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M e a s u r e m e n t
KEYENCE Measurement
Technology Evolution
KEYENCE Corporation has continuously developed measurement
technolog y for over 30 years. Each generation of measurement systems
provided additional capabilities and significant improvements in
inspection quality.
E3CMOS 2D Laser
Newly developed high
sensitivity receiver enables
highly stable and accurate
2D measurement.
Surface Scanning
Laser Confocal
Confocal System
Revolutionary system enables
new measurement capabilities for
transparent materials.
CCD Triangulation
CCD based receiver element
enables stable measurement
on any material.
LED+PSD System
Small sensor head and
robust controller.
LASER+PSD System
Semiconductor laser enables
small sensor head and high
stability on shiny targets.
1980
History of development
2
T e c h n o l o g
E v o l u t i o n
Spectral Interferometry
Original principle provides nanometre
level measurement in a small sensor head design.
High-speed
2D/3D Laser Scanner
64000 profiles per second allow
precision inspection of even the most
difficult parts.
High-speed 2D
Optical Micrometer
Inline imaging system measures
2 dimensions in with sub-micron
precision.
2014
and Beyond
INDEX
Laser Triangulation
LK-G5000 Series
Ultra High-Speed/High-Accuracy
LaserDisplacement Sensor
LK-G3000 Series
High-Speed, High-Accuracy
CCD Laser Displacement Sensor
LJ-V7000 Series
LJ-G Series
High-Accuracy 2D Laser
Displacement Sensor
SI-F1000 Series
Micro-Head Spectral-Interference
Laser Displacement Meter
SI-F80R Series
Spectral-Interference
Wafer Thickness Meter
LT-9000 Series
LS-9000 Series
LS-7000 Series
TM-3000 Series
High-speed 2D
Optical Micrometer
Spectral Interferometer
Confocal Laser
Optical Micrometer
P.32
I Micro-head size of 2 mm
I Spectral interference method
P.38
P.44
P.46
I
I
I
I
P.50
P.58
I Multi-point 2D measurement
I Tilt correction for inline measurement
I High-speed sampling of 5.5 ms
P.64
TM-3000 Series
I
I
I
I
LS-7000 Series
P.24
LS-9000 Series
LT-9000 Series
SI-F80R Series
P.18
SI-F1000 Series
LJ-G Series
I
I
I
I
I
LJ-V7000 Series
P.10
LK-G3000 Series
LK-G5000 Series
PRINCIPLE
PRINCIPLE
WIDE RANGE
HIGH-SPEED
The semiconductor laser emits the laser beam to the target as shown below. The light reflected off the target is focused by the ernostar
lens and forms an image on the light-receiving element. The position of the beam spot on the receiving element varies with the distance
to the target. This variation is evaluated and converted into a measurement of target position.
At a short distance
Light-receiving
element
Semiconductor
laser
At a long distance
Light-receiving
element
Semiconductor
laser
Transmitter
lens
Transmitter
lens
Light-receiving
element
Semiconductor
laser
Transmitter
lens
Ernostar
lens
Ernostar
lens
Light-receiving
element
Ernostar
lens
Light-receiving
element
Light-receiving
element
Measurement principle
GP64-Processor
2D Ernostar lens
HSE3-CMOS
micro-head
Spectroscopic unit
SI-F01U3
Polarization maintaining
optical fibre
Actual size
Waveform
analysis
CCD
Displacement data
Interference light
Sensor head
SI-F01
Emitted light
Diffraction
grating
Target
SLD
Optical interference
Spectroscopic analysis
LK-G5000 Series
HIGH-ACCURACY
High-accuracy measurement method uses the confocal principle and tuning fork
Light-receiving
element
Pinhole
The received light
Tuning fork
intensity is low.
Light-receiving
element
Pinhole
The received light
Tuning fork
intensity is low.
Sensor
Sensor
All of the received light passes
through the pinhole.
HIGH-ACCURACY
LJ-G Series
LJ-V7000 Series
Semiconductor
laser
LK-G3000 Series
The laser beam is focused on the target surface through an objective lens that vibrates up and down at high speed by means of
a tuning fork. The beam reflected off the target surface is converged on a pinhole and then enters the light-receiving element. By
measuring the exact position of the objective lens when the light enters the light-receiving element, the target height can be determined.
The sensor measures the distance to the target surface accurately without being affected by the material, colour, or angle of the target.
LONG LIFE
SI-F1000 Series
Monitor CMOS
SI-F80R Series
Light-receiving element
Motor
MICRO-HEAD
LT-9000 Series
Polygon mirror
Principle of measurement
Telecentric lens
Collimator lens
Mirror
Target
Receiver
TM-3000 Series
Mirror
Lens
LS-7000 Series
Lens
Diffusion
unit
CMOS
LED
Transmitter
SUCCESSFUL APPLICATION
SUCCESSFUL APPLICATIONS
Thickness
LK-G5000 Series
P.10
LK-G5000 Series
LT-9000 Series
P.10
P.46
LK-G5000 Series
P.10
LJ-V7000 Series
LK-G3000 Series
P.24
P.18
TM-3000 Series
8
P.64
LS-9000 Series
P.50
LS-7000 Series
P.58
LK-G5000 Series
LK-G3000 Series
LJ-V7000 Series
P.10
LK-G5000 Series
P.10
LK-G5000 Series
LJ-G Series
LK-G5000 Series
P.10
SI Series
P.38
LJ-V7000 Series
LT-9000 Series
P.24
LK-G3000 Series
P.18
LK-G5000 Series
P.10
TM-3000 Series
TM-3000 Series
P.64
LJ-V7000 Series
P.24
9
LK-G5000 Series
Ultra High-Speed/HighAccuracy
Laser Displacement Sensor
LK-G5000 Series
Features
Fastest in the World 392 kHz
Best linearity in its Class 0.02% of F.S.
Connect up to 12 sensor heads/network capable
http://www.keyence.com/
measure
0.005 m
0.02 %
392 kHz
Selectable variations
2x wider than
conventional model
10
LK-G5000 Series
LK-G5000 Series
Applications
LK-G3000 Series
LJ-V7000 Series
LJ-G Series
Lineup
Sensor Head
Measurement type
Repeatability
Model
80.5 mm
0.005 m
LK-H008W
203 mm
0.02 m
LK-H027
5010 mm
0.025 m
LK-H057
8018 mm
0.1 m
LK-H087
15040 mm
0.25 m
LK-H157
80.5 mm
0.005 m
LK-H008
0.02 m
LK-H022
0.025 m
LK-H052
8018 mm
0.1 m
LK-H082
15040 mm
0.25 m
LK-H152
0.005 m
LK-H008(W)
0.02 m
LK-H027K
46.35.2 mm
0.025 m
LK-H057K
0.1 m
0.25 m
Main controller
Separate display type
LK-G5001(P)
CC-Link unit
LK-CC100
DeviceNet unit
LK-DN100
Cable
Controller-to-display
connection cable
0.33 m: OP-84427
3 m: OP-51655
10 m: OP-51656
For LK-H08x
LK-F3
For LK-H15x
LK-F2
TM-3000 Series
Compact display
LK-HD500
LS-7000 Series
Configuration
Software
LK-Navigator2
LK-H2
Display
TM
LS-9000 Series
All-in-one type
LK-G5001(P)V
LT-9000 Series
80.5 mm
16.12.8 mm
SI-F80R Series
203 mm
5010 mm
SI-F1000 Series
11
LK-G5000 Series
Maximum/Minimum Measurement
Calculates the maximum
and/or minimum values.
B
A
Flatness Measurement
B
C
Warpage Measurement
Calculates the
amount of warpage.
C
A
Calculates the
average height.
Calculates the
thickness with each
pair of sensors.
B
A
D
Measured value1=B-(A+C)/2
Displacement
Speed
Acceleration
Median filter
Averages the measured values to reduce high the overall noise level in the measurement.
12
LK-G5000 Series
LK-G5000 Series
Specifications
Controller
LK-G5001V
LK-G5001PV
LK-G5001/LK-HD500
LK-G5001P/LK-HD500
Main controller
Compatible
0.001 m
999.999 m to 9999.99 mm (7 settings selectable)
Display cycle
Approx. 10 times/sec.
N/A
Display port
N/A
LED indicator
LASER ON
LJ-V7000 Series
Display range
TIMING1 input*1
Terminal
block
LK-G3000 Series
Designation
LK-HA100
Non-voltage input
Voltage input
Non-voltage input
Voltage input
RESET1 input*1
Auto-zero1 input*1
Laser control input*2
N/A
Non-voltage input
Voltage input
Non-voltage input
Voltage input
TIMING input
LJ-G Series
Alarm output
Pass/Fail Output
Non-voltage input
RESET input
Auto-zero input
Expansion
connector
N/A
SI-F1000 Series
Binary output
Baud rate: 9600 to 115200 bps
Data length: 8 bits Stop bit length: 1 bit Parity: None/even/odd
RS-232C interface
Ethernet interface*4
100Base-TX/10Base-T
Environment
resistance
N/A
24 VDC10%
SI-F80R Series
Power supply
N/A
USB interface
Ambient temperature
Relative humidity
Weight
Approx. 600 g
Approx. 300 g
LT-9000 Series
LS-9000 Series
Supported OS
Memory capacity
Display resolution
1 GB or more
Interface
LS-7000 Series
CPU
TM-3000 Series
13
LK-G5000 Series
Sensor heads
Model
Mounting mode
Reference distance
Measurement range*1
Specular reflection
LK-H025
LK-H027
LK-H055
LK-H057
LK-H085
LK-H087
LK-H155
Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection
LK-H157
Diffuse reflection
8 mm
20 mm
20 mm
50 mm
50 mm
80 mm
80 mm
150 mm
150 mm
0.5 mm
3 mm
3 mm
10 mm
10 mm
18 mm
18 mm
40 mm
40 mm
Light source
Wavelength
Laser
class
IEC 60825-1
Class 1
Class 3R
Class 2
Class 3R
Class 2
Class 3R
Class 2
Class 3R
Class 2
Class II
Class IIIa
Class II
Class IIIa
Class II
Class IIIa
Class II
Class IIIa
Class II
0.3 mW
4.8 mW
0.95 mW
4.8 mW
0.95 mW
4.8 mW
0.95 mW
4.8 mW
0.95 mW
Output
Spot diameter (at reference distance)
Linearity*2
Repeatability*3
20 m 550 m
0.05% of F.S.
(F.S.=1 mm)
0.005 m (0.001 m)
25 m 1400 m
0.02%of F.S.
(F.S.= 6 mm)
0.02 m (0.01 m)
0.02% of F.S./C
(F.S.=1 mm)
0.01% of F.S./C
(F.S.= 6 mm)
Sampling cycle
Environment resistance
Temperature fluctuation
Enclosure rating
0 to +50C*4
120 m 4200 m
0.02% of F.S.
(F.S.= 80 mm)
0.25 m
0.01% of F.S./C
(F.S.= 80 mm)
Incandescent lamp
or fluorescent lamp:
5000 lux max.
0 to +50C
0 to +50C*4
35 to 85%RH (No condensation)
Relative humidity
Vibration resistance
Aluminium die-cast
Material
Weight
70 m 2500 m
0.02% of F.S.
(F.S.= 36 mm)
0.1 m
Ambient light
Ambient temperature
50 m 2000 m
0.02% of F.S.
(F.S.= 20 mm)
0.025 m
Approx. 240 g
Approx. 230 g
Approx. 260 g
Approx. 280 g
Approx. 300 g
*1 Measurement range when the sampling cycle is 20 s or more. *2 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008W) is measured in the
normal measurement mode. *3 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008W) is measured at the reference distance with the number of
averaging measurements set to 16384. The value in parentheses is a typical example of a measurement with the number of averaging measurements set to 65536 and the sampling cycle to 200 s. *4 When the ambient temperature rises to
40C or more, mount this on a metal plate before use.
Light source
Model
Mounting mode
Reference distance
Measurement range*1
Wavelength
Laser IEC 60825-1
class FDA (CDRH) Part 1040.10
Output
Spot diameter (at reference distance)
Linearity*2
Repeatability*3
Sampling cycle
Environment resistance
Temperature fluctuation
LK-H008
Specular reflection
8 mm
0.5 mm
Class 1
Class II
0.3 mW
20 m
0.05% of F.S.
(F.S.=1 mm)
0.005 m (0.001 m)
0.02% of F.S./C
(F.S.=1 mm)
Enclosure rating
Ambient light
Ambient temperature
Relative humidity
Vibration resistance
Material
Weight
0 to +50C*4
Approx. 240 g
LK-H020
LK-H022
LK-H050
LK-H052
LK-H080
LK-H082
LK-H150
LK-H152
Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection
20 mm
20 mm
50 mm
50 mm
80 mm
80 mm
150 mm
150 mm
3 mm
3 mm
10 mm
10 mm
18 mm
18 mm
40 mm
40 mm
Red semiconductor laser
655 nm
Class 3R
Class 2
Class 3R
Class 2
Class 3R
Class 2
Class 3R
Class 2
Class IIIa
Class II
Class IIIa
Class II
Class IIIa
Class II
Class IIIa
Class II
4.8 mW
0.95 mW
4.8 mW
0.95 mW
4.8 mW
0.95 mW
4.8 mW
0.95 mW
25 m
50 m
70 m
120 m
0.02% of F.S.
0.02% of F.S.
0.02% of F.S.
0.02% of F.S.
(F.S.= 6 mm)
(F.S.= 20 mm)
(F.S.= 36 mm)
(F.S.= 80 mm)
0.02 m (0.01 m)
0.025 m
0.1 m
0.25 m
2.55/5/10/20/50/100/200/500/1000 s (9 steps selectable)
0.01% of F.S./C
0.01% of F.S./C
0.01% of F.S./C
0.01% of F.S./C
(F.S.= 6 mm)
(F.S.= 20 mm)
(F.S.= 36 mm)
(F.S.= 80 mm)
IP67
Incandescent lamp
Incandescent lamp or fluorescent lamp: 10000 lux max.
or fluorescent lamp:
5000 lux max.
0 to +50C
0 to +50C*4
35 to 85%RH (No condensation)
10 to 55 Hz, 1.5 mm double amplitude in X, Y, and Z directions, 2 hours respectively
Aluminium die-cast
Approx. 230 g
Approx. 260 g
Approx. 280 g
Approx. 300 g
*1 Measurement range when the sampling cycle is 20 s or more. *2 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008) is measured in the
normal measurement mode. *3 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008) is measured at the reference distance with the number of
averaging measurements set to 16384. The value in parentheses is a typical example of a measurement with the number of averaging measurements set to 65536 and the sampling cycle to 200 s. *4 When the ambient temperature rises to
40C or more, mount this on a metal plate before use.
