SEMICONDUCTOR SUITETM

ADVANCING PRODUCT QUALITY FOR THE SEMICONDUCTOR INDUSTRY

CAMSTARS SEMICONDUCTOR SUITETM IS BUILT ON CAMSTARS ENTERPRISE

PLATFORM, THE LEADING PLATFORM FOR MANUFACTURING IN THE
SEMICONDUCTOR MARKET.
Semiconductor Suite is designed specifically for Semiconductor Manufacturing, offering the most out-of-the-box industry
functionality, the highest level of configurability, and complete interoperability with the business.
Semiconductor Suite is the essential solution to replace legacy and siloed Manufacturing Systems that havent
kept pace with demanding and ever-changing requirements of Semiconductor manufacturing. With Semiconductor
Suite, manufacturers are no longer hindered in their ability to innovate, adapt and succeed. Manufacturers choosing
Semiconductor Suite are up and running quickly, and are assured that their manufacturing software solution can grow
with their business.

CAMSTAR HAS BEEN A LEADER IN SEMICONDUCTOR MANUFACTURING FOR DECADES.

Semiconductor Suite is ready to support Wafer Fabrication,
as well as IC and discrete Assembly and Test operations outof-the-box. It is powerful enough to handle high transaction
volumes, and is flexible enough to meet each sites specific
needs. It easily integrates with enterprise business systems
and the shop floor, and is designed for rapid deployment
without extensive customization, expanding to meet the
needs of tomorrow.

Closes the Loop on Manufacturing Quality

Semiconductor Suite facilitates a self-auditing manufacturing
process to control production and collect detailed
manufacturing quality data in real time. Electronically
managed specifications and procedures remove human error,
and direct integration with equipment and tools allows for
maximum data acquisition. Automatic detection and control
of parametric data results combined with structured data and
reporting and analysis tools make it possible to solve problems
quickly and easily prevent recurrences. Visualization of key
manufacturing and quality performance indicators, root cause
analysis of issues, and controlled execution of changes all
facilitate continuous product and process improvement.

Dashboards provide instant intelligence

from test results to yields to statistical
quality control so you can improve
quality and productivity.

CA M S TA R S YS T E M S INC. / 1 3 0 2 4 BA L L A NT Y NE CO R PO R ATE P L AC E , SUITE 300, C H ARLOT TE , NC 28277 / P H. + 1.704.227.6600 / C A M STAR. C O M

ADVANCING PRODUCT QUALITY FOR THE SEMICONDUCTOR INDUSTRY

Handles Complex Processes and Environments

Semiconductor Suite enables work in process (WIP) tracking in complex workflows with hundreds of Fab operations,
frequent rework paths and parametric data collection. Supports complex routings in wafer test, die preparation, bumping,
back grind, assembly and final test. Multiple products on a wafer, multi-die parts, stacked die assembly, and final test
binning are all part of the solution, eliminating the need to modify the system.

ONE PLATFORM FOR SEMICONDUCTOR MANUFACTURING

Manufacturing Execution

COMPLETE
TRACEABILITY

WORK-IN-PROCESS
TRACKING

COMPREHENSIVE
WORKFLOW
MANAGEMENT

EQUIPMENT /
TOOL TRACKING
& MAINTENANCE
MANAGEMENT

Semiconductor Suite provides the complete history of all manufactured

lots, wafers and serialized units, spanning production in multiple plants.
Materials consumed, processes utilized, parametric data collected, splits
and combines, bins, shipments and receipts, as well as dates and times are
some of the details captured as part of the searchable, electronic audit trail.

Multi-level work-in-process (WIP) tracking provides unprecedented

visibility and control over production processes. Data can be collected
by lot, wafer, serial number, etc., as well as in combinations of these.
Operators are presented with the correct instructions for each product
and process. Movement and processing can be controlled by a myriad of
business logic functions such as time limits, future holds and test results.

