Advanced Manufacture ICAM 2010 SEM Taipei Conference Program

Conference Program
ICAM 2010
3rd International Conference on Advanced Manufacture
Organized by
Society of Manufacturing Engineering, Taipei Chapter
National Tsing Hua University,
Feburary 2-5, 2010

Howard Beach Resort, Kenting, Taiwan
http://www.icam2010.org
ICAM2010, KenTing, Taiwan

Feb.25,2010
INDEX
1. Foreword--------------------------------------------------------------------------------------- 1
2. Conference Committee----------------------------------------------------------------------- 2
3. Plenary Session ------------------------------------------------------------------------------- 5
4. Invited Session ------------------------------------------------------------------------------ 8
5. Guidelines----------------------------------------------------------------------------------- 12
6. Map of Conference Venue and Hotels--------------------------------------------------- 14
7. ICAM2010 Program Timetable ---------------------------------------------------------- 15
8. ICAM2010 Technical Program ----------------------------------------------------------- 16
9. Extended Abstract---------------------------------------------------------------------- 28

Feb.25,2010
FOREWORD
The Society of Manufacturing Engineers, founded in 1932, is one of the largest
professional societies for education, research and development of industrial
manufacturing. The Taipei Chapter (No.242) established in 1972, has been instrumental
in sponsorship of numerous activities for promotion of manufacturing technologies both
in Taiwan and the international arena. Thus, the 2005 and 2007 SME International
Conference on Advanced Manufacture was successfully held in Taipei and Tainan.
The booming economic development in Asia, particularly the leading manufacturing
industries such as semiconductors, liquid crystal display, computer, cellar phones,
commercial electronics and micro/nano areas have been attracting intense attention
among universities and research development-based institutions as well as many
industrial corporations.
The knowledge-based industries have been enjoying immense
growth potentials; thus, there is an urgent need of a strong focus for exchange of various
scientific, technical and management aspects across the wide spectrum of the society.
We are happy to host the 2010 International Conference on Advanced Manufacture.
ICAM 2010 will include plenary speeches and technical sessions. The topics will cover a
wide range of manufacturing and instrumentation technologies.
The conference is also financially supported by the National Science Council and
Ministry of Education. The strong backup from these organizations provides an important
assurance for the success of ICAM 2010.
Welcome to ICAM 2010!
Best regards,
Professor Shih-Chieh Lin, D. I. Shaw

General Chairman of the Conference Committee
ICAM 2010

Feb.25,2010
CONFERENCE COMMITTEE
Honorary Chairman
Young-Yao Pai, SME, Taipei Chapter
Wen-Tsuen Chen, Nat. Tsing Hua U.
International Scientific Committee
Hong Hocheng, Nat. Tsing Hua U. (Taiwan)
M. Andritschky, U. of Minho (Portugal)
Richard E. DeVor, UIUC (US)
Dimitri Dimitrov, Stellenbosch U. (South Africa)
Han Ding, UM-SJTU Institute (China)
Leszek A. Dobrzaski, Silesian U. of Tech. (Poland)
Tadeusz Gryba, U. de Valenciennes (France)
J.S. Gunasekera, Ohio U. (US)
M.S.J. Hashmi, Dublin City U. (Ireland)
Yong-Taek Im, KAIST (Korea)
Shiv Gopal Kapoor, UIUC (US)
Fritz Klocke, RWTH Aachen (Germany)
Shi-Wei Lee, HKTSU (HK)
Steven Liang, Georgia Tech (US)
Grier Lin, U. of S. Australia (Australia)
Jonathan Maxwell, Cooke Optics (UK)
John Melngailis, U. of Maryland, (US)
Shahjahan Mridha, Intl. Islamic U. (Malaysia)
Datong Qin, ChongQing U. (China)
Steve Shen, U. of Washington (US)
Daizhong Su, Nottingham Trent U. (UK)
Osamu Tabata, U. of Tokyo (Japan)
J.M. Torralba, U. Carlos III de Madrid (Spain)
Adrian Travis, Cambridge U. (UK)
Francesco Veniali, U. of Roma La Sapienza (Italy)
Wifi, Cairo U. (Egypt)

Feb.25,2010
Organizing Committee
General Chair
Shih-Chieh Lin, Nat. Tsing Hua U.
D. Shaw, Nat. Tsing Hua U.
Program Chair
Pei-Lum Tso, Nat. Tsing Hua U.
Award Commitee Chair
Kuang-Chao Fan, Nat. Taiwan U.
Sen-Yung Lee, Nat. Cheng Kung U.
Members:
Shih-Chieh Lin, Nat. Tsing Hua U.
Jerry Fuh, Nat. U. of Singapore
Woei-Shyan Lee, Nat. Cheng Kung U.
Hong T. Young, Nat. Taiwan U.
Liang-Chia Chen, Nat. Taipei U. of Tech.
Yung-Kang Shen, Taipei Medical U.
Invited Session Chair
Zone-Ching Lin, Nat. Taiwan U. of Sci. & Tech.
You Min Huang, Nat. Taiwan U. of Sci. & Tech.
Finance Chair
Cheng-Kuo Sung, Nat. Tsing Hua U.
Local Arrangement Chair
Gow-Yi Tzou, Kao Yuan University
Publication Chair
Dongliang Daniel Sheu, Nat. Tsing Hua U.
Wen Yuh Jywe, Nat. Formosa U.
Publicity Chair
Shing Yuan Tsai, Industrial Tech. Res. Inst.
Chia-Cheng Chao, Chun-Shan Inst. Sci. & Tech.
Poster Session Chair
Hung Yin Tsai, Nat. Tsing Hua U.

Feb.25,2010
Webmaster
Wei-Li Wu, Nat. Tsing Hua University
Conference Office and Local Organizing Committee
Ching-Ju Huang
Show-Er Lee
Jun-Yu Cai
Chih-Hsiang,Chan
Sen-Hsiung Chan
Yu-Lin Chang
Wei-Lun Chen
Jiun-Ching Chen
Su-Ting Cheng
Shy-Pin Cuo
Chung-Ju Hsieh
Tzu-Shin Hsieh
Chih-Jen Huang
Chun-Wei Lai
Wei-Ting Lai
Jung-Huang Liao
Chun-Chia,Liu
Chun-Wei Liu
Fan-Yi Liu
Wei-Li Wu
Juei-Yuan Wu
Chia-Ling Yang
Engineering Design Laboratory
Manufacturing and Production System Laboratory
Department of Power Mechanical Engineering,
National Tsing Hua University
101 Sec. 2 Kuan-Fu Rd. Hsin-Chu Taiwan 300
Tel: +886-3-571-9034
Fax: +886-3-572-2840
Email:icam2010@pme.nthu.edu.tw
Website: www.icam2010.org

Feb.25,2010
PLENARY SESSION I
Plenary Speech 1
Topics:
Design and Analysis of Control for Production Systems and
Networks with Many Highly Autonomous Entities
Neil A. Duffie
Professor
Department of Mechanical Engineering
University of Wisconsin-Madison, US
E-mail: duffie@engr.wisc.edu
http://www.engr.wisc.edu/me/faculty/duffie_neil.html
Biography
Neil A. Duffie received his PhD in Mechanical Engineering in 1980, his M.S. in
Engineering in 1976 from, University of Wisconsin-Madison, Madison, Wisconsin, USA
and his B.S. in Computer Science in 1974, all from the University of Wisconsin-Madison,
Madison, Wisconsin, USA.
He is Professor of Mechanical Engineering at the University of Wisconsin-Madison
and past Chair of its Department of Mechanical Engineering. His research interests are in
the area of manufacturing system control including automation and robotics, process
modeling and control, modeling of distributed system dynamics and control, and
autonomous logistic processes.
Professor Duffie is a Fellow of ASME, CIRP and SME. He is Chair of the Scientific
and Technical Committee for Production Systems and Organizations of the CIRP
(International Academy for Production Engineering), and is Past President (2008) of SME.
In 2008 he was a Mercator Guest Professor at the University of Bremen, Germany.

Feb.25,2010
PLENARY SESSION II
Plenary Speech 2
Topics:
Recent Advances in Micro-Groove Machining
Processes
Shiv Gopal Kapoor
Grace Wicall Gauthier Chair Professor
Department of Mechanical Science and Engineering
University of Illinois at Urbana-Champaign, US
E-mail: sgkapoor@illinois.edu
http://mechse.illinois.edu/content/directory/faculty/profile.php?user_id=36
Biography
Dr. Shiv G. Kapoor is Grayce Wicall Gauthier Chair Professor in the Department of
Mechanical Science and Engineering at the University of Illinois, Urbana-Champaign. He
has been a significant contributor to the field of manufacturing engineering research and
educations and a pioneer in the field of mathematical modeling and simulation of
machining processes both at micro and macro-scale. He has published more than 200
technical articles in technical Journals including ASME Journal of Manufacturing
Science and Engineering, Transactions of the North American Manufacturing Research
Institution, International Journal of Machine Tool and Manufacture , International Journal
of Wear, Journal of Corrosion Science, etc.
A Fellow of both the American Society of Mechanical Engineers (ASME) and the
Society of Manufacturing Engineers (SME), Prof. Kapoor has received ASME Blackall
Machine Tool and Gage Award unprecedented three times for outstanding research paper,
in 1992, 1997, and 2008. He was given the ASME William T. Ennor Manufacturing
Technology Award in 2003 and one of the SME most coveted Education Award in 2005.
He has served as a technical editor for the ASME Journal of Manufacturing Science and
Engineering from 1991-2001. Currently, he serves as an editor-in-chief for SME Journal
of Manufacturing Processes.

Feb.25,2010
PLENARY SESSION III

Plenary Speech 3
Topics:
Challenges and Opportunities in Surface Engineering,
A glimpse into the future
Dr. T. S. Sudarshan
President and CEO
Materials Modification inc
E-mail: sudarshan@matmod.com
http:// www.matmod.com
Biography
Dr Sudarshan received his PhD from Virginia Tech and since 1987 has served as a
Co-Founder, President and Chief Executive Officer for Materials Modification Inc. His
primary specialties are in the field of surface engineering and powder metallurgy
(especially nanotechnology) for which he is recognized across the world.
Dr Sudarshan has published over 150 refereed journal papers and edited 25 books on
"Surface Modification Technologies", one book on "Rapid Solidification Technology"
and one on Intermetallic and Ceramic Coatings. He is also the coeditor of Materials
and Manufacturing Processes for 23 years and Editor of Surface Engineering for 13
years.
He was the Founding member of the Surface Modification and Coatings
Technology committee in TMS, served as co-chair and chair of the Surface
Engineering committee of ASM International for 6 years, has served and continues to
serve on numerous committees for ASM International. In addition he has served on
numerous peer review panels for NSF, NIH, DoD and DoE. He also has served on the
Blue Ribbon Panel for Sputtering of Gun Tubes at Watervliet Arsenal.
Dr Sudarshan is the winner of two R and D 100 awards and is a Fellow of ASM
International and a Fellow of IFHTSE and has received the Outstanding Manufacturing
Engineer award from SME.

Feb.25,2010
INVITED SESSION I
Invited Speech 1
Topics:
Modeling and Optimization of High-Performance Machining
Steven Y. Liang, Ph.D.
Vice President and Chief Technical Officer
Walsin Lihwa Corporation
E-mail: steven_liang@walsin.com
http://www.me.gatech.edu/faculty/liang.shtml
Biography
Steven Y. Liang received his B.S. from National Cheng Kung University in 1980 and
Ph.D. from the University of California at Berkeley in 1987. He served as Morris M.
Bryan, Jr. Professor for Advanced Manufacturing Systems, founding Director of Precision
Machining Research Consortium, Director of Manufacturing Education Program, and
Associate Director of Manufacturing Research Center at Georgia Institute of Technology,
USA. Currently Dr. Liang has been Vice President and Chief Technical Officer of
Walsin Lihwa Corp, a Taiwan-based multi-hundred-billion manufacturing conglomerate.
Dr. Liang's technical interests lie in the areas of precision engineering, extreme
manufacturing, and technology innovation. He has supervised over 70 Post-Doctoral
studies, Ph.D. dissertations, and M.S. theses and has authored in excess of 300 book
chapters, archival journal papers, and professional conference articles in these areas. He
has been invited to deliver more than 60 keynote speeches and seminars at manufacturing
industries, peer institutions, and professional conferences in over 20 countries on various
topics related to manufacturing science and technology. Dr. Liang served as President of
the North American Manufacturing Research Institution, Society of Manufacturing
Engineers (NAMRI/SME) and Chair of the Manufacturing Engineering Division of The
American Society of Mechanical Engineers (MED/ASME). Dr. Liang is the recipient of
many prestigious awards including the Robert B. Douglas Outstanding Young
Manufacturing Engineer Award of SME, Ralph R. Teetor Education Award of the Society
of Automotive Engineers, and Blackall Machine Tool and Gage Award of ASME.

Feb.25,2010
INVITED SESSION I
Invited Speech 2
Topics:
Growing Behind
Mr. Bert Huang
General Manager
Victor Taichung Machinery Co.
E-Mail: mh@mail.or.com.tw
http://www.or.com.tw
Biography
Mr. Bert Huang is the General Manager of Victor Taichung, the largest equipment
supplier of machine tool, plastic injection machine, and environmental machine across
great China area. Victor Taichung was founded by Huangs father in 1954. When Bert
Huang was given the charter to grow the company, Mr. Huang was driving the
management team to the continuous R&D activities. To date more than 65% of the
products are in-house manufacturing, which demonstrates the companys technical
capabilities as well as quality assurances. The company has established worldwide
operations with customer services in USA, UK, Germany, Frances, China, Thailand,
Malaysia, and South Africa. As the company is embarking for technology advancement,
Victor Taichung was the first company being certified by Germans TUV ISO 9001 in
1993. In the following year the company was recognized National Quality Trophy in
Taiwan.
In 1997 the company was again certified by TUV ISO 14001 quality system.
These are evidences that the company seeks for world class performances.
In addition to dedicating to the companys growth, Mr. Huang also shares his knowledge
and experience in taking the convener role to Taiwans Tooling Machine Trade Union and
also the president of R.O.C.s Precision Machining Industry Development Council in
1997 and 1998 respectively. Mr. Huang is still one of the committee members for
MOEAs (Ministry of Economic Affairs) Technology Review Board and consultant to
ITRIs (Industrial Technology Research Institute) Mechanical and System Research Lab
since 1997 to date.

Feb.25,2010
INVITED SESSION II
Invited Speech 3
Topics:
Trend of AOI Technology and its Applications to Taiwans
Emerging Industries
Tzeng-Yow Lin
Deputy General Director
Center for Measurement Standards (CMS)
Industrial Technology Research Institute
Taiwan, ROC
E-mail: Tzeng-Yow.Lin@itri.org.tw
http://www.nml.org.tw/ for National Measurement Laboratory;
http://www.cms.itri.org.tw/ for Center for Measurement Standards, ITRI
Biography
Dr Lin is Deputy General Director of Center for Measurement Standards, metrology
group of Industrial Technology Research Institute. He has devoted himself to precision
engineering for more than 25 years, with special interests in dimensional metrology and
surface topography. Presently, Lin is leading a team in establishing a national
infrastructure of industrial standards, linking Taiwan with global standards organizations
(such as ISO, IEC, CIE). The infrastructure will enhance Taiwans competitiveness of
manufacturing power through strategical supremacy of standardization.
Lin graduated from the University of Birmingham (UK) in 1993, with a doctoral
degree in manufacturing. He was the winner of Best Paper Award of 2002 NCSL
International.
10

Feb.25,2010
INVITED SESSION II
Invited Speech 4
Topics:
Manufacture of Plastics Lenses for the Next Generation
Commercial and Industrial Applications
Pei-Jen Wang
Professor
Department of Power Mechanical Engineering
National Tsing Hua University, Taiwan, R.O.C.
E-mail: pjwang@pme.nthu.edu.tw
http://maps.pme.nthu.edu.tw/chinese/PJWang.htm
Biography
P. J. Wang received his Ph. D. degree in Mechanical Engineering at Cornell
University in 1990, his M.S. and B. S. degree in Mechanical Engineering at National
Tsing Hua University in 1983 and 1981, respectively.
He is a professor at the Department of Power Mechanical Engineering in National
Tsing Hua University. His research interests are mainly in the area of intelligent
manufacture systems, process control and analysis and design of electromechanical
systems. In addition to academic interests, his industrial collaboration experiences with
local machinery companies are gaining significant momentum toward practical
problem-solving career.
Prof. Wang has been a platinum member of Society of Plastics Engineers since 1991.
He is currently a member of both ASME and CSME. He has also served as the regional
editor of International Journal of Automation Technology since 2007.
11

Feb.25,2010
GUIDELINES
1. Official Language
The official language of ICAM 2010 is English.
should be delivered in English.
All presentations including Q&A
2. Guideline for Participants

2.1 Conference Venue
Howard Beach Resort
http://kenting.howard-hotels.com/
2.2 Registration
Time of Registration:
Feb. 2, 2010 15:20 to 18:30PM (Lobby)
Feb. 3, 2010 08:30 to 17:00PM (M102)
Feb. 4, 2010 08:30 to 17:00PM (M102)
2.3 Internet Service and International Telephone
Computers with Internet Service at Lobby are provided by the Howard Beach Resort.
And wireless is also free to use around the Howard Beach Resort.
2.4 Conference Kit
Conference kit, which contains final program, conference proceedings (in USB), name
badge, tickets for social program and lunches, official receipt, will be provided to
participants during check in at the Registration/Information Desk.
3. Guideline for Presenters
1) The presenters and session chairs are asked to keep to the paper sequence as shown
in the Final Program. By following this predefined schedule, participants can
switch between sessions without missing the particular papers of interest.
2) The presentation time for each presenter is fifteen minutes. The session chair(s)
should allow the presenter for a twelve (12)-minute presentation and leave three (3)
minutes for discussions. All presenters are requested to report their attendance to
the session chair ten (10) minutes before the session begins. If there are only 4-5
presenter in the session, thenthe session chair(s) should allow the presenter for a
fifteen (15)-minute presentation and leave three (3) minutes for discussions.
3) Notebook PCs and LCD projectors will be available in every session room.
Presenters are urged to prepare their files in MS PowerPoint format on a USB and
copy into the PC at session room before the session begins. Our session aids will
assist the presenters to copy the file. If you wish to use your own notebook PC,
please open the file before your presentation time.
4) For unexpected events that cannot be handled on the spot, you may request through
session chairs, session aids or make a direct notification to the Conference
Secretary Desk.
12

Feb.25,2010
13

Feb.25,2010
ICAM 2010 Timetable

Feb. 2, 2010
15:20-18:30
Registration
18:30-20:30
Reception
(2F Lobby)
(2F Seven Scholars Lounge)
Feb.3, 2010
08:40-09:10
09:10-10:00
10:00-10:20
10:20-12:00
12:00-13:20
13:20-15:00
15:00-15:20
15:20-17:00
Opening Ceremony
Plenary Speech I
Coffee Break
Session 1
Lunch Break
Session 2
Coffee Break
Invited Speech
Feb.4, 2010
08:40-10:00
10:00-10:20
10:20-12:00
12:00-13:20
13:20-15:00
15:00-15:20
15:20-17:00
17:30-20:00
Session 3
(1F M102-M106)
Coffee Break
Session 4
(1F M102-M106)
Lunch Break
Plenary Speech II, III (1F M103)
Coffee Break
Session 5
(1F M102-M106)
Banquet
(1FChamps Elysees)
Feb. 5, 2010
8:30
Free Tour to Kao-Shiang
(1F M103)
(1F M103)
(1F M102-M105)
(1F M102-M105)
(1F M103&M105)
14

Feb.25,2010
Session Table
Schedule
Program
2/3
Plenary Speech I
09:10-10:00
2/3
1A E-Manufacture and Reliability
10:20-12:00
1B Micro and Nano Fabrication (1)
1C Emerging Energy/Opto-electronic Manufacturing Technology
1D Advance Manufacturing Technology (1)
2/3
2A Robotics, Control and Automation
13:20-15:00
2C Technologies for Optical and Photoelectric Devices/Systems (1)
2/3
Invited Speech I, II, III, IV
15:20-17:00
2/4
3A Metrology (1)
08:20-10:00
3C Technologies for Optical and Photoelectric Devices/Systems (2)
3E Advances in Forming
2/4
4A Metrology (2)
10:20-12:00
4C CAD/CAE/CAM
4E Abrasive Machining
2/4
Plenary Speech II, III
13:20-15:00
2/4
5A Metrology (3)
15:20-17:00
5B Semiconductor Manufacturing Technology
5C Rapid Prototyping
5D Advance Manufacturing Technology in Korea
5E Finishing, Lapping and Polishing
15

Feb.25,2010
Session 1A E-Manufacture and Reliability

Session Chair: A.J.C. Trappey Co Chair: G. Galante Room M102
2/3 10:20-12:00
Paper
Title/
No.
authors
Toward Service-Oriented Architecture: Development and Implementation of
003
the Interface for Interoperability among Heterogeneous Systems
W. Tann, C.H. Ku, M.H. Hung, F.T. Cheng
The Analysis of Logistics Model and Its Service Preferences of
188
Manufacturing Industry in Special Economic and Trade Zones
W.W.Z. Lin, L.W. Ting, Y.S. Zhang, A.J.C. Trappey, W.T. Lee
Optimal Selection of Maintenance Actions on a Multi-Component System
160
A. Certa, G. Galante, M. L. Fata, G. Passannanti
Selection of Series System Components to Maximize Reliability
161
G. Galante, M. L. Fata, G. Passannanti
Calibration Methods for Nanometer Scale Measuring Instruments
236
W.H. Huang, Y.H. Chen, J.W. Li, D. Niu
Session 1B Micro and Nano Fabrication (1)
Session Chair: C.C. Hong
Co Chair: M.J. Lin
Room M103
2/3 10:20-12:00
Paper
Title/
No.
authors
Low-Temperature Carbon Nanotube Films Fabrication Technology
190
S.C. Su, C.C. Hong
Deformations Analysis of Sputtering Micromachining Double Layer
166
Cantilever Beams
M.J. Lin, C.L. Hwan, C.C. Lo, J.W. Chen
Analysis Micropattern Fabrication by Ultrasonic Micro Embossing
221
H.C. Cheng, J.L. Lee, C.F. Huang, Y. Lin, Y.K. Shen, C.W. Wu, M.J. Chern
Application of Taguchi Method in the Optimization of Fabrication
165
Parameters for Heating-Assisted Ultrasonic Nanoimprint Lithography
C.H. Lin, C.Y. Wang, R.S. Chen
Fabrication Multi-Channel V-Grooved Structures on BK-7 Glass Substrate
138
Using Hot Embossing Process
Y. M. Hung, L. K. Chen, M. C. Cheng, C. K. Sung
16

Feb.25,2010
Session 1C Emerging Energy/Opto-electronic Manufacturing Technology (Invited)

Session Chair:C.C Chao
Co Chair:C. H. Yau
Room M104
2/3 10:20-12:00
Paper
Title/
No.
authors
Manufacturing of Composite Wind Turbine Blades
231
K.W. Wu, T.C. Ko, P.S. Wu
The Precise Alignment System of Vacuum Assembly in TFT-LCD Cell
228
Process
Z.Y. Chen, M.S. Tsai, W.C. Pan, J.S. Lai, C. H. Yau,
CIGS Solar CellPreparation of Cadmium Sulfide(CdS) Film by Chemical
232
Bath Deposition (CBD)
S.C. Hu, P.J. Chang, Y.T.Lu, Y.J. Chen, Y.W. Lin, M.J. Cheng, L.B. Chang
A Study of Crystallizing Effect of Annealing for InN Film
229
T.C. Lia, T.T. Yuan, P.Y. Kuei, W.C. Chang, W.J. Lin,
Study of Hydrogen Storage Performance of BCC Phase Hydrogen Storage
230
Alloys
Y.P. Wu, R.R. Jeng, J.K. Nieh, H.Y. Bor
Study of Thermal Crack for Glass Cutting
203
C.C. Su, S.S. Wei, S.C. Huang
Session 1D Advance Manufacturing Technology (1)
Session Chair: D.Z. Fang
Co Chair: K.L. Kuo
Room M105
2/3 10:20-12:00
Paper
Title/
No.
authors
Prediction of Dynamic Stability Limit of Time-Variable Parameters System
034
in Thin-walled Workpiece High-Speed Milling Processes
Q.H. Song, W.X. Tang, X. Ai
The Study of Tracing-frequency Type Ultrasonic-Assisted Vibration System
039
in Tapping Process
K.L. Kuo , C.C. Tsao
Influence of Oxidization Resistance and Aluminum Concentrations of TiAlN
093
Coating Film on the Wear Resistance of High-Speed Steel Hobs
K. Kitamura, Y. Umezaki, S. Kurokawa, T. Doi, Y. Matsukawa, Y. Funaki
Evaluation and Classification of Hole Damage in Drilling Process of
237
Reactive Powder Concrete (RPC) Using Neural Network Analysis
A. Boschetto, A. Gisario, F. Veniali
Mathematical Modeling and high speed Machining of the Indexing
092
Mechanism with Globoidal Cam
D.Z. Fang, G.C. Wang
17

Feb.25,2010
Session 2A Robotics, Control and Automation

Session Chair: S.M. Wang
Co Chair: G.M. Xie
Room M102
2/3 13:20-15:00
Paper
Title/
No.
authors
Study of A New Master-Slave Control Method for Machine Tools with
167
Dual-driving Systems
S.M. Wang, R.J. Wang, H.J. Yu, D.F. Chen
An Automatic RFID and Wireless Sensing System for Hazardous Material
184
Inventory and Security Monitoring
S. P. Tseng, W.L. Li, K.Y. Hwa, IF. Chang
Robotic yoyo Motion Control with Optimal Programming
015
D.H. Yuan, H.L. Jin, G.X. Meng
A Novel CPG Model for Locomotion Control of a Fish-like Robot
097
C. Wang, G.M. Xie, H.D. Wei, L. Wang
Wafer-transfer Robot for Ultrahigh Vacuum Processing Equipments
130
H.C. Chen, S.M. Huang
Analysis of Degree of Freedom and Design Optimization for Leveling
045
Mechanisms
D.Z. Wang, K. He, R.Du

Session Chair: Y.M. Huang Co Chair: Y.T. Liu
Room M103
2/3 13:20-15:00
Paper
Title/
No.
authors
Patterning of Crystalline ITO Using Infrared Nanosecond Fiber Laser Pulses
137
C.W. Cheng, H.S. Chen, J.S. Chen
Analysis of Laser-Activated Deposition of Copper Lines using Microbe
193
Metabolite
H. Hocheng, K.E. Chang, J.H. Chang
A Study of the Micro-Strengthening Process with Experiment and
189
Simulation
Y.M. Huang, Y.M. Chang
A Novel Tool Setting Method for Wedge Groove Surface Machining on an
200
Ultra-precision Machine with B-axis
J.R. Chen, C.C.A. Chen, D.L. Butler, X. Ding, K. C. Shaw
Characteristic Study on Compensation Cutting for Micro Aspheric Mold
037
Based on Factorial Experiment
Y.T. Liu, W.C. Chang
18

Feb.25,2010
Session 2C Technologies for Optical and Photoelectric Devices/Systems (1)

Session Chair: C.H. Chen
Co Chair: C.H. Tien
Room M104
2/3 13:20-15:00
Paper
Title/
No.
authors
A Study of Liquid Filled Lens with Flexible Sensors
095
D. Shaw, S. P. Cuo , C. W. Lin
Double Side Microlens Array for Pico Projector
127
C.C. Chen, P.H. Yao, P.C. Chen, C.H. Chen
Backlight Type Daylight Concentrator
162
C.H. Lin, M.C. Chien, C.H. Tien
A Birefringence-free Compression Molding Process for Optical Plastics
192
Lenses
C. Y. Wang, Y. H. Sun, P.J. Wang
Nano-Fabrication Using Design of Square-Shape Tool on PET Surface of
024
Digital-Paper Display
P. S. Pa
Design of LED-Based Headlamp Reflector with Free-form Surface
178
K.L. Huang, C.Y. Lee, J.J. Chen
Session Chair: J.L. Kuo Co Chair: C. Y. Ho Room M105
2/3 13:20-15:00
Paper
Title/
No.
authors
Preparation of P(MMA/EGDMA/GMA)/Ni Functional Composite Particles
234
by Dispersion Polymerization and Electroless Plating
X.L. Chen, C.P. Chang, M.D. Ger, Y.C. Chen, H.J. Shu
Fabrication of TiO2 Nanooils by a Plasma Arc Nanoparticles Synthesis
System
029
M.J. Kao, C.C. Yu, K. D. Huang
Morphologic Characterization on Ablated Stainless Steel by Femtosecond
155
Laser Pulses
F.F. Lin, T.Y. Yeng, H. T. Young, J.K. Wang
Femtosecond Laser Machining of a Multi-D-Shape Optical Fiber for
177
Refractive Index Sensing
C.H. Chen, T.C. Tsao, J.L. Tang, W.T. Wu
Deformation Pattern in Thin Metal Films Irradiated by Femtosecond Laser
056
C. Y. Ho, M. Y. Wen
Improvement on Yield and Productivity of Anisotropic Conductive Film in
Thin-Film Transistor Liquid-Crystal Display Module Short Bar Attach
067
Process
J.L. Kuo, C.H. Hsieh
19

Feb.25,2010
Session 3A Metrology (1)

Session Chair: C.C. Cui
Co Chair:C.J. Chen
Room M102
2/4 08:20-10:00
Paper
Title/
No.
authors
A Simple Iterative Method for Minimum Zone Sphericity Error Evaluation
021
C.C. Cui, W. Fan
Fabrication and Measurement Uncertainty Evaluation for Polystyrene
062
Nanoparticle Size Standards
C.J. Chen, C.M. Lin, T.C. Yu, H.F. Weng, H. Chen
Analysis of Mechanical Properties by Nano Indentation- 2008 APEC
060
Interlaboratory Comparison
H.L. Lin, W.E. Fu, Y.C. Lin, J.S. Hsu, Y.K. Chih
Measurement Capability Analysis for Ultra-Thin Film Thickness- 2007
109
APEC Interlaboratory Comparison
H.L. Lin, W.E. Fu
Innovative Dual-mode Resonant Mode Detection of Micro Systems Using
187
Stroboscopic Interferometry
L.C. Chen, H.S. Huang

