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Case Study 1:

Designing the Multi-Vari-------Printed Circuit Board Drilling.

The Green Y was excessive debris from the printed circuit boards during dilling. A
Likert scale ( see Chapter 7) was used to measure the printed circuit board debris,
with the quantity of debris graded from one ( no debris) to 10 (maximun debris).
The various families of variation were the identified.
It was decided to run the esperiment for just one day in the expectatition
thah one day would be sufficient to capture at least 80 percent of the historic
variation.
Each day had three shifts.
There were 13 identical drilling machines.
Eight operators per shift manned the machines.
Each machine had three panels, stacked up, of printed circuit boards.
Each machine had 10 drill sizes.
These three major families of variation and the seven subfamilies are shown linked
together in the family tree of Figure 8-3. As the multi-vari investigation procedes,
the subfamily not contibuting to debris variation can be ruled out and crossed off.

Determining Sampling Frequency and Number of Units Required.

How long sgould a multi-vari study continue? As mentioned earlier, an empiricial


rule states that periodic samples should continue to be taken from the process until
al least 80 percent of historic variation or the specification tolerancewhichever is
lessis captured. If a lower figure, such as 50 or 60 percent, is used, the chance
of finding the Red X quirckly is reduced. Multi vari studies can range from one hour
or less, in total, up to four weeks or more in order to capture 80 percent or more of
the historic variation. Tipically, however, multi-vari studies need not las more tan
one to three days. How many samples are need? Inthe unit-to-unit family, the
simple size is three to five consecutive units.

In the within-unit family, the sampling can either be 100 percent in each subfamily
or a reasonable simple taken from each subfamily. The object is to keep the total
number of units requires to a pracatical upper limit, while allowing enough
opportunities for the Red X to be captured.
For instance, in the printed circuit board example, if we selected three as the
simple size unit-to-unit variation an tokk such samples from each og 10 machines,
four machine heads, eight operators, and 10 drill sizes, the total number of units
requires each hour would be 3 x 10 x 4 x 8 x 10, or 9,600 units each hour. Multiply
that by three hours and three shifts, and the total would be an unwieldy 86,400
units. So a decisin can be made to simple just three of the 10 machineshistorically the worst, the best, and one in between. Similarly, only three
operators, three drill sizes, and two machine heads could be selected. This would
reduce the total number of units per hour to 3 x 3 x 3 x 3 x 2, or 162 units. Multiply

that by three shifts and three samples per shift, and the total number of units
required would be only 1,458 units. These smaller quantities in each subfamily are
shown in Figure 8-3.
An alternative would be to start with just one shift. If 80 percent or more of the
historic variation is captured, the second and third shifts could be deleted, reducing
the total number of units to just 162.
We have deliberately chosen a case study with many families of variation and
many units within each family. The absolute mnimum for a multi-vari would be
three units and three time periods, or a total of nine for the whole experiment. Very
rarely would the total number of units exceed 100. Table 8-A and B depicts tables
for gathering data, by families of variation, with Table 8-1B being a subset of Table
8-1. Such a table can easily be given to an operator or inspector to log.

Workshop Exercise 1: Semiconductor Wafer Multi-Vari Plan.

On semiconductor wafer (containing several hundred chips or dies), thickness


measuresments were made to determine which families of variation contributed the
most to thickness differences in a multi-vari study.
Th Green Y es variation in thickness. Asume that the accuracy of the measuring
instrument is more tan six tines the specified thickness tolerance. Desing a multivari plan to address the following questions from aspects of the plan listec below.
1. Identifity the major families of variation (i.e; time-to-time, unit-to-unit, withinunit) for each of the following eight aspects of the plan.
1. On each wafer, five dice were measured
(north, south, east, west, and center).
2. Three wafers were sampled from each
batch exiting the deposition process.
3. Wafers were selected from three locations
In the batch process: left, center, and right
Locations in the chamber.
4. Two deposition chambers were used.
5. Each batch took two hours, with four
batches per shift.
6. Samples were taken from two consecutive
batches on shift 1 and shift 2.
7. Sampling was done on Monday, Tuesday,
and Wednesday.
8. Wafers were sampled over the three
Consecutive weeks.

(The answres to each workshop exercise are given immediately folowing the
exercise throughout the text).
2. Draw a family tree.
3. How many wafers should the total multi-vari run include?
4. What reductions could de made inthe total samples of waters required if
previous history indicates few significant variations occurred from week to
week, day to day, or shift to shift.

Answers

Questions 1
1. Five dice on each wafer N, S, E, W, ans Center
2. Three wafers from each bath
3. Three locations in each batch
4. Two deposition chambers
5. Four batches per shift
6. Batches from shift 1 and 2
7. Sampling on Monday, Tuesday, and
Wednesday.
8. Samples from three consecutive weeks

Whithin-unit
Unit-to-unit
Whithin-unit
Whithin-unit
Unit-to-unit
Time-to-time
Time to-time
Time-to-time

Questions 2
See figure 8-4.
Question 3

Weeks

Day/s
per week

Shifts per Batches


day

Wafers
per batch

Depositio Locations
n
per
chamber
batch.
x
3
x
2 x
4 x
3 x
2
x
3
= 1,296; numbers of readings= 1,296 x (5 dice per wafer) = 6.480

Figure 8-4. Multi-Vari Family Tree


Green Y: Wafer thickness
variation
Time-to-time:
Depositions
Within-unit:
personal
chambers
positional(2)
Shifts
Days
Weeks
per
perday
week
(3)
(2)

Wafers
Batchers
Unit-to-unit:
per batch
per

Position
Locations
in each
per
wafers
batch (3)
(5)

Questions 4
If the time variations (week, day, shift) were minima,, the total number of
wafers would be: 1,296/(3 x 3 x 2)= 1,296/18 =72 and the number of
readings would be: 72 x 5 (i.e: 5 dice) =360.

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