Vacuum techniques: pumps, diffusion, sorption, and cryogenic

Vacuum techniques
Pumps
Dr. G. Mirjalili, Physics Dept. Yazd University
Vacuum theory and

pumping laws
How the
vacuum is
created?
Production of vacuum
to reduce gas density in given volume to below

atmospheric pressure with pump
enclosed vessel has continuous sources which launch

gas into volume and present pump with continuous gas
load
vacuum achievable at steady state is result of dynamic

balance between gas load and ability of pump to remove
gas form volume
Vacuum pumps and their

characteristics
Gas transfer pumps:
(a) Positive displacement pumps that transfer
repeated volumes of gas from inlet to outlet
by compression ( e.g. rotary pump).
(b) Kinetic pumps that continuously transfer gas
from inlet to outlet by imparting momentum to
gas molecules (e.g. Diffusion pump,
turbomolecular pump).
Entrapment/capture pumps,
retain molecules by sorption or
condensation on internal surfaces
(e.g. sorption pump, sublimation
pump, sputter ion pump,
cryogenic pump).
Low vacuum pumps

-3)
(1atm-10
mbar
Roughing Pumps
1
Vacuum (units)
1.3x10-9
1x10-6 Torr
0.133x10-3 Pa
1.3x10-6
1 mTorr
0.133 Pa
1.3x10-3
1 atm.
1 Torr
133 Pa
Typical High
Pressure
760 Torr
101,333 Pa
1 Torr =
1 mm-Hg
1 Pascal =
1 N/m2
Typical Low Pressure

Ultrahigh Vacuum
High Vacuum
Rough Vacuum
VACUUM PUMPING METHODS

VACUUM PUMPS
(METHODS)
Gas Transfer
Vacuum Pump
Entrapment
Vacuum Pump
Kinetic
Vacuum Pump
Positive Displacement
Vacuum Pump
Rotary
Pump
Reciprocating
Displacement Pump
Drag
Pump
Diaphragm
Pump
Liquid Ring
Pump
Gaseous
Ring Pump
Piston
Pump
Rotary
Piston Pump
Turbine
Pump
Multiple Vane
Rotary Pump
Dry
Pump
Sliding Vane
Rotary Pump
Axial Flow
Pump
Rotary
Plunger Pump
Radial Flow
Pump
Molecular
Drag Pump
Roots
Pump
Fluid Entrainment
Pump
Adsorption
Pump
Ion Transfer
Pump
Ejector
Pump
Liquid Jet
Pump
Diffusion
Pump
Gas Jet
Pump
Diffusion
Ejector Pump
Vapor Jet
Pump
Cold Trap
Bulk Getter
Pump
Getter
Pump
Getter Ion
Pump
Sublimation
Pump
Self Purifying
Diffusion Pump
Evaporation
Ion Pump
Fractionating
Diffusion Pump
Sputter Ion
Pump
Cryopump
Turbomolecular
Pump
Condenser
Name of Pump
Mechanical (roughing)*
Sorption
Diffusion*
Turbo
Ion
Cryo(genic)
*used in lab
Mechanism of Pumping
Compression of gas
Physical or chemical absorption
Intermolecular collisions
Molecular collisions with surfaces
Ionization and implantation of gas
Solidification of gas by liquid He
PUMP OPERATING RANGES

Ultra High
Vacuum
Rough Vacuum
High Vacuum
Rotary Vane Mechanical Pump

Rotary Piston Mechanical Pump
Dry Mechanical Pump
Sorption Pump
Blower/Booster Pump
Venturi Pump
High Vac. Pumps
Ultra-High Vac. Pumps
10-12
10-10
10-8
10-6
10-4
10-2
1
10+2
P (mbar)
VACUUM SYSTEM USE

9
1
2
3
3a
4
5
6
7
8
9
8
1
4
7
2
6
3a
3
Chamber
High Vac. Pump
Roughing Pump
Foreline Pump
Hi-Vac. Valve
Roughing Valve
Foreline Valve
Vent Valve
Roughing Gauge
High Vac. Gauge
Mechanical pumps
Mechanical pumps (displacement pumps) remove gas atoms
from the vacuum system and expel them to atmosphere, either
directly or indirectly
In effect, they are compressors and one can define a
compression ratio, K, given by
Pout
K
Pin
K is a fixed value for any given pump for a particular gas species
when measured under conditions of zero gas flow.
Rotary Vane, Oil-Sealed

