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PROBLEM ENCOUNTERD POSSIBLE SOLUTION

No Plasma Check continuity of RF Tuner Cable


Check Tuner for possible broken parts
Set the machine to manual tuning and adjusted the Load
and Tune parameters

Discoloration

Re-apply grease
Adjust Speed of chamber door cylinder
Tighten pressure sensor
Cleaned the chamber thoroughly, removed the carbon
builds up in all surfaces.
Dismantled and re-assembled the tracks assembly.

Pressure Sensor Error

Check pressure sensor for leakage or not properly
installed
Relocate cables for possible leakage
Replaced with spare Tuner and fine tune for correct
power

Machine Hang Machine protrude - realign machine cover
Series of crumpled Leadframe Isolation of Jam detection failure
Corrected the miss matched wiring for PHS10E and PHSll
(-) negative line was interchanged.
Bent Lead Frame Re align magazine rack to the chamber
Manual alignment by teaching top and bottom offset

Leadframe Warp after Plasma Chamber Track and Magazine alignment
Change hole configuration
Cannot achieve required vacuum
pressure
Check for possible leakage, tighten all gas inlet.
Check chamber door o-ring, apply new grease.
Increase air pressure for door cylinder
Isolate pump to check where is the leak (leak on
chamber)
Replace vacuum pump if it already reached limit; more
than 11,000 hrs
Machine Computer Won't Boot
and cant enter operating system
Try checking for UPS failure
Power off the CPU, then turn it on and enter the
computer BIOS (press and hold F3 during startup)
Try if start up repair can solve the problem
Refreshing (Windows 8) needs CD-Drive
Use system restore reverting computers state to a
previous date












