Beruflich Dokumente
Kultur Dokumente
Displacement Sensor
G E N E R A L C A T A L O G
LK-G Series
SEMICONDUCTOR/LCD
Detecting displacement of a wafer Thickness inconsistency of a silicon wafer Focus adjustment of LCD board inspection
machine
ELECTRONIC/ELECTRIC COMPONENTS
Measuring the warpage of a PCB Measuring the height of solder jet Measuring sheet thickness
OA/MEDIA
Focus adjustment of optical pickup Adjusting HDD arm assembly Measuring the vibration of a piezo actuator
3
AUTOMOTIVE/TRANSPORTATION
Measuring the runout of a disc rotor Measuring the height of liquid sealant Adjusting toe-in/camber angle
METAL
Detecting double-fed steel plates Height control of welding process Measuring the thickness/width of a steel plate
PLASTIC/RUBBER/FILM
Thickness measurement/loop control Measuring the thickness of a film Measuring the height of urethane foam
of a rubber sheet
4
Advanced technology for high performance
ABLE
ABLE intelligently controls LI-CCD
the three elements of
laser emission time, laser Demonstrates higher
power, and gain (CCD accuracy, speed, and
amplification factor). sensitivity.
*ABLE= Active Balanced
Laser control Engine
HIGH ACCURACY
LENS UNIT
The high-accuracy Ernostar
lenses integrated with the
sensor head achieves highly
accurate and highly stable
measurements.
8.3 ms
-10
-15
HIGH-ACCURACY OF ± 0.02 %
KEYENCE has redesigned the optical system in order to achieve 1.5
-1.0
-1.5 1000µm
-6 5000µm
-5
-10
-15
MULTIPLE
REFLECTIONS
The LK-G Series cancels
TRANSPARENT measurement error due to
diffused reflections from
OBJECT metal surfaces.
The LK-G Series detects the
TRANSLUCENT reflectance of each layer in a
transparent object and
OBJECT adjusts the light intensity to
the optimum level.
The LK-G Series eliminates
measurement error due to
diffused reflections inside
the object.
ABLE*
Sensing the surface conditions to control laser light intensity to the optimal level
Up to 90 times the adjustment range of conventional models
ABLE technology senses the surface of a target and adjusts the intensity of laser
Laser power Emission time Adjustment range
light to an optimal level. ABLE intelligently controls the three elements of laser
LK-G Series 8x 1662x(0.6 to 997µs) 13296x
emission time, laser power, and gain (CCD amplification factor), achieving a wide
adjustment range of light intensity that is up to 90 times wider than conventional Conventional model - 150x (3.2 to 480µs) 150x
models. In addition, speed is 120 times faster than conventional methods.
Real-time control at 120 times the speed of conventional models
*ABLE=Active Balanced Laser control Engine.
Sampling rate Adjustment speed
LK-G Series 20µs 0.06ms
Conventional model 512µs 7ms
The shift of laser emission time and laser power with a target
Light from
subduction
Light from
subduction
Translucent object
MULTI-ABLE CONTROL
Waveform obtained by optimizing
the 1st surface using ABLE
Waveform synthesized
by the multi-ABLE
function
Waveform obtained by
optimizing the 2nd
The 1st surface using ABLE
surface
Measuring the swell of liquid crystal glass Measuring the thickness of a glass plate
The reflected light at each layer is sensed to optimize the
intensity of laser light. Highly accurate thickness
measurements are enabled by synthesizing the waveform
of each layer.
Normal reflection
Light from
multiple reflections
Multiple reflections
9
Advanced components
provide superior measurements
FLEXIBLE CABLE
CCD LIGHT Can be attached to
movable parts.
RECEIVING ELEMENT
The wide CCD increases
measurement stability.
CYLINDRICAL LENS
Special lens widens
the beam spot.
65,000-point memory is integrated internally in order to store the 50 Five types of I/O including USB are available as standard. A wide
kHz ultra-high-speed sampling data. Sometimes it is necessary to range of needs are supported, from data gathering with a PC using
enhance the tact time in obtaining data from a target traveling at high USB to high-speed digital control with a PLC using binary outputs.
speed or to mount the unit to a device. In this case, high-speed High-speed output can be performed at 50 kHz. (Excluding the RS-
processing of all data items is enabled by temporarily storing the data 232C)
to the internal memory and retrieving the data during the period before
the next measurement.
Analog
PC recorder
Measuring the height of
Measuring the profile of a tire large liquid crystal glass
11
Simple setting and analysis on a PC
Setting support software LK-Navigator
LK-Navigator supports optimal setting of the LK-G and data gathering from a PC.
Settings can be made via USB.
U SB 2C
R S -2 3
Hardware environment
Item Hardware requirements
CPU Pentium III 400MHz or higher
Support OS Windows98/98SE/ME/XP
Memory capacity 64 MB
Resolution of display 800 x 600 pixels, 256 colors or more
PC with Free disk space 10 MB min.
