Microfabrication using Electrochemical Spark

Anjali V. Kulkarni and

anjalik@iitk.ac.in

V. K. Jain
vkjain@iitk.ac.in

Mechanical Engineering Department

Indian Institute of Technology, Kanpur
KANPUR-208016

Abstract: This paper highlights some of the current trends and techniques used for
microfabrication of parts. The objective is to establish a viable, cost effective and fast
microfabrication process. Focus is on the use of Electrochemical spark (ECS) for layered
manufacturing in micron regime. The paper concludes with future directions of research
in this area.
Introduction: To successfully compete in today's global market, there is a dire need of
rapid product development reducing the lead-time between the design of the product to
its arrival in the market. Moreover the market demands are changing fast. To respond to
fast changing demands, manufacture of newly designed products requires several
innovative manufacturing processes. In this view electrochemical spark (ECS) process is
under study for the layered manufacturing in micron region. ECS is an evolving advanced
hybrid machining process comprising the techniques of electrochemical machining
(ECM) and electro discharge machining (EDM) together. ECS is useful for both
conducting and non-conducting materials. Micromachining needs are forcing
reconsideration of electrochemical techniques as a viable solution [1]. ECS is a strong
candidate for microfabrication utilizing the best of ECM and EDM together.
Applications of ECS for microfabrication can be in the field of aeronautic, mechanical,
electrical and similar other engineering fabrication. The prospective use of ECS is in
micro robots [2] useful in micro surgeries and micro handling [3], as an inspection
device, etc. Figure 1 gives the classification tree of the manufacturing processes [4-6].
The branch shows the evolvement of ECS process.
ECM and Micro-ECM: EC drilling (ECD) processe provides an alternative for drilling macroand micro- holes with smooth surface and acceptable taper [7]. ECM has established itself as one
of the major alternatives to conventional methods for machining of difficult-to-cut materials and
for generating complex contours, without inducing residual stresses and tool wear [8,9]. It has
been applied in diverse industries such as aerospace, automotive and electronics, to manufacture
airfoils and turbine blades, die and mold, artillery projectiles, and surgical implants and
prostheses [10]. Miniaturization of mechanical parts and complete machines, have been identified
as a future technology. For example, very small gears might find application in medical tools as
well as in sensors. However, the fabrication of small parts of dimension in micro-meter is still a
challenge. Moreover, ECM with recent advances in machining accuracy and precision can be
effectively used for micro-machining components in the electronics and precision industries
[11,12]. During the last two decades or so, ECM has been developed to a successful production
technology for the manufacture of shaving heads of the well-known Philishave. In this
application, the machined area is smaller than 5 cm2 on which 0.14 mm slots with an accuracy of
10 m are produced with a machining time of 28.5 s. For the dimensional accuracy and the close
tolerances required in electrochemical micro-machining, the interelectrode gap needs to be in the

Branch of Classification
Of Manufacturing Process

Change the
Shape of Material

Machining of Parts to a
fixed dimensions

Traditional

Mechanical

Obtaining
Surface Finish

Joining Parts
or Materials

Change the
Physical Properties

Advanced

Thermoelectric
(EDM)

Electrochemical
(ECM)

Hybrid
(ECS)

Figure 1: Evolvement of ECS (Branch in the Classification Tree of Manufacturing Process.)

order of 2050 m or even smaller. The process is mainly used for mass-production [13].
Scientists at the Fritz Haber Institute of the Max Planck Society, Berlin, have developed a simple
electrochemical procedure to fabricate 3D micro-structures. To obtain the delicate copper prism
in the middle of the hole-cavity (cross-section: 5 m x 10 m, height: 12 m), sitting on a
pedestal 15 m x 15 m x 10 m, the tool electrode of platinum wire (10 m diameter) was used.
Machining operation was performed according to the scheme using pulse voltage U=1.6 V, pulse
current I=0.020.03 A, pulse-on time ton = 50 ns and frequency of 2 MHz. The complete
machining time for the structure was 30 min [14]. This paper presents a study of detail transfer by
ECM as applicable to micro-machining capabilities. The application of pulse micro-ECM using
numerically controlled nonprofiling electrode to improve micro-ECM operations is also being
developed.