Session Chair: X. Ding
Co Chair: W.S. Lee
Room M103
2/4 08:20-10:00
Paper
Title/
No.
authors
Crystallographic Orientation Effects on Machined Surface Integrity with
Polycrystalline Oxygen Free Copper by Single Crystalline Diamond
090
Micro-Tools
X. Ding, D.L. Butler, L.C. Lee, K.C. Shaw
Effect of Annealing Temperature on Microstructural Evolution of Indented
102
Ni/Si Thin Films
W.S. Lee, T.H. Chen, C.F. Lin, J.M. Chen
Surface Modification of Hollow Carbon Fibers Using Plasma Treatment
098
Y.K. Chih , J. Hwang, C.S. Kou, C.C. Chuang, J.L. Hu, ,J.M. Lee, S.C.
Chang, L.C. Row, S.H. Cheng, J.P. Chen
Fabrication and Analysis of Surface Acoustic Wave Device based on ZnO
223
Thin Film
H.C. Cheng, J.L.Lee, C.F. Huang, Y. Lin, Y.K. Shen
Effect of Grain Size on Flaring Limit of SUS 304 Stainless Micro-tube in
027
Micro Flaring
C.P. Jiang, Y.S. Wu, C.H. Tsai, C.C. Chen, Y.K. Chih
20

Feb.25,2010
Session 3C Technologies for Optical and Photoelectric Devices/Systems (2)

Session Chair: J.W. Chen
Co Chair: H.Y. Tsai
Room M104
2/4 08:20-10:00
Paper
Title/
No.
authors
A Novel Image Segmentation Method for Extracting an Object from
122
Low-contrast and Unbalanced Background
L.C. Chen, C.H. Chien
Diamond Film Deposited Directly On Sapphire Substrate By Hot Filament
105
Chemical Vapor Deposition
H. Y. Tsai, Y.M. Liu
Spectrally Selective Al/AlN/Al/AlN Tandem Solar Absorber by In-line
159
Reactive AC Magnetron Sputtering
C.Y. Hsu, D.Y. Chen, C.H. Huang , Y.H. Chang, Y.C. Lin
Dye-sensitized Solar Cell Using Natural Dyes Extracted Form Pomegranate
153
Leaves and Mulberry Fruits
H. Chang, Y.C. Wu, T.L. Chen, Y.J. Lo
The Practical Extremity Balance System Using the Hall Sensors
125
J.W. Chen, H.S. Hsieh, J.C. Chen, S.Y. Lin, C.H. Yeh, C.Y. Liu
A 3D IR Positioning Sensor
141
P.W. Lu, R.S. Chen

Session Chair: C.J. Tseng
Co Chair: J. Luo
Room M105
2/4 08:20-10:00
Paper
Title/
No.
authors
Study on Investment Casting Directly with Rapid Prototype ABS Patterns
010
S.H. Wang, C.W, Shih, X.Y. He
A Study of the Electromagnetic Micro-stretching Process
025
C.H. Liu, A.C. Wang, K.Z. Liang
Characteristics and Microstructure of T3 Copper/35CrMnSi Steel Dissimilar
213
Metals in Inertia Radial Friction Welding Joint
J. Luo, X.G. Wang, Q. Luo, X.L. Xu
Study of SIMOX Radiative Properties with FT-IR Spectrometer
215
J.C. Tsao, C.J. Tseng, C.F. Chen, C.C. Su,
Application of CuO Nano Thin Films and DSSCs for Thermoelectric Power
151
Generator
H. Chang, Y.C. Wu, C.C. Chen, C.S. Jwo, S.L. Chen
21

Feb.25,2010
Session 3E Advances in Forming

Session Chair: G.Y. Tzou
Co Chair: D.C. Chen
Room M106
2/4 08:20-10:00
Paper
Title/
No.
authors
Slab Analysis Method of Cylindrical Can Nosing Process with Applications
051
J.J. Sheu, H.H. Su
Cold Roll Forming Process Design Based on the Induction of Analytical
061
Knowledge by Considering Material and Geometry Effects
Q.C. Hsu, C.T. Tran
Study on Compression Forming of Double-Layer Clad Sheet With Coulomb
214
Friction
G.Y. Tzou, M.Y. Hsieh, S.H. Chen
Slab Analysis and FEM Simulation on Rotating Compression Forming of
181
Three-Layer Clad Cylinder Considering Constant Shear Friction
G.Y. Tzou,, T.L. Chiang, M.N. Huang, Y.S. Chang
Rapid Gas Blow Forming of Fine-Grained Magnesium Alloy AZ31B Thin
050
Sheet
P.H. Sun, H.Y. Wu, S.Y. Lee
Use of the Taguchi Method to Study a Robust Design for Radial-finned Heat
030
Sink Curvature during Extrusion
D.C. Chen, T.L. Liang, M.W. Guo, C.H. Jao, J.M. Chen

Session Chair: K. C. Fan
Co Chair: C.C. Tang
Room M102
2/4 10:20-12:00
Paper
Title/
No.
authors
Calibration Methods for Nanometer Scale Measuring Instruments
236
W.H. Huang, Y.H. Chen, J.W. Li, D. Niu
A New Chromatic Confocal Microscope for In-situ Full-field Micro
044
Structure Measurements
K. C. Fan, L.C. Chen, S.Y. Huang, H. Y. Lin, L. Y. Chen
Using X-ray for Electronic Product Inspection
104
Y.Y. Lin, C.C. Liang, C.H. Chan, S.C. Lin
Machine Vision Method for Squareness Measurement of AOI Machines
145
C.C. Tang, H.C. Liou, C.L. Tsai
A Sculptured Surface Digitizing System Using a Laser Scanning Probe with
191
Multiple Detectors for Reverse Engineering
D.Y. Chang, S.J. Lee
22

Feb.25,2010

Session Chair: M. Chang
Co Chair: T.S. Leu
Room M103
2/4 10:20-12:00
Paper
Title/
No.
authors
Microfabrication of Fe-PDMS Structures for Microfluidic Applications
047
T.S. Leu, P.C. Jiang
Development of A Versatile Nanomanipulation System and Some of Its
089
Typical Applications
M. Chang, J. R Deka, C.H. Lin, C.P. Lin
Contour-Mode ZnO Piezoelectric MEMS Resonator
012
T. Gryba, J. Carlier, X.Z. Zhao, S.S. Guo, S.X. Wang , J.E. Lefebvre
Radiative Property Study for Silicon Wafer at Different Doping Levels
217
J.C. Tsao, C.J. Tseng, C. F. Chen
Annealing Enhancement of Synthesized Carbon Nanocoils
116
C. C. Su, B. R. Huang, S. H. Chang
Session 4C CAD/CAE/CAM
Session Chair: M.K. Yeh
Co Chair: S.J. Hwang
Room M104
2/4 10:20-12:00
Paper
Title/
No.
authors
Generation of Tool Paths and Five-axis B-spline Curve NC Commands for
052
Centrifugal Impeller Machining
J.S. Tsai, J.K. Ho, K.W. Liao, C.Y. Chiu
Fabrication of Composite Xylophone Bars with Computer-Aided Analysis
113
M.K. Yeh, C.H. Chen, K.L. Yen, M. R. Bai
Creative Mechanism Design of Strollers of Variable Degrees of Freedom
049
S.J. Hwang, S.M. Cheng, Y.H. Tsai
Active Vision-based Automatic Modeling System for Reverse Engineering
180
H.J. Chien, Y.C. Lin, C.Y. Chen, C.F. Chen
NURBS-Integrated Equivalent Errors for Contouring Control
053
S.L. Chen, C.Y. Chou
23

Feb.25,2010

Session Chair: B. Smoljan
Co Chair: S.J. Lee
Room M105
2/4 10:20-12:00
Paper
Title/
No.
authors
Numerical Assessment of Two-chamber Mufflers with Perforated
001
Plug/Non-Plug Tubes under Spa
M. C. Chiu
An Application of Computer Simulation in Optimization of Quenching and
068
Tempering of Steel Workpiece
B. Smoljan, D. Iljki, F. Traven
Overview and Applicability of Residual Stress Estimation of Film-Substrate
194
Structure
T.L. Chou, S.Y. Yang, K.N. Chiang
Study on the Thermal Effect of Electrochemical Micro-Machining of
220
Hydrodynamic Bearing by using Numerical Simulation
D.Y. Chang, P.C. Shen, J.C. Hung, S.J. Lee, K.T. Yang
Gaussian Process Modeling of Process Optimization and Parameter
152
Correlation for Injection Molding
X.P. Liao, W. Xia, F.Y. Long
Warm Stamping of Cell-Phone Cases with AZ31 Magnesium-Alloy Sheets
238
F.K. Chen, C.K. Chang
Session 4E Abrasive Machining
Session Chair: Z.C. Lin Co Chair: D.L.Butler
Room M106
2/4 10:20-12:00
Paper
Title/
No.
authors
Elucidating the Optimal Parameters in Magnetic Finishing with Gel Abrasive
146
A.C. Wang, C.H. Liu, K.Z. Liang, L. Tsai
Model Construction of CBN Grinding with Time Series
096
N.H. Chiu, Y.R. Shih
Analytical Study of Nanoscale Abrasive Cutting Model of
169
Three-Dimensional Quasi-Steady Molecular Statics
Z.C. Lin, R.Y. Wang
Tribological Behavior of Self-assembled Monolayer on Artificial Teeth
172
J.H. Horng, Y.R. Jeng, Y.C. Chang, C.C. Wei, Y.Y. Chen
An Investigation into Material Removal using Electrokinetic Effects on
198
Abrasive Particles
C.S. Leo, J.C.M. Chua, S.H. Ng, C. Yang, S. Danyluk, D.L.Butler
24

Feb.25,2010

Session Chair: S. Kurokawa Co Chair: M.C. Lu
Room M102
2/4 15:20-17:00
Paper
Title/
No.
authors
Dynamic Characteristics of a Recoil System when Firing Projectiles with
128
Mach 4.4 Muzzle Velocity
Y.C. Wu, H. Chang, T.T. Tsung, P.S. Fan
A Parameter Identification Method for Cantilever Systems by Using the
088
Dissipative Energy
W.L. Li, S.P. Tseng, Y.C. Hsin
Study of Spindle Vibration based Tool Condition Monitoring in Micro
134
Milling
M.C. Lu, W.H. Hsieh, S.J. Chiou
Development of Gear Measuring Machine and Measurement of Tooth Root
120
and Bottom Profiles of Cylindrical Gears
H. Kido, S. Kurokawa, T. Taguchi, N. Koyama, T. Doi
Uncertainty Evaluation of Gauge Block Calibration using Bayes Theorem
086
C.Y. Fang, P.H. Wang, C.Y. Hung, P.K.W. Lui
Session 5B Semiconductor Manufacturing Technology

Session Chair: H.T. Young Co Chair: S.J. Hwang
Room M103
2/4 15:20-17:00
Paper
Title/
No.
authors
Conformal Copper Electroplating of Through Silicon Via
110
Y.H. Huang, H.H. Lee, S.J. Hwang , D.Y. Huang
Investigation of the ZnO Buffer Layer Affects on the Structural and
126
Optoelectronic Properties of Sputtered Ga-doped ZnO Films
C. Y. Chu, C. Y. Hsu, T. L. Sung, C. P. Chou, Y. C. Lin
Design and Fabrication of the Pudding Mold Shear Adhesion Force Tester
065
S.J. Chang, S.J. Hwang, H.H. Lee, D.Y. Huang
Polishing and Dressing Behaviors in CMP Using Graphite Impregnated Pad
073
P.L. Tso, P.H. Chen, C.Y. Shih
Residual Stresses on Tungsten Thin Films after CMP Processes
032
W.E. Fu, Y.D. Lin, C.C. A. Chen, M.K. Chen
Does the Residual Stress of Backend Grinding Dominate the Warping
163
Problems in Wafer Thinning Process?
C.C. Lin, H.T. Young
25

Feb.25,2010
Session 5C Rapid Prototyping

Session Chair: Y.L. Cheng Co Chair: K.H. Chang Room M104
2/4 15:20-17:00
Paper
Title/
No.
authors
Rapid Prototyping Photo-polymerized PCL-PEG-PCL Tissue Engineering
028
Scaffolds
Y.L. Cheng, C.Y. Tseng
Error Analysis of Four-Axis Rapid Prototyping System
139
Y.H. Hu, K.H. Lin
A Study of Large scale Lost Foam using Four-axis Rapid Prototyping
140
System
K.H. Lin, Y.H. Hu
Rapid Prototyping for Large-Scale and Complex Assemblies
168
K.H. Chang , T. Long
Prototyping and Experimental Validation for Recreation Waterslides
135
K.H. Chang, C.C. Chen
Session 5D Advance Manufacturing Technology in Korea (Invited)

Session Chair: Y.T. Im
Co Chair: S.L. Ko
Room M105
2/4 15:20-17:00
Paper
Title/
No.
authors
Mechanical Properties and Formability Evaluation of AZ31B Magnesium
117
Alloy
J. H. Song, G. A. Lee, H. J. Lee, N. K. Lee, H. W. Lee, S. H. Kim
A Study on Chevron Crack Formation and Evolution in A Cold Extrusion
013
J.S. Choi, H.C. Lee, Y.T. Im
A Study on Development of Modified Tube Drawing Process for
124
Straight-Type Cowl Cross Bar of Automobile
H. S. Kim, J. W. Youn
A Study on Insert Injection Molding for BLDC Motor Stator
035
D.S. Choi, T.S. Jung
Experimental Investigation of Efficient Deburring at Intersecting Holes
195
S.L Ko, K.U Lee, T.P Ton
26

Feb.25,2010
Session 5E Finishing, Lapping and Polishing

Session Chair: Y.R. Jeng
Co Chair: W.L. Li
Room M106
2/4 15:20-17:00
Paper
Title/
No.
authors
Design of Electromagnetic Electropolishing on Curved Surface
038
P. S. Pa
Development and Verification of a Prototype Machine for Polishing Small
087
Volume Cylinder Walls
W.L. Li , Y.C. Hsin, C.W. Liu
Precision Surface Finish of the Hardened Stainless Steel Using New Ball
123
Polishing Device
F.J. Shiou, M.C. Chen
The Material Removal Rate of Metal Polishing Process
143
Y.R. Jeng, P.Y. Huang, H.J. Tsai
Binary Image Analysis and the Stress Analysis of Wafer of Compensated
171
Chemical Mechanical Polishing (CCMP)
Z.C. Lin, Y.H. Lee
Chemical Mechanical Polishing in Elastic Contact and Partial Hydrodynamic
129
Lubrication: Modelling and Experiments
H.J. Tsai, P.Y. Huang, H.C. Tsai, S.J. Chiu
27

Feb.25,2010
P-001 Numerical Assessment of Two-chamber Mufflers with

Perforated Plug/Non-Plug Tubes under Space and Back Pressure
Constraints Using Simulated Annealing
Min-Chie Chiu
Department of Automatic Control Engineering,
ChungChou Institute of Technology, Taiwan, R.O.C.
minchie.chiu@msa.hinet.net
ABSTRACT - Recently, research on new techniques of single-chamber mufflers
equipped with a perforated tube has been addressed. However, research work on shape
optimization of multi-chamber silencers hybridized with perforated plug/non-plug tubes
along with work on the maximal allowable back pressure of mufflers has been neglected.
Therefore, this paper will not only analyse the sound transmission loss (STL) of a
space-constrained two-chamber muffler hybridized with perforated plug/non-plug tubes
(Figure 1) but also optimize the best design shape under a specified pressure drop.
In this paper, both the numerical decoupling technique and simulated annealing (SA)
for solving the coupled acoustical problem of perforated plug/non-plug tubes and
optimizing the muffler shape are used. To verify the liability of SA optimization, optimal
noise abatements for the pure tone (500 Hz) is exemplified and shown in Figure 2.
Results indicate that the maximal STL is precisely located at the desired target tones.
Consequently, as indicated in Figure 3, the optimal result of one case study for
eliminating broadband noise also revealed the overall noise reductions with respect to the
muffler at various maximal allowable pressure drops ( p max ).
KEYWORDS - numerical decoupling technique, space constraints, back pressure
constraints, SA optimization.
Fig. 1 The acoustical field in a

two-chamber muffler hybridized with a
perforated plug/non plug tube.
Fig. 4 Optimal STL for mufflers designed

at various maximal back pressures
(broadband noise).
28

Feb.25,2010
P-003 Toward Service-Oriented Architecture: Development and

Implementation of the Interface for Interoperability among
Heterogeneous systems
Wei Tann1, Chie-Hsiung Ku1, Min-Hsiung Hung2, Fan-Tien Cheng3

1
China Steel Corporation,

Department of Electrical and Electronic Engineering, National Defense
3
University, Department of Systems and Naval Mechatronic Engineering,
National Cheng Kung University, Taiwan, ROC.
160143@mail.csc.com.tw
ABSTRACT The accomplishment of the interface aims to solve the important issues in
the message transactions among distributed systems and tackle the problems of existing
data manipulation and repetitive data storage. The achievement of the re-utilization of
system functions and the data integration among different systems of design and
production processes saves lot of money and time while we utilize the functions in the
cloud.
Intranet
( SSL/ SOAP/ WSDL)
Firewall
Firewall
SOAP
Communication Agent
Data Collection Manager

Equipment Driver
( MS SQL)
FOMOS LAN
Firewall
SOAP
Communication Agent

Equipment Driver
( MS SQL)
Level 1 DB
Firewall
SOAP
Communication Agent

Equipment Driver
(CARAT Web Services)
CARAT & CARAT CC
Communication Agent

Equipment Driver
(COM)
COM- Based System
The whole architecture of multi-GIM
KEYWORDS SOA,
29

Feb.25,2010
P-010 Study on Investment Casting Directly with

Rapid Prototype ABS Patterns
Songhao Wang1, Chinwang Shih2, Xinyin He1
1
Kun Shan University, Tainan, Taiwan
2
Kang Tion Metal Industrial Co. LTD, Tainan, Taiwan
songhaow@hotmail.com
ABSTRACT - This paper presents studies for ABS RP pattern used directly in
investment casting, experimentally and theoretically. Ceramic mould shell preparation
procedures including CAD pattern designing; RP pattern formation; pattern surface finish
and sealing; de-waxing and burnout are discussed.
Effects of pattern geometries such as bulk solid and thin wall are studied. The Results
suggest that for the process to be successful, the preparation should start as early as CAD
design stage. For bulk solid geometry patterns, Shell function in CAD and Sparse
web options in RP pre-processing are proved very effective and should be applied in
combination. While for patterns with thin-wall, Hot-Water De-Wax before plastic burnout
proved to be successful (Fig.1).
The mechanism behind has been revealed by our transient, non-linear CAE analysis.
The comparison of the thermal stresses in the ceramic shell during the heating processes
is plotted in Fig.2. It is very obvious that burnout process (although with higher oven
temperature) creates far less thermal stresses than the de-wax process (although with
lower oven temperature).
Therefore in any case, the Hot-Water De-Waxing procedure before plastic pattern
burnout was proved to be a good option to reduce the possibility of ceramic shell crack.
Fig.1 Successful quick-cast metal pieces with thin walls

and burnout
Fig.2 Shell stresses during de-waxing
KEYWORDS - Quick casting, Rapid Prototype (RP), Thermal Stress, Plastics
30

Feb.25,2010
P-012 Contour-Mode ZnO Piezoelectric MEMS Resonator

Tadeusz Gryba1,2,3 , Julien Carlier1,2,3, XingZhong Zhao4, Shishang Guo4, Shengxiang
Wang1,2,3 , Jean-Etienne Lefebvre1,2,3
1
Univ Lille Nord de France, F-59000 Lille, France
2
UVHC, IEMN, F-59313 Valenciennes, France
3
CNRS, UMR 8520, F-59650 Villeneuve dAscq, France
4
Department of Electrical Science and Technology, Key Laboratory of Acoustic and Photonic Materials
and Devices
of Ministry of Education, Wuhan University, Wuhan 430072, China
ABSTRACT - This paper reports on design, fabrication and experimental testing of one
port contour- mode piezoelectric MEMS resonator. The resonator consists of the ZnO
film sandwiched between the Platinum (Pt) and the Aluminium (Al) thin film layers. The
devices are fabricated from silicon wafers using a 3-mask process. The use of contour
modes, whose frequencies are set by lithographically defined dimensions, permits the
fabrication of multiple filters at arbitrary frequencies on the same chip.
KEYWORDS MEMS, Resonator, Contour-mode, ZnO.
31

Feb.25,2010
P-013 A Study on Chevron Crack Formation and Evolution

in a Cold Extrusion
J.S. Choi, H.C. Lee and Y.T. Im*
National Research Laboratory for Computer Aided Materials Processing,
Department of Mechanical Engineering, KAIST, 373-1, Guseongdong, Yuseonggu,
Daejeon, 305-701, Korea
*Corresponding author: ytim@kaist.ac.kr
ABSTRACT - Chevron cracks or central bursts are encountered in a cold extrusion or
drawing process. While chevron crack causes fracture of the material during the process,
internal cracks might exist resulting in fracture as well. Such internal cracks are difficult
to detect and easy to cause severe problems in the manufacturing products. Thus,
prediction of chevron cracking will be an important issue in the process control. In the
present investigation, a numerical algorithm based on the element deletion method and
rigid-viscoplastic finite element approach based on Cockcroft-Latham and specific plastic
work fracture criteria was applied to predict formation and evolution of possible cracking
in a cold extrusion of aluminum and steel alloys. Cockcroft-Latham fracture criterion
induced an internal crack while an external crack occurred owing to the specific plastic
work criterion in simulations. As a result, Cockcroft-Latham criterion was found to be
valid for predicting chevron cracking in comparison with the experimental observation
available in the literature. Using Cockcroft-Latham criterion, cracking was carefully
investigated in terms of the size of the crack and gap distance between cracks depending
on the number of elements and boundary condition at the punch interface. The critical
damage values for the Cockcroft-Latham fracture criterion were also calculated based on
the tensile instability and fracture conditions to investigate their effect on possible
cracking. Finally, processing map based on the Cockcroft-Latham fracture criterion for
preventing chevron cracking in the cold extrusion of commercially available steel was
developed by considering processing parameters such as reduction in area and semicone
angle. According to this investigation, the developed element deletion method with the
Cockcroft-Latham fracture criterion was reasonably accurate for carrying out chevron
cracking analyses in the cold extrusion with proper selection of a critical damage value.
KEYWORDS - Chevron crack, Element deletion method, Extrusion, Critical damage
value, Fracture criteria.
32

Feb.25,2010
P-015 Robotic yoyo Motion Control with Optimal Programming

De-Hu Yuan1,2, Hui-Liang Jin1, Guo-Xiang Meng1
1.
SMC Technology Center, School of Mechanical Engineering, Shanghai Jiao Tong
University, Shanghai 200240, China
2.
Shanghai Aerospace Control Engineering, Shanghai 200233, China
E-mail: dehuyuan@gmail.com
ABSTRACT - This paper presents a general approach for planning trajectories for cyclic
dynamic systems, and demonstrates its application for robotic yoyo playing. The
approach is based on return map parameterization using intermediate states of the system.
These states are naturally incorporated as the boundary constraints in the framework of
nonlinear optimal programming. In the case of yo-yo playing, the height of the robot arm
when the yoyo arrives at the bottom is selected as the intermediate state. By solving the
optimization problems during each phase of a cycle, a reference trajectory, a nominal
control for the robot and the corresponding return map of the object were generated
simultaneously. The return map is naturally parameterized by the intermediate state. The
return map can be regarded as discrete-time system and the intermediate state can be
regarded as a virtual control. Hence, standard analysis and design methods for pure
discrete-time systems can be applied to control the dynamic system.
KEYWORDS - Robotic yoyo. Return map. Reference trajectory. Optimal programming
33

Feb.25,2010
P-021 A simple Iterative Method for Minimum Zone Sphericity

Error Evaluation
Changcai Cui, Wei Fan
College of Mechanical Engineering and Automation, Huaqiao University,
Quanzhou 362021, China
E-mail:cuichc@hqu.edu.cn
ABSTRACT In order to evaluate the sphericity error of spherical parts precisely and
conveniently, a minimum zone method is proposed which is realized by iteratively
searching the neighbourhood of an approximate optimal solution. The neighbourhood is a
spherical search space. The method starts with determining the initial centre and radius of
the search space by an approximate method. The search space is divided by a series of
concentric spheres. Then for every sphere it is further divided by some longitudes and
latitudes, the intersections of which are the candidate search datum centres of two
concentric spheres for the sphericity error evaluation as shown in figure 2.
A better candidate centre with minimum sphericity error will be found and reserved
as the new location of the search space and a new radius of the search space will be
calculated according to the location transformed distance from its former location. The
new search space is therefore divided as above and a new better candidate centre will be
found. The computation continues until the favorable solution appears. Results of some
examples show that the proposed method is precise and relatively efficient for general
inspection as shown in figure 4 besides it is simple and easy to realize.
Sphericity, minimum zone, iterative search, search step, search space
New centre of search

space (xt+1s,yt+1s,zt+1s)
0.06
0.04
0.02
0
y
x
5
iterations
10
3.4
2
5
iterations
3.35
3.3
10
5
iterations
10
-3
Distance between new

and old search space
Centre of search space
(xts,yts,zts)
sphericity error/mm
2.95
0
x 10
0.04
4
sphericity error/mm
4
1
sphericity error/mm
New radius of search space rt+1s
sphericity error/mm
0.08
Measured points(xi,yi,zi)
sphericity error/mm
2.9
2.85
2.8
2.75
5
iterations
10
1
5
sphericity error/mm
KEYWORDS -
0.03
0.02
0.01
0
5
iterations
10
6
0.8
0.6
0.4
0.2
0
5
iterations
10
Fig. 4 Sphericity error updating with the iterations.
Fig.2 Diagram of candidate centres and new search space
34

Feb.25,2010
P-024 Nano-Fabrication Using Design of Square-Shape Tool on

PET Surface of Digital-Paper Display
P.S. Pa
Department of Digital Content Design, Graduate School of Toy and Game Design
National Taipei University of Education
myhow@seed.net.tw
ABSTRACT The low yield of ITO nanostructured coatings is an important factor in
optoelectronic semiconductor production. This study demonstrates a designed
square-form tool and a precise reclamation system using a micro electroremoval process
for ITO thin-films dissolved from a surface of PET surface of touch-panel. In the current
experiment, a small gap-width between the square-form tools cathode and the anode
workpiece, takes less time to do the same amount of ITO dissolution. A large diameter of
the rotational circle of the cathode of the square-form tool reduced the amount of time for
effective ITO removal since the effect of dissolution is facilitated by supplying sufficient
electrochemical power. A higher dissolution rate of the defective ITO thin-films
corresponds to high rotational speed of the rectangle-form tool, a high temperature, or a
large flow rate of the electrolyte. A small chimb end radius of the anode combined with
enough electric power, results in fast dissolution. Additionally, electric power, when
combined with a fast feed rate, provides highly effective dissolution. Importantly, the
performance of a designed rectangle-form tool was found to be more effective in the
micro electroremoval process. It requires only a short period of time to dissolve the ITOs
nanostructured coatings easily and cleanly. By establishing a designed tool and a precise
reclamation process for the ultra-precise removal of the thin nanostructured coatings, the
optoelectronic semiconductor industry can effectively recycle defective products,
reducing both production costs and pollution.
KEYWORDS PET, Digital-Paper Display, Micro Removal Process, Design,
Square-Form Tool.
extension tank
motor
major machining tank

packing block anodemotor
anode
rotational +
optical PET-film
_
cathode
+
extension tank
flow meter
pump
machine table
electrolyte
tank
filte
support
heater
support
Fig. 1 Experimental setup

35

Feb.25,2010
P-025 A Study of the Electromagnetic Micro-stretching Process

Chun-Ho Liu, A-Cheng Wang and Kuo-Zoo Liang
Department of Mechanical Engineering, Ching Yun University, Jung-Li 320,
Taiwan, ROC
chliu@cyu.edu.tw
ABSTRACT - In general, the electromagnetic forming process mostly relies on the use
of the electromagnetic force to deform metallic workpieces at high speed. The force is
induced by the high current and voltage with a coil set. This, however, would result the
high design cost and the temperature rising problem. In this study, a micro-forming
process is designed that the induced electromagnetic force will attract the ferromagnetic
punch to contact the workpiece, and then forced the workpiece to deform. The
experimental apparatus for the electromagnetic micro-forming process is designed and
tested. Meanwhile, the finite element analysis of the micro-forming process coupled with
the electromagnetic and the structural field is evaluated. Two types of the micro-forming
processes and the springback phenomenon will be observed and discussed in details. With
the different distances being variations between the coil and punch, the effects on the
predicted shape are assessed. Through the comparison with the experiments, the
numerical results have a same tendency as in the test works. And the method used in this
study is available in the relative micro-forming processes.
KEYWORDS - electromagnetic, micro-stretching, springback.
Fig. 1 The electromechanical system and the forming results of model A.
36