Mechanical Pump
Pump Mechanism
Gas ballastting
Pump Down Curves
The Molecular Sieve/Zeolite

Trap
Trap
Rotary pump
Single &Dual Stage
How 2-stage rotary pump Works
OIL BACKSTREAMING
PRESSURE LEVELS: LESS THAN 0.2 mbar

Other types of Mechanical pumps

Rotary Vane
Rotary Piston
Roots
Dry pump
Dry Vacuum Pumps
Root pump
How Root Pump works
One Stage Roots Blower

Pump Assembly
Vacuum system use for Root

pumps
12
1
2
3
4
5
6
7
8
9
10
11
12
11
1
3
2
9
10
8
6
5
Chamber
Foreline
Roughing Valve
Roughing Gauge
Roughing Pump
Foreline
Foreline Valve
Foreline Gauge
High Vacuum Valve
Booster/Blower
Vent Valve
High Vacuum Gauge
Diaphragm pumps
Diaphragm pumps
Diaphragm Pump
Eccentric shaft produces

alternate expansion /
compression process
Inlet / outlet via reed
valves
Ultimate vacuum 100 - 0.1
torr - limited by external
leakage past valves,
internal back-streaming,
dead volume
Compression ratio
typically 10 - 30
Pumping speed: single
unit 0.1-0.7 l/s, parallel
units up to 5.3 l/s
Diaphragm Pump
High resistance to
chemical attack
Oil free - used with
roots blower or
cryopump for
completely oil-free
system
Lifetime ~ 5000
hours
Diaphragm pump
Piston Type Pump
Piston design
Sorption Pump
Sorption Pump Components
Sorption pumps
The sorption pump has no moving parts and therefore

no oils or other lubricants. (5 liters of liquid nitrogen)
HIGH VACUUM PUMPS
2
VACUUM PUMPING METHODS

VACUUM PUMPS
(METHODS)
Gas Transfer
Vacuum Pump
Entrapment
Vacuum Pump
Kinetic
Vacuum Pump
Positive Displacement
Vacuum Pump
Rotary
Pump
Reciprocating
Displacement Pump
Diaphragm
Pump
Liquid Ring
Pump
Piston
Pump
Rotary
Piston Pump
Multiple Vane
Rotary Pump
Dry
Pump
Drag
Pump
Turbine
Pump
Axial Flow
Pump
Rotary
Plunger Pump
Radial Flow
Pump
Molecular
Drag Pump
Ion Transfer
Pump
Ejector
Pump
Gaseous
Ring Pump
Sliding Vane
Rotary Pump
Roots
Pump
Fluid Entrainment
Pump
Adsorption
Pump
Liquid Jet
Pump
Diffusion
Pump
Gas Jet
Pump
Diffusion
Ejector Pump
Vapor Jet
Pump
Cold Trap
Bulk Getter
Pump
Getter
Pump
Getter Ion
Pump
Sublimation
Pump
Self Purifying
Diffusion Pump
Evaporation
Ion Pump
Fractionating
Diffusion Pump
Sputter Ion
Pump
Cryopump
Turbomolecular
Pump
Condenser
PUMP OPERATING RANGES

Ultra High
Vacuum
High Vacuum
Rough Vacuum
Roughing Pumps
Liquid Nitrogen Trap
Diffusion Pump
Turbo Pump
Cryo Pump
Ion Pump
Tit. Subl. Pump
10-12
10-10
10-8
10-6
10-4
10-2
1
10+2
P (Torr)
VACUUM SYSTEM USE (high vacuum)

