Beruflich Dokumente
Kultur Dokumente
4, APRIL 2010
827
AbstractThis paper presents a pseudo-2-D surface potential model for the double-gate tunnel field-effect transistor
(DG-TFET). Analytical expressions are derived for the 2-D potential, electric field, and generation rate, and used to numerically extract the tunneling current. The model predicts the device
characteristics for a large range of parameters and allows gaining
insight on the device physics. The depletion regions induced inside
the source and drain are included in the solution, and we show
that these regions become critical when scaling the device length.
The fringing field effect from the gates on these regions is also
included. The validity of the model is tested for devices scaled to
10-nm length with SiO2 and high- dielectrics by comparison to
2-D finite-element simulations.
Index TermsAnalytical modeling, band-to-band tunneling,
gated p-type-intrinsic-n-type diode, Poissons equation, tunnel
field-effect transistor.
I. I NTRODUCTION
RANSISTORS based on the tunneling current appear as promising candidates to replace the conventional MOSFETs for low-power applications. Contrary to
MOSFETs, the subthreshold slope of tunneling field-effect
transistors (FETs) is not limited to 60 mV/dec [1], allowing
further reduction in the supply voltage. In addition, tunnel fieldeffect transistors (TFETs) should show a very small leakage
current, in the range of femtoamperes [2], due to the large
tunneling barrier formed when the device is turned off. The use
of a double-gate configuration and the replacement of the gate
oxide by high- dielectrics were proposed to boost the current
in the ON-state [3], [4].
So far, the performance of these devices is mostly predicted
on the basis of finite-element simulations [5][7]. Analytical
models would be useful to provide fast results, together with
Manuscript received August 12, 2009; revised December 10, 2009. First
published February 17, 2010; current version published April 2, 2010. The
review of this paper was arranged by Editor D. Esseni.
M. G. Bardon is with the Interuniversity MicroElectronics Center, 3001
Leuven, Belgium, and also with the Katholieke Universiteit Leuven, 3000
Leuven, Belgium (e-mail: bardon@imec.be).
H. P. Neves and C. Van Hoof are with the Interuniversity MicroElectronics
Center, 3001 Leuven, Belgium.
R. Puers is with the Katholieke Universiteit Leuven, 3000 Leuven, Belgium.
Color versions of one or more of the figures in this paper are available online
at http://ieeexplore.ieee.org.
Digital Object Identifier 10.1109/TED.2010.2040661
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Fig. 3. Two-dimensional distribution of the potential (x, y), of the vertical component of the electric field Ex , and of the lateral component of the electric field
Ey (inverted for a better visualization) in the TFET at (a) Vg = 0 V and (b) Vg = 1.2 V from finite-element simulations. The lightly doped region has a length of
50 nm, the dielectric constant is r = 21, and the drain voltage is Vd = 1 V.
(1)
where (x, y) is the electrostatic potential in the substrate measured with respect to the bulk Fermi level. Ns is the film effective doping used to simplify the calculations and is equal to N1
in the p-type source (region R1), N3 in the n-type drain (region R3), and N2 in the lightly doped region R2 (with the sign
indifferent for low doping). s is the silicon dielectric constant.
The gate does not overlap the source and drain in the proposed structure. However, the simulations showed that the potential significantly varies on the depletion regions, particularly
on the drain side. We also suppose that these regions can be
under the influence of the gates through fringing field effects.
Therefore, we solve the Poissons equation in two dimensions
on three regions, i.e., the lightly doped region and the two
depletion regions. Seeing the parabolic shape of the potential
in depth, the potential can be approximated by the secondorder polynomial, an approximation previously verified for
double-gate devices [17], [18]
(x, y) = a0 (y) + a1 (y)x + a2 (y)x2 .
(2)
Ex (0, y) = (G s (y))
ts
Ex (ts , y) = (b (y) G ) .
ts
(3)
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In these equations, s (y) = (0, y) is the front-side surface potential, and b (y) = (ts , y) is the back-side surface
potential. The gate potential G is referred to the substrate
Fermi level, so that G = Vg m + + Eg /2. ( and Eg
are the electron affinity and the band gap of the silicon body,
respectively.) We define a parameter = Cr /Cs , i.e., the ratio
between the gate capacitance Cr and the thin-film capacitance
Cs = s /ts . The gate-oxide capacitance is Cr = r /tr in the
lightly doped region R2. On the depletion regions R1 and R3,
the fringing field effect is taken into account by conformal
mapping techniques as Cr
= 2/ r /tr [18].
Applying the boundary conditions to (2), the coefficients a0 ,
a1 , and a2 can be rewritten as a function of the front-gate
surface potential s (y), i.e.,
a0 (y) = s (y)
a1 (y) = (s (y) G )
ts
a2 (y) = 2 (s (y) G ) .
ts
(4)
with
2/t2s
t2 qNs
2
d = s
2 G .
2 s
ts
k=
(5)
(7)
Fig. 5. Comparison of the results obtained from (dots) simulations and (lines)
our model for the vertical electric field at the surface (front side) for Vg = 0 V
and Vg = 1.2 V (L2 = 50 nm, r = 3.9, Vd = 1 V).
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Fig. 6. Comparison of the results obtained from (dots) simulations and (lines)
our model for the lateral electric field at the surface (front side) for Vg = 0 V
and Vg = 1.2 V (L2 = 50 nm, r = 3.9, Vd = 1 V).
