70114EN 04 OperatorsManual C Series

Laser C Series
Operators Manual
Computer Numerical Controls
GE Fanuc Automation Europe
TECHNOLOGY AND MORE
B-70114EN/04
B70114EN/04 PREFACE
p1
PREFACE
This document describes the following models.
Model Abbreviation
FANUC LASERMODEL C1500B C1500B
FANUC LASERMODEL C2000C C2000C
FANUC LASERMODEL C3000D C3000D
FANUC LASERMODEL C4000A C4000A
B70114EN/04 PREFACE
p2
And, these models conform with EMC Directive 89/336/EEC.
401-0597 Japan
401-0597 Japan
B70114EN/04 PREFACE
p3
401-0597 Japan
401-0597 Japan
B70114EN/04 PREFACE
p4
401-0597 Japan
401-0597 Japan
B70114EN/04 PREFACE
p5
B70114EN/04 PREFACE
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Table of Contents
B70114EN/04
c1
PREFACE p1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
1. OVERVIEW 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
1.1 MANUAL CONTENTS 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
1.2 APPLICABLE MODELS 3 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
1.3 RELATED MANUALS 3 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
1.4 FOR SAFE OPERATION 4 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
1.5 NOTES ON READING THIS MANUAL 4 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2. SAFETY 5 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.1 LASER BEAM 6 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.2 HIGH VOLTAGE 11 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.3 SAFETY ENCLOSURE (AT YOUR WORK STATION) 19 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.4 FIRE 19 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.5 TOXIC FUME 19 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.6 HIGH TEMPERATURE 20 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.7 WARNING LABELS 28 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.8 KEY CONTROL 41 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.9 SHUTTER LOCK 41 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.10 EMERGENCY STOP BUTTON 42 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.11 WARNING LIGHT (OPTIONAL) 42 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.12 INAPPOSITE USE OF LASER OSCILLATOR 43 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3. INSTALLATION 44 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.1 CONDITION 45 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.1.1 Environmental Conditions 45 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.1.2 Power Source 45 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.1.3 Laser Gas 45 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.1.4 Cooling Water 46 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.2 TRANSPORTATION 48 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.2.1 Lifting Laser Oscillator 48 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.2.2 Packing 49 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.2.3 Environmental Condition 53 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.3 STORAGE 53 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.3.1 Environmental Condition 53 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.4 BASE OF OSCILLATOR 54 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.5 MAINTENANCE AREA 56 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.6 WATER CONNECTION 66 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.6.1 Chiller 66 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.6.2 Cooling Water Temperature 66 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.6.3 Cooling Water Flow Rate 67 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.6.4 Plumbing 67 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.7 LASER GAS 75 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.7.1 Gas Bottle 75 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.7.2 Laser Gas Tubing 75 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.7.3 Gas Pipe 75 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TABLE OF CONTENTS
B70114EN/04
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3.8 LASER BEAM 76 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.8.1 Position and Tolerance of Laser Beam Exit 76 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.8.2 Beam Divergence 77 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.8.3 Tolerance of Beam Direction 77 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.8.4 Beam Guide 77 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.9 ELECTRIC CONNECTION 78 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.9.1 Power Cable (L1, L2, L3) 82 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.9.2 Ground Cable 82 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.9.3 I/O Signal Cable 82 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.9.4 Other Signal Cables to the IF PCB 82 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.9.5 XT20 Terminal 85 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.9.6 EMC Countermeasure 93 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4. FUNCTIONS 94 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.1 INTERNAL STRUCTURE 95 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.1.1 Outline 95 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.2 COMPONENT DETAILS 103 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.3 OPERATION SEQUENCE 115 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.4 LASER PROCESSING MACHINE SYSTEM 117 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5. MAINTENANCE 119 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.1 DAILY INSPECTION 120 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.2 PERIODIC MAINTENANCE 121 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.3 DETAILS OF MAINTENANCE 123 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.3.1 Maintenance Panels and Oil Gauge Position 123 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.3.2 Turbo Blower Oil 129 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.3.3 Exhaust Pump Oil 131 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.3.4 Exhaust Pump Filter 132 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.3.5 Exhaust System Filter 133 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.4 AGING 135 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.4.1 Leak Check Method 135 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.4.2 Aging Method 135 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.5 MAINTENANCE PARTS 138 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.5.1 Spare Parts 138 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.5.2 Maintenance Tools 139 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6. TROUBLESHOOTING 140 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.1 CHECKING ON FAULTS 141 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.2 RESPONDING TO ALARM MESSAGES ON THE SCREEN 142 . . . . . . . . . . . . . . . . . . . . . . . . . . . .
APPENDIX
A. EXTERNAL VIEW 159 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
B. FANUC LASER C SERIES SPECIFICATIONS 167 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
C. ERROR CODE LIST 171 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
D. FANUC SERVICE NETWORK 173 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
E. GLOSSARY 174 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
B70114EN/04 1. OVERVIEW
1
1
OVERVIEW
In this manual, we have tried as for as possible to address all issues.
However, space restrictions prevent us from describing everything that
must not be done, or which cannot be done, because there are so many
possibilities.
Therefore, all matters which are not specifically described as being
possible should be regarded as being impossible.
Contents of this chapter
1.1 MANUAL CONTENTS 2 . . . . . . . . . . . . . . . . . . . . . . . . .
1.2 APPLICABLE MODELS 3 . . . . . . . . . . . . . . . . . . . . . . .
1.3 RELATED MANUALS 3 . . . . . . . . . . . . . . . . . . . . . . . . .
1.4 FOR SAFE OPERATION 4 . . . . . . . . . . . . . . . . . . . . . . .
1.5 NOTES ON READING THIS MANUAL 4 . . . . . . . . . . .
2
This manual consists of the following chapters and appendixes:
1. OVERVIEW
Chapter 1 covers the configuration of the manual, applicable models,
related manuals, and provides notes on reading the manual.
2. SAFETY
Chapter 2 covers the warnings and precautions related to laser beams,
high voltages, high temperatures, and a toxic substances.
To ensure safe operation, read this chapter first.
3. INSTALLATION
Chapter 3 describes the condition for installation and connection of
electrical cables, water tubes, gas tubes.
4. FUNCTIONS
Chapter 4 describes the structure and operation of the laser oscillator.
5. MAINTENANCE
Chapter 5 describes the periodic maintenance of the laser oscillator.
6. TROUBLESHOOTING
Chapter 6 describes the actions to be taken if the oscillator
malfunctions.
APPENDIX
A. EXTERNAL VIEW
B. FANUC LASER C SERIES SPECIFICATIONS
C. ERROR CODE LIST
D. FANUC SERVICE NETWORK
E. GLOSSARY
1.1
MANUAL CONTENTS
3
This manual covers the following models:
Model Abbreviation
FANUC LASERMODEL C3000D C3000D
FANUC LASERMODEL C4000A C4000A
The following manuals are available for the FANUC LASER C series:
FANUC Series 0L DESCRIPTIONS B61572E
CONNECTION MANUAL B61573E
OPERATORS MANUAL B61574E
MAINTENANCE MANUAL B61575E
FANUC Series 16LA DESCRIPTIONS B61852E
CONNECTION MANUAL B61854E
OPERATORS MANUAL B61853E
PARAMETER MANUAL B61810E
FANUC Series 16LB DESCRIPTIONS B62442E
CONNECTION MANUAL
(HARDWARE)
B62443E
CONNECTION MANUAL
(FUNCTION)
B62443E1
OPERATORS MANUAL B62594EN
PARAMETER MANUAL B62600EN
FANUC Series 16iLA DESCRIPTIONS B63192EN
CONNECTION MANUAL B63193EN
OPERATORS MANUAL B63194EN
MAINTENANCE MANUAL B63195EN
FANUC LASER C series OPERATORS MANUAL B70114EN
MAINTENANCE MANUAL B70115EN
1.2
APPLICABLE
MODELS
1.3
RELATED MANUALS
4
This manual contains precautions which must be observed during
operation of the laser oscillator, to ensure the operators safety and prevent
damage to the oscillator. Each precaution is indicated by Warning or
Caution according to its severity.
Supplementary information is indicated by Note.
Read the contents of each Warning, Caution, and Note before
attempting to use the oscillator.
Precautions to be applied in those situations where there is a danger of the
operator being killed or seriously injured
Precautions to be applied in those situations where there is a danger of the
operator being slightly injured or the oscillator being damaged
Supplementary information other than precautions
The functions of a laser machining system depend not only on the laser
oscillator, but also on the machine, power magnetics cabinet, servo
system, CNC, and operators panel. This manual describes only the laser
oscillator. For a description of the other components, refer to the
corresponding manuals, supplied by the machine tool builder.
Read this manual thoroughly and store it in a safe place.
1.4
FOR SAFE
OPERATION
Warning
Caution
Note
1.5
NOTES ON READING
THIS MANUAL
B70114EN/04 2. SAFETY
5
2
SAFETY
C1500B, C2000C (C2000B), C3000D (C3000C), C4000A, C6000B
produce the rated laser output power of 1500W, 2000W, 3000W, 4000W,
6000W. The CO
2
laser beam is the wavelength of 10.6 mm, far infrared,
and is invisible to human eyes. The adequate care must be taken,
therefore, in dealing with it. When removing the panel, always turn the
power source off and confirm no power is applied to the laser machine.
This oscillator fulfills the requirements of the relevant product safety
standard of EN608251:1994.
6
1) Potential hazards
Laser oscillator emits CO
2
laser beam(10.6 mm), which is high power
and invisible.
D Being directly exposed to the CO
2
beam could severely burn you.
D The CO
2
beam could bource off your workpiece and burn your eyes
or skin.
FANUC LASER C series have a diode laser. The diode laser beam
is visible (red color) and low power. It is used to ensure that the CO
2
beam is correctly positioned on your workpiece.
D The diode laser beam is not considered harmful to your skin. But
if you stared head on into the laser diode beam, it could harm your
eyes.
2) Safety recommendations
Never expose the eyes and skin to the laser beam. Be careful of the
laser beam when performing the inspection and maintenance.
Do not turn on the power supply to the oscillator when the panel open
and do not drive. It is bleached to radiation of the laser beam and high
voltage.
Do the countermeasure (For instance, installs safety glasses and the
protection gloves) to danger in case of stopped no finish and nor
opening the panel while it energizes the oscillator.
Install beam safety cover after mirror cleaning or replacement. And if
not beam safety cover installation, do not operation and alignment.
Confirm when it does alignment, the protection pipe (Safety cover) is
installed. If it dose not install the protection pipe, it will put the finger
in the laser beam and there is possibility to do the burn.
When entering the area exposed to the scattered beam, wear the safety
glasses. Mount the stand made of acrylic resin or any material which
can absorb the CO
2
laser beam to protect the personnel from the
scattered beam.
Avoid exposure of any part of your body to the CO
2
laser beam.
When testing the beam output, any personnel other than the
maintenance personnel should be out of the working environment.
In designing a material processing machine utilizing FANUC LASER
C series, be sure that the CO
2
laser beam goes from laser to the
workpiece only through the enclosed beam delivery system. This
prevents the exposure to laser beam by the operator switch could
otherwise take place. It is absolutely necessary to include the
instructions given here in the manuals of the laser materialprocessing
machine as a whole, which are to be read.
3) Position of laser beam emission
Fig. 2.1 (a) is the position of laser beam delivery in C1500B,
C2000B, C2000C.
Fig. 2.1 (b) is the position of laser beam delivery in C3000C,
C3000D.
Fig. 2.1 (c) is the position of laser beam delivery in C4000A.
Fig. 2.1 (d) is the position of laser beam delivery in C6000B.
Fig. 2.1 (e) is the position of panel that laser beam exposure is
occurred without panel in C1500B, C2000B, C2000C,
C3000C, C3000D, when your maintenance.
2.1
LASER BEAM
7
Fig. 2.1 (f) is the position of panel that laser beam exposure is
occurred without panel in C4000A, when your
maintenance.
Fig. 2.1 (g) is the position of panel that laser beam exposure is
occurred without panel in C6000B, when your
maintenance.
Fig. 2.1 (a) The position of laser beam delivery (C1500B, C2000B, C2000C)
Fig. 2.1 (b) The position of laser beam delivery (C3000C, C3000D)
8
Fig. 2.1 (c) The position of laser beam delivery (C4000A)
Fig. 2.1 (d) The position of laser beam delivery (C6000B)
9
Fig. 2.1 (e) Laser beam exposure position without panel as operating
(C1500B, C2000B, C2000C, C3000C, C3000D)
Fig. 2.1 (f) Laser beam exposure position without panel as operating (C4000A)
10
Fig. 2.1 (g) Laser beam exposure position without panel as operating (C6000B)
11
There is RF voltage of 3 to 4kV
op
in the cabinet of the laser oscillator.
There is 200 VAC power in the relay panel, be careful not to touch the
high voltage.
When it checks the oscillator and exchange the unit, intercept a main
breaker of the oscillator and the power supply. Lock the breaker to
prevent misconnection and display the sign while working.
Install safety cover after unit replacement or cable connection. Unless
safety cover is installed, never perform operation.
Follow standard industrial safety practices for working with high
voltage.
EXAMPLES
D Do not work on the laser oscillator if you are tired or have taken
medicine.
D Use the buddy system.
D Do not wear anything metal, like a ring, bracelet, watch, belt
buckle, earrings, or keys.
D They might contact high voltage.
D Never stand on a wet surface.
D Do not touch electrical components in the cabinets with both hands
at once. Keep one hand in a pocket.
3) Position of high voltage
Fig. 2.2 (a) is the position of high voltage in C1500B (Front side,
Back side).
Fig. 2.2 (b) is the position of high voltage in C2000B (Front side,
Back side).
Fig. 2.2 (c) is the position of high voltage in C2000C (Front side,
Back side).
Fig. 2.2 (d) is the position of high voltage in C3000C (Front side,
Back side, AUX).
Fig. 2.2 (e) is the position of high voltage in C3000D (Front side,
Back side).
Fig. 2.2 (f) is the position of high voltage in C4000A (Front side,
Back side).
Fig. 2.2 (g) is the position of high voltage in C6000B (Front side,
Back side).
2.2
HIGH VOLTAGE
12
Front side
Back side
Fig. 2.2 (a) The position of high voltage in C1500B (Front side, Back side)
13
Front side
Back side
Fig. 2.2 (b) The position of high voltage in C2000B (Front side, Back side)
14
Back side
Front side
Fig. 2.2 (c) The position of high voltage in C2000C (Front side, Back side)
15
Front side
Back side
Auxiliary unit
Fig. 2.2 (d) The position of high voltage in C3000C (Front, Back, AUX)
16
Front side
Back side
Fig. 2.2 (e) The position of high voltage in C3000D (Front side, Back side)
17
Front side
Back side
Fig. 2.2 (f) The position of high voltage in C4000A (Front side, Back side)
18
Front side
Back side
Fig. 2.2 (g) The position of high voltage in C6000B (Front side, Back side)
19
CO
2
beam is delivery from oscillator. Direct or scattered beam is
exposed.
Mount the safety enclosure made of acrylic resin which can absorb the
laser beam around the working environment.
Mount the interlock switch on the safety enclosure door which
extinguishes the laser beam output when the door is open. Never
perform operation without safety cover of laser machine.
When you work with the laser oscillator or machine, hot fragments or
slag can scatter from your workpiece. The CO
2
beam or a reflection
of it could ignite flammable material.
The direct or scattered laser beam can ignite flammable materials such
as paper, cloth, and wood. Provide a beam absorber behind the
workpiece and around it during maintenance. The absorber can be
anodized aluminum, graphite or brick.
Put a shield between yourself and the workpiece when the CO
2
beam
is on. Even diffuse reflections can harm eyes and skin and may ignite
flammable material.
Some materials such as certain plastics can emit toxic fume when they
burn under the laser beam.
Install the exhaust system to remove toxic fume from the work
environment.
Consult the manufacturer of the material you are processing to learn
if it creates any fumes when heated or burned.
2.3
SAFETY
ENCLOSURE (AT
YOUR WORK
STATION)
2.4
FIRE
2.5
TOXIC FUME
20
When you touch a part of high temperature, your skin burn.
The pipes of the gas circular system are very a high temperature. Do
not touch pipes, heat exchanger and turbo blower because it does not
do the burn. It is hot immediately after having stopped driving. After
getting cold enough in case of removing, dismount it.
3) Position of high temperature
Fig. 2.6 (a) is the position of high temperature in C1500B (Front side,
Back side).
Fig. 2.6 (b) is the position of high temperature in C2000B (Front side,
Back side).
Fig. 2.6 (c) is the position of high temperature in C2000C (Front side,
Back side).