9
8
1
1 Chamber
2 High Vac. Pump
3 Roughing Pump
3a Fore Pump
4 Hi-Vac. Valve
5 Roughing Valve
6 Foreline Valve
7 Vent Valve
8 Roughing Gauge
9 High Vac. Gauge
4
8
22
6
3a
3
Diffusion pumps
Diffusion pumps
diffusion pump is one form of a fluid entrapment pump

a fluid (usually oil) is heated and vaporized
the vapor is A sent through a nozzle with supersonic speed
the pump fluid vapor is condensed on a cooled surface
Gas molecules are transported to the bottom of the pump by the pump
fluid, where it is evacuated by a backing pump (usually a rotary vane
pump) through the pump exhaust (the foreline)
In order to work, the pump cannot be started until the foreline pressure
is sufficiently low (~millitorr)
Water ejector pump (Liquid Jet pump)
Pump Construction
How the Pump Works
How the Pump Works

-A coil heater (1) raises the temperature of
the oil pool (2) inside the pump body (3)
with external cooling coils (4)
-The pump body is bolted to the vacuum
system by a flange (5)
-The oil vapor rises through the housing that
has 4 exit nozzles (A D).
- The oil vapor exits the nozzles at high
velocity (7) and collides with gas molecules
(6), imparting a downward momentum to
them.
Release of Vapors
First stage vapors are

separated from others
Pumping Speed
Pumping Speed (Air)
Critical Point
1. Compression Ratio Limit
2. Constant Speed
3. Constant Q (Overload)
4. Mechanical Pump Effect
10-10
10--3
Inlet Pressure (Torr)
10--1
Maximum Tolerable Foreline Pressure

(critical pressure)
LN2 reservoir with baffles
How the LN2 Trap Works

Gas
Water (H2O)
Argon (A)
Carbon Dioxide (CO2)
Carbon Monoxide (CO)
Helium (He)
Hydrogen (H2)
Oxygen (O2)
Neon (Ne)
Nitrogen (N2)
Solvents
Approximate Vapor
Pressure (mbar)
10-22
500
10 -7
>760
>760
>760
350
>760
760
<10 -10
Diffusion pump characters
Diffusion pump Fluids
Diffusion pumps -- additional information

The only justification for calling them diffusion pumps is due to
the observation that the molecules of the pumped gas penetrate

some distance into the vapor jet in a manner resembling
diffusion of one gas into another. (Hablanian, High Vacuum
Technology)
Original pumping fluid (before 1928) was mercury, since it did

not break down and early oils did -- over 99% today use oil
The boiler pressure inside a nozzle is 1 to 2 torr, while at the
center of the vapor stream it is about 0.1 torr
A cold trap is often used in the high vacuum side to reduce oil
backstreaming
Diffusion pumps -- additional information
Low cost per unit pumping speed, very high pumping speeds
Very well understood
Hard to destroy
Continuous operating expense (LN2)
Potential for serious vacuum accidents

Open system:Forbidden in certain applications
Vacuum system use for diffusion

pumps
Chamber
LN2 cold trap
Diffusion pump
Rotary
pump
Turbomolecular
pumps
Turbomolecular pumps (high

vacuum and UHV)
Medium to high cost per unit pumping speed

Very clean, pumps rare gases
Requires periodic maintenance which can be
expensive
Difficult to reach very low UHV base pressures
Open system:Forbidden in certain
applications
Pump Operation
Molecule
Moving Wall with Speed V

Principle of the Turbomolecular Pump
Turbomolecular pumps
Operation can be extended to higher pressure
by adding a drag stage
Principal of Turbomolecular pump
Rotor - stator assembly
Turbomolecular pump principle

To maximise the compression ratio, blade tip velocities
need to be comparable to molecular thermal velocities.
For a single blade, at zero flow
Pout 12
K
Pin
21
where 12 is the forward transmission probability
and 21 is the reverse transmission probability
It can be shown that
K exp
Vb
2kN 0
M
T
where Vb is the blade velocity

Compression ratio
high vacuum
moving rotors impart

downward momentum
to gas molecules
low pressure
stages moving rotors only:
a molecular drag
pump
med. pressure
fixed stators
stages
decelerate the
molecule for the
next rotor hit
without the stators,