Intuitive workflow modeling employs drag-and-drop tools, making it easy

to set up dynamic routings, add new steps, vary production requirements,
and make customer order changes all with revision control and an audit
trail. Preconfigured context rules for typical semiconductor processes
such as back grind, wafer sort, bumping, assembly, test, and end-of-line
operations accelerate setup and roll out.

Detailed resource tracking within Semiconductor Suite supports the

SEMI E10 and other state models and allows OEE KPI calculations to
determine bottlenecks and inefficiencies on the shop-floor. It also supports
tracking tools, tool life, tool usage and job models such as cleaning and
refurbishment. The flexibility of Semiconductor Suite supports processing
multiple lots within different chambers of equipment and auto-lines consisting
of connected equipment.
Integrated Equipment Maintenance Management supports proactive problem
resolution and optimal equipment scheduling for both primary and sub-tools.
It automatically tracks and schedules maintenance based on time or usage,
which can include enforcement of predefined job process flows. It also tracks
equipment and carrier states, and ensures that only qualified and calibrated
equipment is used for processing. Downtime registration provides grouped
reason codes and operator logging functionality.
2

ADVANCING PRODUCT QUALITY FOR THE SEMICONDUCTOR INDUSTRY

LABEL PRINTING

OPERATOR
CERTIFICATION
AND TRAINING

STATISTICAL
PROCESS CONTROL
(SPC)

FAST, EASY
OPERATOR
INTERACTION

CUSTOMIZATION
WITHOUT
PROGRAMMING

Label Printing automatically prints product labels from actual specification

and manufacturing data, ensuring that labels are accurate, are produced in a
timely manner, and are attached to the proper lot, wafer or unit.

Establishes manufacturing roles, defines training for the various roles,

defines process certification requirements, maintains training records, and
establishes certification expiration. Automatic certification verification ensures
that only qualified employees perform prescribed shop-floor functions

SPC provides a host of industry-standard statistical analysis tools,

including x-bar, r-range, pareto, and trend charts, to recognize patterns
before they lead to poor quality. It responds to rule violations with
automatic events like e-mail notification, machine status change, and
placing material on hold.

Gives Operations and Quality personnel simple forms from which to view
instructions and record data and events. Browser-based user interfaces can
be configured to effectively guide and respond to the way people work. In
addition, any data can be collected directly from production systems and
equipment, ensuring maximum speed.

Configurable business logic, rather than hard-coded logic, allows

Semiconductor Suite to be tailored to meet unique factory requirements
without changing program code. Server-side logic makes it easy to integrate
the application with existing systems, make new functionality available
without disrupting operations, and supports 100% thin-client workstations.

Intuitive user interfaces provide users with a

single source for Semiconductor processing,
operator interaction and visibility. In this
case, the operator is required to complete
parametric data collection from equipment
or manually before continuing.

ADVANCING PRODUCT QUALITY FOR THE SEMICONDUCTOR INDUSTRY

Quality Management

NONCONFORMANCE
MANAGEMENT

EVENT MANAGEMENT

Automatically recognizes and reacts to exceptions or failures with parametric

data specification limits, percent defect allowances and yield limits, material
issues, binning and re-test requirements. It enforces structured failure
analysis, root cause identification, quarantine and final disposition (release,
rework, scrap, etc.); and prevents product from shipment or processing
beyond a prescribed step until all issues are resolved.

Enables organizations to streamline recording and managing of all types

of quality events related to nonconforming products, test results, process
monitoring, supplier parts, audits, equipment maintenance, returns, recalls,
training, environmental conditions and more. It enforces proper event
documentation enabling comprehensive triage and investigation, corrective
actions, and complete risk assessments.