Feb.25,2010
P-027 Effect of Grain Size on Flaring Limit of SUS 304 Stainless

Micro-tube in Micro Flaring
Cho-Pei Jiang1, Yi-Syun Wu1, Chen-Han Tsai1, Chang-Cheng Chen2 and Ya-Ko
Chih3
1
Institute of Mechanical and Electro-Mechanical Engineering, National Formosa
University, Taiwan
2
Department of Mechanical Engineering, Technology of Science Institute of
Northern Taiwan, Taiwan
3
Measurement Standards & Legal Metrology Division, Industrial Technology
Research Institute, Taiwan
cpjiang@nfu.edu.tw
ABSTRACT - Size effects make traditional macro-forming generally ineffective for
unsuitable micro-forming. Although the micro-tube is one of the most important
micro-parts, the effect of size on material behavior has seldom been studied. In this
investigation, 304 stainless micro-tubes were annealed to investigate their grain growth as
shown in Figure 1 and to analyze the mechanical properties, including yielding stress and
strain-hardening coefficient, by conducting a tensile test. The thin oxidation layer
precipitated although the thermal treatment was performed in a vacuum environment. A
Triboindenter system was employed to measure the reduced modulus and hardness of the
oxidation layer and grain to identify the effect of the oxidation layer on mechanical
properties. A flaring system was developed to investigate the relationship between flaring
limit and T/D (thickness/average grain size) ratio as shown in Figure 2. The method of
fabricating a conical micro-punch was also described. Consequently, the optimal T/D
ratio, which enhances the flaring limit, is 8.9 as shown in Figure 3.
KEYWORDS - flaring limit. grain size effect.
(a) 950 C
(b) 1000 C
(c) 1050 C
Figure 1. Microstructures of annealed tube with (a) D= 15.06 m; T/D= 8.9 (950 C); (b) D= 16.97 m; T/D=7.5 (1000 C);
(c) D= 21.24 m; T/D= 5.3 (1050 C).
Fig. 2. The developed micro flaring test system.
Fig. 3. The experimental results of T/D ratio in

regard to flaring limit and ultimate force
37

Feb.25,2010
P-028 Fabrication of Photo-polymerized PCL-PEG-PCL Tissue

Engineering Scaffolds by Dynamic Masking Rapid Prototyping
System
Yih-Lin Cheng and Chun-Yuan Tseng
Department of Mechanical Engineering, National Taiwan University of Science
and Technology
ylcheng@mail.ntust.edu.tw
ABSTRACT - Traditional tissue engineering scaffold fabrication techniques usually have
limited control of the micro-architecture of the scaffold with random pore orientation,
resulting in variations in mechanical properties. Solid Freeform Fabrication (SFF)
techniques, building parts layer by layer without restrictions on shape and
micro-architecture control and consistency, provide a great opportunity to fabricate 3D
scaffolds. In this research, a self-developed Dynamic Masking Rapid Prototyping System
was adopted to fabricate biodegradable PCL-PEG-PCL tissue engineering scaffolds. The
system utilized Digital Light Processing (DLP) projector directly as the dynamic mask
with modified lens setting. The PCL-PEG-PCL was mixed with PEG-HEMA, serving as
binder, and photo-initiator in acetone. Two types of scaffold pore patterns were designed
and fabricated. Due to the reflection of previous cured layers, over-cuing happened and
pores may be closed when the number of layers increased. Three strategies were applied
to solve this problemdecrease the exposure time of latter layers, reduce the scaffold
dimensions of latter layers for compensation, and assemble basic scaffold sets with fewer
layers. As a result, the assembling strategy was the best among the three. In the future,
more 3D scaffold designs can be implemented through this system.
KEYWORDS - Rapid Prototyping, Dynamic Mask, Tissue Engineering, scaffold,
PCL-PEG-PCL
38

Feb.25,2010
P-029 Fabrication of TiO2 Nanooils by a Plasma Arc

Nanoparticles Synthesis System
Mu jung Kao, Cheng Chi Yu, Kuohsiu David Huang
Department of Vehicle Engineering, National Taipei University of Technology,
Taiwan, R.O.C.
mjkao@ntut.edu.tw
ABSTRACT - This paper presents the synthesis of titanium oxide nanooils with
suspension stability using a modified plasma arc system. The high temperature was used
produced by plasma arc system to cause the bulk metal to heat and vaporize. The titanium
oxide gas is induced into the collection piping by the induction system. Then it mixes
thoroughly with the pre-condensed paraffin oil, and mixture with a rapid cooling process
which helps in grain nucleation and prevents the growth of particle size. Hence, the
nanooils with smaller spherical titanium oxide size can be obtained, and this is finally
stored in collection tank. The friction test was analyzed using an ATE-77 Reciprocal
Tribological Tester made by Cameron-Plint Tribology Limited, England. Moreover, the
viscosities of nanooils were measured with the DV+LVDV-UCP rheometer in
rate-sweep mode over the shear-rate range 200-1900. The results show that the nanooils
mixed spherical titanium oxide can be made by modified plasma arc system. The
viscosity of nanooil consistently exceeds that the paraffin oil enlarging the partial EHL
area with a complete lubricating film between two move iron surfaces. It provides good
performance, then warranting the use of the titanium oxide nanooils as revolutionary
lubrication agent.
KEYWORDS - Titanium oxide. Nanooils. Paraffin oil. Viscosity. lubrication
39

Feb.25,2010
P-030 Use of the Taguchi Method to Study a Robust Design for

Radial-finned Heat Sink Curvature during Extrusion
Dyi-Cheng Chen*, Tsang-Lang Liang, Ming-Wei Guo,
Chih-Hsuan Jao, Jhih-Ming Chen
Department of Industrial Education and Technology,
National Changhua University of Education, Changhua 500, Taiwan, R.O.C.
*E-mail: dcchen@cc.ncue.edu.tw
ABSTRACT The design of the heat sink of a CPU depends on the material flow board
and length of the main model's bearing. Two plastic deformations were produced by
direct extrusion for achieving better billet flow. We mainly used DEFORMTM 3D
software to simulate the plastic deformation behavior of billets during hot extrusion at a
constant temperature of the radial-finned heat sink. We then conducted a series of
simulation analyses with different variables such as friction factor, ram velocity, and fin
gate stage of the die to evaluate the methods of decreasing the warping in the extrusion
process. We used the Taguchi method to find the optimum design parameters. We also
developed an experimental mold for CPU extrusion. The results confirm the suitability of
our design process of an extrusion die to achieve a lower warping behavior of the
radial-finned heat sink. Figure 1 compares the simulation and the finished experimental
product, and a good result was obtained.
KEYWORDS - Radial-finned heat sink. Warping. Taguchi method
(a) Simulation
(b) Experiment
Fig. 1 Comparison between simulation and finished experimental product
40

Feb.25,2010
P-032 Residual Stresses on Tungsten Thin Films after CMP

Processes
W.-E. Fu1, Y.-D. Lin2, C.-C. A. Chen2, M.-K. Chen2

1
Center for Measurement Standards, Industrial Technology Research Institute, Hsinchu,
Taiwan
2
Department of Mechanical Engineering, National Taiwan University of Science and
Technology, Taipei, Taiwan
E-mail: weienfu@itri.org.tw.
ABSTRACT Surface residual stress is unavoidable for components after manufacturing

or polishing process. It could be either detrimental or beneficial to the service life of the
components depending on the conditions of the existing residual stress. The goal of this
study was to determine the surface and subsurface residual stress for metal thin films after
Chemical Mechanical Polishing (CMP). Tungsten (W) thin films with thickness 600 nm
on silicon wafer were chemical-mechanical polished at designed parameters with
different down pressures and relative velocities to generate the residual stresses on
surface and below surface. The stress measurements of the thin films were performed by
Grazing Incident X-Ray Diffraction (GIXRD). The experimental results evidently showed
that the surface residual stresses were induced by the CMP processes. A high surface
residual stress was obtained, and the residual stress decreases rapidly along the depth for
the films polished by CMP.
KEYWORDS - Residual Stresses, Thin Films, CMP
41

Feb.25,2010
P-034 Prediction of Dynamic Stability Limit of Time-Variable

Parameters System in Thin- Walled Workpiece High-Speed
Milling Processes
Q.H. Song, W.X. Tang, X. Ai
Key Laboratory of High Efficiency and Clean Mechanical Manufacture, School of
Mechanical Engineering,
Shandong University, Jinan, Shandong 250061, P.R. China
tangwx@sdu.edu.cn
ABSTRACT A method for predicting dynamic stability limit of thin-walled workpiece

high-speed milling process is described. The proposed approach takes into account the
variations of dynamic characteristics of workpiece with the tool position (or machining
time). A dedicated thin-walled workpiece representative of a typical industrial application
is designed and modeled by finite element method (FEM). The curvilinear equation of
modal characteristics (natural frequency, stiffness, etc) changing with tool position is
regressed. A specific dynamic stability lobe diagram (DSLD) is then elaborated by
scanning the dynamic properties of workpiece along the machined direction throughout
the machining process. The results show that, during thin-walled workpiece milling
process, material removing plays an important part on the change of dynamic
characteristics of system, and the stability limit curves are dynamic curves with
time-variable. In practical machining, some suggestion is interpreted in order to avoid the
vibrations. Then investigations are compared and verified by high speed milling
experiments with thin-walled worpiece..
KEYWORDS - Time-variable parameters system, Milling chatter, Dynamic stability
limit, Finite element method
42

Feb.25,2010
P-035 A Study on Insert Injection Molding for BLDC Motor

Stator Considering Insert Deformation
Du-Soon Choi, Tae-Sung Jung

Department of Machine Design, Inha Technical College
253 YongHyun-Dong, Nam-Gu, Incheon 402-752, South Korea
E-mail: dschoi@inhatc.ac.kr
ABSTRACT Insert injection molding is a process in which plastic is injected into a

mold that contains a pre-placed insert. During the insert injection molding process, the
insert can be deformed by the pressure of polymer melts. The deformation of the insert
changes the wall thickness of the injection molded part, which can cause several defects
such as short shots or warpages of the parts. In order to reduce the deformation of the
insert, it is important to achieve successful design of gating system, insert geometry, and
molding conditions. In the present study, the insert deformation of the BLDC motor stator
was investigated by three-dimensional injection molding analysis using Moldflow. The
effects of gate locations and insert geometries on the insert deformations were
investigated. Finally, the numerical results were compared to the experimental results.
KEYWORDS - Insert injection molding, Insert deformation.
43

Feb.25,2010
P-037 Characteristic Study on Compensation Cutting for Micro

Aspheric Mold Based on Factorial Experiment
Yung-Tien Liu and Wei-Che Chang
Department of Mechanical and Automation Engineering,
National Kaohsiung First University of Science and Technology, Kaohsiung, Taiwan
E-mail: ytliu@ccms.nkfust.edu.tw
ABSTRACT Compensation cutting is the final process for precisely machining an

aspheric surface in ultraprecision machining work. In this paper, the effects to the form
error of a micro aspheric surface caused by the spindle speed and depth of cut were
examined by factorial experiment with one control factor of compensation ratio being
fixed as 1. The experiment was performed for an oxygen-free copper (OFC) aspheric
mold with a diameter of 0.3 mm by using a 4-axis desktop ultraprecision machine,
which has a feeding resolution of 0.1 m along each linear driving axis. According to the
analysis of variance (ANOVA) of the experimental results, the spindle speed is with a
larger contribution of 56.04% compared to the depth of cut with 25.28% in affecting the
form error of an aspheric surface. In addition, according to the characteristic curve, the
higher is the spindle speed, the smaller is the form error obtained. With the operational
conditions of the maximum spindle speed being 600 rpm and the depth of cut being the
same as the error caused by the rough cutting, i.e., 1.5 m, the most precise form
accuracy was obtained as 0.59 m among the configured experimental trials. Through this
study, how the control factors affect the form accuracy of a micro aspheric surface in the
compensation cutting process was demonstrated.
KEYWORDS - Ultraprecision machining, Aspheric surface, Compensation cutting,
Factorial experiment, Taguchi Method.
44

Feb.25,2010
P-038 Design of Electromagnetic Electropolishing

on Curved Surface
P.S. Pa
Department of Digital Content Design, Graduate School of Toy and Game Design
National Taipei University of Education
myhow@seed.net.tw
ABSTRACT It is identified that the electromagnetic electropolishing (EMEP) can
effectively prevent the electrolytic products from being attached to the tool electrode and
the curved surface and rapidly discharge dregs off the gap in the current study. In the
experiment, author uses a rotational plate shape tool electrode supplies with continuous
and pulsed direct current to execute the EMEP. The experimental parameters are magnetic
strength, distance between the two magnets, current density, on/off period of pulsed
current, initial gap width, flow rate of electrolyte, rotational speed of the tool electrode.
For the design system, the higher current density with magnetic assistance can avoid the
difficulty of dreg discharge, thus reducing the finishing time. Small distance between the
two magnets or large magnetic field intensity provides larger magnetic force and
discharge ability and better finishing. Higher rotational speed of the tool electrode
produces better polishing. Pulsed direct current can slightly promote the effect of
electrochemical finishing, but the electric current needs to be increased in proportion to
compensate the off-time. The EMEP without pulsed current is recommended for the
polishing process. It is a great contribution that the EMEP just needs quite short to make
the surface of workpiece smooth and bright.
KEYWORDS Electromagnetic Electropolishing, magnetic assistance, plate shape tool,
curved surface.
electyolyte
pipe
spindle
_
magnets
electrode
magnets
flow meter
power
supply
_
vice
S
+
machine table
+
machine stand
pump
tank
filter
electrolyte
tank
workpiece
Fig. 1 Experimental setup

45

Feb.25,2010
P-039 The Study of Tracing-frequency Type Ultrasonic-Assisted

Vibration System in Tapping Process
Kei-Lin Kuo , Chung-Chen Tsao
Department of Vehicle Engineering, National Taipei University of Technology,
Department of Automation Engineering, Tahua Institute of Technology, Hsinchu
klkuo@ntut.edu.tw
ABSTRACT -With increasing delicacy in product shape and structure,

manufacturing technology faces stricter requirements, especially for small and
deep internal thread processing. To reduce aircraft weight and increase flight
speed, the aviation industry uses a great deal of titanium alloy materials, with
excellent mechanical properties, on aircraft parts. Tapping is the most common
processing method for internal threads. However, small taps (smaller than M6)
are prone to breaking the internal thread in the hole of a titanium alloy
workpiece.
In the past, researchers thought that the introduction of ultrasonic assisted vibration
in tapping processes could generate smaller tapping torque than non-ultrasonic
assisted vibration process. However, since the ultrasonic vibrators temperature
increases with processing time, the temperature of the workpiece may get too high.
As a result, the ultrasonic vibrator may generate an unstable resonant frequency and
amplitude, which can cause poor quality in the workpiece. This research used
ultrasonic assisted vibration and LabVIEW software to develop an
ultrasonic-vibration assisted automatic Tracing frequency system. With this
orthogonal array experiment, ultrasonic-vibration assisted automatic Tracing
frequency system and the appropriate processing parameters (vibration amplitude,
vibration frequency) were used to perform tapping on a titanium alloy workpiece.
The effect of using this system on internal thread processing was investigated.
KEYWORDS - Tap, Internal thread, Tracing frequency type ultrasonic, Threading
46

Feb.25,2010
P-044 A New Chromatic Confocal Microscope forIn-situ

Full-field Micro Structure Measurements
Kuang-Chao Fan1,#, Liang-Chia Chen2, Shun-Yang Huang1, Hung-Yi Lin3, Lai-Yi Chen 3
1
Department of Mechanical Engineering, National Taiwan University
2
Graduate Institute of Automation Technology, National Taipei University of Technology
3
Mechanical and Systems Research Lab, ITRI, Taiwan
fan@ntu.edu.tw
ABSTRACT - Micro/nano structures patterned on the thin film substrate and fabricated
by the R2R (Roll-to-Roll) nanoimprinting processes usually have a steep and
low-reflective surface, which is not to be easily measured by existing optical methods. In
this paper, a multi-wavelength confocal microscopy with combined focusing curve
among three colors (Red, Green and Blue) is introduced to measure micro structures. A
compact and portable chromatic confocal microscopic probe was developed by
integrating a white light source obtained by mixing the LED light sources and a coaxial
confocal optical configuration with a 3-chip CCD camera for individual light sensing, as
shown in Fig. 1. A fitted depth response curve (DRC) between the profile depth and the
multi-color focusing correlation was established and calibrated by an accurate laser
interferometer. From analysis of the measurement results, it was confirmed that a
standard deviation of 30 nm on the height measurement can be achieved. This confocal
profilometer can effectively measure any micro structured thin film fabricated by the R2R
processes, shown in Fig. 2.
KEYWORDS - Chromatic confocal microscope, micro structure, measurement.
Frame grabber
Computer
Color CCD
(a) R2R film by SEM

Depth response curve
Objective(40X)
Specimens
Light source
Plano-convex
Objective(100X)
Beam splitter
(b) Measured 3D profile

Fig. 1: Proposed chromatic confocal microscopy system
Fig. 2: R2R micro structure and measured results.
47

Feb.25,2010
P-045 Analysis of Degree of Freedom and Design Optimization

for Leveling Mechanisms
Da zhi Wanga, Kai Hea and R.Dub

a
Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences
b
The Chinese University of Hong Kong
E-mail:dz.wang@sub.siat.ac.cn, kai.he@sub.siat.ac.cn, rdu@mae.cuhk.edu.hk
ABSTRACT - The leveling mechanism is widely used in the precise instrument. In terms
of the theory of mechanisms, the leveling mechanism is a spatial parallel mechanism. Its
motion is complicated and degree of freedom is not direct. Degree of freedom for
mechanisms is a basic problem of the theory of mechanisms, and also is a premise of
mechanism design. Based on analytical theory of degree of freedom for mechanisms, the
paper analyzes degree of freedom and motion characteristics of two conventional leveling
mechanisms, and points out that supporting kinematic chains in the two levelling
mechanisms are zero terminal constraint. In different condition of inputs, the two level
mechanisms have different condition of constraints, degree of freedom is also different. In
natural condition, the mechanism is under-constraint, and has 3 degrees of freedom. In the
condition of one input the mechanism is under certain condition of inputs, and has 4
degrees of freedom. In the condition of three inputs the mechanism has six degrees of
freedom. These problems make a negative impact on the performance and working of the
leveling mechanism, and point out that it is significant that designing a leveling
mechanism completely basing functional needs and kinematic principles.
KEYWORDS - leveling mechanisms; degree of freedom; constraint; screw motion
48

Feb.25,2010
P-047 Microfabrication of Fe-PDMS Structures for Microfluidic

Application
Tzong-Shyng Leu1,2, Pin-Chin Jiang1
1
Nano Technology and Micro System Institute, National Cheng Kung University
2
Department of Aeronautics and Astronautics, National Cheng Kung University
tsleu@mail.ncku.edu.tw
ABSTRACT - Fe-PDMS is a composite material that mixing iron powders in

polydimethylsiloxane (PDMS) to form a magnetically actuated microstructures. In this
paper we describe fabrication of Fe-PDMS microstructures. Fe-PDMS at different
weight ratio ranging from 50% to 83.3% are tested for its for processing capabilities, as
well as its actuation performance. Material properties and processing parameters have
been examined, and to demonstrate materials usefulness we have designed, fabricated,
and tested micro pumps that utilize an Fe-PDMS microchannel structures, as shown in
Figure 1. The Fe-PDMS microchannel for peristaltic pump design is the better choice
for disposal biochip applications because of its simplicity and cost-effective in
fabrication. In this Fe-PDMS microchannel study, Fe-PDMS=75% by weight was
found to be the optimal parameter based on the maximum flow rate within processing
capability constraints, as shown in Figure 2. The flow rate achieved is 92 l/min for
the current Fe-PDMS microchannel design with the channel width (Wc) 1500m,
channel height (Dc) 150m and channel membrane thickness (Tm) 80m. Driving
frequency at 2.0 Hz is suggested for the optimal operation condition. These findings
would be useful to the design and operation for Fe-PDMS microfluidic devices.
KEYWORDS Fe-PDMS, micropump
Fig.1 Package of the Fe-PDMS micro pump.
Fig. 2. Volume flow rate Q of Fe-PDMS micro

pump
49

Feb.25,2010
P-049 Creative Mechanism Design of Strollers of Variable

Degrees of Freedom
Shen-Jenn Hwang1 Shu-Min Cheng 2 Yi-Hung Tsai 2
National Formosa University
hwang6@sunws.nfu.edu.tw1
110601@yahoo.com.tw 2
allren.thai@msa.hinet.net 2
ABSTRACT Variable freedom mechanism is a mechanism which has a changing

process of freedom was described in unfold folding and collapsible configuration. Due to
a few of literature to research about operation of adjacency matrix of the box expanded
and collapsed mechanism. However, the rapid collapse mechanism from the start of the
adjacency matrix and its corresponding agencies to complete the adjacency matrix to the
process of mathematical matrix and its inverse operation is nonexistent. Therefore, the
purpose of this paper is to propose a mathematical matrix method which can be applied to
stroller for rapid collapse mechanisms.
KEYWORDS mechanism matrix stroller, variable degrees of freedoms
50

Feb.25,2010
P-050 Rapid Gas Blow Forming of Fine-Grained Magnesium

Alloy AZ31B Thin Sheet
Pin-hou Sun1, Horng-yu Wu2, Shyong Lee1
1
Department of Mechanical Engineering, National Central University, Taiwan

2
Department of Mechanical Engineering, Chung-hua University, Taiwan
ncuwu@chu.edu.tw
ABSTRACT - A series of experiments were performed by use of stepwise pressurization

profiles for gas blow forming of an Mg alloy with a male die. Decreasing the forming
time for gas blow forming of a commercially available fine-grained Mg alloy AZ31B thin
sheet with a thickness of 0.6 mm has been studied in the present work. Using
non-optimum pressurization profiles allowed the fast gas blow forming to be achieved
and significantly reduced the forming time. A rectangular shaped pan with a length of 70
mm, a width of 40 mm and a height of 10 mm, as shown in Fig. 1, could be successfully
formed in less than 320 sec. The distribution of thickness along the transverse cross
section of the formed pan was confirmed by the results as being sensitive to the
pressurization profiles. Interfacial friction between the lower die surface and the
deformed sheet restricted the metal flow in the top plane of the formed pan, major
thinning effect took place in the side wall region. Fig. 2 depicts the thickness distribution
of the formed rectangular pans along the transverse cross section at two different
pressurization profiles. The terms PT320 and PT240 refer to the pressurization profiles
for the forming periods of 320 and 240 sec, respectively. Grain growth was not a serious
problem for forming at a temperature of 370C. Grain size increased from about 5.1 m
to a maximum size of about 7.1 m. The distributions of cavity volume fraction were not
much different for forming at two different pressurization profiles used in this study. The
maximum cavity volume fraction was only about 1.1% for both pressurization profiles.
Fast gas blow forming of Mg alloy AZ31B showed its potential for future applications.
KEYWORDS - AZ31B Mg alloy, Gas blow forming, Pressurization profile.
Thickness (mm)
0.6
0.4
PT320
PT240
0.2
0.0
-40
Fig. 1 Male die formed rectangular pan

using fast gas blow forming.
-20
0
20
Distance from center (cm)
40
Fig. 2 Thickness distribution of the formed

pan along the transverse cross section.
51

Feb.25,2010
P-051 Slab Analysis Method of Cylindrical Can Nosing Process

with Applications
Jinn-Jong Sheu, Hsien-Hsiu Su
Dep. of Mold and Die Eng., National Kaohsiung University of Applied Sciences
jjsheu@cc.kuas.edu.tw
ABSTRACT - Nosing operation is a metal forming process to gradually reduce the open
end diameter of cylindrical or conical bottles. During the nosing process, forming zone is
locally constrained near the area of the bottle neck. Defects of buckling and wrinkling
occur frequently if the forming process and dies are not properly designed. A slab
analysis method was proposed in this paper for the thick wall bottle nosing simulation
based on the assumptions of volume constancy of material and Levy-Mises flow rule. A
one-step simulation model was developed to analyze the nosing process of billet bottles.
The J.B. Johnson buckling rule was modified to be applied to predict the critical forming
load of bottle billet. Three-dimensional FEM simulations and nosing experiments were
carried out to verify the proposed analysis models. The theoretical predicted results of
deformation and the experimental tests show that the proposed slab method are capable of
predicting the forming process and preventing the buckling defects.
The nosing tools had been installed on a 50-ton universal test machine as shown in
Fig. 1 to do the forming experiments. The thickness distributions predicted by the
developed slab method and the FEM simulations were compared and shown in Fig. 2 and
a good agreement was achieved.
KEYWORDS - Slab method, nosing limit, minimum nosing pass number, local
annealing
1.5
Slab method
1.4
Finite element method
Nosingdie
Bottomdie
1.2
t/t0
Bottlebillet
130
1.1
28
80
1
1
0.9
0.8
0.7
r/r0
Fig. 1 The tool setup of the nosing

experiment.
46.1
1.3
0.6
0.5
Fig. 2 Thickness distributions of a conical

nosed bottle.
52

Feb.25,2010
P-052 Generation of Tool Paths and Five-axis B-spline Curve

NC Commands for Centrifugal Impeller Machining
Jer-Shyong Tsai*, Jihng-Kuo Ho**, Kai-Wei Liao*, Chih-Yuan Chiu*
* Graduate Institute of Manufacturing Technology,
NTUT , Taipei, 10608, Taiwan, Republic of China
** Graduate Institute of Mechanical and Electrical Engineering,
NTUT, Taipei, 10608, Taiwan, Republic of China
*E-mail: f10493@ntut.edu.tw, **E-mail: jackal_tck@yahoo.com
ABSTRACT - In this paper, we propose a five-axis tool path planning method and a
generation algorithm of double B-spline curves NC commands for centrifugal impeller
machining, including impeller rough milling and hub surface finish milling. To remove
the flow tunnel material of impeller, we use hub surface, pressure surface and suction
surface as machining boundary surfaces to compute the tool paths data for rough and
finish milling by interpolating computation of these boundary surfaces. Rough machining
between two impeller blades is uniformly divided into several layers. When establishing
the tool paths for hub surface finish milling, this paper adapted the intersect-searching
scheme of the straight line equation of the tool-axis and the surface equation of the
impeller hub to decide the tool tip coordinates and tool-axis vector in order to make the
ball end mill cutter just touch onto hub surface during milling.
Afterwards, each set of discrete tool path points was transformed into a double
B-spline curves expressed equations with certain number of control points by using
present curve interpolation algorithm through curve tolerance detecting. The NC program
with five-axis B-spline curve format can be generated based on these two interpolated
B-spline curve equations for impeller machining. Five-axis cutting path planning and
simulation are shown in Fig. 1. Actual impeller machining test were implemented using
5-axis B-spline curve NC program on five-axis (X, Y, Z, B, and C axes) CNC machine
tool equipped with Siemens 840D controller (Fig. 2). The result shows that the machining
efficiency and quality can be much improved and that the smoothness of the tool path
avoids the appearance of marks and facets on the machined surfaces.
KEYWORDS - Centrifugal impeller. Five-axis machining. Tool path planning. Five-axis
B-spline curve NC command
finish machining
rough machining
(a) Tool paths simulation (b) Verification of Finish milling

(rough milling)
Fig. 1 Five-axis cutting path planning and simulation
(a) Impeller in cutting
(b) The machined impeller
Fig. 2 Impeller cutting and the result (material: ABS plastic)
53

Feb.25,2010
P-053 NURBS-Integrated Equivalent Errors for Contouring

Control
Shyh-Leh Chen and Chang-Yan Chou
Department of Mechanical Engineering,
National Chung Cheng University
Chiayi 621, TAIWAN
Email: imeslc@ccu.edu.tw
ABSTRACT - This study is to design an integrated interpolator and contouring controller

for a multi-axis motion system. The desired path is described by the non-uniform rational
B-spline (NURBS) interpolator. The method of equivalent errors is adopted for the
contouring controller. For an n-axis system, the equivalent errors are composed of (n-1)
equivalent contouring errors and 1 tangential error. The equivalent contour errors,
= p (x) , where x(t ) is the actual position, are defined by the n-1 algebraic equations that
are satisfied by the desired path, p( xd ) = 0 , xd (t ) is the desired position, as shown in Fig.
1. It can be proved that reducing equivalent contour errors is equivalent to reducing actual
contour errors. The advantages of adopting equivalent errors are that no approximations
on the contour error are required and the computation of equivalent contour errors is
simple and fast.
From the viewpoints of the error coordinates, the contouring control problem becomes
stabilization problem. The stabilizing controller can be obtained by feedback linearization
and integral sliding mode control to enhance the robustness. The equivalent errors method
can be applied to both linear and non-linear plant. To apply the method of equivalent
errors, the desired path in the form of NURBS, which is a parametric form, has to be
transformed into an algebraic representation. To achieve this, Sylvesters implicitization
method is introduced. The analysis is verified through a numerical example.
KEYWORDS - Contouring Control, NURBS, Equivalent Errors.
p ( x d )
x
r
x
x& d
xd
= p(x)
p( x d ) = 0
Fig. 1 Equivalent Errors
54

Feb.25,2010
P-056 Deformation Pattern in Thin Metal Films Irradiated by

Femtosecond Laser
C. Y. Ho and M. Y. Wen
Department of Mechanical Engineering, Hwa Hsia Institute of Technology Taipei 235,
Taiwan
Graduate Institute of Mechatronics Engineering, Cheng Shiu University, Kaohsiung 833,
Taiwan
hcy2182@yahoo.com.tw
ABSTRACT - This paper utilizes the parabolic two-step model to investigate the
deformation pattern in thin metal films irradiated by femtosecond laser. In the
femtosecond-laser processing of thin metal films, the hot electrons blast exerting on the
metal lattices because the metal lattices stay and almost thermally undisturbed at the stage
of nonequilibrium energy transfer. Hence a blasting force could be so strong that the cold
lattices are impelled into the domain for damage. The driving force derived from the
thermal field of hot electrons is directly fed into the equation of motion that describes the
dynamic response of the metal lattices. The results show that the displacement is
proportional to the proportional constant the laser fluence.
KEYWORDS - Deformation pattern. Metal films. Femtosecond laser.
55