Light source
Model
Mounting mode
Reference distance
Measurement range*1
Environment resistance
Wavelength
Laser IEC 60825-1
class FDA (CDRH) Part 1040.10
Output
Spot diameter (at reference distance)
Linearity*2
Repeatability*3
Sampling cycle
Temperature fluctuation
Enclosure rating
Ambient light
Ambient temperature
Relative humidity
Vibration resistance
Material
Weight
LK-H008
Specular reflection
8 mm
0.5 mm
LK-H008W LK-H022K
LK-H027K
LK-H052K
LK-H057K LK-H082
LK-H087
LK-H152
LK-H157
Specular reflection Specular reflection Specular reflection Specular reflection Specular reflection
Specular reflection*4
Specular reflection*4
8 mm
16.1 mm
16.1 mm
46.3 mm
46.3 mm
76.7 mm
147.5 mm
0.5 mm
2.8 mm
2.8 mm
5.2 mm
5.2 mm
17.6 mm to +14.5 mm
39.5 mm to +24.4 mm
Red semiconductor laser
655 nm
Class 1
Class 2
Class II
0.3 mW
0.95 mW
20m
20 m550 m
25 m
25 m1400 m
50 m
50 m2000 m
70 m
70 m 2500 m 120 m 120 m 4200 m
0.05% of F.S. (F.S.= 1 mm)
0.02% of F.S. (F.S.= 6 mm)
0.02% of F.S. (F.S.= 20 mm) 0.02% of F.S. (F.S.= 36 mm) 0.02% of F.S. (F.S.= 80 mm)
0.005 m (0.001 m)
0.02 m (0.01 m)
0.025 m
0.1 m
0.25 m
2.55/5/10/20/50/100/200/500/1000 s (9 steps selectable)
0.02% of F.S./C (F.S.=1 mm)
0.01% of F.S./C (F.S.= 6 mm)
0.01% of F.S. (F.S.= 20 mm)
0.01% of F.S. (F.S.= 36 mm)*6 0.01% of F.S. (F.S.= 80 mm)*6
IP67
Incandescent lamp or fluorescent
Incandescent lamp or fluorescent lamp: 10000 lux max.
lamp: 5000 lux max.
0 to +50C*5
0 to +50C
0 to +50C*5
35 to 85% RH (No condensation)
10 to 55 Hz, 1.5 mm double amplitude in X, Y, and Z directions, 2 hours respectively
Aluminium die-cast
Approx. 240 g
Approx. 230 g
Approx. 260 g
Approx. 280 g
Approx. 300 g
*1 Measurement range when the sampling cycle is 20 s or more. *2 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008/LK-H008W) is
measured in the normal measurement mode. *3 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008/LK-H008W) is measured at the reference
distance with the number of averaging measurements set to 16384. The value in parentheses is a typical example of a measurement with the number of averaging measurements set to 65536 and the sampling cycle to 200 s. *4 Use one of
the following dark filters when measuring a transparent or mirror surface object: LK-H082/LK-H087: LK-F3, LK-H152/LK-H157: LK-F2 *5 When the ambient temperature rises to 40C or more, mount this on a metal plate before use.
*6 Value measured at the event of diffuse reflection installation. Please contact us for the case of regular reflection installation.
14
LK-G5000 Series
Model
Designation
Ambient temperature
Environment
resistance
Relative humidity
Rated voltage
Current consumption
Weight
LK-G3000 Series
LK-CC100
CC-Link communication unit dedicated to LK-G5000 Series
Ver. 1.10 (Extended cyclic setting: Single) Ver. 2.00 (Extended cyclic setting: Double or more)*2
CLPA-certified master unit (CC-Link Ver. 2.00/Ver. 1.10)
1 to 4
156 kbps, 625 kbps, 2.5 Mbps, 5 Mbps, 10 Mbps
Dedicated CC-Link cable supporting Ver. 1.10 (Shielded 3-core twisted-pair cable: OP-79426, OP-79427)
156 kbps: 1200 m, 625 kbps: 900 m, 2.5 Mbps: 400 m, 5 Mbps: 160 m, 10 Mbps: 100 m
Remote device station
When one or less head expansion unit is connected: 0 to 50C.
When two or more head expansion units are connected: 0 to 40C.
35 to 85 %RH (No condensation)
24 VDC10 % (supplied from controller)
200 mA max.
Approx. 300 g
Network
connection
LK-G5000 Series
LJ-V7000 Series
Network
connection
Rated voltage
Current consumption
Weight
SI-F1000 Series
Environment
resistance
LJ-G Series
LK-DN100
DeviceNetTM communication unit dedicated to LK-G5000 Series
DeviceNetTM*1 compliant
ODVA-certified master unit
500 kbps, 250 kbps, 125 kbps
Generic
Dedicated 5 cables (2 signal cables, 2 power supply cables, 1 shielding cable)
Thick cable: 500 m (at transmission speed of 125 kbps)/250 m (at 250 kbps)/
125 m (at 500 kbps) Thin cable: 100 m (at all transmission speed settings)
I/O communication (Poll) Explicit message communication
11 VDC to 25 VDC
10 mA max. (when network power supply 24 V is applied)
When one or less head expansion unit is connected: 0 to 50C.
When two or more head expansion units are connected: 0 to 40C.
35 to 85%RH (No condensation)
24 VDC 10% (supplied from controller)
200 mA max.
Approx. 300 g
Storage temperature
Storage humidity
Vibration resistance
Weight
Rated voltage
Current consumption
CB-A2
2m
Approx. 200 g
LS-7000 Series
Head-to-controller cable
CB-A07
0.7 m
Approx. 100 g
LS-9000 Series
Ambient humidity
LT-9000 Series
LK-HD1001
LK-G5000 Series Touch Panel Display
TFT colour LCD
32,768 colours
640 480
170.9 128.2
Approx. 50,000 hours
White LED
Approx. 50,000 hours
40 x 30 per 1 image
Matrix resistance membrane mode
0.98N or less
More than one million times
Available only with the LK-G5000 Series
Panel built-in type, IP65f equivalent dust-proof, waterjet-proof on only front panel
Limit dust and corrosive gas
0 to 50C
35 to 85%RH (no condensation) When the ambient temperature is higher than 40C,
limit the absolute humidity to 85%RH at 40C.
-10 to +60C (no freezing)
35 to 85%RH (no condensation) When the ambient temperature is higher than 40C,
limit the absolute humidity to 85%RH at 40C.
10 to 57 Hz, 0.3 mm double amplitude/57 to 500 Hz, 2G, 3 hours in each direction (X, Y, and Z)
Approx. 1150 g
24 VDC 10%
1 A or less
Display elements
Display colour
Display panel
Pixels (W x H pixels)
Display area (W x H mm)
Service life (normal temperature and humidity)
Type
Backlight lamp
Service life
Number of switches
Mode
Touch switch
Operating force
Service life
Communication function
Structure
Operating environment
Ambient temperature
Model
Cable length
Weight
SI-F80R Series
Model
Name
CB-A5
5m
Approx. 400 g
CB-A10
10 m
Approx. 750 g
CB-A20
CB-A30
20 m
30 m
Approx. 1400 g Approx. 2000 g
Model
Cable length
Weight
CB-A5E
5m
Approx. 400 g
CB-A10E
10 m
Approx. 750 g
TM-3000 Series
15
LK-G5000 Series
Dimensions
Unit: mm
Head
14
LK-H020/LK-H022/LK-H023
LK-H025/LK-H027/LK-H028
LK-H008/LK-H008W
14
55
500
55
500
11
LASER ON/STABILITY LED
31.2
22.8
7
13.4
15
12.7
13 max.
13.5
LASER ON/STABILITY LED
13.5 max.
0.5
0.5
62
53.4
20
4.4
57.5
73.5
24.4
Mounting hole
90
11.8
8
9.2
4.4
12.3
66
40
27.5
2x4.4
Mounting hole
12.2
51.4
60
33.4
14
LK-H022K/LK-H027K
LK-H050/LK-H052/LK-H053
LK-H055/LK-H057/LK-H058
75.9
4.6
LK-H052K/LK-H057K
55
74.8
500
66.6
LASER ON/STABILITY LED
13.4
22.1
2x4.4
Mounting hole
24
7.7 max.
10.1 max.
37.6
0.5
89 max.
77.7
89.9 max.
55.4
68.5
22.8
68
59.9
10.1
40
16.1
35.8
50
30
30
4.4
46.3
9.2
12.2
68
LK-H080/LK-H082/
LK-H085/LK-H087
7.7 max.
37.4
33.4
LK-H150/LK-H152/
LK-H155/LK-H157
14
14
55
55
500
500
80.3
24
7
13.5
10.1 max.
2x 4.4
Mounting hole
35.4
22.7
20.2
0.5
68
84.3
67.3
6.8
4.2
4.4
24
24
18
8.2
76.7
9.2
12.3
75
16
10.1
33.3
80
20.6
76.2
90.5
max.
69
61.4
86.6
4
2x 4.4
Mounting hole
0.6
70
82.2
7.7
max.
150
17
33.5
38.5
147.5
17
LK-G5000 Series
Extension cable
[To extend the distance between head and controller]
CB-A07/CB-A2/CB-A5/CB-A10/CB-A20/CB-A30
CB-A5E/CB-A10E
7
Cable length (5 m, 10 m)
14
55
14
LK-G3000 Series
7
Cable length
(0.7 m, 2 m, 5 m, 10 m, 20 m, 30 m)
14
55
33
LK-G5000 Series
Unit: mm
Head-to-controller cable
[Cable between the head and controller]
55
26
11.5
LK-G5001(P)
LK-G5001(P)V
65
128
65
(65)
LK-HA100
(65)
105.5
26.3
128
(65)
26.3
(65)
105.5
DIN-rail
mounting
position
124
124
LJ-V7000 Series
Controller
DIN-rail
mounting
position
124
35.9
124
35.9
62.1
62.1
LJ-G Series
34.5
79.5
13.5
47
47
9
4xM4 Depth: 6
14
79.5
9
4xM4 Depth: 6
LK-CC100
M4 Depth: 6
13.5
M4 Depth: 6
114
14
LK-DN100
128
(13.2)
26.3
(13.2)
105.5
26.3
128
(13.2)
26.3
(13.2)
105.5
DIN-rail
mounting
position
124
124
35.9
DIN-rail
mounting
position
124
124
35.9
62.1
6
62.1
M4 Depth: 6
114
(3.2)
13.5
13.5
LK-HD500
62
46
43
13
Panel
mounting
ring
62 min.
75
128.2
(Effective
display area)
178
91
167
LT-9000 Series
14
114
Panel thickness
0.5 to 5
237
(3.2)
M4 Depth: 6
14
13.5
13.5
(3.2)
M4 Depth: 6
SI-F80R Series
6
M4 Depth: 6
(3.2)
SI-F1000 Series
26.3
+0.6
0
74.5
80
100 min.
45 +0.6
51
LS-9000 Series
8.5
25
Warning
LS-7000 Series
The LK-G Series conforms to the following FDA and IEC standards:
Model
FDA (CDRH) Part 1040.10
IEC60825-1
LK-H008/
LK-H008W
Class ll Laser Product
Class 1 Laser Product
LK-H022/H022K/H027/H027K/H052/H052K/
LK-H057/H057K/H082/H087/H152/H157
Class ll Laser Product
Class 2 Laser Product
LK-H020/H025/H050/H055/
LK-H080/H085/H150/H155
Class llla Laser Product
Class 3R Laser Product
TM-3000 Series
17
LK-G3000 Series
High-Speed, High-Accuracy
CCD Laser Displacement Sensor
LK-G3000 Series
Features
Sampling rate of 50 kHz
Linearity of 0.05% of F.S.
Repeatability down to 0.01 m
Can measure diffuse, specular, transparent, or translucent targets
Wide beam spot models are available
http://www.keyence.com/
measure
Light from
subduction
Light from
subduction
Translucent object
Waveform obtained by optimising
the 1st surface using ABLE
MULTI-ABLE CONTROL
The reflected light at each layer is sensed to optimise the
intensity of laser light. Highly accurate thickness measurements
are enabled by optimising the optical setting for each layer.
Waveform synthesised
by the multi-ABLE
function
The 1st
surface
Glass
The 2nd
surface
Waveform obtained by
optimising the 2nd
surface using ABLE
Saturation
level
MRC* ALGORITHM
When two or more peaks are generated by multiple reflections,
the algorithm compares the waveforms to the most recent
received-light waveform and determines the one with the most
similarity to the correct waveform.
Normal reflection
Light from
multiple reflections
Multiple reflections
18
LK-G3000 Series
LK-G5000 Series
Applications
LK-G3000 Series
LJ-V7000 Series
Lineup
Transmitter/
receiver separate
type
Model
Laser Class
Measuring range
Repeatability
Spot diameter
0.01 m
20 m
LJ-G Series
Type
8 mm
Small spot
LK-G08
Class 1 (IEC)
Measuring range 8 0.8 mm
LK-G10
20 m
10 mm
Class II (FDA)
Class 1 (IEC)
Compact/
Super Precision
Measuring range 10 1 mm
0.01 m
LK-G15
20 x 500 m
Small spot
LK-G32
30 m
25 mm
Wide beam
LK-G37
SI-F80R Series
Wide beam
High Accuracy
SI-F1000 Series
Small spot
0.05 m
30 mm
35 mm
30 x 850 m
Measuring range 30 5 mm
70 m
LK-G82
Multi-purpose
0.2 m
65 mm 80 mm 95 mm
Wide beam
LT-9000 Series
Small spot
70 x 1100 m
LK-G87
Measuring range 80 15 mm
120 m
LK-G152
Class II (FDA)
Class 2 (IEC)
Long Distance
LK-G157
Small spot
LK-G402
High-speed
Long Distance
0.5 m
290 m
Small spot
LK-G502
Ultra
Long Distance
LK-G507
290 x 8300 m
Measuring range
400 100 mm
300 m
2 m
TM-3000 Series
Wide beam
120 x 1700 m
Measuring range
150 40 mm
LS-7000 Series
Wide beam
LS-9000 Series
Small spot
Measuring range
500 -250/+500 mm
2 m
300 x 9500 m
19
LK-G3000 Series
Specifications
Sensor heads
Model
LK-G08
LK-G10/G15
Diffused
reflection
Specular
reflection
Reference distance
8 mm
10 mm
30 mm
Measuring range *1
0.8 mm
1 mm
5 mm
Mounting mode
LK-G32/G37
LK-G82/G87
LK-G152/G157
Diffuse
reflection
Specular
reflection
Diffuse
reflection
Specular
reflection
23.5 mm
80 mm
75.2 mm
150 mm
147.5 mm
4.5 mm
15 mm
14 mm
40 mm
39 mm
Laser Class
Output
Spot diameter (at reference distance)
Linearity *2
0.3 mW
0.95 mW
Approx. 70 x 1100 m (G87), Approx. 120 x 1700 m (G157),
Approx. 120 m (G152)
Approx. 70 m (G82)
Approx. 20 m
0.05% of F.S. (F.S.= 5 mm) 0.05% of F.S. (F.S.= 15 mm) 0.05% of F.S. (F.S.= 40 mm)
0.02 m (0.01 m)
Repeatability *3
Sampling time
0.05 m *4
0.2 m *4
0.5 m *4
LED display
Near the centre of the measurement: Green lights, Within the measurement area: Orange lights, Outside the measurement area: Orange flashing
Temperature characteristics
Enclosure rating
0.02% of F.S./C
(F.S.= 0.8 mm )
0.01% of F.S./C
(F.S.= 1 mm )
0.01% of F.S./C
(F.S.= 5 mm)
+10 to 40C
0 to 50C
35 to 85%, No condensation
Vibration resistance
10 to 55 Hz, double amplitude 1.5 mm (0.75 mm for LK-G08); two hours in each direction of X, Y, and Z
Aluminium
Incandescent lamp or
fluorescent lamp:
5000 lux max.
