Beruflich Dokumente
Kultur Dokumente
Kurt Kennedy, Tibor Stefansky, Gordon Davy, Victor F. Zackay, and Earl R. Parker
Citation: Journal of Applied Physics 36, 3808 (1965); doi: 10.1063/1.1713952
View online: http://dx.doi.org/10.1063/1.1713952
View Table of Contents: http://scitation.aip.org/content/aip/journal/jap/36/12?ver=pdfcov
Published by the AIP Publishing
Articles you may be interested in
Modelling the phase diagram of transition metal alloys by the embedded atom method
AIP Conf. Proc. 513, 114 (2000); 10.1063/1.1303341
Composition fluctuations and phase diagrams in ternary micellar solutions
J. Chem. Phys. 96, 3811 (1992); 10.1063/1.461885
A global constraint and the inverse problem for ternary phase diagrams
J. Chem. Phys. 96, 555 (1992); 10.1063/1.462493
Fluctuations and phase diagrams for ternary mixtures. II
J. Chem. Phys. 95, 5243 (1991); 10.1063/1.461695
Fluctuations and phase diagrams in ternary mixtures
J. Chem. Phys. 94, 4490 (1991); 10.1063/1.460739
[This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to
] IP: 200.201.10.8 On: Mon, 29 Jun 2015 16:38:13
JOURNAL
OF
APPLIED
PHYSICS
VOLUME
36,
NUMBER
DECEMBER
12
1965
F.
R.
PARKER
Inorganic Materials Research Division, Lawrence Radiation Laboratory, and Department of Mineral
Technology, College of Engineering, University of California, Berkeley, California
(Received 12 July 1965)
A rapid method for determining isothermal sections of ternary-alloy diagrams has been developed. Three
elements are evaporated simultaneously onto a heated substrate in such a way that the composition of the
deposit varies from point to point as it does in a ternary-phase diagram. An isothermal section of
the Fe-Cr-Ni system prepared by the new technique is compared with one reported in the literature. The
applicability of this technique to the preparation of ternary phase diagrams is discussed.
beam bombardment. The three electron beams are emitted from tantalum filaments located below the plane of
the crucibles. This arrangement protects the filaments
from contamination by metal vapors and leaves the
region above each crucible free from obstructions. Suitably applied electric and magnetic fields are used to
accelerate, curve, and focus the electron beams, as
indicated in Fig. 1.
The power of each beam can be varied independently
between 0.5 and 10 kW. Metals with widely different
melting points and vapor pressures can be codeposited,
and a wide range of evaporation rates can be used.
The rate of evaporation from each source is measured
with a Sloan model DTM-2A deposit-thickness monitor.
APPARATUS AND ITS OPERATION
Ideally in a three-source unit of this type, the rate
of deposition of each element would be inversely proThe method involves the simultaneous condensation
portional to the distance from the evaporating source.
of three elements on a triangular-shaped substrate. The
In practice, however, the deposition rate does not follow
composition of the deposited film varies regularly from
this simple law because the evaporation is not taking
point to point, just as it does in a ternary phase diagram.
place from a point source; also the hottest point on the
The arrangement of the three evaporating sources is
liquid surface may shift during evaporation. The liquid
shown schematically in Fig. 1, and a photograph of the
is indented where the beam impinges. The temperature
apparatus is shown in Fig. 2. The entire assembly is
varies from a maximum at the impingement point to the
enclosed in a 34-in.-diam stainless steel chamber that
melting point of the metal at the edge of the pool. Both
is evacuated to less than 5XlO- 6 Torr during evaporathe deviation from flatness caused by electron bombardtion. The three evaporating sources are located at the
ment and the temperature gradient in the pool cause a
corners of an equilateral triangle, approximately 10 in.
nonideal distribution of elements to be deposited on the
on a side. The substrate, which is identical in size and
substrate. In materials that sublime, the electron beam
shape to this triangle, is parallel to the plane of the
sources and is approximately 4 in. above it. The metals tends to dig a wedge-shaped cavity, and thus destroys
to be evaporated are solid blocks wedged tightly into the hemispherically symmetrical evaporation pattern.
cavities in water-cooled copper crucibles, and the energy This causes the composition contours in the deposited
needed to evaporate each metal is supplied by electron- film to deviate somewhat from that predicted by the
inverse-square law.
The relative amounts of the three metals deposited
at any point on the substrate can be varied by suitable
changes in their evaporation rates. A nearly complete
ternary alloy system can be deposited by making the
evaporation rates all equal, or if desired, any corner can
be magnified by reducing the evaporation rates of the
other two.
The substrate is a metallic foil, 0.001 to 0.002 in.
thick, stretched on a spring-loaded frame that holds it
tight against a slightly curved heat sink, as shown in
FIG. 1. Schematic of evaporation geometry.
Fig. 3. The substrate is sometimes heated in order to
3808
[This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to
] IP: 200.201.10.8 On: Mon, 29 Jun 2015 16:38:13
DE T E R 1\1 I N ,\ T rON
0 F
T E R K AR Y
PH A SED I A G R ,\ :vr S
FIG.
FIG.
3. Substrate-stretching asesmbly.
[This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to
] IP: 200.201.10.8 On: Mon, 29 Jun 2015 16:38:13
3810
KENNEDY
AL.
Ni
Ni
--."._ _---
ET
80 \
70 ~
60 0
50 '?....
C"
40
30
..2.
0
~.
Atomic .Of. F e - -
Atomic % Cr
Ni
cj
.\0 40
..1'
l~ 50
60
70
Atomic % Fe--+
FIG.
The evaporation unit was constructed bv the Temescal Metallurgical Corporation in accorda~ce with the
specifications of the authors. This work was performed.
under the auspices of the United States Atomic Energy
Commission.
.
[This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to
] IP: 200.201.10.8 On: Mon, 29 Jun 2015 16:38:13