Feb.25,2010
P-060 Analysis of Mechanical Properties by Nano Indentation

- 2008 APEC Interlaboratory Comparison
Hsiu-lin Lin , Wei-En Fu, Yi-Ching Lin, Jiong-Shiun Hsu, Ya-Ko Chih
Taiwan
E-mail: hsiulin@itri.org.tw
ABSTRACT - Reliable measurement methods are the essential prerequisites for
nanotechnology development, because of the importance of characterizing materials in
nanometerscale. For mechanical characterization tests in nanoscale, nanoindentation is
commonly used in a variety of fields to measure material hardness and elastic modulus.
This test technique is especially attractive for thin films because of the difficulty of
conducting tensile or hardness tests on thin film specimens, and because it requires only a
small surface area for testing. To establish the effectiveness and comparability of
measurement methods on mechanical properties characterization, an interlaboratory
comparison was held in the APEC region. Two specimens, fused silica and polycarbonate,
were provided by CMS/ITRI to each of 15 participating laboratories and 8 economies. A
measurement instruction was also provided to the participating laboratories. By the end of
the reporting period, 68 sets of results were received. The reported data was analyzed
according to the Z-scores. For reduced modulus of fused silica, based on the analysis and
calculation of the 17 sets of reported data, only one of them is at the region of
unsatisfactory according to the Z-scores. For the 17 sets of indentation hardness for fused
silica, none of measurement results are identified as unsatisfactory according to the
Z-scores. 17 sets of the measurement data from 15 laboratories were completed to
measure the reduced modulus and indentation hardness for polycarbonate. In general, the
reported measurement values have shown the consistency between the measurement
laboratories for reduced modulus and indentation hardness of fused silica and
polycarbonate.
KEYWORDS - Interlaboratory comparison, Reduced modulus, Indentation hardness,
Nanoindentation
56

Feb.25,2010
P-061 Cold Roll Forming Process Design Based on the Induction

of Analytical Knowledge by Considering Material and Geometry
Effects
Quang-Cherng Hsu and Chi-Thanh Tran
Department of Mechanical Engineerin
National Kaohsiung University of Applied Sciences
hsuqc@cc.kuas.edu.tw
ABSTRACT - Cold roll forming process design based on the induction of analytical
knowledge by considering material and geometry effects is proposed. The analysis
engine, a finite element based program, is used to analyze various multi-stage cold roll
forming processes based on pre-defined process parameters and tooling geometry.
According to the simulation results, a knowledge-acquisition procedure based on the
construction of a neural network model is organized, in which the multi layer network
and back propagation algorithm are utilized to learn the training examples from the
simulation results. Materials, bending angle and flange width (F) divided by thickness (t)
have been used as the input layer; Outside angle between right flange and web (Spr) and
outside angle between left flange and web (Spl) have also been used as the output layer.
The study introduced Artificial Neural Network (ANN) technique for modeling the
springback angle in the cold roll forming. 216 results were used as data sets to train the
network from the 36 simulation cases. The best results were obtained from
No-Regularization with single hidden layer in the Spr-Spl. These ANN predicted results
can be considered within acceptable limits. The results show good agreement between the
predicted and the experimental values.
KEYWORDS - Cold Roll Forming, Process Design, Artificial Neural Network, Finite
Element Method.
Fig. 1 The CRF forming process with 6 stands.
Fig. 2 The used ANN architecture.
57

Feb.25,2010
P-062 Fabrication and Measurement Uncertainty Evaluation for

Polystyrene Nanoparticle Size Standards
Chao-Jung Chen1, Chih-Min Lin1, Ta-Chang Yu1, Han-Fu Weng1, and Hui Chen2
1
Center for Measurement Standards / Industrial Technology Research Institute
2
Department of Chemical and Materials Engineering / National Central University
E-mail:Chao-Jung.Chen@itri.org.tw
ABSTRACT - This paper describes the fabrication, measurement , and uncertainty

evaluation for two batches of homemade polystyrene latex (PSL) spheres with nominal
sizes of 100 nm and 500 nm using the measurement system which electro-gravitational
aerosol balance (EAB) method is applied. In the measurement system, charged particles
are introduced into the space between horizontally placed planar electrodes. The
evaluation of the number of survived particles after a short period of time can lead to
determine the particle mass according to the balance between the electrostatic and
gravitational forces exerted on the particles. Once the particle density is known, the
particle size can be determined. The possible error sources are evaluated based on the
EAB method and the measurement procedures. As a result, the measured mean diameters
and expanded uncertainties for the two particles are 109.0 nm 1.2 nm and 529.4 nm
1.3 nm, respectively, for the EAB system.
KEYWORDS - nanoparticle size, measurement uncertainty, electro-gravitational aerosol
balance
58

Feb.25,2010
P-065 Design and Fabrication of the Pudding Mold Shear

Adhesion Force Tester
(1)Shyang-Jye Chang, (1) Sheng-Jye Hwang, (2) Huei-Huang Lee ,
(3)Durn-Yuan Huang
(1)Department of Mechanical Engineering, (2)Department of Engineering
Science, National Cheng Kung University, No.1, University Road, Tainan, Taiwan,
(3)Department of Sport, Health and Leisure Chung Hwa University of Medical
Technology, Tainan, Taiwan
jimppl@mail.ncku.edu.tw
ABSTRACT
In IC packaging, when epoxy molding compound (EMC) is filling the mold cavity and
cured in the mold, adhesion occurs in the interface between EMC and mold surface.
Too large an adhesion force can damage an IC and lower the yield rate. A
semi-automatic machine with good performance was reported to measure the normal
adhesion force accurately [1]. The effects of the process parameters that affect the
normal mold adhesion force were also reported [2]. However, there was no report
showing how to measure the shear mold adhesion force.
This paper described the design and fabrication of a semi automatic EMC adhesion
force test instrument that will measure shear adhesion force between mold surface and
EMC. By measuring the adhesion force, one can judge how much does a specific type
of surface treatment help in reducing the amount of mold adhesion force. One can also
use this instrument to determine what parameters are important for reducing the
magnitude of adhesion force between EMC and mold surface.
KEYWORDS - Adhesion Force, EMC, IC packaging.
Pictures of the test machine and the sample
59

Feb.25,2010
P-067 Improvement on Yield and Productivity of Anisotropic

Conductive Film in Thin-Film Transistor Liquid-Crystal Display
Module Short Bar Attach Process
Jian-Long Kuo, Chung-Hao Hsieh
Department of Mechanical and Automation Engineering,
National Kaohsiung First University of Sci. and Tech., Nantze 811, Kaohsiung , Taiwan.
E-mail: jlkuo@ccms.nkfust.edu.tw
ABSTRACT ACF (Anisotropic Conductive Film) is one of important materials in
LCM (Liquid Crystal Module) manufacturing process. It is used in a bonding process to
make the control circuit conductive. Because the cost of TFT-LCD is much lower than
before in recent years, the cost of ACF has much higher ratio in manufacturing cost.
Recently, the conventional long bar ACF attach unit is changed into the short bar ACF
attach unit by new bonding equipments. However, the new bonding process in this
equipment was not optimized. Therefore, the failure rate of ACF attach process is getting
higher than the one of conventional process. Besides, it wastes the required ACF material.
The rework cost is also invisible. Therefore, how to control the manufacturing cost down
effectively and promote the product quality will be the important issue to improve the
competition capability of the product. Therefore, this paper will discuss both the ACF
attach yield rate and the tact time. The optimization of multiple quality characteristics is
discussed by using experimental testing method. Three factors such as Plasma cleaning
speed, ACF peeling speed, and ACF cutter spring are selected and optimized to obtain the
optimal solution of design parameters in bonding process.
KEYWORDS TFT-LCD, ACF, LCM, attach process, cutter.
60

Feb.25,2010
P-068 An Application of Computer Simulation in Optimization of

Quenching and Tempering of Steel Workpiece
B. Smoljan, D. Iljki, F. Traven
University of Rijeka, Faculty of Engineering, Department of Materials Science and
Engineering, Vukovarska 58, 51000 Rijeka, Croatia
smoljan@riteh.hr
ABSTRACT - The method of computer simulation of yield strength, fracture toughness

and fatigue resistance has been applied in analysis of a quenching and tempering of steel
workpiece.
Numerical modelling of hardness distribution in quenched steel has been performed based
on time of cooling from 800 C to 500 C (t8/5) and by involving the results of simple
experimental test, i.e., Jominy-test. The time of cooling at specimen point was predicted
by numerical simulation using the finite volume method. Mathematical model of
microstructure composition in quenched steel was based on quenching time, t8/5.
Characteristic cooling rate parameter, relevant for results of quenching, was time, t8/5.
M
K M log(t8M5d / t8M5 max ) ;
Hardness of basic phases are equal to: HVdM = HVmax
B
HVdB = HVmax
K B log(t8B5 d / t8B5 max ); HVdP + F = HVNP + F + K P + F log(t8P5+NF / t8P5+dF ) . If the total hardness
and hardness of microstructure constituents separately are known, and if the phase
fraction of one of microstructure constituents is known, it is not difficult to predict
fractions of other phases by the: HV = {(% F + % P )HV( F + P ) + (% B )HV( B ) + (% M )HV(M )}/ 100 .
Hardness at quenched and tempered specimen points were calculated by:
n
HRCtempered = HRCquenched / K where K is equal to: K = C1 t n exp [A(a / Ttemp ) B ] . Yield
strength, fracture toughness and fatigue crack initiation threshold was calculated based on
1/ 2
steel hardness: Re = (0.24 + 0.03C )HV + 170C-200 ; K Ic = ( f n 2 ERe / 60) ; K th = nARe d 1 2 .
1
Influence of as-quenched microstructure on mechanical properties of Q&T steel.

Phase fractions [%] Hardness Yield strength Fracture toughness Fatigue threshold
KIc [MPam1/2]
Kth [MPam1/2]
[HV]
Re [Nmm-2]
F+P
B
M
7.1 83.2
9.7
238
574
144
10.19
23.9 73.2
2.9
236
561
147
7.99
Proposed method can be successfully applied in optimization of the manufacturing of
quenched and tempered engineering components. For good fatigue resistance,
engineering steel components in as-quenched state have to be consisted of homogeneous
martensite and bainite composition.
KEYWORDS - heat treatment, computer simulation, microstructure, yield strength,
fracture toughness, fatigue resistance
61

Feb.25,2010
P-073 Polishing and Dressing Behaviors in CMP

Using Graphite Impregnated Pad
Pei-Lum Tsoa, Pei-Hua Chenb and Cheng-Yi Shihc
Department of Power Mechanical Engineering, National Tsing Hua University,
Hsinchu, Taiwan
a
b
pltso@pme.nthu.edu.tw, fion_1985@hotmail.com, cd927727@oz.nthu.edu.tw
ABSTRACT - Chemical mechanical polishing (CMP) is the most effective planarization
method used in the semiconductor industry. Owing to advancement in wafer and node
size, CMP technology must be promoted to meet modern requirements. The polishing pad
is the major media by which mechanical forces are transferred to the surface of wafer.
Many IC fabricators have expressed much interest in improving CMP pad characteristics
in order to enhance process variability and reduce the cost-of-consumable (CoC) for CMP.
The graphite impregnated pad (GIP) is made by doping graphite powder in a
polyurethane matrix, so as to the original pores in the conventional pad are replaced by
graphite powders. The added graphite can absorb moisture, and thus pads wettability is
remarkably improved; it also serves as a lubricant and coolant that avoid producing hot
spots during polishing.
This research demonstrates a graphite impregnated pad (GIP) by studying the
material removal rate, polishing friction force, and surface topography of GIP and typical
IC1000 pad dressed by a brazed diamond disk (BDD) conditioner. The results indicate
that the slurry movement facilitation of the GIP can retain the abrasive grains perch on
the top of the pad asperities and increase the contact area between the abrasive and the
wafer. The GIP dressed by BDD can generate a fine pad surface. Although its material
removal rate is lower than that of the conventional pad, the process is more stable.
KEYWORDS - Chemical mechanical polishing (CMP); Graphite impregnated pad (GIP);
Brazed diamond disk (BDD); Dressing rate; Material removal rate
Graphite impregnated pad (GIP)
The material removal rate of GIP and IC1000 pad (indicates curve
A and B, respectively)
62

Feb.25,2010
P-086 Uncertainty Evaluation of Gauge Block Calibration

Using Bayes Theorem
Cheng-Yen Fang, Pin-Hao Wang, Chen-Yun Hung, Paul Kam-Wa Lui
Center for Measurement Standards,
Industrial Technology Research Institute, Hsin-Chu, Taiwan
fangcy@itri.org.tw, Pin-Hao@itri.org.tw, hungcy@itri.org.tw, aul.Lui@itri.org.tw
ABSTRACT - Measurement uncertainty is defined as a non-negative parameter

characterizing the dispersion of the quantity values being attributed to a measurand
according to the clause 2.26 of ISO/IEC Guide 99:2007 (VIM). It is commonly used as an
index to evaluate the goodness of measurement technology. Based on statistics, its
standards refer to ISO/IEC Guide 98:2008 (GUM) with additional statistics by different
technology fields. This paper here will introduce a new approach, the Bayes theorem,
with real case application for advanced evaluation of measurement uncertainty in gauge
block calibration.
KEYWORDS - uncertainty, Bayes theorem, GUM, numerical analysis
63

Feb.25,2010
P-087 Development and Verification of a Prototype Machine

for Polishing Small Volume Cylinder Walls
Wenlung Li 1, Y.C. Hsin 1, C.W. Liu 2
1 Department of Mechanical Engineering, NTUT, Taipei, TAIWAN
2 Information Management, St. Marys College, I-Lan, TAIWAN
E-mail: wlli@ntut.edu.tw
ABSTRACT - The present paper is to present the process of developing a machine for
polishing the inner walls of cylinders. The cylinder is the major component of small lawn
mower engines. During the design process, creative methods were applied systematically
to generate more ideas so that the final decision could be optimally selected from them.
In the meantime, the problem of shortening the lead-time, esp. for novice engineers, has
been a major issue. In order to over-come the difficulties, the whole machine system was
functionally decomposed into three major sub-systems so that the development process
can be assigned to three persons worked as a team. The sub-systems include the power
and transmission, jigs and fixtures, and the feeding mechanism. In addition, commercial
CAD and CAE softwares, Solidworks and Pro/Engineer, were readily utilized to
model the ideas in terms of 3D pictures. The 3D models help the personal involved work
as an efficient team, esp. in virtually assembling the subsystems. Once the sub-system
was independently completed, all parts were then transformed into engineering drawings
and delivered to machine shops for manufacturing. Students, on the other hand, then
carried out the assembling, in the lab, while all tests, evaluations, and improvements were
followed. It has been found that the expected functions, together with the design goal
have been properly met.
KEYWORDS- Creative development, a prototype machine, Polishing, design processes.
64

Feb.25,2010
P-088 A Parameter Identification Method for Cantilever Systems

by Using the Dissipative Energy
Wenlung Li 1, S.P. Tseng 1, Y.C. Hsin 2
1
Department of Mechanical Engineering, NTUT, Taipei, TAIWAN
2
Graduate Inst. Of Mechatronic Engineering, NTUT, Taipei, TAIWAN
E-mail: wlli@ntut.edu.tw
ABSTRACT - The main objective of the present report is to derive method for
identifying system parameters of a cantilever system that is modeled by a single-degree
oscillator. Unlike other existing methods, the present method starts with giving a wide
band, or chirp excitation to the target system, and to locate the damped natural frequency
of the oscillator. Once the damped natural frequency is obtained, it is possible to find the
frequency at which the phase lag is equal to 90 . From which, the external excitation
frequency is then purposely changed to that frequency. In the meantime, the system
dissipative energy or power needs also be recorded. The system parameters, both the
mass and stiffness of the oscillator, are expressed in terms of the external frequency and
the system damping. The former is close related to the damped natural frequency while
the latter can be identified along with measuring the input power. Applying the
formulations provided in the present paper, it is possible to recognize the system
parameters correctly, mass and stiffness. The novel formulations were thennumerically
simulated using the Simulink toolbox of MATLAB. The simulation results clearly
showed the current method can work with good accuracy. Following the numerical
simulations, the experimental validation was also carried out. Even though the
experimental results again verified the correctness of the method, a larger error may exist
if system damping is extremely small. The reason may mainly attribute to the
measurement accuracy for dissipative power and the location error from the frequency of
90 phase lag. Nevertheless, both numerical simulation and experimental results
strongly suggest that the new recognition algorithm can be applied with confidence. In
addition, to the best of the authors knowledge, it is the first attempt to give such an
almostexact formulation for a cantilever system. More importantly, the method can be
further generalized to other oscillator without difficulty.
KEYWORDS - Parameter identification, Signature analysis, sdof oscillator, Dissipative
energy.
65

Feb.25,2010
P-089 Development of a Versatile Nanomanipulation System and

Some of Its Typical Applications
Ming Chang, Juti R Deka, Chia-Hung Lin, and Chung-Po Lin
Department of Mechanical Engineering, Chung Yuan Christian University,
Chung Li, Taiwan
ming@cycu.edu.tw
ABSTRACT Nanomanipulation in space-limited environments requires small-sized

nanomanipulators that are capable of producing sub-nanometer positioning resolutions
and large output forces. This investigation reports on the development of a
multifunctional nanomanipulation system for nanomachining, nanofabrication and
mechanical/electrical characterization of nanoscale objects inside scanning electron
microscope (SEM). The manipulator is made up of commercially available actuators and
positioning stages. Several individual operating units have been combined to develop the
manipulation system where each unit has three linear stages and one rotational stage.
Coarse positioning along three linear axes and a 360 rotational motion of the probe of
each unit are provided by linear and rotational picomotors. The positioning system of
each unit can be equipped with AFM/STM tips as end effectors for both manipulation and
measurement, such as nanomachining on different substrates and nanomechanical
characterization. Figure 1 shows the schematic of the multifunctional nanomanipulator
with three units. Figure 2 shows the nanomachining performed on a silicon substrate
coated with gold.
KEYWORDS Multifunctional nanomanipulator, SEM, nanofabrication, nanomachining
Figure 1: Schematic of the designed

nanomanipulator
Figure 2: Nanomachining with

nanomanipulator
66

Feb.25,2010
P-090 Crystallographic Orientation Effects on Machined Surface

Integrity with Polycrystalline Oxygen Free Copper by Single
Crystalline Diamond Micro-Tools
X Ding1,2*, D L Butler1,2, L C Lee1, K C Shaw1
1
Singapore Institute of Manufacturing Technology (SIMTech),
71 Nanyang Drive, Singapore 638075
2
School of Mechanical and Aerospace Engineering,
Nanyang Technological University, Singapore
*xding@SIMTech.a-star.edu.sg
ABSTRACT - Most engineering metals are made up of more than one phase, with
different mechanical properties in addition to the individual grain and its crystallographic
orientation. In machining conducted with micro-size tools, since the grain size of the
work materials is often of the same order of magnitude as the cutter size, the assumption
of homogeneous properties in the work piece material is no longer valid. The
microstructural scale and the crystallographic orientation will affect the overall machining
properties. The polycrystalline oxygen free copper (OFC) is a high purity copper which is
widely used for optical components since optical grade surfaces can be produced with
diamond turning. A study was carried out to investigate the microstructural effects on the
machined surface integrity at orthogonal machining OFC with a micro size single
crystalline diamond (SCD) tool. Machining tests were performed using a 5-axis
ultra-precision machine. Micro-size SCD tools used in this study which were fabricated
by a focused ion beam (FIB) have a cutting length of around 30 m on the primary
clearance face and sharp cutting edges. It was found that changes in crystallographic
orientation resulted in variation in machining force, chip thickness and shear angle,
leading to changes in machined surface integrity. It was found that, as the micro-size tool
traverses a grain aligning to a particular crystallographic orientation, the work material in
front of the machining tool may deform severely, leading to thicker chip, striation at the
chip back, higher machining force, a much reduced shear angle and degraded machined
surface. Removing or refining the grain size is ways to improve the machined surface
quality when machining polycrystalline materials. This study contributes to the
understanding of the physics of micro scale mechanical machining (micro-machining).
KEYWORDS - Micro-size diamond tool, micro-machining, machined surface integrity,
microstructure structure, crystallographic orientation
67

Feb.25,2010
P-092 Mathematical Modeling and High Speed Machining of the

Indexing Mechanism with Globoidal Cam
Dai-zheng Fang1,2, Gui-cheng Wang1
1
.School of Mechanical Engineering, Jiangsu University, Zhenjiang, Jiangsu,212013,
China
2
. School of MechanicalEngineering, Anhui University of Science and Technology,
Huainan, Anhui,232001, China)
E-mail:fdzh_73@tom.com
ABSTRACT - The work principle of indexing mechanism with globoidal cam is

depicted firstly. Equations of the contour surface and the conjugate contact line are
deduced by rotating matrix operators. At last, the processing methods of globoidal cam
are discussed considering material selection, heat treatment and other aspects. The value
of roughness becomes very small by high speed machining, so it can replace the grinding.
KEYWORDS - Globoidal cam, Indexing mechanism, mathematical model, high speed
machining
68

Feb.25,2010
P-093 Influence of Oxidization Resistance and

Aluminum-Concentrations of TiAlN Coating Film on the Wear
Resistance of High-Speed Steel Hobs
Kei KITAMURAa, Yoji UMEZAKIa, Syuhei KUROKAWAa, Toshiro DOIa,
Yoji MATSUKAWAa and Yoshiyuki FUNAKIb
a
Kyushu University, 744, Motooka, Nishi-ku, Fukuoka 819-0395, Japan
b
NDK Incorporated, Japan
E-mail: 2TE09354K@s.kyushu-u.ac.jp
ABSTRACT - The oxidization on coating films is clarified to have influence on the

crater wear propagation through wear cutting tests in atmosphere such as nitrogen gas
and/or oxygen gas. This oxidization of TiAlN-coating films forms some products such as
aluminum oxidation on the tool rake face. The oxidation of TiAlN-coating films relates to
the crater wear and increase of aluminum concentration in the TiAlN-film improves the
crater wear resistance as the result of the simulating hobbing test.
KEYWORDS - Oxidization resistance; Tool wear; Aluminium concentrations; Coating
film; High-speed steel hob
69

Feb.25,2010
P-095 A Study of Liquid-Filled Lens with Flexible Sensors

a
Dein Shaw , S. P. Cuo , C. W. Lin
National Tsing Hua University, R.O.C.

a
dishaw@pme.nthu.edu.twb d9633833@oz.nthu.edu.tw
c
cwlin314@gmail.com
ABSTRACT - The purpose of this study is to design an integrated apparatus which is
composed of an elastic lens and a flexible sensors membrane with image sensor chips.
This design can obtain a clearer image than the design which uses the flat image sensor. It
is necessary to design a curved image sensor that can compensate the image distortion.
The curvature and position of the flexible sensor membrane correspond to the focal length
variation of the PDMS lens membrane; the shape of the image sensor membrane can be
predicted by computer simulation, and the required shape of the image sensor can be
obtained by deforming the PDMS (Polydimethylsiloxane) membrane. The deformation of
the PDMS lens membrane and the image sensor membrane can be obtained by using
software with variable internal pressure. The experimental module is composed of a
barrel, a PDMS lens membrane, a controlled ring to control PDMS lens curvature, a
flexible sensor membrane; the image sensor chips are constructed on the PDMS flexible
sensor membrane, a rigid adjusted ring to control PDMS lens curvature, and transparent
liquid; we fill the chamber between the two membranes with DI water. The adjust ring
contacts with the transparent elastic lens membrane and add pressure on the lens
membrane; the sensor membrane is expanded by internal pressure, and the curvature of
the sensor membrane increases with an increase internal pressure of the chamber. The
critical parameters of the curvature variation include the diameter of the controlled
adjusted ring, the thickness and strength of the sensor membrane, and the internal
pressure. Based on the flexible lens curvatures modulation to control the critical
parameters of the curvature variation, the sensor membrane curvature can meet the focal
length requirement of the lens curvature variation. The image sensor membrane places the
image sensors on the optimal plane as focal plain required.
KEYWORDS - liquid filled lens, flexible sensor, Petzval plan, PDMS,

auto-compensation
Fig. Section of optical module
Fig. Schematic of optical module action

70

Feb.25,2010
P-096 Model Construction of CBN Grinding with Time Series

Neng-Hsin Chiu and Yu-Ren Shih
Department of Mechanical and Automation Engineering
National Kaohsiung First University of Science and Technology
nchiu@ccms.nfkust.edu.tw
ABSTRACT - Technically a precision engineering surface is generated by grinding.

Grinding is a process utilizing abrasive grain and is full of uncertainty such that the
quality of ground surface is usually unstable and will be deteriorated as the process
proceeds. If the ground quality variation can be forecast to alarm before the occurrence
of unsatisfactory, the process can be well controlled for production. The purpose of this
paper is to construct a time series model to predict CBN grinding based upon the input of
the acquired acoustic emission (AE) signal from the process. The acoustic energy
extracted from the on line signal can effectively reveal the roughness variation of the
ground surface. When this quantity is fed into the time series model of grinding, the
trend of the ground quality can be predicted to aim the quality control for grinding.
KEYWORDS - Grinding process, Acoustic emission, Time series.
71

Feb.25,2010
P-097 A Novel CPG Model for Locomotion Control of a Fish-like

Robot
Chen Wang1, Guangming Xie1;2, Hongdong Wei1, Long Wang1
1
Intelligent Control Laboratory, College of Engineering, Peking University, Beijing
100871, China
2
School of Electrical and Electronics Engineering, East China Jiaotong University,
Nanchang 330013, China
wangchen@pku.edu.cn; xiegming@pku.edu.cn
ABSTRACT - Central pattern generators(CPGs) are neural circuits that generate periodic
signals for rhythmic movements such as locomotion. A novel CPG model for the
locomotion control of a multi-mode biomimetic robotic fish is presented in this paper.
The oscillator in our CPG model is composed of three linear differential equations and a
sine signal generator. Compared with existing CPG models, the proposed model has the
following features: having the analytical solution since the linear differential equations;
the adaptive parameters result in effective transients performance; and explicit meanings
about quantities of locomotion presented in the CPG model make locomotion control of
the robot explicitly. The experimental results validate the effectiveness of the proposed
CPGbased locomotion control method.
KEYWORDS - Central pattern generator, linear differential equation, locomotion control,
biomimetic robotic fish.
72

Feb.25,2010
P-098 Surface Modification of Hollow Carbon Fibers Using

Plasma Treatment
Y.K. Chiha,b*, J. Hwangc, C.S. Koud, C.C. Chuangb, J.L. Hub,
J.M. Leeb, S.C. Changb, L.C. Rowb, S.H.Chengb, J.P. Chenb
a
Center for Measurement Standards (CMS), Industrial Technology Research Institute,
Hsin-Chu City, Taiwan, Republic of China
b
Material and Chemical Research Laboratories, Industrial Technology Research
Institute, Hsin-Chu City, Taiwan, Republic of China
c
Department of Materials Science and Engineering, National Tsing-Hua University,
Hsin-Chu City, Taiwan, Republic of China
d
Department of Physics, National Tsing-Hua University, Hsin-Chu City, Taiwan,
Republic of China
ABSTRACT A plasma treatment is developed to modify the surfaces of micron-size
hollow carbon fibers. After oxidization and activation, hollow carbon fibers exhibit pores
on the outer surfaces. With a further treatment in a mixed plasma of CH4/H2 at 3000 W
for 2 hours, many cavities of about 3-5 m in size are formed by plasma etching on the
outer and inner surfaces. Nano-scale whiskers are uniformly distributed inside the cavities
by plasma deposition. The I(D)/I(G) Raman ratio increases from 2.09 to 5.93 after the
plasma treatment, suggesting that graphite crystallite size has been reduced from 2.11 to
0.74 nm. The nano-scale whiskers are disorder graphite and are aligned inside the
micron-scale cavities. A whisker/cavity structure is generated on the outer and inner
surfaces of the hollow carbon fibers.
(a) FESEM image showing the surface morphology of a hollow PAN fiber after the oxidation process
(b) Finger-like cracks appear within the wall of the hollow PAN fiber.
73

Feb.25,2010
P-102 Effect of Annealing Temperature on Microstructural

Evolution of Indented Ni/Si Thin Films
Woei-Shyan Lee1,*, Tao-Hsing Chen2, Chi-Feng Lin3, and Jyun-Ming Chen1
1
Department of Mechanical Engineering, National Cheng Kung University, Tainan
701, Taiwan
2
Center for Micro/Nano Science and Technology, National Cheng Kung
University, Tainan 701, Taiwan
3
National Center for High-Performance Computing, Hsin-Shi Tainan County 744,

Taiwan
E-mail: wslee@mail.ncku.edu.tw
ABSTRACT - The nano-mechanical properties of an as-deposited composite Cr/Si thin

film comprising a Ni layer with a thickness of 100 nm on a Si (100) substrate are
investigated by performing nano-indentation tests to a maximum depth of 800 nm. The
microstructural evolutions of as-deposited specimens and specimens annealed at
temperatures of 200, 300, 500 and 800 for 2 min are then examined using
transmission electron microscopy (TEM) and micro-Raman scattering spectroscopy
(RSS). The hardness and Youngsmodulus of the as-deposited specimens are found to be
13 GPa and 177 GPa, respectively. The microstructural observations reveal that the
nanoindentation process prompts the transformation of the indentation affected zone of
the silicon substrate from a diamond cubic structure to a mixed structure comprising
amorphous phase and metastable Si III and Si XII phases. Following annealing at
temperatures of 200 and 300, the indented zone contains a mixture of amorphous phase
and Si III and Si XII phases, and Si III and Si XII phases only, respectively. In the
specimens annealed at 500, the microstructure within the indentation zone is
characterized by the NiSi layer and the Si III and Si XII phases. At the highest
annealed temperature of 800, the microstructure within the indentation zone is
dominated by NiSi2 phase only.
KEYWORDS - Ni/Si thin films, nanoindentation, annealing, nickel silicide.
74