Fig. 2.6 (d) is the position of high temperature in C3000C (Front side,
Back side, Aux).
Fig. 2.6 (e) is the position of high temperature in C3000D (Front side,
Back side).
Fig. 2.6 (f) is the position of high temperature in C4000A (Front side,
Back side).
Fig. 2.6 (g) is the position of high temperature in C6000B (Front side,
Back side).
2.6
HIGH TEMPERATURE
21
Front side
Back side
Fig. 2.6 (a) The position of high temperature in C1500B (Front side, Back side)
22
Front side
Back side
Fig. 2.6 (b) The position of high temperature in C2000B (Front side, Back side)
23
Front side
Back side
Fig. 2.6 (c) The position of high temperature in C2000C (Front side, Back side)
24
Front side
Back side
Auxiliary unit
Fig. 2.6 (d) The position of high temperature in C3000C (Front , Back, Aux)
25
Front side
Back side
Fig. 2.6 (e) The position of high temperature in C3000D (Front side, Back side)
26
Front side
Back side
Fig. 2.6 (f) The position of high temperature in C4000A (Front side, Back side)
27
Front side
Back side
Fig. 2.6 (g) The position of high temperature in C6000B (Front side, Back side)
28
Fig. 2.7 (a)(g) show the location of the warning labels indicating the high
voltage and laser beam path.
Fig. 2.7 (a) is the location of the warning sticker at front side. (C1500B,
C2000B, C2000C, C3000C, C3000D)
Fig. 2.7 (b) is the location of the warning sticker at back side. (C1500B,
C2000B, C2000C, C3000C, C3000D)
Fig. 2.7 (c) is the location of the warning sticker (Auxiliary unit of
C3000C)
Fig. 2.7 (d) is the location of the warning sticker at front side. (C4000A)
Fig. 2.7 (e) is the location of the warning sticker at back side. (C4000A)
Fig. 2.7 (f) is the location of the warning sticker at front side. (C6000B)
Fig. 2.7 (g) is the location of the warning sticker at back side. (C6000B)
Fig. 2.7 (a) The location of warning sticker at front side (C1500B, C2000B, C2000C, C3000C, C3000D)
2.7
WARNING LABELS
29
Fig. 2.7 (b) The location of warning sticker at back side (C1500B, C2000B, C2000C, C3000C, C3000D)
Fig. 2.7 (c) The location of the warning sticker (Auxiliary unit of C3000C)
30
Fig. 2.7 (d) The location of warning sticker at front side. (C4000A)
Fig. 2.7 (e) The location of warning sticker at back side. (C4000A)
31
Fig. 2.7 (f) The location of warning sticker at front side. (C6000B)
Fig. 2.7 (g) The location of the warning sticker at back side. (C6000B)
32
7000W
Warning logotype
D Detail of warning sticker
33
Warning logotype
Label for defeasible noninterlocked protective housing
Label for defeasible noninterlocked protective housing
34
Caution label for lifting
Aperture label
Label of noninterlocked protective panel
35
Identification label
300
190
150
150
110
110
80
Address label
High voltage warning label
36
Supply voltage label
Label of overcurrent protective
37
Label of motor and transformer (C1500B,C2000B,C2000C)
Label of motor and transformer (C3000C)
38
Label of motor and transformer (C3000D)
Label of motor and transformer (C4000A)
39
Label of motor and transformer (C6000B)
Label of warning light
Maintenance label
40
Certification label
Shortcircuit interrupting capacity of main breaker
Caution label for lifting
41
All the laser products have to comply with the various kinds of laser safety
regulations, which include the use of key control. For instance, FDA
PART 1040 PERFORMANCE STANDARDS FOR
LIGHTEMITTING PRODUCTS, Sec 1040. 10 (f), (4) states: Each
laser system classified as a Class IIIb or IV laser product shall incorporate
a keyactuated master control. The key shall be removable and the laser
shall not be operable when the key is removed and EN608251:1994, 4.5
Key control state Any laser system belonging to one of the following
classes shall incorporate a key operation master control: Class 4 and Class
3B, except for Class 3B with not more than five times the AEL of Class
2 in the wavelength range from 400 nm to 700 nm. The key shall be
removable and the laser radiation shall not be accessible when the key is
removed.
Because the laser package products offered by FANUC cannot produce
the laser beam as they are in the state of shipment, the system integrator
who incorporates FANUC products into the system, which generates the
laser beam, is obliged to incorporate the master key as defined by the
relevant regulation.
The shutter lock is prepared because it dose not put out the laser beam by
mistake. If you do not put out the beam, lock the shutter.
Use the mechanical switch at shutter lock switch, not electrical
component (Relay)or switching circuit (Transistor, FET).
Use the one with the compulsion dissociation mechanism for the switch
used for the shutter lock circuit and the switch for welding prevention.
To designer of laser processing machine
1. Use a mechanical switch for the switch used to lock the
shutter. Do not use an electric switch (For instance,
transistor circuit, etc.). Moreover, use the one with the
contact dissociation mechanism to prevent welding for a
mechanical switch.
2. Put it in the series of the contact of the emergency stop
button in the shutter lock circuit. When the emergency stop
switch is pushed, it is necessary to intercept the power
supply to the shutter.
2.8
KEY CONTROL
2.9
SHUTTER LOCK
42
Press the emergency stop button when it is dangerous and breaks down.
The oscillator is stopped discharging, gas pressure control and stand by
purge state.
Use the one with the compulsion dissociation mechanism for the relay
used for the emergency stop circuit and the switch for welding prevention.
FANUC LASER C series are equipped with the warning light optionally.
The light is flashed during discharging and ready of laser beam emission.
Be careful of laser beam and high voltage.
In EN608251, it needs the design with the fail safe or
redundant for warning equipment. The redundant warning
light is needed near the workpoint of processing machine.
The warning light is prepared for the oscillator. Select this as
a warning light more than the second for the fail safe.
2.10
EMERGENCY STOP
BUTTON
2.11
WARNING LIGHT
(OPTIONAL)
43
Inapposite use and the result are described in each explanation place.
Inapposite major use are described in the following.
(1) The gas with different composition and purity from the specification
is connected with the oscillator.
The oscillator does not work normally and do the protection
movement. In the worst case, the oscillator breaks down.
(2) The gas piping with different material and structure from the
specification is used.
A leakage of the laser gas and a defective composition are occurred.
In the worst case, the oscillator breaks down.
(3) The water piping of the material, which corrodes to water, is used.
Water is blocked by the generation of rust. If cooling water does not
flow in a regulated amount, the oscillator will not work normally.
(4) Cooling water is not regularly exchanged.
Water is blocked by the generation of rust. Moreover, it is easy for the
water fittings in the oscillator to corrode. In the worst case, the fittings
are damaged and the water leak happens.
(5) The oil of turbo blower and the exhaust pump is not regularly
exchanged.
Turbo blower is damaged and the oscillator does not work. The
exhaust pump is damaged similarly.
(6) The filter of the exhaust pump is not regularly exchanged.
The exhaust ability of the exhaust pump decreases. Moreover, white
smoke comes out from the pump exit and the oil leak happens. In the
worst case, the oscillator does not work.
(7) You will touch an unrelated place when usually maintaining.
In the oscillator there are adjustment place. The adjustment place is the
best value when shipping. When the adjustment shifts, the oscillator
will not work normally. It is necessary to adjust it by service man that
was trained.
(8) You open the panel immediately after the oscillator was stopped and
oil is exchanged.
(9) There is a place of the high temperature immediately after the
oscillator stopped. When you touches there, you will do the burn. After
getting cold of the oscillator, open the panel. Refer to safety in Chapter
2 for the place of the high temperature.
2.12
INAPPOSITE USE OF
LASER OSCILLATOR
B70114EN/04 3. INSTALLATION
44
3
INSTALLATION
45
(1) Ambient temperature
+5 to 30C
(2) Temperature drift
Max 1.1C/min
(3) Humidity
<75% (relative)
(4) Vibration
Acceleration <0.05G
Amplitude <5m
(5) Atmosphere
Free from dust and volatile vapor
(1) Input power and maximum current
Model Power Maximum current
C1500B 23 KVA 80 A
C2000B, C2000C 33 KVA 110 A
C3000C, C3000D 44 KVA 150 A
C4000A 55 KVA 190 A
C6000B 90 KVA 300 A
(2) Voltage
200VAC+10%, 15%, 50/60Hz"1Hz, 3f
or 220VAC+10%, 15%, 60Hz"1Hz, 3f
(3) Earthground
S Ground (<10 ohm)
S Protective earth (PE)
For the laser gas, the following specifications are required.
(1) Composition and its accuracy
CO
2
: 5"0.25% Purity >99.99%
He: 40"2.00% >99.99%
N
2
; 55"2.75% (Balance) >99.99%
(2) Water vapor (H
2
O) <5ppm
(3) Hydrocarbon (CmHn) <1ppm
3.1
CONDITION
3.1.1
Environmental
Conditions
3.1.2
Power Source
3.1.3
Laser Gas
46
(1) Cooling water specification
The quality of cooling water is specified in the table below. If tap water
is used, it should be treated in an ion exchanger.
Refrigerator/airconditioner cooling water quality standard
(JRA90011980)
pH (25C) 6.0 to 8.0
Conductivity (25C)(m s/cm) 200 or less
Chlorine ion Cl
*
(ppm) 20 or less
Standard item Sulfate ion SO
4
2*
(ppm) 50 or less
M alkalinity CaCO
3
(ppm) 50 or less
Total hardness CaCO
3
(ppm) 50 or less
Iron Fe (ppm) 0.3 or less
Sulfur ion S
2*
(ppm) Not to be detected
Reference item
Ammonia ion NH
4
+
(ppm) 0.2 or less
Ionic silica SiO
2
(ppm) 30 or less
(2) Anticorrosive
To avoid cooling water trouble and minimize the frequency of cooling
water exchange, the following anticorrosive should be added to the
cooling water. Consult the chiller manufacturer for use of the
anticorrosive.
Product name: CONTLIME K6000
Manufacturer: MITSUBISHI GAS CHEMICAL. ISC
Use: Refer to the description indicated on the product.
Replace the cooling water every year, even if an anticorrosive has been
added to it.
(3) Cleaning agent
The following cleaning agent should be used. Consult the chiller
manufacturer for use of the cleaning agent.
Product name: DESLIME
Manufacturer: MITSUBISHI GAS CHEMICAL ISC
(4) Antifreezing solution
If the chiller is used in a cold district, it should be provided with an
antifreezing function. When it is extremely cold, the chiller should be
kept running. If it is necessary to use an antifreezing solution for lack
of an alternative, the following antifreezing solution should be used.
Its concentration should be 30% (usually) or 40% (in an extremely
cold district). Use of an antifreezing solution should be restricted
within four months in winter. Do not use antifreezing solution
together with an anticorrosive. The following antifreezing solution is
already added with an anticorrosive.
Product name: AURORA BRINE
Manufacturer: TOKYO FINE CHEMICAL Co.
3.1.4
Cooling Water
In winter or in a cold district, when the oscillator is at a rest and
the ambient temperature gets to or below the freezing point,
the cooling water in the oscillator freezes, possibly breaking
the water pipe or damaging the chilling unit. When the
oscillator is not in use, drain cooling water from it. To drain
water, keep blowing compressed air at 5 kgf/cm
2
or less into
the oscillator through the cooling water inlet for 15 minutes.
47
Caution
48
In lifting the FANUC LASER C series, be sure to use the four eyebolts
screwed into the top surface of the cabinet as shown in the figure. Never
lift using only the two bolts. The weight is shown following tables. The
permissible impact value of the oscillator is 2G. When the impact which
exceeds the permissible impact value is given, the resonator will warp and
the shape of the beam mode worsens.
Fig. 3.2.1 Method of lifiting
3.2
TRANSPORTATION
3.2.1
Lifting Laser Oscillator
49
1) Clamp
When shipped from FANUC, the two components of the laser listed
below are in the clamped position. Because this is for shipment only,
remove the clamp during the installation. Be sure to use the clamp,
when the machine is shipped again. (1) Optical resonator (2)
Mechanical shutter.
Fig.3.2.2(a)(d) are clamp layout.
Fig. 3.2.2 (a) Clamp layout (C1500B, C2000B, C2000C, C3000C, C3000D)
3.2.2
Packing
50
Fig. 3.2.2 (b) Clamp layout (C4000A)
51
Fig. 3.2.2 (c) Clamp layout (C6000B)
52
Fig. 3.2.2 (d) Clamp layout (C6000B)
CAUTION
If the machine is not clamped during transportation, the
optical resonator may cause distortion or may be damaged.
53
2) Water
Be sure to drain water in the oscillator at shipment.
Refer to the maintenance manual for draining.
CAUTION
If water remains in the oscillator, internal water pipes may
be damaged in cold climates.
(1) Temperature
20 to 50C
CAUTION
Must be completed to drain in the oscillator. If water remain
in the oscillator, water freeze during the transportation at
cold district. Therefore oscillator is damaged.
(2) Humidity <75% (relative)
(3) Vibration
Acceleration < 0.05G
Amplitude < 5m
(4) Atmosphere
Free from the dust and the volatile vapor
The various kinds of clamps should be used only during the
transportation. Especially the clamps used for resonator should be
loosened during the storage. Storing the resonator as fixed with the
clamps for a long time will cause its distortion. The clamps are provided
for cavity, shutter unit.
Do not keep the oscillator in the place of the high temperature humidity.
Otherwise, it generates rust in the resonator.
(1) Temperature
20 to 50C
CAUTION
Must be completed to drain in the oscillator. If water remain
in the oscillator, water freeze during the transportation at
cold district. Therefore oscillator is damaged.
(2) Humidity < 75% (relative)
(3) Vibration
Acceleration <0.05G
Amplitude <5m
(4) Atmosphere
Free from the dust and the volatile vapor
(5) Location
Plain, no slope
3.2.3
Environmental
Condition
3.3
STORAGE
3.3.1
Environmental
Condition
54
In FANUC LASER C series, the two type of that is the four taps and hole
are prepared in the base as shown in the figure for fixing the laser cabinet
against the machine base.
Fig. 3.4 (a) Mounting (A)
Fig. 3.4 (b) Mounting (B)
3.4
BASE OF
OSCILLATOR
55
Fig. 3.4 (c) Cabinet base (C1500B, C2000B, C2000C, C3000C, C3000D, C4000A)
Fig. 3.4 (d) Cabinet base (C6000B)
56
The maintenance areas of FANUC LASER C series are shown in the
figures below. The customer is requested to prepare adequate space
around the laser even for the sides, which are not requested in the figures.
Fig. 3.5 (a) Maintenace area (C1500B: Short type)
3.5
MAINTENANCE AREA
57
Fig. 3.5 (b) Maintenace area (C1500B: Long type)
58
Fig. 3.5 (c) Maintenace area (C2000B, C3000C, C3000D: Short type)
59
Fig. 3.5 (d) Maintenace area (C2000B, C3000C, C3000D: Long type)
60
Fig. 3.5 (e) Maintenance area (Auxiliary unit)
61
Fig. 3.5 (f) Maintenace area (C2000C: Short type)
62
Fig. 3.5 (g) Maintenace area (C2000C: Long type)
63
Fig. 3.5 (h) Maintenace area (C4000A: Short type)
64
Fig. 3.5 (i) Maintenace area (C4000A: Long type)
65
Fig. 3.5 (j) Maintenace area (C6000B)
66
Make the cooling water recirculate in the closed loop using a chiller unit.
The cooling requirements of the chiller are as below.
(1) Chiller capacity
Type Capacity
C1500B >15.7kW
C2000B, C2000C >22kW
C3000C, C3000D >33.7kW
C4000A >44.2kW
C6000B >67.5kW
(2) Temperature control range 20 to 30C
(3) Temperature accuracy "1C
(4) Water pressure 5.0 bar or less
(5) Heat exhaust Water cooling or air cooling
(6) Attachment
f Water filter
f Water valve
f Flow switch
f Interface to externally switch of chiller
f Contact interface to send signal of normal operation of
chiller(CLRDY).
Note
Output the signal of contact on when everything is normal
with cooling water flow rate, temperature, water level,
overheat switch of chiller, high and low pressure switch,
overcurrent relay, etc.
Throughout the year, set the chiller water temperature to 27C in general
regions and 30C in humid regions.
3.6
WATER CONNECTION
3.6.1
Chiller
3.6.2
Cooling Water
Temperature
67
The flow rate should be chosen so that the temperature difference between
the inlet and outlet of the chiller becomes less than 3C. The customer can
refer to the following table.
Type Flow rate
C1500B 50 liter/min
C2000B, C2000C 75 liter/min
C3000C, C3000D 120 liter/min
C4000A 160 liter/min
C6000B 250 liter/min
The cooling water from chiller is temperatureregulated.