Enterprise Interoperability

ENTERPRISE
BUSINESS PROCESS
INTEROPERABILITY

CELL CONTROLLER

Semiconductor Suite creates an enterprise manufacturing and quality hub

that aggregates real-time production and quality data for collaboration within
the business and with suppliers and customers. It interacts easily with ERP,
APS, QMS, DWH and PLM applications for synchronizing products and
bills of materials, downloading orders and providing timely and accurate
work-in-process information for improving designs, quality, inventory,
processes, planning and financial analysis. Camstar delivers best practices
interoperability with leading ERP systems such as SAP, Oracle and
Microsoft Dynamics.

Camstar Cell Controller integrates multiple pieces of equipment within

the factory infrastructure into the MES providing fully automated control,
status monitoring, material tracking and data collection. The bi-directional
communication allows the MES verify that correct lots, products, tools,
recipes and parameters are being used. Camstar Cell Controller supports
multiple protocols including as SECS/GEM, XML, SEMI PV2, OPC, SQL
and several others - enabling rapid, reliable and cost effective integration.

ADVANCING PRODUCT QUALITY FOR THE SEMICONDUCTOR INDUSTRY

Manufacturing Business Intelligence

A wide range of monitoring, reporting, analytical, and notification capabilities enable better and faster business decisions
based on real-time, relevant manufacturing and quality data across multiple manufacturing sites. Camstar Intelligence
provides state-of-the-art dashboard visualization of key manufacturing performance indicators with drill-down, as well
as the ability to close the loop on identified problems by managing root cause analysis and enforcing changes that
prevent issue recurrence.

Semiconductor Suite provides instant visibility of production and quality

conditions out of the box. Details of every lot, wafer and unit produced include
processes and equipment used; operators; parametric data and test results;
splits, combines and bins; materials consumed; nonconformances; and dates
and times aid in root cause analysis and continuous improvement.

OUTSTANDING CUSTOMER RESULTS

$
Saved $2.6M - $3.3M

Reduced system roll out costs

Supply chain visibility

in system operational costs over

three years

for subsequent sites by 75%

at levels previously unattainable

With Semiconductor Suite, Manufacturers Can:

 apidly implement a manufacturing
R
execution and quality system for
maximum ROI
Increase process yields by building
quality in to their processes

Q
 uickly adapt to changing
processes and product designs

S
 tandardize on a single solution for
Front End and Back End plants

E
 asily maintain change
management integrity

E
 liminate the cost and risk of aging
systems

E
 asily integrate with business
systems and shop floor equipment

ADVANCING PRODUCT QUALITY FOR THE SEMICONDUCTOR INDUSTRY

COMPLETE PLATFORM FOR SEMICONDUCTOR MANUFACTURERS

Rich, industry-specific, out-of-the-box functionality for enterprise manufacturers; reliable, high performance; simple configuration
to match the way manufacturing and quality personnel work; and ease of integration are reasons Semiconductor Suite is
successfully deployed in so many Fab, Assembly and Test plants throughout the world.
Camstars Semiconductor Suite unifies collaborative design, planning, sourcing, manufacturing and customer experience
creating an enterprise Product Quality solution to accelerate continuous improvement innovation.

CAMSTAR ENTERPRISE PLATFORM

Lowest Cost of Ownership

ABOUT CAMSTAR
Camstar provides the worlds easiest to use and
most robust manufacturing execution systems
(MES), enabling global networks of manufacturers,
brand owners and suppliers to produce the highest
quality products, quickly and efficiently. For nearly
30 years, Camstar has served hundreds of satisfied
customers worldwide.
For more information, please visit www.camstar.com.

CO P Y R I G HT 2 0 1 3 C A MSTA R , I N C. A L L R I GHTS R ESERV ED. 130626

Semiconductor Suite is powered by Camstars

Enterprise Platform for Advancing Product Quality. It
provides a rich set of out-of-the-box functionality that
is ready to use while also providing you the flexibility
to configure the system to meet your needs. It
leverages leading edge technologies available in the
marketplace today - a service-oriented architecture, a
flexible data model and a configurable user interface
that dramatically decrease the time and effort
necessary to deploy the solution as well as simplifying
maintenance and upgrade.