Feb.25,2010
P-104 Using X-ray for Electronic Product Inspection

Yuan-Yi Lin, Chih-Chang Liang, Chih-Hsiang Chan, and Shih-Chieh Lin
Dep. of Power Mechanical Engineering, National Tsing Hua University, Taiwan
g9533591@student.nthu.edu.tw, g9533589@student.nthu.edu.tw
d9633824@oz.nthu.edu.tw, sclin@pme.nthu.edu.tw
ABSTRACT -Traditional optical inspection is limited to detect defects appeared on the

surface of the product. In order to detect defects beneath surface, x-ray image is a
powerful tool to apply. Computed tomography can provide sufficient information about
the size and shape of the defect at any desired section while traditional x-ray image can
only provide vague information about the defect. In this paper, the feasibility study of
using X-ray laminography and computed tomography for electronic product inspection is
presented. Both laminography and computed tomography approach with cone beam
projection is simulated. In laminography, it was found that rotational type had better
performance than translation type. In computed tomography, both Feld Davis Kress (FDK)
approach, and the Simultaneous Algebraic Reconstruction Technique, (SART) were
adopted to reconstruct 3-D images with limited image frames. It was shown that this
application is feasible with certain limitations. For computed tomography, it was found
that the FDK method is faster in reconstructing 3D model than the SART. However, it
should be noted that SART still could obtain the better result with few numbers of the
iteration and images. The number of the projection is a key factor that affects the
reconstruction result.
KEYWORDS - BGA inspection, Laminography, XRay Computer Tomography, FDK,
SART
BGA Model
Cross Section
75

Feb.25,2010
P-105 Diamond Film Deposited Directly on Sapphire Substrate

by Hot Filament Chemical
Vapor Deposition
H. Y. Tsai1, and Y. M. Liu2
1 Department of Power Mechanical Engineering, National Tsing Hua University, 2
Department of Mechanical and Mechatronic Engineering, National Taiwan Ocean
University, Taiwan, ROC
hytsai@pme.nthu.edu.tw
ABSTRACT - Heteroepitaxial diamond films are deposited on sapphire substrate
without intermediate layer in a hot-filament chemical vapor deposition. A distance
between filament and substrate, nitrogen concentrations, and filament current are three
parameters with different pretreatment methods. Pretreatment methods include diamond
scratching, ultrasonic abrasion and electrophoresis by diamond powders. Since the
thermal expansion coefficient of sapphire is about three times higher than that of diamond,
good adhesion between diamond film and sapphire substrate without intermediate layer is
very hard to obtain. From the experimental results, the higher adhesion between diamond
film and sapphire substrate came from the pretreatment of electrophoresis by diamond
powder. For nitrogen addition, some nitrogen improved the adhesion, but too much
nitrogen inhibited diamond film deposition. The optimal adhesion were obtained from the
current of 40 A with a distance between filament and sapphire of 5 mm. More than 90 %
diamond film remained on sapphire substrate.
KEYWORDS - Diamond film, chemical vapor deposition, sapphire
76

Feb.25,2010
P-109 Measurement Capability Analysis for Ultra-Thin Film

Thickness - 2007 APEC Interlaboratory Comparison
Hsiu-lin Lin , Wei-En Fu
Taiwan
E-mail: hsiulin@itri.org.tw
ABSTRACT - In light of the importance of characterizing materials in nanometer-scale,
reliable measurement methods are the essential prerequisites for nanotechnology
development. Starting from 2005, NanoTechnology Research Center of Industrial
Technology Research Institute (ITRI) of Chinese Taipei was awarded the project
Technological cooperative framework on nanoscale analytical and measurement
methods by Asia-Pacific Economy Cooperation (APEC) Industrial Science and
Technology Working Group (ISTWG) with co-sponsored from 11 APEC member
economies. In 2007, the interlaboratory comparison on thin film thickness was carried out
for enhancing the comparability among different types of nanometer-scale measurement
methods. The aim of the interlaboratory comparison on thin film thickness
characterization was to establish the effectiveness and comparability of measurement
methods on nanometer-scale thin films.
KEYWORDS - Interlaboratory comparison. Grazing Incidence X-Ray Diffraction.
Spectroscopic Ellipsometry. Thin films. SiO2
77

Feb.25,2010
P-110 Conformal Copper Electroplating of Through Silicon Via

(1)Yu Hung Huang, (1)Huei-Huang Lee, (2)Sheng-Jye Hwang and
(3)Durn-Yuan Huang
(1)Department of Engineering Science, (2)Department of Mechanical
Engineering, National Cheng Kung University, No.1, University Road, Tainan
City, Taiwan, (3)Department of Sport, Health and Leisure Chung Hwa University
of Medical Technology
n9896121@mail.ncku.edu.tw
ABSTRACT Stacking multiple processed wafers brings IC into a pseudo
three-dimensional (3-D) structure and provides opportunities for improving performance,
enabling integration of devices with incompatible process flows and reducing form
factors. Through silicon via can eliminate the requirements of wire bonding and enable
the formation of large scale integration (LSI). Thus, through silicon via is a potential
candidate for true 3-D package structure and can increase the packaging density of an IC.
Via last and via first are through silicon via application types. The other type is conformal
through silicon via. Via first and via last of copper electroplating are all via filling process.
The fabrication for all via filling process is time consuming and the throughput of this
type of via is always a serious concern for the applications. The effect of copper
electroplating and throughput are required for void-free copper filling while increasing
the throughput and reducing the process time. Conformal type of copper via does not fill
all via and increase the throughput and is an ideal candidate for the applications.
In this investigation, we proved conformal through silicon via is robust to be achieved
with continuous lining. In this paper, successful fabrication of continue lining TSV with
very high aspect ratio was demonstrated through electroplating process and continuous
copper lining through silicon via with pinch off.
KEYWORDS TSV, High Aspect Ratio
SEM Picture of Lining Cu Electroplating-Conformal TSV
78

Feb.25,2010
P-113 Fabrication of Composite Xylophone Bars with

Computer-Aided Analysis
Meng-Kao Yeha,*, Chien-Heng Chena, Kun-Lung Yenb, and Mingsian R. Baib
a

Hsinchu, Taiwan 30013, R.O.C.
b
Department of Mechanical Engineering, National Chiao Tung University,
*mkyeh@pme.nthu.edu.tw
ABSTRACT - Two types of fiberglass/vinylester composite xylophone bars (see Figure

1) were fabricated to replace the traditional materials such as rosewood. The
computer-aided analysis was used to develop the design process of composite xylophone
bars. In this study, the CAD software Solidworks was used to design the geometry of
xylophone bars and the finite element software ANSYS to calculate the natural
frequencies of first three bending modes based on modal analysis. The dynamic signal
analyzer was used to measure the frequency response of the xylophone bars. The errors
between the finite element results and the experimental data are less than 2.836%. The
sensitivity analysis was performed to discuss the influence of material property variations
on the natural frequencies of composite xylophone bars. In this work, an efficient design
process of composite xylophone bars based on the computer-aided analysis was
developed. This process can be used to develop the composite xylophone bars on
different musical scale in the future.
KEYWORDS - Xylophone bar, Computer-aided analysis, Composite material, Finite

element analysis.
(a) Type A
(b) Type B
Fig. 2 Two types of xylophone bars
79

Feb.25,2010
P-116 Annealing Enhancement of Synthesized Carbon Nanocoils

1
C. C. Su1, B. R. Huang1, S. H. Chang1,2*

2
Center of Advanced Nano-Materials, National Taiwan University
shchang@ntu.edu.tw
ABSTRACT - In this study, we focus on growing high-yield and straight rate carbon
nanocoils (CNCs). It utilized 0.6g Fe particles and 0.3 g SnO2 particles mixing in 10 mL
alcohol (99.5 %) for catalyst solution, which was spun it in order to make sure the
catalyst distribute on the silicon oxide wafer uniformly. The substrate was annealed by
the oven at 150 in air for 12 hr. CNCs have been synthesized by chemical vapor
deposition, which are obtained by 2 metals-catalyzed pyrolysis of acetylene at 700,
under 1 atm. The average size of catalyst powder leads to various characteristics of CNCs.
CNCs has the average coil diameter of 1.91 um and line diameter of 0.52 um. Fig. 1
shows the SEM image of as-grown single CNC after annealing process for 12 hour. Fig. 2
and Fig. 3 show the distribution of coil diameter and line diameter with and without
annealing. The annealing effect can enhance the activity of catalyst and cause the
high-yield and straight rate of synthesized CNCs. The growing yield of CNCs can
achieve 88 % and straightness of the synthesized CNCs can perform in 70 % after
annealing.Furthermore, the technique is scalable and facilitates the integration of the
patterned CNCs with the micromachined electronic devices.
KEYWORDS - Carbon nanocoil Annealing Chemical Vapor Deposition Yield
Fig. 1 SEM image of a single carbon nanocoil
Fig. 2 The distribution of coil diameter of synthesized CNCs

with and without annealing
Fig. 3 The distribution of line diameter of synthesized CNCs

with and without annealing
80

Feb.25,2010
P-117 Mechanical Properties and Formability Evaluation of

AZ31B Magnesium Alloy for Sheet Metal Forming Process
J. H. Song1, G. A. Lee1, H. J. Lee1, N. K. Lee1, H. W. Lee2 and S. H. Kim3
1
Department of Manufacturing Convergence Technology, KITECH, Korea
2
Department of Energy System Engineering, Chungju National University, Korea
3
School of Automotive, Industrial and Mechanical Engineering, Daegu University, Korea
jhsong@kitech.re.kr
ABSTRACT - Magnesium alloy is widely used in automobile parts as well as electronic

and communication devices for its ultra light weight compared to steel materials,
excellent vibration absorption, and easy recyclability, as well as superior shielding power
compared to plastics. As laws on environment and energy become increasingly stringent
worldwide and parts for portable electronic devices are becoming more compact, the
demand for ultra light magnesium parts is expected to grow stronger. Although it is more
advantageous both technologically and economically to adopt a press forming process
with the sheet metal for most magnesium parts, it is very difficult to find the in-depth
studies related to both experimental and analytical investigations. This paper is concerned
with mechanical properties and formability of AZ31B magnesium alloy sheets at various
temperatures. In order to obtain mechanical properties, tensile tests are conducted under a
wide range of temperatures and strain rates, producing stress-strain curves, the strain rate
sensitivity, basic plastic properties and anisotropic parameters. Under the warm forming
condition, it is confirmed that flow softening occurs by dynamic recrystallization of the
microstructure and that the low formability at low temperatures is improved at the
elevated temperature. In order to acquire the forming limit curve for quantifying the
formability of the magnesium alloy sheet, hemispherical punch forming tests are
performed under various temperatures and a forming limit diagram is finally constructed.
From hemispherical punch forming tests, it is observed that the formability improves
greatly under warm forming conditions at temperatures exceeding 200C. The results
obtained from this study provide the essential database for CAE simulation, tool and
process designs in the sheet metal forming process of magnesium alloy sheets.
KEYWORDS - Magnesium Alloy, Mechanical Properties, Formability, Forming Limit
Diagram, AZ31B
81

Feb.25,2010
P-120 Development of Gear Measuring Machine and

Measurement of Tooth Root and Bottom Profiles of Cylindrical
Gears
Hiromitsu KIDO, Syuhei KUROKAWA, Tetsuya TAGUCHI,
Nagisa KOYAMA and Toshiro DOI
Department of Mechanical Engineering, Graduate School, Kyushu University
744 Motooka, Nishi-ku, Fukuoka, 819-0395, Japan
Engineering Department, Osaka Seimitsu Kikai Co., Ltd.
6-5-16 Mikuriya, Higashiosaka-shi, Osaka 577-0032, Japan
E-mail 2TE09355T@s.kyushu-u.ac.jp
ABSTRACT - Tooth root and bottom profiles of cylindrical gears influence bending
fatigue life, but it is hard to measure them with conventional gear measuring machines
(GMMs), because GMMs are normally customized to measure only gear working flanks.
The authors try to develop a new type of GMM by installing an extra 3D scanning probe
and control software to measure tooth root and bottom profiles.
First, in order to be able to measure in various directions, a 3D scanning probe has been
attached to the GMM developed. Next, calibration algorithm has been developed.
Deviations of the calibration results were detected and it is found that the cause of
systematic error must be deflections by heat from driving motors. A new alternative
GMM that has driving motors generating less heat was designed and comparison between
two GMMs has been conducted. Finally, trial measurement of tooth root and bottom
profiles of cylindrical gears is described.
KEYWORDS Gear measuring machine, Tooth root and bottom profiles, Heat,
Calibration
82

Feb.25,2010
P-122 A Novel Image Segmentation Method for Extracting an

Object from Low-contrast and Unbalanced Background
Liang-Chia Chen and Chih-Hung Chien
Graduate InstituteofAutomationTechnology,NationalTaipeiUniversityof
Technology
lcchen@ntut.edu.tw
ABSTRACT - This article presents an innovative image segmentation method for

extracting an object from its background image. Nowadays, 2-D automatic optical
inspection (AOI) technology for defect detection and classification has played a vital role
in in-situ manufacturing. Image segmentation is a crucial step for extracting component
information from its neighboring background. Potential complexity in such an image
processing operation poses considerable challenge in establishing a robust approach. In
general, three major factors have significant influence on image segmentation: (1)
brightness distribution of the background image; (2) degree of unbalanced brightness of
the background image; and (3) noise level near the object feature to be detected. This
research addresses these important factors and develops an effective segmentation
method. The developed method overcomes the limitations of the existing singular value
decomposition (SVD) or discrete Cosine transfer (DCT) methods. In terms of
segmentation accuracy, the developed method is 14% better than the DCT method. Test
results on real industrial cases verify that the developed method is capable of extracting
accurately the test object.
KEYWORDS - Automatic optical inspection (AOI), image segmentation, discrete

Cosine transfer, singular value decomposition.
83

Feb.25,2010
P-123 Precision Surface Finish of the Fardened Stainless Steel

Using New Ball Polishing Device
Fang-Jung Shiou and Mao-Cyuan Chen

Technology, Taiwan
E-mail: shiou@mail.ntust.edu.tw
ABSTRACT - The objective of this research is to develop a new ball polishing device to
improve the surface roughness of the hardened STAVAX plastic mold stainless steel on a
machining center. A polishing force sensing device using a load cell, mounted between
the slurry container and the machine bed, has been designed and fabricated. To achieve
the automated force polishing, the NC controller, and a PC have been integrated
information-technically. A set of software programmed with Visual Basic has been
developed to monitor the polishing force, and to generate the NC codes for the machining
path of ball polishing. The optimal ball polishing process parameters were determined by
the Taguchis experimental method. Using the determined optimal plane force ball
polishing parameters, the surface roughness of the burnished test specimens could be
improved from Ra 0.07 m on average to Ra 0.018mRmax 0.203m on average.
Applying the optimal plane force surface ball polishing parameters to a 3D test carrier of
an aspheric surface, a surface roughness of Ra 0.027 m on average was possible.
KEYWORDS - Ball polishing system, Load cell, Taguchis experimental method,
Surface roughness.
84

Feb.25,2010
P-124 A Study on Development of Modified Tube Drawing

Process for Straight-Type Cowl Cross Bar of Automobile
H. S. Kim1#, J. W. Youn1
1
School of Automotive, Industrial and Mechanical Engineering, Daegu University, 15
Naeri-ri,
Jillyang-eub, Gyeonsan-si, Gyeongbuk-do 712-714, South Korea
#
E-mail address: kimkong@daegu.ac.kr
ABSTRACT - This paper seeks to develop an one-piece forming process which

eliminates welding process for an automotive cowl cross bar by applying the tube
drawing process. However, it was predicted that a conventional tube drawing can not be
applied directly to the current part since the area reduction ratio of the drawing process
reaches 51.7% which exceeds the general limiting value. In this study, therefore, a
modified drawing process which adds a compressive force to a tensile force of the
conventional drawing process was proposed and 2-stage drawing process was designed
by using CAE analyses. In addition, drawing experiments were carried out by using the
manufactured modified drawing machine in order to verify the designed process.
KEYWORDS Automotive Cowl Cross Bar, Modified Drawing Process, Process
Sequence Design, Drawing Experiment
85

Feb.25,2010
P-125 The Practical Extremity Balance System Using the Hall

Sensors
Junewen Chen, Hao-Sheng Hsieh, Jung-Chao Chen, Shu-Yuan Lin, Chia-Hao Yeh and
Chin-Yi Liu
Institute of Mechanical Engineering
Chung-Hua University, Hsin-Chu, Taiwan, 300
E-mail: jwchen@chu.edu.tw
ABSTRACT Integrating the Hall sensors to the extremity balance system of exercise
and rehabilitation bicycles was developed and examined in detail. We have accomplished
the complete system which is user friendly, multi-functional, high stability, and
inexpensive systems.
KEYWORDS extremity balance system, Hall sensor, bicycle, rotation, positioning,
synchronization.
86

Feb.25,2010
P-126 Investigation of the ZnO Buffer Layer Affects on the

Structural and Optoelectronic Properties of Sputtered Ga-doped
ZnO Films
C. Y. Chu1, C. Y. Hsu2,3, T. L. Sung3, C. P. Chou1, Y. C. Lin2*
1
Mechanical Engineering, National Chiao Tung University, Taiwan, R.O.C.
2
Department of Engineering Science, National Cheng Kung University, Taiwan, R.O.C.
3
Department of Mechanical Engineering, Lunghwa University of Science and
Technology, Taiwan, R.O.C.
E-mail: yuclin@mail.ncku.edu.tw
ABSTRACT - Gallium-doped zinc oxide (GZO) films were deposited on glass substrates
having different buffer layer deposition parameters by radio-frequency (rf) magnetron
sputtering. The ZnO buffer layer thickness (from 50 to 300 nm), post-annealing
temperature (from none to 400 C, in vacuum ambient for 1 hour), sputtering pressure
(from 1 to 10 mtorr), and rf power (from 50 to 150 W) affected the structural and
optoelectronic properties of the GZO films. With proper rf power and increase in
annealing temperature, the crystalline quality of ZnO buffer layer is improved, resulting
in the improvement of the GZO film quality (low resistivity and high transmittance). The
X-ray diffraction pattern for all the GZO films shows only (002) diffraction peak located
at 234.2, which reveals a hexagonal wurtzite structure with its strongly preferred
orientation along the c-axis.
KEYWORDS - Zinc oxide; buffer layer; post-annealing; resistivity; transmittance.
87

Feb.25,2010
P-127 Double Side Microlens Array for Pico Projector

Chien-Chuan Chen, Po-Hung Yao, Po-Chou Chen, Cheng-Huan Chen
Taiwan, R.O.C.
Fong-Zhi Chen, Wei-Yao Hsu
Instrument Technology Research Center, National Applied Research Laboratories
Chun-Chieh Chen
Department of Mechanical and Electro-Mechanical Engineering, Tam-Kang
University
E-mail: d947727@oz.nthu.edu.tw
ABSTRACT - Laser light source has low Etendue due to its feature of high collimation,
which is an advantage for projector illumination to have high light collection efficiency
on the microdisplay. However, there is a shape mismatching between the laser source and
the microdisplay, which requests a beam shaper to transform the laser energy into a
rectangular flat top distribution matching the active area of microdisplay without much
loss. This paper presents the use of regular micro lens array (MLA) with spherical surface
as the beam shaper. Starting from examining the near field optical behavior of a single
MLA with a pitch of 100 m and identifying it as a diffractive element, followed by the
improvement of the uniformity by using double side MLA with lateral shift, including the
design, fabrication and characterization of the optical element. The MLA has been made
with injection molding, where the mold was fabricated by ultra precision diamond
shaping method. The optical test shows high degree of polarization of the transmissive
light through the MLA, which is an advantageous feature for the liquid crystal based
projector where polarized light is required.
KEYWORDS - Laser beam shaper, microlens array, laser projector.
Simulation pattern for the double MLA

with lenslet pitch of (a) 120 m (b) 180 m
He-Ne laser shines on the

double side microlens array
88

Feb.25,2010
P-128 Dynamic Characteristics of a Recoil System when Firing

Projectiles with Mach 4.4 Muzzle Velocity
Yan-Chyuan Wu1, Ho Chang1, Tsing-Tshih Tsung1, Pei-Shu Fan2
Institute of Mechanical and Electrical Engineering, National Taipei University of
Technology1
Department of Engineering & Management, China University of Science and
Technology2
No 1, Sec. 3, Jhongsiao E. Rd, Taipei City, 106, Taiwan, R.O.C1.
No. 245, Sec. 3, Academia Rd., Nankang District. Taipei City,115,Taiwan, R.O.C2
wuychn@gmail.com
ABSTRACT - This paper discusses dynamic characteristics of the recoil system when
firing armour-piercing fin-stabilized discarding sabot (APFSDS) projectiles. They are
fired with a muzzle velocity of Mach 4.4 from a medium caliber canon either equipped
with a multi-perforated muzzle brake (MPMB) or with bare muzzle. In the recoil system,
the MPMB moderates the recoil velocity and prolongs the time of resistance to the
propellant gases force, thereby reducing the inner pressure of the recoil cylinder and
attenuating the recoil force on trunnions. The reasons for formation of each of the
dynamic characteristics are discussed. All measurements in this study can be a significant
reference for developing guns, tanks or the chassis of fighting vehicles.
KEYWORDS - dynamic characteristics, multi-perforated muzzle brake (MPMB),
intermittently symmetrical, water-hammer-like
89

Feb.25,2010
P-129 Chemical Mechanical Polishing in Elastic Contact and

Partial Hydrodynamic Lubrication: Modelling and Experiments
Hung-Jung Tsai 1, *, Pay-Yau Huang 2, Hung-Cheng Tsai 3 and Shun-Jung Chiu 4
1, 2, 4
Department of Mechanical Engineering, WuFeng Institute of Technology,
Chia-Yi 621, Taiwan
3
Graduate Institute of Industrial Design, National Kaohsiung First University of
Science and Technology, Kaohsiung 811, Taiwan
* e-mail: hjtsai@mail.wfc.edu.tw
ABSTRACT - Chemical mechanical polishing (CMP) has become a primary technique
for planarization of semiconductor wafers in sub-micro device fabrication. Increasing
demands for high uniformity and dimensional precision make previously discountable
levels of asperity, powder slurry and wafer-pad contact significant. In this study, an CMP
model considering both the elastic micro-contact mechanism and the grain flow with
roughness effects is presented. The model applies the average lubrication equation with
partial hydrodynamic lubrication theory based on Haff's theory, roughness effects using
Patir/Cheng flow factors method and elastic micro-contact theory proposed by
Greenwood and Williamson. In experiments, a test rig are used to simulate the CMP
process and acquire the signals of polishing. The shear force is measured by a load
transducer mounted on the lever and connected with the polishing head during CMP
process. Furthermore, the theoretical results are compared with the experimental data.
The theoretical and experimental results increase the understanding of chemical
mechanical polishing process.
KEYWORDS - Chemical Mechanical Polishing, Grain Flow Lubrication, Roughness,
Shear Force, Elastic Contact
Fig. 1 Comparison of predicted film thickness for Fig.2 Comparison of shear force with theoretical
various particle size and pad roughness with and experimental data at various applied loads
experimental data at various relative speeds.
(=10mv=60RPM)
90

Feb.25,2010
P-130 Wafer-transfer Robot for Ultrahigh Vacuum Processing

Equipments
Hsien-Chung Chen1, San-Ming Huang2
1
Chung Shan Institute of Science and Technology, Taoyuan, Taiwan 325, R.O.C.
2
National Lien-Ho University, Miaoli, Taiwan 360, R.O.C.
1
hcchen68@ntu.edu.tw, 2smhuang@nuu.edu.tw
ABSTRACT - A SCARA type wafer-transfer robot has been developed for

semiconductor manufacturing in an ultrahigh vacuum. In order to obtain complete
hermetic volume and/or prevent leakage of hazardous gases, feedthrough motions involve
transfer between the vacuum and motors are achieved by the use of metal bellows and
magnetic coupling. An analysis of the innovative coaxial-type magnetic coupling is
presented in this paper. A motion control system has been designed and implemented.
The structure of this wafer-transfer robot shows its advantages in maintaining ultrahigh
vacuum and makes contribution to increasing efficiency for semiconductor production
processes.
KEYWORDS - wafer-transfer, robot, ultrahigh vacuum, magnetic coupling
91

Feb.25,2010
P-134 Study of Spindle Vibration based Tool Condition

Monitoring in Micro Milling
Ming-Chyuan Lu, Wan-Hao Hsieh, and Shean-Juinn Chiou

Department of Mechanical Engineering, National Chung Hsing University, Taichung,
Taiwan 402
mclu@dragon.nchu.edu.tw
ABSTRACT - A micro tool condition monitoring system consisting accelerometer,
signal transformation, and back propagation neural network was developed in this paper.
The effect of the sensor direction, feature size, and the bandwidth of features on the
classification rate were discussed as well. In order to collect the vibration signals for
training and verifying the system, an experiment was implemented on a micro milling
platform along with 700 m diameter micro mill and SK2 workpiece. A threeaxis
accelerometer was installed on a sensor plate, which is fixed on the spindle housing, to
collect vibration signals in the three directions during cutting. The frequency domain
features representing the tool wear change was then selected based on the class mean
criteria after transforming signals from the time domain to the frequency domain by FFT.
The results show that five features selected for classification provides a better
classification rate than 4 and 3 features selected with the 30Hz bandwidth feature. Finally,
the integration of both direction signals was observed to show the better classification rate
than only implement signal sensor in the system.
KEYWORDS Tool Wear, Micro Cutting, Monitoring, Neural Network, Vibration.
92

Feb.25,2010
P-135 Prototyping and Experimental Validation for Recreation

Waterslides
Kuang-Hua Chang and Chienchih Chen
School of Aerospace and Mechanical Engineering, The University of Oklahoma
khchang@ou.edu and Chienchih.Chen-1@ou.edu
ABSTRACT This paper presents prototyping and experimental methods for validating
design of recreational waterslides obtained using computer-aided modeling and
simulation technology. A scaled physical prototype of the waterslide designed in CAD is
first fabricated using a rapid prototyping machine. The surface of the prototype is
polished and treated to reduce friction, which plays a key role in this study. The object
sliding path and time are then captured using a high-speed digital camera. The path and
time are compared with those obtained from computer simulations. The simulation and
experimental results agree well; therefore, validating the accuracy of the simulation
method. A real-world waterslide configuration is employed for the study.
KEYWORDS CAD, Waterslides, Rapid Prototyping
93

Feb.25,2010
P-137 Patterning of Crystalline ITO using Infrared Nanosecond

Fiber Laser Pulses
Chung-Wei Cheng1, Hui-Sian Chen2, Jenq-Shyong Chen2

1- ITRI South, Industrial Technology Research Institute, No. 8, Gongyan Rd., Liujia
Shiang, Tainan County 734, Taiwan, R.O.C.
2- Department of Mechanical Engineering, National Chung Cheng University, No.
168, University Rd., Min-Hsiung, Chia-Yi 621, Taiwan, R.O.C.
CWCheng@itri.org.tw (C.W. Cheng)
ABSTRACT A method is proposed for patterning crystalline indium tin oxide (c-ITO)
patterns from amorphous ITO (a-ITO) thin films on glass substrate by infrared
nanosecond fiber laser-induced crystallization followed by chemical etching. In the
proposed approach, the a-ITO film is transformed into a c-ITO film over a predetermined
area via the laser direct writing, and the unirradiated a-ITO film is then removed using an
acidic etchant solution. The fabricated c-ITO patterns are observed using optical
microscopy and scanning electron microscopy (SEM). The crystalline, optical, electrical
properties were measured by X-ray diffraction (XRD), spectrophotometer, and two-probe
station, respectively. The experimental results show a high repetition rate laser pulse
reduces thermal shock and yields a corresponding improvement in the physical properties
of the c-ITO patterns.
KEYWORDS - patterning, crystalline ITO, fiber laser
Fig. 1 XRD result of laser-crystallized

ITO films
Fig. 2 Optical transmittance spectrum of

the ITO film
94

Feb.25,2010
P-138 Fabrication Multi-Channel V-Groove Structures on BK-7

Glass Substrate Using Hot Embossing Process
Y. M. Hung, L. K. Chen, M. C. Cheng and C. K. Sung*
Department of Power Mechanical Engineering, National Tsing Hua University, Taiwan,
R.O.C.
*E-mail:cksung@pme.nthu.edu.tw
ABSTRACT Hot embossing is an emerging method to archive mass production by
pattern transformation of mold. This research demonstrated the precision V-groove
structures fabrication on BK-7 glass substrate by hot embossing process. The homemade
hot embossing equipment and submicrometer V-groove measurement system were
carried out to fabricate and measure core pitch error. Glass carbon was fabricated by
grinding method to be as mold to form multichannel V-groove structures on glass
substrate. Good formation 8 channel structures and its maximum core pitch error 0.52 um
were realized and expressed the potentials to fabricate precision multi-channel V-groove
structures on glass substrate.
KEYWORDS hot embossing, glass, V-groove structure
95

Feb.25,2010
P-139 Error Analysis of Four-Axis Rapid Prototyping System

Ya-Hui Hu 1, Kao-Hui Lin2
1
Department of Mechanical Engineering, Nanya Institute of Technology
2
Department of Mechanical Engineering, Ching Yun University
E-mail
khlin@cyu.edu.tw
ABSTRACT - By applying the principles of layer-by-layer cutting and layer-by-layer
stacking, RP, or rapid prototyping, can not only construct a complicated geometrical
model quickly and directly but also offer detailed evaluation and analysis of the result of
each workpiece as well as lower the design cost. All these attribute to the popularity of
RP, which has already become a commonly-used prototyping method. However, in
traditional rapid prototyping, single layers are processed with laser and the contour
machining is usually on a vertical plane. Usually the thickness of each layer is reduced so
as to raise the machining precision, but, on the other hand, this will definitely prolong the
machining time and make it difficult to work on large-size workpieces.
In this study, a four-axis rapid prototyping system is developed to process bevel plane
cutting, based on the principle of layered stack and the concept of lost foam casting, and
coupled with the methods of four-axis control cutting mechanism, contour layout and
spatial coordinate transformation, in order to effectively improve the error derived from
stair effect and raise the precision and machining efficiency. When the error is within a
certain range, thicker layer machining is made possible to help achieve better precision
and higher speed. In this study, the workpiece - a solid bottle of irregular shape whose
size is within 220 mm x 120 mm x 50 mmis used to compare the bevel error and the
stair error. The result shows that, when the slice is as thick as 10 mm, the T-type error
through bevel machining and the M-type error through stair machining are respectively
0.87% and 2.89%, with their machining spans 53 minutes and 44 minutes; yet, it is in
machining a layer of 3 mm that the M-type error obtained is under 1%, with its
procession span as long as 145 minutes. Therefore, it is concluded in this study that,
within the same range in error, the bevel machining speed is greatly improved, which is
about 2.8 times as fast as that of the traditional machining.
KEYWORDS - Rapid prototyping(RP), Stair machining, Bevel machining,