D Choose the tubing material which can withstand corrosion, which will
choke the water flow.
D Make the hose length between the laser and chiller as short as possible.
Along hose makes the pressure 1oss high and becomes a burden to the
chiller pump.
D Place a strainer at the water inlet of laser. It will prevent the f1owing
in of the dust into the laser.
D Place flow meters both at the inlet and outlet of the laser. Daily
checking of the water f1ow contributes to the prevention of abrupt stop
of laser operation.
The water fittings of the inlet and outlet of lasers are shown below.
3.6.3
Cooling Water Flow
Rate
3.6.4
Plumbing
68
Fig. 3.6.4 (a) Water connection and gas connection (C1500B, C2000B)
69
Fig. 3.6.4 (b) Water connection and gas connection (C2000C)
70
Fig. 3.6.4 (c) Water connection and gas connection (C3000C)
71
Fig. 3.6.4 (d) Water connection and gas connection (C3000C)
72
Fig. 3.6.4 (e) Water connection and gas connection (C3000D)
73
Fig. 3.6.4 (f) Water connection and gas connection (C4000A)
74
Fig. 3.6.4 (g) Water connection and gas connection (C6000B)
75
Use the gas bottle of the volume of 7m
3
. Store the necessary number of
bottles according to the operation of the laser.
Drawing of last chapter 1 shown laser gas connection of inlet and outlet.
Inlet and outlet fittings on laser are female PT 3/8.
(1) Gas inlet of oscillator
D Use the tube designated. (FANUC recommends the use of AS1
tube manufactured by Jyunkosha.)
Do not use a tube possessing high permeability to He. (In the worst
case, the laser will be damaged by improper gas composition.)
D Use the gas of the correct composition.
(2) Gas outlet of oscillator
The oil mist and the dissociated gas come out from the exit of the gas.
Tie the piping of 3/8 inches or more to the gas exit and put it out to
outdoor. It will load the exhaust pump when thin piping or extremely
1ong and the exhaust ability decreases occasionally.
Observe the following cautions for piping between the laser gas cylinder
and laser oscillator.
D Use nylon tube having an inside diameter of 8 mm or larger (Junlon
AS1 manufactured by Junkousha, or equivalent). Do not use a rubber
or urethane tube.
D Use a swagelock vacuum joint (Fujikins product or equivalent). Do
not use a onetouch coupler, quick coupler, or hoseband joint.
D Minimize the length of tubing. It should be kept within 5 m. Never
exceed 15 m. For a length of 15 m or greater, use stainless pipe.
D If it is necessary to use metal pipe for lack of an alternative, use
stainless bright annealed pipe. Minimize the number of joints used.
Connect pipes, if necessary, using a swagelock vacuum joint or by
TIG welding. Do NOT use silver soldering or copper piping. Piping
should be installed by a vacuum piping specialist. Do not extend metal
piping over 30 m.
D Always keep the piping materials clean. Do not allow foreign matter
to get in the pipe.
D Use a pressure reducer that is free from gas leakage.
D After installing the pipe, check it for gas leakage, using a liquid leak
checker (Gyupoflex: A98L00010856, detecting bubbles caused by
leaking gas) or a clamp test
1)
.
Note
1. Open the valve of the gas cylinder to pressurize the inside
of the pipe, then close the valve. Check to see if the
pressure in the pipe becomes low with time. Monitor the
primary pressure of the gas reducer for over 8 hours. If the
gas pressure becomes lower by 10% within 8 hours, gas is
likely to be leaking. Take an appropriate measure.
3.7
LASER GAS
3.7.1
Gas Bottle
3.7.2
Laser Gas Tubing
3.7.3
Gas Pipe
76
Here explanation are given for the convenience of designing machines.
The following figures and attached tables show the positions and
tolerances of beam.
Fig. 3.8.1 (a) Beam exit (C1500B, C2000B, C2000C, C3000C,
C3000D, C4000A)
Fig. 3.8.1 (b) Beam exit (C6000B)
3.8
LASER BEAM
3.8.1
Position and Tolerance
of Laser Beam Exit
77
Fig. Position of laser beam exit
Model W1 W2 W3 H
C1500B, C2000B, C2000C
Short path length type
310"5 65 375 876"5
C1500B, C2000B, C2000C
Long path length type
390"5 65 455 876"5
C3000C, C3000D, C4000A
Short path length type
310"5 65 375 811"5
C3000C, C3000D, C4000A
Long path length type
420"5 65 485 921"5
C6000B 435"5 70 505 1375"5
The beam divergence for FANUC LASER C series is less than 2 mrad.
The tolerance of beam direction is "0.3 degrees. The customer is
requested to prepare adjusting mechanism on the machine side to
compensate for the beam direction error.
The laser had better be isolated mechanically from the machine for
preventing the coupling between them. The vibration might enter the
opponent from each side. It is, however, absolutely necessary to provide
the beam guide between them so that the operator is protected from the
exposure to the laser beam all the time. The structure of the beam guide
must permit the mechanical decoupling required as shown in the figure.
3.8.2
Beam Divergence
3.8.3
Tolerance of Beam
Direction
3.8.4
Beam Guide
78
The following cables should be connected to the laser. Refer to the
Connecting Manual of the controller (CNC).
Cable connection point and clamp of cable refer to Fig. 3.9 (a) to (h). All
cable must be used the cable inlet.
Fig. 3.9 (a) Cable connection (C1500B)
Fig. 3.9 (b) Cable connection (C2000B)
3.9
ELECTRIC
CONNECTION
79
Fig. 3.9 (c) Cable connection (C2000C)
Fig. 3.9 (d) Cable connection (C3000C)
80
Fig. 3.9 (e) Cable connection (C3000C)
Fig. 3.9 (f) Cable connection (C3000D)
81
Fig. 3.9 (g) Cable connection (C4000A)
Fig. 3.9 (h) Cable connection (C6000B)
82
Use the cable with 4 cores. (C1500B, C2000B, C2000C, C3000C,
C3000D, C4000A)
Conductor cross section must be more than 22mm
2
(C1500B), 35mm
2
(C2000B, C2000C, C3000C, C3000D, C4000A).
Outer diameter of cable must be between f 22mm to f 32mm (C1500B),
f 28mm to f 38mm (C2000B, C2000C, C3000C, C3000D, C4000A).
Use the 4 cable (C6000B)
Conductor cross section of one cable must be more than 100 mm
2
.
The one of earth cable should be connected to the Cu plate upon which
the laser power supply units are mounted. (Earth [<10 ohm], Protective
earth). The other of earth cable is protective earth and should be connected
to the laser at left upper of input unit. This point is marked PE.
D For 16L, 16iL (one cable)
Optical fiber cable should be connected to COPIB of IF PCB.
(Connect Jumper pins SP5 and SP6 of IF to the 23 side.)
D For 0L (two cables)
Metal cables should be connected to CN1 and CN2 of IF PCB.
D For 16L, 16iL
1) Emergency stop signal input (ESP1, ESP2)
This terminal is shorted usually.
2) OFF prohibition signal (OFI1,OFI2) (EOF, COM) CNC side
A contact
Closing the contact to inhibit the OFF switch operation.
Connection parallel with the OFF switch. Contact capacity
250VAC, 3A or 30 VDC, 5A.
3) Laser power unit ON/OFF signal (ON, OFF) (EXR, EXS) CNC
side
When a door interlock is used. Connect 200VAC whose ON/OFF
is controlled by CNC Capacity 200VAC, 10mA
4) Door interlock contact signal (DIL1, DIL2)
B contact (AC200V applied to laser and CNC is shut in OPEN
state.)
When the door of the oscillator is open, the contact opens. When
the contact are open, the ON OFF signal of 200 VAC, 3A or 30
VDC, 5A.
3.9.1
Power Cable
(L1, L2, L3)
3.9.2
Ground Cable
3.9.3
I/O Signal Cable
3.9.4
Other Signal Cables to
the IF PCB
83
Fig. 3.9.4 (a) Detail of IF PCB 16L
Fig. 3.9.4 (b) Detail of 16iL
84
D For 0L
1) Fuse alarm signal (FAL1, FAL2)
The warning signals contact of the thermal switch and circuit
protector. When the contact is closed, turn off either the CNC
power supply or the laser power supply ON/OFF signal. Contact
capacity 220 VAC, 6A or 24VDC, 10A.
2) OFF prohibition signal (OFS1, OFS2)
Closing the contact to inhibit the OFF switch operation. Connect
in parallel with the OFF switch. Contact capacity 250VAC, 3A or
30 VDC, 5A.
3) Laser power unit ON/OFF signal (ON, OFF)
When the door interlock is used.
Connect 200VAC whose ON/OFF is controlled by CNC
Capacity 200 VAC, 10mA
4) Door interlock contact signal (ND11, ND12)
B contact (AC200V applied to laser and CNC is shut in OPEN
state.)
Use the key switch with the compulsion dissociation mechanism
for the key switch used for welding prevention. When the door of
the oscillator is open, the contact opens. When the contact is open,
the ONOFF signal of 200 VAC, 3A or 30 VDC, 5A.
Fig. 3.9.4 (c) Detail of IF PCB 0L
85
The diagram of safety interlock circuit is shown in Fig. (a) to (g). Terminal
layout is shown in Fig. (h).
Fig. 3.9.5 (a) Safety interlock circuit (C1500B)
3.9.5
XT20 Terminal
86
Fig. 3.9.5 (b) Safety interlock circuit (C2000B)
87
Fig. 3.9.5 (c) Safety interlock circuit (C2000C)
88
Fig. 3.9.5 (d) Safety interlock circuit (C3000C)
89
Fig. 3.9.5 (e) Safety interlock circuit (C3000D)
90
Fig. 3.9.5 (f) Safety interlock circuit (C4000A)
91
Fig. 3.9.5 (g) Safety interlock circuit (C6000B)
92
Fig. 3.9.5 (h) Detail of terminal XT20
1) PF1, PF2: These are the voltage release terminals of a main
breaker (QF1). Impress the voltage of 24VDC.
PF1: +24V
PF2: 0V
2) SHL1, SHL2: When these terminals short, the shutter can be
opened. It short of these terminals when shipping.
3) IB1, IB2: When these terminals short, diode laser will turn
on.
4) RUN1, RUN2: Connect the RUN key of the operators panel with
the series to these terminals. When the emergency
stop switch is pushed, the oscillator will stop the
discharge and the pressure control.
5) EMS1, EMS2: Input of emergency stop signal of operators panel.
6) A1, A2: Power supply for SAFETY BOX from machine
side.
A1: +24V, A2: 0V, 240 mA MAX.
7) SC: Shutter close state signal
Connected load capacity: 24 VDC 3 to 100 mA
Use the Emergency Stop Terminal (EMS1, EMS2) of XT20, in
case of stopping the laser oscillator to the interlock switch of
machine side.
93
Cable shield
Install the appended Cable Shield (A04B0811D021) in power cable.
Fig. 3.9.6 Cable shield
Main power cable (AC220/200V 3f) is wrapped with CABLE SHIELD
and the earth cable of CABLE SHIELD is grounded.
In that case, there is no space between CODE GRIP and CABLE
SHIELD.
3.9.6
EMC Countermeasure
B70114EN/04 4. FUNCTIONS
94
4
FUNCTIONS
This chapter describes the internal structure, components, and operating
sequence of the laser oscillator.
4.1 INTERNAL STRUCTURE 95 . . . . . . . . . . . . . . . . . . . . .
4.2 COMPONENT DETAILS 103 . . . . . . . . . . . . . . . . . . . . .
4.3 OPERATION SEQUENCE 115 . . . . . . . . . . . . . . . . . . . . .
4.4 LASER PROCESSING MACHINE SYSTEM 117 . . . . . .
95
Fig. 4.1.1 (a) to (g) show the internal structure of the laser oscillator.
The FANUC LASER C series consists of a laser resonator, laser excitation
power supply, forced gas circulating system, pressure controller, exhaust
controller, CNC interface, and a protective housing.
The laser resonator consists of several discharge tubes, connected in series
using folding mirrors, with a rear mirror and output mirror placed at the
open ends of the discharge tubes, thus sealing the tubes. The resonator
is fitted with a gas pipe connecting port through which laser gas is fed into
the discharge tubes.
A discharge from the electrodes of the discharge tube energizes CO
2
molecules, which emit light. This light is amplified by stimulated
emission, repeated between the rear mirror and output mirror, a laser beam
being emitted from the output mirror.
This is a 2MHz highfrequency power supply, the output of which is
controlled by the CNC. This power supply is used to create a discharge
in the laser gas flowing through the discharge tubes, thus energizing CO
2
molecules.
A gas circulating system is configured by connecting the resonator and
turbo blower with a circulating pipe. Laser gas is forced through the
discharge tubes at a speed of 200 m/s or higher.
A watercooled heat exchanger, used to cool the hightemperature gas
from the discharge tubes, is provided at the inlet side of the turbo blower.
At the outlet side of the turbo blower, another watercooled heat
exchanger dissipates the compression heat.
The laser gas pressure within the forced gas circulating system is
controlled by commands issued from the CNC, thus ensuring stable laser
output.
The laser gas flow is controlled by commands issued from the CNC.
Interface used to connect a FANUC Series 0L or 16L. 16iL CNC
commands that, control the operation of the laser oscillator, such as
start/stop and laser output, are input via this interface.
An enclosure that houses the above components. The housing, consisting
of metal panels and doors, completely encloses the laser oscillator, thus
protecting the operator from exposure to laser radiation and from high
voltages. All panels are screwfixed and cannot be removed without an
appropriate tool. The doors are also designed to prevent an accident from
occurring as a result of careless operation. The doors can be opened only
when the main circuit breaker is open. A door interlock function is also
supported.
4.1
INTERNAL
STRUCTURE
4.1.1
Outline
Laser resonator
Laser excitation power
supply
Forced gas circulating
system
Pressure controller
Exhaust controller
CNC interface
Protective housing
96
Fig. 4.1.1 (a) Block diagram (C1500B)
97
Fig. 4.1.1 (b) Block diagram (C2000B)
98
Fig. 4.1.1 (c) Block diagram (C2000C)
99
Fig. 4.1.1 (d) Block diagram (C3000C)
100
Fig. 4.1.1 (e) Block diagram (C3000D)
101
Fig. 4.1.1 (f) Block diagram (C4000A)
102
Fig. 4.1.1 (g) Block diagram (C6000B)
103
The following describes the details of each component of the FANUC
LASER C series. Fig. 4.2 (a) to (l) show the internal structure.
(1) Resonator
The resonator consists of an output mirror, rear mirror, folding
mirrors, discharge tubes, power sensor unit, etc. It converts electrical
energy first to laser gas, then to optical energy (10.6mm
singlewavelength laser beam).
(2) Output mirror
A transmitting/reflecting mirror which outputs the laser beam after
it has been amplified. The output mirror consists of a ZnSe (zinc
selenide) substrate, coated with dielectric. ZnSe is tightly toxic. Be
particularly careful, therefore, when handling the output mirror.
(3) Rear mirror
A reflecting mirror consisting of a Ge (germanium) substrate, coated
with dielectric. Having a high reflectance of 99.5%, the rear mirror
is used to reflect the laser beam within the resonator while
transmitting 0.5% of the laser light so that the beam can be monitored
externally.
(4) Folding mirror
The folding mirror, consisting of a 45 block and a goldcoated Si
(silicon) substrate, is used to divert the laser beam through 90. It
also linearly polarizes the laser beam.
(5) Discharge tube
A pair of Ag (silver) electrodes are metallized on the surface of a
hollow quartz glass pipe. A highfrequency discharge between these
electrodes injects electrical energy into the laser gas. Each electrode
is coated with ceramic, preventing it from degrading and thus
improving system reliability.
(6) Power sensor
An optical sensor which detects the intensity of the laser beam,
transmitted through the rear mirror, thus enabling monitoring of the
laser output level.
(7) Gas circulating system
A gas circulating path including a turbo blower, heat exchangers, and
circulating pipes, which supplies and exhausts laser gas to and from
the discharge tubes at high speed.
(8) Turbo blower
During laser oscillation, the laser gas pressure is 100 to 700 (1330 to
9310 Pa) when DGN. The turbo blower circulates this
roughvacuum gas at high speed (up to 200 m/s within the discharge
tubes) without contaminating the gas.
(9) Heat exchanger (inlet)
Heat exchanger used to cool the laser gas that has been heated by
discharge, before it is drawn into the turbo blower.
(10) Heat exchanger (outlet)
Heat exchanger used to cool the laser gas that has been heated by
compression in the turbo blower, before being forced into the
discharge tubes.
