Beruflich Dokumente
Kultur Dokumente
EE C245
Lecture Outline
Reading
From S. Senturia, Microsystem Design, Chapter 13, Fluids,
p.317-334.
Todays Lecture
Basic Fluidic Concepts
Conservation of Mass Continuity Equation
Newtons Second Law Navier-Stokes Equation
Incompressible Laminar Flow in Two Cases
Squeeze-Film Damping in MEMS
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U. Srinivasan
Viscosity
Fluids deform continuously in presence of shear forces
For a Newtonian fluid,
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Ux
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Density
Density of fluid depends on pressure and
temperature
For water, bulk modulus =
Thermal coefficient of expansion =
but we can treat liquids as incompressible
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PV = nRT
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R
P = m
T
MW
4
Surface Tension
Droplet on a surface
Capillary wetting
2r
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h=
2 cos
gr
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Lecture Outline
Todays Lecture
Basic Fluidic Concepts
Conservation of Mass Continuity Equation
Newtons Second Law Navier-Stokes Equation
Incompressible Laminar Flow in Two Cases
Squeeze-Film Damping in MEMS
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U. Srinivasan
Conservation of Mass
Control volume is region fixed in space through which fluid moves
Rate of accumulation
dS
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Conservation of Mass
m
dV + S m U n dS = 0
V
t
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dS
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Operators
Gradient and divergence
U y U z
U x
i+
j+
k
z
x
y
= e x + e y + ez
x
y
z
U x U y U z
U = div U =
+
+
x
y
z
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U =
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Continuity Equation
Convert surface integral to volume integral using Divergence
Theorem
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V + ( U ) dV = 0
t
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+ ( U) = 0
t
Continuity Equation
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Continuity Equation
Material derivative measures time rate of change of a
property for observer moving with fluid
+ (U ) + U = 0
t
D
=
+ ( U )
Dt t
D
+ U y + Uz
= + U = + Ux
z
t
x
y
Dt t
For incompressible fluid
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D
+ U = 0
Dt
D
+ U = 0
Dt
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Lecture Outline
Todays Lecture
Basic Fluidic Concepts
Conservation of Mass Continuity Equation
Newtons Second Law Navier-Stokes Equation
Incompressible Laminar Flow in Two Cases
Squeeze-Film Damping in MEMS
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U. Srinivasan
12
Sum of forces
acting on control
volume
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F =
Rate of
momentum efflux
=
from control
volume
dp
d
= V U dV
dt
dt
Net momentum
accumulation rate
Rate of
accumulation of
momentum in
control volume
+ S U (U n ) dS
Net momentum
efflux rate
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Momentum Conservation
Sum of forces acting on fluid
F =
pressure and shear
stress forces
gravity force
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S ( Pn + )dS + V gdV =
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d
UdV + S U(U n ) dS
dt V
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Navier-Stokes Equation
Convert surface integrals to volume integrals
2 U + ( U ) dV
=
dS
S
V
3
Pn dS = P dV
S
U( U n ) dS = U( U ) dV
V
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2
P + g + U + ( U ) dV =
V
3
U dV + U( U ) dV
V
V
t
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DU dV
V
Dt
DU
= P + g + 2 U + ( U )
Dt
3
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U = 0
DU
= P + g + 2 U + ( U )
Dt
3
DU
= P + g + 2 U
Dt
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Cartesian Coordinates
DU
= P + g + 2 U
Dt
x direction
U x
U x
U x
U x
+ Ux
+U y
+ Uz
=
x
y
z
t
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2U x 2U x 2U x
Px
+ g x + 2 + 2 +
x
y
z 2
x
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Dimensional Analysis
DU
P
2 U
=
+g+
Dt
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inertia/viscous
pressure /inertia
flow v/sound v
=
=
=
P/U2
=
=
=
Reynolds number
Euler number
Mach number
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U
h
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w
w
High h
P
Low
P
y
Ux
U
Ux
Umax
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10
Couette Flow
Couette flow is steady viscous flow
between parallel plates, where top plate is
moving parallel to bottom plate
No-slip boundary conditions at plates
U = 0 U = Uxix
U = U x ( y )i x
DU x
2U x 2U x
1 P
=
+ gx +
+
y 2
Dt
x
x 2
U x = 0 at y = 0
2U x
=
and
0
,
U x = U at y = h
y 2
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Ux =
Ux
U
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Couette Flow
Shear stress acting on plate due to motion, $, is dissipative
Couette flow is analogous to resistor with power dissipation
corresponding to Joule heating
w =
U
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RCouette =
U x
y
=
y =h
w A A
U
PCouette = RU 2
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11
Poiseuille Flow
Poiseuille flow is a pressure-driven flow between stationary
parallel plates
No-slip boundary conditions at plates
2U x 2U x
DU x
1 P
=
+ gx +
+
2
2
Dt
x
y
x
P
P
=
L
x
2U x
P
=
,
2
y
L
U x = 0 at y = 0, h
Ux =
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w
w
Highh
P
Low
P
U max =
Ux
Umax
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Poiseuille Flow
Volumetric flow rate Q ~ [h3]
Q = W 0 U x dy =
h
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w
w
Ux
W
w =
U x
y
=
y =h
Ph
2L
Q
Wh
2
h P 2
= 3 U max
U=
12L
U=
24
12
Poiseuille Flow
Flow in channels of circular cross section
Ux
(r
=
r 2 )P
4L
ro 4 P
Q=
32L
Dh =
4 Area
Perimeter
P = f D (12 U 2 )
L
Dh
f D Re D = dimensionless
constant
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R pois =
P 12L
=
Q Wh 3
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Velocity Profiles
Velocity profiles for a
combination of
pressure-driven
(Poiseuille) and plate
motion (Couette) flow
Development length
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Lecture Outline
Todays Lecture
Basic Fluidic Concepts
Conservation of Mass Continuity Equation
Newtons Second Law Navier-Stokes Equation
Incompressible Laminar Flow in Two Cases
Squeeze-Film Damping in MEMS
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F
moveable
h
fixed
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14
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Reynolds equation
12
= [(1 + 6K n )h 3 PP ]
h
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( Ph ) h 3
[ 2 P 2 ]
=
24
t
h = h0 + h and
p = P0 + P
h02 P0 2 p 1 dh
p
=
t 12W 2 2 h0 dt
P
y
p=
and =
P0
W
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15
General Solution
Laplace transform of response to general time-dependent source z(s)
96LW 3
1
sz ( s )
F(s ) =
4 3
4
S
h0 n odd n (1 + n )
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plate velocity
b
96LW 3
2h02 P0
F(s ) =
sz ( s ), b =
, c =
1 + Sc
12W 2
4 h03
1st term for small
amplitude oscillation
damping
constant
cutoff
frequency
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Squeeze Number
Squeeze number d is a measure of relative
importance of viscous forces to spring forces
< c : model reduces to linear resistive damping element
> c : stiffness of gas increases since it does not have
time to squeeze out
2 12W 2
= 2
h0 P0
c
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squeeze number d =
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16
Examples
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