Beruflich Dokumente
Kultur Dokumente
Journal
Microelectronics Journal 30 (1999) 11551162
www.elsevier.com/locate/mejo
Abstract
This article describes the electro-thermal simulation of the acdc transfer differences at low frequencies of a thin-film thermal converter.
The dynamic non-linear model includes the temperature dependence of all the material parameters, and the radiation losses. It is used to
optimise the performance of the device at low frequencies, where temperature oscillations are present due to the lack of integration of the
oscillating Joule heat. The results of the simulation are compared with those of the measurements using a digital method. 1999 Elsevier
Science Ltd. All rights reserved.
Keywords: Electro-thermal simulation; Thin-film thermal converter; Low frequency acdc transfer
1. Introduction
In metrology laboratories, achieving the highest accuracy
reference standards for the electrical units are reproduced
and maintained by means of two quantitative experiments,
the Josephson and the Quantum Hall effects [1]. These
experiments were, however, done using dc. To relate the
rms value of an ac signal to these dc units, a transfer method
has to be used. Nowadays the highest accuracy in such
transfers is achieved with thermal converters. In these
devices one or more thermocouples measure the temperature produced by the Joule heat in a resistor by a known dc
voltage (or current) and an unknown ac. Ideally the
temperature should be equal for the two signals of the
same rms value. Thus, the unknown rms ac value can be
related to the equivalent dc. The acdc voltage transfer
difference d of a thermal converter is defined as
Uiac Uidc
Uidc
Uoac Uodc ;
0026-2692/99/$ - see front matter 1999 Elsevier Science Ltd. All rights reserved.
PII: S0026-269 2(99)00079-8
1156
2. Electro-thermal model
Modeling of a thermal converter provides a useful tool to
study its behavior and test potential changes in the design. In
the development of the PTB thin-film MJTC, the analog
models and the finite element method (FEM) have been
applied to optimize the converter geometry, with the aim
of improving its sensitivity and temperature profile to minimise the Thomson heat along the heater [6]. The CMOS
thermal converters were modelled by Jaeggi also using the
FEM [7]. In this model, Jaeggi included the Peltier effect
and anisotropic characteristics in the multilayer structures.
These models are, however, not capable of calculating the
acdc transfer difference of the device, because they cannot
Ui2
PJ
! DT
! Uo aTDT:
RH T
GT
This can be depicted in a simple lumped temperaturedependent parameter model (Fig. 2).
The Joule heat oscillates with a frequency that is twice the
frequency of the input voltage. At frequencies well above
the inverse of the thermal time-constant of the converter, i.e.
the time needed by the output voltage to reach 0.63 of its
final value after a step input voltage is applied, the heat is
integrated and the temperature of the device, and thus, the
output voltage are constant, like in the dc.
On the contrary, if the period of the input voltage is large
in comparison to the thermal time-constant, the temperature
of the whole device follows the Joule heat and the output
voltage shows a double-frequency ripple on its dc voltage.
Due to the dependence of the electrical resistance, thermal conductance, and specific heat on temperature and the
high non-linear characteristic of radiation losses, an oscillation in the temperature will result in the mean value of the
heater temperature being different at ac and dc.
1157
Fig. 4. Geometry of the model. Due to its symmetry, only the solution in half the membrane is needed.
boundaries
7k7T gx; y; z; t rc
2T
;
2t
1158
10
Tx; y5 ; z; t Ta
PJ x; y; z
E
;
re x; y; z; T
Tx5 ; y; z; t Ta
(b) Neumanns bcs or bcs of the second kind: The plane of
symmetry is
2Tx; y; z
0
2x
x 0:
11
2Tx; y; z
hTx; y; z; t Ta
2z
Uodc Uoac
nUodc
Uiac Uidc :
z 0:
12
13
z z3 on the thermopile;
where the heat transfer coefficient h accounts for the
conduction through air. No convection exists due to the
small distances between the PMJTC and its cover and
between the PMJTC and its carrier [9]. When we study
the thermal converter in vacuum, h is taken as zero.
The electrical boundary conditions differ when we deal
with the dc or ac input voltages.