4.2
COMPONENT
DETAILS
104
(11) Pressure controller
This unit constantly monitors the gas pressure in the discharge tubes
and supplies fresh laser gas to the gas circulating system, thus
maintaining a constant pressure in the discharge tubes. This unit also
monitors the laser gas supply state and the purging state in the gas
circulating system.
(12) Exhaust pump unit
This unit is used to vacuumexhaust laser gas from the gas
circulating system such that its pressure falls to that used for laser
oscillation. Also, within this unit, a small amount of circulating gas
is constantly being exchanged, to prevent degradation of the
circulating gas.
(13) Exhaust controller
The exhaust controller controls the flow rate of the laser gas
exhausted by the exhaust pump unit. It adjusts the gas flow rate from
that used for gas exchange to that used for pressure control. In the
event of a power failure, the exhaust controller immediately returns
the exhaust pump unit to atmospheric pressure, thus protecting the
pump.
(14) Exhaust system filter
The exhaust system filter is used to remove oil mist from the exhaust
pump to prevent contamination of the gas circulating system and
optical parts. The C1500B, C2000B, C2000C, C3000C, C3000D,
and C4000A do not have this filter.
(15) Hour meter
The hour meter indicates the total number of hours that the laser
oscillator has operated (how many hours the exhaust pump has
operated), to indicate whether maintenance or inspection is
necessary.
(16) Shutter section
The shutter section consists of a shutter, beam absorber, shutter
cooling fan, etc., and is used to prevent output of the laser beam
during laser oscillation. While the shutter is closed, the laser beam
is reflected by the shutter then absorbed by the beam absorber. For
safety, the shutter is fitted with a photoelectric limit switch which
allows the system to monitor whether the shutter is open or closed.
(17) Shutter
The shutter consists of a goldcoated reflecting mirror, mounted on
the rotating arm of a rotary solenoid. The shutter can be opened and
closed instantaneously by issuing a CNC command. For safety, the
shutter is equipped with a temperature sensor which allows the
system to monitor the temperature of the shutter.
(18) Beam absorber
While the laser oscillator is operating with the shutter closed, the
laser beam is guided into the beam absorber. The beam absorber
absorbs nearly 100% of laser beam and is watercooled, allowing it
to safely absorb the beam for relatively long periods. For safety, the
beam absorber is equipped with a temperature sensor which allows
the system to monitor the temperature of the beam absorber.
FS16L/ :
FS16iL
105
(19) Water distribution unit
This unit distributes cooling water, supplied from either a chiller unit
or a temperatureregulated external water supply, to each unit in the
laser oscillator. For safety, the water distribution unit is equipped
with a flow sensor which allows the system to monitor the flow rate
of the
(20) Laser power supply unit
This unit rectifies and smooths the 3phase 200/220V AC input,
then supplies DC power to the RF inverter by controlling the PWM
DCDC converter, as directed by commands received from the CNC.
The RF inverter converts DC power to 3 to 4 kVP
OP
highfrequency
(2 MHz) power, then outputs it to the matching box.
(21) Matching box
The matching box contains a matching circuit, consisting of coils and
capacitors, which ensures that power is effectively input to the
discharge tubes. The matching box is connected to the laser power
supply unit via either a highvoltage cable or coaxial cable.
(22) Beam folding unit
This unit reverses the direction of the laser beam in the oscillator.
Two zeroshift mirrors are used to ensure that the polarization of the
light remains constant. The C3000C employs a circular polarization
mirror as upper one, such that a circularly polarized beam is
produced.
(23) Intermediate PCB A
This PCB transmits signals output by the pressure control unit, such
as those from the pressure sensor, pressure control valve, and
pressure switch, to the interface PCB.
(24) Intermediate PCB B
This PCB transmits signals output by the shutter section, such as
those from the limit switch, absorber temperature sensor, power
sensor, and condensation sensor, to the interface PCB.
(25) Input unit
The input unit consists of an interface PCB, stabilized power supply,
and power magnetics cabinet. It transfers signals between the laser
oscillator and CNC, and supply power to each unit.
(26) Interface PCB
FS0L: Transfer analog, digital input (DI), and digital output
(DO) signals to and from the CNC (parallel interface).
Transfers signals to and from the CNC via the FANUC
I/O LINK (serial interface). Because this is a serial
interface, optical fiber cable can be used to enable
longdistance transmission.
(27) Stabilized power supply
This unit converts the 200/220 VAC power source to DC power for
the interface PCB and other units.
(28) Power magnetics cabinet
The power magnetics cabinet distributes power, supplied from an
external unit, to each unit in the laser oscillator. It also protects each
unit from overcurrents.
106
(29) Control PCB
This PCB sends the contractor open/close signal to the power
magnetics cabinet, as directed by commands received from the CNC.
It also notifies the CNC of the open/close status of the circuit breaker
in the power magnetics cabinet.
(30) Condensation sensor unit
For the C1500B, C2000B, or C3000C, the condensation sensor unit
is mounted at the water port inlet; for the C2000C, C3000D,
C4000A, or C6000B, the unit is mounted on the output mirror holder.
If the sensor detects that the amount of condensation has exceeded
the maximum allowable level, an alarm (abnormal water
temperature) is issued and laser output is stopped, thus preventing a
fault from occurring.
(31) Highfrequency inverter
This inverter drives the turbo blower. It is responsible for
acceleration/deceleration control during start and stop of the blower.
(32) Light source for superimposing visible beam (semiconductor laser
unit)
A CO
2
laser beam is invisible to the naked eyes. The semiconductor
light source, therefore, is provided to enable checking of the laser
beam optical axis by superimposing a visible semiconductor laser
beam on the same optical axis. The operation of this light source is
linked to the mechanical shutter. The semiconductor laser beam is
output only while the shutter is closed. Using this beam, the optical
axis of the external optical system can be adjusted roughly and a
reference position for the machining point determined.
(33) Turbo PCB
This PCB relays signals between the turbo blower and
highfrequency inverter, interface PCB.
(34) Trigger electrode
With preparatory discharge outside the laser oscillation area, main
discharge can be started easily, and the laser output becomes
completely zero at beamoff time.
A trigger electrode is installed in the C1500B, C2000C, C3000D,
and C4000A.
107
Fig. 4.2 (a) C1500B internal structure (front)
Fig. 4.2 (b) C1500B internal structure (rear)
108
Fig. 4.2 (c) C2000B internal structure (front)
Fig. 4.2 (d) C2000B internal structure (rear)
109
Fig. 4.2 (e) C2000C internal structure (front)
Fig. 4.2 (f) C2000C internal structure (rear)
110
Fig. 4.2 (g) C3000C internal structure (front)
Fig. 4.2 (h) C3000C internal structure (rear)
111
Fig. 4.2 (i) Auxiliary unit internal structure (C3000C)
112
Fig. 4.2 (j) C3000D internal structure (front)
Fig. 4.2 (k) C3000D internal structure (rear)
113
Fig. 4.2 (l) C4000A internal structure (front)
Fig. 4.2 (m) C4000A internal structure (rear)
114
Fig. 4.2 (n) C6000B internal structure (front)
Fig. 4.2 (o) C6000B internal structure (rear)
B70114EN/04 4. FUNCTION
115
FANUC LASER C series are controlled by CNC. When you turn on the
start key (run key), start sequence and calibrate laser power automatically.
You make program of material processing only. When you turn off the
start key, stop sequence and oscillator stops automatically. It is not
necessary for you that daily calibration or periodic calibration. Following
shows outline of laser sequences.
(1) Outline of laser oscillation sequences
CNC POWER ON
SEQ 0
PURGE = 0
LRDY = 0
PTLP = 0
LSTR = 0
SEQ 10
PURGE = 1
LRDY = 0
PTLP = 0
LSTR = 0
SEQ 20
PURGE = 0
LRDY = 1
PTLP = 0
LSTR = 0
SEQ 30
PURGE = 0
LRDY = 0
PTLP = 1
LSTR = 1
CNC POWER OFF
(START KEY)
RUN ON
HV ON HV OFF
(START KEY)
RUN OFF
(RFHV=1)
(WAIT=1)
(RFHV=0)
(WAIT=1)
Initial
Ready of
discharging
Ready of
beam on operation
As is shown in the flow chart, the laser oscillation sequences can be
divided into four steps. Throughout this description the following
notation are used.
RUN Oscillator start switch
PURGE Purge in tube completion signal
LRDY Discharge preparation completion signal
PTLP Warning light signal
LSTR Oscillation preparation completion signal
[SEQ0] POWER OFF state
This is the state prior to power on where all the signals are in off state.
[SEQ10] INITIAL state
4.3
OPERATION
SEQUENCE
116
After power is turned on, laser comes into PURGE=1 state. This signal
is on when atmospheric pressure sensor monitors that the intratube
pressure equals atmospheric pressure. Usually when this signal is on,
purge completion lamp on operational board is lit.
[SEQ20] READY OF DISCHARGING state
When oscillator start switch is turned on, evacuation is carried on and
then gas pressure control begins. When gas pressure reaches the set
value, laser comes into discharge preparation completion (LRDY)
state and it becomes possible to turn on HV.
[SEQ30] READY OF BEAM ON OPERATION state
When HV (high voltage command) is turned on, high voltage is
applied to discharge tube. Then with the command from CNC, base
discharge is established. Further intratube pressure control is
performed. When this is completed normally, laser comes into
oscillation preparation complete state.
(2) Display of laser sequence
For the FS 16L and 16iL, a number indicating a sequence status is
displayed on diagnosis screen DGN. 908.
RUN ON Sequence
No. Status of laser sequence
10 Purge complete (Oscillator stop)
16 Rough evacuating from turbo blower (Exhaust pump ON)
17 Arrival wait of PRM.15240[235]
18 Arrival wait of turbo blower rated rotation (Turbo blower ON)
20 LRDY
HV ON (High voltage ON)
26 HVON (Discharge at low pressure)
27 Discharge pressure increase
28 Calibrating of laser power
30 LSTR
RUN OFF Sequence
No. Status of laser sequence
30 LSTR
23 Switch over to gas pressure of LRDY from gas pressure of LSTR
20 LRDY
14 75 sec wait
49 Exhaust after turning off the RUN KEY
12 Purge wait
10 Purge complete
117
The material processing machine using FANUC LASER C series is
usually composed in the configuration shown in the figure. In the figure
the rectangular parts of the solid line are FANUC products. In the below
each component are explained.
(1) Laser oscillator
FANUC provides MODEL C1500B, C2000B, C2000C, C3000C,
C3000D, C4000A, C6000B.
(2) Beam bender
This is the laser beam guide connecting beam path between the
oscillator and the focussing unit.
Laser gas
unit
Chiller
unit
I/O device
Guide
Laser
(Laser
diode)
FANUC
LASER
Laser
Oscillator
Bender
Assist gas unit
Focussing
unit
Machine
Magnetic
cabinet
Operator
Panel
AC Servo
Motor
CRT/MDI
FANUC
Series
0L
16L, 16iL
CNC
PMC
AC200/220V
Beam Beam
Beam
AC200/
220V
Fig. 4.4 System configurations
Note
Components encircled by solid lines are provided by
FANUC
(3) Focussing unit
This outgoing beam from the beam bender is focussed to a minute spot
using a focussing element of this unit. Usually this unit takes the form
integrated with a nozzle for assist gas injection.
4.4
LASER PROCESSING
MACHINE SYSTEM
118
(4) Guide laser (Laser diode)
A diode laser is used for coarsecontrol of the optical system axis after
a light beam is output from the oscillator. This laser can also be used
to identify the point to be machined.
(5) Assist gas unit
In laser material processing the injection of assist gas is required onto
the cutting spot. It work to cause exothermic reaction, blow off molt
or cool the work.
(6) Laser gas unit
Premixed laser gas consisting of CO
2
, N
2
, and He is introduced to the
laser oscillator from this unit.
(7) Chiller unit
This unit supplies cooling water to laser resonator, power unit, and
optics. As the cooling water temperature affects the stability of laser
output power, the chiller works to control the water temperature within
the required range.
(8) CNC
This CNC regulates FANUC LASERMODEL C series and the work
table.
(9) PMC
The CNC for FANUC LASER C series requires the use of PMC
regulating the interface between CNC and machine.
(10) CRT/MDI
The CRT/MDI for FANUC LASER C series are either a 9 inches
monochrome CRT or 14 inches multicolor one.
(11) Magnetic cabinet, Operators panel
For operating laser oscillator as well as CNC, a magnetic cabinet and
an operators panel are required.
(12) AC servomotor
The customer can select among FANUC AC servomotors for their
use.
(13) I/O device
The CNC for FANUC LASER C series are provided with a
reader/puncher interface and can be connected with any among
FANUC I/O devices.
B70114EN/04 5. MAINTENANCE
119
5
MAINTENANCE
In FANUC LASER C series, periodic inspection items have been
reduced, and adjustments have been made easy. To keep the oscillator in
a satisfactory operating condition over a long period, however, it is
necessary to carry out periodic maintenance (including daily
maintenance) described in this chapter. The oscillator is designed to
maintain the same performance and reliability as it has when it is installed,
provided that maintenance is carried out as prescribed.
5.1 DAILY INSPECTION 120 . . . . . . . . . . . . . . . . . . . . . . . .
5.2 PERIODIC MAINTENANCE 121 . . . . . . . . . . . . . . . . . .
5.3 DETAILS OF MAINTENANCE 123 . . . . . . . . . . . . . . . .
5.3.1 Maintenance Panels and Oil Gauge Position 123 . . .
5.3.2 Turbo Blower Oil 129 . . . . . . . . . . . . . . . . . . . . . . . .
5.3.3 Exhaust Pump Oil 131 . . . . . . . . . . . . . . . . . . . . . . . .
5.3.4 Exhaust Pump Filter 132 . . . . . . . . . . . . . . . . . . . . . .
5.3.5 Exhaust System Filter 133 . . . . . . . . . . . . . . . . . . . . .
5.4 AGING 135 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.4.1 Leak Check Method 135 . . . . . . . . . . . . . . . . . . . . . .
5.4.2 Aging Method 135 . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.5 MAINTENANCE PARTS 138 . . . . . . . . . . . . . . . . . . . . .
5.5.1 Spare Parts 138 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.5.2 Maintenance Tools 139 . . . . . . . . . . . . . . . . . . . . . . .
120
Table 5.1 lists daily inspection items. Inspect the FANUC LASER C
series according to this table. When parts (including oil) have been used
for a prescribed period, replace them quickly.
Table 5.1 Daily inspection items for FANUC LASER C series
Item Period Content and instruction
1 Residual laser gas Daily Check to see if the primary pressure is 10 bar or less as mea-
sured at the regulator on the laser gas cylinder. If the primary
pressure is 10 bar or lower, replace the gas cylinder. See
Section 5.6 for the gas specifications.
2 Exhaust pump oil Weekly Make sure that the oil level is between L (minimum) and H
(maximum). Usually, oil is supplied until the oil level is in the
middle between L and H. If the oil level is below L, supply oil
according to Section 5.3.3. Be sure to replace the oil periodi-
cally, every 6 months of use or every 1500 hours of operation,
whichever is earlier.
3 Exhaust pump oil leak Weekly Make sure that no oil is leaking from the vane pump main
body, drain cock and their periphery. If oil is leaking, immedi-
ately replace the exhaust filter according to Section 5.3.4, be-
cause it is likely to have been clogged. Be sure to replace the
exhaust filter periodically, every one year of use or every 3000
hours of operation, whichever is earlier.
4 Turbo blower oil Weekly Make sure that the oil level is between L (minimum) and H
(maximum) according to Fig. 5.3.2. Usually , oil is suppled
until the oil level is at 3/4 above L. If the oil level is below L,
supply oil according to Section 5.3.2. Be sure to replace the
oil periodically, every 4 months of use or 1000 hours of opera-
tion, whichever is earlier.
5 Turbo blower oil leak Weekly Make sure that no oil is leaking from the turbo blower main
body, oil inlet, cock, and their periphery. If oil is leaking, locate
the leak. If oil leaks for any reason other than a cock being
open, call FANUC.
6 Laser output Weekly 1. Check to see if the laser output measured at the outlet of
the short optical path oscillator is 5% or more lower than
the specified output. If this is the case, clean or replace
the optical components in the external reflection unit.
2. If the laser output decreases within the oscillator, warning
message No. 4085 [685] is issued. If this message ap-
pears, clean or replace the mirror in the oscillator quickly.
7 Cooling water Daily Make sure that the chiller discharge output is 5 bar or less.
Weekly Check the quality of cooling water circulating in the chiller. If
the water is colored badly, replace it completely. Be sure to
replace the cooling water every two months. Adding an anti-
corrosive to cooling water can decrease the replacement fre-
quency. See Section 5.5 for descriptions about the anticorro-
sive.