high pressure
the next rotor could
stages not impart additional
velocity to the gas
fore
molecule
vacuum
Turbomolecular Pump
INLET FLANGE
ROTOR BODY
STATOR BLADES
HIGH PUMPING SPEED
HIGH COMPRESSION
BEARING
EXHAUST
HIGH FREQ. MOTOR
BEARING
A typical turbomolecular pump
Turbomolecular Pumps
Similar in design to a
jet engine.
Alternating rotor and
stator blade
assemblies turn at
20,000-90,000 rpm to
force out molecules.
Requires a region of
low or medium
vacuum behind and in
front of pump.
Pfeiffer Vacuum GmbH
Turbomolecular pump.
Turbo pumps cannot pump from atmosphere
and cannot eject to atmosphere, so they require:
1-roughing (fore vacuum) pumps to reduce the
pressure in the vacuum system before they can
be started and
2-backing pumps to handle the exhaust.
There are many types of roughing and backing
pumps. Most accelerators now use clean (dry)
pumps to avoid oil contamination in the system.
Turbopump (cont)
contains no oil and is capable of reducing the pressure into the ultrahigh
vacuum range
operates as a molecular bat
- rotor blades spinning at speeds as high as 6x104 rpm,
- gives a blade velocity at a radius of 10 cm of 3.8x106 cm/s.
- the mean velocity of a molecule of N2 at 300 K is 4.8x104 cm/s
Because the rotor blades are slanted downward, the gas
molecules are driven towards the pump outlet
Blade sizes increase towards the high pressure exit port
Stator (stationary) blade sets are placed between rotor blade sets
Pumping efficiency is greatest when the spacing between blades is less
than the mean free path of the molecules. (~5 cm at 10-3 Torr)
Turbo pumps speed
Vacuum system use for Turbo

pumps
6
7
1
4
5
22
1
2
3
4
5
6
Chamber
Turbo Pump
Roughing Pump
Vent Valve
Roughing Gauge
High Vac. Gauge
Rotary pump
3
Turbo pump &Rotary pump

Turbomolecular Pump
Process chamber
High rotation speed turbine

imparts momentum to gas atoms
Inlet pressures: <10 mTorr
Foreline pressure: < 1 Torr
Requires a rough pump
Good choice for toxic and
explosive gases
-gases are not trapped in pump
foreline
All gases are pumped at approx.

the same rate
Pumping Speeds:
20 2000 liters per sec

adapted from Lesker.com
Ion Pumps
Ion Getter Pump

A getter
Is a material
that reacts
with a gas
molecule to
form a solid
nonvaporizable
material
Ion pump
The ion pump works by ionizing
gas molecules and accelerating
them into walls coated with freshlyevaporated titanium
the gas ions strike a titanium
cathode and cause sputtering
the sputtered Ti is reactive and
will getter reactive gases (N2,
O2)
the gas ions can be buried by
self-ion implantation
A strong magnetic field is applied
to cause the electrons to move in
helical paths and increase the
ionization efficiency
Ion pump (sputter- Ion pump, getter Ion

pump)
Ion pumps
Main components
Array of parallel
stainless tubes
Various charged
surfaces
Titanium or tantalum
coated surfaces
Trap molecules with

varying speeds via
chemical reactions
Varian Scientific Instrumentation, Inc.
Ion pumps
Ion pumps have several serious disadvantages
low pumping speeds (inert gases are pumped
especially poorly)
can only be started at low pressures (~ 10-4 torr)
can arc-over if pressure increases suddenly
However, ion pumps are very clean and can produce
very high vacuums (<10-12 torr)
Ion pump
Expensive per unit pumping speed
Low pumping speed
Generates hydrocarbons
Has a memory effect
Very low maintenance
Moderately difficult to destroy
Excellent base pressures

Does not pump rare gases well

Does not pump hydrogen
Closed system: very safe against
vacuum accidents
A typical
ion-pump
Ion Pumps
Current (per cell) and hence pumping

speed depends on voltage, magnetic
field, pressure and history.
I kP
1.05 < n < 1.2
Pump life depends on quantity of gas pumped

