300 µm A5
Integrated feedback sensor LVDT B
* Closed-loop / open-loop resolution 10 / 1 nm C1
Closed-loop linearity (typ.) 0.1 %
Full-range repeatability (typ.) ±15 nm C3
Stiffness 0.15 N/µm ±20% D1
Push / pull force capacity 20 / 10 N D3
(in operating direction)
Max. normal load +20 / -5 N D4
Lateral force limit 0.5 N D5
Lateral runout (tip/tilt) (typ.) 10 / 25 µrad E1
Electrical capacitance 5.4 µF ±20% F1
** Dynamic operating 2 µA/(Hz x µm) F2
current coefficient (DOCC)
* For calibration information
Unloaded resonant frequency 300 Hz ±20% G2
see p. 2-8. Resolution of PI
Resonant frequency @ 24 g load 240 Hz ±20% G3 piezo nanopositioners is not
Resonant frequency @ 100 g load 160 Hz ±20% G3 limited by friction or stiction.
The value given is noise
Operating temperature range -20 to 80 °C H2 equivalent motion with E-503
Voltage connection VL J1 amplifier.
** Dynamic Operating Current
Sensor connection L J2
Coefficient in µA per Hz
Weight (with cables) 160 g ±5% and µm.
Body material Al, (platform: steel) L Example: Sinusoidal scan of
30 µm at 10 Hz requires
Recommended amplifier/controller H, E approximately 0.6 mA drive
(codes explained p. 2-17) current.
d-4
P-62x.1 – Piezo Flexure Linear Slides
PIHera® Nanopositioning & Scanning Stages with Direct Metrology
very high bandwidth and ex-
hibit no periodic errors.
Unlike conventional sensors, P-620.1CD * / P-620.1CL *
PIHera® Nanopositioning System,
capacitive sensors measure
50 µm, Capacitive Sensors
the actual distance between
the fixed frame and the moving P-620.10L
part of the stage. They detect 60 µm, Open-Loop, LEMO Conn.
errors contributed by all com-
ponents in the drive train— P-621.1CD * / P-621.1CL *
from the actuator through the 100 µm, Capacitive Sensors
flexures to the platform. This
P-621.10L
results in higher motion linear-
ity, long-term stability, phase 120 µm, Open-Loop, LEMO Conn.
fidelity, and—because external
P-622.1CD * / P-622.1CL *
PIHera® piezo nanotranslation stages with disturbances are seen by the
travel ranges from 50 µm to 1800 µm sensor immediately—a stiffer, 250 µm, Capacitive Sensors
faster-responding servo-loop.
P-622.10L
See p. 2-4 ff. and p. 5-2 ff. for
Record Travel Range for Piezo Flexure Stages: to 1800 µm more information. 300 µm, Open-Loop, LEMO Conn.
Fast Response, Frictionless Motion, High Bandwidth P-625.1CD * / P-625.1CL *
Resolution <1 nm Nanometer Precision in PIHera® Nanopositioning System,
Frictionless Precision Flexure Guiding System Milliseconds 500 µm, Capacitive Sensors
PICMA® Long-Life, Ceramic Encapsulated Piezo Drives One of the advantages of P-625.10L
Direct Metrology with Capacitive Sensors for Highest PIHera® stages over motor-
600 µm, Open-Loop, LEMO Conn.
Precision driven positioning stages is
the rapid response to input P-628.1CD * / P-628.1CL
Up to 0.02 % Position Accuracy PIHera® Nanopositioning System,
changes and fast and pre-
X, XY, Z, XYZ Versions cise settling behavior. The
800 µm, Capacitive Sensors
Vacuum-Compatible Versions P-622.1CD, for example, can P-628.10L
settle to an accuracy of 10 nm PIHera® Nanopositioning System,
P-620.1CD – P-629.1CD PIHera ®
Superior Accuracy Through 950 µm, Open-Loop, LEMO Conn.
systems are piezo-nanoposi- Direct-Motion Metrology with in only 30 msec (other PI
tioning stages featuring travel Capacitive Sensors stages provide even faster P-629.1CD * / P-629.1CL *
response)! PIHera® Nanopositioning System,
ranges from 50 to 1800 µm.
The capacitive-sensor-equipped 1500 µm, Capacitive Sensors

Despite the increased travel versions provide motion lin- P-629.10L
ranges, the units are extremely earity to 0.02 % with effective Single & Multi-Axis Versions

compact and provide sub- resolution in the sub-nanome- See page 2-42 and page 2-54 1800 µm, Open-Loop, LEMO Conn.
nanometer resolution. The ter range. PI capacitive sensors for Z and XY versions. XZ and * .1CD with Sub-D Connector
long travel range is achieved are absolute-measuring, direct- XYZ combinations can be * .1CL with LEMO Connectors
with a newly designed, friction- metrology devices that boast assembled without adapters.
free and extremely stiff flexure Vacuum versions to 10-9 hPa are
system, which also offers rapid available as part numbers
response and excellent guiding P-62x.1UD
accuracy (typically less than Custom sizes & specifications
5 µrad pitch/yaw over the full available!
travel range).
(Dynamic) interferometry
Microscopy
Nanopositioning
Biotechnology
Rapid scanning motion of a P-621.1CD (commanded rise time 5 ms) with the E-710 con-
Quality assurance troller and DDL option. Digital Dynamic Linearization virtually eliminates the tracking error
(<20 nm) during the scan. The improvement over a classical PID controller is up to
Semiconductor technology 3 orders of magnitude, and grows with the scanning frequency
d-5
0,5
U
S
B
M
R
L H7
F
E
P
N
PIHera® XYZ combination

0,01
0,01
K
D
G
Q
H
L= 1,5 m
L H7 M
J 0,01
C
Dimensions of the P-62x.1CD/.1CL/.10L in mm,

decimal places separated by commas
Technical Data
Models P-620.1CD/ P-621.1CD/ P-622.1CD/ P-625.1CD/ P-628.1CD/ P-629.1CD P-62x.10L Units
P-620.1CL P-621.1CL P-622.1CL P-625.1CL P-628.1CL P-629.1CL
Active axes X X X X X X X
Open-loop travel -20 to 120 V 60 120 300 600 950 1800 see P-62x.1CD µm
Closed-loop travel 50 100 250 500 800 1500 - µm
Integrated feedback sensor capacitive capacitive capacitive capacitive capacitive capacitive -
* Closed-loop / open-loop resolution 0.2 / 0.1 0.4 / 0.2 0.7 / 0.4 1.4 / 0.5 1.8 / 0.5 2.5 / 2.0 - / see P-62x.1CD nm
Closed-loop linearity (typ.) 0.02 0.02 0.02 0.03 0.03 0.03 - %
Stiffness 0.42 0.35 0.15 0.10 - 0.13 see P-62x.1CD N/µm
Push / pull force capacity (in X) 10/5 10/8 10/8 10/8 10/8 10/8 see P-62x.1CD N
Max. Load 10 10 10 10 10 10 see P-62x.1CD N
Lateral force limit 10 10 10 10 10 10 see P-62x.1CD N
Tilt (y, z) (typ.) 3 3 3 6 6 30/10 see P-62x.1CD µrad
Electrial capacitance 0.75 1.5 3.0 6.0 18.6 - see P-62x.1CD µF ±20 %
Dynamic operating current 1.9 1.9 1.5 1.5 - - see P-62x.1CD µA/(Hz x µm)
coefficient (DOCC)
Unloaded resonant frequency 1240 800 400 215 125 125 see P-62x.1CD Hz ±20 %
Resonant frequency @ 20 g load 550 520 340 180 115 - see P-62x.1CD Hz ±20 %
Resonant frequency @ 120 g load 260 240 185 110 90 110 see P-62x.1CD Hz ±20 %
Operating temperature range -40 - 120 -40 - 120 -40 - 120 -40 - 120 -40 - 120 -40 - 120 -40 - 150 °C
Voltage Connection D ** D ** D ** D ** D ** D ** VL
Sensor Connection D ** D ** D ** D ** D ** D ** -
Weight (with cables) 108 158 195 238 375 720 g ±5 %
Body material Al Al Al Al Al AI Al
Recommended amplifier/controller F, M, L, H F, M, L, H F, M, L, H F, M, L, H F, M, L, H F, M, L, H C, G
(codes explained p. 2-17)
* For calibration information see p. 2-8. Resolution of PI piezo nanopositioners is not limited by friction or stiction. The value given is noise equivalent motion with E-710 controller
** Version .1CL with Lemo connectors.
d-6
P-882 – P-888 Piezo Stack Linear Actuator
PICMA® High-Performance Monolithic Multilayer Piezo Actuators (LVPZT)
PI has with thousands of in- Optimum UHV Compatibility—
dustrial PZT applications. No Outgassing
The lack of polymer insulation
Increased Lifetime Through and the high Curie temperature
Humidity Resistance make for optimal ultra-high-
The monolithic ceramic-en- vacuum compatibility (no out-
capsulated design provides gassing / high bakeout temper-
better humidity protection than atures, up to 150 °C)
polymer-film insulation. Diffu-
sion of water molecules into Ideal for Closed-Loop
the insulation layer, is greatly Operation
reduced by the use of cofired, The ceramic surface of the
outer ceramic encapsulation. actuators is extremely well
suited for use with resistive or
PICMA® piezo actuators are currently available High-Level Dynamic optical fiber strain gauge sen-
with cross-sections of 2 x 3, 3 x 3, 5 x 5 and 10 x 10 mm. Performance—Very Wide sors. Such sensors can be eas-
Temperature Range ily applied to the actuator sur-
The high Curie temperature of face and exhibit significantly
Award-Winning Technology 320 °C gives PICMA® actuators higher stability and linearity
Low Operating Voltage a usable temperature range than with conventional poly-
Superior Lifetime Even Under Extreme Conditions extending up to 150 °C. This mer-insulated actuators.
Very Large Operating-Temperature Range means that they can be operat-
High Humidity Resistance ed in hotter environments, or Amplifiers, Drivers &
Excellent Temperature Stability they can be driven harder in Controllers
dynamic operation. With con-
High Stiffness PI offers a wide range of con-
ventional multilayer actuators, trol electronics for piezo actua-
UHV Compatible to 10-9 hPa heat generation—which is pro- tors from low-power drivers
Sub-Millisecond Response & Sub-Nanometer Resolution portional to operating frequen- to multichannel, closed-loop,
cy—either limits the operating digital controllers. Of course, PI
frequency or duty cycle in also designs custom amplifiers
dynamic operation, or makes and controllers.
ungainly cooling provisions
Increased Lifetime and Higher ments. They are superior to necessary.
Performance conventional multilayer actua-
tors in industrial applications At the low end, operation
PICMA® (PI Ceramic Monolithic
and high-endurance situations, down to a few Kelvin is possi-
Actuator) piezo actuators are
where they show substantially ble (with reduction in perform-
characterized by their high per-
longer lifetimes both in static ance specifications).
formance and reliability, even
in extremely harsh environ- and dynamic operation.
New Production Process,