5.1
DAILY INSPECTION
121
Table 5.2 shows the periodic maintenance items and the periods. The
operation hour can be known from the indication of hour meter. When the
indicated periods are more than one, employ the one whichever comes
first.
Table 5.2 (a) Periodic maintenance items and periods
Interval of maintenance (Operation hour)
Item
C1500B
C2000B
C2000C
C3000C
C3000D
1 Output mirror cleaning
2 Rear mirror cleaning
30004000h 15002000h 8001200h
3 Folding mirror cleaning 30004000h
4 0shift mirror cleaning 1000h or processing quality go wrong
5 Output mirror change 4000h or inferior beam mode
6 Rear mirror change 4000h or inferior beam mode
7 Folding mirror change 4000h or inferior beam mode
8 0shift mirror change 4000h or inferior beam mode
9 Exhaust pump oil change 1500h or low exhaust ability
10 Exhaust pump filter change 3000h or low exhaust ability
11 Exhaust pump overhaul 10000h or low exhaust ability
12 Turbo blower oil change 1500h or inferior turbo blower oil
13 Turbo blower overhaul 12000h or low turbo blower ability
14 Pressure control filter change 12000h or pressure alarm occurs
15 Discharge tube Oring change 6000h or intracavity leakage occurs
16 Cooling water 1500h or inferior water quality
17 Water tubing cleaning 3000h or water flow is blocked
18 Beam absorber 15000h or over heat alarm occurs
19 Nylon tube 15000h
20 Cable 15000h
5.2
PERIODIC
MAINTENANCE
122
Table 5.2 (b) Periodic maintenance items and periods
Item
C4000A C6000B
1 Output mirror cleaning
2 Rear mirror cleaning
8002000h 8001200h
3 Folding mirror cleaning 30004000h
4 0shift mirror cleaning
1000h or processing quality
go wrong
No install
5 Output mirror change 3000h or inferior beam mode
6 Rear mirror change 3000h or inferior beam mode
7 Folding mirror change 3000h or inferior beam mode
8 0shift mirror change 4000h or inferior beam mode No install
9 Exhaust pump oil change 1500h or low exhaust ability
10 Exhaust pump filter change 3000h or low exhaust ability
11 Exhaust pump overhaul 10000h or low exhaust ability
12 Turbo blower oil change 1500h or inferior turbo blower oil
13 Turbo blower overhaul 12000h or low turbo blower ability
14 Pressure control filter change 12000h or pressure alarm occurs
15 Discharge tube Oring change 6000h or intracavity leakage occurs
16 Cooling water 1500h or inferior water quality
17 Water tubing cleaning 3000h or water flow is blocked
18 Beam absorber 15000h or over heat alarm occurs
19 Nylon tube 15000h
20 Cable 15000h
123
When opening the panels during maintenance, keep the power turn off.
Be sure to open the panel indicated in Fig. 5.3.1 (a), (b), (c), or (d) before
replacing oil or the filter during daily maintenance.
Fig. 5.3.1 (a) Maintenance panel (C1500B, C2000B, C2000C, C3000D)
Fig. 4.3.1 (b) Maintenance panel (C3000C)
5.3
DETAILS OF
MAINTENANCE
5.3.1
Maintenance Panels
and Oil Gauge Position
124
Fig. 5.3.1 (c) Maintenance panel (C4000A)
Fig. 5.3.1 (d) Maintenance panel (C6000B)
125
The locations of the oil gages are shown in Figs. 5.3.1 (e) to (l). These oil
gages can be checked through a window without having to open the panel.
Fig. 5.3.1 (e) Oil gauge of turbo blower and exhaust pump (C1500B)
Fig. 5.3.1 (f) Oil gauge of turbo blower and exhaust pump (C2000B)
126
Fig. 5.3.1 (g) Oil gauge of turbo blower and exhaust pump (C2000C)
Fig. 5.3.1 (h) Oil gauge of turbo blower (C3000C)
127
Fig. 5.3.1 (i) Oil gauge of exhaust pump (C3000C)
Fig. 5.3.1 (j) Oil gauge of turbo blower and exhaust pump (C3000D)
128
Fig. 5.3.1 (k) Oil gauge of turbo blower and exhaust pump (C4000A)
Fig. 5.3.1 (l) Oil gauge of turbo blower and exhaust pump (C6000B)
This check should be made when the oscillator is at a rest.
When the turbo blower is running, it is impossible to check the
amount of oil correctly.
Before supplying turbo oil, stop the oscillator according to the
correct procedure and turn off the power. If the oscillator is not
stopped by the correct procedure, the pressure in the turbo
blower becomes negative. Opening the oil inlet under such a
condition lets a large amount of air get in the turbo blower. An
air flow caused this way can bring oil mist into the oscillator,
possibly resulting in the optical mirror getting dirty.
129
Check the amount of oil in the turbo blower while referring to the figure
below. The oil level should be between graduations H and L.
Fig. 5.3.2 Turbo blower oil gauge
1. Remove the hexagonalhead screw from the oil inlet with a 17 mm
wrench. Be careful not to lose the Oring on the screw.
2. Take out a bottle of oil from an oil kit (A04B0800K326). Remove
the nozzle from the bottle, and take off the inner lid, then put the nozzle
back on the bottle. Insert the nozzle into the oil inlet. If it is difficult
to do this job, attach a tube (attachment to the oil kit) to the nozzle.
Watch the liquid level through the oil window. Supply oil until the
liquid level reaches the middle between graduation H and the center
line. Either superfluous or insufficient oil can be a cause of trouble.
5.3.2
Turbo Blower Oil
D Check method
Note
D Replenishment method
Caution
Replace the oil every 1000 hours of operation or every four
months of use, whichever is earlier.
After oil replacement, perform aging, referring to Section 5.4.
130
3. Clean the oil inlet, hexagonalhead screw, and Oring by wiping with
clean cloth or paper. Make sure that these parts are free of dust and lint.
Put the Oring in the groove around the hexagonalhead screw hole
at the oil inlet correctly. Fit and tighten the hexagonalhead screw into
the oil inlet. Note that if the Oring is not inserted correctly, or the
hexagonalhead screw is not tighten correctly, the turbo blower will
not be airtight.
4. If oil has spilled over, wipe it up. Otherwise, the peripheral equipment
may be affected adversely.
5. If there is oil left over, put the inner lid back on the bottle, and keep
the bottle in a dark, cool place.
1. Get a container for oil drain on hand, and put the tip of the drain tube
into the container.
2. Turn the oil drain cock through 90 clockwise, and the oil will start
draining.
3. After all the oil has been drained, close the oil drain cock by setting
it back in the initial place.
4. Supply oil by following the same procedure as for replenishment.
D Replacement method
Note
Caution
The exhaust of the turbo blower contains oil mist. The exhaust
pump will capture oil mist, and the amount of exhaust pump oil
increases with time. When the oil has increased too much, the
filter gets immersed in the oil, possibly causing white mist to
come out from the pump, or oil to leak. Furthermore, the
exhaust capacity may get lowered, or the pump may be
damaged.
131
Fig. 5.3.3 shows the location of the oil gauge. See also Fig. 5.3.4.
Watch the oil gauge, and check that the oil level is between graduations
L and H. Also check whether the oil is dark.
If the oil level is below L, add oil to the turbo blower or replace the oil in
it. If the oil level is above H, drain until the oil level becomes below H.
Fig. 5.3.3 Exhaust pump oil gauge
1. Stop the oscillator, and turn off the power.
2. Remove the maintenance panel.
3. Remove the oil inlet plug. There is an Oring on it. Be careful not to
damage it. A missing or damaged Oring can lower the exhaust
capacity of the pump.
4. Insert the drain tube into a drain oil pot.
5. Fully open the drain cock.
6. After the oil has been drained up, close the cock.
7. Supply 1.8 liters of new oil through the oil inlet, while watching the
oil gauge.
8. Attach the oil inlet plug.
9. Put the maintenance panel back in place, and turn on the power.
5.3.3
Exhaust Pump Oil
D Check method
Note
The exhaust filter element should be installed securely. If it is
installed incorrectly, or the Oring is not inserted accurately, oil
mist (white) will come out from the exhaust outlet.
132
Replace the filter every 3000 hours of operation or every year of use,
whichever is earlier. If the filter gets clogged, the pump output becomes
low.
Fig. 5.3.4 shows where the filter of a exhaust pump is located.
SCREW KNOB
FILTER COVER
ORING
SPRING
WASHER
EXHAUST FILTER ELEMENT
OIL INLET PLUG
Fig. 5.3.4 Exchange of exhaust pump filter
3. Remove the black screw button from the pump.
4. Remove the filter cover and Oring.
5. Remove the spring and washer.
6. Pull out the exhaust filter element.
7. Orient a new exhaust filter element correctly, and reverse the
procedure from step 5 to step 2. (An upward arrow is indicated on the
front surface of the filter element.)
8. Put the maintenance panel back in place, and turn on the power.
5.3.4
Exhaust Pump Filter
Note
133
Replace the filter every 1500 hours of operation or every 6 months of use,
whichever is earlier. Fig. 5.3.5 shows the exhaust pipe filter. None of the
C1500B, C2000B, C3000C, C3000D, and C4000A is equipped with this
filter.
Clamp
Housing head
Housing
Oring
(G90 or G85, depending on model; indicated on the housing surface)
Fastening nut
Cartridge filter
(manufactured by AdvanTech Toyo; TCG045SIFS)
Plate gasket
Fig. 5.3.5 Exhaust system filter
3. Wipe the dust off the periphery of the housing and the clamp.
4 Wash your hands and wear clean vinyl gloves.
5. Loosen the clamp, and remove the housing head from the housing.
6. Loosen the fastening nut on the cartridge filter, and take out the filter.
7. Remove the Oring, and clean it with lintfree paper dipped with
alcohol.
8. Clean the inner surface of the housing head and the Oring groove with
lintfree paper dipped in alcohol, then let them dry.
9. Put the Oring back in place. If the Oring is deformed or deteriorated,
replace it with a spare, whose rating is indicated on the periphery of
the housing.
5.3.5
Exhaust System Filter
If the Oring is not installed accurately, gas may leak.
134
10.Take out a new cartridge filter (A97L02010211, AdvanTech Toyo
TCG045SIFS) from its bag, and put a plate gasket (supplied
together with the cartridge filter) on both ends of the filter.
11. Insert the cartridge filter into the housing head, and fasten it with the
fastening nut.
12.Fasten the housing to the housing head. Before tightening the clamp,
make sure that the Oring touches the entire surface of the seal
uniformly.
13.Put the maintenance panel back in place, and turn on the power.
Note
135
If the machine has not been unused for an extended period of time (three
days or longer) or if the laser gas circulatory system is exposed to the
atmosphere (after, for example, turbo blower oil replacement), aging is
required. Aging refers to heating the discharge tube and the circulating
gas by performing internal discharge, so that any adsorptive impurities
and any air or water in the oil turn to gas and are released. If the laser gas
circulatory system is exposed to the atmosphere, perform a leak check
before aging.
(1) Change the setting of the following parameter.
(Be sure to record the setting. The setting may differ from that in the
data sheet.)
To change the settings of parameters, enter MDI mode and
change Parameter enable from 0 to 1 on the Setting Screen.
This causes a warning message to appear. After changing the
settings of parameters, return Parameter enable from 1 to 0
and press the RESET KEY.
PRM No. 15240 (for the 16L and the 16iL) or 235 (0L)
Setting 0
(2) Turn on the RUN ON key to start up the oscillator.
(3) In about ten minutes, ALM. 4080 [680] Abnormal exhaust air is
issued. Within one minute after it is issued, turn off the MAIN
BREAKER of the oscillator and then back on.
(4) Turn off the oscillator startup key (RUN ON key). Then, turn off the
power to the NC (machine operators panel) and then back on.
(5) Open the diagnosis screen DGN. 905 [860] and record the numeric
value. If the value increase does not exceed 10 in 15 minutes, it is
acceptable. Otherwise, check again the portions that were loosened.
(6) Turn on the oscillator startup key (RUN ON KEY). In a few seconds,
turn it off. When the machine enters the Purge status, return the
parameter to the previous setting.
(7) A leak check is now completed.
The oscillator control software provides an automatic aging function. If
aging is required after consecutive holidays, this function eliminates the
need to perform the following operation (for the 16iL only).
Enabling of the automatic aging function
PRM.15008.6 bit = 1
5.4
AGING
5.4.1
Leak Check Method
5.4.2
Aging Method
136
(1) Change the settings of the following parameters.
(Be sure to record the settings. The settings may differ from those in
the data sheet.)
To change the settings of parameters, enter MDI mode and
change Parameter enable from 0 to 1 on the Setting Screen.
This causes a warning message to appear. After changing the
settings of parameters, return Parameter enable from 1 to 0
and press the RESET KEY.
PRM No.15000.3 bit (16L, 16iL), 200.3 bit (0L)
0 1 Enable internal discharge during manual operation.
1 0 Do not perform 3minute compensation.
0 1 Enable internal discharge during automatic operation
1 0 Do not vacuum after RUN OFF.
PRM No.15201 (16L, 16iL), 232 (0L)
Setting 0
PRM No.15208 (16L, 16iL), 233 (0L)
Setting 0 Turn off output feedback.
PRM No.15209 (16L), 234 (0L)
Setting 0 Turn off output feedback.
PRM No.15242, 15243 (16L), 236 (0L)
Setting 0 Setting100
(2) Turn on the RUN ON key to start up the oscillator.
(3) Turn on the HV ON switch to start discharge. Check that discharge
is not turned off.
(4) Perform internal discharge with the following settings. Internal
discharge can be performed either automatically using the appropriate
program or manually using the appropriate operation switch.
1000W Duty 50% (C1500B, 15 minutes)
1500W Duty 50% (C2000B, C2000C, 15 minutes)
2000W Duty 50% (C3000B, C3000C, C3000D, 15 minutes)
2500W Duty 50% (C4000A, 15 minutes)
4000W Duty 30% (C6000A, 1 hour)
The frequency is 100 Hz throughout internal discharge.
D Automatic method
1) Create the following program (for the 1500B).
C32 P1 Q1;
G24 S1000 Q50 R900.;
G32 P0;
Set the output (W) for S, Duty (%) for Q, and time (seconds) for
R.
2) Set the shutter lock and start the program.
137
D Manual method
This method is possible if the machine operators panel provides
a manual internal discharge switch.
1) From the setting screen, enter the output and the duty.
2) Press the internal discharge switch to start internal discharge.
(5) When the prescribed time, given above, has elapsed, turn off the RUN
ON key to stop the oscillator.
(With the new version of the software, stop discharge and turn HV off.)
(6) Return the discharge gas pressure to the normal setting. Perform
internal discharge with the following settings, then perform purge.
PRM No. 15242, 15243 (16L), 236 (0L) Setting100 Setting
2000W Duty 50% (C2000B, C2000C, 15 minutes)
3000W Duty 50% (C3000B, C3000C, C3000D, 15 minutes)
4000W Duty 30% (C4000A, 15 minutes)
The frequency is 100 Hz throughout internal discharge.
(7) Upon completion of aging, return the parameters to the previous
settings.
138
To procure consumables, contact the machine builder or FANUC service
center, and tell the applicable specification number listed below.
D Consumable parts
Item Specification
1 Turbo blower oil kit A04B0800K326
2 Exhaust pump oil A98L00400093/1.0L6
3 Exhaust pump filter A98L00010911
4 Exhaust system filter A97L02010211
D Fuse of IF PCB
Specification Quantity Capacity Remarks
1 A60L00010175#3.2 1 3.2A +5V of the interface PCB for FS0L
2 A60L00010175#0.5 2 0.5A 15V of the interface PCB for FS0L
3 A60L00010175#3.2 2 3.2A 200VAC input of the stabilized PSU
4 A60L00010175#3.2 1 3.2A +5V of the interface PCB for FS16L,16iL
D Cleaner (For optics)
Ethyl alcohol, acetate, lens cleaner (A98L00010857), Blower for
lens cleaning and lens cleaning tissue (A99L01590001)
5.5
MAINTENANCE
PARTS
5.5.1
Spare Parts
139
Following tools are recommended for maintenance.