LK-Navigator Interface RS-232C (Serial port) or
(USB Ver 1.1 or higher) should be featured.
Quick set-up
Menu
Quick set-up
8 programs
Quick set-up
detecting mode
TRANSLUCENT TARGET
Height measurement of
PCB resin
TRANSPARENT TARGET
Thickness measurement of
glass plate
Measurement
data and statistics
for both outputs
1 and 2
13
Selection guide
Sensor Heads
TYPE MODEL MEASURING RANGE REPEATABILITY SPOT DIAMETER
0.79Mil
Small spot LK-G10
0.39" 10mm 20µm
Super 0.0004Mil
Measuring range 0.39"±0.04" 10±1mm
Precision 0.01 µm
0.79x19.7Mil
Wide beam LK-G15
20x500 µm
1.18" 30mm
0.98" 25mm 1.38" 35mm 1.18Mil
Small spot LK-G32 30µm
High 0.002Mil
Measuring range 1.18"±0.2" 30±5mm 0.05 µm
Accuracy
1.18x33.15Mil
Wide beam LK-G37 30x850µm
3.15" 80mm
2.56" 65mm 3.74" 95mm 2.76Mil
Small spot LK-G82
70µm
Multi- 0.008Mil
Measuring range 3.15"±0.59" 80±15mm
Purpose 0.2 µm
2.76x43.3Mil
Wide beam LK-G87
70x1100µm
5.91" 150mm
Small spot LK-G152
4.33" 110mm 7.48" 190mm 4.72Mil
120µm
Measuring range 5.91"±1.57" 150±40mm 0.02Mil
Long
0.5 µm
Distance
Wide beam LK-G157 4.72x66.9Mil
120x1700µm
Controllers
TYPE OUTPUT
NPN PNP
14
System
All-in-one controller
RS-232C,
LK-G32 LK-G402 LK-G3001(P)V
LK-G37 LK-G407 Binary, and I/O
2 / 5 /10 /
30m PLC, etc
0.3 / 3 / 10m
LK-G82 LK-G502
LK-G87 LK-G507 Analog
Display panel
LK-GD500 Separate controller Data recorder
LK-G3001(P)
Specification
Controller
All-in-one model LK-G3001(P)V
Model
Separate model 1. LK-G3001(P)/ LK-GD500
Head compatibility All LK-G sensor heads are compatible
Display
15
Specification
Sensor head
Model LK-G10/G15 LK-G32/ G37
_ Diffused reflection Specular reflection
Mounting mode
Measuring range 1.
±0.04" ±1 mm ±0.2" ±5 mm ±0.18" ±4.5 mm
Sensor head
Model LK-G82/ G87 LK-G152/G157
Mounting mode Diffused reflection Specular reflection Diffused reflection Specular reflection
16
Specification
Model LK-G407/LK-G402 LK-G507/LK-G502
Mounting mode Diffused reflection Specular reflection Diffused reflection Specular reflection
Reference distance 15.75" 400 mm 15.67" 398 mm 19.69" 500 mm 19.59" 497.5 mm
1.
-9.84" to 19.69" -9.80" to 19.61"
Measuring range 3.94" ±100 mm 3.90" ±99 mm
-250 to +500 mm -249 to +498 mm
Light source Red semiconductor laser
Wavelength 650 nm (visible light), Class II (FDA)
Output 0.95 mW max.
Approx. 11.41 x 326.7 Mil Approx. 11.70 x 370.5 Mil
Spot diameter (at reference distance) 290 x 8300 µm (G407) 300 x 9500 µm (G507)
Approx. ø11.41 Mil ø290 µm (G402) Approx. ø11.7 Mil ø300 µm (G502)
±0.05% of F.S. (±9.75 Mil ±250 µm) 4.5.
-9.84" to +9.84" -250 mm to +250 mm
<high-accuracy range> ±0.02% of F.S. (±3.9 Mil ±100 µm)
Linearity 2. ±0.05% of F.S.(F.S.= ±3.94" ±100 mm) -9.84" to -1.97"-250 mm to -50 mm
<long range> ±0.1% of F.S. (±19.5 Mil ±500 µm)
-9.84" to -19.69"-250 mm to +500 mm
(F.S. = ±9.84"±250 mm)
Repeatability 3. 0.08 Mil 2 µm
Sampling frequency 20/50/100/200/500/1000 µs (Selectable from 6 levels)
Near the center of the measurement: Green lights
LED display Within the measurement area: Orange lights
Outside the measurement area: Orange flashing
Temperature characteristics 0.01% of F.S./ºC (F.S.= ±3.94" ±100 mm) 0.01% of F.S./ºC (F.S.= ±9.84" ±250 mm)
Protective construction IP67 (IEC60529)
Ambient light Incandescent lamp or fluorescent lamp: 5000 lux max.
Ambient temperature 0 to +50ºC (32 to 122˚F), No condensation
Relative humidity 35 to 85%, No condensation
Vibrations 10 to 55 Hz, multiple amplitude 0.06" 1.5 mm; two hours in each direction of X, Y, and Z
Material Aluminum die-cast
Weight (including the cable) Approx. 380 g
1.
