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Intuitive operation
Advanced capabilities
Touch panel
JEOL's renowned image quality can be achieved with the utmost ease. A touch panel
system with intuitive GUI will guide the operator through the imaging process with the level
of ease equal to a smartphone.
Automated functions
Auto controls include alignment, focus, stigmator, contrast/
brightness, and Full Auto. A single touch of Full Auto will initiate
the entire imaging process to present an image instantly.
Manual control
An item touched and selected will turn
green.
Hard, continued pressing of the buttons
for coarse control. Light, intermittent
tapping for fine control.
These control buttons combines the
ease of operation from the touch panel
and the familiar feel of the knobs.
Image search/
display
The Display image button is used to
search a library of images for a specific
image. Checking the Display image
button after selecting a desired image
will present a magnified view of the
image for closer examination.
Minimum
magnification
image
Checking the Low Mag Image will allow
the operator to view an image acquired
at the lowest magnification immediately
after the evacuation sequence was
completed. This is a useful feature when
examining the positioning of the sample.
Preset
magnification
Up to 6 magnifications are presettable.
Programming frequently used
magnifications will increase operating
efficiency. One of the buttons can be
used to preset the current magnification.
Stylish Mechanism
Intuitive operation
Advanced capabilities
HV
S
single touch can switch the mode between High
E IVacuum and Low Vacuum, allowing the
Observe Aoperator
H
to acquire a variety of images.
S EVI
H
High vacuum mode
S EVI
HV
B
EI
Secondary electron image in the High Vacuum mode can bring
HV
out clear images of samples that require high magnification
B
Low
vacuum
mode
image and
samples with
an uneven surface. Comparing SEI
EI
HV
images with BEI images allows for closer examination of the
B
H
surface structure.
EI
V
L
SE
The image mode
may also be switched to backscattered
V
Search
imageI windowH differences.
electron image to examine compositional
S EVI
LV
HV
SEI
LV
Print H V
HV
BEI
SEI
01 H V
HV
S
B
EI
EI
Retrieve imaging conditions
H
HV
S EVI
BEI
HV
LV
B
EI
Dual frame display
H
LV
B EVI
HV
LV
B
EI
Metrology
LV
HV
SEI
LV
HV
EDS
SEI
LV
HV
HV
SEI
SEI
HV
HV
BEI
S
EI
HV
HV
BEI
S
EI
Powerful aid in complicated H
analysis
HV
V
BEI
BEI
L
H
V
Qualitative/Quantitative
B EVI
analysis
LV
H
B EVI
L
L
2 m
1 m
5 m
10 m
LV
LV
2 m
H
B EVI
LV
H
S EVI
H
S EVI
H
B EVI
LV
H
B EVI
H
B EVI
LV
LV
H
B EVI
LV
H
S EVI
H
B EVI
LSHEVV
I
H
B EVI
10 m
Sample: Concrete
Backscattered electron image
Accelerating voltage 15 kV, magnification 200
H
S EVI
H
B EVI
LV
H
B EVI
H
S EVI
LV
LV
Metrology
H
B EVI
200 m
LV
H
S EVI
H
B EVI
H
S EVI
LV
H
S EVI
H
B EVI
LV
H
S EVI
H
B EVI
50 m
LV
EDS
500 m
Sample: Cookie
Accelerating voltage 15 kV, magnification 500
50 m
01
High vacuum
High vacuum
mode mode
Search image window
Powerful aid in complicated analysis
Search image window
Low vacuum
Low vacuum
mode mode
Qualitative/Quantitative
Print
analysis
Print Print
Dual frame display
Retrieve
imaging
conditions
Retrieve
imaging
conditions
Metrology
NeoScope can retrieve the imaging conditions of any
image that is saved in memory. The system will retrieve the
data when an image is selected and the Load observation
conditions button is pressed. It is a convenient feature for
routine operation.
Dual
Dual frame
displaydisplay
EDS frame
Metrology
Metrology
EDS EDS
Powerful aid in complicated analysis
Qualitative/Quantitative
analysis
Print
Retrieve imaging conditions
Compare
Metrology
01
Metrology
Measure
EDS
01
NeoScope incorporates a feature to measure the distance between 2 points. When the Scaler button is selected, the functions
needed for measurement will be assigned to the auto control buttons. The measured results can be saved in image and CSV
data files.
Qualitative/Quantitative
analysis
No.3
6.12 m
No.2
5.47 m
No.4
5.54 m
No.
1
2
3
4
Length
5.79
5.47
6.12
5.54
[unit]
um
um
um
um
Angle[deg]
44
12
89
41
EPrint
DS
01
Elemental
analysis
EDS
Metrology
Pressing the Analysis button will open the EDS view. EDS
supports qualitative/quantitative analysis, point analysis,
and mapping (elemental distribution).