(1) Equipment
Equipment Condition Application
AC voltmeter Accuracy: "2% For measuring AC power
DC voltmeter Full scale: 10V, 30V
Accuracy: "2%
For measuring DC power
Digital voltmeter Full scale: 10V
Accuracy: "2%
For measuring laser output
Laser power meter Maximum range: 2000 W
Accuracy: "5%
For measuring laser output
Acrylic block (A98L00040655) Larger than 505030 mm
Transparent surface
For checking beam mode
(2) Tools
Tool Size Application
Hexagonal head
Wrench with ball
Point tip
Width: 2, 2.5, 3, 4, 5, 6, 8, 10mm Removing mechanical parts
Driver Crosstip (+) No.1, 2, 4
Stab driver Crosstip (+) No.00
Flattip () 1.8mm
For adjusting various sensors
Monkey wrench 300 mm 100 mm
Nippers
Pliers
Soldering iron 30 W
Forceps For replacing the optics
Spanner 1022mm For replacing the water and gas tubes
5.5.2
Maintenance Tools
B70114EN/04 6. TROUBLESHOOTING
140
6
TROUBLESHOOTING
The FANUC C series laser is provided with various sensors. They are
always monitored by a CNC. If the oscillator becomes abnormal, the
CNC promptly takes safety measures and brings the oscillator to a stop
or standby.
6.1 CHECKING ON FAULTS 141 . . . . . . . . . . . . . . . . . . . . .
6.2 RESPONDING TO ALARM MESSAGES
ON THE SCREEN 142 . . . . . . . . . . . . . . . . . . . . . . . . . . .
141
After identifying the following items, call the FANUC service center. In
some cases, a symptom is not actually a fault in the oscillator, although
it looks like a fault. So, check it with the following sections.
1. Symptoms
1 State of operation
(machining in progress, oscillator being started, etc.)
2 Timing of a fault (alarm)
3 Alarm number
4 How often the fault occurs
5 Oscillator serial number
2. Other information
1 Software system and edition indicated on the CRT screen when power
is turned on
2 Parameter settings;
check the current parameter settings with the corresponding values
indicated on the unit, and report your finding to the FANUC service
center.
6.1
CHECKING ON
FAULTS
142
See a list of alarms in an appendix at the end of this manual. The alarm
number, DGN, and parameter number (PRM NO.) vary with the CNC
model. So, the FS16L number comes first, and the FS0L number is
enclosed in parentheses.
Anomaly of AD converter 1 (Refer to DGN = 981 [844, 845/bit 7])
FS0L: AD converter 1 on Printed Circuit Board A16B12120270
(CNC side) is not normal.
FS16L, FS16iL: AD converter 1 on Printed Circuit Board
A16B11100260 or A16B21000141 (oscillator
side)
No. Cause of trouble Solution
1 Anomaly of AD converter 1 It is necessary to replace AD converter
1. Call the FANUC service center.
2 Anomaly of printed circuit
board
It is necessary to replace the oscillator
interface printedcircuit board. Call the
FANUC service center.
Anomaly of AD converter 2 (Refer to DGN = 982 [846, 847/bit 7] )
FS0L: AD converter 2 on Printed Circuit Board A16B12120270
(CNC side) is not normal.
FS16L, FS16iL: AD converter 2 on Printed Circuit Board
A16B11100260 or A16B21000141 (oscillator
side) is not normal.
1 Anomaly of AD converter 2 It is necessary to replace AD converter
2. Call the FANUC service center.
2 Anomaly of printed circuit
board
It is necessary to replace the oscillator
interface printedcircuit board. Call the
FANUC service center.
Laser power supply unit protective operation or failure
(Refer to DGN 966, 967, 974, 975 [842, 854].)
This alarm is issued, if a fault occurs in the laser power supply unit. The
cause of the fault and the required action are described below.
The laser power supply unit issues this alarm and stops operation to
protect itself, even if a fault occurs outside the power supply. In many
cases, this alarm is issued when the laser power supply is normal. So,
sufficient investigation is necessary. If the power supply is turned on
without removing the cause of the alarm, the alarm will be issued again.
1 Checking parameters Confirm that all the parameters de-
scribed in the attached parameter
sheets are correctly set.
In case there exists any error, correct it.
2 Checking cooling water
temperature
Confirm that the cooling water tempera-
ture is in the range of 20C to 30C. In
case it is not so, adjust it.
6.2
RESPONDING TO
ALARM MESSAGES
ON THE SCREEN
Alarm No. 4061 [661]
Alarm No. 4062 [662]
Alarm No. 4063 [663]
1. Preliminary inquiry
143
Confirm the symptom, and call the FANUC service center.
No. Phenomenon Presumption cause
1 An alarm occurs before discharge
begins.
The laser power supply is de-
fective.
2 The RF discharge current is small in
comparison with other units. The
base discharge is narrow and tends
to disappear.
The laser power supply is mal-
adjusted.
3 The RF discharge current is large in
comparison with other units. The
alarm is DCV alarm.
4 The RF voltage of all the units is high
during discharge and the laser power
is low. The base discharge is narrow
and tends to disappear. When the
purge is repeatedly performed, the
RF voltage gradually decreases and
the laser power recovers.
This phenomenon often appears af-
ter the laser was not used for a long
period.
The external laser gas pipe is
abnormal.
is low. The base discharge is narrow
and tends to disappear. Even though
the purge is repeatedly performed,
the situation does not recover.
Internal leakage
during discharge but the laser power
is normal. The base discharge is
narrow and tends to disappear. In
the high laser power region, it is low-
er than the normal value.
The intratube pressure of the
laser gas is high (pressure
sensor anomaly) or the gas
composition is not normal (ex-
cessive amount of N
2
).
7 The RF voltage of all the units is low
is low. The base discharge is widely
spread. In the high laser power re-
gion, the power is low but in the low
power region, it is higher than the
normal value.
The intratube pressure of the
laser gas is low (pressure sen-
sor anomaly) or the gas com-
position is not normal (exces-
sive amount of He).
8 An alarm is generated notwithstand-
ing the absence of anomaly either in
the diagnostic data, discharge state
or laser power characteristics.
Anomaly of the Laser power
supply unit itself (anomaly of
alarm circuit).
2. Confirming operation
and investigating the
cause of a fault
144
1 External laser gas pipe ab-
normal
Improve the external pipe. The pipe
should be installed in such a way that
neither material chips nor impurities are
released. There shall be no gas leak-
age.
2 Gas composition ratio ab-
normal
Replace the laser gas with one that sat-
isfies the specification.
3 Discharge tube abnormal It is necessary to replace or adjust the
4 PCB abnormal
part. Call the FANUC service center.
5 Laser power supply abnor-
mal
6 Laser power supply malad-
justed
7 Pressure sensor abnormal
Shutter anomaly (Related DGNs are shown below.)
This alarm is issued, when the shutter does not work correctly in response
to the shutter open/close instruction. The cause of the fault and the
required action are described below.
1 Shutter clamp not removed. It is necessary to replace or adjust the
2 Anomalous detecting posi-
tion
3 Anomaly of position detect-
er
4 Shutter cam loosened.
5 Shutter balancer loosened.
6 Intermediate PCB B, oscilla-
tor IF PCB, or NC IF PCB
abnormal
7 Anomaly of cables connect-
ing each PCB.
3. Solution
Alarm No. 4065 [665]
145
Discharge anomaly (Refer to DGN = 909 to 914 [861 to 868]
Pressing the HVON (start discharge) button causes the unit to start
discharging. This alarm is issued, if at least one discharge tube fails to
operate.
1 Anomaly of parameter set-
ting
Make a setting using the values of PRM.
No. 15220 [0247], 15221 [0248], 15241
[0237], 15222 [0249], 15223 [0250]
listed in the parameter table attached to
the machine.
2 Anomaly of laser gas com-
position
Replace the laser gas with the specified
one, that is CO
2
:N
2
:He = 5:55:40% (vol-
ume ratio) with a composition ratio accu-
racy of "5% or less.
Also make sure that gas does not leak
from the external laser gas pipe.
3 Loose fixing parts of elec-
trode
It is necessary to replace or adjust the
4 Gas circulating system leak-
age of gas or water
5 The gas flow control value
is closed
Overheat of laser cabinet (Refer to DGN = 961/bit 1 [841/bit7])
The temperature of the input side of the electrode cooling fan is monitored
and sends alarm when it exceeds 60C. When the temperature decreases,
the alarm state is solved automatically. Before that it cannot be reset.
1 Excessive environmental
temperature
Lower the ambient temperature by ven-
tilation (5C to 30C).
2 Excessive cooling water
temperature
Check the temperature adjuster of the
chiller unit. Set the temperature of the
cooling water to within an appropriate
range (20C to 30C).
3 Anomaly of cooling fan mo-
tor
It is necessary to replace or adjust the
4 Anomaly of temperature
sensor
5 Oscillator IF PCB or CNC IF
PCB abnormal
6 Anomaly of connecting
cables between the PCBs.
Alarm No. 4066 [666]
Alarm No. 4067 [667]
146
Too much incident laser beam back to the resonator.
(Refer to DGN = 906 [878])
This alarm is issued, if a workpiece reflects laser beam more than the
rating to the laser oscillator. This can happen when the laser beam is used
to drill, cut, or weld materials (such as copper, brass, and aluminum)
having a high reflectivity to the laser beam (10.6 mm).
1 Excessive returning beam
back into the resonator
Lower the output specified in the com-
mand, or take an action to reduce the
reflected laser beam.
2 Anomaly of parameter for
alarm detection
Check the settings of parameter Nos.
15265 [3982] and 15266 [3983] with the
corresponding values in the parameter
table attached to the unit.
output power table
Check the settings of parameter Nos.
15280 to 15308 [265 to 294] with the
corresponding values in the parameter
table attached to the unit.
input calibration coefficient
Set the parameter PRM. No. 15152
[259] to be the values as shown in the
attached table.
If rear mirror or power sensor was re-
placed, change the parameter.
Anomaly of power supply unit voltage of IF PCB
(Refer to DGN = 960/bit 0 [841/bit 0])
This alarm appears when there occurs the anomaly in the stabilized power
unit voltage 5, 15, 24V of IF PCB for NC interface.
1 Fuse blowing It is necessary to replace or adjust the
2 Anomaly of stabilized power
source unit
3 Anomaly of power unit of IF
PCB
4 Laser oscillator main circuit
breaker abnormal
Anomaly of chiller unit (Refer to DGN = G221/bit 6 [145/bit6]
Setting the RUN (start pressure control) to ON causes the NC to output
a chiller unit start signal to the machine, which will respond with a chiller
unit ready signal. The NC monitors this signal. If the chiller ready signal
stops, the NC issues this alarm. Check the operation of the chiller.
Alarm No. 4068 [668]
Alarm No. 4069 [669]
Alarm No. 4070 [670]
147
Anomaly of assist gas (Refer to DGN = G221/bit 7 [145/bit7]
When starting machining, the NC monitors for a ready signal from the
assist gas supply unit in the machine. If this signal is not sent normally,
the NC issues this alarm.
Check the operation of the assist gas supply unit. Also check whether
there is the assist gas.
This alarm is issued also when in G32Pa Qb , a is not 0 to 3, or b is not
1 to 7 during program execution.
Shortage of cooling water (Refer to DGN = 961/bit 1 [840/bit 1])
This alarm appears when the water shortage takes place.
1 Shortage of cooling water The water flow from the chiller unit is in-
sufficient, or the water flow is decreased
due to a clogged pipe. Check the dis-
charge pressure of the pump, or clean
the inside of the pipe.
2 Anomaly of connecting
cables
A sensor cable has come off the termi-
nal or is broken. Call the FANUC ser-
vice center.
3 Anomaly of water flow rate
sensor
If the flow meter provided outside the
oscillator indicates that there is a rated
water flow, the water level sensor may
be clogged with dust or scum, or may be
defective. Call the FANUC service cen-
ter.
Decrease of laser gas pressure (Refer to DGN = 960/bit 5 [840/bit 4])
The pressure of the laser gas supplied to the laser oscillator is monitored.
This alarm is issued, if this pressure becomes lower than the permissible
level (1 kgf/cm
2
).
1 Tool low supply pressure of
laser gas
Adjust the secondary pressure at the
regulator on the gas cylinder so that the
pressure of laser gas supplied to the la-
ser oscillator is 1 to 2 bar (rating) as
measured at the entry of the oscillator. If
the distance between the gas cylinder
and the oscillator is larger than 5 m, it is
necessary to set the pressure slightly
higher.
2 No laser gas. Check whether the gas cylinder is empty
or whether the connection valve is
closed. If empty, replace the gas cylin-
der.
3 Leakage from the gas tube
leading to the oscillator
Check that the gas pipe joint is secure.
Also check whether the tube or pipe is
broken. If so, replace it.
4 Gas supply pressure sensor
or cable abnormal
The sensor is defective, or set incorrect-
ly. Alternatively, the connector is at-
tached incorrectly. Call the FANUC ser-
vice center.
Alarm No. 4071 [671]
Alarm No. 4072 [672]
Alarm No. 4073 [673]
It is strictly forbidden to blow hot air higher than 60C to the
sensor.
148
Condensation (Refer to DGN = 961/bit 2 [840/bit 6])
There is a condensation sensor at the inlet of the water branch unit in the
oscillator. This alarm is issued, when condensation is detected. If this
alarm occurs, the alarm condition cannot be reset until the condensation
state is released. Let the inside of the oscillator cabinet dry.
1 Tool low cooling water tem-
perature
Set the water temperature near the room
temperature (plus 1C).
2 Connecting anomaly of con-
densation sensor cable
If this alarm occurs when there is no
condensation on the cooling water
3 Anomaly of condensation
sensor
branch unit, the sensor is malfunction-
ing. Call the FANUC service center.
Laser output decrease (Refer to DGN = 906 [878])
This alarm is issued, if the monitored laser output is much lower than the
specified laser output, that is the monitored laser output is lower than the
specified output by a value specified in parameter No. 15271 [242].
1 Invalid parameter setting Reset the parameter as specified in the
attached data sheet. Check whether bit
1 of parameter No. 15271 [242] is as
specified in the attached data sheet. If
not, set the parameter as specified.
2 Lack of output from laser
power sensor unit
Call the FANUC service center.
3 Connecting anomaly of the
cable of laser power sensor
unit.
4 Anomaly of intermediate
PCB B
Alarm No. 4075 [675]
Caution
Alarm No. 4076 [676]
149
Overheat of beam absorber (Refer to DGN = 961/bit 7 [841/bit 3])
Laser beam is introduced into the beam absorber, when the oscillation
takes place with shutter closed. This absorber is watercooled and sends
alarm when the temperature exceeds a critical one. In the usual operation,
the irradiation of the absorber takes place only during the calibration
lasting 3 minutes just after the RUN start.
1 Insufficient cooling water Call the FANUC service center.
2 Temperature sensor wired
incorrectly
3 Temperature sensor abnor-
mal
Gas pressure anomaly in discharge tube (Refer to DGN = 905 [860])
The gas pressure is monitored after the discharge start ready condition
(LRDY) is established. This alarm is issued, if the monitored gas pressure
deviates by "10 from the set gas pressure.
ting of gas pressure control
Ascertain if the values of PRM No.
15000/bit 1 [200/bit 1], 15244 [0264],
15245 [0207], 15246 [0246] are used as
designated in the attached data sheets.
If different, correct them.
2 Abnormal supply laser gas
pressure setting
higher.
3 Gas leakage from the inter-
nal piping
4 Anomaly of pressure sensor
5 The gas flow control valve
is closed.
6 Anomaly of pressure control
unit
The emergency stop button was pressed.
If the emergency stop button is pressed after the discharge start ready
condition (LRDY) is set up, the shutter is closed, discharge stops, and the
LRDY condition is resumed, then this alarm is displayed. To reset the
alarm, remove the cause of trouble, release the emergency stop button,
and press the reset key on the operators panel.
Alarm No. 4077 [677]
Alarm No. 4078 [678]
Alarm No. 4079 [679]
150
Leakage of gas tube/anomaly of exhaust pump
(Refer to DGN = 905 [860])
When the RUN (pressure control start) button is pressed, the exhaust
pump starts operating and expels gas from the gas circulating system to
cause a lowpressure condition. This alarm is displayed, if the pressure
is not reduced to the level specified in parameter No. 15240 [0235] within
10 minutes from the start of discharging.
Check whether parameter 15240 [0235]
is set as specified in the attacked data
sheet.
2 Anomaly of exhaust pump Check or take the following steps:
1 The amount of supplied oil is improp-
er.
2 The type of supplied oil is incorrect.
Supply a specified type of oil.
3 The exhaust filter is clogged. Re-
place it.
4 The exhaust outlet of the exhaust
pump is blocked or clogged, result-
ing in hindered exhaust. Remove
blocking materials.
5 If normal operation cannot be re-
sumed, call the FANUC service cen-
ter.
3 IF PCB abnormal Call the FANUC service center.
nal piping
Alarm No. 4080 [680]
151
Anomaly of gas pressure control (Refer to DGN = 905 [860]
Pressing the RUN (pressure control start) button starts expelling air from
the laser gas tube. When a specified degree of vacuum is attained, laser
gas is supplied into the laser gas tube, and gas pressure control begins.