UEN GST REG NO. 200610018W
CERT NO. 9572
ISO 9001:2008
Project Title
Updated by
Revision
Date
NO SCI PART NUMBER DESCRIPTION QTY
1 D0000003 QUADRIO GRIPPER ASSEMBLY COMPLETE SET 5
2 D0000005 RF POWER CABLE BLACK 1
3 D0000017 Q5 SILICONE O-RING CORD 1
4 D0000021 RF CABLE WITH DOUBLE CONNECTORS (BROWN) 1
5 D0000033 TORLON SPACER ASSEMBLY 4
6 E0000034 SILICONE ORING 2-212 CS3.53 ID21.82 (OR-4087) 10
7 E0000064 NW16 O-RING+CENTERING RING (ALU) 10
8 E0000070 NW25 CLAMP (ALUMINUM) 10
9 E0000077 NW25 LONG FLANGE WELD STUB 3
10 E0000080 NW25 O-RING+CENTERING RING (ALU) 10
11 E0000089 NW40 BULKHEAD CLAMP (ALU) 1
12 E0000094 NW40 FLEXIBLE BELLOWS 100MM(SS) 2
13 E0000101 XDS35I O-RING REPLACEMENT KIT 1
14 E0000148 HIGH VACUUM GREASE 50MG 2
15 E0000239 SPRING FOR ANTI-JAM (SS-AS-001) 10
16 E0000253 SWAGELOK FERRULE SET 10
17 E0000278 TELEGARTNER 7/16 BULKHEAD JACK WITH FLANGE 1
18 E0000407 NW40 O-RING+CENTERING RING (ALU) 10
19 E0000423 HRC CARTRIDGE FUSE 6A (500VAC) 10
20 E0000424 HRC CARTRIDGE FUSE 10A (500VAC) 10
21 E0000429 NW16 HIGH VACUUM VALVE 2
22 E0000430 NW40 HIGH VACUUM VALVE 1
23 E0000542 TIMING BELT 7.5T5/330 [CUT TO WIDTH 7.5MM] 1
24 E0000543 TIMING BELT 20AT5/300 1
25 E0000893 NW16 CLAMP (ALUMINUM) 10
26 E0000894 NW40 CLAMP (ALUMINUM) 10
27 E0001171 GAS SPRING 250N 2
28 E0001254 Q5 ELECTRODE TEFLON SPACER 4
29 E0001353 STEEL-REINFORCED PVC HOSE ID25 X THK4 L500 2
30 E0001438-01 Q5-RIE ALU ELECTRODE PLATE 1
31 E0001633 Q4EX-RIE CERAMIC STANDOFF A 3
32 E0001641 Q4EX-RIE FIX CHAMBER TRACK II 5
33 E0001642 Q4EX-RIE CERAMIC STANDOFF B 4
34 E0001646-01 Q4EX-RIE ISOLATOR SIDE PLATE II 2
35 E0001733 Q5 RIE ISOLATOR SIDE PLATE W/SLOT II 2
36 E0001734-01 Q5-RIE EXHAUST PLATE II 1
37 E0001735 Q5-RIE TEFLON FEEDTHRU II 1
38 E0001736-01 Q5-RIE COPPER FEEDTHRU II 1
39 E0001744 Q5-RIE MOV CHAMBER TRACK II 5
40 E0001745 Q4EX-RIE ELECTRODE COVER PLATE II 10
20/5/2014
SCI Parts List -Consumable
QUADRIO 5-RIE PLASMA CLEANING SYSTEM
Q5-RIE
DANNY FOO
Q5-RIE-PL
SCI Automation Pte. Ltd.
18 Boon Lay Way #08-144, TradeHub 21, Singapore 609966
Telephone : (65) 6465-1886 Facsimile : (65) 6465-1887 Website : www.sciplasma.com UEN GST REG NO.
200610018W
CERT NO. 9572
ISO 9001:2008
Project Title
Updated by
Revision
Date
NO SCI PART NUMBER DESCRIPTION QTY
1 E0000185 DOOR SAFETY SENSOR AMPLIFIER 1
2 E0000189 OPTICAL FIBER UNIT FOR PHOTOELECTRIC SENSOR 5
3 E0000200 PROXIMITY SENSOR 1MM SENSING DISTANCE (NORMALLY CLOSE) 5
4 E0000244 GAS PRESSURE SWITCH (1-5V) 2
5 E0000245 HIGH VACUUM GAS VALVE 2
6 E0000283 Q5 TORLON SPACER 1
7 E0000403 XDS35I VACUUM DRY PUMP WITH POWER PLUG 13 AMP IEC320 1
8 E0000405 CLAMPING MODULES EV-20-4 6
9 E0000411 OMRON SAFETY SWITCH WITH LOCKING FUNCTION 1
10 E0000412 OMRON SAFETY SWITCH KEY (D4DS-K3) 4
11 E0000418 APC SMART-UPS SC 620VA 230V 1
12 E0000426 Q-LIGHT LED 3 LAYER TOWER LAMP 1
13 E0000447 SMC AN101-01 SILENCER 1
14 E0000448 SMC MANIFOLD SOLENOID VALVE BASE 1
15 E0000450 AIR MANUAL VALVE 1
16 E0000451 BALL VALVE 42G 2 WAY 6MM OD (SS) 2
17 E0000455 EMERGENCY SWITCH GUARD (YELLOW) 1
18 E0000588 PHOTOELECTRIC SENSOR 5
19 E0000658 FESTO STRAIGHT FITTING QSM-B-M3-4-20 6
20 E0000683 PUSHER ASSEMBLY COMPLETE SET 16MM 5
21 E0000720 PROFANTEC AC240V 6" FAN 2
22 E0000750 TUNER T1000 600W R2- SIDE CONNECTOR 1
23 E0000752 RF GENERATOR ELITE 600W 13.56MHZ 1
24 E0000792 SMC PRESSURE SWITCH 1
25 E0000892 BARATRON 1 TORR PRESSURE GAUGE 1
26 E0000899 TWIN ROD CYLINDER 2
27 E0000980 SOLENOID VALVE 1
28 E0001032 SMC REED SWITCH 3M A93L 8
29 E0001178 SINGLE POLE RELAY 24VDC 5
30 E0001179 DOUBLE POLE RELAY 24VDC 5
31 E0001180 4 IN 1 COMPACT RELAY 2
32 E0001311 OMRON GAP SENSOR EE_SX671A 6
33 E0001314 OMRON GAP SENSOR EE_SX672A 7
34 E0001329 DUAL DISPLAY DIGITAL FIBER OPTIC SENSORS 2
35 E0001498 HONEYWELL 1D/2D HANDHELD IMAGER SCANNER WITH STAND 1
36 E0001699 19" TOUCH SCREEN LCD MONITOR 1
37 E0001700 USB MINI KEYBOARD W/TRACKBALL 1
38 E0001715 MASS FLOW CONTROLLER N2, 200SCCM 2
39 E0001844 OMRON LIFT SERVO DRIVER WITH BRAKE 400W 1
40 E0001845 OMRON LIFT SERVO MOTOR 200VAC 400W 1
41 E0001846 OMRON PUSHER SERVO MOTOR 200VAC 200W 1
42 E0001847 OMRON PUSHER SERVO DRIVER 200W 1
43 E0001891 OMRON, S8VK-C12024 POWER SUPPLY, 24V, 5A, 120W 12024 1
44 E0001893 INDUSTRIAL FANLESS PC WITH WINDOWS OS EMBEDDED 1
20/5/2014
SCI Parts List -Level 1
QUADRIO 5-RIE PLASMA CLEANING SYSTEM
Q5-RIE
DANNY FOO
Q5-RIE-PL
SCI Automation Pte. Ltd.
18 Boon Lay Way #08-144, TradeHub 21, Singapore 609966
Telephone : (65) 6465-1886 Facsimile : (65) 6465-1887 Website : www.sciplasma.com