Relative humidity
Material
0.01% of F.S./C
(F.S.= 40 mm)
IP67 (IEC60529)
Ambient luminance
Ambient temperature
0.01% of F.S./C
(F.S.= 15 mm)
Aluminium die-cast
Approx. 245 g
Approx. 190 g
Approx. 280 g
Approx. 380 g
Approx. 290 g
Model
LK-G402/G407
Mounting mode
LK-G502/G507
Diffused reflection
Specular reflection
Diffused reflection
Reference distance
400 mm
398 mm
500 mm
Specular reflection
497.5 mm
Measuring range*1
100 mm
99 mm
-250 to +500 mm
-249 to +498 mm
Wavelength
Laser Class
Output
0.95 mW
Linearity *2
Repeatability *3
2 m
Sampling time
LED display
Temperature characteristics
Enclosure rating
Ambient light
Ambient temperature
0 to 50C
Relative humidity
Vibrations resistance
35 to 85%, No condensation
10 to 55 Hz, double amplitude 1.5 mm; two hours in each direction of X, Y, and Z
Material
Weight (including the cable)
*1 The value is obtained by measuring KEYENCEs standard target (ceramic).
<LK-G407/G402>
When the sampling rate is 20 s, the value becomes -70 mm (NEAR side) to -100 mm (NEAR side) for diffuse reflection.
When the sampling rate is 20 s, the value becomes -70 mm (NEAR side) to -99 mm (NEAR side) for specular reflection.
<LK-G507/G502>
When the sampling rate is 20 s, the value becomes -230 mm (NEAR side) to -250 mm (NEAR side) for diffuse reflection.
When the sampling rate is 20 s, the value becomes -230 mm (NEAR side) to -249 mm (NEAR side) for specular reflection.
When the sampling rate is 50 s, the value becomes -125 mm (NEAR side) to -250 mm (NEAR side) for diffuse reflection.
When the sampling rate is 50 s, the value becomes -125 mm (NEAR side) to -249 mm (NEAR side) for specular reflection.
*2 The value is obtained by measuring KEYENCEs standard target (ceramic) with the Standard mode.
*3 The value is obtained by measuring KEYENCEs standard (SUS) with 4096 times of averaging at the reference distance.
*4 All are calculated at F.S. = (250 mm).
*5 High accuracy range and long range refer to the linearity when those ranges are used.
20
Aluminium die-cast
Approx. 380 g
LK-G3000 Series
LK-G5000 Series
Controller
Type
All-in-one model
Model
LK-G3001V
LK-G3001/LK-GD500
PNP
LK-G3001PV
LK-G3001P/LK-GD500
All LK-G sensor heads are compatible
Maximum of 2 units
0.01 m
Display range
Timing/Reset/Auto-zero input
Non-voltage input *3
Comparator output
Alarm output
Timing/Reset/Auto-zero input
Laser-Off input
Comparator output
Alarm output
Binary output
Measured data output (21 bits), OUT1/OUT2 selectable, NPN or PNP open-collector output *2
Strobe output
LJ-G Series
Expansion connector
LJ-V7000 Series
Terminal block
Refresh rate
Binary
LK-G3000 Series
Head compatibility
Display
NPN
RS-232C interface
Measured data output and control input/output (Maximum baud rate: 115200 bps, selectable)
USB interface
Major functions
Power supply voltage
Current consumption
Ambient temperature
SI-F1000 Series
2 OUT simultaneous measurement, Operation, Averaging, Filter, Calibration, Measurement, AUTO ZERO,
Sampling frequency setting, Mutual interference prevention, Data storage, 8-program memory, ECO mode,
ABLE setting, Target setting, ABLE tuning, Selection of measurement surface of transparent target,
Statistics processing, Connection of setting support software, Selectable head-mounting, etc.
0 to 50C
Relative humidity
35 to 85%, No condensation
Weight
SI-F80R Series
*1 LK-G3001(P) can be operated singly. The measured value display and setting modifications can be performed on the display panel (LK-GD500) or via the setting support software (LK-H1W).
*2 The rating of the NPN open-collector: 50 mA max. (40 V max.), residual voltage of 0.5 V max. The rating of the PNP open collector: 50 mA max. (30 V max.), residual voltage of 0.5 V max.
*3 (NPN model) The rating of non-voltage input: 1 V or less ON voltage, 0.6 mA or less OFF current. (PNP model) The rating of voltage input: 10.2 V or more ON voltage (26.4 V max.) 0.6 mA or less OFF current.
Hardware environment
Item
CPU
Supported OS
Memory capacity
Display
Hard disk space
Interface*4
LT-9000 Series
Hardware requirements
Pentium III, 400 MHz or higher
Windows 7*1/Windows Vista*2
Windows XP*3/Windows 2000 Professional
64 Mbytes or more
800 x 600 pixels, 256 colours or more
10 Mbytes or more
RS-232C (serial port) or
USB2.0/1.1*5 must be installed.
LS-9000 Series
LK-GC5
LK-GC10
LK-GC20
2m
5m
10 m
20 m
LK-GC30
30 m
Approx. 200 g
Approx. 400 g
Approx. 750 g
Approx. 1400 g
Approx. 2000 g
OP-51654
OP-51655
OP-51656
0.3 m
3m
10 m
LS-7000 Series
LK-GC2
TM-3000 Series
21
LK-G3000 Series
Dimensions
Unit: mm
Sensor heads
14
14
LK-G08
LK-G10/G15
55
55
500
500
7
32
28
54
45
41
26.3
22.8
2-4.4
Mounting hole
3-4.4
(Mounting hole)
51.2
71.7
108
100
24
16
7.4
35 31 27
15
10
11
9 to 11
75
7.2 to 8.8
11.5
27
22
31.5
7 17
10
14
LK-G32/G37
LK-G82/G87
55
55
2-4.5
500
25
Mounting hole
76
7
500
2-4.5
Mounting hole
26
85
14
0.6
67
36
95
25
76 67
40
25 to 35
25
65 to 95
13.5
13
13.5
LK-G152/G157
18
LK-G402/G407/G502/G507
14
55
55
4
500
33.3
20.2
2-4.4
500
82.2
108
Mounting hole
20
0.7
76.2
68
85
4.2
18
8.2
4.5
2 - 4.4
mounting hole
76
8.2
19.2
10.2
110 to 190
17
22
36.2
250 to 1000
(300 to 500)
LK-G3000 Series
LK-G5000 Series
Unit: mm
Controllers
LK-G3001V/LK-G3001PV
62
LK-G3001/LK-G3001P
62
(65)
117
95
(65)
LK-G3000 Series
DIN-rail
mounting position
124
124
35.9
LJ-V7000 Series
66.1
43
43
9.5
9.5
13.5
4-M4 screws,
70
Depth: 6
70
LJ-G Series
33
4-M4 screws,
Depth: 6
SI-F1000 Series
7
Cable length
(2 m, 5 m, 10 m, 20 m, 30 m)
33
14
55
26
SI-F80R Series
11.5
LT-9000 Series
Display panel
LK-GD500
62
min.
Panel thickness
0.5 to 5
62
46
13
Panel-mounting ring
91
74.5
80
100
min.
45
LS-9000 Series
75
+0.6
0
+0.6
0
LS-7000 Series
8.5
25
TM-3000 Series
23
LJ-V7000 Series
LJ-V7000 Series
Features
An emphasis on inline multi-point measurement
The worlds fastest at 64,000 profiles/sec.
Blue laser optical system
http://www.keyence.com/
measure
Worlds fastest
The LJ-V7000 Series has achieved the worlds fastest sampling speed.
Other devices within the 2D laser measuring device market cannot even
come close.
It can measure the shapes of products running on a line or through
equipment at ultra high speeds, with high-resolution and without missing
an item. As an example, it can measure targets moving at 6.4 m/s with
a pitch of 0.1 mm. The LJ-V7000 Series does not allow the passing of
abnormal or defective areas.
Industrys greatest
24
LJ-V7000 Series
LK-G5000 Series
Applications
LK-G3000 Series
LJ-V7000 Series
LJ-G Series
Measurement is performed to
determine if the shapes of moulded
parts that are extruded at high
speeds are correct or not. Various
targets can be supported, including
rubber, metal, ceramics, concrete,
and food products.
Lineup
High-accuracyHigh-accuracy
LJ-V7060 LJ-V7060
Ultra-long range
Ultra-long range
LJ-V7300 LJ-V7300
(mm)
(mm)
(mm)
(mm)
(mm)
(mm)
(mm)
(mm)
100
100
100
100
450
450
450
450
450
450
50
50
50
400
400
400
400
400
400
350
350
350
350
350
300
300
300
300
300
155 mm
250
250
250
250
250
200
200
200
200
200
17.4 mm
17.4 mmWidth: 6.5 mm
20 mm
20 mm
0
22.6 mm
22.6 mmWidth: 7 mm
Width: 7.5
mm
Measurement rangeMeasurement
range
20 2.6 mm
20 2.6 mm
mm
52 mm
Width: 6.5 52
mm
Width13.5 mm
60 mm
60 mm
0 7 mm
0
Width15 mm
Width:
68 mm
68 mm
Width15 mm
Width: 7.5 Measurement
mm
rangeMeasurement range
60 8 mm
60 8 mm
Width13.5 mm
35015 mm
Width
Width15 mm
20 2.6 Z-axis
mm 20 2.6Measurement
mm
Z-axis
60 8 mm
Z-axis30060 8 mm
Measurement Z-axis
Measurement
Measurement
range
range 7 mm X-axis 7 mm range
range 15 mm X-axis 15 mm
X-axis
X-axis
Repeatability
0.2 m
0.2 mRepeatability
Z-axis
Repeatability Z-axis
X-axis 2.5 m X-axis 2.5 m
0.4 m
0.4 m
Z-axis
Repeatability Z-axis250
X-axis 5 m X-axis 5 m
Ultra high-accuracy
Ultra
specular
high-accuracy
reflectionspecular reflection
High-accuracy specular
High-accuracy
reflection
specular 200
reflection
LJ-V7020K LJ-V7020K
LJ-V7060K LJ-V7060K
(mm)
(mm)
(mm)
(mm)
150
150
150
150
150
150
300 mm
100
100
100
100
100
100
100
100
152 mm
100
100
50
50
50
50
50
50
50
57 mm
Width25 mm
Width25 mm
80 mm
80 mm
47 mm
21.9 mm
21.9Width:
mm 6.5 mm
Width: 6.5 mm47 mm
Width32 mm
Width32 mm
Width8 mm
54.6Width
mm8 mm
24.2 mm 0
24.2Width:
mm 7 mm
Width:07 mm 54.6 mm 0
103 mm 0
103 mm
014 mm
Width
62.2Width
mm14 mm
Width39 mm
Width39 mm
26.5 mm
26.5Width:
mm 7.5 mm
Width: 7.5 mm62.2 mm
Width8 mm
Width8 mm
Measurement
range
Measurement
range
Measurement
range
Measurement
range
Measurement rangeMeasurement range
54.6 7.6 mm
54.6 7.6 mm
80 23 mm
80 23 mm
24.2 2.3 mm
24.2 2.3 mm
Z-axis
80 23 mm
Z-axis 80 23 mm
24.2 2.3Z-axis
mm
24.2 2.3
mm
Z-axis
54.6 7.6Z-axis
mm
54.6 7.6
mm
Measurement
Measurement
Measurement Z-axis
Measurement
Measurement
Measurement
range 32 mm X-axis 32 mm
range
range 7 mm X-axis 7 mm range
range 14 mm X-axis 14 mm range
X-axis
X-axis
X-axis
Repeatability
Controller
LJ-V7001(P)
Monitor
Controller
LJ-V7001(P)
Controller variation
Controller variation
LJ-V7001
NPN output type NPN
output type LJ-V7001
Display output
unit
LJ-VM100
Monitor
200 mm
Width62 mm
50
Width62 mm
248 mm 0
Measurement
range
200 48 mm
248 mm
Width73 mm
Measurement
range
200 48 mm
0
445 mm 0
Width73 mm Measurement
range
300 145 mm
300 mm
Width180 mm
Width180 mm
50
445 mm
Width240 mm
Measurement
range
300 145 mm
Width240 mm
200 48 Z-axis
mm
200 48Measurement
mm
Z-axis
300 145Z-axis
mm 300 145 mm
Measurement Z-axis
Measurement
Measurement
range
range 62 mm X-axis 62 mmrange
range 180 mmX-axis 180 mm
X-axis
X-axis
Repeatability
1 m
1 m Repeatability Z-axis
5 m
5 m
Z-axis
Repeatability Z-axis
Repeatability Z-axis
X-axis 20 m X-axis 20 m
X-axis 60 m X-axis 60 m
Cable connector
Cable connector
Display
output
Touch
panel monitor
Touch panel monitor
unit CA-MP120T
CA-MP120T
LJ-VM100
OP-87258
10 m
3 mOP-87258
3 m
CB-B3
3 m
/ CB-B10
CB-B3
m
/ CB-B10
103m
10
m
CB-B20E
20 mCB-B20E
20 m OP-87259
10 m
OP-87259
10 m
Specialised monitor
Specialised monitor
stand TM
stand
EtherNet/IP
OP-87262
unitOP-87262
CB-EP100
RS-232C
D-sub9 pin connector
Display monitor connection
Display monitor
cable connection
cable cable RS-232C cable D-sub9 pin connector
OP-96368
2.5 m
OP-96368
2.5 m
OP-26401
OP-26401
OP-66842
3 m
/ OP-66842
310m
/ OP-87055
OP-87055
m
10 m
LS-7000 Series
Controller Controller
0.5 m
0.5 m
Z-axis
Repeatability Z-axis
X-axis 10 m X-axis 10 m
Width51 mm
200 mm 50
Width110 mm
LS-9000 Series
57 mm
152 mm
Width51 mm
155 mm
Width110 mm
LT-9000 Series
(mm)
SI-F80R Series
(mm)
50
SI-F1000 Series
Ultra high-accuracy
Ultra high-accuracy
LJ-V7020 LJ-V7020
LJ-V7001P
PNP output type PNP
output type LJ-V7001P
PROFINET
unit
CB-PN100
PROFINET
unit
CB-PN100
25
TM-3000 Series
LJ-V7000 Series
Blue laser optical system Forms images of profiles with ultra-stability and high-accuracy
Worlds first
The LJ-V7000 Series is the first 2D laser displacement sensor in the world to adopt a blue laser. A
sharp line beam is formed on the light-receiving element by focusing a short wavelength 405 nm
laser to its maximum limit with a 2D Ernostar lens. This generates a stabilised high-precision profile.
Also, the received light density for the laser has been increased to successfully secure a greater
level of received light intensity. This achieves ultra-stable and highly accurate measurement with all
types of targets that are typically difficult to detect.