Optimized PZT Ceramics
Precision mechanics and PICMA® piezo actuators are
mechanical engineering made from a ceramic material

in which the piezoceramic
Nanopositioning / high-
speed switching properties such as stiffness,
capacitance, displacement,
Active and adaptive optics temperature stability and life-
Vibration cancellation time are optimally combined.
The actuators’ monolithic
Pneumatic & hydraulic design and special electrode
valves structure was made possible
Metrology / interferometry by advances in production
PICMA® actuator with optional wire
technology. This development leads and rounded top piece for
Life sciences, medicine
is just one reflection of the decoupling lateral forces optional.
and biology PICMA® dimensions, in mm
more than 30 years experience
e-1
PICMA® piezo actuators (bottom curve) compared with conventional The displacement of PICMA® actuators exhibits very low tempera-
multilayer actuators with polymer insulation (top curve). PICMA® ture dependence. This, in combination with their low heat genera-
actuators are not affected by the high-humidity test conditions. tion, makes PICMA® actuators optimal for dynamic operation.
Conventional piezo actuators exhibit increased leakage current after (Operating frequency f = 200 Hz)
only a few hours. Leakage current is an indication of insulation
quality and expected lifetime.
Test conditions: U = 100 VDC; T = 25 °C; Relative Humidity = 70%
Recommended preload for

Technical Data / Product Order Numbers dynamic operation
15 to 30 MPa
Order Dimensions Nominal Max. Blocking Stiffness Electrical Resonant
number* AxBxL displacement displacement force [N/µm] capacitance frequency * For optional PTFE insulated
[mm] [µm @ 100 V] [µm @ 120 V] [N @ 120 V] [µF] ±20% [kHz] ±20% wires, pigtail length 100 mm,
P-882.10 2x3x9 6.5 ±20% 8 ±20% 190 24 0.13 135 change order number exten-
sion to .x1 (e.g. P-882.11).
P-882.20 2 x 3 x11 8.5 ±20% 10.5 ±20% 210 20 0.18 110
P-882.30 2 x 3 x 13.5 11 ±20% 13 ±20% 210 16 0.22 90 Unloaded (longitudinal)
resonant frequency measured at
P-882.50 2 x 3 x 18 15 ±10% 18 ±10% 210 12 0.31 70
1 Vpp; capacitance at 1 Vpp,
P-883.10 3x3x9 6.5 ±20% 8 ±20% 290 36 0.21 135 1 kHz.
P-883.20 3 x 3 x 11 8.5 ±20% 10.5 ±20% 310 29 0.27 110
Standard PZT ceramic type:
P-883.30 3 x 3 x 13.5 11 ±20% 13 ±20% 310 24 0.35 90 PIC 252
P-883.50 3 x 3 x 18 15 ±10% 18 ±10% 310 18 0.48 70
Max. operating voltage:
P-885.10 5x5x9 6.5 ±20% 8 ±20% 800 100 0.6 135 -20 to +120 V
P-885.20 5 x 5 x 11 8.5 ±20% 10.5 ±20% 850 82 0.8 110 Max. operating temperature:
-40 to +150 °C
P-885.30 5 x 5 x 13.5 11 ±20% 13 ±20% 870 67 1.1 90
P-885.50 5 x 5 x 18 15 ±10% 18 ±10% 900 50 1.5 70 Standard Mechanical Interface:
ceramic (top & bottom)
P-885.90 5 x 5 x 36 32 ±10% 38 ±10% 950 25 3.1 40
Standard Electrical Interface:
P-887.30 7 x 7 x 13.5 11 ±20% 13 ±20% 1700 130 2.2 90 solderable pads
P-887.50 7 x 7 x 18 15 ±10% 18 ±10% 1750 100 3.1 70
Available Options: strain gauge
P-887.90 7 x 7 x 36 32 ±10% 38 ±10% 1850 50 6.4 40 sensors, special mechanical
P-888.30 10 x 10 x 13.5 11 ±20% 13 ±20% 3500 267 4.3 90 interfaces, etc.
Other specifications on request.
P-888.50 10 x 10 x 18 15 ±10% 18 ±10% 3600 200 6.0 70
Specifications subject to change
P-888.90 10 x 10 x 36 32 ±10% 38 ±10% 3800 100 13.0 40 without notice.
e-2
P-840/1 Preloaded Piezo Stack Actuator
Preloaded Open- & Closed-Loop Piezo Translators (LVPZT)
tion sensors and operate with
PI servo-control electronics
see page 4-19 ff. and page 4-31 P-841.10
Closed-Loop LVPZT Translator,
ff. for details). 15 µm
Design P-841.20
Closed-Loop LVPZT Translator,
These translators are equipped 30 µm
with highly reliable multilayer
P-841.30
PZT ceramic stacks protected Closed-Loop LVPZT Translator,
by a non-magnetic stainless 45 µm
steel case with internal spring
P-841.40
preload. The standard transla- Closed-Loop LVPZT Translator,
tor tip and base have tapped 60 µm
holes. Select the P-840.95 ball P-841.60
tip option to help decouple off- Closed-Loop LVPZT Translator,
P-840, P-841 piezo translators (DIP switch for size comparison) axis or torque loads from the 90 µm
translator. P-840.10
Open-Loop LVPZT Translator, 15 µm
Displacement to 90 µm Mounting
P-840.20
Pushing Forces to 1000 N For push/pull forces up to 5 N, Open-Loop LVPZT Translator, 30 µm
Preloaded for Pulling Forces to 50 N the translator can be mounted P-840.30
Sub-msec Response by clamping around the case. Open-Loop LVPZT Translator, 45 µm
Sub-nm Resolution For larger forces, the translator
P-840.40
Options: Ball Tip, Vacuum Versions must be mounted by the base. Open-Loop LVPZT Translator, 60 µm
For positioning of magnetic
parts the P-176.20 magnetic P-840.60
P-840 and P-841 preloaded High Accuracy in Closed-Loop Open-Loop LVPZT Translator, 90 µm
adapter can be screwed into
piezo translators are high-reso- Operation the translator tip. Ask about custom designs!
lution linear actuators for static The P-840 is specifically de- For more mounting guidelines
and dynamic applications. signed for open-loop opera- see page 1-48.
They provide sub-millisecond tion. For highest accuracy, the
response and sub-nanometer P-841 closed-loop version
resolution. The internal spring includes integrated ultra-high-
preload makes them ideal for resolution strain gauge posi-
dynamic applications.
Technical Data Closed-Loop
Models P-841.10 P-841.20 P-841.30 P-841.40 P-841.60
Open-loop travel @ 0 to 100 V 15 30 45 60 90