Four-axis Control Mechanism.
Fig. 1 Four-axis cutting mechanism
Fig. 2 The prototyped workpiece

96

Feb.25,2010
P-140 A Study of Large Scale Lost Foam using Four-axis Rapid

Prototyping System
Kao-Hui Lin1, Ya-Hui Hu 2
1
Department of Mechanical Engineering, Ching Yun University
2
Department of Mechanical Engineering, Nanya Institute of Technology
E-mail
yahuihu@nanya.edu.tw
ABSTRACT - By applying the principles of layer-by-layer cutting and layer-by-layer
stacking, RP can not only construct a complicated geometrical model quickly and directly
but also offer detailed evaluation and analysis of the result of each workpiece as well as
lower the design cost. All these attribute to the popularity of RP, which has already
become a commonly-used prototyping method. However, in traditional rapid prototyping,
single layers are processed with laser and, as a result, the contour machining is usually on
a vertical plane. In order to reduce stair errors, the thickness of each single layer is
reduced so as to gain better precision, which inevitably prolongs its machining time and
makes it difficult for large scale machining. Yet, a lost foam, which is much lighter and
more suitable for large scale machining, will be a better alternative since it can greatly
reduce the cost of production and the damage onto the environment.
Based on the principle of layered stack and the concept of lost foam casting, and coupled
with the methods of four-axis control cutting mechanism, contour layout and spatial
coordinate transformation, a large scale lost foam four-axis rapid prototyping system is
developed to process bevel plane cutting and reduce the stair errors. When the error is
within a certain range, thicker layer machining and higher forming speed can be made
possible. Polystyrene is the chosen material for bevel plane cutting.
In this experiment, the effective travel of the X axis and Y axis are set to be 600 mm x
300 mm and the size of the workpiece is 500 mm x 250 mm x 500 mm. The result shows
that the large scale lost foam four-axis rapid prototyping system indeed helps to raise the
precision and speed of the traditional rapid prototyping.
KEYWORDS - Lost Foam, Rapid prototyping(RP), Stair machining, Bevel machining,

Four-axis Control Cutting Mechanism.
Fig. 1 Four-axis cutting mechanism
Fig. 2 The prototyped workpiece

97

Feb.25,2010
P-141 A 3D IR Positioning Sensor

Po-Wen Lua, b, Rongshun Chena
a.
101, Section 2, Kuang-Fu Road, Hsinchu 30013, TAIWAN.
b.
Telecom Laboratories, Chunghwa Telecom Co., Ltd.
12,
Lane 551, Section 5, Min-Tsu Road, Yang-Mei, Taoyuan 32617, TAIWAN.
E-mail: bowenlu@ms58.hinet.net, rchen@pme.nthu.edu.tw
ABSTRACT - This paper describes a 3-dimensional IR signal source tracker, which is
composed of two 2-dimensional IR signal source trackers. Other than the incident energy,
the incident angles given by the 2D trackers are used to decide the position on the 3rd
dimension, the distance. The distance ranging ability of the 3D tracker gives the
possibility to locate a moving communicating target without the need of GPS, especially
in short-ranged applications.
KEYWORDS Tracking; Infrared; DSRC
98

Feb.25,2010
P-143 The Material Removal Rate of Metal Polishing Process

Yeau-Ren Jeng1, Pay-Yau Huang2 and Hung-Jung Tsai3
1
National Chung Cheng University
2,3
Wu Feng Institute of Technology
1
imeyrj@ccu.edu.tw
py.huang@mail.wfc.edu.tw
3
hjtsai@mail.wfc.edu.tw
ABSTRACT - The current research conducts theoretical and experimental study to

investigate the material removal rate and its mechanism during the metal polishing
process. The present study proposes a material removal rate model for metal polishing
based upon a micro-contact model which considers the effects of the abrasive particles
located between the polishing interfaces. In addition to such operational parameters as the
applied down force, the present study also considers the consumable parameters,
including workpiece surface hardness, abrasive particle size and the standard deviation of
abrasive size distribution. The current results show that the material removal rate
increases with the average abrasive particle size as shown in Figure 1. In addition, Figure
2 shows that the smaller standard deviation of abrasive particle size distribution can
increase the efficiency of metal polishing process. This study also provides physical
insights into the interfacial phenomena not discussed by previous models, which ignored
the effects of abrasive particles between the polishing interfaces during force balancing.
KEYWORDS - Metal polishing, Material removal rate, Micro-contact mechanics,
Interfacial phenomena.
Figure 1. Variation in material

removal rate with down force for
different average particle sizes.
Figure 2. Variation in material removal

rate with the standard deviation of
abrasive particle size distribution for
different average particle sizes.
99

Feb.25,2010
P-145 Machine Vision Method for Squareness Measurement

of AOI Machines
Chung-Chi TAN, Huay-Chung LIOU
Center for Measurement Standards/ITRI
Pascal_liou@itri.org.tw
ABSTRACT - Machine vision refers to the automated visual inspection of a wide range
of products such as printed circuit boards (PCBs), LCDs, transistors, and automotive
parts. It is commonly used in the manufacturing process because it is a low cost,
non-contact test method. The accuracy of inspection depends on the quality of the stages,
which address such factors as linearity, squareness, and flatness. The most important
factor is squareness, which is also difficult to measure with high accuracy.
In this paper, we describe three methods that employ different optical artifacts that can be
used to evaluate the squareness of high accuracy motion stages with a CCD camera. Two
of these methods are the diagonal method (as figure 1) and the cross diagonal method
with a one-dimension linear scale. In these methods, the linear scale is calibrated, which
implies that all the scale distances are known. This calibrated linear scale is put on the
principal diagonal of the work table of the motion stage, and the scale distances are
measured by the CCD camera of the motion stage. The differences between prior
calibration and posterior measurement are caused by the deviation in the squareness of
the motion stage. We obtain the value of that deviation through calculation and analysis.
The other machine vision method uses a two-dimensional optical artifact, which is
transparent and coated with a T-shape pattern. The reverse method is applied to this
optical artifact in order to evaluate the squareness of the T-shape pattern and the
squareness of the motion stage simultaneously.
The three machine vision method for the evaluation of squareness yields a consistent
result with a maximum deviation of less than 0.4 m. (as figure 2)
KEYWORDS - Machine vision, Squareness, CCD camera, Linear scale
T h e s q u a re n e s s e rro r c u rv e s o f th e d iffe re n t m e a s u re m e n t m e th o d s
B y d ia g o n a l m e t h o d
B y T -s h a p e p a t t e rn re v e rs v a l m e t h o d
B y c ro s s -d ia g o n a l m e t h o d
1 .2
1
sq u a re n e ss e rro r
(u m )
0 .8
0 .6
0 .4
0 .2
0
-0 .2 0
Figure 1: The linear scale was placed on a diagonal
50
100
150
200
250
300
350
400
m e a s u re m e n t p o s itio n (m m )
Figure 2: Squareness error curves of the Ultra-QV obtained

Ultra-QV platform by different methods
100

Feb.25,2010
P-146 Elucidating the Optimal Parameters in Magnetic Finishing

with Gel Abrasive
A-Cheng Wang1, Chun-Ho Liu2, Kuo-Zoo Liang3, Lung Tsai4
Department of Mechanical Engineering, Ching Yun University, 229, Chien-Hsin
Rd., Chung-Li, Taoyuan, 320, Taiwan
acwang@cyu.edu.tw
ABSTRACT - Silicone gels mixing with steel grits and silicone carbons were abrasive
media with permeance to obtain excellent polishing efficiency in the magnetic finishing
with gel abrasive (MFGA). These abrasive media were not only easily produced but also
recycled after machining, reducing the cost in MFGA; silicone gel play an important role
in this study. Therefore, silicone gel was used to locate the abrasion behavior in this study
and established mechanism of MFGA. Polishing efficiencies with or without silicone gels
were identified to finish the cylindrical rod first in our study. In addition, Silicone gels are
temperature dependent materials, so temperature in the working area was then to verify
the relation between the circulation and efficiency. Moreover, this study located the
polishing efficiency during different abrasives in MFGA. Additionally, Taguchi method
was used to elucidate the optimal parameters in MFGA. Results showed that temperature
of the abrasive medium, with silicone gel as bonding material, exceeded to 110oC in the
working area and excellent circulation could find in the side of the abrasive media.
Furthermore, Surface roughness of workpiece markedly reduced from 0.651 to 0.025m
Ra within 30 minutes. Taguchi method used the smaller the better role to evaluate
surface roughness in MFGA. S/N ratios showed that mesh no. of SG, machining time and
kinds of abrasive played the important roles in MFGA. The results also displayed that the
analytical S/N ratio was very similar to the S/N ratio of experiment. The error between
these two results can almost control at 6%.
KEYWORDS - Magnetic abrasive finishing, Gel abrasive, Taguchi method.
101

Feb.25,2010
P-151 Application of CuO Nanofilms and DSSCs for

Thermoelectric Power Generation
Ho Chang1,*, Yan-Chyuan Wu1, Chieh-Chen Chen1, Ching-Song Jwo2
and Sih-Li Chen3
1
Department of Mechanical Engineering, National Taipei University of
Technology
2
Department of Energy and Refrigerating Air-Conditioning Engineering,
National Taipei University of Technology
3
f10381@ntut.edu.tw
ABSTRACT - This paper investigates a solar-thermoelectric module for power
generation using solar energy, using the recycled external exhaust heat to generate
electric power, further enhancing the thermoelectric conversion efficiency of
thermoelectric generator (TEG) effectively. This can increase the overall output by 2.35
%. The CuO nanofilm acts as a medium that can transfer waste heat from DSSCs to hot
side of TEG. By using electrophoresis deposition, the self-prepared CuO nanofluid with
the properties of high suspension stability and good dispersion is deposited on Cu plate at
a thickness of 0.04 mm. The CuO thin film coating has a maximum thickness of 23 m
and is adhered to the TEG surface. When external exhaust heat is recycled to the CuO
thin film, heat can be more rapidly conducted to a thermoelectric material through the
film, increasing the temperature gradient between the two ends of the thermoelectric
material. Thus the heat transfer of the thermoelectric generator can be effectively
enhanced. Experimental results show that the CuO thin film coating on the surface of
TEG can enhance the overall heat conduction and thermoelectric conversion efficiency of
the thermoelectric generator by 10 %. This paper also analyzes the process parameters
and the properties of the solar-thermoelectric module coating thin film to acquire a film
structure with the best thermoelectrical conversion efficiency. It was found that this
solar-thermoelectric module can generate about 4.95 mW/cm2 under solar radiation
intensity of about 1000 W/m2.
KEYWORDS - CuO thin film, Thermal conductivity, Thermoelectric generator,
Waste heat, DSSCs
Schematic diagram of the experimental set-up and testing equipment.

102

Feb.25,2010
P-152 Gaussian Process Modeling of Process Optimization and

Parameter Correlation for Injection Molding
X.P. Liao, W. Xia, F.Y. Long
School of Mechanical Engineering, Guangxi University, Nanning, Guangxi, China
xpfeng@gxu.edu.cn, xiawei@gxu.edu.cn, fylong@gxu.edu.cn
ABSTRACT - Due to the limitation of currently parameter simulation optimization for

injection modelling process, the research is proposed to establish a surrogate model to
approximate 3D simulation using Gaussian process regression. It aims to carry out a new
approach to the optimization of parameters and find out the correlation of them swiftly
and automatically, when there are only a few training samples and no explicit regression
model is given. The proposed modelling procedures are as follows: Firstly, the
architecture of process optimization and parameter correlation system is put forward
based on Gaussian process regression; Then a surrogate model of Gaussian process (GP)
is elaborated from four aspects, i.e. Gaussian processes regression, optimization
procedure with the GP Approach, correlation of parameters and Latin hypercube
sampling (LHS); Finally, the model system development mode and implementation is
described. The implementation and simulation show that the developed process
optimization and parameter correlation system can be applied to intelligently and
automatically determine the optimal process conditions and adjustment rules for injection
molding.
Optimization of Process Conditions in
Injection Molding
Design of
Experiments for
Computer
Simulation
Design Variables
and Processing
Parameters
Moldflow or other
Numerical
Simulation
Program
Hybrid Genetic
Algorithm
Gaussian Process Model
(Surrogate Model)
Gaussian Process
Approach
Design
Objectives
Correlation
Analysis Approach
Correlation of
Parameters
Fig. 1 Architecture of GP System
Fig. 3 Interface of Process System
KEYWORDS - process optimization; parameter correlation; injection molding; Gaussian

process (GP).
103

Feb.25,2010
P-153 Dye-sensitized Solar Cells Using Natural Dyes Extracted

from Pomegranate Leaves and Mulberry Fruit
Ho Chang1,*, Yan-Chyuan Wu1, Tien-Li Chen2 and Yu-Jen Lo1
1
Department of Mechanical Engineering, National Taipei University of
Technology
2
Department of Industrial Design, National Taipei University of Technology
f10381@ntut.edu.tw
ABSTRACT - This study employs chlorophyll extract from pomegranate leaf and
anthocyanin extract from mulberry fruit as the natural dyes for a dye-sensitized solar cell
(DSSC). A self-developed nanofluid synthesis system is employed to prepare TiO2
nanofluid with an average particle size of 25 nm. Electrophoresis deposition was
performed to deposit TiO2 nanoparticles on the indium tin oxide (ITO) conductive glass,
forming a TiO2 thin film with the thickness of 11m. Furthermore, this TiO2 thin film
was sintered at 450 to enhance the thin film compactness. Sputtering was used to
prepare counter electrode by depositing Pt thin film on FTO glass at a thickness of 20 nm.
The electrodes, electrolyte (I3-), and dyes were assembled into a cell module for
measuring the photoelectric conversion efficiency of the prepared DSSCs. According to
experimental results, the conversion efficiency of the DSSCs prepared by chlorophyll
dyes from pomegranate leaf extract is 0.597 %, with open-circuit voltage (VOC) of 0.56 V,
short-circuit current density (JSC) of 2.05 mA/cm2, and fill factor (FF) of 0.52. The
conversion efficiency of the DSSCs prepared by anthocyanin dyes from mulberry extract
is 0.548 %, with VOC of 0.555 V and JSC of 1.89 mA/cm2 and FF of 0.53. The conversion
efficiency is 0.722 % for chlorophyll and anthocyanin as the dye mixture, with VOC of
0.53 V, JSC of 2.8 mA/cm2, and FF of 0.49.
KEYWORDS - Dye-sensitizedsolarcells; Chlorophyll; Anthocyanin; Dye cocktails;
Natural dyes
3.0
Chlorophyll
Anthocyanin
Dye cocktails
Current denisty (mA/cm )
2.5
2.0
1.5
1.0
0.5
0.0
0.0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
Voltage (V)
J-V characteristics of DSSCs with chlorophyll, anthocyanin and cocktail dye.
104

Feb.25,2010
P-155 Morphologic Characterization on Ablated Stainless Steel

by Femtosecond Laser Pulses
Fang-Fei Lin,1 Ting-Yu Yeng,1 Hong-Tsu Young,1and Juen-Kai Wang2,3
1
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan
2
Center for Condensed Matter Sciences, National Taiwan University, Taipei, Taiwan
3
Institute of Atomic and Molecular Sciences, Academia Sinica, Taipei, Taiwan
E-mail: hyoung@ntu.edu.tw and jkwang@ntu.edu.tw
ABSTRACT The authors report characterization of surface properties of stainless steel
ablated by femtosecond laser pulses with different pulse numbers and energies. Some
unique features of the machining results are demonstrated and discussed.
KEYWORDS ultrafast laser micromachining.
105

Feb.25,2010
P-159 Spectrally Selective Al/AlN/Al/AlN Tandem Solar

Absorber by In-Line Reactive AC Magnetron Sputtering
C. Y. Hsu1,2, D. Y. Chen3, C. H. Huang 1, Y. H. Chang1 ,Y. C. Lin2*
1
Department of Mechanical Engineering, Lunghwa University of Science and Technology,
Taiwan, R.O.C.
2
Department of Engineering Science, National Cheng Kung University, Taiwan, R.O.C.
3
Department of Mechanical Engineering, Hwa Hsia Institute of Technology, Taipei,
Taiwan, ROC
cyhsu@mail.lhu.edu.tw(C. Y. Hsu), yuclin@mail.ncku.edu.tw (Y.C. Lin)
ABSTRACT - Spectrally selective Al/AlN/Al/AlN tandem solar absorbers were

deposited onto soda-lime glass substrates using in-line alternating current (AC)
magnetron sputtering in a reactive atmosphere containing argon and nitrogen. To achieve
a reproducible and homogenous deposition process, we investigated the deposition of
single and multilayer systems for different process conditions. Two main variables, AC
power and substrate moving speed in the chamber, were varied in the ranges of 110
kW and 10.4731.4 mm/sec, respectively, to obtain films with high absorption and low
emittance. The effect of the thickness, deposition process and deposition condition, on the
optical performance of selective coatings has been studied. In the tandem solar absorber,
the first (aluminum, Al) acts as a reflector layer, the second (aluminum nitride, AlN) and
third (aluminum, Al) acts as the main absorber layer, and fourth (AlN) acts as an
anti-reflection coating. Structural features and surface morphology were studied by X-ray
diffraction and field emission scanning electron microscopy analyses. The optimized
tandem solar absorber deposited on glass substrate displayed an absorption of 0.864 and
an emittance of 0.03.
KEYWORDS - In-line process; Aluminum nitride; Selective absorbers; Absorption;
Emittance.
106

Feb.25,2010
P-160 Optimal Selection of Maintenance Actions on a

Multi-Component System
Antonella Certa, Giacomo Galante, Manuela La Fata, Gianfranco Passannanti
Dipartimento di Tecnologia Meccanica, Produzione e Ingegneria Gestionale
Universit degli Studi di Palermo
acerta@dtpm.unipa.it, galante@dtpm.unipa.it, lafata@ditra.unipa.it,
gpassa@dtpm.unipa.it
ABSTRACT The research aims to single out the maintenance actions to perform on a
series arranged components system, each one constituted by identical elements in parallel.
The system can be maintained only during some planned stops. Elements are
characterized by a constant failure rate and therefore the maintenance actions reduce to
the replacement of some failed ones. The system has to periodically carry out missions
during which the system failure is a critical event for their own success. The reliability is
the most meaningful parameter to assess the performance of systems that need to operate
without interruption for given time lengths. That being so, the faced problem is here to
assure the maximum reliability level up to the next planned stop. This problem is well
known to be NP-hard since it falls into the non linear knapsack problems. It can be easily
expressed in terms of mathematical programming but this approach becomes the more
difficult the bigger the problem dimensions are, consequently leading to an unacceptable
computational time. For this reason an exact algorithm is proposed in order to individuate
the set of components on which performing maintenance actions and for each of them
determining the number of failed elements that must be replaced so as the maximum
reliability level is achieved up to the end of the next mission. At the same time a cost and
time constraint are considered for the reliability maximization. The formulated algorithm
assures computational times considerably shorter than those reported in literature or
required by mathematical programming. This is proven by solving medium dimension
problems proposed in the literature. For larger problems, the results are compared with
those obtained by the mathematical programming approach.
KEYWORDS Maintenance optimization, reliability, multi-component system.
107

Feb.25,2010
P-161 Selection of Series System Components to Maximize

Reliability
Giacomo Galante, Manuela La Fata, Gianfranco Passannanti
Dipartimento di Tecnologia Meccanica, Produzione e Ingegneria Gestionale
Universit degli Studi di Palermo
galante@dtpm.unipa.it, lafata@ditra.unipa.it, gpassa@dtpm.unipa.it
ABSTRACT Many systems require a high reliability value during their functioning.
This can be obtained by an opportune design and, subsequently, by an effective
maintenance policy. Limiting our analysis to the design phase, the problem has been
tackled in terms of redundancy allocation problem (RAP). That is, it needs to individuate
both the number and the type of elements, chosen among a given set, to be arranged in
parallel at each system stage. The goal is the reliability maximization with a budget
constraint or the cost minimization in respect of a minimum reliability value at which the
system must operate. The paper tackles a problem that is included in the RAP: for each
component of a series system it needs to select the type among those available for that
component, in order to maximize the system reliability subject to a budget constraint. The
problem can be formulated by a binary non linear programming model. Although the so
formulated problem is less complex than the RAP for a system having an equal number of
stages, it is equivalent to a knapsack problem with multiple-choice constraints, so it is
NP-hard. Therefore, the problem becomes more and more difficult to solve for increasing
number of components and alternatives. That being so, several heuristic approaches have
been proposed in literature to solve this kind of problem taking into account
medium-large dimensions. An exact algorithm is instead proposed for solving large
dimension problems to the optimum in a very short time. The algorithm is based on an
implicit enumeration of all possible solutions allowed by some appropriate and efficient
criteria, able to drastically reduce the number of solutions to be analyzed. The algorithm
efficiency is compared with the recent heuristics proposed in literature and the
computational tests results show the capability of the new algorithm to obtain the optimal
solution for practical-size problems in a short time.
KEYWORDS Reliability maximization, multiple-choice, exact algorithm, series
system.
108

Feb.25,2010
P-162 Backlight Type Daylight Concentrator

Ming-Chin Chien,1 Chih-Hong Lin,1 and Chung-Hao Tien2,*
1
Department of Photonics and Institute of Electro-Optical Engineering, National
Chiao Tung University, Hsinchu 30010, Taiwan
2
Department of Photonics and Display Institute, National Chiao Tung University,
Hsinchu 30010, Taiwan
*Corresponding author: chtien@mail.nctu.edu.tw
ABSTRACT - A reverse engineering method based on ray tracing was utilized to

develop an ultracompact concentrator. In order to achieve an adequate compactness, we
take the advantage of conventional sidelit backlighting mechanism. As shown in Fig.1,
the optical device consists of a set of groove sheets and a wedge plate but does not need
to coat anything on the surfaces of device. The proposed layout simultaneously exhibits
two main features: coupling the collimated solar radiance into a wedge plate and guiding
the flux to the exit plane of the wedge plate for use in direct daylight. The analyses of the
backlight-reversed concentration optics (BRCO) scheme are carried out by the
nonimaging simulation tool TracePro. For the two-dimensional (2-D) BRCO scheme, the
geometric CR that equals 1/ tan v was provided within the range from 11(v = 5) to
57(v = 1) with a corresponding optical efficiency from 67.7% to 35.1%. As shown in
Fig.2, the result shows a compromise between optical efficiency and inversed aspect
ratio.. Besides the two-dimension design, the scheme can revolve along the optical axis to
extent to a three-dimension one.
KEYWORDS - ultracompact concentrator, sidelit backlighting, backlight-reversed
concentration optics.
Fig. 1 Illustration of the BRCO: 1, incident

angle; o, angle of refraction; v, vertex
angle of the wedge plate; e, exit angle.
Fig. 2 Efficiency simulated under the

extended angular radius and different
wedge plate angle v. The dashed curve
indicates overdesign, i.e., the groove set
was designed for the vertex angle v of
5 whereas the actual v changed from
the design value of 5 to 6.
109

Feb.25,2010
P-163 Does the Residual Stress of Backend Grinding Dominate

the Warping Problems in Wafer Thinning Process?
Chuan-Chieh Lin
Hong-Tsu Young*

hyoung@ntu.edu.tw *
ABSTRACT - With the increasing demand of thinner chips, flexible chips and the
stacked-die packages for 3C devices such as smart cards, RFID chips and solid state
disks, backside thinning of processed IC (Integrated Circuits) wafers has become a widely
adopted technique in advanced semiconductor manufacturing. As the final thickness of
ground wafers getting thinner and thinner, warpage problems became prominent in the
thinning process. On responding to the question Does the residual stress of backend
grinding dominate the warping problems in wafer thinning process?, this paper
conducted a series of studies on the warping problems for thinned silicon wafers. The
relations between warpage and thickness of wafers with different stress status on the
frontside (active side) were investigated with the same backend grinding parameters. The
effects of the combination and counteraction of residual stresses on the both side of
thinned wafers toward wafer warpage (Fig.1) were investigated in this work to assess the
problems while they were considered separately in industry practice. The results indicated
that the warpage induced by backside grinding could be limited to a small value while the
frontside of wafer was free from residual stress. On the other hand, the residual stress
(mainly caused by IC patterning process) on the front side of wafers dominated the
warping problems of thinned wafers even though there were no obvious warpages
observed before wafers had been thinned (Fig.2). Instead of focusing on the minimization
of residual stress induced by backside thinning process only, systematic considerations
including frontside residual stress, backside residual stress, backside metal deposition,
and wafer protecting/handling methods should be crucially taken in developing ultra-thin
wafer thinning techniques.
Warp
f
b
Fig. 1 Schema of unbalanced stresses and wafer
warpage.
Fig. 2 Wafer warpage after thinning process.
KEYWORDS - silicon wafer, thinning, warpage, residual stress.

110

Feb.25,2010
P-165 Application of Taguchi Method in the Optimization of

Fabrication Parameters for Heating-Assisted Ultrasonic
Nanoimprint Lithography
Chien-Hung Lin1, Chih-Yu Wang2, and Rongshun Chen2,3
1
Department of Mechanical Engineering, Chinese Culture University, Taipei, Taiwan.
2
Institute of NanoEngineering and MicroSystems, National Tsing Hua University,
Hsinchu, Taiwan.
3
Department of Power Mechanical Engineer, National Tsing Hua University, Hsinchu,
Taiwan.
Email: ljh13@faculty.pccu.edu.tw
ABSTRACT - This paper has presented an application of Taguchi optimization technique
to find the optimum levels of process parameters in heating-assisted ultrasonic
nanoimprint lithography (U-NIL). According to orthogonal array of L9 experimental
layout, the results show that the hot plate temperature, the waiting
steady state time,
theimprinting force, and the waiting mold release time could
significantly affect the depth of imprinted patterns. The study indicated that the best depth
of imprinted patterns of 476 nm could be obtained with the hot plate temperature of 80 C,
the waiting steady state time of 6 minutes, the imprinting force of 110 kgf, and the
waiting mold release time of 2 minutes. The corresponding result of the confirmation test
shows that the depth of imprinted patterns is near to that of the prediction. As a result,
Taguchi optimization technique provides very power tool to analyze and to find the
fabrication parameters for heating-assisted U-NIL.
KEYWORDS - Ultrasonic nanoimprint lithography. Heatingassisted. Taguchi method.
111

Feb.25,2010
P-166 Deformations Analysis of Sputtering Micromachining

Double Layer Cantilever Beams
Meng-Ju Lin, Chung-Li Hwan, Chih-Ching Lo, and Jyun-Wei Chen
Department of Mechanical and Computer Aided Engineering, Feng Chia
University
mengjlin@fcu.edu.tw
ABSTRACT - Deformation of sputtering double layer cantilever beams due to residual

stress from mismatch of thermal expansion coefficient is investigated. A theoretical
model is derived. Theoretical solution composed of device sizes and sputtering
temperature is obtained. Some cantilever beams are fabricated by silicon based
micromachining as shown in Figure 1. Theoretical results agree with experimental results
as shown in Figure 2. It is also noticed that deformation of cantilever beam due to
residual stress raises nonlinearly as bean length increasing. From analysis, cantilever
beam has similar mechanics behavior like large size beams. It is found deflection
increases linearly as temperature increasing. And deformation of cantilever beam decays
nonlinearly as beam width increasing. It is also noticed that deformation decays
nonlinearly as structure thickness increasing. If metal layer thickness is much less than
structure layer, deformation increases linearly as metal layer increasing.
KEYWORDS - MEMS, residual stress, cantilever beam, sputtering, double layer.
Figure 1 SEM of cantilever beams.
Figure 2 Deflection of beams under sputtering

temperature of 100 and 200C
112

Feb.25,2010
P-167 Study of A New Master-Slave Control Method for Machine

Tools with Dual-driving Systems
*Shih-Ming Wang1, Ren-Jeng Wang1 , Han-Jen Yu1, Da-Fan Chen1, Chun-Tai Yen2
1
Department of Mech. Engineering, Chung Yuan Christian University, Taiwan
2
Institute For Information Industry, Innovative DigiTech-Enabled, Taiwan
Shihming@cycu.edu.tw
ABSTRACT - Because of the high-speed driving capability, linear motors have become
an important driving component for high-accuracy CNC machine tools. Besides, using
two driving systems to drive one axis is a design for obtaining high acceleration for a
large machine tool. If large synchronous movement errors exit between the two driving
systems, the machine will not be able to gain high acceleration, and it could cause serious
structure deformation to the machine. To solve this problem, a hybrid variable structure
control method (HVSCM) with a Proportional + Proportional-Integrate + Feed Forward
Velocity Control (P+PI+FFVC) controller was developed to reduce the errors due to the
lag of system response and outside disturbance. In addition, a new master-slave control
method (NMSCM) combining model reference control theory and variable structure
control (VSC) theory was developed. Because the synchronous movement errors between
two driving systems are on-line determined and reduced through the designed VSC
control law, the slave driving system and the master driving system in a dual-driving
system can synchronously move without large drag force existed between them.
Experiments on a gantry-type 2-axis platform were conducted in this study. An extra load
sliding on the top of platform during the synchronous movement was added to check the
robustness of the proposed controller. Figure 11 and 12 showed that the designed
controller (NMSCM) can effectively reduce the synchronous movement errors from
0.061mm to 0.040mm, and only the NMSCM controller can have the platform to reach
the desired acceleration (3200mm/s2).
KEYWORDS - variable structure control, master-slave control, synchronous movement
error
Fig. 11. Synchronous movement errors with Fig. 12. Accelerations of the machine
the use of three controllers
with use of three controllers
113