Electrochemical micro-machining (EMM) appears to be very promising as a future

micro-machining technique, since in many areas of applications it offers several
advantages, which include higher machining rate, better precision and control, and a wide
range of materials that can be machined. A review is presented on current research,
development and industrial practice in micro-ECM [15]. An EMM experimental set-up
has been developed [16] for carrying out in depth research for achieving a satisfactory
control of EMM process parameters to meet micromachining requirements. This paper
highlights the influence of various predominant factors of EMM such as controlled
material removal, machining accuracy, power supply, design and development of
microtool, role of inter-electrode gap and electrolyte, etc. EMM can be effectively used
for high precision machining operations, that is, for accuracies of the order of 1 m on 50
m. Some industrial applications of EMM have also been reported such as surface
finishing of print brands, nozzle plate for ink-jet printer head, deburring, and for
2

production of high accuracy of holes. The typical application is the production of high
aspect ratio holes and large scale production of microholes in turbine blades for
generating cooling effect. Further research into EMM will open up many challenging
opportunities of improvement towards greater machining accuracy, new materials
machining and generation of complex shapes for effective utilization of ECM in the
micro-machining domain. Madden et al [17] have fabricated micrometer scale nickel
structures including a multicoil helical spring using a sharp tipped electrode. They
achieved the deposition rate as 6m/s, two orders of magnitude greater than the
conventional electro deposition. The motivation to fabricate three dimensional submicron
structures stemmed from the capabilities of the work on fabrication of micro-surgical
robots. Electro deposition is attractive because many materials can be deposited
including, metals, metal alloys, conducting polymers, and even some semiconductors. It
has been demonstrated that submicrometer metal lines and micrometer wide polylines
can be electrodeposited on a surface. Finally, while conventional plating is limited to
vertical deposition rates of the order of 30 nm/s, localized deposition has been achieved
at the rates greater than 30 m/s.
Another work highlights on Electrochemical Fabrication (EFAB) [18] as an emerging
micromachining technology invented at the University of Southern California and
licensed to MEMGen corporation. It is based on multilayer electrodeposition of material
using a new selective deposition technique called Instant Masking which provides a
simpler, faster, and readily automated alternative to through mask electroplating. EFAB
has applications in fabricating microscale parts, micromachines, MEMS and
microoptoelectromechanical (MOEMS). EFAB uses both the structural and sacrificial
layers. These materials are electrodeposited. Both the materials need to be conductive, as
a conductive material is needed for electrodeposition. Further research is going on for
improving the EFAB process. The state-of-the-art of the EDM is discussed in the
following section.
EDM and Micro-EDM: Electrical discharge machining (EDM) is a well-established
machining option for machining geometrically complex and hard material parts that are
difficult-to-machine by conventional machining processes. The non-contact machining
technique has been continuously evolving from a mere tool and die making process to a
micro-scale machining alternative. EDM is one of the most extensively used advanced
material removal processes. Its unique feature of using thermal energy to machine
electrically conductive parts regardless of their hardness has been its distinctive
advantage in the manufacture of mould, die, automotive, aerospace and surgical
components. Ho et al [19] have recently published a paper on the state-of-the-art of
EDM. The paper reviews the research work carried out from the inception up to the
automation with the advent of computer numerical control (CNC), which has facilitated
total EDM, i.e. an automatic and unattended machining from inserting the electrodes in
the tool changer to a finished polished cavities. It reports on the EDM research related to
the discharge mechanism and material removal mechanism, improve performance
measures, optimizing the process variables, process monitoring and control of the
sparking process, simplifying the electrode design and its manufacture. A range of EDM
applications are highlighted for metals, ceramics, and modern composite materials
together with the development of hybrid machining processes.

A number of EDM variations have emerged in the industry to cope with the machining of
super hard metal alloys used exclusively in the manufacture of aeronautical and
aerospace parts. Wire-cut EDM (WEDM) is one of the most favorable variants owing to
its ability to machine conductive, exotic and high strength and temperature resistive
(HSTR) materials with the scope of generating intricate shapes and profiles [20]. With
the development of the wire electro-discharge grinding (WEDG), hybrid of WEDM
process, it became possible to produce very small electrodes or products like e.g. ejection
pins or cores for mould inserts. Since a microtool electrode with 0.1mm or less in
diameter can easily be fabricated by the WEDG method [21], the micromachining is used
in practice. Fabrication of microstructure with ED deposition (EDD) using steel or
aluminium alloy for the tool electrode is developed by Hayakawa et al. [22]. A new field
for the WEDG is the production of milling tools for micro-cutting [23]. ED machined
milling tools in tungsten carbide (diameter 100 m) are fabricated with brass as tool. A
study on the machining of high aspect ratio microstructures using micro EDM is
presented in [24]. Weng and Her [25] carried out several successful experiments
involving an electrode of 50 m diameter and a multi-electrode for the batch production
of micro-parts. The proposed method significantly reduces the production time and costs
of fabricating both, the electrodes and the parts. The recent trend in reducing the size of
products has given micro-EDM a significant amount of research attention. Micro-EDM is
capable of machining not only micro-holes and micro-shafts as small as 5 m in diameter
but also complex three-dimensional (3D) microcavities [26]. Masuzawa et al. [27-29]
also made several successful attempts producing microparts such as micro-pins, micronozzles and micro-cavities using micro-EDM.
For the micro EDM process, the authors [30] measured the electrode wear rate and found
that even if tungsten is used for the tool electrode which is one of the materials having
lower machinability by thermal machining processes, the ratio of electrode wear to work
piece material removal is more than 10%. This result suggests that if the material,
machinable by thermal machining process, such as steel or aluminum alloy is used as tool
electrode in micro EDM, the tool material will get deposited on the work piece. Figur 2
shows tool electrode deposition in the desired shape during EDM using air as the
dielectric. Multi layer deposition of the desired shape and size can result in the evolution
of micro fabrication of miniature structure.