Closed-loop travel 15 30 45 60 90
* Integrated feedback sensor SGS SGS SGS SGS SGS
Static and dynamic ** Closed-loop / open-loop resolution 0.3 / 0.15 0.6 / 0.3 0.9 / 0.45 1.2 / 0.6 1.8 / 0.9
positioning *** Static large-signal stiffness 57 27 19 15 10
Push/pull force capacity 1000 / 50 1000 / 50 1000 / 50 1000 / 50 1000 / 50

Disk drive testing
Torque limit (at tip) 0.35 0.35 0.35 0.35 0.35
Smart structures Electrical capacitance 1.5 3.0 4.5 6.0 9.0
Adaptive mechanics Dynamic operating current coefficient (DOCC) 12.5 12.5 12.5 12.5 12.5
Unloaded resonant frequency (f0) 18 14 10 8.5 6
Vibration cancellation
Standard operating temperature range -20 to +80 -20 to +80 -20 to +80 -20 to +80 -20 to +80
Switching Voltage connection VL VL VL VL VL
Laser tuning Sensor connection L L L L L

Weight without cables 20 28 46 54 62
Patch clamping Material case / end pieces N-S N-S N-S N-S N-S
For more examples Length L 32 50 68 86 122
see page 1-5 Recommended amplifier/controller C, D ,G , H C, D ,G , H C, D ,G , H C, D ,G , H C, D ,G , H
(codes explained p. 1-3)
e-3
Response of a P-841.10 to a
3 nm peak-to-peak square
wave control input signal,
measured with servo-control
bandwidth set to 240 Hz and
2 msec settling time. Note
the crisp response to the
square wave control signal.
Factory Installed Options Notes

P-703.20 See the “Piezo Drivers & Nano-
High-Vacuum Option positioning Controllers” sec-
(see p. 1-44) tion for our comprehensive line
of low-noise modular and OEM
P-840.95 control electronics for comput-
er and manual control.
Ball Tip (see page 1-44)
Accessories
P-176.20
Magnetic adapter with M3
threaded stud, see page 1-45.
Extension cables & connectors:
see page 6-55 in the “Piezo
P-840, P-841, dimensions (in
Drivers & Nanopositioning
mm). See table for length, L
Controllers” section.
Open-Loop
P-840.10 P-840.20 P-840.30 P-840.40 P-840.60 Units Notes see
page 1-46
15 30 45 60 90 µm ±20% A2
- - - - - µm A5
- - - - - B
- / 0.15 - / 0.3 - / 0.45 - / 0.6 - / 0.9 nm C1
57 27 19 15 10 N/µm ±20% D1
1000 / 50 1000 / 50 1000 / 50 1000 / 50 1000 / 50 N D3
0.35 0.35 0.35 0.35 0.35 Nm D6
1.5 3.0 4.5 6.0 9.0 µF ±20% F1
12.5 12.5 12.5 12.5 12.5 µA/ (Hz x µm) F2
18 14 10 8.5 6 kHz ±20% G2
-20 to +80 -20 to +80 -20 to +80 -20 to +80 -20 to +80 °C H2 * Closed-loop models can
attain linearity up to 0.15%
VL VL VL VL VL J1 and are shipped with per-
- - - - - J2 formance reports.
** Resolution of piezo actua-
20 28 46 54 62 g ±5% K
tors is not limited by friction
N-S N-S N-S N-S N-S L or stiction.
32 50 68 86 122 mm ±0.3 Noise equivalent motion
with E-503 amplifier;
C,G C,G C,G C,G C,G *** Dynamic small-signal stiff-
ness ~30% higher.
e-4
P-842 Preloaded Piezo Stack Linear Actuator
Preloaded Piezo Actuators (LVPZT) with Sensor Option
P-842, P-843, P-844 and P-845 can be held by clamping the
series piezo translators are case. The P-176.50 / P-176.60
high-resolution linear actuators flexible tips can be installed to
for static and dynamic applica- decouple the ceramic from
tions. They provide sub-mil- bending forces (see page 1-45).
lisecond response and sub- For more mounting guidelines,
nanometer resolution. see page 1-48.
Design High Accuracy in Closed-Loop

These actuators consist of a Operation
friction-free, preloaded, mono- The P-842 and P-844 are
lithic multilayer piezoceramic designed for open-loop posi-
stack protected by a stainless tioning tasks. The P-843 and
steel case. P-845 versions are equipped
The high preload gives these with integrated high-resolution
actuators outstanding proper- SGS position sensors and offer
ties for dynamic applications high-accuracy, closed-loop
P-844 piezo actuators (battery
for size comparison) (e.g. precision machining, operation (for more informa-
active damping, etc.) and push- tion, see the “Tutorial: Piezo-
pull applications. electrics in Positioning,” Sec-
tion 4).
Travel Range to 90 µm
Mounting
Pushing Forces to 3000 N Options:
Preloaded for Pulling Forces to 700 N Mounting is at the foot,
although with push/pull forces P-703.20
Sub-ms Response
of less than 100 N, the actuator High-vacuum option, p. 1-44.
Sub-nm Resolution
Options: Vacuum Versions, Water-Resistant Case
Application Examples Technical Data and Product Order Numbers

Order Travel range Travel range Integrated Resolution Static
Static and dynamic number (open-loop) (closed-loop) position closed-loop / large-signal
for 0 to 100 V [µm] sensor* open-loop stiffness
precision positioning [µm] ±20% [nm]** [N/µm] ±20%***
Disk drive testing P-842.10 15 - - - / 0.15 57
equipment P-842.20 30 - - - / 0.3 27

P-842.30 45 - - - / 0.45 19
Optics P-842.40 60 - - - / 0.6 15
P-842.60 90 - - - / 0.9 10
Metrology /
P-843.10 15 15 SGS 0.3 / 0.15 57
interferometry
P-843.20 30 30 SGS 0.6 / 0.3 27
Active structures P-843.30 45 45 SGS 0.9 / 0.45 19
(Adaptronics) P-843.40 60 60 SGS 1.2 / 0.6 15
P-843.60 90 90 SGS 1.8 / 0.9 10

Precision engineering /
P-844.10 15 - - - / 0.15 225
micromechanisms
P-844.20 30 - - - / 0.3 107
Adaptive mechanics P-844.30 45 - - - / 0.45 75
P-844.40 60 - - - / 0.6 57
Active vibration control P-844.60 90 - - - / 0.9 38
P-845.10 15 15 SGS 0.3 / 0.15 225
Switching applications
P-845.20 30 30 SGS 0.6 / 0.3 107
Laser tuning P-845.30 45 45 SGS 0.9 / 0.45 75
P-845.40 60 60 SGS 1.2 / 0.6 57
For more examples, P-845.60 90 90 SGS 1.8 / 0.9 38
see page 1-5
Notes see A2 A5 B C1 D1
page 1-46
e-5
Accessories
P-176.50
Flexible tip for P-842 / P-843,
see p. 1-45
P-176.60
Flexible tip for P-844 / P-845,
see p. 1-45
Extension cables with connec-
tors: see pp. 6-55 ff.
Note
High-resolution amplifiers and
servo-control electronics, both
digital and analog, are des-
cribed in the “Piezo Drivers &
Nanopositioning Controllers”
section, page 6-8 ff.
P-844, P-845 dimensions in mm; length = L, see P-842, P-843 dimensions in mm; length = L, see
table for value; max. torque at tip: 1 Nm. table for value; max. torque at tip: 0.35 Nm.
Push/pull Electrical Dynamic operat- Resonant Weight Length L Recommended

force capacity capacitance ing current frequency without [mm] amplifier/controller
[N] [µF] ±20% coefficient (unloaded) cable (codes explained p. 1-3)
[µA / (Hz x µm)] [kHz] ±20% [g] ±5%
800 / 300 1.5 12.5 18 31 37 C, G
800 / 300 3.0 12.5 14 42 55 C, G
800 / 300 4.5 12.5 10 53 73 C, G
800 / 300 6.0 12.5 8.5 64 91 C, G
800 / 300 9.0 12.5 6 86 127 C, G
800 / 300 1.5 12.5 18 31 37 D, H
800 / 300 3.0 12.5 14 42 55 D, H
800 / 300 4.5 12.5 10 53 73 D, H
Voltage connection: LEMO
800 / 300 6.0 12.5 8.5 64 91 D, H FFA.00.250; 1 m coaxial cable,
800 / 300 9.0 12.5 6 86 127 D, H RG 178, teflon insulation.
Sensor connection: LEMO
3000 / 700 6.0 50 16 84 47 C, G FFA.0S.304; 1 m coaxial cable
3000 / 700 12.0 50 12 108 65 C, G with PUR insulation.
Temperature range: -40 to 80 °C.
3000 / 700 18.0 50 9 132 83 C, G
Case / end pieces: non-magnetic
3000 / 700 24.0 50 7.5 156 101 C, G steel
3000 / 700 36.0 50 5.5 204 137 C, G * SGS versions can attain
closed-loop linearity up to
3000 / 700 6.0 50 16 84 47 D, H 0.15% and are shipped with
3000 / 700 12.0 50 12 108 65 D, H performance reports.
** The resolution of piezo actu-
3000 / 700 18.0 50 9 132 83 D, H
ators is not limited by stic-
3000 / 700 24.0 50 7.5 156 101 D, H tion or friction. Value given
is noise equivalent motion
3000 / 700 36.0 50 5.5 204 137 D, H
with E-503 amplifier.
D3 F1 F2 G2 K *** Dynamic smallsignal stiff-
ness is ~30% higher.
e-6
P-212 · P-216 Piezo Stack Linear Actuator
Preloaded Open- & Closed-Loop PICA™ Power Piezo Actuators (HVPZT) with Sensor Option
2 Preloaded Piezo Actuator, 1000 V, 2000 N