The range is obtained by measuring KEYENCE's standard target (ceramic).
<LK-G407/LK-G402>
When the sampling rate is 20 µs, the range becomes -2.76" (-70 mm) (NEAR side) to -3.94" (-100 mm) (NEAR side) for diffuse reflection.
When the sampling rate is 20 µs, the range becomes -2.76" (-70 mm) (NEAR side) to -3.90" (-99 mm) (NEAR side) for specular reflection.
<LK-G507/LK-G502>
When the sampling rate is 20 µs, the range becomes -9.06" (-230 mm) (NEAR side) to -9.84" (-250 mm) (NEAR side) for diffuse reflection.
When the sampling rate is 20 µs, the range becomes -9.06" (-230 mm) (NEAR side) to -9.80" (-249 mm) (NEAR side) for specular reflection.
When the sampling rate is 50 µs, the range becomes -4.92" (-125 mm) (NEAR side) to -9.84" (-250 mm) (NEAR side) for diffuse reflection.
When the sampling rate is 50 µs, the range becomes -4.92" (-125 mm) (NEAR side) to -9.80" (-249 mm) (NEAR side) for specular reflection.
2.
The range is obtained by measuring KEYENCE's standard target (ceramic) with the Standard mode.
3.
The range is obtained by measuring KEYENCE's standard(SUS) with 4096 times of averaging at the reference distance.
4.
All are calculated at F.S. = ±9.84" (±250 mm ).
5.
"High accuracy range" and "long range" refer to the linearity when those ranges are used.
17
Dimensions
Unit: inch mm
ø0.50
LK-G15/G10 ø12.6 LK-G32/G37
12.6 0.50"
1.69"
43 Diffused reflection type 1.70" Specular reflection type
43
mounting mounting
19.69"
2.13" ø0.28 500
54 ø7 ø0.28" 19.69" 1.02" 2.80"
0.90" 26.3 1.04" 3.35" ø7 500 26 71
ø0.17" 22.8 ø0.18" 1.02"
2 x ø4.4 2 x ø4.5 0.98" 25 85 26 0.03" 0.87" 22.2
Mounting hole 0.8
Mounting hole
2.82" 2.02"
51.2 2.99" 2.64" 3.66"
71.7 76 67 93 2.96"
75.3
15 0.59"
75˚ 9 to 11 40˚
0.35" to 40˚
0.45" 0.16" 4 25 to 35 0.48"
1.06" 0.43"
27 11.5 0.98" to 12.3
0.53" 13.5 1.38"
13 0.51" 0.75" to 1.10" 0.91"
19 to 28 23
2.68" 2.62"
2.99" 2.64" 3.57" 3.00" 68 3.32"
76 67 2.57" 76.2 67.3 0.27" 84.3
90.6 6.8
65.4
9.3
4 0.37" 0.17" 4.2 0.43"
0.16" 7* 0.28" 8.2
25° 10.9*
25° 0.32" 0.71"
65 to 95 18
2.56" to 3.74 2.96" (2.41" to 3.51")
75.2(61.2 to 89.2) 17˚
4.33" to 7.48" 4.25" to 7.34"
17˚ 110 to 190 108.5 to 186.5
13.5 18
0.53" 0.71" *Measurement reference position
LK-G407/LK-G402/LK-G507/LK-G502
Data in ( ) applies to LK-G407/LK-G402 *Measurement reference position
4.38"
ø0.50" 111.3
ø12.6 1.69" 0.79" 0.27"
43
4.25" 0.04" 19.69" 20.1 6.8
0.03" 0.79" 108 1 ø0.28" 500
0.7 20 ø7
3.62"
2.98" 91.9
3.35" 2 x ø0.17" ø4.4 75.7
85 mounting hole
2.99"
76
1.30"*
0.24" (0.95")
0.76" 6 33.1*
0.18" 0.32" 19.2 (24.2) 10.2°
4.5 8.2 1.43"
10.2° 36.2 9.78" to 39.19"
(11.77" to 19.56")
9.84" to 39.37" 248.5 to 995.5
(11.81" to 19.69") (299 to 497)
250 to 1000
(300 to 500)
18
Dimensions
Unit: inch mm
LK-G3001(P)V LK-G3001(P)
2.44" 4.61" (2.56") (2.56") 3.74"
2.44"
62 117 (65) 62 (65) 95
DIN-rail
mounting position
2.60" 66.1
0.24" 0.24"
6 6
1.69" 43
1.69" 43
19
http://www.measurecentral.com
NEW
Web Site Dedicated to
Measurement Solutions!
❙ TECHNICAL INFORMATION
❙ APPLICATION FINDER
❙ PRODUCT FINDER
Details of operating principles, features, Search for actual application examples by Select the optimal product by specifying
and specifications for the latest products. industry or by measurement type. your application and material type.