Red laser (conventional)
Worlds greatest
The LJ-V7000 Series is equipped with the HSE3-CMOS. In addition to improved speed, the dynamic
range has been further powered up over the established and conventional E3-CMOS. Even with the
extremely short exposure time of 64 kHz (15.6 s) it has achieved sensitivity that allows it to reliably
measure a range of surfaces from black (small amount of reflection) surfaces to those with lustre
(large amount of reflection) as well a wide dynamic range.
* HS=High Speed E3 =Enhanced Eye Emulation
CMOS
(General
displacement
metre)
300x
Dynamic range
Dynamic range
64x
E3-CMOS
(LJ-G)
HSE3-CMOS
(LJ-V)
Reading (2)
High-resolution
subpixel processing
Subpixel (1)
High-accuracy
linearisation processing
Linearisation (1)
Data output
linearisation (2)
26
Subpixel (2)
64 kHz
LJ-V7000 Series
LK-G5000 Series
With 13 types of measurement details and 7 types of measurement target specifications, this single
device can handle a total of 74 types of measurements. This single device achieves the measurement
of a wide variety of target and responds to customer demands without missing a beat.
Types of measurements
LK-G3000 Series
LJ-V7000 Series
LJ-G Series
Any 16 points can be measured simultaneously with a measurement mode that has been selected
from the 74 types that are available. Simultaneously completes measurements and inspections that
were considered to be a lost cause until now.
Centre position
SI-F1000 Series
Angle
Height
Distance
Height difference
Width
SI-F80R Series
Bottom height/position
Cross-section area
LT-9000 Series
Profile data
LS-9000 Series
LS-7000 Series
Profile data
Height data that has been
linearised at 20 bits for each point
TM-3000 Series
The LJ-V7000 Series has now been equipped with a TOE (TCP/IP off-load
engine) specifically for processing high-speed communication. This achieves
high throughput that does not affect CPU load. With this it is possible to output
64,000 units of profile data at a top speed of 1 second.
Rather than performing measurements in standard measurement mode, the
LJ-V7000 Series is used as a measuring probe and is effective in cases when
you would like to perform measurements using your own original algorithms. The
communications library is also publicly available as standard.
Pixel pitch
27
LJ-V7000 Series
Specifications
Controller
Model
LJ-V7001
LJ-V7001P
Max. 2 units
Non-voltage input
Encoder input
NPN open-collector output, voltage output (5 V/12 V/24 V), and line-driver output all supported
Trigger inputs
Timing 1, 2 input
Auto-zero1, 2 input
Input terminal
Reset 1, 2 input
block
Start measurement/stop input
Non-voltage input
Voltage input
Strobe output
Output
terminal block Disable trigger output
Memory FULL output
Ready output
Error output
Ethernet interface
1000BASE-T/100BASE-TX
USB Interface
RS-232C interface
Rating
Measurement data output and control I/O (Can select a baud rate of up to 115,200 bits/s)
Voltage
1.3 A or less when connected to 1 head/ 1.9 A or less when connected to 2 heads
0 to +50C
20 to 85% RH (No condensation)
Weight
Approx. 1500 g
The rating for NPN open-collector output is up to 50 mA (40 V or less), residual voltage of up to 1 V
The rating for PNP open-collector output is up to 50 mA (30 V or less), residual voltage of up to 1 V
The rating for non-voltage input is up to 1 V for ON voltage and up to 0.6 mA for OFF current
The rating for voltage input is a maximum input voltage of 26.4 V, a minimum ON voltage of 10.8 V, and up to 0.6 mA for OFF current
LJ-VM100
Monitor output
Voltage
Power consumption
2.5 W or less
0 to +50C
Weight
Approx. 400 g
1000BASE-T/100BASE-TX
USB*1
Supported OS*2
Supported languages
CPU
Memory capacity
2 GB or more
2D cache memory
2 MB or more
10 GB or more
Display resolution
Weight
Approx. 400 g
28
LJ-V7000 Series
LK-G5000 Series
EtherNet/IPTM unit
PROFINET unit
CB-PN100
Model
IEEE 802.3u*1
Transmission speed
Transmission media
100 m
Ethernet
Compliant standards
Transmission speed
Transmission media
Number of connectable
PROFINET IO controllers
Maximum number of
connectable hubs*1
Supported functions
Number of connections
64
RPI
Update time
2 ms to 2048 ms
GSDML
Version 2.25
Conformance class
Applicable protocol
LLDP, DCP
EtherNet/IP
TM
24 V 10%
(supplied from the controller unit of the laser scanner)
Tolerable communication
bandwidth for cyclic
communication
Power consumption
0.12 A max.
Message communication
UCMM, Class 3
Weight
Approx. 470 g
Conformance test
Power consumption
0.12 A max.
0 to +50C
Weight
Approx. 470 g
LJ-G Series
*1 A lthough this unit conforms to IEEE 802.3u and can establish 100 Mbps full duplex communication using
AutoNegotiation function, it does not have AutoCrossOver and AutoPolarity functions that are normally required for the
PROFINET IO standard. Select a straight or cross cable according to the Ethernet port of the device to be connected.
LJ-V7000 Series
PROFINET IO
Compatible network
Compliant standards
Supported functions
CB-EP100
Model
PROFINET IO communication
LK-G3000 Series
Ethernet
Compatible network
*1 The number of connectable hubs is not limited when using a switching hub.
SI-F1000 Series
Sensor head
Model
Mounting conditions
Z-axis (height)
X-axis
(width)
NEAR side
Reference distance
Far side
LJ-V7020*11
LJ-V7060K
Diffuse reflection
Specular reflection
LJ-V7060
LJ-V7080
LJ-V7200
LJ-V7300
Diffuse reflection
24.2 mm
20 mm
54.6 mm
60 mm
80 mm
200 mm
300 mm
2.3 mm
(F.S.=4.6 mm)
2.6 mm
(F.S.=5.2 mm)
7.6 mm
(F.S.=15.2 mm)
8 mm
(F.S.=16 mm)
23 mm
(F.S.=46 mm)
48 mm
(F.S.=96 mm)
145 mm
(F.S.=290 mm)
6.5 mm
6.5 mm
8 mm
13.5mm
25 mm
51mm
110 mm
7 mm
7 mm
14 mm
15 mm
32 mm
62 mm
180 mm
7.5 mm
7.5 mm
8 mm
15 mm
39 mm
73 mm
240 mm
SI-F80R Series
Measurement range
Reference distance
LJ-V7020K*11
Specular reflection
Laser class
Light source IEC60825-1
FDA(CDRH)
Part 1040.10*1
Output
10 mW
4.8 mW
10 mW
Approx. 21 mm x 45 m
Z-axis (height)*3
0.2 m
0.4 m
0.5 m
1 m
5 m
X-axis (width)*4
2.5 m
5 m
10 m
20 m
60 m
50 m
100 m
Z-axis (height)*5
Profile
Data interval
X-axis (width)
0.1% of F.S.
10 m
20 m
300 m
0.01% of F.S./C
Enclosure rating*8
LS-9000 Series
Temperature characteristics
IP67 (IEC60529)
Ambient temperature*10
0 to +45C
Vibration resistance
Impact resistance
15G/6 msec
Aluminium
Approx. 410 g
Approx. 450 g
Approx. 400 g
Approx. 550 g
Approx. 1000 g
110
145
0.05% of F.S.
180
TM-3000 Series
*1 T he laser classification for FDA(CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.
*2 T his value is from a case in which measurement has been performed with a reference distance with 4096 times of averaging.
*3 T he measurement targets are KEYENCE standard targets. This value is from a case in which the average height of the default setting area has been measured in height mode. All other
settings are default.
*4 T he measurement target is a pin gauge. This value is from a case in which the position of the intersection between the rounded surface of the pin gauge and the edge level has been
measured in position mode. All other settings are default.
*5 T he measurement targets are KEYENCE standard targets. The profile data is from a case in which measurement has been performed with 64 times of smoothing and 8 times of averaging.
All other settings are default.
*6 T he linearity will differ depending on the measurement area. (See the diagram on the right.)
*7 For high-speed mode, when the measurement area is at its minimum, binning is ON, image capture mode is set to standard, and parallel image capture is ON. All other settings are
default. For advanced function mode, when the measurement area is at its minimum, binning is ON and image capture mode is set to standard. All other settings are default.
*8 T his value is from a case in which the sensor head cable (CB-B*) or extension cable (CB-B*E) has been connected.
*9 T his is the illuminance for the light-receiving surface of the sensor head during white paper measurement when light has been shined onto the white paper.
*10 T he sensor head must be mounted on a metal plate for use.
*11 T he double polarisation function cannot be used.
*12 Do not look into the beam directly using any optical instruments (such as eye loupes, magnifiers, microscopes, telescopes, or binoculars).
Viewing the laser output with an optical instrument may pose an eye hazard.
LS-7000 Series
Material
Weight
Class 2M
Laser Product*12
Approx. 14 mm x 35 m
Linearity
Environmental
resistance
LT-9000 Series
12
0.1% of F.S.
145
240
0.15% of F.S.
29
LJ-V7000 Series
Dimensions
Unit: mm
Sensor head
LJ-V7020K
LJ-V7020
4
11
21
96
11
21
20
20
M4
2 x M4
Effective depth: 4.7
42
16
13
111.3
106.6
4.6
2 x M4
Effective depth: 4.7
M4
Effective depth: 2.8
42
16
13
(85)
110
81
4
4 x M3
Effective depth: 3
2 x 4.4
Mounting hole
60.5
10
2.3
18.5
2.6
20
2.6
45
24.2
6.5
7
7.5
2 x 4.4
Mounting hole
20
30
25.9
24.2 18.5
2.3
70
71
30
103.3
4 x M3
Effective depth: 3
6.5
7
7.5
Measurement
area
20
4 12 45
2.6
2.6
2.3
Measurement
area
0.95
0.95
2.3
48.3
High-accuracy model
LJ-V7060K
LJ-V7060
22
11
21
65
11
21
20
20
M4
Depth: 4.2
2 x M4
Depth: 2.8
M4
Depth: 4.2
114.3
83.5
42
13 16
2 x 4.4
Mounting hole
48.6
110
42
16
13
2 x M4
Depth: 2.8
4 x M3
Depth: 3.5
28
4 x M3
Depth: 3.5
80 71
30
104.1
96.7
25
4
12
18.5
11.3
60
18.5
35
13.5
54.6
54.6
8
14
7.6
7.6
Measurement
area
8
8
7.6
7.6
2.4
2.4
52.6
Middle-range model
LJ-V7080
84
11
21
20
2 x M4
Depth: 6
M4
Depth: 2.8
14
42
16
96
4
4 x M3
Depth: 3.5
71
30
(85)
71
62
20
4
18
25
23
23
32
Measurement
area
23
39
12
2 x 4.4
Mounting hole
24
80
80
30
60
23
15
15
Measurement
area
8
8
35
59
(85)
2 x 4.4
Mounting hole
LJ-V7000 Series
LK-G5000 Series
Unit: mm
38
100
38
173
100
16
25
32
LJ-V7200
105
LJ-V7300
11
16
4 x M4
Depth: 2.8
57
25
4 x M3
Depth: 3.5
20
4 x M4
Depth: 2.8
42
13 16
50
(85)
145
4 x M3
Depth: 3.5
32
79
4
12
30
LJ-V7000 Series
30
(85)
3 x 5.4
Mounting hole
20
3 x 4.4
Mounting hole
105
88
LK-G3000 Series
77 68
21.2
25
4
18
12
110
300
300
LJ-G Series
Measurement
area
24.2
200
145
145
200
51
180
48
48
62
145
145
SI-F1000 Series
Measurement
area
48
48
73
240
Multi-function controller
EtherNet/IPTM unit
LJ-V7001(P)
LJ-VM100
CB-EP100
88.8
(70)
SI-F80R Series
Controller
153.5
26.3
26.3
178
DIN rail
mounting unit
35.9
35.9
153
83.3
LT-9000 Series
DIN rail
mounting unit
150.6
DIN rail
mounting unit
35.9
153
83.3
83.3
LS-9000 Series
6
2 x M4
Depth: 6
4 x M4
Depth: 6
2 x M4
Depth: 6
13.2
13.2
60
80
80
16.5
16.5
14.4
80
16.5
CB-B3/CB-B10
CB-B5E/CB-B10E/CB-B20E
41
31
55
14
18
14 16.5
51
7.6
Cable length
(5 m, 10 m, 20 m)
55
18
14 16.5
16.5 14
(CB-B cable side)
TM-3000 Series
32
7.6
Cable length (3 m, 10 m)
LS-7000 Series
13
31
LJ-G Series
High-Accuracy
2D Laser Displacement Sensor
LJ-G Series
Features
Linearity of 0.1% of F.S.
High-speed sampling
Simultaneous measurement/judgement of up to 8 features
Stable measurement for all targets
http://www.keyence.com/
measure
Measurement menus
Average
Bottom
STEP
ANGLE/
INTERSECTION
Measures the
angle or
intersection of
detected lines.
32
Bottom height
Average height
Gap
Width/Position
Section area
Angle/Intersection
Profile comparison
Measures width/
position with a
specified
condition.
Width
SECTION AREA
Measured point
Determines the
height difference
between a
measured point
and the reference
point.
Peak height
Peak
Measurements
Step
Measuring
range
PROFILE
COMPARISON
Position of
intersection
(XZ coordinate)
Displacement of target
Reference surface
Reference point
Angle
Section area
Compares the
target profile with
the master profile
to measure the
largest difference.
Master profile
Measurement value
Adjustment
HEIGHT
Measures height in
a specified range.
Measuring
range
LJ-G Series
LK-G5000 Series
Applications
LK-G3000 Series
LJ-G Series
LJ-V7000 Series
SI-F1000 Series
SI-F80R Series
Lineup
Sensor head
LJ-G015K
LJ-G015
LJ-G030
LJ-G080
LJ-G200
(mm)
LT-9000 Series
250
200
LS-9000 Series
150
100
152 mm
w: 51 mm
200 mm
w: 62 mm
Measuring range
15 2.3 mm
12.7 mm
15 mm
17.3 mm
w: 6.5 mm
w: 7 mm
w: 7.5 mm
Measuring range
15 2.6 mm
12.4 mm
15 mm
17.6 mm
w: 6.5 mm
w: 7 mm
w: 7.5 mm
Measuring range
30 10 mm
20 mm
30 mm
40 mm
w: 20 mm
w: 22 mm
w: 25 mm
57 mm
w: 25 mm
Measuring
80 mm
range
80 23 mm
w: 32 mm
103 mm
w: 39 mm
LS-7000 Series
50
Measuring
range
200 48 mm
w: 73 mm
248 mm
15 2.3 mm
15 2.6 mm
30 10 mm
80 23 mm
200 48 mm
X-axis (Width)
7 mm
7 mm
22 mm
32 mm
62 mm
Z-axis
repeatability
0.2 m
0.2 m
1 m
1 m
2 m
X-axis
repeatability
2.5 m
2.5 m
5 m
10 m
20 m
TM-3000 Series
Z-axis (Height)
33
LJ-G Series
The E3-CMOS provides ultra-wide dynamic range which is approximately 300 times wider than conventional modes. The LJ-G Series enables target
profile measurement and the measurement of different target materials, such as black rubber (low reflected light intensity) and reflective metal (high
reflected light intensity).