2
of the electric field |E| = Ex + Ey2 , with Ex and Ey given
by (7). Finally, the current at the source and drain terminals is
calculated by numerical integration of Gbtb . Although the mobile charge was neglected in the model derivation, the current
can be predicted with this approach, because (10) depends on
the electric field distribution in the device. From the OFF-state
to the ON-state, this field distribution is mainly controlled by the
fixed charge and is therefore accurately predicted by our model,
as verified in the next section.
IV. M ODEL E VALUATION
The model is tested against the simulation results for different sets of parameters. We verify that the potential and
the components of the electric field are well predicted for
different biasing conditions. The validity is further tested when
scaling the gate lengths (50, 20, and 10 nm) and for different
gate dielectrics (r = 3.9 and r = 25). Finally, we extract the
recombination rate and the current.
A. Validation of Potential, Electric Field, and Current
The model is first tested on a TFET with a body of
50-nm length and with SiO2 as gate dielectric, under a change
in gate voltage. The accurate prediction of the potential and
fields at low gate voltage is critical since it will condition the
OFF-current and the subthreshold slope, which are the two key
parameters for the TFET used as switch. Fig. 4 shows the
surface potential for a variation of the gate voltage from 0 to
1.4 V by a step of 0.2 V. As the gate voltage increases, the
potential in the lightly doped region increases. The length of the
depletion region inside the drain is important at low gate voltage
and decreases as the gate voltage increases. The variation of
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Fig. 8. Influence of the scaling on the energy band diagrams in the OFFstate (Vg = 0 V and Vd = 1 V) in a horizontal cross section of the body
at the surface (front side) for two different gate lengths L2 = 50 nm and
L2 = 20 nm (r = 3.9). Results are from (dots) simulations and (continuous
lines) model. The vertical lines show the limits of the two lightly doped zones.
Fig. 9. Vertical and lateral electric fields at the surface of a device with L2 =
20 nm for Vg = 0 V and Vg = 1.2 V (Vd = 1 V, r = 3.9), as predicted by
(dots) simulations and by (continuous lines) our model.
Fig. 10. Vertical and lateral electric fields at the surface of a device with L2 =
10 nm for Vg = 0 V and Vg = 1.2 V (Vd = 1 V, r = 3.9), as predicted by
(dots) simulations and by (continuous lines) our model.
Fig. 11. Surface potential for an increasing drain voltage (Vd = 0 V, 0.4 V,
0.8 V, 1.2 V, 1.6 V; L2 = 20 nm, r = 3.9, and Vg = 1 V). The vertical lines
show the limits of the three regions of resolution R1, R2, and R3 for Vd =
1.6 V.
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Fig. 12. Influence of the dielectric material on the energy band diagrams
in the OFF-state and comparison between the simulation and the model. The
high-dielectric constant material ( = 21) provides better control on the silicon
body, compared with the SiO2 ( = 3.9).
C. High- Dielectrics
si = ki / sinh(ki Li )
1 =
1
[2 s1 (0 V1 ) + (2 + s2 )s2 V2 + s2 s3 (3 V3 )]
2 =
1
[s1 s2 (0 V1 ) + (1 + s2 )s2 V2 + 1 s3 (3 V3 )]
where
= 1 2 s22 .
R EFERENCES
[1] W. Y. Choi, B.-G. Park, J. D. Lee, and T.-J. King Liu, Tunneling
field-effect transistors (TFETs) with subthreshold swing (SS) less than
60 mV/dec, IEEE Trans. Electron Devices, vol. 28, no. 8, pp. 743745,
Aug. 2007.
[2] J. Appenzeller, Y.-M. Lin, J. Knoch, and P. Avouris, Band-to-band
tunneling in carbon nanotube field-effect transistors, Phys. Rev. Lett.,
vol. 93, no. 19, pp. 196 8051196 8054, Nov. 2004.
[3] K. Boucart and A. M. Ionescu, Double-gate tunnel FET with high- k gate
dielectric, IEEE Trans. Electron Devices, vol. 54, no. 7, pp. 17251733,
Jul. 2007.
[4] M. Schlosser, K. K. Bhuwalka, M. Sauter, T. Zilbauer, T. Sulima, and
I. Eisele, Fringing-induced drain current improvement in the tunnel fieldeffect transistor with high- k gate dielectrics, IEEE Trans. Electron
Devices, vol. 56, no. 1, pp. 100108, Jan. 2009.
[5] K. K. Bhuwalka, J. Schulze, and I. Eisele, Simulation approach to optimize the electrical parameters of a vertical tunnel FET, IEEE Trans.
Electron Devices, vol. 52, no. 7, pp. 15411547, Jul. 2005.
[6] E.-H. Toh, G. H. Wang, L. Chan, G. Samudra, and Y.-C. Yeo, Device
physics and guiding principles for the design of double-gate tunneling field effect transistor with silicon-germanium source heterojunction,
Appl. Phys. Lett., vol. 91, no. 24, pp. 243 5051243 5053, Dec. 2007.
[7] K. Boucart and A. Ionescu, A new definition of threshold voltage in
tunnel FETs, Solid State Electron., vol. 52, no. 9, pp. 13181323,
Sep. 2008.
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