2.3.1. Solution with dc input voltage
In this case, the boundary conditions of the first kind for
the electric field problem are (see Fig. 4)
input terminal of the heater
Ux; 0; z Udc =2;
x1 x x2 ;
14
0 y y5
15
1159
Fig. 5. Electric potential distribution (a), Joule heat (b), and temperature
distribution (c). Due to its symmetry, only the solution in half the
membrane is needed.
17
where Dt is the chosen time step. Consequently the boundary conditions of the first kind for the electrical problem for
the time instant tk kDt, will be
input terminal of the heater
Ux; 0; z Uik =2;
x1 x x2 ;
plane of symmetry
U0; y; z 0;
18
0 y y5 :
19
20
1160
wSUo
Fig. 6. Output voltage with the dc and ac input voltages (t 0.2 s). (a) f
0.1 Hz (b) f 10 Hz. The difference D between the output voltage with the
dc and the mean output voltage of the last cycle in the ac is used to calculate
the acdc transfer difference (see Eq. (9)).
1 dS
:
S dUo
23
Uo
:
PJ
21
bS
1 dS
:
S dT
22
1161
Fig. 10. Influence of the radiation losses on d at low frequencies in air and
in vacuum.
1162
radiation losses represent 3.9% of the total thermal conductance and, consequently, 96.1% corresponds to the conduction through air and the layer materials. In vacuum, the
participation of radiation losses increases to 21.2 and
78.8% corresponds to the conduction through the layer
materials. Moreover, their influence is even greater in the
temperature coefficient b S and power coefficient q SUo of the
device. In air the absolute value of b S is reduced by 16.6%
when radiation is avoided, and in vacuum it can even change
sign. The highly non-linear characteristic of the radiation
losses explains the fact that, although they represent about
4% of the heat flow in air, they have a considerable influence on the b S and q SUo.
Fig. 10 depicts the calculated d at low frequencies with
and without radiation losses for a PMJTC with Si obelisk in
air and in vacuum. In air d decreases about 400 10 6 at
0.01 Hz. The effect is still clearer in vacuum. d is reduced to
very low values and can even reverse the sign, when radiation losses are eliminated. Therefore, an attempt is made to
reduce the radiation losses by means of the deposition of a
reflecting aluminum thin film over the silicon obelisk.
5. Conclusions
We made a dynamic non-linear thermo-electrical model
for a planar MJTC to simulate its inputoutput relation. The
model has the accuracy necessary for the calculation of the
acdc transfer differences of thin-film thermal converters at
low frequencies. It is used to investigate the causes and
search for a reduction of d at low frequencies. This reduction can be achieved by increasing the thermal timeconstant or by compensation of the power dependence of
References
[1] T.J. Quinn, Base units of the systeme international dunites, their accuracy, dissemination and international traceability, Metrologia 31
(1995) 515527.
[2] B.D. Inglis, Standards for ACDC transfer, Metrologia 29 (1991) 191
199.
[3] M. Klonz, T. Weimann, Accurate thin-film multijunction thermal
converter on a silicon chip, IEEE Trans. Instrum. Meas. 38 (1989)
335337.
[4] T. Takeishi, Characteristics of vacuo-thermo junctions at ultra-low
frequency, IEEE Trans. Instrum. Meas. 34 (1) (1985) 3441.
[5] F.L. Hermach, Thermal converters as acdc transfer standards for
current and voltage measurements at audio frequencies, J. Res. NBS
48 (1952) 121138.
[6] U. Dillner, E. Kessler, M. Klonz, C. Thomes, Micro-machined planar
acdc multijunction thermal converter: aspects of design and layer
materials, in: H. Reichl, A. Heuberger (Eds.), MICRO SYSTEM Technologies 1994, VDE-Verlag GmbH, Berlin, 1994, pp. 773782.
[7] D. Jaeggi, Thermal converters by CMOS technology, PhD Thesis,
Physical Electronics Laboratory, ETH Zurich.
[8] M. Klonz, T. Weimann, Increasing the time-constant of a thin film
multijunction thermal converter for low frequency application, IEEE
Trans. Instrum. Meas. 40 (2) (1991) 350351.
[9] T. Elbel, Miniaturised thermoelectric radiation sensors covering a wide
range with respect to sensitivity or time constant, Sensor Actuators A
2527 (1991) 653656.