6 Preloaded Piezo Actuator, 1000 V, 4500 N
0 w/o Sensor
S w/SGS Position Sensor
T modified for Low Temperature
P-21 .
V modified for High Temperature/Vacuum
1 Travel Range 15 µm
Option:
P-177.50
9 Travel Range 180 µm (P-216 only)
From left:
Dynamic applica-
P-212.1S and .8S, P-216.9S, Please read “Options and Accessories”, page 1-44 ff, for tions (with E-481):
.4S and .1S piezo actuators further information. temperature sensor
(CD for size comparison) Extensions cables, adapters & connectors: see in “Accessories” and protective air
in the “Piezo Drivers & Nanopositioning Controllers” section. for PICATM HVPZT
Travel Range to 180 µm tors prove consistent perform- guide in the „Piezo Drivers &
Pushing Forces to 4500 N ance, even after billions Nanopositioning Controllers“
Pulling Forces to 500 N (1,000,000,000) of cycles. section page 6-2 ff.
Sub-millisecond Response
Mechanical Mounting
Sub-nanometer Resolution
Options: Vacuum, High- and Low-Temperature Mounting is at the foot, with
push/pull forces of less than
5 N, the actuator can be held by
clamping the case. The option-
al ball tip is intended to decou-
ple torque and off-center forces
The P-212 and P-216 series are These actuators have the fric-
from the translator. Read de-
high-resolution linear piezo tion-free, preloaded PICA™
tails in Mounting and Handling
actuators (translators) for static Power actuators inside. The
Guidelines page 1-48.
and dynamic applications. preload makes them ideal for
They provide sub-millisecond dynamic applications like preci-

High Flexibility with
response and sub-nanometer sion machining or active damp-
PI Amplifiers, Drivers &
resolution. ing.
Controllers
High Displacement with Ultra- PI offers a wide range of con-

Application Examples High Reliability trol electronics for piezo actua-
tors from low-power drivers to
PICA™ Power actuators are
Optics the high-performance ampli-
optimized for high-temperature
fier / controller E-481.
Metrology / Interferometry working conditions and high-
duty-cycle dynamic applica-
Adaptronics For closed-loop operation PI
tions.
Precision engineering / offers a wide variety of analog
micromechanics and digital controllers. The
All PICA™ piezo ceramics
E-500 modular system can be
Adaptive mechanics are specifically designed for
easily upgraded from an ampli-
high-duty-cycle applications.
Active vibration damping fier to a servo controller, in-
With PI’s extensive applications
cluding different interface / dis-
Switches knowledge, gained over sever-
play modules.
al decades, performance does
Laser tuning not come at the price of
Force generation / reliability. All materials used Notes
materials testing are specifically matched for High-resolution amplifiers and
robustness and lifetime. En- servo-control electronics, both
Nanotechnology
durance tests on PICA™ actua- digital and analog, see selection
e-7
A0-0.05
0.05 A M 9
SW D
5.5 0.5
L 0.5
Option Sensor
M4 5
11
9.5
5
A SW C M8 7 Piezo
B 0.1
P-212 and P-216, dimensions in mm.

End pieces and case of stainless steel. Sensor connection:
LEMO FFA.0S.304; 1 m coaxial cable with PUR insulation, 2- conductor, shielded
Technical Data
P-212.10 P-212.20 P-212.40 P-212.80 P-216.10 P-216.20 P-216.40 P-216.80 P-216.90 Einh. Toleranz
Operating voltage 0 to1000 0 to1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 V
Closed-loop travel 15 30 60 120 15 30 60 120 180 µm
Closed-loop resolution** 0.3 0.6 1.2 2.4 0.3 0.6 1.2 2.4 3.6 nm typ.
Open-open resolution** 0.15 0.3 0.6 1.2 0.15 0.3 0.6 1.2 1.8 nm typ.
Linearity* 0.2 0.2 0.2 0.2 0.2 0.2 0.2 0.2 0.2 % typ.
Static large-signal stiffness*** 90 60 34 18 210 140 80 50 32 N/µm ±20 %
Unloaded resonant frequency 17 12 7 4.5 17 12 7 4.5 3 kHz ±20 %
Push/pull force capacity 2000 / 300 2000 / 300 2000 / 300 2000 / 300 4500 / 500 4500 / 500 4500 / 500 4500 / 500 4500 / 500 N Max.
Shear force limit 15 10 10 10 60 36 23 23 23 N
Torque limit (on tip) 0.5 0.5 0.5 0.5 1 1 1 1 1 Nm
Drive properties
El. capacitance 47 90 180 370 130 250 500 1000 1500 nF ±20 %
Dynamic operating 5 5 5 5 13 13 13 13 13 µA/(Hz x µm) ±20 %
current coefficient
Miscellaneous
Mass (with cable) 110 120 150 210 170 200 250 370 480 g ±5 %
* Requires SGS sensor. SGS versions are shipped with performance reports
** Measured with an Interferometer. The resolution of piezo actuators is not limited by stiction or friction
*** Dynamic small-signal stiffness is ~50 % higher
Piezo ceramic type: PICATM Power
Operating temperature range: -40 to +80 °C
Recommended controller/driver: B, I, J, see codes explanation page 6-11
For maximum lifetime, voltages in excess of 750 V should be applied only for short durations
See Notes (Technical Data) for further information page 2-84 ff
e-8
P-225 · P-235 Piezo Stack Linear Actuator
Preloaded PICATM Power High-Load Piezo Actuators (HVPZT) with Sensor Options
2 Preloaded High-Load Piezo Actuator, 1000 V, 12500 N

3 Preloaded High-Load Piezo Actuator, 1000 V, 30000 N
0 w/o Sensor
S w/SGS Position Sensor
T modified for Low Temperature
P-2 5.
V modified for High Temperature/Vacuum
2 Travel Range 30 µm Option:
4 Travel Range 60 µm P-177.50

Dynamic applications
8 Travel Range 120 µm (with E-481):
9 Travel Range 180 µm (P-235 only) temperature sensor
and protective air for
Please read “Options and Accessories”, page 1-44 ff, for PICATM HVPZT
High-load piezo actuators P-235.1S, .4S and .9S, P-225.8S and .1S further information.
(from left) with CD for size comparison Extensions cables, adapters & connectors: see in “Accessories” P-706.00
in the “Piezo Drivers & Nanopositioning Controllers” section. Water-resistant case
Extremely High Stiffness al decades, performance does the “Tutorial: Piezoelectrics in

Pushing Forces to 30,000 N not come at the price of relia- Nanopositioning”.
Pulling Forces to 3500 N bility. All materials used are
specifically matched for robust- High Flexibility with
Travel Ranges to 180 µm
ness and lifetime. Endurance PI Amplifiers,
Options: Versions for Vacuum, High- and Low-Temperatures
tests on PICA TM actuators prove Drivers & Controllers
and with Water-Resistant Case
consistent performance, even PI offers a wide range of con-
after billions (1,000,000,000) of trol electronics for piezo actua-
cycles. tors from economical, low-
power piezo drivers to the
Open- and Closed-Loop E-481 high-performance am-
Models for Optimum plifier / controller providing
Dynamics and Linearity 2000 W of dynamic power.
The standard models are ideal
P-225 and P-235 are preloaded, These ultra-high-force linear
for open loop positioning ap- For closed-loop operation a

