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5. CONCLUSION
EDM using an RC circuit with open-circuit
voltages lower than 30V was carried out. The
following results were obtained:
(1) Copper was drilled using tungsten electrodes
with diameters 15m and 7m at an average
electrode feed speed higher than 5m/min under
open-circuit voltages of 5V or more.
(2) Although the penetration rate is very low, drilling
proceeded at an open-circuit voltage of 2V, much
lower than that at which EDM is normally
carried out.
(3) A micropin 1m in diameter was fabricated at an
open-circuit voltage of 20V, suggesting the
possible use of EDM for submicron machining
and nanomachining.
(4) To avoid a decrease in the penetration rate, it was
found that electrical capacitance must be greatly
increased, leading to poor quality in processed
surfaces.
REFERENCES
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Tanaka and T. Masuzawa: EDM machine for
micropins, Proceedings of JSPE annual meeting 1988
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Japanese)
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contacts, Corona Publishing (1995) (in Japanese)