Beruflich Dokumente
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Outline
1. Introduction
Infrared Spectroscopy
Photoluminescence (PL)
4. Other analysis
Secondary Ion Mass spectrometry
Rutherford Backscattering
5. Summery
Introduction
Are carrier density and doping density identical ?
At thermal equilibrium
Intrinsic
(no impurities)
Donor impurities
(n ND)
Acceptor impurities
(p NA)
Band diagram, Density of state, Fermi-Dirac distribution, carrier density [1]
Introduction
Carrier density doping density
Introduction
In empirical measurement (or analysis),
Carrier density = Doping density (uniformly doped)
Carrier density Doping density (non-uniformly doped)
What are the methods for determining the carrier and doping densities?
Electrical methods (~carrier density)
Capacitance-Voltage, Current- Voltage, Spreading Resistance, Hall measurement ..
Optical methods (~ identification of impurities)
Plasma Resonance, Free carrier absorption, infrared spectroscopy,
Photoluminescence (PL) ..
I. Electrical methods
1. Capacitance-Voltage measurement
Reverse-biased barriers (Schottky barrier, pn-junction)
MOS-Capacitance
Mercury probe contact
Electrochemical C-V profiler (ECV)
2. Current-Voltage measurement
MOSFET Substrate voltage-Gate voltage
MOSFET Threshold voltage
Spreading Resistance Probe (SRP)
3. Hall measurement
Electrical method
Capacitance-Voltage method
Differential Capacitance
Electrical method
Capacitance-Voltage method
Differential Capacitance-Voltage profiling
C-V and (1/C2) V Curves
1/C2 V curve is preferred to identify the
uniformity of carrier density
(discontinuity at around 3 V )
Electrical method
Capacitance-Voltage method
Deviation of major carrier density from doping density
Schottky diode
Determination of deviation
Zero-biased junction
Debye length
A distance that mobile charge carriers (e.g. electrons) screen out electric fields.
Measurement deviation
Capacitance id determined by the movement of majority
carriers
Majority carrier distribution Doping density profile
( Apparent density) when abrupt spatial change (doping
density step) occurs within one Debye length (<1LD)
Majority carrier density Doping density profile when more
gradual density step (>1LD)
Charge distribution from electric field at a plate with a
dielectric medium [3]
Electrical method
Capacitance-Voltage method
Heterojunction semiconductor
C-V measurement to determine the band
offsets
The doping densities profiles are determined
from the slope m1 and m2.
Cpl is related to the thickness of the narrow
band, and Vpl is related to the band offset
Electrical method
Capacitance-Voltage method
Depletion approximation (for uniformly doped substrate)
Electrical method
Capacitance-Voltage method
MOS-C capacitor
From Poissons equation
VG
COX
CS
CS = KS0A / W
C2F = Capacitance at VT
R = Cinv / Cox
Electrical method
Capacitance-Voltage method
MOS-C capacitor
Electrical method
Capacitance-Voltage method
Poly-si gate MOSFET
When VG > VT
From C/COX,
ND ( = 5 x 1019 cm-3) at tOX (= 10 nm) is estimated.
Limited to strong inversion since gate oxide may breaks down
Electrical method
Capacitance-Voltage method
Electrical method
Capacitance-Voltage method
Mercury Probe Contacts
Electrical method
Current-Voltage method
For doping density profile, C-V measurement on large-diameter device is effectively
valid, but not on small geometry MOSFETs due to extremely small capacitance.
Electrical method
Current-Voltage method
MOSFET Threshold Voltage
Threshold voltage is measured as a function of substrate bias
Electrical method
Current-Voltage method
Spreading Resistance
Electrical method
By Lorentz force
qEy = -qvxBz
Jp = qpvx = qpEx (= qp)
Ey = (Jp/qp)Bz = RHJpBz = RH(I/A)Bz
dEy = VH
(RH 1/qp)
Ey = VH/w = RH(I/A)Bz
RH = dVH / IBz
Optical method
Plasma Resonance
Optical reflection coefficient is defined by
n = reflective index
k = /4 ( is the absorption coefficient)
Semiconductor
Optical method
c velocity of light
n reflective index
m* effective electron mess
carrier mobility
Optical method
Infrared Spectroscopy
Optical absorption process with h < (EG ED) at low
temperature
i) Electrons can be excited from the ground state to conduction
band -> broad absorption continuum.
ii) Electrons can be exited from the ground state to one of
several excited states -> producing sharp lines in spectrum
h < EG
h > EG
Optical method
Photoluminescence (PL)
Photoluminescence process
p+(B)/p(B)-Si
n+(As)/p(B)-Si
Summary
Electrical method
C-V measurement, I-V measurement, SRP, Hall-effect
- Determining carrier density (profile)
- Simple method, Accurate measurement, Non-destructive
Optical method
Plasma resonance, Free carrier absorption, Infrared Spectroscopy, Photoluminescence
- Identification of doping
- Non-destructive
References
[1] S. M. Sze, Semiconductor Deivce, Physics and Technology, Wiley
[2] D. K. Schroder, Semiconductor materials and device characterization, 3rd edition, 2006
[3] CAU, Christian-Albrechts-Universitt (http://www.tf.uni-kiel.de)
[4] The solid film, 516, 89178925 (2008)
[5] Park systems, Nanotechnology solution partners, p149
[6] Nature Photonics 4, 511 - 517 (2010)
[7] Institute of complex materials, Dressden
[8] Geochemical instrumentation and analysis
[9] SPIRIT, www.spirit-ion.eu
[10] Physical Review B, 56, 1393 (1997)