high-load piezo actuators actuators consist of PICATM plications. In this mode the wide variety of analog and dig-
(translators) for static and Power piezoelectric ceramic- actuator displacement is rougly ital controllers is available. The
dynamic applications. They stacks encapsulated in a stain- proportional to the applied E-500 modular system can be
provide sub-millisecond re- less steel case with stainless voltage. easily upgraded from an ampli-
sponse and sub-nanometer steel end pieces and a friction- fier to a servo controller, includ-
resolution. less internal spring preload. Open-loop operation is ideal ing different interface / display
The high load capacity and pre- for applications where the fast- modules.
load makes them ideal for est response and the high-est
machining applications and bandwidth are essential. Here, Read details in Mounting and
Aplication Examples active vibration cancellation. commanding and read-ing the Handling Guidelines page 1-48.
target position in absolute val-
Precision engineering / High Displacement with Ultra- ues is either not important or Notes
micromechanics High Reliability carried out by an external feed- High-resolution amplifiers and
Adaptive mechanics PICATM Power actuators are back loop. servo-control electronics, both
optimized for high-temperature digital and analog, see selec-
Active vibration damping working conditions and high- For highest positioning accura- tion guide in the "Piezo Drivers
Adaptronics duty-cycle dynamic applica- cy and repeatability, select the & Nanopositioning Controllers"
tions. factory installed closed-loop section page 6-2 ff.
Static and dynamic
All PICATM piezo ceramics are option with integrated ultra-
precision positioning
specifically designed for high- high- resolution strain gauge
Force generation / dutycycle applications. With position sensors and operate
materials testing PI’s extensive applications with PI servo-control electron-
knowledge, gained over sever- ics. For more information, read
e-9
P-225 and P-235, dimensions in mm. End pieces and case of stainless steel.
Sensor connection: LEMO FFA.0S.304; 1 m coaxial cable with PUR insulation.
Voltage connection: LEMO FGG.0B.701.CJA.1173, 1 m cable with PUR insultaion,
2-conductor, shielded
Technische Daten
P-225.10 P-225.20 P-225.40 P-225.80 P-235.10 P-235.20 P-235.40 P-235.80 P-235.90 Unit Tolerance
Operating voltage 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 V
Closed-loop travel 15 30 60 120 15 30 60 120 180 µm
Open-loop resolution** 0,3 0,6 1,2 2,4 0,3 0,6 1,2 2,4 3,6 nm typ.
Closed-loop resolution**** 0,15 0,3 0,6 1,2 0,15 0,3 0,6 1,2 1,8 nm typ.
Linearity 0,2 0,2 0,2 0,2 0,2 0,2 0,2 0,2 0,2 % typ.
Mechanical properies
Static large-signal 480 330 200 110 860 600 380 210 150 N/µm ±20
stiffness***
Unloaded resonant 14 10 7 4 14 10 7 3,9 2,8 kHz ±20 %
frequency
Push/pull force capacity 12500 / 12500 / 12500 / 12500 / 30000 / 30000 / 30000 / 30000 / 30000 / N Max.
2000 2000 2000 2000 3500 3500 3500 3500 3500
Shear force limit 255 152 84 73 707 420 232 147 147 N
Torque limit (on tip) 1,5 1,5 1,5 1,5 2 2 2 2 2 Nm
Drive properties
El. capacitance 320 630 1300 2600 550 1100 2400 5100 7800 nF ±20 %
Dynamic operating 33 33 33 33 65 65 65 65 65 µA/(Hz x µm) ±20 %
current coefficient
Miscellaneous
Mass (with cable) 410 470 610 900 580 690 940 1400 1900 g ±5 %
* Requires SGS sensor. SGS versions are shipped with performance reports
** Measured with an interferometer. The resolution of piezo actuators is not limited by stiction or friction
*** Dynamic small-signal stiffness is ~50 % higher
Piezo ceramic type: PICATM Power
Operating temperature range: -40 to +80 °C
Recommended controller/driver: B, I, J, see page 6-11
For maximum lifetime, voltages in excess of 750 V should be applied only for short durations
See Notes (Technical Data) for further information see page 2-84 ff
e-10
See www.pi.ws for other Servo &
Stepper Motor Controllers
C-863 Controller for Servo Actuators

Mercury™ DC-Motor Controller / Driver with Network Feature
For easy synchronization of
motion with internal or exter-
nal trigger signals four input C-863.10
Mercury™ DC-Motor Controller,
and four output lines are pro- 1 Channel, with Wide-Range
vided. Power Supply
Accessories:
Multi-Axis Control,
Combination of DC & Stepper C-819.20
2-Axis Analog Joystick for
Motors Mercury™ Controller
Up to 16 C-863 Mercury™ DC
C-819.20Y
servo controllers and C-663 Y-Cable for Connecting
stepper motor controllers can 2 Controllers to C-819.20
be daisy-chained and ad-
C-862.PB3
dressed via the same interface. Push Button Box for Mercury™
The C-863 Mercury™ DC servo controller features USB and RS-232 interfa-
ces and incremental encoder signal processing at 20 MHz bandwidth
The networking feature allows
the user to start out with one ply, RS-232 communication
controller and add more units cable, a daisy-chain network
High Performance at Low Cost later for multiaxis setups. cable and a comprehensive
DC Servo-Motor Controller Supplies up to 30 W software package.
20 MHz Encoder Input for High Speed & Resolution
Easy Programming
Macro Programmable Stand-Alone Functionality
All servo and stepper motor A stepper motor version is
Network Capability for Multi-Axis Applications available as the C-663:
controllers of the Mercury™
Non-Volatile EEPROM for Macros and Parameters
family can be operated using
Digital I/O Lines (TTL) Stepper Motor Version
the PI general command set
Motor-Brake Control (GCS). PI-GCS allows network- C-663.10
USB and RS-232 Interface ing of different controller units, MercuryTM Step Stepper Motor
Controller with Wide-Range Power
Optional Joystick for Manual Control both for piezo-based and Supply
Works with All PI Micropositioning Actuators and Stages motorized positioning units,
with minimal programming C-663.PS
effort. In addition, the C-863 Wide-Range Power Supply for
MercuryTM Step, 24 V
can be programmed using the
The latest generation Mercury™ cost-effective micropositioning
native command set of previ-

C-863 servo motor controller is systems.
ous Mercury™ controllers.
even more powerful and versa-
tile than its predecessors. Easy
Flexible Automation Cost-Saving Due to Integrated
data interchange with laptop or

PC is possible via the USB The Mercury offers a number
™ Amplifier and PWM Outputs
interface. The RS-232 interface of features to achieve automa- The unique Mercury™ concept
provides for easy integration in tion and handling tasks in combines a high-performance
industrial applications. The research and industry in a very motion controller and an inte-
compact design with its inte- cost-effective way. Programm- grated power amplifier in a
grated amplifier makes it ideal ing is facilitated by the high- small package. Additional
for building high-performance, level mnemonic command lan- PWM control outputs allow the
guage with macro and com- direct operation of any DC-
pound-command functionality. motor-driven PI micro-posi-
Application Examples Macros can be stored in the tioning system––even high-
non-volatile memory for later speed stages such as the
Fiber positioning recall. M-500 ActiveDrive™ Translation
Stages––reducing costs, in-
Automation creasing reliability and simpli-
Stand-alone capability is pro-
fying the setup.
Photonics / integrated optics vided by a user-programmable
autostart macro to run automa-
Quality assurance testing tion tasks at power up (no run- Contents of Delivery
time computer communication Each controller is delivered
Testing equipment
required!). with a wide-range power sup-
f-1
See www.pi.ws for other Servo & Piezo • Nano • Positioning
Stepper Motor Controllers
C-843 DC-motor controller board (center) with M-110 linear stage, M-235
linear actuator, M-511.DD translation stage and M-501.1DG vertical stage.
No external amplifier is required to drive any of these or other PI stages.
Small motors are driven through the C-843’s onboard linear amplifiers, direct-drive
stages (e.g. M-511.DD) employ ActiveDrive™ controlled off the C-843’s PWM outputs.
C-863 dimensions in mm
Technical Data
Model C-863.10
Function DC-servo-motor controller, 1 channel
Motion and control
Servo characteristics P-I-D-amplifier, parameter change on-the-fly
Trajectory profile modes Trapezoidal, point-to-point
Encoder input AB (quadrature) single-ended or differential TTL signal, 20 MHz
Stall detection Servo off, triggered by programmable position error
Input limit switch 2 x TTL (pull-up/pull-down, programmable)
Input reference switch 1 x TTL
Motor brake 1 x TTL, software controlled
Electrical properties
Output power max. 30 Watt (PWM)
Output voltage 0 to 15 V
Current 80 mA + motor current (3 A max.)
Interfaces and operation
Communication interfaces USB, RS-232 (9-pin [m] sub-D)
Motor connector 15-pin (f) sub-D
Controller network Up to 16 units on single interface
I/O ports 4 analog/digital in, 4 digital out (TTL)
Command set Mercury Command Set, GCS (via DLL)
User software PIMikroMove®, MMCRun
Software drivers GCS (PI General Command Set)-DLL, LabVIEW drivers, native Mercury™ DLL
Supported functionality Start-up makro; internal safety circuitry: watchdog timer
Manual control (optional) 2-axis joystick, Y-cable for 2D motion, pushbutton box
Miscellaneous
Operating voltage 15 to 30 V
included: external power supply C-890.PS, 15 V / 2 A
Operating temperature range +5 to +50 °C
Mass 0.3 kg
f-2
See www.pi.ws for other
Ultrasonic Motor Controllers
C-866 Controller for Ultrasonic Motors