> 20 years at 10-9 mbar
Prone to generate particulates
Leakage current unpredictable, so pressure
indication below 10-8 mbar unreliable
Ion Pumps
Ion Pumps
Diode
Voltage
+7kV
Differential Starcell
Diode
+7kV
+2-5kV
Pumping Speed
(Active gases)
Pumping Speed
(Noble gases)
Starting Pressure
Highest
Good
Good
Lowest
Lowest
Good
Higher
Highest
Lowest
Lowest
Good
Highest
UHV
Low
Low
Good
Highest
Cost
Lowest
Higher
Low
Highest
Triode
-5kV
Ion Pumps
Pumping in the basic diode Penning cell
Ion Pumps
The Diode pump has poor pumping speed
for noble gases
Remedies
Differential Ion; Noble Diode
Heavy cathode
Triode
Special Anode shape e.g. Starcell
Cryopumps
Cryo-condensation
Cryopumps
Pumping by Cryocondensation
molecules
Cold surface
Cryopumps
Similar in principle to
the ion pump but uses
a cryogenically cooled
surface of activated
charcoal or zeolites to
condense and trap
gas molecules.
Kurt J. Lesker Vacuum Technology
Cryosorption in charcoal
Charcoal placement
Cryopumps
Cryopumps condense gases on cold
surfaces to produce vacuum
Typically there are three cold surfaces:
Inlet array condenses water and

hydrocarbons (60-100 Kelvin)
Condensing array pumps argon,

nitrogen and most other gases (10-20
K)
Adsorption is needed to trap helium,

hydrogen and neon in activated carbon
at 10-12 K. These gases are pumped
very slowly!
(Campbell)
Warning: all pumped gases are trapped inside the pump, so explosive, toxic
and corrosive gases are not recommended. No mech. pump is needed until regen.
adapted from www.helixtechnology.com
Cryopumps
Expensive per unit pumping speed
Very high pumping speeds are possible
Pumping hydrogen (pumps everything)
Requires periodic recharging
Vibration can be a serious problem

Types of Cryogenic Pumps

There are two major classes of such
pumps
Liquid Pool
Liquid helium temperature (~4K)
Closed cycle
Refrigerator (~12K)
Supplemented by cryosorption
Cyro pump (Liquid Pool)
Cyro pump (Closed cycle )
Cryogenic Pump Speed
Getter Pumps
When a gas molecule impinges on a clean metal film,
the sticking probability can be quite high.
For an active gas with the film at room temperature,
values can be between 0.1 and 0.8. These fall with
coverage.
For noble gases and hydrocarbons sticking coefficients
are very low (essentially zero)
Evaporated films, most commonly of titanium or barium,
are efficient getters and act as vacuum pumps for active
gases.
Getter pumps
In recent times, thin films of getter material have been
formed on the inside of vacuum vessels by magnetron
sputtering
These have the advantage of
pumping gas from the vacuum chamber by gettering
and of stopping gases from diffusing out of the walls
of the vessels
Getter Pumps
For vacuum use, the most common getter
pump is the titanium sublimation pump
Titanium sublimation pumps (HV and

UHV)
Very inexpensive and simple

Requires periodic maintenance,
which is cheap
Often misused, which limits their
performance
Selective in what it pumps (good for
oxygen, N2, air, not for rare gases)
A typical titanium sublimation pump
Others Getter Pumps

An important class of getter pumps are the Non
Evaporable Getters (NEGs)
These are alloys of elements like Ti, Zr, V, Fe, Al which
after heating in vacuo present an active surface where
active gases may be gettered
Traditionally, the getters take the form of a sintered
powder either pressed into the surface of a metal ribbon
or formed into a pellet
Getter Pumps
Getter Pumps
Vacuum cycle
Pumpdown Curve
Conditions:
Chamber closed and sealed
Vacuum pump on and all isolation valves open
No gas flowing into the chamber
What would an ideal pumpdown curve look

like?
What effect would the following have on the
ideal curve?
Real (Gross) Leak

Virtual Leak
Permeation Leak
Outgassing
Backstreaming
Pumpdown procedure
Venting procedure
System pumpdown
Standard Vacuum Cycle

Step 0: Start at atmospheric pressure at t=o
load wafer and close chamber
alternative, start at loadlock pressure (~100mT)
a loadlock is a separate vacuum chamber that
prevents the chamber from being exposed to
atmosphere
Step 1: Pump down to base pressure

remove atmospheric contaminants from the
chamber
verify system integrity
continue to next step: when pressure falls below a
trigger point
abort: if base pressure is not reached within a
certain amount
of time, indicating a leak or a pump