Feb.25,2010
P-168 Rapid Prototyping for Large-Scale and Complex

Assemblies
Kuang-Hua Chang and Timothy Long
School of Aerospace and Mechanical Engineering, The University of Oklahoma
khchang@ou.edu and timlong@ou.edu
ABSTRACT This paper addresses the issue of creating physical prototypes of
large-scale and complex assemblies using Rapid Prototyping machines. There are several
technical challenges to overcome, both in software and the prototypes. The challenges in
software mainly stem from the fact that the mainstream CAD systems are not able to
directly convert large-scale and complex assemblies to valid STL models. Issues arise
also in proprietary software of RP that slices STL for build path generation due to the
complexity of the assemblies. Second, some or most of the components of the scaled
assemblies are too small to fabricate using RP or too weak to produce viable prototypes
for intended purposes. In addition, some applications require providing relative motion
between components for kinematic verification. The paper proposes a systematic
approach that addresses these issues and realizes physical prototypes serving intended
purposes. A Formula SAE race car assembly is used as the principle example for this
study.
KEYWORDS Rapid Prototyping, VRML, Formula SAE
114

Feb.25,2010
P-169 Analytical Study of Nanoscale Abrasive Cutting Model of

Three-Dimensional Quasi-Steady Molecular Statics
Zone-Ching Lin, Ren-Yuan Wang
Technology;
E-mail: zclin@mail.ntust.edu.tw
ABSTRACT -The paper establishes a novel three-dimensional quasi-steady nanoscale
abrasive cutting model to investigate the nanoscale abrasive cutting behavior in chemical
mechanical polishing (CMP) process. The paper analyzes the action force change of
abrasive particles with different diameters in different directions in the downing to
penetration and abrasive cutting workpiece process, investigates the effects of the
abrasive particles with different diameters on cutting force, analyzes the action force
change of abrasive particles with different diameters on the projected area of unit contact
face between abrasive particle and workpiece, and analyzes the distribution of nanoscale
equivalent stress and equivalent strain of the midsection of workpiece in abrasive cutting
process. Furthermore, the paper analyzes the special phenomena those are found in this
paper, the one is particular prominent regional action force and the other one is that the
diameter of abrasive particle is greater, the action force on the projected area of its unit
contact face is smaller in nanoscale abrasive cutting process. Besides, adopting the new
theoretical model developed by the paper and using the literature about molecular
dynamics, the paper undergoes the simulation of same parameter conditions, and
compares the simulation results with the results of the related literatures in order to verify
that the new model developed by the paper is reasonable.
KEYWORDS - quasi-steady molecular statics, abrasive cutting, equivalent stress,
equivalent strain
(b) Schematic diagram of midsection

of workpiece
(a) Front view

Fig. 5 Action force n X direction
Fig. 8 Shape of ridges on workpiece at the front end of the abrasive particles
th
when the abrasive particles with diameter 36.2 are at the 6.036 step(feeding
length 12.072) in the downward and penetration process
Table 3 Projected area of contact face of the abrasive particles and action force
on projected area of unit contact face of the abrasive particles in X and Y
directions with three different diameters
X direction
Y direction
Diameter
Projected Action force on Projected
Action force on
of abrasive
area of
projected area
area of
projected area
particles()
contact
of unit contact
contact
of unit contact
face ( )
face (nN/ )
face ( )
face (nN/ )
21.72
48.093
1.202
112.892
1.695
28.96
56.416
1.048
159.207
1.592
36.20
63.658
0.989
205.522
1.459
2
Fig. 9 Project area of contact face: (a) Projected area of contact face by
the right side; (b) Projected area of contact face in the direction of top
view; and (c) Contact area between abrasive particles and workpiece
115

Feb.25,2010
P-171 Binary Image Analysis and the Stress Analysis of Wafer of

Compensated Chemical Mechanical Polishing (CCMP)
Zone-Ching Lin, Yung-Hua Lee
and Technology
Email: zclin@mail.ntust.edu.tw
ABSTRACT - In the past most researches only investigate the wafer stress distribution
for CMP. And they are seldom investigation the wafer stress distribution for CCMP. And
at the specific time or a duration time contact stress distribution analysis and status
analysis do not include any the past researches. This paper uses the binary method and
FEM method to find out at the specific time or a duration time contact stress distribution
status. In this paper, it uses the binary image dividing technique to investigate the number
of polishing times and the contact frequency. As to the innovativeness of this paper, the
paper employs the concept of binary image dividing to analyze the contact situations
between wafer and polishing pad with/without pattern for CCMP, and also uses FEM to
obtain the wafer contact stress distributions of difference polishing time for CCMP. And
then uses quasi-static method, and the paper is found the special phenomena of different
strain ring. They are different with normal CMP process. One is that flat pattern pad of
CCMP is made the normal edge-strain ring effective on wafer. Another is that the
chessboard pattern of CCMP is made the groove edge -strain ring effective of on the
wafer.
KEYWORDS compensated chemical mechanical polishing (CCMP), binarization,
polishing pad with patter
Fig. 11 Distribution of the stress of polishing pad (with chessboard pattern) functioned on the wafer at different angles
Fig. 14 Phenomenon of strain rings produced inside the groove at the edge of polishing pad with chessboard pattern.
116

Feb.25,2010
P-172 Tribological Behavior of Self-Assembled Monolayer on

Artificial Teeth
J.H. Horng 1, Y.R. Jeng 2, Y.C. Chang 2, C.C. Wei 1, Y.Y. Chen 2
1
Department of Power Mechanical Engineering, National Formosa University, Yunlin,
2
Department of Mechanical Engineering, National Chung Cheng University, Chiayi,
Taiwan
1
jhhorng@nfu.edu.tw
ABSTRACT SAMs has proved its characteristics for controlling material surfaces. In
this study, it was found that SAMs has higher contact angles than artificial teeth, and the
maximum contact angle of OTS was approximately 123 when it filmed for 6 hours. In the
AFM adhesion experiment, it was found that OTS obtained the minimum adhesion when
it filmed for 6 hours. In this experiment, the reaction time was an important essential
during fabrication process, so the best choice for OTS to film was 2 hours. Moreover, in
order to masticate food well, the surface of teeth needed good friction coefficient. In
pin-on-disc experiment, ODS film and ODT film had better friction coefficient.
Furthermore, the FTIR experiment showed that the larger contact angle was the larger
absorption peak was; which means the film molecules would arranged well. It was found
from the research that the OTS of SAMs obtained the best contract angle and the
minimum adhesion force when it was filmed for 6 hours, the result showed that it could
decrease food residues and bacteria efficiently.
KEYWORDS self-assembled monolayers (SAMs), artificial teeth, biocompatible,
adhesion, wear
117

Feb.25,2010
P-177 Femtosecond Laser Machining of a Multi-D-Shape Optical

Fiber for Refractive Index Sensing
Chien-Hsing Chen1, Tzu-Chein Tsao2, Jaw-Luen Tang1*, Wei-Te Wu3*
Department of Physics, National Chung Cheng University, Chia-Yi, Taiwan
2
Department of Mechanical Engineering, National Chung Cheng University, Chia-Yi,
Taiwan
3*
Department of Biomechatronics Engineering, National Pingtung University of Science
and Technology, Pingtung,
Taiwan, R.O.C.
1*
jawluen@phy.ccu.edu.tw; 3*weite@mail.npust.edu.tw
ABSTRACT Femtosecond laser micromachining of a novel multi-D-shape optical
fiber is presented. The depth of the Dshape zone were 100 m measured from the surface
of the polymer jacket layer, and the total length was 5 mm. After thermal annealing
treatment, the mean roughness of the surface was 231.7 nm determined by AFM. The
tensile test of the multi-D-shape fibers after manufacturing was performed and the force
constant was determined to be 1870 N/m. The multi-D-shape optical fiber as a high
sensitive refractive-index sensor to detect changes in the surrounding refractive index was
studied. The refractive index resolution (sensor resolution = 3/m, = standard deviation
of signal in measuring the blank, m = slope) is 3.1310-4 RIU for refractive indices in the
range of 1.333 to 1.403.
KEYWORDS multi-D-shape fiber, femtosecond laser, sensor, refractive index.
118

Feb.25,2010
P-178 Design of LED-Based Headlamp Reflector

with Free-Form Surface
1
Kuang-Lung Huang Cheng-Yin Lee Jin-Jia Chen
Dept. of Electro-Optical and Energy Engineering, Ming Dao University, Changhua,

Taiwan, 52345, R.O.C.
Dept. of Electrical Engineering, National Changhua University of Education Taiwan,

523, R.O.C.
E-mail: khuang@mdu.edu.tw
ABSTRACT - The aim of this paper is to design an LED-based headlamp reflector with
free-form surface. After using software simulation, we found that the optical efficiency of
the reflector can be 70% and that only uses 2 sets of high power LED (3W/370LUM).
The function of designing a headlamp is to redistribute the light, which comes from the
source, to converge or diverge to the designated position locations, using reflection,
refraction or other means and to cope with the legal regulations. The method adopted in
this research is using multiple- reflection surfaces with freeform shape in one direction to
design the LED-based headlamp reflector. The advantages of this design are (a) simple
configuration, (b) easy manufacturing, and (c) less LED requirements. After simulation
with optical design software, the result meets the ECE R112 low-beam requirements.
Figure 1 Simulated LED 3D model
Figure 2 Ray tracing of LED-based

headlamp reflector
Figure 3 Illumination map for headlamp

reflector which meets the ECE R112
low-beam requirements
119

Feb.25,2010
P-180 Active Vision-Based Automatic Modeling System for

Reverse Engineering
1
Hsiang-Jen Chien, 1Ying-Chen Lin, 1Chia-Yen Chen, and 2Chi-Fa Chen

1
Dept.ofComputerScienceandInformationEngineering,NationalUniversityof
Kaohsiung,Kaohsiung,Taiwan
2
Dept.ofElectricalEngineering,IShouUniversity,Kaohsiung,Taiwan
ayen@nuk.edu.tw
ABSTRACT - A variety of shape recovery techniques has been widely applied to

manufacturing. Comparing to the use of CAD software, the object measuring techniques
are generally automated, and the produced models are irrelevant to the designers
modeling skills. This paper describes an automatic modeling system that is able to scan
object surfaces and produce high-resolution 3D models using low cost structured lighting.
The implemented technique is able to obtain a dense correspondence actively by means of
projection of encoded light patterns. A fast triangulation algorithm is carried out to
produce depth map once the correspondence is decoded. We have also designed an
environment-aware mechanism that adjusts the illumination of each light pattern
according to sensed images. This way the proposed 3D scanner is able to adapt to work
on the surface with varied reflectance properties. Comparing to laser scanners our system
is economic and easy to deploy. Furthermore, it can deal with high reflectance materials
such as metal, where a laser range finder may fail. The recovered surfaces of two chosen
objects are shown to indicate the performance of proposed system. The generated 3D
models can be further exported to CAD software for post-processing.
KEYWORDS - 3D reconstruction, structured lighting, reversed engineering.
Fig. 1 Schematics of the automatic

modeling system.
Fig. 2 Depth map of recovered surface of

a dark metal bull model
120

Feb.25,2010
P-181 Slab Analysis and FEM Simulation on Rotating

Compression Forming of Three-Layer Clad Cylinder
Considering Constant Shear Friction
GowYiTzou1,T.L.Chiang 2, M.N.Huang3,Y.S.Chang2
1
Department of Mechanical and Automation Engineering, Kao Yuan University,
1821 Jhongshan Rd, Lujhu,821 Kaohsiung, Taiwan, ROC
2
Department of Mechanical Engineering, National Ping-Tung University OF
Science & Technology, 1, Shuefu Road Rd, Neipu, 912 Ping-Tung, Taiwan, ROC
3
Graduate School, Precision Machinery and Manufacturing Technology Program,
Yung-Ta Institute of Technology & Commerce, 316 Chunshan Rd ,909 Ping-Tung,
Taiwan,ROC
gowyitzou@cc.kyu.edu.tw
ABSTRACT - An investigation of the rotating compression forming of three-layer clad
cylinder using the commercial SUPERFORM software is developed. The three-layer clad
cylinder billet compressed between the upper and lower dies is meshed by the hexahedral
elastic-plastic element. The FEM simulation also compares with the slab analysis
considering von Mises yield criteria with the circumferential frictional shear stress. In the
study, the constant shear frictions between the dies and the clad cylinder are assumed.
The effects of frictional factor, rotating angular speed, reduction, clad cylinder height
ratio, diameter height ratio, frictional factor ratio etc upon the compression force, the
effective stress, the effective strain, and the velocity field are discussed systematically.
Furthermore, Comparisons of compression forces based both modes are carried out to
prove the feasibility of both models.
500
1. FEM
400
D/H=0.694
Fig. 1 Schematic diagram of rotating compression forming of the

three-layer clad cylinder
D/H=0.690
300
2. SM
(2) SUS304
(1) SAE1039
2 (rad)
D/H=0.692
(3) SA516-70
0.2
1=699.440.11
200
0.1
2.0
1.8
1.6
1.4
1.2
1.0
0.8
0.6
0.4
0.2
0.1
0.3
(rad/sec)
0.4
0.5
2.0
1.8
(rad)
mL =0.8, i1= 0.291, i2=0.458, i3=0.25

0.1934
3=1090.040.35 , 2=1074.555
1.6
0.2
0.3
0.4
1.4
1.2
Compression Force P(kN)
KEYWORDS - Rotating compression forming, Constant shear friction, Three-layer clad

600
cylinder.
D =24mm, H =24mm, r=20%, m /m =0.5
1.0
0.5
(rad/sec)
Fig.2 Variation of compression force and frictional angles with the angular
speed for FEM and slab method
121

Feb.25,2010
P-184 An Automatic RFID and Wireless Sensing System for

Hazardous Material Inventory and Security Monitoring
Stephen P. Tseng1, Wenlung Li1, KuoYuan Hwa 2 and IFan Chang1
1
Institute of Mechatronic Engineering,
National Taipei University of Technology, Taipei 10608, Taiwan
2
Department of Molecular Science and Engineering
National Taipei University of Technology, Taipei 10608, Taiwan
stephen@ntut.edu.tw
ABSTRACT - A RFID and wireless sensing network have been developed to improve a
GHS-based intelligent management platform deployed on campus, which monitors the
hazardous chemicals inventory at a number of laboratories. The developed RFID and
wireless sensing system can automatically update the inventory of monitored chemicals
periodically or respond the servers request instantly to check the usage and storage of the
chemicals so that ignorance or misconduct of laboratory operators can be prevented or
detected shortly to assure the safety of environment. Unlike the traditional RFID
inventory control system, even the little quantity change in the chemical container can be
detected and recorded to enhance the inventory control with the innovation of this system.
This automatic system can be deployed and transmit data wirelessly in laboratories to
minimize the cost and complexity of implementation. It also can communicate with the
remote GHS-based management server via internet such that administration can oversee
the status quo of inventory of all chemicals in the laboratories with this system installed.
The implementation of this system has shown its effectiveness to improve the safety and
accuracy of inventory control of the toxic chemicals on campus.
KEYWORDS - RFID, wireless sensing, security and monitoring system.
Internet
Ethernet
Adapter
GHS-based
Management
Server
Slave Device 1
RS-232
Internet
Wireless
Communication
Slave Device 2
RS-232
Local Laboratory
Management
Software
Master Device
Can be expanded to accommodate

65536 Slave Devices
Slave Device N
The automatic RFID and wireless sensing system hardware structure
122

Feb.25,2010
P-187 Innovative Dual-mode Resonant Mode Detection of Micro

Systems Using Stroboscopic Interferometry
Liang-Chia Chen and Hsin-Sin Huang
Graduate Institute of Automation Technology, National Taipei University of
Technology
lcchen@ntut.edu.tw
ABSTRACT - A novel dual-mode resonant detection method was developed using
stroboscopic illumination for dynamic characterization of micro electro mechanical
systems (MEMS) or micro-opto-electro-mechanical systems (MOEMS). Dynamic 3-D
system characterization has been become extremerely important for system analysis and
optimization of MEMS or MOEMS. An innovative method of automatic resonant mode
detection employing both of passive- and active-mode stroboscopic interferometry was
developed for nano-scale dynamic characterization of microstructures. Considering that a
tested microstructure having an individual vibrating excitation source is either analyzed
by the passive or active stroboscopic method, an optical microscope based on
stroboscopic interferometry was established to achieve accurate and robust resonant mode
detection of microstructures. To verify detection accuracy, the developed method was
performed to detect the resonant modes of an AFM micro cantilever beam and the
measurement results were benchmarked with a calibrated instrument. Some experimental
results have confirmed that the developed method is capable of detecting accurate
resonant frequency of micro systems which vibrate either synchronized or independent
from the strobed lighting control.
KEYWORDS - Dynamic characterization, stroboscopic interferometry, MEMS,

Resonance frequency, MOEMS
123

Feb.25,2010
P-188 The Analysis of Logistics Model and Its Service Preferences

of Manufacturing Industry in Special Economic and Trade Zones
Wythe W.Z. Lin1, L.W. Ting2, Y.S. Zhang1, Amy J.C. Trappey1, 2 and W.T. Lee3
3
Identification and Security Technology Center, Industrial Technology Research
Institute, Taiwan
1
Dept. of Industrial Engineering and Engineering Management, National Tsing
Hua University
2
Dept. of Industrial Engineering and Management, National Taipei University of
Technology
1
trappey@ie.nthu.edu.tw, 2 trappey@ntut.edu.tw 3WT_Lee@itri.org.tw
ABSTRACT - With countries and enterprises promoting globalization, international

trades become no boundary in the open markets. In order to respond to the trend of
globalization and to improve enterprise competitiveness, governments utilize the global
logistics business model to develop many Free Trade Areas (FTA) or trade-oriented
science parks to provide the platforms for enterprises global operations. Taiwan, in the
center of the Asia Pacific, enjoys the shortest flying time to five major ports in Asia
Pacific and to the seven biggest cities in western Pacific region. It deserves to be the
logistic center for the Asia Pacific area focusing on the high-tech production and the
advanced customs clearance administration [1]. Therefore, if we can relax the regulatory
constraints and ensure Taiwan being a free-trade business area, we can attract foreign
investment and build our economic competiveness. The purpose of this study is to
analyze the correlation between the logistic models and the setting of Special Economic
and Trade Zones (SETZ) inside or outside the Export Processing Zone (EPZ) and to
depict the impacts and benefits from logistic demand after the setting of SETZ. Thus,
manufacturing industry in SETZ set the operational and business strategies by taking
advantages of the SETZ setting and its logistics services.
KEYWORDS - Free Trade Areas (FTA), Special Economic and Trade Zones (SETZ),
Export Processing Zones (EPZ).
124

Feb.25,2010
P-189 A Study of the Micro-strengthening Process with

Experiment and Simulation
You-Min Huang* & Yao-Min Chang
Department of Mechanical Engineering , National Taiwan University of Science
and Technology,43 Keelung Road Sec. 4, Taipei 106, Taiwan
ymhuang@mail.ntust.edu.tw
ABSTRACT - There has been a significant research interest in metal micro-forming for
the last ten years. However, neither a methodology nor an exact micro mechanical
property has been well determined. Traditional numerical programs are also useless for
analyzing the cases of micro scale. Therefore, several experiments are carried out in this
research to point out the influence of the size effect and simulation results. These were
completed using the analysis program programmed by the authors of this paper. Based on
the comparison between the experimental results and simulation results , a limit analysis
for micro scale can be found.
To find the limit analysis of this program for micro-scale numerical analysis, this
study shows the comparison results between the experimental results of the
micro-strengthening test and simulation results of numerical analysis. First, four
micro-iron sheets of different thickness were chosen as the experimental materials.
Second, these samples of different grain sizes are made by heat treatment with different
temperatures. Then these samples of different grain sizes are used to conduct the
experiment. According to the experimental results, the limit analysis of this program has
been determined. Finally, the suitability of this program for analyzing the micro scale
case is obtained.
KEYWORDS - micro-strengthening , size effect, micro-forming
125

Feb.25,2010
P-190 Low-Temperature Carbon Nanotube Films Fabrication

Technology
Sheng-Chin Su and Chien-Chong Hong*
Hsinchu, Taiwan
*Email: chong@pme.nthu.edu.tw
ABSTRACT - This paper presents a low-temperature carbon nanotube (CNT) film
fabrication technology and makes demonstration on polymer cantilever beam
microactuation with carbon nanotube films. Its difficult to integrate with polymer
structures due to its high-temperature fabrication process. In this work, we use spraying
deposition technology to realize CNT deposition at near room temperature on polymer
substrates. It has the advantages of low equipment cost, low-temperature process and ease
of integration. Experimental results of the developed low-temperature CNT fabrication
technology have shown good performance to pattern thin CNT films on 4 wafer and
polymer cantilever beam. The deposition thickness of CNT films can be easily controlled
by times of short pulse spraying process. Due to its easy fabrication, simple design, low
cost, these features make the developed technology to integrate CNT with polymer-based
microstrcutures for MEMS and BioMEMS applications.
KEYWORDS carbon nanotube film, low-temperature spray-on process, optical
actuation
Figure 1. Schematic illustration of spraying system for CNT films

deposition at near room temperature (<85).
Figure 3. Fabrication process of polymer cantilever beam with spray-on

carbon nanotube films; (a) fabrication steps, (b) the fabricated polymer
cantilever beam with spray-on CNT films, and (c) the top view of the
fabricated polymer cantilever beam with spray-on CNT films.
Figure 2. The developed spraying system, the fabrication process, and the
fabricated devices.
Figure 4. The plot of the deposited CNT thickness with different spraying
pulse times.
126

Feb.25,2010
P-191 A Sculptured Surface Digitizing System Using a Laser

Scanning Probe with Multiple Detectors for Reverse Engineering
Dar-Yuan Chang1* Shuo-Jen Lee2
1
Department of Mechanical Engineering, Chinese Culture University
2
Department of Mechanical Engineering, Yuan-Ze University
*
E-mail: zdy4@faculty.pccu.edu.tw
ABSTRACT This paper presents a single-point laser probe with multiple detectors for
conduct the object scanning process in sculptured surface digitization used in reverse
engineering. The probe consists of a point laser source and four linear high-resolution
PSDs (Position Sensitive Devices). Its target scanning distance is 180mm from the probe
to the measured surface, with a measurable range of 90mm. Assuming a diffusive surface,
the displacement from the light spot on the measured surface to the probe along the
light-axis can be derived by the Lambert model. In addition, the inclination angle of the
measured point from the vertical axis of the light beam is also calculated. In this study,
the probe is mounted on the NC machine integrating the three-axis controller, a personal
computer and an A/D card to conduct the digitization process. Functions of the probe are
verified by a standard half-sphere model. The test results show that the displacement
resolution is reaching 50m, and the measurable range of the inclination angle is 80
degrees. Two solid models have digitized to demonstrate the scanning results.
KEYWORDS Laser scanning probe, Multiple detectors, Lambert model, Revere
engineering, Object digitization.
127

Feb.25,2010
P-192 A Birefringence-free Compression Molding Process for

Optical Plastics Lenses
Chung Yen Wang a, Yi Heng Sun b and Pei Jen Wang c
Dept. of Power Mechanical Engineering, National Tsing Hua University,
Hsinchu 30013, TAIWAN
a
d9633827@oz.nthu.edu.tw, bg9533552@oz.nthu.edu.tw, cpjwang@pme.nthu.edu.tw
ABSTRACT - This paper investigates the process of precision compression-molding of

plastics lenses with near-zero residual birefringence in the molded lenses. First, plastics
preforms are injection molded by a conventional injection molding machine by net-shape
molding technology. The preforms are then re-heated by infrared heaters and
compressed under hydrostatic pressure conditions for finish-forming and stress-relieving.
Once the preforms are heated above glass transition temperature, the moldings would
release the frozen-in residual-stresses and retain the form accuracy via low pressure
compression employed for shrinkage compensation. This compression molding process
indicates major advantages of low costs, high production efficiency, and near-zero
birefringence. In this paper, experiments incorporated with Taguchi method are
conducted for parameter optimization in residual stresses and form accuracy. The final
results shown in Table 1 show that plastic lenses optimized for form accuracy could have
p-v values smaller than 350 nm plus RMS surface roughness less than 60 nm. More
importantly, the plastic lenses are molded with near-zero birefringence throughout the
process and the comparisons are shown in Fig. 1.
KEYWORDS - Compression Molding, Plastic Lenses, Residual Stresses.
Table 1 Form accuracy of compressed lenses

under optimal process parameters
p-v
RMS surface
Run
values
roughness
Exp1
331nm
51nm
Exp2
315nm
56nm
Exp3
325nm
55nm
Preform
Molded Lens
Fig. 1 Comparisons of residual birefringence
patterns before and after the compression process.
128

Feb.25,2010
P-193 Analysis of Laser-Activated Deposition of Copper Lines

using Microbe Metabolite
H. Hocheng, K.E.Chang, J.H.Chang
Department of power mechanical engineering National Tsing Hua University, Taiwan
R.O.C.
hocheng@pme.nthu.edu.tw
ABSTRACT
A two-dimensional analytical model for a maskless fabrication with laser-activated
deposition process through the metabolite of Acidithiophilic chemolithotrophic bacteria
Acidithiobacillus ferrooxidans (A.f.) is developed by adopting the moving point heat
source on the substrate. The rectangular coordinate system and Gaussian laser energy
distribution are used in the whole process of chemical liquid deposition. As shown in Fig.
1, The 3-D transient temperature profile along the laser beam on copper substrate has
been correlated to the deposited line width by numerical analysis.
The laser effective energy is subtracted from the cover slide, namely 8.5% decreased,
and is calculated by PCGrate-S softwave. The vaporization energy loss in the 30m
reaction area is considered in the analysis.
The previous studies revealed that the copper deposition line width at various laser
power of 150, 180 and 235mW has positively correlation with the temperature level,
while negatively correlated with the scanning speed of 10, 15, and 20m/s. Observing the
simulation results in Fig.2, one can calculate the deposition line width when the
accumulated energy as shown by the area under the temperature curve is higher than the
reaction threshold for the deposition.
KEYWORDS - laser, metal deposition, maskless fabrication, T.f., metabolite
Fig. 1 3-dimensional transient temperature on substrate
Fig. 2 Temperature evolution on substrate
129

Feb.25,2010
P-194 Overview and Applicability of Residual Stress Estimation

of Film-Substrate Structure
Tsung-Lin Chou1, Shin-Yueh Yang1, and Kuo-Ning Chiang1*
1
. Advanced Microsystem Packaging and Nano-Mechanics Research Lab.
Department of Power Mechanical Engineering
National Tsing Hua University
*
Corresponding Author, E-Mail: Knchiang@pme.nthu.edu.tw
ABSTRACT - Residual stresses arising from thermal mismatch in layered structures rank
among the major causes of mechanical failures in light-emitting diodes (LEDs),
integrated circuits (IC),electronic packages, and microelectromechanical systems (MEMS)
structures. Applying analytical solutions to predict or calculate residual stresses
magnitude and distribution in thermostat-like multilayer structures has been widely
adopted by many researchers. This research is based on the multilayer theories of a
film-substrate system, such as Stoneys equations [9]-[11] and Suhirs formula [17]. To
discuss and distinguish their characteristics, finite element analysis (FEA) numerical
solutions and multilayer theory analytical solutions are compared and analyzed. This
encompasses the theories application spectrum as well as their prediction capability. This
work not only discusses the theories property and workability but also fabricates a
filmsubstrate bilayer structure made by gallium arsenide (GaAs) wafer to demonstrate the
feasibility of the finite element method (FEM) and bilayer theories in experiments. The
experimental result demonstrates that FEM is a feasible approach in predicting multilayer
structures mechanical behavior. Further, these theories workability is provided in a
detailed discussion and definition.
KEYWORDS Stoneys equation; Suhirs formula; residual stress; finite element
analysis
130

Feb.25,2010
P-195 Experimental Investigation of Efficient Deburring at

Intersecting holes
S.L Ko, K.U Lee, T.P Ton
School of Mechanical Engineering, Konkuk University
slko@konkuk.ac.kr
ABSTRACT - Most recently manufactured automobile and hydraulic parts contain
intersecting holes. The remained burr at intersecting holes is very difficult to be removed
because of its invisibility and inaccessibility. Besides, there has been no efficient
deburring method for burr at intersecting holes. Therefore development of new efficient
deburring method for the burr at intersecting holes has become a very important issue.
Experiments have been performed to analyze how deburring can be efficiently carried out
at the intersecting hole. Most of the commercial deburring tools show good deburring
performance for the burr formed on the flat exit surface but not good for the burr on the
inclined exit surface and intersecting holes. Deburring by several commercial tools are
compared and analyzed. For efficient deburring at intersecting holes, new deburring tool
was designed and manufactured, which shows very good deburring result.
KEYWORDS - Deburring, Intersecting holes
(a) Before deburring
(b) After deburring
1
2.
2
1.
1
0.
7
(c) Before deburring

1
0.1
8
0.08
0.1
0.06
0.04
0.02
0.02
0.06
0.04
0.08
By Burr-off tool
By new deburring tool
(d) After deburring(900rpm, 90mm/min)
Fig. 9 Deburring result by new deburring tool(main 14, cross 9)
5
131

Feb.25,2010
P-198 An Investigation into Material Removal using

Electrokinetic Effects on Abrasive Particles
C.S. Leo1, J.C.M. Chua1, S.H. Ng2, C. Yang1, S. Danyluk3 and D.L.Butler1,2
1
School of Mechanical and Aerospace Engineering, Nanyang Technological
University, Singapore,
2
Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore,
638075
3
George W. Woodruff, School of Mechanical Engineering, Georgia Institute of
Technology, USA,
mdlbutler@ntu.edu.sg
ABSTRACT To achieve better precision during the fabrication of micro-components
with minimal defects, several material removal techniques have evolved over the recent
years. Material removal utilizing the electrokinetic phenomenon is one such technique [1]
that was recently proposed to allow removal of material without any physical contact
between the tool and the workpiece. The proposed method removes material from the
targeted area by utilizing the electrokinetic effects of the abrasive SiO2 particles in slurry
when they are under the influence of the electric field. The technique was developed and
carried out where it was proven that material removed by utilizing this method was feasible.
The performance of the material removal method was tested on both gold and aluminum
sputtered wafer. Material removal rates in the range of 500 Angstroms/Hr to 3000
Angstroms/Hr were observed. During the study, surface quality of the targeted areas were
also evaluated by using an atomic force microscope where it is possible to achieve surface
roughness (RMS) in the nanometric level.
KEYWORDS Abrasion, Erosion, Electrokinetic
132