High-Speed, Closed-Loop Controller / Driver for PILine® Ultrasonic Piezo Linear Motors
tioning system, the piezomo-
tor drive electronics has been
integrated in the controller. C-866.161
Piezomotor Controller with Drive
Various versions of the con- Electronics, 1 Channel, for PILine®
troller are available, depend- Systems with P-661 Motors
ing on the piezomotor used.
C-866.164
Piezomotor Controller with Drive
The C-866.161 version, for Electronics, 1 Channel, for PILine®
example, contains the drive Systems with P-664 Motors
electronics for the P-661 motor C-866.165
(page 10-14 f) , which is used Piezomotor Controller with Drive
in the M-663 (page 10-16 f) Electronics, 1 Channel, for PILine®
micro linear stage. Systems with P-665 Motors
PILine® micro linear stage with
19 mm travel range and C-866.D64
0.1 µm resolution with To assure the best possible Piezomotor Controller with Drive
C-866.161 controller Electronics, 1 Channel, for PILine®
system performance in terms
Systems with M-674 RodDrive
of force, velocity up to several
100 mm/s and settling times of Accessories
Optimized for PILine® Piezo Linear Motors a few tens of milliseconds, the
High-Speed Encoder Input integrated drive electronics is
C-843.ATS
Auto-Tuning Software Option
PID Servo Algorithm with Dynamic Parameter Switching fine-tuned to the connected
Integrated Piezomotor Drive Electronics actuator / stage at the factory.
3 TTL-Inputs, 3 TTL-Outputs
Analog Input Software / Programming
custom application programs
Extensive Software Support In addition to the user soft- is simplified, because the com-
ware for setup, system opti- mands for all supported
mization and operation, com- devices are identical in syntax
prehensive LabViewTM and DLL and function. PI controllers for
libraries are provided. nanopositioning systems, for
piezomotors and servo or step-
Communication with the C-866 per motors can be command-
is provided either through the ed with GCS.
The C-866 motion controller Spezialized Servo Algorithms RS-232 or the USB interface.
was specially designed for for Ultrasonic Motors For manual control, the unit Advantages of PILine®
closed-loop positioning sys- can be operated with a joystick Micropositioning Systems
The C-866 uses a highly spe-
tems with PILine® ultrasonic on the host PC.
cialized DSP (Digital Signal The ultrasonic piezoceramic
piezo linear drives. This com- Processor) to handle the

The PIMikroMove user soft-
® drives used in PILine® micro-
pact unit contains not only PID servo-control algorithm as
ware provides the PITuning- positioners have a number of
servo-control and communica- well as other system functions.
Tool for system performance advantages over classical
tions circuitry, but also the Because of the motion proper-
optimization. Graphic displays drives:
drive electronics. ties typical for ultrasonic
show the system’s behaviour
piezomotors, the contoller has
and facilitate parameter set- Higher Accelerations, up to
a number of special features, 10 g
ting.
including dynamic control Speeds up to 500 mm/s
parameter adaptation. The
Optionally, the C-843.ATS Small Form Factor
high-bandwidth encoder input
Auto-Tuning software is avail- Self-Locking When Powered
Biotechnology with a limit frequency of Down
able; it determines the ideal
35 MHz supports the high
settings automatically. No Shafts, Gears or Other
Fiber positioning velocities of ultrasonic piezo- Rotating Parts
Automation motor stages, even at high res- Non-Magnetic and Vacuum
olution. PI General Command Set Compatible Drive Principle
Photonics / integrated (GCS)
optics Integrated Drivers for The comprehensive command
Quality assurancec testing Piezomotors structure is based on the PI
Testing equipment To reduce the number of com- General Command Set (GCS).
ponents in the PILine® posi- With GCS the development of
f-3
See www.pi.ws for other
Ultrasonic Motor Controllers
PIMikroMove® software for easy system performance feedback

and parameter optimization
C-866 dimensions in mm
Technical Data
C-866.161 C-866.164 C-866.D64 C-866.165
Function Controller / driver for PILine® piezomotor systems
Drive type PILine® P-661 motors PILine® P-664 motors PILine® RodDrive M-674 PILine® P-665 motors
Channels 1 1 1 1
Motion and control
Servo characteristics Programmable PID V-ff filters, parameter changes on-the-fly
Trajectory profile Trapezoidal, S-curve
Processor Motion chip, 2.5 kHz servo update rate
Encoder input A/B (quadrature) differential signals, 35 x 106 counts/s
Limit switches 2 TTL lines, programmable
Reference switch 1 TTL line, programmable
Operating voltage 12 VDC from external power supply (included in delivery)
Output power/channel 3W 8W 18 W 5W
Output voltage/channel 0 to 42 Vrms 0 to 60 Vrms 0 to 100 Vrms 0 to 170 Vrms
Current 300 mA w/o motor 300 mA w/o motor 300 mA w/o motor 300 mA w/o motor
Communication interfaces USB 1.1, RS-232, max. 115,200 baud
Motor connector MDR14
I/O ports Mini DIN 9-pin socket with 3 TTL-inputs, 3 TTL-outputs, 1 analog input (0 to 5 V)
Command set PI General Command Set (GCS)
User software PIMikroMove®
Software drivers GCS-DLL, LabVIEWTM driver
Manual control Joystick on host PC
Miscellaneous
Temperature range +10 °C to +50 °C
Mass 780 g
Dimensions 174 x 104 x 49 mm (w/o ground stud, w/o rubber feet, w/o rails)
f-4
Visit www.pi.ws for NEXLINE®
Linear Motor Controllers
E-861 Controller/Driver for NEXACT® Systems

Networkable Controller for NEXACT® Ceramic Linear Drives and Positioners
E-861.1A1
NEXACT® Controller, 1 Channel,
Linear Encoder
Easy System Setup,

Comprehensive Software
All parameters can be set
and checked by software.
System setup and configura-
tion is done with the included
PIMikroMove® user-interface
software. Interfacing to custom
software is facilitated with
included LabView drivers and
PiezoWalk® System: E-861.1A1 NEXACT® Controller with open-loop N-310.01
NEXACT® linear drive; suitable for installation in stage with linear encoder DLLs. With the PI General
Command Set (GCS), system
programming is the same with
For NEXACT® Drives and Positioning Systems all PI controllers, so controlling
a system with a variety of dif-
Complete System with Controller,
ferent controllers is possible
Integrated Power Amplifiers and Software
without difficulty.
Open-Loop Operation, or Closed-Loop with Linear Encoder
High Performance at Low Cost
Daisy-Chain Networking for Multi-Axis Operation
Non-Volatile Macro Storage for Stand-Alone Functionality
with Autostart Macro
I/O for Automation, Joystick for Manual Operation
Parameter Changes On-the-Fly
The new, compact E-861 con- A programmable autostart

troller is designed to operate macro allows stand-alone
NEXACT® linear drives and operation without external

closed-loop positioning sys- communication. Upon power-
tems using them, simply and up, the macro with its internal
precisely. In perfect harmony command sequence is execut-

with the mechanics, the E-861 ed automatically.
supports both motion modes
of the PiezoWalk® stepping For easy synchronization of
drive: for longer moves, the motion with internal or exter-
stepping mode, and for moves nal trigger signals, four input
shorter than typically 7 µm, and four output lines are pro-
the analog mode, which provided.
vides high-dynamics position-
ing with resolutions of less Multi-Axis Operation
than 1 nm. The NEXACT® drive Up to 16 E-861 controllers can
design minimizes piezo operat- be networked and controlled
ing voltages to 45 V and below. over a single PC interface.
Flexible Automation Such daisy chain networks are