Step 2: Introduce gasses and stabilize
pressure
pressure increases from base pressure to process
pressure
most reactive gas is introduced last
throttle valve controls conductance to achieve
desired process pressure (effects residence time of
gasses)
continue to next step: when pressure reads within a
specified range
abort: if process pressure is not reached within a
certain amount of time, indicating a pressure control
problem

Step 3: Process
equilibrium is maintained through controlled gas flow
and controlled (throttled) pressure
RF power (if applicable) is introduced
continue to next step: when pre-set time is reached,
or endpoint is detected (for etch process)
abort: if pressure drifts outside of desired range

Step 4: Pump Out
gas flows and RF Power (if applicable) are turned off
throttle valve opens wide
purpose is to remove the majority of the reactive
gasses from the chamber
continue to next step: when base pressure is
reached for a minimum length of time
Step 5: Purge
inert gas (usually nitrogen - why?) is introduced into
the chamber
pressure inside the chamber increases to a trigger
point
presence of nitrogen restores viscous flow allowing
residual reactive gasses to be efficiently pumped
(rinsed) out
continue to
next step: when a minimum pressure is

Step 6: Second Pump Out
turn off nitrogen
pump out nitrogen and residual reactive gasses to
base pressure
continue to next step: when base pressure is
reached for a minimum length of time
Note: steps 5 and 6 may be repeated
Step 7: Vent
close all valves between chamber and pump
flow nitrogen directly into chamber
pressure increases from base pressure to
atmospheric (or loadlock) pressure
continue to next step: when atmospheric pressure is
reached
Step 8: Open Chamber and Unload Wafer

Abort Conditions
Abort = Failure to meet all conditions required
to continue processing.
Pressure not in range, Gas flow not in range,
Electrical or mechanical malfunction, Timeout,
Interlock tripped.
Accompanied by an audible and visible alarm.
Abort Priority:
1. System immediately goes to safest possible state.
2. Possible recovery of product material.
Safest Possible State:

Shut off all gas flows.
Shut off RF power (if applicable).
Pump(s) on, all isolation and throttle valve(s) wide
open.

Vacuum techniques: pumps, diffusion, sorption, and cryogenic

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Vacuum techniques

Vacuum theory and

to reduce gas density in given volume to below

enclosed vessel has continuous sources which launch

vacuum achievable at steady state is result of dynamic

Dr. G. Mirjalili, Physics Dept. Yazd University

Vacuum pumps and their

Low vacuum pumps

Typical Low Pressure

Dr. G. Mirjalili, Physics Dept. Yazd University

VACUUM PUMPING METHODS

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

PUMP OPERATING RANGES

Rotary Vane Mechanical Pump

Dr. G. Mirjalili, Physics Dept. Yazd University

VACUUM SYSTEM USE

Dr. G. Mirjalili, Physics Dept. Yazd University

Rotary Vane, Oil-Sealed

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Pump Down Curves

Dr. G. Mirjalili, Physics Dept. Yazd University

The Molecular Sieve/Zeolite

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Single &Dual Stage

Dr. G. Mirjalili, Physics Dept. Yazd University

How 2-stage rotary pump Works

Dr. G. Mirjalili, Physics Dept. Yazd University

PRESSURE LEVELS: LESS THAN 0.2 mbar

Other types of Mechanical pumps

Dry Vacuum Pumps

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

How Root Pump works

Dr. G. Mirjalili, Physics Dept. Yazd University

One Stage Roots Blower

Dr. G. Mirjalili, Physics Dept. Yazd University

Vacuum system use for Root

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Eccentric shaft produces

Dr. G. Mirjalili, Physics Dept. Yazd University

Piston Type Pump

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Sorption Pump Components

Dr. G. Mirjalili, Physics Dept. Yazd University

The sorption pump has no moving parts and therefore

HIGH VACUUM PUMPS

VACUUM PUMPING METHODS

Dr. G. Mirjalili, Physics Dept. Yazd University

PUMP OPERATING RANGES

Dr. G. Mirjalili, Physics Dept. Yazd University

VACUUM SYSTEM USE (high vacuum)

Dr. G. Mirjalili, Physics Dept. Yazd University

diffusion pump is one form of a fluid entrapment pump

Dr. G. Mirjalili, Physics Dept. Yazd University