Figure 2. ED deposited samples with air as medium (Tool :Copper wire of 0.2 mm dia., Work Material: EN
8 steel, Discharge Duration: 15s, Pulse Duration(on-time): 50s Polarity: Tool-positive, and Worknegative).

ECS Process: Electrochemical spark (ECS) can be used as a novel fabrication process
suitable for materials of low machinability, high strength, electrically conducting as well
as non-conducting. Electrochemical spark machining (ECSM) is a hybrid process, which
employs electrochemical machining (ECM) and electro discharge machining (EDM).
However, electrochemical reaction in ECS assists in case of machining of electrically
non-conductive material. ECM and EDM are well-established processes and they are
being used in industries for the production of components made of low machinability but
electrically conducting materials. The state-of-the-art for both the processes has been
presented in the previous sections. Use of ECS for machining of non-conductive
materials such as ceramics [31-35], glass [36-38], composites [39], and alumina [40,41]
has been successfully carried out. The simplified model for current estimation in ECSM
has been developed by Gregorz et al [42]. Based on this model they have presented a
fuzzy logic controller for the process. Basic similarities and differences between these
three processes are summarized in Table 1 with updated references [43]. Column 3 and 4
highlight the study of discharge and material removal mechanisms respectively.
TABLE 1. Similarities and differences in ECM, EDM and ECSM.
Process Components
Mechanism of Discharge
Mechanism
of
Material Removal
ECM
Electrodes and Not Applicable as there is Electrochemical
Electrolyte
no discharge.
Reaction

EDM

Electrodes and
Dielectric

Breakdown of the dielectric

between the electrodes.

Melting
and
vaporization of the
workpiece due to
Electrical
discharge.

ECSM

Electrodes and
Electrolyte

Several models proposed

[49-52].

Melting
and
vaporization of the
workpiece,
Several
models
proposed [51-54].

Remarks
Theoretically
and
commercially
established [44-47].
Electrodes may or may not be equal in
size.
Medium is electrolyte.
No discharge.
Suitable for machining of electrically
conducting materials only.
Theoretically
and
commercially
established [47,48].
Electrodes may or may not be equal in
size.
Medium is dielectric.
Discharge takes place between
electrodes.
Suitable for machining of electrically
conducting materials only.
Recent Technique.
Electrodes grossly different in size.
Medium is electrolyte.
Discharge takes place between
electrode-electrolyte and always at
the smaller electrode.
Suitable for machining of electrically
conducting and non-conducting
materials
as
well.
However,
developed for electrically nonconducting materials.

Table 1. Similarities and Differences in ECM, EDM, and ECSM [43].

Discharge Mechanism in ECS Process: Several reports are available on the mechanism
of discharge and metal removal (as mentioned in column 4 of Table 1) in ECSM. Anjali
et al [43, 52] have successfully explained the ECS process investigating the basic
discharge mechanism by experimental measurements. Synchronized time varying current

and temperature have been measured on-line for the first time in ECSM. These in-situ
measurements have led to the foundation of discharge formation and material removal
mechanism. The discharge in ECS is treated as detrimental in machining (subtractive)
process as it causes cathode/tool wear. We are proposing to use this phenomenon for the
constructive purpose of microfabrication as an additive process.
A novel technology for micro machining of glass, called spark assisted chemical
engraving (SACE) using ECS [55] is presented. This technology is based on
electrochemical discharge phenomena. Beyond a critical voltage, electrical discharges
occur through the gas film around the electrode and the glass machining is possible. The
SACE process is similar to the electrode effects. Some glass microstructuring examples
are presented in Figures 3a and 3b to show the potential of this technology.

(A) Pattern machined at 30V.

(B) Channels for micro reactor application.

Figure 3. Examples of SACE applications [55].

In-situ measurements have been performed by Wuthrich et al [56] while performing the
micromachining on glass using ECSM. Machining speeds of the order of 30 m/s have
been achieved with the developed tool holder, which allows to scan the substrate surface
while performing the close loop machining.
The research work is going on in studying the feasibility of using ECSM for fused
deposition of metal on to metal [57,58].
Applications of ECS Process: The process has potential usage in number of areas, such
as:
Microfabrication of miniature machine tools for micro
machining,
Microfabrication of array of holes in SU-8 material to fabricate
microfilters needed in micro-EDM process,
Microseam welding of copper plates & foils,
Fabrication of miniature components.
Heat Treatment.
Conclusions: Electrochemical spark can be effectively used for microfabrication of nonconducting materials.
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