* E3-CMOS sensor: Enhanced Eye Emulation CMOS image sensor
Profile measurement
Light intensity
Light-receiving
sensitivity range
High
Sensor
head
Conventional
Out of
measurement
Low
Traditional light receiving elements do not
have enough sensitivity to cover the entire
range.
Target object
Light-receiving
sensitivity range
is 300 times larger.
High
E -CMOS
Low
The dynamic range is 300 times larger than
the conventional model and covers the entire
range.
Sensitivity: Small
Sensitivity: Medium
Dynamic range
6000x
Sensitivity: Largest
Measurement profile
High capacity memory is built into the controller. A memory card slot is included to store the production records of mass-produced products.
Profile saving
The built-in memory can store up to 16 programs. When the memory card
is used, up to 160 programs can be stored to handle various product
types.
17.221
15.982
Measure
10.121
Measure
16.382
OK
Measure
14.268
OK
Measure
15.393
OK
OUT01
Program setting
Profile saving
Data storage
Internal memory
16
1024 x 2
65536 x 8
CF(1GB)
160
1024 x 300
65536 x 3200
Program01
30.000mm OUT01
Program01
30.000mm OUT01
Program01
30.000mm OUT01
MemoryCard
X : [ 5.000mm/div]
X : [ 10.000mm/div]
[mm]
X : [ 5.000mm/div]
X : [ 10.000mm/div]
-30.000mm
-20.000mm
-30.000mm
-20.000mm
OK
OUT1 GO
OUT2 GO
OUT3 GO
OUT4 GO
OUT5 GO
OUT6 GO
OUT7 GO
OUT8 GO
ALL OUT
-20.000mm
-30.000mm
-20.000mm
34
X : [ 5.000mm/div]
X : [ 10.000mm/div]
[mm]
-30.000mm
OUT1 GO
OUT2 GO
OUT3 GO
OUT4 GO
OUT5 GO
OUT6 GO
OUT7 GO
OUT8 GO
ALL OUT
OUT1 GO
OUT2 GO
OUT3 GO
OUT4 GO
OUT5 GO
OUT6 GO
OUT7 GO
OUT8 GO
ALL OUT
OUT1 GO
OUT2 GO
OUT3 GO
OUT4 GO
OUT5 GO
OUT6 GO
OUT7 GO
OUT8 GO
ALL OUT
MemoryCard
OK
OUT1 GO
OUT2 GO
OUT3 GO
OUT4 GO
OUT5 GO
OUT6 GO
OUT7 GO
OUT8 GO
ALL OUT
Measure
OK
OUT1 GO
OUT2 GO
OUT3 GO
OUT4 GO
OUT5 GO
OUT6 GO
OUT7 GO
OUT8 GO
ALL OUT
Trg interval
5 ms
20.000mm
Trg interval
Process time
5 ms
5 ms
20.000mm
Trg interval
Process time
5 ms
5 ms
20.000mm
Trg interval
Process time
5 ms
5 ms
20.000mm
Trg interval
Process time
5 ms
5 ms
-30.000mm
-20.000mm
20.000mm
Trg interval
5 ms
-30.000mm
-20.000mm
X : [ 5.000mm/div]
X : [ 10.000mm/div]
[mm]
MemoryCard
GO
GO
ZERO
30.000mm
MemoryCard
GO
ZERO
ZERO
X : [ 5.000mm/div]
X : [ 10.000mm/div]
[mm]
[mm]
X : [ 5.000mm/div]
Measure
X : [ 10.000mm/div]
[mm]
MemoryCard
GO
ZERO
GO
MemoryCard
GO
ZERO
30.000mm OUT01
Program01
ZERO
30.000mm OUT01
Program01
Program01
20.000mm
Process time
5 ms
Process time
5 ms
1024 profiles
LJ-G Series
Model
LJ-G015K
Type
Reference distance
LJ-G030
LJ-G200
2.3 mm
2.6 mm
30 mm
80 mm
200 mm
10 mm
23 mm
48 mm
Near
6.5 mm
20 mm
25 mm
51 mm
Reference distance
7.0 mm
22 mm
32 mm
62 mm
Far
7.5 mm
25 mm
39 mm
73 mm
LK-G3000 Series
X-axis
(Width)
LJ-G080
Diffuse reflective
15 mm
Z-axis (Height)
Measuring
range
LJ-G015
Specular reflective
LK-G5000 Series
Specifications
Wavelength
Laser Class
Class II Laser Product (FDA (CDRH) PART1040.10), Class 2 Laser Product (IEC 60825-1)
Output
Spot diameter (at reference distance)
Approx. 40 m x 25 mm
Approx. 80 m x 46 mm
Z-axis (Height) *2
0.2 m
1 m
1 m
2 m
X-axis (Width) *3
2.5 m
5 m
10 m
20 m
0.1% of F.S.
3.8 ms
Environmental resistance
0.02% of F.S./C
Enclosure rating
IP67 (IEC60529)
Ambient light *5
Ambient temperature
0 to 50C
Relative humidity
LJ-G Series
Vibration
35 to 85%, No condensation
10 to 55 Hz, double amplitude 1.5 mm, two hours in each direction of X, Y, and Z
Material
Weight
Approx. 180 m x 70 mm
LJ-V7000 Series
Repeatability*1
0.95 mW
Approx. 32 m x 12 mm
Aluminium
Approx. 260 g
Approx. 290 g
Approx. 350 g
Approx. 480 g
SI-F1000 Series
SI-F80R Series
LT-9000 Series
LS-9000 Series
LS-7000 Series
TM-3000 Series
35
LJ-G Series
Controller
Model
LJ-G5001
LJ-G5001P
Compatible
2 units max.
0.1 m *1, 0.001 mm2, 0.01
Input
terminal
block
Trigger input
Timing 1 input
Auto-zero 1 input
Reset input
Non-voltage input
For sensor head A, non-voltage input
Non-voltage input
Voltage input
Non-voltage input
Voltage input
Non-voltage input
Voltage input
Trigger input
Expansion
connector
Laser-Off input
Judgement/Binary output *2
Strobe output
Trigger input enable output
Adjusted error output
Measured data output and control input/output (Maximum baud rate: 115200 bps, selectable)
In conformity with USB Revision 2.0 HI-SPEED (USB 1.1 Full-SPEED compatible)
Ethernet interface
Memory card
Environmental
resistance
100BASE-TX/10BASE-T
Compatible with NR-M32 (32 MB), GR-M256 (256MB), and NR-M1G (1GB). (with FAT32)
Sensor heads calculation, Profile adjustment, Filter, Smoothing, Averaging,
Position adjustment, OUT name change, Measurement mode selection
(Height, position, gap, width, centre position, section area, intersection, angle, profile comparison, profile tracking),
Scaling, Average, Measurement, Measured value alarm, Tolerance setting, Auto-zero, Storage (data/profile),
Memory card saving, Program memory, Trigger mode change, Mutual interference prevention, Measuring range change,
Calibration, Laser light adjustment, Sampling time setting, Mask, Profile alarm setting, Inclination adjustment, Height adjustment,
Display language switch, Setting support software connection, Trigger pitch/Measuring time display, etc.
Major functions
Ratings
Current consumption
800 mA or less with 1 sensor head/1 A or less with two sensor heads
Ambient temperature
0 to 50C
Relative humidity
35 to 85%, No condensation
Weight
Approx. 1050 g
*1 When LJ-G015 or LJ-G015K is connected only. When other sensor heads are connected, the minimum display unit is 1 m.
*2 Time-sharing output of judgement results or binary measured data.
The rating of the NPN open-collector output: 50 mA max. (30 V max.), residual voltage of 1 V max. The rating of the PNP open-collector output: 50 mA max. (30 V max.), residual voltage of 1 V max.
The rating of the non-voltage input: 1 V or less ON voltage, 0.6 mA or less OFF current (Trigger input terminal: 1 V or less ON voltage, 1.0 mA or less OFF current)
The rating of the voltage input: 26.4 V maximum rating, 10.8 V or less ON voltage, 0.6 mA or less OFF current (Trigger input terminal: 26.4 V maximum rating, 10.8 V or less ON voltage, 1.0 mA or less OFF current)
LJ-H1W
Pentium III, 400 MHz or higher
Windows 7*1/Windows Vista*2/Windows XP Professional Edition/
Home Edition/Windows 2000 Professional
128 MB or more
XGA (1024 x 768 pixels) or greater, 256 colours or greater
30 MB or more
Includes one of the following:
USB 2.0/1.1*4, Ethernet*5, RS-232C (Serial port)
36
LJ-G Series
LK-G5000 Series
Dimensions
Unit: mm
Sensor head
14
Ultra high-accuracy
LJ-G015K
LJ-G015
55
LK-G3000 Series
500
7
82.6
34
2 x 4.4
(mounting hole)
19.3
34
20.3
68
9.5
9.9
22
2 x 4.4
(mounting hole)
0.7
LJ-V7000 Series
48
82.8
43.5
25
70
25
50
19.5
18
20.8
19.5
6.5
15
7
2.3
6.5
2.3
7
1.3
19.5
2.6
2.6
8
7.5
LJ-G Series
7.5
15
LJ-G030
LJ-G080
14
14
55
55
500
88
2 x 4.4
(mounting hole)
0.7
34
2 x 4.4
(mounting hole)
42
8.9
0.7
62
62
30 4
10
10
45
4
24
2
25
25
23
32
23
39
14
LJ-G200
Controller
55
3 x 4.4
(mounting hole)
0.7
76
27
138
114.5
4.2
132
82.4
DIN rail
mounting
position
68
35.9
153
9
LS-9000 Series
19
LT-9000 Series
LJ-G5001(P)
500
38
80
SI-F80R Series
25
8.9
10
70
19.5
88
23
70
20
22
23
9
SI-F1000 Series
500
7
83.3
65.3
25
200
117
(65)
200
4 x M4
Depth: 6
51
60
LS-7000 Series
48
62
80
48
73
LJ-GC2/GC5/GC10/GC20/GC30
Cable length
Weight
33
LJ-GC2
LJ-GC5
LJ-GC10
LJ-GC20
LJ-GC30
2m
5m
10 m
20 m
30 m
Approx. 200 g
Approx. 400 g
Approx. 750 g
Approx. 1400 g
Approx. 2000 g
7
Cable length: 2 m,
5 m, 10 m,
20 m, 30 m
55
TM-3000 Series
17
14
26
11.5
37
SI-F1000 Series
Micro-Head Spectral-Interference
Laser Displacement Meter
SI-F1000 Series
Features
Micro-head size of 2 mm
Spectral interference method
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measure
Development of a new principle can meet incompatible needs for small size with high accuracy that was previously impossible.
Spectroscopic unit
SI-F01U
Polarization maintaining
optical fibre
Displacement data
Interference light
Diffraction
grating
Sensor head
SI-F01
Emitted light
Target
SLD
Interference light
Spectroscopic analysis
No heat generation
Resolution of 0.25m
High resolution of 0.25m has been realised by the development of new
principles and the application of sophisticated controllers. This resolution
can fully respond to a variety of needs for high accuracy.
38
Worlds smallest
Actual Size
SI-F1000 Series
LK-G5000 Series
Applications
LK-G3000 Series
LJ-V7000 Series
Lineup
Type
Model
Head size
SI-F01
0.05 to 1.1 mm
Linearity
0.3 m
Head size
2 mm
Measurement range
11.3 to 12.35 mm
8 mm
SI-F10
Measurement
range
Resolution
0.25m
11.3 to
12.35 mm
Linearity
0.3 m
Head size
8 mm
Setting distance
80 to 81.1 mm
Head size
12 mm
SI-F80
Measurable thickness
0.05 to 1.1 mm
Resolution
Setting distance
80 mm
Measurement
thickness
0.25 m
Linearity
0.05 to 1.1 mm
0.3 m
Head size
12 mm
Micro-head type
SI-F01
Optional unit
Long distance type
SI-F10
Spectrum unit
SI-F01U3/
SI-F10U3/
SI-F80U3
LT-9000 Series
Sensor head
SI-F80R Series
0.25 m
SI-F1000 Series
Head size
Resolution
2 mm
Measurement range
0.05 to 1.1 mm
LJ-G Series
Micro-Head Type
Measurement range
LS-9000 Series
Controller
Single unit type
SI-F1003V
Separate type
SI-F1003
Expansion controller
SI-FA103
LS-7000 Series
Back surface
(Supplied together with the spectroscopic unit)
Cable
Controller-to-sensor head unit
connecting cable
CB-A07/CB-A2/CB-A5/
CB-A10/CB-A20/CB-A30
Software
Controller-to-spectrum unit
extension cable
CB-A5E/CB-A10E
Display-to-controller cord
0.33 m: OP-84428
3 m': OP-51655
10 m: OP-51656
TM-3000 Series
Display
Display panel
SI-FD500
39
SI-F1000 Series
Specifications
Sensor head
Type
Model
Sensor head
Spectrum unit
Measurement range
Micro-head type
SI-F01
SI-F10
SI-F80
SI-F01U3
SI-F10U3
0.05 to 1.1 mm *1
11.3 to 12.35 mm *1
SI-F80U3
0.05 to 1.1 mm *2
(Possible detection distance : 80 to 81.1 mm)
Infrared SLD Central wavelength 820 nm Output 0.6 mW, Class 1 Laser product (IEC60825-1, FDA (CDRH) Part 1040.10 *8 )
Light source
20 m
40 m
20 m
Linearity
0.3 m *4
0.3 m *4
0.3 m *5
Resolution
0.25 m *6
0.25 m *6
0.25 m *7
Sampling cycle
200 s
Red semiconductor laser Wavelength 650 nm Output 0.1 mW, Class 1 Laser product (IEC60825-1, FDA (CDRH) Part 1040.10 *8 )
LED display
Temperature
fluctuation
Spectrum unit
0.01% of F.S./C
IP67
Ambient light
Environment
resistance
Ambient
temperature
Sensor head
Relative
humidity
Sensor head
Vibration
Material
Weight
0 to +85C
Spectrum unit
IP64
0 to +40C
35 to 85%RH (No condensation)
Spectrum unit
Sensor head
Spectrum unit
Spectrum unit
Sensor head (including cable)
0 to +50C
0 to +35C
Sensor head
Spectrum unit
IP64
Incandescent lamp or fluorescent lamp: 10000 lux max.
Polycarbonate
Approx. 24 g
Approx. 38 g
Approx. 39 g
Approx. 1 kg
*1 Indicates distance from the front of the sensor head. For long distance type sensor heads there is an individual difference of up to 0.2 mm.
*2 The thickness measurement type sensor head displays the measurement range for the distance between plates of glass. Ensure that the measurement target is within the possible detection distance range.
*3 Indicates the minimum beam spot diameter within the measurement range.
*4 This value is obtained when the measurement target is a glass plate with the number of averaging measurements set to 256.
*5 This value is obtained by measuring the gap between two glass plates with the number of averaging measurements set to 256.