Fortyfive seconds after the turbo blower is started, a check is made to see
whether the vacuum in the laser gas tube has reached to the level specified
in parameter No. 15241 [0237] "20. If the specified level has not been
reached, this alarm is issued. When there is no abnormal condition, a
discharge start ready condition (LRDY) is set up.
Check whether bit 1 of parameter No.
15000 [bit 1 of 200], and parameter Nos.
15244 [0264], 15245 [0207], and 15246
[0246] are set as specified in the at-
tached data sheet.
2 Anomaly of supply laser gas
pressure
higher.
nal piping
4 IF PCB abnormal
6 Anomaly of pressure control
valve
Anomaly of pressure sensor (Refer to DGN = 905 [860]
This alarm appears when the signal of the pressure sensor used for
pressure control detector vanishes.
1 Anomaly of connection
cable
2 Anomaly of IF PCB
Alarm No. 4081 [681]
Alarm No. 4082 [682]
152
Shutter failure to open
This alarm occurs when the shutter does not reach the correct position at
a certain time (preflow time of assist gas) after the shutter open
command.
This alarm takes place in the following cases.
1 The preflow time of assist
gas is too short for the shut-
ter to open.
Adjust the preflow time on setting
screen. It should be longer than 0.6
sec.
2 Anomaly of shutter opera-
tion
Anomalous selection of the number of discharge tubes.
Anomalous selection of the number of discharge tubes. (Only FS0L)
1 The case of FS0L.
The number of discharge
tubes is selected tube other
than 2 or4.
The number of discharge tubes should
be selected to be one of 2or 4. The
selection can be done in the laser set-
ting screen and the result is indicated as
PRM. No. [0226] unselected.
Decrease of laser output power (Refer to DGN = 906 [878])
This alarm appears when the laser output power decreases and takes an
abnormally higher calibration coefficient.
1 The supplied laser gas is
not the one specified.
one, that is CO
2
:N
2
:He = 5:55:40% (vol-
racy of "5%.
2 Higher temperature of cool-
ing water
Make sure that the cooling water is in a
temperature range between 20C and
30C.
3 An optical part in the laser
resonator is out of position.
4 An optical part in the laser
resonator is dirty.
Alarm No. 4083 [683]
Alarm No. [684]
Alarm No. 4085 [685]
153
Shutter temperature abnormal
(Refer to bit 6 of DGN 961 [bit 2 of 841].)
This alarm is issued, if the temperature of the shutter mirror exceeds the
limit, which is 80C for C1500B, C2000B, C2000C, C3000C, C3000D,
C4000A, or 90C for C6000B.
1 Contamination of shutter
mirror
2 Temperature sensor abnor-
mal, or its cable broken
3 Intermediate PCB B abnor-
mal
4 Anomaly of the cables con-
necting each PCB
5 Shutter fan operation abnor-
mal
Discharge tube voltage drop (Refer to DGN 909 [861].)
This alarm is issued, if the voltage applied to the discharge tube drops
largely. More specific, the discharge tube voltage for reference discharge
is set up automatically to parameter No. 15270 [199] each time the RUN
button is pressed. This alarm is issued, if the automatically set discharge
tube voltage is lower than the discharge voltage specified at the previous
RUN time, by at least the amount specified in parameter No. 15272 [243].
1 The laser gas composition
is not as specified.
one, that is CO
2
:N
2
:He = 5:55:40% (vol-
racy of "5%.
2 Gas leakage from the exter-
nal pipe
Check the pipe clamp for gas leakage.
3 Gas leakage from the oscil-
lator
4 Laser power supply dis-
charge tube voltage detec-
tor abnormal
Alarm No. 4087 [687]
Alarm No. 4088 [688]
154
Assist gas not output
(Refer to bits 0 to 2 of DGN F222 [bits 0 to 2 of 173].)
This alarm is issued, if an attempt is made to radiate a laser beam, when
no assist gas is selected, or an assist gas condition is not set up.
Laser beam not generated (Refer to bit 6 of DGN F221 [bit 6 of 172].)
This alarm is issued, if an attempt is made to radiate a laser beam, when
the laser oscillator is not in the LSTR state (discharging state).
Vacuum pump operation abnormal (Refer to bit 3 of DGN.)
The thermal magnetic contactor for the exhaust pump has tripped.
1 Anomaly of exhaust pump Call the FANUC service center.
2 Anomaly of IF PCB
3 Signal cable broken
Gas pressure not reached (Refer to DGN 905 [860].)
This alarm is issued, if the discharge tube gas pressure does not reach
[specified discharge tube gas pressure during oscillation tolerance] after
HV is set to ON.
1 Invalid parameter setting Check whether bit 3 of parameter No.
15001 [bit 6 of 3981], and parameter
Nos. 15247 [4398], 15248 [4399] are set
as specified in the attached data sheet.
2 Gas leakage from internal
piping
3 Pressure sensor abnormal
Turbo blower invertor abnormal
(Refer to bit 0 of DGN 962 [bit 1 of 841].)
This alarm is issued, if an invertor used to run the blower becomes
abnormal. When this alarm is issued, an LED on the invertor is turned
on.
If the invertor power is turned off, the message is reset.
1 Turbo blower abnormal Call the FANUC service center.
2 Invertor abnormal
3 Blower cable broken
Alarm No. 4089 [689]
Alarm No. 4090 [690]
Alarm No. 4094 [ ]
Alarm No. 4099 [695]
Alarm No.
4100, 4110 [ ]
155
Invertor frequency reached signal abnormal
This alarm is issued, if a frequency reached signal (bit 1 of DGN 962, 963,
and 964) is not received within 120 seconds after the turbo blower is
started.
1 Cable connection abnormal Call the FANUC service center.
2 Invertor abnormal
3 Invalid invertor setting
Turbo blower abnormal vibration
This alarm is issued, if the turbo blower vibrates abnormally (if the
monitored vibration exceeds the permissible level).
Turbo blower running
This alarm is issued, if the turbo blower does not stop within 120 seconds
after the RUN OFF is pressed. When this alarm is issued, it becomes
possible to switch off the power without purging.
Invalid invertor setting.
Turbo blower overcurrent
This alarm is issued, if the overcurrent sensor in the sensor unit detects
an abnormal condition.
Turbo blower temperature abnormal
This alarm is issued, if the temperature of the turbo blower motor winding
becomes higher than the permissible level.
Low turbo blower oil
This alarm is issued, if the amount of oil in the turbo blower decreases.
Stop the oscillator, and check the oil level with the oil gauge on the turbo
blower.
1 The oil level is lower than
specified.
Replenish the turbo blower with oil until
the oil level on the oil gauge is between
H and L. Replace the oil every 4
months of use or every 1000 hours of
operation, whichever is earlier.
2 Invalid sensor setting Call the FANUC service center.
3 Sensor abnormal
Alarm No.
4101, 4111 [ ]
Alarm No.
4102, 4112 [ ]
Alarm No.
4103, 4113 [ ]
Alarm No.
4104, 4114 [ ]
Alarm No.
4105, 4115 [ ]
Alarm No. 4106 [620]
156
External reflecting mirror not installed
This alarm is issued, if the beam reflecting unit is not attached with a
mirror or mirror holder.
1 Reflecting mirror not
installed
2 Switch abnormal
3 Cable abnormal
Parameter is changed
This alarm is issued, if the parameter that is No. 15242, 15243 [236] and
No. 15223 [250] changed during Laser operation.
Push reset key and push the HV ON button.
Alarm No. 4107 [621]
Alarm No. 4132 [622]
APPENDIX
B70114EN/04 A. EXTERNAL VIEW APPENDIX
159
A
EXTERNAL VIEW
Fig. A (a) C1500B (short optical path length type)
Fig. A (b) C1500B (long optical path length type)
APPENDIX B70114EN/04 A. EXTERNAL VIEW
160
Fig. A (c) C2000B (short optical path length type)
Fig. A (d) C2000B (long optical path length type)
161
Fig. A (e) C2000C (short optical path length type)
Fig. A (f) C2000C (long optical path length type)
162
Fig. A (g) C3000C (short optical path length type)
Fig. A (h) C3000C (long optical path length A type)
163
Fig. A (i) C3000C (long optical path length B type)
Fig. A (j) C3000C (auxiliary unit)
164
Fig. A (k) C3000D (short optical path length type)
Fig. A (l) C3000D (long optical path length type)
165
Fig. A (m) C4000A (short optical path length type)
Fig. A (n) C4000A (long optical path length type B)
166
Fig. A (o) C6000B
B70114EN/04
B. FANUC LASER C SERIES
SPECIFICATIONS APPENDIX
167
B
FANUC LASER C SERIES SPECIFICATIONS
APPENDIX B70114EN/04
SPECIFICATIONS
168
Item Contents
Model C1500B
(Short)
C1500B
(Long)
C2000B
(Short)
C2000B
(Long)
C2000C
(Short)
C2000C
(Long)
Principle RF discharge excited fast axial flow CO
2
laser
Structure Oscillator and power source integrated
Rated power 1,500W 2,000W
Max power 1,800W 2,000W
Pulse power peak 3,300W (<500Hz, <50%) 2,700W (<500Hz,<50%)
Power stability "1% (For 8 hours operation at rated power level with power feedback control and
calibration function)
Wave length 10.6 m
Beam mode Lower order mode
Beam diameter (Exit) <f24mm <f20mm <f27mm <f23mm <f27mm <f23mm
Polarization Linear (45) Circular/
Linear (45)
Linear (45)
Beam divergence Less than 2 m rad (Full angle)
Pulse command freq. 5 to 2,000 Hz
Pulse command duty 0 to 100%
Laser gas composition CO
2
: He: N
2
= 5: 40: 55 (Volume, N
2
balance "5% for each composition)
Laser gas pressure 0.175 " 0.025 MPa (Gauge pressure)
Laser gas consumption Approx. 10 liter/hour
Cooling water rate >50 liter/min >75 liter/min
Water temperature 20 to 30C
Temperature stability "1C (Power stability of "1%)
Cooling water pressure Less than 0.5 MPa (Gauge pressure)
Water pressure loss
(Rated flow)
0.3 MPa
Chiller capacity >15.7 kW >22 kW
Electric power line 3f 200 VAC +10%, 15% 50/60Hz or 3f 220 VAC +10%, 15% 60Hz
Grounding Earth (<10 ohm), Protective earth
Electric power
Consumption
23 KVA 33 KVA
Maximum current 80A 110A
Electrical shutter /Trigger type Trigger type
Hour meter Integrated the operational time of a exhaust pump
Weight 700 kg 800 kg 700 kg
NOTE
Use mechanical shutter when stopping machine operation.
B70114EN/04
SPECIFICATIONS APPENDIX
169
Item Contents
Model C3000C
(Short)
C3000C
(Long)
C3000D
(Short)
C3000D
(Long)
2
laser
Structure Oscillator and auxiliary unit separated Oscillator and power source integrated
Rated power 3,000W
Max power 3,000W
Pulse power peak 4,000W (<500Hz, <50%) 3,800W (<500Hz, <50%)
Wave length 10.6 m
Beam diameter (Exit) <f27mm <f24mm <f27mm <f24mm
Polarization Circular Linear (45) (Circular) Circular Linear (45) (Circular)
2
: He: N
2
= 5: 40: 55 (Volume, N
2
Laser gas consumption Approx. 20 liter/hour Approx. 10 liter/hour
Cooling water rate >120 liter/min
Cooling water pressure Less than 0.5 Mpa (Gauge pressure)
Water pressure loss
(Rated flow)
<0.3 MPa <0.25 MPa
Chiller capacity >33.7 kW
Electric power
Consumption
44 KVA
Maximum current 150A
Electrical shutter Trigger type
Weight 900 kg (Osc) 150 kg (Aux) 800 kg
NOTE
APPENDIX B70114EN/04
SPECIFICATIONS
170
Item Contents
Model C4000A
(Short)
C4000A
(Long)
C6000B
2
laser
Structure Oscillator and power source integrated
Rated power 4,000W 6,000W
Max power 4,000W 6,000W
Pulse power peak 5,000W (<500Hz, <50%)
Wave length 10.6 m
Beam diameter (Exit) <f27mm <f24mm <f28mm
Polarization Circular Linear (90 Vertical) Linear (90 Vertical)
2
: He: N
2
= 5: 40: 55 (Volume, N
2
Laser gas consumption Approx. 10 liter/hour Approx. 40 liter/hour
Cooling water rate >160 liter/min >250 liter/min
or (125+125) twin
Cooling water pressure Less than 0.5 MPa (Gauge pressure)
Water pressure loss
(Rated flow)
<0.25 MPa
Chiller capacity >44.2 kW >67.5 kW
Electric power
Consumption
55KVA 90KVA
Maximum current 190A 300A
Electrical shutter Trigger type
Weight 900 kg 1,800 kg
NOTE
B70114EN/04 C. ERROR CODE LIST APPENDIX
171
C
ERROR CODE LIST
Number
FS16L,
16iL
FS0L Contents Alarm level
4061 661 Anomaly in AD converter 1 ALARM 1
4062 662 Anomaly in AD converter 2 ALARM 1
4063 663 Anomaly in laser power supply unit ALARM 2
4065 665 Anomaly in shutter action ALARM 2
4066 666 There exist discharge tube without discharge ALARM 2
4067 667 Overheat in laser oscillator ALARM 1
4068 668 Too much laser beam reflected to the inside of the oscillator Shutter : close
Beam : off in LSTR
4069 669 Anomaly in power unit voltage of IF PCB ALARM 1
4070 670 Anomaly in chiller unit ALARM 1
4071 671 Anomaly in assist gas unit Shutter : close
Beam : off in LSTR
4072 672 Shortage of cooling water ALARM 1
4073 673 Decrease of laser gas supply pressure ALARM 1
4074 674 Overheat in Roots blower ALARM 1
4075 675 Condensation ALARM 1
4076 676 Decrease of laser output ALARM 1
4077 677 Overheat in beam absorber ALARM 1
4078 678 Anomaly in discharge tube gas pressure control unit ALARM 1
4079 679 Emergency button pressed ALARM 1
4080 680 The vacuum pump is abnormal, or gas leaks from the gas
circulating system.
ALARM 1
4081 681 Anomaly in gas pressure control ALARM 1
4082 682 Anomaly in pressure sensor ALARM 1
4083 683 The shutter is not open when the beam output command is
issued.
Shutter : close
Beam : off in LSTR
684 An incorrect power supply was selected. ALARM 2
(1/2)
APPENDIX B70114EN/04 C. ERROR CODE LIST
172
Number
FS16L,
16iL
Alarm level Contents FS0L
4085 685 Decrease of laser output A warning has occurred. It can
be reset.
4087 687 Overheat in shutter mirror ALARM 2
4088 688 The discharge tube voltage is low. ALARM 1
4089 689 Selection signal of assist gas not commanded
(in beam on state)
Shutter : close
Beam : off in LSTR
4090 690 The oscillator is not in the LSTR state when the beam output
command is issued.
4094 Anomaly in exhaust pump ALARM 1
4095 695 The specified gas pressure has not been reached. ALARM 1
4100 691 Anomaly of inverter ALARM 1
4101 691 An inverter frequency reached signal is abnormal. ALARM 1
4102 691 The turbo blower vibrates abnormally. ALARM 1
4103 691 The turbo blower is not at stop. ALARM 1
4104 691 Turbo blower overcurrent ALARM 1
4105 691 Turbo blower temperature abnormal ALARM 1
4106 620 There is no sufficient oil in the turbo blower. ALARM 1
4107 621 External folding mirror not mounted ALARM 2
4132 622 Parameter is changed ALARM 2
D Alarm processing levels
ALARM1: Discharge is stopped, purge is carried out, and a purge
complete state is entered.
ALARM2: Discharge is stopped, and a discharge start ready state
(LRDY) state is entered.
(2/2)
B70114EN/04 D. FANUC SERVICE NETWORK APPENDIX
173
D
FANUC SERVICE NETWORK
FANUC LTD
Headquarters: Oshinomura, Yamanashi Prefecture, 4010597, Japan
Phone 555845555 Fax 555845512 Country code 81
Service division: 51, Asahigaoka 3Chome, Hinoshi, Tokyo 191, Japan
Phone 425841111 Fax 425850954 Country code 81
[SERVICE LOCATION OF EUROPE AREA]
Location Service Representative Service area
Paris
FRANCE
Country code 33
FANUC FRANCE S.A.