E-861 controllers offer a num- flexible, can be extended at
ber of features to support any time and are compatible
automation and handling. For with other PI controllers (e.g.
example, macros can be stored DC servo-motor and stepper
in non-volatile memory. motor controllers).
f-5
Visit www.pi.ws for NEXLINE®
Linear Motor Controllers
Technical Data
E-861.1A1
Function Controller for NEXACT® drives / systems
Drive type N-310.01 NEXACT® linear drive
Channels 1
Motion and control
Servo characteristics P-I-D-amplifier, parameter change on-the-fly
Trajectory profile modes Trapezoidal
Encoder input Analog encoder input sine-cosine interpolation circuit preset for
differential transmission, 1 Vpp amplitude and 2.27 V offset
of the encoder signal
Input limit switch 2 x TTL (pull-up/pull-down, programmable)
Input reference switch 1 x TTL
Output power max. 40 W
Output voltage -10 to +45 V
Current consumption max. 2 A
Communication interfaces USB 1.0, RS-232 (9-pin (m) D-Sub)
Motor connector D-Sub 15-pin (f) High Density
Sensor connector D-Sub 15-pin (m) High Density
Controller network Up to 16 units on single interface
I/O ports 4 analog/digital in, 4 digital out (TTL)
Command set PI General Command Set (GCS)
User software PIMikroMove®, PI Terminal
Software drivers GCS-DLL, LabVIEW drivers
Supported functionality Start-up macro; data recorder for categories like current position or
velocity; internal safety circuitry: watchdog timer
Manual control (optional) Joystick, Y-cable for 2D motion, pushbutton box
Miscellaneous
Operating voltage 24 V
included: external power supply, 24 V, 2.5 A
Operating temperature range 0 to +50 °C
Mass 1.1 kg
Dimensions 206 x 130 x 66 mm (with mounting rails)
The E-755 Controller for NEXLINE® high-force linear

motor actuators (models N-111, N-214, N-215, etc.)
For more information visit www.pi.ws
f-6
Visit www.pi.ws for our full selection
of Piezo Controllers
E-625 Controller for Piezo (Flexure) Actuators

Compact Piezo Amplifier & Servo-Controller with High-Speed Interface
effort in the face of complex
multi-axis positioning tasks. It
is also supported by the E-516 E-625.SR
LVPZT Piezo Amplifier & Servo-
Computer Interface Module, Controller, Strain Gauge Sensor,
and most PI nanopositioning RS-232 Interface
controllers and motor con-
trollers. For more information E-625.LR
on GCS, see p. 9-28.
Controller, LVDT Sensor,
RS-232 Interface
E-625.CR
Controller, Capacitive Sensor,
RS-232
E-625.CN
E-625.SR (left) and E-625.CR Network Cable for Connecting
compact piezo servo-controllers. two E-625s
Controls Piezo Flexure Actuators/Stages and Stack Actuators

Network Capability with up to 4 Channels
For Capacitive, LVDT and Strain Gauge Position Sensors
Wave Table for User-Defined Curves
Integrated 20-Bit High-Speed RS-232 Interface
The E-625 is a bench-top piezo and LVDT sensors can be net-

linear amplifier and position worked and controlled over a
servo controller with integrated single RS-232 connection.
high-speed RS-232 computer Between the individual E-625s,
interface and 20-bit D/A con- parallel networking with op-
verters. The low-noise amplifi- tional E-625.CN cables is used
er can supply/sink a peak cur- providing higher data rates
rent of 140 mA in a voltage than possible with serial links.

range of -20 to 120 V. Versions
are available to operate with Wave Table
SGS, LVDT or capacitive posi- User-defined data-points, cal-
tion sensors, making the servo- culated with any arbitrary func-
controller suitable for a wide tion, can be stored in a wave
variety of PI piezo actuators table in the E-625 for later out- E-625 open-loop frequency response with various PZT loads.
Values shown are capacitance in µF.
and nanopositioning stages. put under control of an exter-
nal trigger.
New and Fast
Communications Interface Software / GCS Command Set
The RS-232 interface handles The E-625 controller comes
the communications with the with Windows™ installation
outside world. It performs up to software, DLLs and Lab View™
300 highly deterministic read drivers. The command struc-
or write operations per second ture of the extensive command
and incorporates precision 20- set is based on the PI General
bit D/A and A/D converters for Command Set (GCS). The GCS
exceptional positional stability was developed by PI to facili-
and resolution. tate the programming and
operation of a wide range of Ideal system configuration:
Multi-Axis Network different devices with a com- E-625.CR with P-725 PIFOC
Up to four E-625s with any mon command language, thus microscope objective positioner.
combination of capacitive, SGS reducing the programming

f-7
Visit www.pi.ws for for our full selection
of Piezo Controllers
Two single-channel piezo controllers:

E-625 and the more powerful E-665 (background).
Technical Data
Models E-625.SR, E-625.LR, E-625.CR
Function Power amplifier & position
servo-control of LVPZTs
Channels 1
Amplifier
Output voltage -20 to +120 V
Maximum output power 11 W (s. p. 6-52)
Average output power 6W
Peak output current <5 ms 140 mA
Average output current 60 mA
Current limitation Short-circuit proof
Voltage gain 10 ±0.1
Polarity Positive
Input Impedance 100 kΩ
Mass 1050 g
Operating voltage 12 to 30 VDC, stabilized
Operating current 2A
Interface
D/A converter 20-bit resolution
A/D converter (sensor) 20-bit resolution
Networking 4 channels, parallel
RS-232 baudrate 9.6 kBaud–115.2 kBaud (default 115.2)
Wave table 64 values, 100 Hz, externally triggered
Position Servo-Control
Sensor types Capacitive (E-625.CR),
Strain gauge (E-625.SR), LVDT (E-625.LR)
Servo characteristics P-I analog, notch filter
Connectors
PZT connector LEMO ERA.00.250.CTL / Sub-D Mix (.CR)
Sensor connector LEMO EPL.0S.304.HLN (.SR, .LR) / Sub-D Mix (.CR)
E-761 Digital Piezo Controller in PCI-Board Format.
Analog input SMB For more information visit www.pi.ws
Monitor output SMB
RS-232 9-pin sub-D (male)
f-8
Piezo Stepping Motor Basics
PiezoWalk® Precision Drives – unlimited travel range and based on different versions ity. These properties are typi-
Millimeter Travel, Nanometer still provide the characteristic of the PiezoWalk® principle: cally better for piezo stepping
Resolution, High Forces features of a piezoelectric NEXLINE® and NEXACT®. Both actuators compared to inertia
actuator: an open-loop resolu- provide specific advantages drives or ultrasonic motors.
PiezoWalk® drives break away tion down to 30 picometers and depending on the application. The operation is possible in
from the limitations of conven- a very high stiffness for dynam- two different modes: a high-
tional Nanopositioning actua- ic operation and force genera- PiezoWalk® piezo stepping resolution, high dynamics ana-
tors. They offer a basically tion. PI offers two product lines drives usually consist of sever- log mode within a single step,
al individual piezo actuators and a step mode with virtually
and generate motion through unlimited travel range.
succession of coordinated
clamp / unclamp and shear-
motion cycles (steps). Each
cycle provides only a few
microns of movement, but run-
ning at hundreds of hertz, the
drive achieves continuous
motion in the mm/second
range. 50 picometer steps with a NEXLINE®
drive, measured with external ultra-
high-resolution capacitive sensor.
The PiezoWalk® working princi- This performance provides a big safety
Custom PiezoWalk® linear actuator ple provides high force capabil- margin for next generation nano-
technology applications
ities, resolution and repeatabil-
Features and Advantages of PiezoWalk® drives are availa-

PiezoWalk® Drives ble for non-magnetic appli-
cations such as super-con-
Very high resolution, limited ductivity experiments. They
typically only by the sensor. do not create magnetic
In fine-adjustment, analog fields nor are they influen-
mode, resolution of 30 pico- ced by them.
meters has been demonstra- The active parts in
ted. PiezoWalk® drives are made
High force generation and of vacuum-compatible cera-
6-axis parallel-kinematic nanopositioning system (Hexapod) with N-215
stiffness. NEXLINE® drives mics. The drives also work based NEXLINE® high-load actuators for use in strong magnetic fields
can hold and generate for- in UV-light environments.
ces to 600 N, NEXACT® to NEXLINE® drives can survive
15 N. shock loads of several g
PiezoWalk® drives hold a during transportation.
stable position to nanome- PiezoWalk® drives are
ter level in power-off mode. available in three levels
Due to the actuator design, of integration to provide
the maximum clamping flexibility for OEMs: OEM
force is applied at rest. drives, packaged actuators
Because a position can be and integrated into
held with zero operating vol- complex positioning
tage, leakage currents can- systems such as multi-axis
not affect the integrity of the translation stages or 6-DOF NEXLINE® linear
actuator principle
piezo drive. Hexapods.
g-1
Piezo Stepping Motor Basics
NEXLINE® High-Force Drives

for Nanopositioning
NEXLINE® systems are based
on very rugged, high-efficiency
shear and clamping actuators
and incorporate a preloading
mechanism to provide pushing
and holding forces up to 600 N
with high lifetime. The rigid
design with resonant frequen-
cies of hundreds of hertz allows
the construction of very stiff
structures and helps to sup-
press vibration. The analog
operating mode can be used N-215 high-load NEXLINE® linear drive
for dithering and active vibra- provides holding forces to 600 N and 20 mm travel
tion cancellation.
Compact NEXACT® Drives for