*6 This value is obtained by measuring a glass plate surface located at the centre of the measurement range with the number of averaging measurements set to 4,096.
*7 This value is obtained by measuring a 0.3 mm thick glass target within the possible detection distance with the number of averaging measurements set to 4,096.
*8 The laser classification for FDA(CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.
40
SI-F1000 Series
LK-G5000 Series
Controller
Type
Model
Main Controller
Single unit type
SI-F1003V
Separate type*2
SI-F1003/SI-FD500
SI-FA103
0.001 m
Display range
999.999 m to 9999.99 mm
(7 settings selectable)
Display cycle
10 times/sec.
N/A
Non-voltage input
TIMING1 input
Non-voltage input 2
RESET1 input
N/A
Auto-zero1 input
Non-voltage input
Non-voltage input 2
RESET input
Program switch input
Alarm output
Strobe output
USB interface
Ethernet interface
N/A
100Base-TX/10Base-T
Relative humidity
Vibration*4
0 to +50C
Ambient temperature
*3
Weight
SI-F80R Series
Major functions
Environment
resistance
N/A
SI-F1000 Series
Binary selection
output
Binary selection
input
RS-232C interface
LJ-G Series
Non-voltage input
Auto-zero input
Power supply
N/A
TIMING input
Comparator/
binary
output
10 V x 1 output,
Output impedance: 100
4 to 20 mA x 1 output,
Maximum load resistance: 350
Expansion
connector
LJ-V7000 Series
Terminal
block
LK-G3000 Series
Expansion controller*1
Approx. 300 g
LT-9000 Series
CPU
OS
Memory capacity
Display resolution
LS-9000 Series
Item
1 GB or larger
LS-7000 Series
TM-3000 Series
41
SI-F1000 Series
Dimensions
Unit: mm
Sensor head
Long distance type
Micro-head type
SI-F10
SI-F01
11
0.05 to 1.1
(Measurement range)
11.3 to 12.35
(Measurement range)
+1000
0
11000
42.3
11000
25
(10)
+1000
0
(19.2)
25
8.3
8.3
0.9
(Optical fibre)
0
2 -0.008
0.9
(Optical fibre)
8 -0.01
-0.05
9
1.250.01
0 to 1.1
(Detection range)
21
80
28
(19)
11000
+1000
0
25
0.05 to 1.1
(Measurement range)
8.3
0.9
(Optical fibre)
8-0.01
12 -0.01
-0.05
-0.05
M2 Set screw
10.5
2 x 2.5
Spot facing: 5, Depth: 2.5
3.5
6
6
12
C1 3
3.1 max.
SUS304
Spectrum unit
SI-F01U3/SI-F10U3/SI-F80U3
(With decorative panel)
127.5
65
(63)
(63)
105
DIN rail
124
124
35.9
62.1
6
47
47
9
9
42
34.5
79.5
4xM4
Depth: 6
13.5
79.5
4xM4
Depth: 6
SI-F1000 Series
LK-G5000 Series
Unit: mm
Controller
Single unit type
Separate type
SI-F1003V
SI-F1003
(65)
65
105.5
LK-G3000 Series
(65)
128
65
DIN rail
124
124
35.9
62.1
LJ-V7000 Series
47
47
9
34.5
79.5
4xM4
Depth: 6
14
4xM4
Depth: 6
79.5
LJ-G Series
Expansion controller
SI-FA103
26.3
SI-F1000 Series
128
26.3
(65)
105.5
(65)
DIN rail
124
124
SI-F80R Series
35.9
62.1
M4
Depth: 6
13.5
14
LT-9000 Series
114
M4
Depth: 6
13.5
Additional accessories
Display panel
SI-FD500
LS-9000 Series
Display
CB-A07/CB-A2/CB-A5/CB-A10/
CB-A20/CB-A30
62
46
Panel thickness:
0.5 to 5 mm
62min.
13 Display panel
attachment ring
33
75
74.5
91
80
100min.
+0.6
0
25
14
55
26
11.5
7
Cable length (5 m, 10 m)
55
TM-3000 Series
45
+0.6
0
14
8.5
LS-7000 Series
7
Cable length
(0.7 m, 2 m, 5 m, 10 m, 20 m, 30 m)
Panel cutout
14
55
43
SI-F80R Series
Spectral-Interference
Wafer Thickness Meter
SI-F80R Series
Features
Sampling speed of 5 kHz
Working distance 80 mm
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measure
[m]
200
195
Near-infrared light
190
185
Setting distance
80mm
180
175
p-p 1 to 2 m
170
Semiconductor wafer
BG tape
165
Measurement thickness
-150
-100
-50
50
100
150
160
Surface pattern
44
Patterned wafer
BG tape
SI-F80R Series
Components
LK-G5000 Series
Lineup
External device
Sensor head
Wafer thickness
measurement type
SI-F80R
Spectrum unit
SI-F80RU3
IR sensor card
LK-G3000 Series
Specifications
Model
SI-F80R
Spectrum unit
SI-F80RU3
Measurement range *1
80 to 81.1 mm
Infrared SLD Output 0.6 mW, Class 1 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10 *5 )
Light source
25 m
Linearity *3
200 s
Target near centre of measurement range: green lights. Target within measurement range: orange lights.
Target outside measurement range: flashes orange.
LED display
Spectrum unit
Enclosure rating
0.01% of F.S./C
Sensor head
IP64
Ambient light
Relative humidity
Vibration
Sensor head
0 to +50C
Spectrum unit
0 to +35C
Sensor head
Spectrum unit
Sensor head
Spectrum unit
Sensor head
SUS
Spectrum unit
Polycarbonate
SI-F80R Series
Weight
SI-F1000 Series
Ambient temperature
Environment resistance
Material
LJ-G Series
0.25 m
Resolution *4
Sampling cycle
Temperature
fluctuation
LJ-V7000 Series
Type
Approx. 70 g
Spectrum unit
Approx. 1.2 kg
The sensor head and spectrum unit are calibrated as a pair. They are not interchangeable.
*1 Indicates the thickness measurement range when the refractive index is 3.5. (The thickness measurement range is 35 to 1100 m when the refractive index is 1.)
*2 Indicates the minimum beam spot diameter within the measurement range.
*3 This value is obtained by measuring the gap between two glass plates with the number of averaging measurements set to 256, converted to a refractive index of 3.5.
*4 This value is obtained by measuring a 0.3 mm thick glass target within the possible detection distance with the number of averaging measurements set to 4096.
*5 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.
SI-F80R
LT-9000 Series
Dimensions
Unit: mm
0 to 1.1
Detection range
21
80
28
18
(26)
11000 +1000
0
25
0.05 to 1.1
Measurement range
8.3
-0.01
-0.05
-0.01
-0.05
7.50.1
LS-9000 Series
12
2.0
(Optical fibre)
SI-F80RU3
127.5
91.3
(63)
91.3
105
(63)
LS-7000 Series
124
35.9
62.1
TM-3000 Series
34.5
79.5
22.5
47
47
22.5
5xM4
Depth: 6
13.5
79.5
9
5xM4
Depth: 6
45
LT-9000 Series
LT-9000 Series
Features
recise 2 m diameter beam spot
P
0.3 m resolution
X and Z axis scanning
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measure
Profile measurement
The surface profile can be traced accurately using the oscillation unit.
A tuning fork unit and oscillation unit are combined to create a surface
scanning laser. This results in advanced displacement and profile
measurements that are unaffected by target colour or angle.
Z-axis scanning
RUN PRG0
PROFILE
OUT1:A1
+75.00 GO
UP LIMIT
+40.00
LO LIMIT
-40.00
X-axis scanning
POSITION
A1:DIFF
A2:AVE
Vertical
Horizontal
The coaxial optical system improves
measurement performance.
High angular
characteristics
Measurement of
film thickness
Profile
measurement
Angular
measurement
OUT1: +100.00
OUT2: +40.00
The first
surface
The second
surface
Angle measurement
An angle can be measured in
increments of 0.01 degrees
based on the measurement
values of two or more points
obtained by scanning the laser
beam spot.
46
The third
surface
[+1P
RUN PRG0
DISTANCE
+2P]
N
E
A
R
OUT1
THICK
PKx :100
PKx :105
PROG : 80
LT-9000 Series
OUT1:A1
+75.00 GO
RUN PRG0
PROFILE
OUT1: +100.00
OUT2: +40.00
UP LIMIT
+40.00
[+1P
The first
surface
The second
surface
LO LIMIT
-40.00
POSITION
N
E
A
R
OUT1
THICK
PKx :100
PKx :105
PROG : 80
LJ-V7000 Series
RUN PRG0
DISTANCE
+2P]
LK-G3000 Series
The third
surface
A1:DIFF
A2:AVE
LK-G5000 Series
Applications
LJ-G Series
SI-F1000 Series
SI-F80R Series
Long-range
LT-9011M
LT-9031M
Measurement range
0.3 mm
1 mm
Reference distance
6 mm
30 mm
0 to 1100 m (6 steps)
0 to 560 m (6 steps)
1 to 10 m (4 steps)
1 to 8 m (4 steps)
LT-9000 Series
Model
High-accuracy
Scan width
Interval
0.3 m
0.3 m
0.5% of F.S.
0.3% of F.S.
LS-7000 Series
Resolution
Linearity
LS-9000 Series
Appearance
TM-3000 Series
47
LT-9000 Series
Specifications
Controller
Model
Controller
LT-9501H/LT-9001H
LT-9501HSO(5654)/LT-9001HSO(5655)
LT-9011M/LT-9011
LT-9031M/LT-9031
Measuring unit
Display
Microscope function
0.1 m*5
9999.99 m
Analogue output
Terminal
block
Non-voltage input
24 VDC, 1 A
Limits mode*3
Binary mode*3
Control I/O
Binary output
Strobe output
Non-voltage input
Stability output
Non-voltage input
RS-232C interface
Measured data output and control I/O (Selectable up to baud rate 115200 bps.)
Video output
Distance mode*4
Main
function
Profile mode*4
Common
Rating
Display cycle*1
Current consumption
110 VA or lower
Overvoltage category
II
Pollution degree
Ambient temperature
0 to 35C, No condensation
Relative humidity
35 to 85%, No condensation
Weight (Controller)
Approx. 2.4 kg
Measuring unit
Type
Model
Measurement range
Reference distance
Light source
High-accuracy
LT-9011
Scan width/interval
Resolution*1
Linearity*1
Sampling cycle*2
Temperature characteristics
(20 to 30C)
Field of view
Illumination light source
Approx. 2 m
0 to 1100 m (6 steps)/
1 to 10 m (4 steps)
0.3 m
0.5% of F.S.
640 s to 356 ms (14 steps)
Approx. 7 m
0 to 560 m (6 steps)/
1 to 8 m (4 steps)
0.3 m
0.3% of F.S.
640 s to 187 ms (14 steps)
0.5% of F.S.
0.25% of F.S.
Available
1.3 mm x 1.05 mm
Infrared LED
(wavelength: 870 nm)
Ambient light
Ambient temperature
Relative humidity
Weight
Unavailable
Available
2.5 mm x 2.0 mm
Infrared LED
*1 The value when the measurement target is a mirrored surface object measured in displacement mode, scan width/interval 120 m/2 m, and 8-times average
*2 Sampling cycle differs according to the manufacturing variation of individual measuring units.
The value when the FINE mode is set to OFF.
48
LT-9031
1.0 mm
30 mm
Wavelength
Output
Laser Class
Model
Cable length
Weight
LT-9031M
0.3 mm
6 mm
Spot diameter
Microscope
function
Long-range
LT-9011M
LT-C10
10 m
Approx. 700 g
Unavailable
Approx. 500 g
LT-9000 Series
Controllers
LK-G5000 Series
Dimensions
Unit: mm
LT-9501H/9001H, LT-9501HSO(5654)/9001HSO(5655)
60
67
49
220
LK-G3000 Series
177
137
(100)
210
LJ-V7000 Series
Measuring units
LT-9011M/9011
65
LT-C2/LT-C10
43
43
56
LJ-G Series
4.5
14
14.7
22
SI-F1000 Series
37
3 x 4.5
mounting hole
28.8
15
47
2.1
17.1
5.5
33
17.1
15
11.2
SI-F80R Series
78
20
112.7
LT-9031M/9031
LT-9000 Series
65
4.5
Cable length: 3 m
11
56
4.5
22
LS-9000 Series
52.5
135
3 x 4.5
mounting hole
78
LS-7000 Series
30 2 (Reference distance)
15
46
33
26.4
TM-3000 Series
49
LS-9000 Series
Features
High-speed 16000 samples/second
The smallest detectable object 10 m
Equipped with the tilt correction and transmitter/receiver
position measurement, etc.
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measure
Principle
3-CMOSGreen-LED system
[Principle] Green-LED light is
emitted as a uniform
collimated beam. The CMOS
detects the position of the
edge between light and dark
edges of the received light
and calculates measured
values.
High-intensity
Green-LED
High performance
condenser
Monitor CMOS
Target Position
CMOS
High-speed exposure
CMOS
High-speed CMOS
50
Monitor CMOS
16000 Hz sampling
Alignment adjustment*1
LS-9000 Series
LK-G5000 Series
Applications
Measuring the outer diameter wire moving at high speed
LK-G3000 Series
Measured
value
LJ-V7000 Series
LJ-G Series
Y axis
SI-F1000 Series
X axis
SI-F80R Series
Lineup
Measuring unit
Type
Large-diameter model
Subtype
LS-9120M
LS-9030M
LS-9030
LS-9006M
LS-9006
Model
Standard model
LT-9000 Series
120 mm
Small-diameter model
30 mm
Appearance
6 mm
0.8 to 120 mm
0.08 to 30 mm
0.01 to 6 mm
Smallest detectable
object
8 m
2 m
0.5 m
Measurement accuracy
Monitor function
Type
Model
0.1 m
Not provided
Provided
0.03 m
Not provided
Provided
LS-9030D
LS-9006D
0.3 to 30 mm
0.04 to 6 mm
Not provided
LS-7000 Series
Subtype
0.3 m
Provided
LS-9000 Series
Measurement range
Appearance
2 m
0.5 m
Measurement accuracy
0.1m
0.03 m
TM-3000 Series
Measurement range
51
LS-9000 Series
Structure
The LS-9000
transmitter construction
(No moving parts)
Reflective
Reflective
mirror
mirror
Semiconductor
Semiconductor
laserlaser
Polygon
Polygon
mirror
mirror
Diffusion
DiffusionHigh-Intensity
High-Intensity
plateplate Green-LED
Green-LED
* The air purge unit is sold as an optional accessory only for the LS-9120M head.