EDS
Qualitative/Quantitative
analysis
Two buttons, Image and Spc, initiate analysis.
Pressing the Quantitative button after data acquisition will
display quantitative results.
Image
Element
CK
OK
Al K
Si K
Ca K
Fe K
Total
(ke V)
0.277
0.525
1.486
1.739
3.69
6.398
Spc
Point analysis
Mapping (elemental distribution)
Pressing the Map button will initiate elemental mapping of the image.
The mapped results will show 2 dimensional distribution of the
constituent elements.
Line analysis
Probe tracking
EDS
10
EDS
EDS
Qualitative/Quantitative
Mapping (elemental distribution)
analysis
An example of mapping sequence
Line
analysis
Probe tracking
EDS
Select MAP.
Select an image.
Select conditions.
Start analysis.
EDS
Select elements.
Point analysis
Verify conditions.
Line analysis
Point analysis
Probe tracking
1-003
1-001
1-002
Probe tracking
30 m
Line analysis
Probe tracking
EDS
Probe tracking is
designed to maintain a
stable analytical point
for prolonged operation.
EDS
EDS
11
01
View at varying angles
Tilting and Rotating Motor Drive Holder
The Tilting and rotating motor drive holder allows the operator to examine samples at different angles.
Observation of a tilted sample results in 3 dimensional information of the sample.
Startup
Tilt
T i lt
Selecting
High
Vacuum or
Low Vacuum
mode
Tilt
Tilt
45
45
Filament
Auto gun alignment
10 m
EDS analysis
Coating device
JCM-6000 character
Mr.Power Supply
Rokumaru kun
SEM
12
10 m
Easy maintenance
Quick
response
Tilting and Rotating
Motor Drive Holder
Startup
Intuitive
operation
Selecting High Vacuum
or Low Vacuum mode
Filament
Tilting and Rotating Motor Drive Holder
Advanced capabilities
Auto gun alignment
Startup
Low Vacuum.
Auto gundevice
alignment
Filament
Coating
Selecting
High Vacuum or Low Vacuum mode
Filament
EDS analysis
Auto
gun alignment
Coating device
EDS analysis
EDS analysis
Coating device
NeoScope incorporates a JEOL proprietary dry SD detector. The detector is always ready for analysis during SEM
imaging.
Coating device
New Laboratory
13
Peripherals
Startup
Easy
maintenance
Tilting andHigh
Rotating
MotororDrive
Selecting
Vacuum
LowHolder
Vacuum mode
Tilting
Startupand Rotating Motor Drive Holder
Filament
Quick response
Startup
Selecting
High Vacuum or Low Vacuum mode
Auto
gun alignment
Selecting
Filament High Vacuum or Low Vacuum mode
Intuitive operation
Filament
Autoanalysis
gun alignment
EDS
Advanced
Auto
gun alignment capabilities
Any new filament that is installed requires alignment to insure good image quality.
This alignment process is fully automated in NeoScope.
Coating device
EDS analysis
EDS analysis
Peripherals
Coating device
Coating device
Easy maintenance
Coating allows non conductive samples to be observed in the SEI mode under high vacuum. Comparing the SEI image with the
low vacuum BEI image allows for closer examination of the fine surface structure.
Quick response
Coating
Intuitive operation
20 m
14
20 m
Sample: Resin fracture surface, gold coated
High Vacuum mode, secondary electron image
Accelerating voltage: 15 kV; magnification: 1,500
Advanced capabilities
Specifications
Magnification
Optional accessories
Tilt rotation motorized holder
EDS
Accelerating voltage
Electron gun
Installation requirements
Power supply
integratinng wehnelt
Auto bias
Condenser lens
Objective lens
Electromagnetic lens
Auto magnification
correction
Bias current
Installation Room
Room temperature
15 to 30C
Specimen stage
Humidity
60% or less
Operation table
100 kg or more
Image memory
Pixels
RP: approximately 9 kg
Image processing
Pixel accumulation
(Width)
(Depth) (Height)
325 mm 490 mm 430 mm
stigmator, exposure
Metrology
File format
Computer
Monitor
Evacuation system
System composition
JCM-6000 base unit
PC & LCD
Rotary
Pump
Index of samples
Compound eye of an ant
Iron rust
Yogurt culture
Metal fracture surface
Butterfly scales
Coated paper
Mouse trachea
Aluminum alloy
Concrete
Filter paper (LV)
Dandelion puff (LV)
Cookie (LV)
Human hair
Star sand
Metal particles
Black ore (mineral)
Substrate
Spiderwort (LV)
Resin fracture surface (LV, HV)
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