Moderate Forces
NEXACT® drives use bending
actuators which combine the
feed forward and the clamping
cycles. They provide push/pull
forces to 15 N with maximum
velocities of more than
10 mm/s at low operating volt-
ages of 40 V. The compact and
cost-effective NEXACT® drives
are available with various drive
electronics, ranging from cost-
effective OEM drives for open-
loop operation in stepping
mode to the sophisticated
E-861 servo-controller for high-
resolution, closed-loop linear NEXLINE® linear actuator principle
translation stages.
g-2
Ultrasonic Piezo Motor Basics
PILine® Ultrasonic Piezomotors – Working Principle
PILine® linear piezomotors are accelerations to 10 g and veloc-
based on a novel, patented ities to 500 mm/s.
ultrasonic drive developed by Ultrasonic motors cannot pro-
PI. At the heart of the system is vide the unlimited resolution of
a rectangular monolithic piezo- linear piezo actuators and flex-
ceramic plate (the stator), seg- ure-guided piezo positioning
mented on one side by two stages. These motors transfer
electrodes. Depending on the motion through friction, which
desired direction of motion, the is why their repeatability is lim-
left or right electrode of the ited to about 50 nm. Much
piezoceramic plate is excited to higher resolution and holding
produce high-frequency eigen- forces can be achieved with
mode oscillations at tens to PiezoWalk® piezomotors / dri-
hundreds of kilohertz. An alu- ves. Variety of PILine® ultrasonic piezomotors,
mina friction tip (pusher) translation stages and motion controllers.
attached to the plate moves PILine® Levels of Integration
along an inclined linear path at PILine® ultrasonic drive prod-
the eigenmode frequency. ucts are offered in three differ-
Through its contact with the ent levels of integration. The
friction bar, it provides micro- drive electronics and controller
impulses that drive the moving can be chosen accordingly.
part of the mechanics (slider, P-661 and P-664 OEM motors
turntable, etc.) forward or back- require the greatest amount
wards. With each oscillatory of care at the customer’s site.
cycle, the mechanics executes Motor and friction bar – the
a step of a few nanometers; the length depends on the travel
macroscopic result is smooth range – have to be integrated
motion with a virtually unlimit- into a mechanical setup.
ed travel range. The driving Operation requires preload State-of-the PILine® ultrasonic motors are based on a simple construc-
force is taken from the energy of the motor against the friction allowing for the design of low-cost drive units and extremely com-
pact, high-speed micro-positioning stages smaller than a matchbox.
in the longitudinal oscillation tion bar, guiding and, if
component. The transverse necessary, the servo-loop.
component serves to increase / M-674 RodDrives can replace Linear positioning stages
decrease the pressure of the classical drive elements like represent the highest level of
friction tip against the friction rotary motor / leadscrew manufacturer integration.
bar. The transverse oscillation assemblies, or magnetic The piezomotor is integrated
energy determines the maxi- linear drives integrated into completely in a high-quality
mum frictional force and hence a micropositioner or hand- mechanical setup inlcuding
the holding and driving force of ling device. Integration if necessary the servo-loop
the motor. State-of-the-art requires guiding and – if with direct-metrology linear
ultrasonic motors can produce necessary – the servo-loop. encoders.
PILine® levels of integration: OEM motor, RodDrive, linear positioning stage.
g-3
Ultrasonic Piezo Motor Basics
Features and Advantages

of PILine ® Ultrasonic Custom high-force ultrasonic
piezo motors can provide
Piezomotors
forces to 50N.
Compact Size: the direct-
drive principle allows the de-
sign of ultra-compact trans-
lation stages. The M-662, for
example, provides 20 mm
travel in a 28 x 28 x 8 mm
package.
Low inertia, high accelera-
tion, speed and resolution:
PILine® drives achieve veloci-
ties to 500 mm/s and accele-
rations to 10 g. They are also
very stiff, a prerequisite for
their fast step-and-settle
times – on the order of a few
milliseconds – and provide
resolution to 0.05 µm. The no lubricant flow or material steady-state heat dissipa-
lack of a leadscrew means relaxation to cause submi- tion.
cron creep. There is also no Vacuum Compatibility: Vacu-
rotational inertia to limit um compatible versions of
acceleration and decelera- PILine® drives are available.
tion. Negligible EMI: PILine® dri-
Excellent Power-to-Weight ves do not create magnetic
Ratio: PILine® drives are opti- fields nor are they influenced
mized for high performance by them, a decisive advanta-
in a minimum package. No ge in many applications.
comparable drive can offer Custom Solutions / Flexibili-
the same combination of ty for OEMs: PILine® drives
acceleration, speed and pre- are available in open-loop
cision. and closed-loop translation
Safe: The minimum inertia of stages and as OEM compo-
the moving platform toget- nents. PI develops and ma-
her with the “slip clutch” nufactures all piezo ceramic
effect of the friction drive components in-house. This
Settling behavior of a PILine® M-663 linear stage, 100 µm step. A stable position to
within 0.1 µm can be reached in only 10 ms. provide better protection of gives us the flexibility to pro-
precision fixtures / devices vide custom motors (size,
than leadscrew-driven sta- force, environmental condi-
ges. Despite the high speeds tions) for OEM and research
and accelerations, there is a applications.
much lower risk of pinching Quality, Lifetime, Experien-
fingers or other injuries than ce: Based on PI’s 30+ years of
with conventional drives. experience with piezo nano-
This means users may not positioning technology,
need interlocks, light cur- PILine® drives offer exceptio-
tains or other measures to nal precision and reliability
keep them safe. with an MTBF of >20,000
Self-Locking Feature: PILine® hours. Rotating components
drives create a braking force such as gears, shafts and
when not energized without moving cables that are prone
the position shift common to failure in conventional
with conventional mechani- motion systems, are not part
cal brakes. Other benefits of of the PILine® design.
the self-locking are the elimi-
Principle .design of a PILine® ultrasonic piezomotor-driven translation stage.
nation of servo dither and
g-4
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Linear Actuators For Precision Motion Control

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Linear Actuators for

Precision Motion Control

Section a Section b Section c

Section c Section d Section e Section f

<0.1 nm Resolution Range) Microsecond-Range) Linear Motors

M-228 Stepper Motor Actuator

Limit and Reference Switches

Max. velocity 1.5* mm/s

Non-Rotating Tip Spindle Leadscrew

Ask about custom designs!

M-227.10 (w/ piezo tip), M-227.25, M-227.50 (w/ ball tip),

10, 25 & 50 mm Travel Ranges High-Resolution Piezo Option

For mounting, the DC-Mikes

M-219.10 ball tip option P-250.20 piezo tip option

M-230 are ultra-high-resolution Elimination of torque-

Compared to conventional tremely low-stiction, low-fric-

Ball tip (included) Flat tip (included)

Ask about custom designs!

M-231.17 high-resolution DC-Mike actuator, 17 mm travel range

17 mm Travel Range sub-D connector and a 3 m

Upgrade for Manual Aligners

electric fiber alignment sys-

effective solution in industrial

Quality control Nominal motor power 2 W

M-232 Servo Motor Actuator

Ask about custom designs!

Integrated Line Drivers

M-232.17 high-resolution DC-Mike actuator

olution linear actuator provid- low-stiction, low-friction con-

Unidirectional repeatability 0.2 µm

Fiber alignment Gear ratio 28.44444:1

100 N Lateral Load Limit troller. M-235.5VG

optical, linear encoder (direct

Quality assurance testing ActiveDrive™ DC-Motor

Testing equipment DC motor drives offer several

M-238.5PL velocity at 30 mm/s is highly constant.

M-238.5PL repeatability is better than 0.3 µm.

The settling time for a 30 mm step is less than 1.5 seconds.

M -122 Servo Motor Linear Slide

lution and a highly effi-

ty than conventional stepper For the protection of your equip-

M-41 . DG DC Motor Gearhead

M-413 and M-414

Polished bearings provide excellent guiding accuracy: better than

M-414.1xx M-414.2xx M-414.4xx M-414.xPD M-414.xDG M-414.x2S

M-414.xPD M-414.xDG M-414.x2S M-413.xPD M-413.xDG M-413.x2S Units

System Integration for Higher Accelerations, up to

0D 0 0 0

Dimensions of the M-674.00 RodDrive in mm

Custom versions on request

without the heat dissipation

P-652.01 OEM-Drive, dimensions in mm.

M-664 micropositioning sys- For improved guiding accura-

accuracy translation stages roller bearings mounted on

with piezo linear encoders. The ground aluminum profiles. The

M-664 stage is next-larger in integrated P-664 PILine® linear 40

of advantages over classical

PILine® Micropositioning stages: M-682, M-664 and M-663 (from left)

cal components like gears Ask about custom designs

Working Principle for

Models N-310.01 Tolerance

high resolution, and generated a 5 nm resolution linear enco- newtons (NEXACT®) up to

NEXLINE® PiezoWalk® Piezo-

0D 0 0 0