Functions
Smallest
detectable
object
Standard mode
Ultra-thin mode
6 mm type
40 m
10 m
30 mm type
300 m
80 m
100%
80%
Threshold value
Score
52
Light
intensity
Measured value
50%
Threshold
value 1
Threshold
value 2
0%
Width
LS-9000 Series
LK-G5000 Series
Specifications
Measuring unit
Head (Standard model/small-diameter model)
LJ-G Series
Weight
LJ-V7000 Series
Measurement range
Smallest detectable object
Transmitter/receiver distance
Repeatability
Measurement accuracy
Sampling cycle*7
Detection area
Transmitter/receiver Smallest detectable object
direction and
Repeatability
position detection
Sampling cycle
Light source
Monitor camera
Ambient temperature
Relative humidity
Environmental
Ambient light
resistance
Vibration resistance
Shock resistance
Enclosure rating
Material
LS-9006M
LS-9006
LS-9030M
LS-9030
(with monitor camera)
(without monitor camera)
(with monitor camera)
(without monitor camera)
0.04 mm (0.01 mm) to 6 mm
0.3 mm (0.08 mm) to 30 mm
0.04 mm (0.01 mm)
0.3 mm (0.08 mm)
60 5 mm
160 40 mm
0.03 m*1
0.1 m*2
0.5 m*3
2 m*4
16000 samples/sec.
4 x 5 mm
20 x 24 mm
0.04 mm
0.3 mm
0.2 mm*6
0.02 mm*5
4000 samples/sec.
InGaN green LED
Provided
Not provided
Provided
Not provided
0 to +50C
20 to 85% RH (no condensation)
Incandescent lamp/fluorescent lamp 3000 lux or lower
10 to 55 Hz, double amplitude 1.5 mm, 2 hours in each direction (X,Y, and Z)
15G/6 ms
IP67 (including connector)
Aluminium
Transmitter: Approx. 130 g
Transmitter: Approx. 130 g
Transmitter: Approx. 440 g
Transmitter: Approx. 440 g
Receiver: Approx. 300 g
Receiver: Approx. 280 g
Receiver: Approx. 500 g
Receiver: Approx. 440 g
Base: Approx. 180 g
Base: Approx. 180 g
Base: Approx. 430 g
Base: Approx. 430 g
LK-G3000 Series
Model
SI-F1000 Series
LS-9030D
0.3 mm to 30 mm
0.3 mm
0.1 m*2
2 m*4
SI-F80R Series
16000 samples/sec.
InGaN green LED
Not provided
0 to +50C
20 to 85% RH (no condensation)
Incandescent lamp/fluorescent lamp 3000 lux or lower
10 to 55 Hz, double amplitude 1.5 mm, 2 hours in each direction (X,Y, and Z)
15G/6 ms
IP67 (including connector)
Aluminium
Approx. 4.8 kg
Approx. 9 kg
LT-9000 Series
Model
Measurement range
Smallest detectable object
Repeatability
Measurement accuracy
Sampling cycle*5
Light source
Monitor camera
Ambient temperature
Relative humidity
Environmental
Ambient light
resistance
Vibration resistance
Shock resistance
Measuring head enclosure rating
Material
Weight
*1 2 is the value when the outer diameter of a rod of 1.0 mm is measured at the centre of the measuring area while the number of averaging measurements is set to 2048.
*2 2 is the value when the outer diameter of a rod of 10 mm is measured at the centre of the measuring area while the number of averaging measurements is set to 2048.
*3 The error when a moving rod 1.0 mm is measured within the measuring area.
*4 The error when a moving rod 10 mm is measured within the measuring area.
*5 The sampling cycle is changed by the number of OUT set, and by the use of the mutual interference prevention function.
LS-9000 Series
LS-7000 Series
TM-3000 Series
Model
Measurement range
Smallest detectable object
Transmitter/receiver distance
Repeatability
Measurement accuracy
Sampling cycle
Light source
Monitor camera
Ambient temperature
Relative humidity
Environmental
Ambient light
resistance
Vibration resistance
Shock resistance
Enclosure rating
Material
Weight
*1 2 is the value when the outer diameter of a rod 40 mm is measured at the centre of the measuring area while the number of averaging measurements is set to 2048.
*2 The error when a moving rod 40 mm is measured within the measuring area.
53
LS-9000 Series
Specifications
Controller
Model
No. of connectable sensor heads
Head compatibility
Minimum display unit
Display
Display range
LED display
Encoder input
Synchronous 1, 2 input
Auto-zero 1, 2 input
Reset 1, 2 input
Storage trigger input
Input
terminal block
Storage enable input
Storage data clear input
Statistics 1, 2 input
Statistics clear 1, 2 input
Program selection input
Analogue voltage output
Analogue current output
Universal output
Output terminal
Status 1, 2 output
Total judgement output
Memory FULL output
Strobe 1, 2 output
Error output
Ethernet interface
USB interface
RS-232C interface
Display and settings panel interface
Power supply voltage
Rating
Current consumption*1
Environmental
resistance
Ambient temperature
Relative humidity
Weight
LS-9501
LS-9501P
2
Yes
0.01 m
99999.99 m to 9999.9 mm
POWER ON indicator, ERROR indicator
NPN/PNP open-collector output, voltage output (5 V/12 V/24 V), line-driver output
Non-voltage input
Voltage input
When LS-HA100 not used: 1.0 A max. when 1 head connected; 1.4 A max. when 2 heads connected
When LS-HA100 in use: 2.0 A max. when 3 heads connected; 2.3 A max. when 4 heads connected
When LS-HA100 not used: 0 to +50C
When LS-HA100 in use: 0 to +45C
20 to 85% RH (no condensation)
Approx. 1500 g
NPN open-collector output rating: 50 mA max. (40 V max.), residual voltage of 1 V max.
PNP open-collector output rating: 50 mA max. (30 V max.), residual voltage of 1 V max.
Non-voltage input rating: ON voltage of 1 V max., OFF current of 0.6 mA max.
Voltage input rating: Input max. voltage 26.4 V, min. ON voltage 10.8 V, OFF current 0.6 mA max.
*1 Add the current consumption values for all units when connecting the display settings panel and expansion units. When the LS-9006D or LS-9030D is connected, it counts as two heads.
Display
interface
LS-D1000
Measured value display
5 times/sec.
2
Supplied from the controller
0.19 A max.
0 to +50C
20 to 85% RH (no condensation)
IP65 (When panel attached, front surface only)
Approx. 400 g
Required environment
Windows 7*1
Windows Vista*2
Windows XP (SP2 or later)*3
Japanese, English, German, Simplified Chinese, Traditional Chinese
Core 2 Duo 2 GHz or more
2 GB or more
2 MB or more
10 GB or more
XGA (1024 768 pixels) or more, 256 colours or more
USB 2.0 HI-SPEED supported (USB 1.1 Full-SPEED compatible)*4
Ethernet 1000BASE-T/100BASE-TX*5
If you wish to use the send to Excel function, please check that one of the Excel versions listed below is installed on your computer.
Excel 2010 (32 bit/64 bit), Excel 2007, Excel 2003, Excel 2002
*1 Each edition of Home Premium, Professional, and Ultimate are supported. *2 Each edition of Ultimate, Business, Home Premium, and Home Basic are supported.
*3 Home Edition and Professional Edition are supported. *4 Connection via a USB hub is not covered by the warranty. *5 Connection to a LAN and connection via a router is not covered by the warranty.
54
LS-9000 Series
LK-G5000 Series
Input terminal
Power source
Rating
Current consumption
Ambient temperature
Relative humidity
Environmental
resistance
Weight
LK-G3000 Series
BCD output *1
Strobe output
OUT selection output
OUT selection input
Output terminal
CB-BD100
POWER-ON LED
NPN open-collector output x 4 ports
NPN open-collector output x 4 outputs
NPN open-collector output x 4 outputs
Non-voltage input x 4 inputs
Supplied from the controller
0.16 A max.
0 to +50C
20 to 85% RH (no condensation)
800 g
LJ-V7000 Series
EtherNet/IPTM unit
Model
Ethernet
Transmission speed
Transmission media
Supported functions
Number of connections
RPI
Message communication
Conformance test
Current consumption
0.12 A max.
Environmental
resistance
Ambient temperature
Relative humidity
0 to +50C
20 to 85% RH (no condensation)
Approx. 470 g
LT-9000 Series
Weight
SI-F80R Series
SI-F1000 Series
EtherNet/IPTM
Compliant standards
LJ-G Series
CB-EP100
Compatible network
*1 The number of connectable hubs is not limited when using a switching hub.
PROFINET unit
CB-PN100
Compatible network
Ethernet
IEEE 802.3u*1
Transmission speed
Transmission media
Supported functions
Update time
GSDML
Conformance class
Conformance test version
Applicable protocol
TM-3000 Series
100 m
Data I/O communication
LS-7000 Series
Weight
PROFINET IO communication
Compliant standards
PROFINET IO
LS-9000 Series
Model
0.12 A max.
Approx. 470 g
*1 Although this unit conforms to IEEE 802.3u and can establish 100 Mbps full duplex communication using AutoNegotiation function, it does not have AutoCrossOver and AutoPolarity functions that are normally required
for the PROFINET IO standard. Select a straight or cross cable according to the Ethernet port of the device to be connected.
55
LS-9000 Series
Dimensions
Unit: mm
Measuring head
LS-9120M
4 x M3
4 x M3
Effective depth 6
Effective depth 6
4 x M4
25 25
17 1
Measurement position
Effective depth 10
35
162
55.6
Measuring
head
162
4 x 6.5 Through-hole
150
150
8
30.6 16
16
233
Measuring
area
30
30
30.6
175
80
180 168
168
120
180
R2
2
89 1
6
20
59.2
15
145
3 x 7.5
Mounting hole
200
400
15
288
LS-9030/LS-9030M
4 x M6
272
Effective depth 10
35
2 x M3
10.3
Effective depth 3
2 x M3
Effective depth 3
15 15
4 x M4
Effective depth 10
706
(70.5)
55
38.3
Measuring
head
35
(31.5)
55
26
26 0.2
Measurement position
26
3 x 7.5
Mounting hole
125
55
Front surface
of receiver 10.3
4 x 4.5 Through-hole
8 Spot facing depth 4.5
55
26
35
Front surface
10.3
of transmitter
(387.5)
4 x M4
4 x M4
(34)6*2
Effective depth
(12)*1
109
132
222
(12)*1
Measuring
area
118.5
222
112
Effective depth 6
20
30(24)*3
71.5 60
R2
71.5
Measuring
head
60
35.5 0.2
5.5
5.5
19.5
(85)
80
3 x 5.5
(Mounting hole)
50
27
160
27
3 x 5.5
(Mounting hole)
50
LS-9006/LS-9006M
2 x M2.5 Effective depth 2.5
12.5
13
12.5
2 x M2.5 Effective depth 2.5 13
21.5
10 10
4 x M4
Through-hole
24
Measuring
head
25
18
3.5
8
4x8
Spot facing depth
20 20
4.5
24
21.5
24
16
12.5 0.2
Measurement position
Front surface
of receiver
4 x 4.5
Through-hole
24
Front surface
of transmitter
(227)
124.5
2.5
48
32
Measuring area
R2
56
(17.5)*1
(23)*1
4(2)*2
8
40 0.2 6(5)*2
4
(30)
(85)
3 x 4
(Mounting hole)
115
4 32.5
38
78
56
Measuring
head
18
2 x 4
(Mounting hole)
(60)
38.5
46
3.5
25
LS-9006D
LS-9030D
36
Measurement position
22.5
Measurement position
36
Measurement position
22.5
Measurement position
62
62
47
47
o point*2
nit*1
(85)
10
epth 8
unting
4 x 7
(Mounting
hole)
93
33.9
2 x M5
Effective depth 8
Fitting mounting
screw
(85)
89 0.5
180
240
260
316
(85)
R22
69.6
13
20
4 x M6
220.4
145 0.5
255
316
330
24
134
56
(85)
M5
Effective depth 8
Fitting mounting
screw
13.5
130
4 x 7
(Mounting
hole)
8
18
(85)
78
89 0.5
180
240
260
4 x M6
215
24
134
(85)
R22
4 x 7
(Mounting hole)
140
360
316
(85)
87
24
17
20
33.9
2 x M5
Effective depth 8
Fitting mounting
screw
200 0.5
180 0.5
147
R22
Zero point*2
R22
10
Effective depth 12
40
24
17
Zero point*2
Air purge unit*1
93
Effective depth 12
pth 12
R22
140
360
87
78
(85)
4 x 7
(Mounting hole)
200 0.5
0.5
147
18
Zero point*2
R22
R22
69.6
13
20
220.4
145 0.5
255
316
330
130
R22
4 x M6
*1 With air purge unit attached
Effective depth 12
*2 The zero point represents the intersection of the optical axis centre of
40
X-axis head and that of the Y-axis head.
13.5
20
215
LS-9000 Series
LK-G5000 Series
Unit: mm
Cable
CB-B3/CB-B10
7.6
Cable length: 3 m, 10 m 55
18
32
7.6
Cable length: 5 m, 10 m, 20 m
55
18
51
14
14 16.5
16.5
LK-G3000 Series
41
31
CB-B5E/CB-B10E/CB-B20E
14
14 16.5
(CB-B cable side)
13
LJ-V7000 Series
Controller
LS-9500/LS-9500P
LS-HA100
(70)
88.8
26.3
153.5
150.6
35.9
153
178
R2
35.9
R2
LJ-G Series
DIN-rail
mounting
position
DIN-rail
mounting
position
2
83.3
83.3
(70)
SI-F1000 Series
6
4 x M4
Depth 6.6
2 x M4
Depth 6.5
60
13.2
14.4
80
80
16.5
16.5
SI-F80R Series
LS-D1000
168
168
LT-9000 Series
Mounting bracket
183
7.9 36.6
75
4 x M4
Depth 8
123
138
18
147
143.6
Outer dimension
of mounting
bracket
138
75
Panel thickness:
1.2 to 4 mm
7.9
75
4 x M4
Depth 8
75
LS-9000 Series
183
Mounting screw
36.6
4 x M4
Depth 8
75
147
Panel thickness:
1.2 to 4 mm
143.6
Outer dimension
of mounting
bracket
138
7.9
75
4 x M4
Depth 8
75
TM-3000 Series
183
Mounting screw
LS-7000 Series
Mounting bracket
18
36.6
57
LS-7000 Series
LS-7000 Series
Features
igh repeatability 0.06 m
H
High speed 2400 samples/second
Maintenance-free design
http://www.keyence.com/
measure
Beam splitter
Target
HL-CCD for
measurement
Receiver
Controller
A/D
converter
Special diffusion
unit
Collimator lens
Transmitter
D.E.
processor
A/D
converter
Input/output
CPU
Frame memory
TFT liquid
crystal
monitor
Video output
High-durability
Measurement line
Outer-diameter
measurement
Gap
measurement
HL-CCD
Target Viewer
58
Green LED
LS-7000 Series
LK-G5000 Series
Applications
LK-G3000 Series
LJ-V7000 Series
LJ-G Series
SI-F1000 Series
SI-F80R Series
Lineup
Measuring head
Model
Wide range
Standard
LT-9000 Series
Type
Super fine
With monitor
No monitor
With monitor
No monitor
With monitor
No monitor
LS-7070M
LS-7070
LS-7030M
LS-7030
LS-7010M
LS-7010
Measuring range
Measurement accuracy
Repeatability
0.5 to 65 mm
0.3 to 30 mm
0.04 to 6 mm
3 m
2 m
0.5 m
0.2 m
0.15 m
0.06 m
LS-9000 Series
Appearance
LS-7000 Series
Controller
Type
Model
High-performance
Standard
LS-7601
LS-7001
Monitor display
Measurement indicator
TM-3000 Series
Appearance
59
LS-7000 Series
Function
Dual-head mode
Measuring the outer diameter of a metal pipe
This simple, special mode measures large diameter targets or wide sheet
materials. Complicated calculations or other settings are unnecessary.
