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[This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to ] IP:
115.145.166.240 On: Wed, 23 Oct 2013 00:32:23
1991)
A simple method is proposed for reconstructing the density of states of heavily doped silicon
from low- and room-temperature photoluminescence spectra. At very low temperatures,
the distribution of minority carriers can be approximated by a Dirac 6 function, which
simplifies the problem significantly. The photoluminescence spectra of boron-doped
silicon with an acceptor density 1.7~ 102cm- 3 are analyzed. We found that the minority
band density of states is lower than the majority band density of states.
I. INTRODUCTION
Heavy doping of silicon causes a reduction of the band
gap and a distortion of the density of states (DOS),
which will significantly affect the minority-carrier transpor+s In spite of the technological importance of heavily
doped silicon, a complete characterization of the density of
states in both conduction and valence bands has not yet
been achieved. Photoluminescence (PL) spectroscopy of
heavily doped silicon has been long considered as the most
powerful probe for the characterization of the band structure. Early work on heavily doped silicon on deducing
bandgap narrowing from the PL spectra can be attributed
to Benoit et aL6 Bergersen et ai., Parsons,8 S&mid et al.,9
and Dumke. Recently Wagner has advanced the state
of art significantly by extending the doping level to
4x 102 cm - 3 and compared the PL results and a new
probe called photoluminescence excitation (PLE) spectroscopy, which is only sensitive to band-to-band excitations.
A lumped parameter called bandgap narrowing based on
the line-shape anaiysisOP was commonly extracted. It was
expected by previous authors that the band tailing effects
can be included by an empirical Gaussian factor. We have
recognized that for low-temperature PL spectra, a symmetrical Gaussian factor cannot incorporate band-tailing effects because the band tails only blur the low-energy cutoff
and have no effects on the high-energy cutoff.12 A good fit
to the PL spectra has not been obtained.
The purpose of this paper is to present a novel method
for the interpretation of the PL spectra which will yield the
energy distribution of DOS of both the conduction and
valence bands.
II. THE RECONSTRUCTING
PROCEDURES
A boron-doped
sample with
a concentration
1.7~ 102cm - 3 will be taken as an example. In Fig. 1 the
electronic transitions possible in a heavily doped p-type
silicon are shown. The measured PL spectra at 20 and 300
K by Wagner are illustrated in Fig. 2. The emission lineshape I(hv) can be expressed, assuming constant matrix
elements, by the convolution of the nonparabolic DOSS
D,(E) and D,(E) weighted by the distribution function
I(hv) =M
+CO
s--mD,(E)fdE>&&i,
xf..(Ef,,
- hv-
Eph- El
- hv - EPh - E)dE,
(1)
0021-8979/91/020838-03$03.00
838
[This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to ] IP:
115.145.166.240 On: Wed, 23 Oct 2013 00:32:23
;;
r)b
E
0
2.00
1.50
1.00
x;
0
4
Energy
Ef.
z
0
a
heavily doped silicon at very low temperature can be described by the Dirac S function.
Equation ( 1) can be rewritten as
-l-m
I( hv) =M
s --co
S ( Efn - hv - Eph - E)
0.50
0.00
-100
-75
-50
-25
25
50
Energy(meV)
FIG. 3. Density of states of the valence band. The solid line is the DOS
extracted from the PL spectra, the dashed line is the DOS from the
least-squares fitting based on Kanes density of state model (6, = 47.3
meV) and the dashed-dotted line is the parabolic density of states. The
hole quasi-Fermi energy at 20 K is approximately 99.0 meV measured
from the zero-energy point in the figure.
XD,(E)fh(E)dE
=MD,(Efn
- hv - Eph)fh(Ef, - hv - Ephj.
(2)
From Eq. (2) we can conclude that the measured PL spectra at low temperatures reflect the energy distribution of
the holes (majority carrier) directly. The quasi-Fermi energy of holes and the DOS of the valence band can be
determined in a self-consistent manner. This means that
the DOS of the valence band can be determined by an
initial guess of the hole quasi-Fermi energy. After we know
the DOS, the quasi-Fermi energy can be recalculated. The
iteration will continue until the difference between the
9
V6
:
ki
0
z
.!i
-5
-v
0
lz
850
940
Photon
1030
1120
1210
1300
energy(meV)
n(E) =D,W)exp
- (E- EfJ
kT
Y.Pan
839
839
J. Appl. Phys., Vol. 70, No. 2, 15 July 1991
[This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to ] IP:
115.145.166.240 On: Wed, 23 Oct 2013 00:32:23
Si:B, conduction
band
IV. CONCLUSlONS
-100
-75
-50
-25
25
50
Energy(meV)
FIG. 4. Density of states of the conduction band. The solid line is the
DOS extracted from the PL spectra, the dashed line is the least-squares
fitting based on Kanes density of state model (6, = 31.0 meV) and the
dashed-dotted line is the parabolic density of states. The zero-energy point
in the figure is approximately 1.026 eV at 300 K measured from the
zero-energy point in the Fig. 3.
840
Y. Pan
840
[This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to ] IP:
115.145.166.240 On: Wed, 23 Oct 2013 00:32:23