Address: 10 Rue de Valenton
94470 Boissy StLeger
Phone: 145696333 Fax: 145690325
France, Belgium
Luxembourg
Morocco
Tunisia, Egypt
Stockholm
SWEDEN
Country code 46
GE FANUC Automation Nordic AB
Address: Mannar backen 4, S191 49
Sollentuna, Sweden
Phone: 84445520 Fax: 84445521
Sweden
Finland
Norway
Denmark
Stuttgart
GERMANY
Country code 49
FANUC GERMANY GmbH
Address: Bernhauser str. 22
73765 Neuhausen a.d.F.
Phone: 7158187300 Fax: 7158187411
Germany
Netherlands
Switzerland
Austria
Hilden
GERMANY
Country code 49
FANUC GERMANY GmbH (Hilden Branch Office)
Address: Elberfelder Strasse 45
40724 Hilden
Phone: 2103241060 Fax: 210362202
Porland
Hungary
Czecho, Slovakia
Greece
Slovenia
London
U.K.
Country code 44
FANUC U.K. LIMITED
Address: FANUC House, 1 Station Approach
Ruislip, Middlesex HA4 8LF
Phone: 1895634182 Fax: 1895676140
U.K.
Ireland
Milano
ITALY
Country code 39
FANUC ITALIA S.P.A.
Address: Piazza Tirana, 24/4B
20147, Milano
Phone: 0248303272 Fax: 0248301943
Italy
Madrid
SPAIN
Country code 34
FANUC IBERIA S.A.
Address: C/Alfonso GOMEZ, 38 PLANTA 1E
28037, Madrid
Phone: 913271938 Fax: 913270814
Spain
Portugal
Sofia
BULGARIA
Country code 359
FANUC BULGARIA CORPORATION LTD
Address: 2937 Cristo Smirnenski
Str. 1164, Sofia
Phone: 29633319 Fax: 29632873
Bulgaria
Rumania
Macedonia
Istanbul
TURKEY
Country code 90
FANUC TURKEY LTD
Address: Kusbakisi Sok. No:21, k12
AltunizadeUskudar, Istanbul
Phone: 2163913548 Fax: 2163918133
Turkey
APPENDIX B70114EN/04 E. GLOSSARY
174
E
GLOSSARY
Name Meaning
Access panel That protective component of a housing or enclosure which, when removed or
shifted, can cause exposure to laser radiation.
AEL Accessible emission level Maximum accessible emission level set up for each class of laser products
Alignment Optical axis adjustment
Aperture Iris, or stop
Beam Aggregate of unidirectional, diverging, or conversing rays
Beam diameter Distance between two symmetrical points in a cross section of a beam where
the power per unit area is 1/e as high as the maximum power per unit area
Beam divergence Angle through which a beam spreads
Burn pattern Laser beam mode pattern generated on a plate such as an acrylic plate for
confirmation purposes
Circular
Polarization
Polarization in which a plane of polarization rotates about the axis along which
the light progresses and does not have directivity; an electric or magnetic field
based on circular polarization has a constant intensity.
CO
2
laser Laser that uses a carbon dioxide gas as a laser medium
CW Continuous wave Continuously radiated laser output
Discharge excitation Realization of inverted population by means of discharge
Enhanced pulse Greatly amplified peak output of a pulse
Excitation Transition of atoms or molecules to a higher energy level by supplying them
with external energy
Exposure time Duration through which laser radiation is emitted
Fast axial flow laser Laser in which gas flows rapidly in the same direction as the laser beam
Feedback Corrective action in which a quantity to be controlled is compared with a target
value generated by feeding part of an output signal to the input through a spe-
cially created closed loop so that the quantity to be controlled matches the
target value.
Laser Device for generating light by stimulated emission
Laser controlled area Area in which activities are controlled or monitored for protection from hazards
resulting from laser radiation
Laser mirror Reflecting mirror used in a laser resonator
Laser safety officer Person having sufficient knowledge about evaluation and management of
hazards of lasers and in charge of safety management of lasers
B70114EN/04 E. GLOSSARY APPENDIX
175
Name Meaning
Laser safety standard Standard to protect human bodies from hazards resulting from laser beams in
view of use of lasers and about laser products for sale
Linear
Polarization
Polarization in which a plain of polarization is at a constant angle with the axis
along which the light progresses
Maintenance Action taken by a user to preserve normal operation of a product, such as
adjustment or other measures specified in documents created by the
manufacturer for users
Maximum output Maximum radiation power or maximum radiation energy per pulse that a laser
product outputs in all directions where there is a hazard of exposure in view of
operational capacity in every area at any point of time after the production of
the laser product
Mode State of a resonant system in which an electromagnetic field has a specific
distribution
MPE Maximum permissible exposure Maximum laser radiation level that can be radiated onto human bodies without
harmful influence to them in an ordinary environment
Operation Laser products action covering all intended functions, not including mainte-
nance or service.
Optical resonator Device in which stimulated emission of light is used for a laser and which con-
sists of a pair of reflecting mirrors facing each other
Parameter Variable that is assigned a given value for a specific purpose and indicates
that purpose
Phase Amount representing a positional relationship between two adjacent highest
or lowest points on a wave
Power density Energy per unit area
Protective housing Laser product housing or its part designed to protect humans from exposure
to a laser beam exceeding an accessible emission level or strong collateral
radiation
Pulse duration Time interval between the points at which an instantaneous value on the lead-
ing and trailing edges is half the peak pulse amplitude
Pulse duty Ratio (%) of a duration in which a pulsating laser output is on, to its entire
cycle
Pulse frequency Repetition frequency at which pulsating laser beams are radiated from an os-
cillator
Pulse laser Laser that outputs energy in the form of a single pulse or a pulse train
Pulse output Laser output radiated in the form of a pulse train
Radian Measurement unit of angle; 1 radian equals 360/2p
Radiant energy Energy emitted, transmitted, or received (measured in joules, or J)
Safety interlock Device combined with the protective housing of a laser product to stop its op-
eration automatically when part of the housing is removed
Semiconductor laser Laser that uses a semiconductor as an exciting medium
APPENDIX B70114EN/04 E. GLOSSARY
176
Name Meaning
Sequence A succession of steps carried out in a prescribed order
Stimulated emission Emission of light stimulated by incident light and having the same frequency,
phase, and polarization state as the incident light
Target Jig used to radiate and position a laser beam
Threshold Physical quantity necessary to generate laser beams
Index
B70114EN/04
i1
A
Aging, 135
Aging method, 135
Applicable models, 3
B
Base of oscillator, 54
Beam divergence, 77
Beam guide, 77
C
Checking on faults, 141
Chiller, 66
Component details, 103
Condition, 45
Cooling water, 46
Cooling water flow rate, 67
Cooling water temperature, 66
D
Daily inspection, 120
Details of maintenance, 123
E
Electric connection, 78
EMC countermeasure, 93
Emergency stop button, 42
Environmental condition, 53
Environmental conditions, 45
Error code list, 171
Exhaust pump filter, 132
Exhaust pump oil, 131
Exhaust system filter, 133
External view, 159
F
FANUC laser C series specifications, 167
FANUC service network, 173
Fire, 19
For safe operation, 4
Functions, 94
G
Gas bottle, 75
Gas pipe, 75
Glossary, 174
Ground cable, 82
H
High temperature, 20
High voltage, 11
I
I/O signal cable, 82
Inapposite use of laser oscillator, 43
Internal structure, 95
K
Key control, 41
L
Laser beam, 6, 76
Laser gas, 45, 75
Laser gas tubing, 75
Laser processing machine system, 117
Leak check method, 135
Lifting laser oscillator, 48
M
Maintenance, 44, 119
Maintenance area, 56
Maintenance panels and oil gauge position, 123
Maintenance parts, 138
Maintenance tools, 139
Manual contents, 2
N
Notes on reading this manual, 4
O
Operation sequence, 115
Other signal cables to the IF PCB, 82
Overview, 1
INDEX
B70114EN/04
i2
P
Packing, 49
Periodic maintenance, 121
Plumbing, 67
Position and tolerance of laser beam exit, 76
Power cable (L1, L2, L3), 82
Power source, 45
R
Related manuals, 3
Responding to alarm messages on the screen, 142
S
Safety enclosure (at your work station), 19
Shutter lock, 41
Spare parts, 138
Storage, 53
T
Tolerance of beam direction, 77
Toxic fume, 19
Transportation, 48
Troubleshooting, 140
Turbo blower oil, 129
W
Warning Labels, 28
Warning light (optional), 42
Water connection, 66
X
XT20 terminal, 85
Revision Record
FANUC LASER C series OPERATORS MANUAL (B70114EN)
04 Jun., 2000 D Addition of C2000C, C3000D, C4000A and C6000B
03 Jul., 1996
D Addition of C3000C
D Correction of errors
02 Apr., 1995
D Addition of C2000B
D Correction of errors
01 Dec., 1994
Edition Date Contents Edition Date Contents
EUROPEAN HEADQUARTERS
GRAND-DUCH DE LUXEMBOURG
GE Fanuc Automation Europe S.A.
Zone Industrielle
L-6468 Echternach
( (+352) 727979 - 1
2 (+352) 727979 - 214
BELGIUM / NETHERLANDS
GE Fanuc Automation Europe S.A.
- Netherlands Branch -
Postbus 7230 - NL-4800 GE Breda
Minervum 1603A - NL-4817 ZL Breda
( (+31) 76-5783 201 (CNC)
( (+31) 76-5783 212 (PLC)
2 (+31) 76-5870 181
CZECH REPUBLIC
GE Fanuc Automation CR s.r.o.
U studanky 3
CZ-170 00 Praha 7
( (+420) 2 333 72 502 (CNC)
( (+420) 2 333 72 503 (PLC)
2 (+420) 2 333 70 821
FRANCE
GE Fanuc Automation France S.A.
39, rue du Saule Trapu, BP 219
F-91882 Massy Cedex
( (+33) 1 69 75 86 39 (CNC)
( (+33) 1 69 75 86 20 (PLC)
2 (+33) 1 69 75 86 49
GERMANY
GE Fanuc Automation GmbH
Bernhuser Strae 22
D-73765 Neuhausen a.d.F
( (+49) 7158 187 400
2 (+49) 7158 187 455 (CNC)
2 (+49) 7158 187 466 (PLC)
GERMANY
GE Fanuc Eberle Automation GmbH
Ernst-Weyden-Str. 7
D-51105 Kln (Cologne)
( (+49) 221-83904-53
2 (+49) 221-83904-55
GERMANY
Elberfelderstr. 45
D-40724 Hilden
( (+49) 2103 247410 (Laser/CNC)
2 (+49) 2103 247420 (Laser/CNC)
GERMANY
Obere Hauptstr. 72
D-09244 Lichtenau
( (+49) 37208 695 20(CNC)
( (+49) 37208 695 30 (PLC)
2 (+49) 37208 695 55
GERMANY
GE Fanuc Automation Deutschland GmbH
Bensheimer Str. 61
D-65428 Rsselsheim
( (+49) 6142 357600
2 (+49) 6142 357611
GERMANY
Sdwestpark 48
D-90449 Nrnberg
( (+49) 911 9672 100 (PLC)
2 (+49) 911 9672 200 (PLC)
GERMANY
Reichenbergerstr. 6
D-33605 Bielefeld
( (+49) 521 92445 0 (PLC)
2 (+49) 521 92445 30 (PLC)
SWEDEN
GE Fanuc Automation Nordic AB
Hammarbacken 4
S-19149 Sollentuna
( (+46) 8 444 5520
2 (+46) 8 444 5521
ITALY
GE Fanuc Automation Italia S.r.l.
Piazza Tirana 24/4B
I-20147 Milano
( (+39) 02 417 176 (CNC)
2 (+39) 02 419 669 (CNC)
ITALY
GE Power Controls Italia S.p.a
Via Tortona 27
I-20144 Milano
( (+39) 02 4242 280 (PLC)
2 (+39) 02 4242 511 (PLC)
SPAIN
GE Fanuc Automation Espaa S.A.
Polgono Industrial Olaso
Calle Olaso, 57 - Locales 10 y 11
E-20870 Elgoibar
( (+34) 943 74 82 90 (CNC)
2 (+34) 943 74 44 21 (CNC)
SPAIN
GE Power Controls Ibrica S.L.
Calle Marqus de Comillas, 1
E-08225 Terrassa (Barcelona)
( (+34) 93 736 58 28 (PLC)
2 (+34) 93 788 24 03 (PLC)
SWITZERLAND
GE Fanuc Automation
Filiale Suisse/Niederlassung Schweiz
Erlenstrasse 35a
CH-2555 Brgg b. Biel
( (+41) 32 366 63 63 (CNC)
( (+41) 32 366 63 33 (PLC)
2 (+41) 32 366 63 64 (CNC)
2 (+41) 32 366 63 34 (PLC)
UNITED KINGDOM
GE Fanuc Automation (UK) Ltd.
Unit 1 - Mill Square
Featherstone Road
Wolverton Mill South
Milton Keynes MK12 5BZ
( (+44) 1908 84 4000
2 (+44) 1908 84 4001
06/00
No part of this manual may be reproduced in any form.
All specifications and designs are subject to change without prior notice.
The export of this product is subject to the authorization of the government of the
country from where the product is exported.
In this manual we have tried as much as possible to describe all the various
matters.
However, we cannot describe all the matters which must not be done, or which
cannot be done, because there are so many possibilities.
Therefore, matters which are not especially described as possible in this manual
should be regarded as impossible.
TECHNICAL REPORT NO.TML 01/005E
Date. J UN. 11.2001
General Manager of
Laser Laboratory
Correction of the manual of FANUC LASER C series
1. Communicate this report to:

" Your information
" GE Fanuc-N, GE Fanuc-E
FANUC Robotics
CINCINNATI MILACRON
" Machine tool builder
Sales agency
End user
2. Summary for Sales Documents
3. Notice
In FANUC LASER C series Operator's manual B-70114EN/04, the interval of
Turbo Blower oil change(Item 12 of table) is corrected on page 121,122.
And, in FANUC LASER C series Maintenance manual B-70115EN/03,the
interval of Turbo blower oil change (Item 12 of table) is corrected on page
112,113.
4. Attached Document
Drawing
NO.
B-70114EN/04-01 (1/2 -2/2)
B-70115EN/03-01 (1/2 -2/2)
#$Registration of Order List data(In case of Order List)
Type of data Lotus 123/Win %Oasys % Excel
NO. LL-01/ 6008
Original section of issue
IDE LL
A.G.M
Manager Chief Person in
Charge
TITLE
DRAW.
No.
1 / 2
Page
FANUC LTD
DESCRIPTION DESIGN DATE
EDIT
B-70114EN/04-01
New registration T.SATO 01.06.11 01
1.Type of applied technical documents
Name FANUC LASER C series OPERATOR'S MANUAL
Spec. No. / Ver. B-70114EN/04
2.Summary of change
Group Name / Outline New, Add
Correct, Del
Applicable
Date
Basic
Function
Optional
Function
Unit
Maintenance
Parts
Notice
Correction 5.2 Periodic maintenance
Table 5.2 (a),(b) Periodic maintenance items and periods
Item 12 : Turbo blower oil change
True : 1000h or inferior turbo blower oil
False: 1500h or inferior turbo blower oil
Another
Corrections of the periodic maintenance
TITLE
DRAW.
No.
2 / 2
Page
FANUC LTD
EDIT
B-70114EN/04-01
In FANUC LASER C series OPERATORS MANUAL B-70114EN/04, interval of turbo
blower oil change is corrected on page 121,122.
Table 5.2(a) Periodic maintenance items and periods (Page 121)
C1500B
C2000B
C2000C
C3000C
C3000D
12 Turbo blower oil change
False : 1500h or inferior turbo blower oil
Table 5.2(b) Periodic maintenance items and periods (Page 122)
C4000A C6000B
TITLE
DRAW.
No.
1 / 2
Page
FANUC LTD
EDIT
B-70115EN/03-01
1.Type of applied technical documents
Name FANUC LASER C series MAINTENANCE MANUAL
Spec. No. / Ver. B-70115EN/03
2.Summary of change
Group Name / Outline New, Add
Correct, Del
Applicable
Date
Basic
Function
Optional
Function
Unit
Maintenance
Parts
Notice
Correction 5.2 Periodic maintenance
Table 5.2 (a),(b) Periodic maintenance items and periods
Item 12 : Turbo blower oil change
False: 1500h or inferior turbo blower oil
Another
Corrections of the periodic maintenance
TITLE
DRAW.
No.
2 / 2
Page
FANUC LTD
EDIT
B-70115EN/03-01
In FANUC LASER C series MAINTENANCE MANUAL B-70115EN/03, the interval of turbo
blower oil change is corrected on page 112,113.
Table 5.2(a) Periodic maintenance items and periods (Page 112)
C1500B
C2000B
C2000C
C3000C
C3000D
Table 5.2(b) Periodic maintenance items and periods (Page 113)
C4000A C6000B

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