Lead pitch
Threshold value
Threshold value
Measuring
range
30 mm
60
Air purge
unit
Air duct
LS-7000 Series
LK-G5000 Series
Specifications
Controller
Type
Model
Standard
LS-7601
LS-7001
2 (All types)
2 (LS-7070/LS-7030/LS-7010 only)
LK-G3000 Series
High-performance
Appearance
Analogue output
Connector I/O
BCD
mode*1
10 V x 2 outputs
Selectable from focus, area check, and difference check, NPN open-collector output x 2 outputs
BCD output
Measurement data output (Sign + 7 digits), OUT1/OUT2 selectable, NPN open-collector output
Non-voltage input
Video output
Measurement data output and control I/O, printer (Baud rate can be selected up to 115.200 bps)
Conforming to the NTSC system (RCA connector)
24 VDC 10%
SI-F80R Series
1.2 A max.
Enclosure rating
0.7 A max.
IP64 (Panel surface only)
Ambient temperature
0 to 40C
LT-9000 Series
Relative humidity
Weight
Function output
Synchronous input
Reset input
Auto-zero input
SI-F1000 Series
SUB
mode*1
LJ-G Series
Terminal block
Alarm output
LJ-V7000 Series
Display
Measurement display
35 to 85%, No condensation
Approx. 1010 g
Approx. 820 g
LS-9000 Series
LS-7000 Series
TM-3000 Series
61
LS-7000 Series
Specifications
Measuring head
Type
Monitor camera
Model
Large-diameter type
Provided
Not provided
Provided
Not provided
Provided
Not provided
LS-7070M
LS-7070
LS-7030M
LS-7030
LS-7010M
LS-7010
Appearance
Measuring range
Smallest detectable object
Transmitter/receiver distance
0.5 to 65 mm
0.3 to 30 mm
0.04 to 6 mm
0.5 mm
0.3 mm
0.04 mm
250 50 mm
160 40 mm
60 mm
Light source
Approx. 69 mm
Approx. 33 mm
3 m*1
2 m*3
0.5 m*5
0.2 m*2
0.15 m*4
0.06 m*6
No. of samples*7
Monitor function
2,400 samples/sec.
Provided
Not provided
Provided
Not provided
Provided
Not provided
IP64
Enclosure rating*8
Ambient temperature
0 to 50C
Relative humidity
Weight
Approx. 7 mm
35 to 85%, No condensation
Transmitter: Approx. 540 g,
Receiver: Approx. 770 g,
Base: Approx. 660 g
*1 The error when a moving rod 20 mm in diameter is measured in the measuring area of 20 x 40 mm.
*2 The value of 2 when the outer diameter of a rod 20 mm in diameter is measured at the centre of the measuring area while the number of averaging measurements is set to 512.
*3 The error when a moving rod 10 mm in diameter is measured in the measuring area of 10 x 20 mm.
*4 The value of 2 when the outer diameter of a rod 10 mm in diameter is measured at the centre of the measuring area while the number of averaging measurements is set to 512.
*5 The error when a moving rod 1.0 mm in diameter is measured in the measuring area of 2 x 4 mm.
*6 The value of 2 when the outer diameter of a rod 1.0 mm in diameter is measured at the centre of the measuring area while the number of averaging measurements is set to 512.
*7 1200 samples/sec. when the mutual interference prevention function is used.
*8 The connector section is excluded.
Cable length
LS-C3A
3m
64 MB or more
LS-C10A
10 m
LS-C30A
30 m
Memory capacity
Display
10 MB or more
LS-C3AM
3m
Excel 2010/2007/2003/2002/2000
LS-C10AM
10 m
LS-C30AM
30 m
OP-42182
1m
Windows7, Windows Vista, Windows XP, Windows7, Excel 2010/2007/2003/2002/2000 are registered trademarks of Microsoft Corporation in the U.S.A.
Pentium is a registered trademark of Intel Corporation.
OP-42183
3m
Interface
Excel
LS-S11
Applicable controller
LS-7001/LS-7601
Current consumption
110 VA max.
Ambient temperature
0 to 40C
Relative humidity
35 to 85%, No condensation
Weight
Approx. 1.7 kg
Options
62
LS-H1W
LS-S11
OP-79428
OP-79429
[For LS-7030(M)]
[For LS-7070(M)]
LS-7000 Series
Measuring heads
Unit: mm
LS-7070 (LS-7070M)
30
9
70
LS-7030 (LS-7030M)
4-M2.5,
effective depth: 5
4-5.5, through-hole
9.5 spot facing, d=5.5
Measuring
head
42
15
28
26
115
24 0.3 Measurement
position
Front surface
of a receiver
3-5.5
(Mounting hole)
Measuring area
130
250
31
72
3-5.5
(mounting hole)
Cable length: 260
23
31
312
56
27
160
27
214
50
71.5
5.5
19.5
3-5.5
mounting hole
Cable length: 200
80
60
30
35.50.2
5.5
3-5.5 (Mounting hole)
126.5
LJ-V7000 Series
18
10
4-M2.5
effective
depth: 3
45
13.5
Front surface
of a transmitter
Measuring area
109
71.5 60
104
24
55
Front surface
of a receiver
20
5.5
150
(34)*
56 0.3
15
22 0.2
Measurement position 55
13.5
92.5
15
38
114
65
5.5
* [Cable length: 500]
4-4.5 through-hole
24 8 spot facing, 4.5 (d)
21
Front surface
of a transmitter
92.5
4-M2.5 10
effective
depth: 3
45
6.5
65
104
30 9 4-M2.5,
effective
depth: 5
70
LK-G3000 Series
21
LK-G5000 Series
Dimensions
50
LS-7010 (LS-7010M)
4-4.5 through-hole
8 spot facing, 4.5 (d)
15 15
4-M4, through
36
46
400.2
32
46
56
4 18
SI-F1000 Series
(227)*
Measuring area
76
51
4
26
24
25 25
16 0.2
Measurement position
LJ-G Series
Measuring head
(30)*
(60) *
81
38
126
3.5
48
3.5
25
SI-F80R Series
Controllers
LS-7001
LS-7601
23.2
83
Effective
display area
25
(191)
Dimension of mounting bracket
175
60
Panel thickness:
1.2 to 4.0
Mounting screw
25
207
60
169 +1
0
Panel thickness:
1.2 to 4.0
Mounting screw
124 +1
0
200
Mounting bracket
60
Mounting bracket
60
LT-9000 Series
22.3
(191)
Dimension of mounting bracket
175
111
Effective display area
Panel cutout
130
130
(65)
(65)
LS-CxxA
LS-9000 Series
Cables
Cable between the controller and
sensor head
6.3
LS-S11
43
171
14.7
14
LS-7000 Series
196
60
OP-4218x
4.8
(35)
35.3
14
178
11.5
11
35
11.5
4.8
216
43.5
148
201
(100)
TM-3000 Series
35
35.3
11
63
TM-3000 Series
High-speed 2D
Optical Micrometer
TM-3000 Series
Features
ulti-point 2D measurement
M
Tilt correction for inline measurement
High-speed sampling of 5.5 ms
http://www.keyence.com/
measure
Example of measurement
Area
: Hole diameter
Perpendicular
distance
: Centre pitch
: Intersection point coordinates
Angle
: Radius
: Width
Intersection point
coordinates
Centre pitch
Width
Radius
Hole diameter
64
Measured image
Master image
: Angle
: Perpendicular distance
: Area
Position
correction area
Outer diameter
measurement
area
Position
correction area
Correction
Outer
diameter
measurement
area after
correction
TM-3000 Series
LK-G5000 Series
Applications
Unit: mm
Overall length 50.000
Point angle
15.0
LK-G3000 Series
Minimum
diameter
6.000
Outer
diameter
12.000
LJ-V7000 Series
Maximum
diameter 8.000
Thickness 3.500
Neck ring
height
26.000
Outer
thread
diameter
26.500
LJ-G Series
Roundness 0.020
Sensor head
SI-F1000 Series
Lineup
Controller
Type
Model
6 mm type
Appearance
Type
Model
Appearance
TM-006
Standard type
TM-040
65 mm type
TM-065
SI-F80R Series
40 mm type
TM-3001
TM-3001P
LT-9000 Series
Features
Diverse measurement modes
A flexible combination of 15 types of basic measurement modes, and 8 types of auxiliary measurement modes, can support a variety of inspections.
Angle
Angle
Centre
distance
Step
Intersection point
distance
LS-7000 Series
Minimum
diameter
LS-9000 Series
Outer diameter/Step/Width
Width
Distance between a point
and a straight line
Height / Position/Coordinates
Radius/Roundness
Pitch
Pitch
Radius
Height (Y direction)
TM-3000 Series
Roundness
Position (X direction)
65
TM-3000 Series
Specifications
Sensor head
Model
Measuring range
Smallest detectable object
Transmitter/receiver distance
Light source
TM-006
TM-040
TM-065
6 mm
40 mm
65 mm
0.04 mm
0.3 mm
0.5 mm
60 mm
180 mm
270 mm
Measurement accuracy
0.5 m*1
2 m*3
3 m*5
Repeatability
0.06 m*2
0.15 m*4
0.2 m*6
Enclosure rating *8
Ambient temperature
0 to 50C
Relative humidity
Material
Weight
Aluminium
Transmitter
Approx. 140g
Approx. 560g
Approx. 1280g
Receiver
Approx. 340g
Approx. 720g
Approx. 1460g
Base
Approx. 220g
Approx. 630g
Approx. 1500g
*1 In a measurement area of 2 mm 4 mm error when measuring width of KEYENCE standard object (glass calibration scale).
*2 Value of 2 measuring the width of KEYENCE standard object (glass calibration scale) in the centre of the measurement area, an average 16 times, average 1.3 mm line.
*3 In a measurement area of 10 mm 26 mm error when measuring width of KEYENCE standard object (glass calibration scale).
*4 Value of 2 measuring the width of KEYENCE standard object (glass calibration scale) in the centre of the measurement area, an average 16 times, average 8 mm line.
*5 Error when measuring width of KEYENCE standard object (glass calibration scale) in a measurement area of 20 mm 40 mm.
*6 Value of 2 measuring the width of KEYENCE standard object (glass calibration scale) in the centre of the measurement area, an average 16 times, average 14 mm line.
*7 When measurement area is minimum, others are initial settings
*8 Apart from connector component
Controller
Model
TM-3001
TM-3001P
Compatible
2 units max.
Input
terminal
block
Non-voltage input
Non-voltage input
Voltage input
Auto-zero 1 input
Reset input
Analogue voltage output
Total judgement output
Output
terminal
block
Non-voltage input
Voltage input
Non-voltage input
Voltage input
Error output
Process output
Trigger input enable output
Adjusted error output
Trigger input (for Head A)
Timing 2 input
Auto-zero 2 input
Expansion
connector
Judgement/Binary output*2
Strobe output
Trigger input enable output
Analogue RGB monitor output
RS-232C interface
USB interface
In conformity with USB Revision 2.0 HI-SPEED (USB 1.1 Full-SPEED compatible)
Ethernet interface
Memory card
Major functions
Ratings
Environmental
resistance
Current consumption
Ambient temperature
Relative humidity
0 to 50C
35 to 85% (No condensation)
Material
Polycarbonate
Weight
Approx. 1120g
66
TM-3000 Series
LK-G5000 Series
Support OS
Resolution of display
1GB min.
Interface *3
LK-G3000 Series
Memory capacity
LJ-V7000 Series
LJ-G Series
Controller
Sensor head
Sensor head
40mm type
TM-040
Sensor head
65mm type
TM-065
SI-F1000 Series
Sensor head
6 mm type
TM-006
Controller
TM-3001(P)
Controller lineup
TM-3001
TM-3001P
SI-F80R Series
Monitor
Console (Optional)
OP-82125
High-resolution monitor
CA-MP81
LS-9000 Series
Cable - connector
Cable between
head and controller
CB-A
(0.7, 2, 5, 10, 20, 30m)
Monitor stand
OP-42278
LT-9000 Series
Option
Transmitter to receiver
expansion cable
OP-87033 (1m)
OP-87034 (3m)
Cable between
controller - monitor
OP-66842 (3m)
Protective cover
OP-87035 (2 per pack)
(for TM-040)
OP-87036 (2 per pack)
(for TM-065)
Memory card
CA-SD4G (4GB)
CA-SD1G (1GB)
LS-7000 Series
Ethernet cable
OP-66843 (3 m)
TM-3000 Series
RS-232C
communication cable
OP-96368 (2.5m)
67
TM-3000 Series
Dimensions
Sensor heads
Unit: mm
TM-006
4-4.5 through-hole
8 spot facing, 4.5
4-M4 through-hole
15 15
24
36
25
160.2
(227)
3-4 (mounting hole)
56
76
51
46
25
Measurement
area
8
4
400.2
26
32
46 56
18
4
30
60
3.5
Cable length 190
48
2-M4 through-hole
3.5
38
25
126
Base 35
4.5
26
115
2-M4 through-hole
45
142
70
212
16
40
92
47
18
TM-040
Measurement area
48
4-4.5 cut
8 depth 4.5
25
25
48
4-M4
48
48
50
62
310.3
41.5
50
55
55
94.8
41.5
76.5
Measurement area
20
40
97.5 88
88
97.5
65.50.6
5
5
47
29
90
6.5
180
58.5
17.5
When minimum bend R
2.8
20
39.8
68
145
115
115
306
161
31
31
5.5
34
103
103.5
25
TM-3000 Series
LK-G5000 Series
Unit: mm
TM-065
4-M3 Depth 3.5
4-5.5 cut
9.5 depth 5.5
76
4-M4
Measurement
area
35
LK-G3000 Series
35
76
76
76
70
94
70
470.6
44
44
12
65
115
Measurement
area
97
30
65
130
115
LJ-V7000 Series
129.7
130
120
820.8
20
8.7
66
160
11.5
270
9.5
LJ-G Series
Cable
length: 175
19
When minimum bend R
33.5
66.5
4-M5 Depth 10
2-M4 effective depth 6
47
SI-F1000 Series
47
70
240
49.7
200
130
430
190
53
17
176
92.5
135.5
(15)
241.2
Outer dimension of mounting bracket
230
SI-F80R Series
LCD monitor
CA-MP81
TM-3001(P)
44
131.5
1.0 to 4.0
Panel thickness
Mounting bracket
151
Mounting screw
35.9
153
191.2
180
Outer
129.8
dimension of
Effective
mounting
display area
bracket
106
83.3
156
6
172.4
Effective display area
34
LS-9000 Series
65.3
LT-9000 Series
DIN rail
mounting
position
(60)
4 x M4 Depth:
6
Stand
OP-42278
230
LS-7000 Series
70
236
146
80
17
2-
66.5
TM-3000 Series
.5
R2
21.5
111
8
130
210
69
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