Feb.25,2010
P-200 A Novel Tool Setting Method for Wedge Groove Surface

Machining on an Ultra-precision Machine with B-axis
Jr-Rung Chen1, Chao-Chang A. Chen1*, David Lee Butler2,3
Xin Ding 3, Kah Chuan Shaw 3
1
and Technology, Taipei, Taiwan
2
School of Mechanical & Aerospace Engineering, Nanyang Technological
University, Singapore
3
Singapore Institute of Manufacturing Technology, Singapore
*E-mail artchen@mail.ntust.edu.tw
ABSTRACT - This paper expresses an algorithm for an optical tool setting procedure
with two step B-axis rotations for cutting micro wedge surface grooves with a large side
angle. Experimental results show that the accuracy for a 10 times magnification vision
system is around 1 micron and the experiment has successfully compensated the error
from 555 nm to less than 30 nm. The developed algorithm can be integrated into the
tool path to compensate the cutting profile. Moreover, a designed groove could also be
used for tool calibration on the B-axis.
Future work will focus on the evaluation of the
cutting errors of the developed technique.
KEYWORDS - Tool Setting, Ultra-precision machine, Compensation, B-axis
Fig 1 the experimental setup
Fig 2 The alignment result before cutting on

monitor screen using the optical method
133

Feb.25,2010
P-203 Study of Thermal Crack for Glass Cutting

1
Chiung-Chieh Su , Shih-Shan Wei, Shih-Chu Huang

Chung-Shan Institute of Science and Technology, Taiwan, Republic of China
1
ccsu3911@ms15.hinet.net
ABSTRACT - The thermal cracking may be analyzed through Bueckner's theory, strain
energy density theory, and the numerical analysis scheme. There are two primary factors
affecting the crack propagation. The first one is the position of crack tip and the second
one is whether the equivalent load on cracked surface containing shear stresses. From the
view point of equivalent loading, if the crack tip is kept in the area where the tension
stress is as large as possible and the shear stresses is as small as possible, compared with
the local tension stress, the cutting speed and quality will be greatly improved.
KEYWORDS - glass cutting, thermal Crack, laser.
134

Feb.25,2010
P-213 Characteristics and Microstructure of T3

Copper/35CrMnSi Steel Dissimilar Metals in Inertia Radial
Friction Welding Joint
LUO Jian1,a, WANG Xiangji1,2, LUO Qian3, XU Xiaoling4
1. The State Key Laboratory of Mechanical Transmission, Chongqing University,
Chongqing 400030,China
2. College of Material Science and Engineering, Chongqing University, Chongqing
400030, China
3. Lianyuan Iron & Steel Co. Ltd of Hunan Hualing Group, Loudi 417009, China
4. Southwest Institute of Technology and Engineering, Chongqing 400039, China
a
luojiancqu2007@yahoo.com.cn
ABSTRACT -A T3 copper annular block was welded surround a 35CrMnSi low alloy
high strength steel shaft by inertia radial friction welding (IRFW). Characteristics and
microstructure of the joint have been analyzed by optical microscope (OM) and scanning
electron microscopy (SEM). Element diffusion near the interface has been detected by
energy dispersive x-ray spectroscopy (EDXS). Experimental results show that
superplastic deformation is found in copper side close to the steel, grain size of which is
much smaller than that of the copper base mental, while in the steel side, there is no
significant deformation occurring, but there existing a quenching zone with acicular
martensite. In addition, there is diffusion or infiltration of elements occurring at the
interface region during welding.
KEYWORDS - Friction welding; Copper; Low alloy high strength steel; Interface
diffusion
Fig. 1 Curves of main parameters
135

Feb.25,2010
P-214 Study on Compression Forming of Double-Layer Clad

Sheet with Coulomb Friction
Gow-Yi Tzou1, Min-Yuan Hsieh2, Shinn-Horng Chen2
1
Department of Mechanical and Automation Engineering, Kao Yuan University,
Kaohsiung821, Taiwan, ROC
2
Department of Mechanical Engineering and Graduate Institute of Mechanical and
Precision Engineering, National Kaohsiung University of Applied Sciences,
Kaohsiung 807, Taiwan, ROC
1098403102@cc.kuas.edu.tw
ABSTRACT - This study carries out an FEM simulation on compression forming of
double-layer clad sheet by SUPERFORM commercial software. Frictions between the
upper and lower dies and the clad sheet are assumed as Coulomb friction, but can be
different. The shape of the outer surface, the equivalent stress-strain distributions,
velocity field, and the compression force can be determined form the FEM. With a view
to verifying the results of FEM Simulation, the simulation results can be compared with
the analytical model based on the slab method. In this study, effects of various
compression conditions such as the clad thickness ratio, the shear yield stress ratio, the
frictional coefficient ratio, the width thickness ratio, the frictional coefficient etc on the
compression characteristics are explored by the both methods. The compression force
based on both models is compared to prove the feasibility of the FEM simulation.
KEYWORDS - FEM, Slab method, Double-layer clad sheet, Coulomb friction.
Fig. 1 The schematic diagram of the double-layer clad sheet

compression forming
Fig.2 Comparisons of width thickness ratio on the

compression forces obtained by the two methods for various
frictional coefficient ratios.
136

Feb.25,2010
P-215 Study of SIMOX Radiative Properties with FT-IR

Spectrometer
Jen-Chieh Tsao1,a, Chung-Jen Tseng1,b, Chi-Fu Chen1,c, Chiung-Chieh Su2,d
1
Department of Mechanical Engineering, National Central University, Taiwan,
Republic of China
2
a
jacky_tsao@kimo.com, bcjtseng@cc.ncu.edu.tw, cmrchief75@gmail.com,

d
ccsu3911@ms15.hinet.net
ABSTRACT - The first accurate measurements of the temperature dependent radiative

properties of separation by implantation of oxygen (SIMOX) wafers are reported in the
present study. These measurements were performed for the temperature range from room
temperature to 800 C and the wavelength range from 0.7 to 20 m, using a Fourier
Transform Infrared (FT-IR) spectrometer with a specifically designed high temperature
cell. An empirical simulation, based on ray-tracing and transfer-matrix method for
multi-layers modelling, has been developed and validated by experimental data. These
studies may lead us to choose the appropriate wavelength of pyrometer for the process
monitoring of SIMOX as well as to obtain reliable radiative properties for thermal
analysis. Finally, the limitations of analytical model are also discussed.
KEYWORDS - Emissivity, Radiative properties, SIMOX, Pyrometer, SOI.
25 oC
80
Transmittance (%)
Transmittance (%)
100
Modeling
Experimental data
60
40
20
800 oC
80
Modeling
Experimental data
40
10
Reflectance (%)
Reflectance (%)
25 oC
80
Modeling
Experimental data
60
40
20
0
10
100
100
800 oC
80
Modeling
Experimental data
60
40
20
0
1
100
10
10
100
80
25 oC
Emittance (%)
Emittance, %
80
Modeling
Experimental data
60
40
60
40
20
0
20
800 oC
Modeling
Experimental data
-20
1
0
1
10
Wavelength (m)
10
Wavelength (m)
Fig.1 Measured and simulated transmittance, reflectance, and emittance of

SIMOX-front-side between 1 ~ 20 m at 25 and 800 C
137

Feb.25,2010
P-217 Radiative Property Study for Silicon Wafer at Different

Doping Levels
Jen-Chieh Tsao1, Chung-Jen Tseng2 and Chi-Fu Chen3
Department of Mechanical Engineering, National Central University, Taiwan,
Republic of China
1
jacky_tsao@kimo.com, 2cjtseng@cc.ncu.edu.tw, 3mrchief75@gmail.com
ABSTRACT - The first experimental validation of temperature dependent radiative

properties of heavily doped silicon wafer for the revised Drude model is presented. Using
the Fourier Transform Infrared (FT-IR) spectrometer with a specifically designed high
temperature cell, the measurements were performed from room temperature to 800C and
the wavelength is ranged from 0.7 to 20 m. Besides, based on updated the Drude model
parameters, the predicted values were hence determined. The results show that a good
agreement between prediction and experimental data is over a wide Infrared region.
Therefore, the model presented is an efficient way to obtain the dielectic function and
radiative properties of doped silicon at elevated temperatures.
KEYWORDS - Radiative properties, Silicon wafer, Doping Levels, FT-IR spectrometer,
Emissivity.
100
Heavily doped Si wafer
25oC
Simulation
Experimental data
80
Reflectance, %
Reflectance, %
100
60
40
20
0
3
4 5 6 7 8 9 10
Wavelength, m
60
40
20
0
20
Heavily doped Si wafer

800oC
Simulation
Experimental data
80
3
4 5 6 7 8 9 10
Wavelength, m
20
Fig. 1 Reflectance measurements by DTGS detector, where the dash curves are predicted with the
present model.
1
1x10
(d) at 1000K
6
(b) n at 1000K
19
5.310
19
1x10
5.310
20
ND(cm-3 )=110
19
1.610
18
1.1101 7
5.210
Extinction coefficient,
Refractive index, n
18
ND (cm-3)=110
-1
5.210
20
19
1x10
1.610
-2
1x10
16
110
1.110
17
-3
1x10
1
1
-4
1x10
10
Wavelength, (m)
100
10
Wavelength, (m)
100
Fig. 4. Calculated refractive index and extinction coefficient of n-type silicon for different doping levels
at 1000K.
138

Feb.25,2010
P-220 Study on the Thermal Effect of Electrochemical

Micro-Machining of Hydrodynamic Bearing by Using Numerical
Simulation
D.Y. Chang1, P.C. Shen2,a, J.C. Hung3, S.J. Lee2, K.T. Yang2
1
Department of Mechanical Engineering, Chinese Culture University, Taipei, Taiwan
2
Department of Mechanical Engineering, Yuan-Ze University, Taoyuan, Taiwan
3
Regional R&D Service Dept., Metal Industries Research & Development Centre,
Taichung, Taiwan
a
mebcshen@saturn.yzu.edu.tw
ABSTRACT- For electrochemical micro-machining (EMM, the tool has no stress and
wear generation, and the work piece is not limited by the hardness and strength of
material. Hence, the work piece with high hardness and complex geometry can be
processed and shaped up in one time by using EMM. The EMM is suited for the
processing of hydrodynamic bearing. However, the selection of processing parameters
and the tool design of EMM have very large effect on the manufacture precision.
In this study the finite element method with five multi-physics coupling fields such
as electric field, fluid field, convection and conduction field, convection and diffusion
filed and moving mesh field are used to determine the temperature distribution of
electrolyte between tool and hydrodynamic bearing and the surface topography of
hydrodynamic bearing in the EMM process as shown in Figure 1. These results further
can be used to discuss the effect of hydrogen, processing voltage, electrolyte velocity on
the increasing electrolyte temperature and the groove depth distribution of bearing. The
temperature distribution of cathode surface determined and applied to the FEM model of
cathode tool to analyze the temperature distribution, thermal stress and thermal strain of
tool. These discussions can be taken as the reference of processing parameter selection
and tool design.
KEYWORDS - electrochemical micro-machining, hydro -dynamic bearing, thermal
effect
(a)
(b)
Fig. 1 Simulation results with voltage 3V and electrolyte 0.5m/s:
(a) temperature and (b) processing depth distributions.
139

Feb.25,2010
P-221 Analysis Micropattern Fabrication by Ultrasonic Micro

Embossing
Hsin-Chung Cheng1,2 , Jeou-Long Lee3 ,Chiung-Fang Huang1,2, Yi Lin4 , Yung-Kang

Shen5,6,*, Chih-Wei Wu7, Ming-Jyh Chern8
1
School of Dentistry, College of Oral Medicine, Taipei Medical University,
2
Department of Dentistry, Taipei Medical University Hospital,
3
Department of Chemical and Material Engineering, Lunghwa University of Science and
Technology, Taoyuan 333, Taiwan, R.O.C.
4
Department of Business Administration, TakMing University of Science and Technology,
5
Bio-Medical Nano/Micro Forming Laboratory, School of Dental Technology, College of
Oral Medicine, Taipei Medical University,
6
Research Center for Biomedical Implants and Microsurgery Devices, Taipei Medical
University,.
7
Department of Mechanical & Mechatronic Engineering, National Taiwan Ocean
University,
8Department of Mechanical Engineering, National Taiwan University of Science and
Technology, Taipei 106, Taiwan, R.O.C.
*ykshen@tmu.edu.tw
ABSTRACT - This study replicates the micropattern from a mold insert using ultrasonic
micro embossing. A mold insert and plastic film are heated above the glass transition
temperature of plastic, and the softened plastic is flowed into the micropattern of a mold
insert by applying pressure via a conventional technique. A longitudinal ultrasonic wave
is added to the ultrasonic micro embossing process. The longitudinal ultrasonic wave
generated by an ultrasonic system at a frequency of 35 KMz, has an amplitude of 20m
and output power of 900 W. The micropatterns of the Ni mold insert are groove-shaped
and 2-m wide and 200-nm deep. The Polypropylene (PP) and Poly(Methyl methacrylate)
(PMMA) are chosen as the replication materials. This study identifies the replication
properties of the plastic film using different process parameters (delay pressure, vibration
pressure, hold pressure, delay time, vibration time and hold time). Results of this study
demonstrate that vibration time is the most important process parameter for ultrasonic
micro embossing. The surface roughness of the micropattern of the Ni mold insert and
molded PP is 5.332 nm and 2.345 nm, respectively.
KEYWORDS - Micropattern, ultrasonic micro embossing, process parameter, replication,
surface roughness.
140

Feb.25,2010
P-223 Fabrication and Analysis of Surface Acoustic Wave Device

based on ZnO Thin Film
Hsin-Chung Cheng1,2, Jeou-Long Lee3, Chiung-Fang Huang1,2 ,Yi Lin4, Yung-Kang
Shen5,6,*
1
School of Dentistry, College of Oral Medicine, Taipei Medical University,
2
Department of Dentistry, Taipei Medical University Hospital,
3
Department of Chemical and Material Engineering, Lunghwa University of Science and
Technology,
4
Department of Business Administration, Takming University of Science and Technology,
5
Bio-Medical Nano/Micro Forming Laboratory, School of Dental Technology, College of
Oral Medicine, Taipei Medical University,
6
Research Center for Biomedical Implants and Microsurgery Devices, Taipei Medical
University, Taipei 110, Taiwan, R.O.C.
*ykshen@tmu.edu.tw
ABSTRACT - Surface acoustic waves (SAW) can be employed to determine mass

variations using the changing frequency method. It is fast and highly sensitive. In the last
decade, they have been exploited not only in communication systems but also in the field
of sensors. SAW can yield information on density, humidity, consistency and viscosity. In
this study, a semiconductor process is adopted to fabricate microstructure of SAW, and
then measure the properties of the SAW. RF magnetron sputtering is used to grow a zinc
oxide thin film, and then the lift-off method is applied to fabricate an inter-digital
transducer, then the microstructure of SAW can be done. In measuring the properties of
thin films, this work investigates the results of sputtering using various amounts of
oxygen (O2/(Ar+O2)) with a zinc (Zn) target and a zinc oxide (ZnO) target. The results
show that either the Zn target or the ZnO target increases the amount of oxygen, and the
growth rate of the zinc oxide thin film is thus reduced. In the digital signal part, the
micro-structured area of SAW is measured using a network analyzer. When the ZnO thin
film is sputtered using 30% oxygen, the digital signal is better. The results indicate that
the response frequency is between 396 and 397 MHz, and the insertion loss is 13 dB. The
measurement obtained with a microstructure of SAW is similar to that obtained with
unstructured SAW. Therefore fabricated microstructure of SAW is practical.
KEYWORDS - Surface acoustic wave, ZnO film, RF magnetron sputtering,
Semiconductor process.
141

Feb.25,2010
P-228 The Precise Alignment System of Vacuum Assembly in

TFT-LCD Cell Process
1
Zan-Yu Chen , Meng-Shiun Tsai , Wen-Chueh Pan , Jer-Shyoung Lai , Chin-Horng

1
Yau
1

2
Department of Mechanical Engineering, National Chung Cheng University

E-mail: andonychen@yahoo.com.tw
ABSTRACT Compared with the conventional LCD vacuum injection method, the
one drop filling (ODF) technology can save the process time and liquid crystal material
in the large-sized TFT-LCD cell process. However, the precise alignment is difficult to
accomplish in the ODF assembly process especially for new generation 8.5G or beyond
8.5G. Accordingly, there are two main problems in the ODF assembly process when the
th
substrate size is enlarged beyond the 5 G(1100mmx1300mm) that is 1) an extremely
accuracy vacuum assembly system technology should be invented, 2) when two
substrates are bonded together, how to avoid destroying the sealant. In this paper, the
technology of the small vacuum chuck, QFT controller, and PZT piezoelectric actuator
are presented for solving the above problems.
KEYWORDS ODF, small vacuum chuck, PZT piezoelectric actuator, Quantitative
Feedback Theory
142

Feb.25,2010
P-229 A Study on Crystallizing Effect of Annealing for InN film

Ta-Ching Lia*, Tzu-Tao Yuanb, Ping-Yu Kueib, Wei-Chun Changb and Wen-Jen Lina
a
The 5th Div., Chung-Shan Institute of Science and Technology, Taiwan
b
Chung-Chang Institute of Technology, National Defense University, Taiwan
g950102@gmail.com
ABSTRACT - Indium nitride (InN) epi-films were grown on the low temperature InN as
buffer layers which were annealed in different temperatures by low pressure Metal
organic chemical vapor deposition (MOCVD). Poly-crystalline InN epi-films were
obtained because of the high temperature. The structural and electrical properties were
characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD), and Hall
measurement. From the Hall mobility and SEM picture, it can be found that the highest
mobility of InN in this experiment was appeared at the annealing temperature of 650.
Above 650, the effect of decomposed mechanism of InN is stronger than the one of
ammonia crack. The amorphous buffer InN film begins to crystallize, that is, small InN
grains are formed above 650.
KEYWORDS - buffer layer annealing, indium nitride
143

Feb.25,2010
P-230 Study of Hydrogen Storage Performance of BCC Phase

Hydrogen Storage Alloys
a*
Yuan-Pang Wu , Rong-Ruey Jeng , Jo-Kuang Nieh , Hui-Yun Bor

a
Materials Research and Electro-Optics Division, Chung-Shang Institute of Science

and Technology
b
Department of Mechanical Engineering, National Central University
csist_mrdc@csnet.gov.tw(Y.P. W)
ABSTRACT - The hydrogen absorption-desorption performance of the

body-centered-cubic (BCC) Ti-V-Cr alloys have been studied with Pd addition from 0 to
3.0 at.%. X-ray diffraction (XRD) revealed that all of these alloys were homogeneous
bcc solid solutions. It is found that Pd-containing alloys have a higher absorbing rate
than those without Pd; in particular, the desorption plateau pressure of the
(Ti33V33Cr34)99.5Pd0.5 alloy was substantially higher than the alloy without Pd. The
difficulty of activation observed in Ti-V-Cr alloys is solved by small addition of
0.05~1.5 at% of Pd element. As a result, even at room temperature these alloys can
absorb hydrogen up to 3.45 mass% without any traditional activation treatment. Finally,
a congestion model was proposed to explain the unusual characteristics observed in the
Ti-V-Cr based BCC phase alloys.
KEYWORDS - Hydrogen storage alloys; BCC alloy; Ti-V-Cr alloy; Pd addition
144

Feb.25,2010
P-231 Manufacturing of Composite Wind Turbine Blades

Kuo-Wei Wu Tseng-Chung Ko Peir-Shin Wu
Aeronautical System Research Division, Chung Shan Institute of Science and
Technology, Taichung, Taiwan
Wukuowei23@yahoo.com.tw
ABSTRACT - Wind energy is one of the fastest growing sources of energy in the
world and offers a formidable economic opportunity. In this study, a manufacturing
method of 6 m length composite blade for a 25 kW wind turbine is developed. The
blade is designed to sustain the resultant force under wind velocity of 70 m/s (F70) in
blade flat position without rotating motion and to be multiplied by a safety factor
1.62 for surviving in a strong typhoon. Multi-axial fiberglass fabrics, epoxy resin and
polyurethane (PU) foam are used to save the blades weight and improve its
performance. The manufacturing of the composite blades adopts the resin vacuum
infusion process. The composite blade is composed of a box beam bonded with a set
of upper and lower sandwich skins. Its static ultimate load is tested and proved to
satisfy its static ultimate load. A 25 kW wind turbine is already successfully built up
and operated to test its performance in Taiwan.
KEYWORDS - Blade, Sandwich Structure, Box beam, Multi-axial fabric, Wind
turbine
145

Feb.25,2010
P-232 CIGS solar cell Preparation of cadmium sulfide

(CdS) film by chemical bath deposition(CBD)
Sung-cheng Hu,* Pai-jung Chang*, Yong-Tian Lu*
Yi-jyun Chen**, Yi-wei Lin**, Ming-jer Cheng**, Lian-bi Chang**
*CHUNG-SHAN INSTITUTE OF SCIENCE & TECHNOLOGY (CSIST)
ARMAMENTS BUREAU, MND Chemical System Research Division
**Department of Electrical Engineering, Chang Gung University (CGU)
ABSTRACT Cadmium sulphide of different thickness were deposited by chemical

bath deposition (CBD) on the glass from a bath containing cadmium chloride or
cadmium acetate, thiourea and ammonia solution. The thickness and optical
transmittance spectra of CdS film with various deposition conditions were measured
and analysed. It was found that the optimum conditions for the growth of device grade
CBD-CdS thin film with a film thickness of 70~90nm, according to this study, could
be achieved with a bath temperature of 60~70, at the pH values of 9.51~9.6 and at
the growth time of 10 min. The typical CdS layer had a high transmittance of more
than 80%
KEYWORDS cadmium sulphide, chemical bath deposition, CBD, CIGS, solar cell
146

Feb.25,2010
P-234Preparation of P(MMA/EGDMA/GMA)/Ni Functional

Composite Particles by Dispersion Polymerization and
Electroless Plating
Xin-Liang Chena, Chang-Pin Changa, Ming-Der Gera, Yen-Chung Chenb,
Hsiou-Jeng Shub
aDepartment of Applied Chemistry and Materials Science, Chung cheng Institute of
Technology,, National Defense University,Taiwan
b Materials and Electro-Optics Research Division, Chung-Shan Institute of Science
and Technology,Taiwan
E-mailmac0216@pchome.com.tw
ABSTRACT In this study, copolymer beads were prepared from
glycidylmethacrylate (GMA) and methylmethacrylate (MMA) in the presence of a
cross-linker (i.e., ethyleneglycol dimethacrylate,EGDMA) via dispension
polymerization. Preparation of P(MMA/EGDMA/GMA)/Ni functional composite
particles that the synthesis particles having various size from 0.5 to 1.5m by
dispersion polymerization which the particle size was controled with initiator
concentration, and polymerization temperature. In this study,Poly(MMA/EGDMA
/GMA )/Ni beads were synthesized by dispersion polymerization and electroless nickel.
The core-shell structure of polymernickel composites and the structure of polymer
spheres were characterized by TGA, FESEM,EPMA and FTIR. The results indicate
that the nickel was coated on the surface of microspheres. The inner diameter of the
microspheres with nickel shell was about 0.6~1.6m. A possible formation mechanism
of the core-shell structure of P(MMA/EGDMA /GMA)/Ni spheres was proposed.
KEYWORDS dispersion polymerization. electroless plating. Mircosphere.
147

Feb.25,2010
P-236 Calibration Methods for Nanometer Scale Measuring

Instruments
Wenhao Huang, Yuhang Chen, Jiawen Li, Dun Niu
Department of Precision Machinery and Instrumentation
University of Science and Technology of China
Hefei, 230026, China
E-mail: whuang@ustc.edu.cn
ABSTRACT Nanometrology is a key area in nano-science and nano-technology
field, and the nano-measuring instruments play a very important role in the
nanometrology area. The calibration methods for nanometer scale instruments (NSI)
are great challenge for scientists in this area. In this presentation, some key issues such
as atomic grating [1] and two-dimensional zero reference mark methods [2] for
calibrating NSI are introduced. Using these methods and techniques, the calibration
sensitivity and time stability can reach 0.01 nm and 0.01nm/s. some ISO
standardization activities on this topic are also involved.
KEYWORDS nano calibration, sensitivity, stability
148

Feb.25,2010
P-237 Evaluation and Classification of Hole Damage in Drilling

Process of Reactive Powder Concrete (RPC) Using Neural
Network Analysis
La Sapienza Universit di Roma
Corresponding author e-mail: Annamaria.gisario@uniroma1.it
ABSTRACT - Neural networks were used to model the hole damage during the
drilling process of Reactive Powder Concrete (RPC). The extent of the hole damage
after drilling were first experimentally assessed. Design Of Experiment (DOE) and
ANalysis Of VAriance (ANOVA) allowed interpreting the influence of the operational
parameters on hole damage. The experimental factors having significant effects on
hole damage, that is, cutting speed, feed and twist drill diameter, were used as input
processing elements (PEs) in the neural networks models. MLP, RBF and SOFM
neural network models were then employed to find the best way to predict the hole
area damage. MLP was the fittest model whilst SOFM neural network model gives the
best results allowing a damage classification in four classes.
KEYWORDS - RPC, Hole Damage, Design of Experiments, Analysis of Variance,
Neural Networks.
149

Feb.25,2010
P-238 Warm Stamping of Cell-Phone Cases with AZ31

Magnesium-Alloy Sheets
Fuh-Kuo Chen1, a and Chih-Kun Chang 1
1
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan,

R.O.C.
a
fkchen@ntu.edu.tw
ABSTRACT - The stamping process for manufacturing cell phone cases with
magnesium alloy AZ31 sheets was studied using both the experimental approach and
the finite element analysis. The formability of AZ31 magnesium-alloy sheet at
elevated temperatures was studied first. The experimental results reveal that the
forming of AZ31 sheets becomes possible as long as the sheet is heated to an elevated
o
temperature and 200 C is an optimum forming temperature to start with. An optimum

stamping process, including die geometry, forming temperature, and blank dimension,
for manufacturing the cell phone cases was examined by the finite element analysis.
The finite element analyses performed for the cell phone were validated by the good
agreement between the simulation results and the experimental data. It also confirms
that the cell phone cases can be produced with AZ31 magnesium-alloy sheets at
elevated temperature by the stamping process. It provides an alternative to the
electronics industry in the application of magnesium alloys.
KEYWORDS - warm stamping, AZ31 magnesium-alloy, cell phone, formability,
finite element analysis, optimum forming temperature.
150

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Conference Program

Feburary 2-5, 2010

ICAM2010, KenTing, Taiwan

ICAM2010, KenTing, Taiwan

The knowledge-based industries have been enjoying immense

Professor Shih-Chieh Lin, D. I. Shaw

ICAM2010, KenTing, Taiwan

ICAM2010, KenTing, Taiwan

ICAM2010, KenTing, Taiwan

ICAM2010, KenTing, Taiwan

ICAM2010, KenTing, Taiwan

ICAM2010, KenTing, Taiwan

PLENARY SESSION III

ICAM2010, KenTing, Taiwan

ICAM2010, KenTing, Taiwan

ICAM2010, KenTing, Taiwan

ICAM2010, KenTing, Taiwan

ICAM2010, KenTing, Taiwan

All presentations including Q&A

2. Guideline for Participants

ICAM2010, KenTing, Taiwan

ICAM2010, KenTing, Taiwan

ICAM 2010 Timetable

Free Tour to Kao-Shiang

ICAM2010, KenTing, Taiwan

ICAM2010, KenTing, Taiwan

Session 1A E-Manufacture and Reliability

ICAM2010, KenTing, Taiwan

Session 1C Emerging Energy/Opto-electronic Manufacturing Technology (Invited)

ICAM2010, KenTing, Taiwan

Session 2A Robotics, Control and Automation

Session 2B Micro and Nano Fabrication (2)

ICAM2010, KenTing, Taiwan

Session 2C Technologies for Optical and Photoelectric Devices/Systems (1)

ICAM2010, KenTing, Taiwan

Session 3A Metrology (1)

Session 3B Micro and Nano Fabrication (3)

ICAM2010, KenTing, Taiwan

Session 3C Technologies for Optical and Photoelectric Devices/Systems (2)

Session 3D Advance Manufacturing Technology (3)

ICAM2010, KenTing, Taiwan

Session 3E Advances in Forming

Session 4A Metrology (2)

ICAM2010, KenTing, Taiwan

Session 4B Micro and Nano Fabrication (4)

ICAM2010, KenTing, Taiwan

Session 4D Advance Manufacturing Technology (4)

ICAM2010, KenTing, Taiwan

Session 5A Metrology (3)

Session 5B Semiconductor Manufacturing Technology

ICAM2010, KenTing, Taiwan

Session 5C Rapid Prototyping

Session 5D Advance Manufacturing Technology in Korea (Invited)

ICAM2010, KenTing, Taiwan

Session 5E Finishing, Lapping and Polishing

ICAM2010, KenTing, Taiwan

P-001 Numerical Assessment of Two-chamber Mufflers with

Fig. 1 The acoustical field in a

Fig. 4 Optimal STL for mufflers designed

ICAM2010, KenTing, Taiwan

P-003 Toward Service-Oriented Architecture: Development and

Wei Tann1, Chie-Hsiung Ku1, Min-Hsiung Hung2, Fan-Tien Cheng3

China Steel Corporation,

Data Collection Manager